JP2008144918A - Squeeze air bearing, and positioning guide device using it - Google Patents

Squeeze air bearing, and positioning guide device using it Download PDF

Info

Publication number
JP2008144918A
JP2008144918A JP2006335012A JP2006335012A JP2008144918A JP 2008144918 A JP2008144918 A JP 2008144918A JP 2006335012 A JP2006335012 A JP 2006335012A JP 2006335012 A JP2006335012 A JP 2006335012A JP 2008144918 A JP2008144918 A JP 2008144918A
Authority
JP
Japan
Prior art keywords
air bearing
vibrator
vibration
squeeze air
sliding portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006335012A
Other languages
Japanese (ja)
Inventor
Toshiyuki Ishibashi
利之 石橋
Hironobu Yoshitake
博信 吉武
Kenichi Murata
健一 村田
Yukio Tsutsui
筒井　　幸雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2006335012A priority Critical patent/JP2008144918A/en
Publication of JP2008144918A publication Critical patent/JP2008144918A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0607—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings
    • F16C32/0611—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings by means of vibrations

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small and inexpensive squeeze air bearing requiring no complicated adjustment, having a large lifting amount of a sliding part, and carrying out stable support without contact by a squeeze air film, and also to provide a positioning guide device using it. <P>SOLUTION: The squeeze air bearing is provided with: a flat plate like attachment part 7 for attaching a movable body; the slanted sliding part 2 vibrated in a vibrating direction with respect to the attachment part 7 by a vibrator 1 composed of a piezoelectric device; and a substantially V-shaped guide face 3 facing a vibration face 2a of the sliding part 2 via a very small gap 4. It supports the sliding part 2 without contact by the squeeze air film. The vibrator 1 is composed singularly, two vibration faces 2a of the sliding part 2 are provided, and the vibration faces 2a of the sliding part 2 are respectively provided in symmetrical positions with respect to an axial direction in which the vibrator 1 is arranged. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えば、半導体製造装置や工作機のテーブル送りに使用されると共に、高速な動作と高精度な位置決め性能が要求される位置決め案内装置に好適な、非接触の空気軸受、特にスクイーズ空気軸受およびそれを用いた位置決め案内装置に関する。   The present invention is, for example, a non-contact air bearing, particularly squeezed air, which is suitable for a positioning guide device which is used for, for example, a table feed of a semiconductor manufacturing apparatus or a machine tool, and which requires high-speed operation and high-precision positioning performance. The present invention relates to a bearing and a positioning guide device using the same.

従来、半導体製造装置や工作機のテーブル送りに適用されると共に、高速な動作と高精度な位置決め性能が要求される位置決め案内装置には、機構の低摩擦化のために非接触軸受が用いられている。
非接触軸受には、例えば、磁気軸受、静圧空気軸受、動圧空気軸受などがあるが、超寿命、低騒音、高精度回転制御、メンテナンスフリーといった特徴がある。
磁気軸受は、永久磁石または電磁石の吸引力を利用し、回転軸を空間に支持する軸受であるが、永久磁石単体では成立しないため、永久磁石と電磁石の複合使用または電磁石の単体使用となり、電磁石制御のための位置センサ、その信号処理回路、電磁石のための増幅器などが必要となり、装置が複雑・大型・高価であった。
また、静圧空気軸受は、圧縮空気をガイドに対して噴出させ、発生した静圧によって浮上させる軸受であるが、圧縮空気を供給するコンプレッサが必須となり、圧縮空気の配管が邪魔であった。
さらに、動圧空気軸受は、軸の回転に伴って周辺の空気を軸受隙間へ誘いこみ、圧力を上昇させて回転軸を支持する軸受だが、圧縮空気は不要であるものの、軸の低速回転時や静止時には非接触支持機能を失ってしまう。 Conventionally, non-contact bearings are used for positioning guide devices that are applied to semiconductor manufacturing equipment and machine tool table feeds, and require high-speed operation and high-precision positioning performance. ing.
Non-contact bearings include, for example, a magnetic bearing, a static pressure air bearing, a dynamic pressure air bearing, and the like, and have features such as a long life, low noise, high-precision rotation control, and maintenance-free.
A magnetic bearing is a bearing that uses the attractive force of a permanent magnet or an electromagnet to support the rotating shaft in space. However, since it cannot be established with a single permanent magnet, it can be combined with a permanent magnet and an electromagnet or with a single electromagnet. A position sensor for control, its signal processing circuit, an amplifier for an electromagnet, and the like are required, and the apparatus is complicated, large, and expensive.
The static pressure air bearing is a bearing that jets compressed air to the guide and floats by the generated static pressure. However, a compressor that supplies the compressed air is essential, and the compressed air piping is obstructive.
In addition, the dynamic pressure air bearing is a bearing that supports the rotating shaft by drawing the ambient air into the bearing gap as the shaft rotates, but the pressure is increased, but compressed air is not required, but when the shaft rotates at a low speed When it is stationary, it loses its non-contact support function.

