JP2008139383A - Liquid crystal conveyance apparatus, liquid crystal conveyance method and method of manufacturing liquid crystal device - Google Patents

Liquid crystal conveyance apparatus, liquid crystal conveyance method and method of manufacturing liquid crystal device Download PDF

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Publication number
JP2008139383A
JP2008139383A JP2006323101A JP2006323101A JP2008139383A JP 2008139383 A JP2008139383 A JP 2008139383A JP 2006323101 A JP2006323101 A JP 2006323101A JP 2006323101 A JP2006323101 A JP 2006323101A JP 2008139383 A JP2008139383 A JP 2008139383A
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Prior art keywords
liquid crystal
tank
deaeration
transfer device
transfer
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JP2008139383A5 (en
JP5076463B2 (en
Inventor
Toshiki Tani
俊樹 谷
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Seiko Epson Corp
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Seiko Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal conveyance apparatus which can attain space saving and enables the cost thereof to be reduced by being made compact. <P>SOLUTION: The liquid crystal conveyance apparatus includes a storing vessel 10 for storing a liquid crystal 71 before being deaerated, a deaeration vessel 20 where the liquid crystal is deaerated under a pressure-reduced atmosphere and stored and a supplying vessel 30 for supplying the liquid crystal conveyed from the deaeration vessel 20 to a liquid crystal cell 60, wherein the liquid crystal is conveyed from the storing vessel 10 to the deaeration vessel 20 via a conveying pipe 40 by pressure difference between the storing vessel 10 and the deaeration vessel 20 in a pressure-reduced state and the liquid crystal is conveyed from the deaeration vessel 20 to the supplying vessel 30 via a conveying pipe 50 by pressure difference between the deaeration vessel 20 and the supplying vessel 30 in a pressure-reduced state. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、液晶装置に充填される液晶を移送する液晶移送装置、液晶移送方法及び液晶
装置の製造方法に関する。
The present invention relates to a liquid crystal transfer device that transfers liquid crystal filled in a liquid crystal device, a liquid crystal transfer method, and a method for manufacturing a liquid crystal device.

液晶装置に充填される液晶は、液晶を貯溜する貯溜槽から液晶セル等の半製品に液晶を
供給する供給槽まで移送されるが、その移送には圧送ポンプを用いるのが一般的である。
例えば脱気前の液晶を貯溜する貯溜槽から脱気チューブで液晶を脱気する脱気槽へ圧送ポ
ンプで液晶を圧送する。その後、脱気後の液晶を貯溜する受槽から、減圧状態で液晶セル
に液晶を注入する供給槽へ、圧送ポンプで液晶を圧送する(特許文献1参照)。
The liquid crystal filled in the liquid crystal device is transferred from a storage tank for storing liquid crystal to a supply tank for supplying liquid crystal to a semi-finished product such as a liquid crystal cell, and a pressure pump is generally used for the transfer.
For example, the liquid crystal is pumped by a pressure pump from a storage tank for storing the liquid crystal before degassing to a degassing tank for degassing the liquid crystal by a degassing tube. Thereafter, the liquid crystal is pumped by a pumping pump from a receiving tank for storing the deaerated liquid crystal to a supply tank for injecting the liquid crystal into the liquid crystal cell in a reduced pressure state (see Patent Document 1).

特開平5−289036号公報JP-A-5-289036

ところで、上記液晶の移送は、多数の圧送ポンプを設けて行うものであるため、装置が
大型化し、装置コストが高価になるという問題がある。
By the way, the transfer of the liquid crystal is performed by providing a large number of pressure pumps, so that there is a problem that the apparatus becomes large and the apparatus cost becomes high.

本発明は上記問題点に鑑み提案するものであって、装置を小型にして省スペース化を図
ることができると共に、装置コストを低減することができる液晶移送装置、液晶移送方法
及び液晶装置の製造方法を提供することを目的とする。
The present invention is proposed in view of the above-described problems, and can reduce the size of the device and save space, and can reduce the cost of the device, and the liquid crystal transfer device, the liquid crystal transfer method, and the manufacture of the liquid crystal device It aims to provide a method.