上記のような軸受に対して、対向する二面間の相対的な垂直方向の高周波の振動により発生するスクイーズ空気膜を利用して非接触に移動体を支持させるスクイーズ空気軸受が知られている。スクイーズ空気軸受は、振動子として例えば圧電素子を採用することができるが、他には圧電素子を駆動するアンプが必要なだけで、磁気軸受と異なり装置は複雑にはならない。また、静圧空気軸受と異なりコンプレッサや圧縮空気の配管が不要で、動圧空気軸受と異なり、低速回転時や静止時にも非接触の支持機能を失わないという利点がある（例えば、特許文献１参照）。
図６は第１従来技術を示すスクイーズ空気軸受の正断面図である。
図６において、１は振動子、２は摺動部、２ａは振動面、３は案内面、４は隙間、６は振動方向であり、振動子１により摺動部２の振動面２ａを振動させることにより、案内面３との間の微小な隙間４に空気膜が成形され、非接触の支持機能を発生する。これは、気体が粘性を有するため、振動子１の振動周波数が高いと隙間４の空気膜の周辺部の空気の出入が拘束され、あたかも密閉した圧縮性流体に高周波の体積変化を起こさせたと同様になる。そのとき振動子１の周波数が高いと、慣性力のため追従できずほとんど振動しなくなり、変位に対する圧力発生が非線形となり、平均的に正圧が得られ、非接触に案内面３の上で支持される。 A squeeze air bearing that supports a moving body in a non-contact manner by using a squeeze air film generated by a high-frequency vibration in the vertical direction between two opposing surfaces is known. . A squeeze air bearing can employ, for example, a piezoelectric element as a vibrator, but only requires an amplifier for driving the piezoelectric element, and unlike a magnetic bearing, the apparatus is not complicated. Further, unlike a static pressure air bearing, unlike a static pressure air bearing, there is no need for a compressor or compressed air piping, and unlike a dynamic pressure air bearing, there is an advantage that a non-contact support function is not lost even during low-speed rotation or stationary (for example, Patent Document 1). reference).
FIG. 6 is a front sectional view of a squeeze air bearing showing the first prior art.
In FIG. 6, 1 is a vibrator, 2 is a sliding part, 2a is a vibration surface, 3 is a guide surface, 4 is a gap, 6 is a vibration direction, and the vibrator 1 vibrates the vibration surface 2a of the sliding part 2. By doing so, an air film is formed in the minute gap 4 between the guide surface 3 and a non-contact support function is generated. This is because the gas has a viscosity, and if the vibration frequency of the vibrator 1 is high, the flow of air around the air film in the gap 4 is restrained, as if a high-frequency volume change was caused in the sealed compressible fluid. It will be the same. At that time, if the frequency of the vibrator 1 is high, it cannot follow due to inertial force and hardly vibrates, pressure generation with respect to displacement becomes nonlinear, a positive pressure is obtained on average, and is supported on the guide surface 3 in a non-contact manner. Is done.

振動面が複数あるスクイーズ空気軸受としては、Ｖ平面案内式の位置決め案内装置に圧電素子を適用したものがあり、案内機構として高精度であると同時にその周辺機器および制御機構を簡略化できる（例えば、特許文献２参照）。   As a squeeze air bearing having a plurality of vibration surfaces, there is one in which a piezoelectric element is applied to a V-plane guide type positioning guide device, and the peripheral device and the control mechanism can be simplified while being highly accurate as a guide mechanism (for example, , See Patent Document 2).

図７および図８は、それぞれ第２従来技術、第３従来技術を示すＶ平面案内式の位置決め案内装置に適用されるスクイーズ空気軸受部の正断面図である。
図７および図８において、１は振動子、２は摺動部、２ａは振動面、３は案内面、４は隙間、６は振動方向である。図７は、Ｖ字形状の案内面３に対向させて、２個の振動子１および振動面２ａを配置する。図８においては、Ｖ字形状の案内面３に対向させて、Ｖ字形状の摺動部２を配置し、１個の振動子１で摺動部２の振動面２を振動させる。
特開昭６２−２５５６１３号公報（第１−３頁、図１、図５、図６） 特許２６６９６４６号公報（第１−４頁、図２） 7 and 8 are front sectional views of a squeeze air bearing portion applied to a V-plane guide type positioning guide device showing the second and third prior arts, respectively.
7 and 8, 1 is a vibrator, 2 is a sliding portion, 2a is a vibration surface, 3 is a guide surface, 4 is a gap, and 6 is a vibration direction. In FIG. 7, two vibrators 1 and a vibration surface 2 a are arranged so as to face the V-shaped guide surface 3. In FIG. 8, a V-shaped sliding portion 2 is disposed so as to face the V-shaped guide surface 3, and the vibration surface 2 of the sliding portion 2 is vibrated by one vibrator 1.
Japanese Patent Application Laid-Open No. Sho 62-255613 (Page 1-3, FIG. 1, FIG. 5, FIG. 6) Japanese Patent No. 2669646 (page 1-4, FIG. 2)

ところが、第２従来技術のＶ字平面案内式の位置決め案内装置に用いるスクイーズ空気軸受の構成では、Ｖ字形状の摺動部に対向した２個の振動子が必要であるため、高価であると共に、振動子を摺動部に取り付ける際に位置精度にバラツキが生じたり、あるいは振動子の特性自体にバラツキが生じることによって、２個の振動子の浮上面のバランスがとれなくなる。その結果、該空気軸受の摺動部の浮上が不安定になるという問題があった。加えて、機械的な構造上の制約（省スペースなど）から、薄型の振動子しか採用できないので、振幅量が小さくなり、摺動部の浮上量が小さく、スクイーズ空気膜により非接触に安定した支持を行うことができないという問題点があった。
また、第３従来技術のＶ字平面案内式の案内機構装置に用いるスクイーズ空気軸受の構成では、図８に示すように、１個の振動子が対向する案内面に対して直角方向にしか振動させることができないので、振動子の発生エネルギーを十分に利用できず、摺動部の浮上量が小さい上、第1従来技術と同様にスクイーズ空気膜により非接触に安定した支持を行うことができないという問題点があった。 However, the configuration of the squeeze air bearing used in the V-shaped planar guide type positioning guide device of the second prior art requires two vibrators facing the V-shaped sliding portion, and is therefore expensive. When the vibrator is attached to the sliding portion, the positional accuracy varies, or the characteristics of the vibrator itself vary, whereby the air bearing surfaces of the two vibrators cannot be balanced. As a result, there is a problem that the floating of the sliding portion of the air bearing becomes unstable. In addition, due to mechanical structural restrictions (space saving, etc.), only thin vibrators can be used, so the amount of amplitude is small, the flying height of the sliding part is small, and the squeeze air film is stable in a non-contact manner. There was a problem that support was not possible.
Further, in the configuration of the squeeze air bearing used in the V-plane guide type guide mechanism device of the third prior art, as shown in FIG. 8, one vibrator vibrates only in a direction perpendicular to the opposing guide surface. Therefore, the generated energy of the vibrator cannot be fully utilized, the flying height of the sliding part is small, and the squeezed air film cannot be stably supported in a non-contact manner as in the first prior art. There was a problem.

本発明はこのような問題点を鑑みてなされたものであり、例えば弾性ヒンジを用いることにより、１個の振動子で複数の振動面を、案内面に対し垂直に振動させることにより、摺動部の浮上量が大きく、スクイーズ空気膜により非接触に安定した支持を行うことができると共に、小型かつ安価で、複雑な調整が不要な高精度のスクイーズ空気軸受およびそれを用いた位置決め案内装置を提供することを目的とする。   The present invention has been made in view of such problems. For example, by using an elastic hinge, a plurality of vibration surfaces are vibrated perpendicularly to a guide surface by a single vibrator, thereby sliding. A high-precision squeeze air bearing that is capable of stable support in a non-contact manner by a squeeze air film and that is small and inexpensive, and that does not require complicated adjustment, and a positioning guide device using the same The purpose is to provide.