本発明の液晶移送装置は、液晶を貯溜する第1の槽と、前記第1の槽から液晶が移送さ
れる第2の槽とを備え、前記第1の槽と前記第2の槽との圧力差により、前記第1の槽か
ら前記第2の槽へ液晶を移送することを特徴とする。第1、第2の槽は、液晶を移送する
工程に配置される適宜の槽とすることが可能である。本発明によれば、第1の槽から第2
の槽へ液晶を移送するための圧送ポンプを設ける必要が無くなるので、装置の小型化によ
る省スペース化を図ることができると共に、装置コストを低減することができる。
The liquid crystal transfer device of the present invention includes a first tank for storing liquid crystal, and a second tank for transferring liquid crystal from the first tank, and includes the first tank and the second tank. The liquid crystal is transferred from the first tank to the second tank by a pressure difference. The first and second tanks can be appropriate tanks arranged in the process of transferring the liquid crystal. According to the present invention, the first tank to the second
Since there is no need to provide a pressure pump for transferring the liquid crystal to the tank, it is possible to save space by reducing the size of the apparatus and reduce the cost of the apparatus.

本発明の液晶移送装置は、前記第2の槽から液晶が移送される第3の槽とを備え、前記
第2の槽と前記第3の槽との圧力差により、前記第2の槽から前記第3の槽へ液晶を移送
することを特徴とする。第3の槽は、液晶を移送する工程に配置される適宜の槽とするこ
とが可能である。本発明によれば、第1の槽から第2の槽へ液晶を移送する圧送ポンプと
、第2の槽から第3の槽へ液晶を移送するための圧送ポンプの双方を設ける必要が無くな
るので、装置の小型化による一層の省スペース化を図ることができると共に、装置コスト
を一層低減することができる。
The liquid crystal transfer device of the present invention includes a third tank in which liquid crystal is transferred from the second tank, and from the second tank due to a pressure difference between the second tank and the third tank. The liquid crystal is transferred to the third tank. The third tank can be an appropriate tank disposed in the step of transferring the liquid crystal. According to the present invention, there is no need to provide both a pressure pump for transferring liquid crystal from the first tank to the second tank and a pressure pump for transferring liquid crystal from the second tank to the third tank. Further, it is possible to further reduce the space by reducing the size of the device and further reduce the device cost.

本発明の液晶移送装置は、前記第1の槽を、液晶を減圧雰囲気下で脱気して貯溜すると
共に減圧状態を解除可能な脱気槽とし、前記第2の槽を、液晶を減圧雰囲気下で液晶装置
の半製品に供給する供給槽とすることが好ましい。本発明によれば、装置の小型化による
省スペース化、装置コストの低減を図ることができると共に、圧力差を得るために、液晶
装置の半製品に液晶を供給するための供給槽の減圧状態を有効に利用することができる。
In the liquid crystal transfer device of the present invention, the first tank is a deaeration tank in which the liquid crystal is degassed and stored in a reduced pressure atmosphere and the reduced pressure state can be released, and the second tank is a reduced pressure atmosphere. It is preferable to use a supply tank that is supplied to the semi-finished product of the liquid crystal device below. According to the present invention, it is possible to save space by reducing the size of the device, reduce the cost of the device, and reduce the pressure of the supply tank for supplying liquid crystal to the semi-finished liquid crystal device in order to obtain a pressure difference. Can be used effectively.

本発明の液晶移送装置は、前記第1の槽を、脱気前の液晶を貯溜する貯溜槽とし、前記
第2の槽を、液晶を減圧雰囲気下で脱気する脱気槽とすることが好ましい。本発明によれ
ば、装置の小型化による省スペース化、装置コストの低減を図ることができると共に、圧
力差を得るために、液晶を脱気するための脱気槽の減圧状態を有効に利用することができ
る。
In the liquid crystal transfer device of the present invention, the first tank may be a storage tank that stores liquid crystals before deaeration, and the second tank may be a deaeration tank that degass the liquid crystals under a reduced pressure atmosphere. preferable. According to the present invention, it is possible to save space by reducing the size of the device, reduce the device cost, and effectively use the depressurized state of the degassing tank for degassing the liquid crystal in order to obtain a pressure difference. can do.