上記問題を解決するため、本発明は次のように構成したものである。
請求項１記載の発明は、スクイーズ空気軸受に係わるものであって、移動体を取り付けるための取付け部と、前記取付け部に対して、振動子によって振動方向に振動させる摺動部と、前記摺動部の振動面に微小な隙間を介して対向させた案内面と、を具備し、スクイーズ空気膜によって非接触に前記摺動部を支持させるスクイーズ空気軸受において、前記振動子が１個で構成されると共に、前記摺動部の振動面が少なくとも２つ設けられたものである。
また、請求項２記載の発明は、請求項１記載のスクイーズ空気軸受において、前記摺動部の振動面は、前記振動子が配置される軸線方向に対して左右対称な位置にそれぞれ設けられたものである。
また、請求項３記載の発明は、請求項１または２に記載のスクイーズ空気軸受において、前記取付け部と前記摺動部の振動面の間もしくは前記振動子と前記摺動部の振動面の間に弾性ヒンジを設けると共に、前記１個の振動子で前記少なくとも２つ設けた振動面を振動させるものである。
また、請求項４記載の発明は、請求項３記載のスクイーズ空気軸受において、前記弾性ヒンジが円弧状の切欠を有するものである。
また、請求項５記載の発明は、請求項１または３記載のスクイーズ空気軸受において、前記振動子は、圧電素子または静電電極から構成されるものである。
また、請求項６記載の発明は、請求項３または４記載のスクイーズ空気軸受において、前記弾性ヒンジの数を前記摺動部の振動面の数よりも多くし、前記振動子による振動変位を拡大させるようにしたものである。
また、請求項７記載の発明は、位置決め案内装置に係わるものであって、請求項１〜６の何れか１項に記載のスクイーズ空気軸受で構成される案内機構を備えたものである。 In order to solve the above problems, the present invention is configured as follows.
The invention according to claim 1 relates to a squeeze air bearing, an attachment portion for attaching a moving body, a sliding portion that vibrates in a vibration direction by a vibrator with respect to the attachment portion, and the slide. A squeeze air bearing for supporting the sliding part in a non-contact manner by a squeeze air film. In addition, at least two vibration surfaces of the sliding portion are provided.
According to a second aspect of the present invention, in the squeeze air bearing according to the first aspect, the vibration surface of the sliding portion is provided at a position symmetrical with respect to the axial direction in which the vibrator is disposed. Is.
The invention according to claim 3 is the squeeze air bearing according to claim 1 or 2, wherein the mounting portion and the vibration surface of the sliding portion or between the vibrator and the vibration surface of the sliding portion. In addition to providing an elastic hinge, the one vibrator vibrates the at least two vibrating surfaces.
According to a fourth aspect of the present invention, in the squeeze air bearing according to the third aspect, the elastic hinge has an arc-shaped notch.
According to a fifth aspect of the present invention, in the squeeze air bearing according to the first or third aspect, the vibrator is composed of a piezoelectric element or an electrostatic electrode.
According to a sixth aspect of the present invention, in the squeeze air bearing according to the third or fourth aspect, the number of the elastic hinges is larger than the number of vibration surfaces of the sliding portion, and the vibration displacement by the vibrator is expanded. It is made to let you.
A seventh aspect of the present invention relates to a positioning guide device, and includes a guide mechanism including the squeeze air bearing according to any one of the first to sixth aspects.

請求項１〜３に記載のスクイーズ空気軸受によると、１個の振動子でふたつ以上の振動面を振動させることにより、振動子の特性バラツキはなくなり、振動子および振動面の位置バラツキについても機械加工精度により無視できるレベルにまで低減できる。
また、請求項１または５記載のスクイーズ空気軸受によると、振動子の取り付けや種類の制約がないので、長尺の振動子を採用することができ、振動の振幅量を高めることができ、浮上量を高めることができる。その際、振動面は案内面に垂直に振動するので、振動子の発生エネルギーを無駄なく利用できるので、浮上量を高めることができる。
さらに、請求項３、４、６記載のスクイーズ空気軸受によると、弾性ヒンジの構成を工夫することにより、振幅量を増幅することもでき、振動子の振幅量を変えることなく、浮上量を高めることができる。
また、請求項７の位置決め案内装置によると、大がかりな付帯設備が不要で、小型で複雑な調整が不要な高精度案内を行うことができる。 According to the squeeze air bearing according to any one of claims 1 to 3, when one or more vibrators vibrate two or more vibration surfaces, the characteristic variation of the vibrators is eliminated, and the position variation of the vibrator and the vibration surface is also a machine. It can be reduced to a level that can be ignored by machining accuracy.
Further, according to the squeeze air bearing according to claim 1 or 5, since there is no restriction on the attachment or type of the vibrator, a long vibrator can be adopted, the amount of vibration amplitude can be increased, and The amount can be increased. At that time, since the vibration surface vibrates perpendicularly to the guide surface, the energy generated by the vibrator can be used without waste, so that the flying height can be increased.
Furthermore, according to the squeeze air bearings according to claims 3, 4, and 6, the amplitude amount can be amplified by devising the configuration of the elastic hinge, and the flying height is increased without changing the amplitude amount of the vibrator. be able to.
Further, according to the positioning guide device of the seventh aspect, a large-scale incidental facility is unnecessary, and high-precision guidance that is small and does not require complicated adjustment can be performed.