本発明の液晶移送装置は、前記第1の槽を、脱気前の液晶を貯溜する貯溜槽とし、前記
第2の槽を、液晶を減圧雰囲気下で脱気して貯溜すると共に減圧状態を解除可能な脱気槽
とし、前記第3の槽を、液晶を減圧雰囲気下で液晶装置の半製品に供給する供給槽とする
ことが好ましい。本発明によれば、装置の小型化による一層の省スペース化、装置コスト
の一層の低減を図ることができると共に、圧力差を得るために、液晶を脱気するための脱
気槽の減圧状態と、液晶装置の半製品に液晶を供給するための供給槽の減圧状態の双方を
有効に利用することができる。
In the liquid crystal transfer device of the present invention, the first tank is a storage tank for storing the liquid crystal before degassing, and the second tank is stored by degassing and storing the liquid crystal in a reduced pressure atmosphere. It is preferable that the deaeration tank is releasable, and the third tank is a supply tank that supplies liquid crystal to a semi-finished product of the liquid crystal device in a reduced pressure atmosphere. According to the present invention, it is possible to further reduce the space by reducing the size of the device, further reduce the device cost, and to reduce the pressure of the deaeration tank for degassing the liquid crystal in order to obtain a pressure difference. And the reduced pressure state of the supply tank for supplying the liquid crystal to the semi-finished product of the liquid crystal device can be used effectively.

本発明の液晶移送装置は、前記圧力差で移送される液晶の移送量を制御する制御部を設
けることが好ましい。本発明によれば、各槽間の液晶の移送量を最適な量に調整すること
ができる。
The liquid crystal transfer device of the present invention is preferably provided with a control unit for controlling the transfer amount of the liquid crystal transferred by the pressure difference. According to the present invention, the transfer amount of the liquid crystal between the tanks can be adjusted to an optimum amount.

本発明の液晶移送装置は、前記第1の槽、前記第2の槽若しくはその双方に貯溜される
液晶の液面下に一端を配置する移送管で液晶を移送することが好ましい。本発明によれば
、気泡が集まりやすい貯溜液晶の液面より下に移送管の一端を配置することで、移送する
液晶へのガスの混入を抑制することができる。
In the liquid crystal transfer device of the present invention, the liquid crystal is preferably transferred by a transfer tube having one end disposed below the liquid surface of the liquid crystal stored in the first tank, the second tank, or both. According to the present invention, by arranging one end of the transfer pipe below the liquid level of the stored liquid crystal where bubbles are likely to collect, mixing of gas into the liquid crystal to be transferred can be suppressed.

本発明の液晶移送装置は、前記移送管の一端を前記貯溜される液晶の底部近傍に配置す
ることが好ましい。本発明よれば、気泡が集まりやすい液面から離れた貯溜液晶の底部近
傍に一端を配置することで、移送する液晶へのガスの混入を一層抑制できる。
In the liquid crystal transfer device of the present invention, it is preferable that one end of the transfer pipe is disposed in the vicinity of the bottom of the stored liquid crystal. According to the present invention, by arranging one end in the vicinity of the bottom of the stored liquid crystal away from the liquid surface where bubbles tend to collect, mixing of gas into the liquid crystal to be transferred can be further suppressed.

本発明の液晶移送装置は、前記供給槽へ移送するために前記脱気槽に貯溜される脱気後
の液晶の液面下に前記移送管の一端を配置することが好ましい。本発明によれば、液晶装
置の半製品に供給される脱気後の液晶へのガスの混入を防止できる。
In the liquid crystal transfer device of the present invention, it is preferable that one end of the transfer pipe is disposed below the liquid level of the liquid crystal after deaeration stored in the deaeration tank for transfer to the supply tank. According to the present invention, it is possible to prevent gas from being mixed into the liquid crystal after deaeration supplied to the semi-finished product of the liquid crystal device.

本発明の液晶移送装置は、前記供給槽のディスペンサに液晶を移送し、前記ディスペン
サで前記液晶装置の半製品に液晶を滴下することが好ましい。本発明によれば、液晶の使
用量を必要最小限に抑えることができる。
In the liquid crystal transfer device of the present invention, it is preferable that the liquid crystal is transferred to a dispenser of the supply tank, and the liquid crystal is dropped onto a semi-finished product of the liquid crystal device by the dispenser. According to the present invention, the amount of liquid crystal used can be minimized.

本発明の液晶移送装置は、前記脱気槽内に吐出された液晶が前記減圧雰囲気と接触しな
がら沿うように流れ、前記減圧雰囲気と液晶との接触を促進する接触促進部を備えること
を特徴とする。本発明によれば、液晶が接触促進部に沿うように流れ、表面積の大きい状
態で減圧雰囲気と接触する時間が延び、減圧雰囲気と液晶の接触量が増加するので、高い
処理能力で液晶を脱気することができる。また、脱気チューブで脱気する場合には脱気チ
ューブの容量で脱気量に制限が生ずるが、斯様な脱気量の制限が無く、脱気槽内に所要量
だけ液晶を吐出して脱気することが可能であり、少量の液晶も脱気することができる。ま
た、脱気チューブを用いた場合に生ずる余剰液晶の残存、液晶への不純物混入、メンテナ
ンスが煩雑となるという問題が無く、余剰の液晶の残存や、液晶への不純物混入の虞が無
く、メンテナンス性にも優れる。
The liquid crystal transfer device of the present invention includes a contact promoting unit that promotes the contact between the reduced-pressure atmosphere and the liquid crystal, and the liquid crystal discharged into the deaeration tank flows in contact with the reduced-pressure atmosphere. And According to the present invention, since the liquid crystal flows along the contact promoting portion, the time for contacting the reduced pressure atmosphere with a large surface area is extended, and the amount of contact between the reduced pressure atmosphere and the liquid crystal is increased. I can mind. In addition, when deaeration is performed with a deaeration tube, the deaeration amount is limited by the capacity of the deaeration tube, but there is no such limitation on the deaeration amount, and only the required amount of liquid crystal is discharged into the deaeration tank. It is possible to deaerate, and a small amount of liquid crystal can also be deaerated. In addition, there is no problem of surplus liquid crystal remaining, impurities mixed into the liquid crystal, and maintenance complicated when using a degassing tube, and there is no risk of surplus liquid crystal remaining or impurities mixed into the liquid crystal. Excellent in properties.

本発明の液晶移送装置は、前記接触促進部として、前記吐出された液晶が略放射状に拡
がるように流れる吐出受面を有する構成とすることが好ましい。本発明によれば、液晶を
略放射状に拡げ、減圧雰囲気との接触を均一化しつつ減圧雰囲気との接触面積の拡大を図
れるので、液晶に対する脱気の均一性を高め、脱気率をより向上することができる。
The liquid crystal transfer device of the present invention preferably has a discharge receiving surface that flows so that the discharged liquid crystal expands substantially radially as the contact promoting portion. According to the present invention, the liquid crystal can be expanded substantially radially, and the contact area with the reduced pressure atmosphere can be increased while making the contact with the reduced pressure atmosphere uniform, so the uniformity of deaeration with respect to the liquid crystal is improved and the deaeration rate is further improved. can do.

本発明の液晶移送装置は、前記吐出受面を回転させ、前記吐出受面の中心近傍に液晶を
吐出することが好ましい。本発明によれば、前記吐出された液晶が回転の遠心力で均一に
拡がるので、液晶に対する脱気の均一性をより高めることができると共に、遠心力で液晶
が薄く引き延ばされ表面積が一層拡大されるので、脱気率をより一層高めることができる
。更に、遠心力で液晶が薄く引き延ばされるので、高粘度の液晶も良好に脱気することが
できる。更に、遠心力で液晶が素早く表面積を拡大するので、脱気処理の効率を高めるこ
とができる。
In the liquid crystal transfer device of the present invention, it is preferable that the discharge receiving surface is rotated to discharge liquid crystal in the vicinity of the center of the discharge receiving surface. According to the present invention, the discharged liquid crystal is uniformly spread by the centrifugal force of rotation, so that the uniformity of deaeration with respect to the liquid crystal can be further increased, and the liquid crystal is thinly stretched by the centrifugal force to further increase the surface area. Since it is enlarged, the deaeration rate can be further increased. Furthermore, since the liquid crystal is thinly stretched by the centrifugal force, the liquid with high viscosity can be deaerated well. Furthermore, since the liquid crystal quickly expands the surface area by centrifugal force, the efficiency of the deaeration treatment can be increased.

また、本発明の液晶移送方法は、液晶を貯溜する第1の槽と第2の槽との圧力差により
、前記第1の槽から前記第2の槽へ液晶を移送することを特徴とする。本発明によれば、
装置の小型化による省スペース化、装置コストの低減を図ることができる。
The liquid crystal transfer method of the present invention is characterized in that the liquid crystal is transferred from the first tank to the second tank due to a pressure difference between the first tank and the second tank for storing the liquid crystal. . According to the present invention,
Space saving and device cost reduction can be achieved by downsizing the device.

また、本発明の液晶装置の製造方法は、本発明の液晶移送装置で液晶を移送して液晶装
置に充填することを特徴とする。本発明によれば、本発明の液晶移送装置の効果に基づき
、液晶装置の製造コストの低減、製造工程の効率化、液晶装置の歩留まり向上の効果が得
られる。
The method for manufacturing a liquid crystal device of the present invention is characterized in that the liquid crystal is transferred by the liquid crystal transfer device of the present invention and filled in the liquid crystal device. According to the present invention, based on the effects of the liquid crystal transfer device of the present invention, the effects of reducing the manufacturing cost of the liquid crystal device, increasing the efficiency of the manufacturing process, and improving the yield of the liquid crystal device can be obtained.