以下、本発明の実施の形態について図を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の第１実施例を示すスクイーズ空気軸受の側断面図である。
図１において、１は振動子、２は摺動部、２ａは振動面、３は案内面、４は振動面２ａと案内面３の間の隙間、５は弾性ヒンジ、６は振動方向、７は取付け部である。
本発明の特徴は以下のとおりである。
すなわち、移動体を取り付けるための平板状の取付け部７と、該取付け部７に対して、圧電素子で構成される振動子１によって振動方向に振動させる傾斜した摺動部２と、該摺動部２の振動面２ａに微小な隙間４を介して対向させた略Ｖ字形状の案内面３と、を具備し、スクイーズ空気膜によって非接触に該摺動部２を支持させるスクイーズ空気軸受において、振動子１が１個で構成されると共に、該摺動部２の振動面２ａが２つ設けられた点、また、摺動部２の振動面２ａは、振動子１が配置される軸線方向に対して左右対称な位置にそれぞれ設けられたものとなっている。
また、取付け部７と摺動部２の振動面２ａの間もしくは振動子１と摺動部２の振動面２ａの間に円弧状の切欠を有する弾性ヒンジ５を設けると共に、１個の振動子１で２つ設けた振動面２ａを案内面３の方向に向かって垂直に振動させるようになっている。 FIG. 1 is a sectional side view of a squeeze air bearing showing a first embodiment of the present invention.
In FIG. 1, 1 is a vibrator, 2 is a sliding portion, 2a is a vibration surface, 3 is a guide surface, 4 is a gap between the vibration surface 2a and the guide surface 3, 5 is an elastic hinge, 6 is a vibration direction, 7 Is a mounting part.
The features of the present invention are as follows.
That is, a flat plate-like mounting portion 7 for mounting the moving body, an inclined sliding portion 2 that vibrates in the vibration direction by the vibrator 1 composed of a piezoelectric element with respect to the mounting portion 7, and the sliding In a squeeze air bearing comprising a substantially V-shaped guide surface 3 opposed to the vibration surface 2a of the part 2 through a minute gap 4, and supporting the sliding part 2 in a non-contact manner by a squeeze air film The vibrator 1 is composed of one piece, and two vibration surfaces 2a of the sliding portion 2 are provided. The vibration surface 2a of the sliding portion 2 is an axis line on which the vibrator 1 is disposed. They are respectively provided at positions symmetrical with respect to the direction.
In addition, an elastic hinge 5 having an arcuate notch is provided between the attachment portion 7 and the vibration surface 2a of the sliding portion 2 or between the vibrator 1 and the vibration surface 2a of the sliding portion 2, and one vibrator The two vibration surfaces 2 a provided at 1 are caused to vibrate vertically in the direction of the guide surface 3.

次に動作について説明する。
図１において、振動子１の振動周波数が高いと、摺動部２と案内面３の間の隙間４中の空気は粘性を有するので周辺の空気の出入りは拘束され、あたかも密閉した圧縮性流体に高周波の体積変化を起こさせたと同様になり、変位に対する圧力発生が非線形となり、平均的に正圧が得られ、非接触に支持される。 Next, the operation will be described.
In FIG. 1, when the vibration frequency of the vibrator 1 is high, the air in the gap 4 between the sliding portion 2 and the guide surface 3 has viscosity, so that the surrounding air is restricted from entering and exiting, and it is as if the compressed fluid is sealed. In the same manner as when a high-frequency volume change is caused, the pressure generation with respect to the displacement becomes non-linear, and a positive pressure is obtained on average and supported in a non-contact manner.

したがって、本発明の第１実施例は、摺動部２と案内面３とで構成されるＶ平面案内式のスクイーズ空気軸受において、弾性ヒンジ５を用いることにより、１個の振動子１で２つの振動面２ａを案内面３の方向に向かって垂直に直接振動させるようにしたので、摺動部２の浮上量を大きくでき、スクイーズ空気膜により非接触に安定した支持を、複雑な調整なしに行うことができる。   Therefore, in the first embodiment of the present invention, in the V-plane guide type squeeze air bearing constituted by the sliding portion 2 and the guide surface 3, the elastic hinge 5 is used so that two vibrators 1 can be used. Since the two vibration surfaces 2a are directly vibrated perpendicularly toward the guide surface 3, the floating amount of the sliding portion 2 can be increased, and the non-contact stable support can be achieved by the squeeze air film without complicated adjustment. Can be done.

次に本発明の第２実施例を説明する。
図３は、本発明の第２実施例を示すスクイーズ空気軸受の正断面図である。
図３において、１は振動子、２は摺動部、２ａは振動面、３は案内面、４は振動面２ａと案内面３の間の隙間、５は弾性ヒンジ、６は振動方向、７は取付け部である。
第２実施例が第１実施例と異なる点は、弾性ヒンジ５の数を摺動部２の振動面２ａの数よりも多くし、振動子による振動変位を拡大させるようにした点である。 Next, a second embodiment of the present invention will be described.
FIG. 3 is a front sectional view of a squeeze air bearing showing a second embodiment of the present invention.
In FIG. 3, 1 is a vibrator, 2 is a sliding portion, 2a is a vibration surface, 3 is a guide surface, 4 is a gap between the vibration surface 2a and the guide surface 3, 5 is an elastic hinge, 6 is a vibration direction, 7 Is a mounting part.
The second embodiment is different from the first embodiment in that the number of elastic hinges 5 is larger than the number of vibration surfaces 2a of the sliding portion 2 to increase the vibration displacement caused by the vibrator.