本発明の実施形態について図面を参照して説明する。   Embodiments of the present invention will be described with reference to the drawings.

[第1実施形態]
図1は、本発明の液晶移送装置の第1実施形態を示す模式図である。第1実施形態の液
晶移送装置は、図1に示すように、脱気前の液晶を貯溜する貯溜槽10と、液晶を減圧雰
囲気下で脱気して貯溜する脱気槽20と、脱気槽20から移送される液晶を液晶セル60
に供給する供給槽30と、貯溜槽10から脱気槽20へ液晶を移送する移送管40と、脱
気槽20から供給槽30へ液晶を移送する移送管50を備える。
[First Embodiment]
FIG. 1 is a schematic view showing a first embodiment of the liquid crystal transfer device of the present invention. As shown in FIG. 1, the liquid crystal transfer device of the first embodiment includes a storage tank 10 that stores liquid crystal before deaeration, a deaeration tank 20 that stores liquid by degassing the liquid crystal under a reduced pressure atmosphere, and a deaeration. Liquid crystal transferred from the tank 20 is liquid crystal cell 60.
A supply tank 30 for supplying the liquid crystal, a transfer pipe 40 for transferring the liquid crystal from the storage tank 10 to the deaeration tank 20, and a transfer pipe 50 for transferring the liquid crystal from the deaeration tank 20 to the supply tank 30.

貯溜槽10は、大気圧下且つ常温で脱気前の液晶71を貯溜する。貯溜槽10の底部近
傍、即ち貯溜槽10の貯溜液晶71の底部近傍には移送管40の一端が配置され、貯溜槽
10から移送管40が導出されている。前記底部近傍のように貯溜される液晶71の液面
下に移送管40の一端を配置することにより、移送管40で移送する液晶に、気泡が集ま
りやすい液晶71の液面から気泡が混入することを防止することができる。また、貯溜槽
10は、前記大気圧下で液晶71を貯溜する構成以外にも、後述する脱気槽20の減圧状
態の圧力より高い圧力を液晶に付加可能な適宜の構成とすることが可能である。
The storage tank 10 stores the liquid crystal 71 before deaeration at atmospheric pressure and at room temperature. One end of the transfer pipe 40 is disposed near the bottom of the storage tank 10, that is, near the bottom of the storage liquid crystal 71 of the storage tank 10, and the transfer pipe 40 is led out from the storage tank 10. By disposing one end of the transfer tube 40 below the liquid level of the liquid crystal 71 stored in the vicinity of the bottom, bubbles are mixed into the liquid crystal transferred by the transfer tube 40 from the liquid level of the liquid crystal 71 where the bubbles easily collect. This can be prevented. Further, the storage tank 10 can have an appropriate structure capable of adding a pressure higher than the pressure in the depressurized state of the deaeration tank 20 described later to the liquid crystal, in addition to the structure for storing the liquid crystal 71 under the atmospheric pressure. It is.

脱気槽20は、図1に示すように、減圧状態を維持する密閉可能な構造を有し、バルブ
21を介して真空ポンプ22が設けられていると共に、脱気槽20内を大気に開放するた
めのバルブ23が設けられ、バルブ23の閉塞、真空ポンプ22の駆動、バルブ21の開
放により脱気槽20内を減圧し、バルブ21の閉塞、バルブ23の開放により脱気槽20
内の減圧状態を解除して大気圧にすることが可能である。脱気槽20の減圧時の圧力は、
貯溜槽10の圧力より低い圧力で、液晶中の溶存ガスの気泡化による液晶装置の表示不良
が発生しないレベルで、液晶中の溶存ガスを除去できる圧力であれば適宜であり、例えば
6Pa程度とする。脱気槽20の減圧状態を解除した際の圧力は、前記大気圧にする以外
にも、後述する減圧時の供給槽30若しくはそのディスペンサ34の圧力よりも高い適宜
の圧力にする構成とすることが可能であり、例えば減圧時に閉塞しているバルブ23の開
放量を少なくして大気圧よりも低い圧力にしてもよい。
As shown in FIG. 1, the deaeration tank 20 has a sealable structure that maintains a reduced pressure state, a vacuum pump 22 is provided via a valve 21, and the inside of the deaeration tank 20 is opened to the atmosphere. A valve 23 is provided, and the inside of the deaeration tank 20 is depressurized by closing the valve 23, driving the vacuum pump 22, and opening the valve 21, and degassing tank 20 by closing the valve 21 and opening the valve 23.
It is possible to release the reduced pressure state to atmospheric pressure. The pressure at the time of depressurization of the deaeration tank 20 is
Any pressure that is lower than the pressure of the storage tank 10 and that can remove the dissolved gas in the liquid crystal at a level that does not cause a display defect of the liquid crystal device due to bubbles of the dissolved gas in the liquid crystal is appropriate. To do. The pressure when the depressurized state of the deaeration tank 20 is released is set to an appropriate pressure higher than the pressure of the supply tank 30 or its dispenser 34 at the time of depressurization described later, in addition to the atmospheric pressure. For example, the opening amount of the valve 23 closed at the time of depressurization may be reduced to a pressure lower than the atmospheric pressure.