次に動作について説明する。
図３において、振動子１を振動させると、振動子１の振動は取付け部７を介して、取り付け部７と摺動部２の境界付近に設けた弾性ヒンジ５に伝わった後、その他複数設けた弾性ヒンジによって、取り付け部７と摺動部２の境界付近から振動面２ａに向かって振動の変位が徐々に拡大される。その結果、摺動部２と案内面３の間の隙間４中の空気は粘性を有するので周辺の空気の出入りは拘束され、あたかも密閉した圧縮性流体に高周波の体積変化を起こさせたと同様になり、変位に対する圧力発生が非線形となり、平均的に正圧が得られ、非接触に支持される。 Next, the operation will be described.
In FIG. 3, when the vibrator 1 is vibrated, the vibration of the vibrator 1 is transmitted to the elastic hinge 5 provided in the vicinity of the boundary between the attachment portion 7 and the sliding portion 2 via the attachment portion 7, and a plurality of others are provided. Due to the elastic hinge, the displacement of vibration is gradually enlarged from the vicinity of the boundary between the attachment portion 7 and the sliding portion 2 toward the vibration surface 2a. As a result, the air in the gap 4 between the sliding portion 2 and the guide surface 3 has viscosity, so that the surrounding air is restricted from entering and exiting, as if a high-frequency volume change was caused in the sealed compressible fluid. Thus, the pressure generation with respect to the displacement becomes nonlinear, a positive pressure is obtained on average, and is supported in a non-contact manner.

したがって、本発明の第２実施例は、弾性ヒンジ５の数を摺動部２の振動面２ａの数よりも多くすることにより、摺動部２の浮上量をよち大きくでき、スクイーズ空気膜により非接触に安定した支持を、複雑な調整なしに行うことができる。   Therefore, in the second embodiment of the present invention, by increasing the number of elastic hinges 5 than the number of vibration surfaces 2a of the sliding portion 2, the flying height of the sliding portion 2 can be increased, and the squeeze air film Thus, stable and non-contact support can be performed without complicated adjustment.

次に本発明の第３実施例を説明する。
図４は、第１実施例および第２実施例にて説明したスクイーズ空気軸受を位置決め案内装置として用いた、本発明の第３実施例における位置決め案内装置の正断面図である。また、図５は、第３実施例の変形例を示す位置決め案内装置の正断面図である。
図４において、３は固定側部材を構成する案内面、９１はＶ字空気軸受、８は可動側部材、９２は平面空気軸受である。なお、動作の説明については省略する、
したがって、本発明の第３実施例は、スクイーズ空気軸受２個を、移動体を搭載する１個の可動部側部材と一体化して位置決め案内装置を構成することにより、大がかりな付帯設備が不要で、小型で複雑な調整が不要な高精度の案内機構装置が実現することができる。
なお、図４の構成例に替えて、図５に示すように、本発明のＶ字空気軸受９１と従来技術による平面空気軸受９２を組み合わせた構成にしても構わない。 Next, a third embodiment of the present invention will be described.
FIG. 4 is a front sectional view of a positioning guide device in a third embodiment of the present invention using the squeeze air bearing described in the first embodiment and the second embodiment as a positioning guide device. FIG. 5 is a front sectional view of a positioning guide device showing a modification of the third embodiment.
In FIG. 4, 3 is a guide surface constituting the fixed side member, 91 is a V-shaped air bearing, 8 is a movable side member, and 92 is a flat air bearing. The explanation of the operation is omitted.
Therefore, the third embodiment of the present invention eliminates the need for large-scale incidental equipment by integrating two squeeze air bearings with one movable part side member on which a moving body is mounted to constitute a positioning guide device. Thus, a high-precision guide mechanism device that is small and does not require complicated adjustment can be realized.
Instead of the configuration example of FIG. 4, as shown in FIG. 5, a configuration in which a V-shaped air bearing 91 of the present invention and a planar air bearing 92 according to the prior art may be combined.

なお、以上の本発明の実施例の説明では、振動面２ａを振動させる手段として圧電素子からなら振動子を用いたが、例えば静電電極などでも同様の効果が得られており、その種類や方式に限定されるものではない。
また、１個の振動子でふたつ以上の振動面を振動させるための機構として弾性ヒンジ５を用いた例を示したが、本発明では１個の振動子でふたつ以上の振動面を振動させることができれば良く、その種類や方式に限定されるものではない。
また、弾性ヒンジ５を有する摺動部の構成例を第１、第２実施例で示したが、摺動部を位置決め案内装置に取り付けた際に移動体の負荷容量が大きい場合、摺動部の形状によっては負荷を支持するための強度が不足することになり、そのような場合は、図２に示す第１実施例のスクイーズ空気軸受の変形例のごとく、弾性ヒンジの数を変えない範囲で、摺動部の形状を太くして強度を上げるようにしても構わない。 In the above description of the embodiments of the present invention, a vibrator is used as a means for vibrating the vibration surface 2a. However, the same effect can be obtained with, for example, an electrostatic electrode. It is not limited to the method.
In addition, although an example in which the elastic hinge 5 is used as a mechanism for vibrating two or more vibration surfaces with one vibrator has been shown, in the present invention, two or more vibration surfaces are vibrated with one vibrator. However, it is not limited to the type or method.
Moreover, although the structural example of the sliding part which has the elastic hinge 5 was shown in 1st, 2nd Example, when the load capacity of a moving body is large when a sliding part is attached to a positioning guide apparatus, a sliding part Depending on the shape, the strength for supporting the load will be insufficient. In such a case, as in the modification of the squeeze air bearing of the first embodiment shown in FIG. Therefore, the strength of the sliding portion may be increased by increasing the shape of the sliding portion.

本発明の空気軸受は、安価で浮上量も大きく浮上も安定しているので、例えば高精度なＶ平面案内機構が特別な調整なしに実現でき、非接触軸受を備えて平面アクチュエータ装置やリニアモータなどに代表される各種アクチュエータに好適な位置決め案内装置に適用できる。   Since the air bearing of the present invention is inexpensive, has a large flying height and is stable in floating, for example, a highly accurate V-plane guide mechanism can be realized without any special adjustment, and includes a non-contact bearing and a planar actuator device or linear motor. The present invention can be applied to a positioning guide device suitable for various actuators represented by the above.

本発明の第１実施例を示すスクイーズ空気軸受の正断面図Front sectional view of a squeeze air bearing showing a first embodiment of the present invention. 第１実施例の変形例を示すスクイーズ空気軸受の正断面図Front sectional view of a squeeze air bearing showing a modification of the first embodiment 本発明の第２実施例を示すスクイーズ空気軸受の正断面図Front sectional view of a squeeze air bearing showing a second embodiment of the present invention. 本発明の第３実施例を示す位置決め案内装置の正断面図Front sectional view of a positioning guide device showing a third embodiment of the present invention 第３実施例の変形例を示す位置決め案内装置の正断面図Front sectional view of a positioning guide device showing a modification of the third embodiment 第１従来技術を示すスクイーズ空気軸受の正断面図Front sectional view of squeeze air bearing showing the first prior art 第２従来技術を示すＶ平面案内式の位置決め案内装置に適用されるスクイーズ空気軸受部の正断面図Front sectional view of a squeeze air bearing portion applied to a V-plane guide type positioning guide device showing the second prior art 第３従来技術を示すＶ平面案内式の位置決め案内装置に適用されるスクイーズ空気軸受部の正断面図Front sectional view of a squeeze air bearing applied to a V-plane guide type positioning guide device showing the third prior art

符号の説明Explanation of symbols

１ 振動子
２ 摺動部
２ａ 振動面
３ 案内面（固定側部材）
４ 隙間
５ 弾性ヒンジ
６ 振動方向
７ 空気軸受
８ 取付け部（可動側部材）
９１ Ｖ字空気軸受
９２ 平面空気軸受 DESCRIPTION OF SYMBOLS 1 Vibrator 2 Sliding part 2a Vibrating surface 3 Guide surface (fixed side member)
4 Clearance 5 Elastic hinge 6 Vibration direction 7 Air bearing 8 Mounting part (movable side member)
91 V-shaped air bearing 92 Planar air bearing

Claims (7)

移動体を取り付けるための取付け部と、
前記取付け部に対して、振動子によって振動方向に振動させる摺動部と、
前記摺動部の振動面に微小な隙間を介して対向させた案内面と、
を具備し、スクイーズ空気膜によって非接触に前記摺動部を支持させるスクイーズ空気軸受において、
前記振動子が１個で構成されると共に、前記摺動部の振動面が少なくとも２つ設けられたことを特徴とするスクイーズ空気軸受。 A mounting portion for mounting the moving body;
A sliding portion that vibrates in a vibration direction by a vibrator with respect to the attachment portion;
A guide surface opposed to the vibration surface of the sliding portion via a minute gap;
In a squeeze air bearing that supports the sliding part in a non-contact manner by a squeeze air film,
A squeeze air bearing characterized in that the vibrator is composed of one piece and at least two vibration surfaces of the sliding portion are provided. 前記摺動部の振動面は、前記振動子が配置される軸線方向に対して左右対称な位置にそれぞれ設けられたことを特徴とする請求項１記載のスクイーズ空気軸受。   The squeeze air bearing according to claim 1, wherein the vibration surface of the sliding portion is provided at a position symmetrical with respect to an axial direction in which the vibrator is arranged. 前記取付け部と前記摺動部の振動面の間もしくは前記振動子と前記摺動部の振動面の間に弾性ヒンジを設けると共に、前記１個の振動子で前記少なくとも２つ設けた振動面を振動させることを特徴とする請求項１または２に記載のスクイーズ空気軸受。   An elastic hinge is provided between the vibration surface of the attachment portion and the sliding portion or between the vibration surface of the vibrator and the sliding portion, and at least two vibration surfaces provided by the single vibrator. The squeeze air bearing according to claim 1 or 2, wherein the squeeze air bearing is vibrated. 前記弾性ヒンジが円弧状の切欠を有することを特徴とする請求項３記載のスクイーズ空気軸受。   4. The squeeze air bearing according to claim 3, wherein the elastic hinge has an arcuate notch. 前記振動子は、圧電素子または静電電極からなることを特徴とする請求項１または３記載のスクイーズ空気軸受。   The squeeze air bearing according to claim 1 or 3, wherein the vibrator comprises a piezoelectric element or an electrostatic electrode. 前記弾性ヒンジの数を前記摺動部の振動面の数よりも多くし、前記振動子による振動変位を拡大させるようにしたことを特徴とする請求項３または４記載のスクイーズ空気軸受。   5. The squeeze air bearing according to claim 3, wherein the number of the elastic hinges is larger than the number of vibration surfaces of the sliding portion to increase the vibration displacement caused by the vibrator. 請求項１〜６の何れか１項に記載の空気軸受で構成される案内機構を備えたことを特徴とする位置決め案内装置。   A positioning guide device comprising a guide mechanism comprising the air bearing according to claim 1.
JP2006335012A 2006-12-12 2006-12-12 Squeeze air bearing, and positioning guide device using it Pending JP2008144918A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006335012A JP2008144918A (en) 2006-12-12 2006-12-12 Squeeze air bearing, and positioning guide device using it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006335012A JP2008144918A (en) 2006-12-12 2006-12-12 Squeeze air bearing, and positioning guide device using it

Publications (1)

Publication Number Publication Date
JP2008144918A true JP2008144918A (en) 2008-06-26

Family

ID=39605320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006335012A Pending JP2008144918A (en) 2006-12-12 2006-12-12 Squeeze air bearing, and positioning guide device using it

Country Status (1)

Country Link
JP (1) JP2008144918A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333004A (en) * 2015-11-25 2016-02-17 湖南大学 Ultrasonic aerodynamic bearing
EP3460273A1 (en) * 2017-09-21 2019-03-27 Etel S. A.. Active aerostatic bearing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105333004A (en) * 2015-11-25 2016-02-17 湖南大学 Ultrasonic aerodynamic bearing
EP3460273A1 (en) * 2017-09-21 2019-03-27 Etel S. A.. Active aerostatic bearing
WO2019057360A1 (en) * 2017-09-21 2019-03-28 Etel S.A. Active aerostatic bearing
US11002313B2 (en) 2017-09-21 2021-05-11 Etel S.A. Active aerostatic bearing

Similar Documents

Publication Publication Date Title
CN105179480B (en) A kind of gas suspension device of active control orifice inlet port air pressure
CN103990998B (en) Stiffness frequency adjustable two-dimensional micro-motion platform based on stress stiffening principle
JP3086764B2 (en) Hydrostatic bearing device
CN101225853A (en) Dynamical pressure gas elasticity foil tablet bearing with stability self-adaptive control function
CN104614137A (en) Three-component standard vibrating table based on static air floating decoupling device
CN103023374A (en) Inertia type piezoelectric linear motor
JPH0953640A (en) Static pressure bearing device
JP2008144918A (en) Squeeze air bearing, and positioning guide device using it
JP5269009B2 (en) Drive device
JP5267470B2 (en) Actuator
CN110645272B (en) Aerostatic bearing based on additional mass motion driven vibration energy consumption
US6588932B2 (en) Air bearing between a first and second object
CN109465650B (en) Cylinder type rigidity switching device, rigid-flexible coupling motion platform using same and rigid-flexible coupling motion method
JP2005134332A (en) Shape measuring apparatus
JPH08170636A (en) Linear guide unit
Isobe et al. Frequency characteristics of non-contact ultrasonic motor with motion error correction
JP3143582B2 (en) Hydrostatic bearing device and positioning stage using the same
JP4152121B2 (en) Vacuum exhaust system using turbo molecular pump
JP2008111507A (en) Vibration eliminating device
JP2004191147A (en) Contact type probe
JP2008111447A (en) Squeeze air bearing and plane actuator using it
JP2006247641A (en) Ultrasonic levitation device
JP4632569B2 (en) Stage equipment
JP2009055779A (en) Ultrasonic actuator, magnetic recording apparatus
JPH0730794B2 (en) Hydrostatic air bearing