脱気槽20内には、円板状のステージ24が吐出受面241である平滑な上面を略水平
にして中位の高さに静止配置されている。吐出受面241は撥水性の素材で形成すると好
適であり、例えばテフロン(登録商標)若しくはピーク(登録商標)等でステージ24を
形成する、或いはこれらを基材にコート塗装して吐出受面241を形成するとよい。脱気
槽20内には、ステージ24の中心を貫通するように上下方向に支柱25が立設され、支
柱25はステージ24を固定して支持している。図2に示すように、ステージ24の吐出
受面241には、移送管50の外径よりも僅かに大きい径を有する貫通孔242が形成さ
れている。図1及び図2に示すように、脱気槽20内には移送管40が導入されており、
移送管40の他端は吐出受面241の中心に近い位置まで延ばされ、移送管40で移送さ
れる液晶を前記他端から吐出受面241の中心近傍に滴下可能である。脱気槽20内の下
部には脱気された液晶72が貯溜され、脱気槽20の底部近傍、即ち脱気槽20内に貯溜
される液晶72の底部近傍に移送管50の一端が配置されている。前記底部近傍のように
貯溜される液晶72の液面下に移送管50の一端を配置することにより、移送管50で移
送する液晶に、気泡が集まりやすい液晶72の液面から気泡が混入することを防止するこ
とができる。移送管50は貫通孔242に挿通されて上方へ延ばされ、脱気槽20から導
出されている。
In the deaeration tank 20, a disk-shaped stage 24 is statically disposed at a medium height with the smooth upper surface, which is the discharge receiving surface 241, being substantially horizontal. The discharge receiving surface 241 is preferably formed of a water-repellent material. For example, the stage 24 is formed of Teflon (registered trademark) or Peak (registered trademark) or the like, or these are coated on a base material and the discharge receiving surface 241 is formed. It is good to form. In the deaeration tank 20, a support column 25 is erected in the vertical direction so as to penetrate the center of the stage 24, and the support column 25 fixes and supports the stage 24. As shown in FIG. 2, a through hole 242 having a diameter slightly larger than the outer diameter of the transfer pipe 50 is formed in the discharge receiving surface 241 of the stage 24. As shown in FIGS. 1 and 2, a transfer pipe 40 is introduced into the deaeration tank 20,
The other end of the transfer tube 40 extends to a position close to the center of the discharge receiving surface 241, and the liquid crystal transferred by the transfer tube 40 can be dropped from the other end to the vicinity of the center of the discharge receiving surface 241. The degassed liquid crystal 72 is stored in the lower part of the deaeration tank 20, and one end of the transfer pipe 50 is disposed near the bottom of the deaeration tank 20, that is, near the bottom of the liquid crystal 72 stored in the deaeration tank 20. Has been. By disposing one end of the transfer pipe 50 below the liquid level of the liquid crystal 72 stored in the vicinity of the bottom, air bubbles are mixed into the liquid crystal transferred by the transfer pipe 50 from the liquid level of the liquid crystal 72 in which bubbles tend to collect. This can be prevented. The transfer pipe 50 is inserted into the through hole 242 and extends upward, and is led out from the deaeration tank 20.

供給槽30は、図1に示すように、減圧状態を維持する密閉可能な構造を有し、バルブ
31を介して真空ポンプ32が設けられていると共に、供給槽30内を大気に開放するた
めのバルブ33が設けられ、バルブ33の閉塞、真空ポンプ32の駆動、バルブ31の開
放により供給槽30内を減圧し、バルブ31の閉塞、バルブ33の開放により供給槽30
内の減圧状態を解除して大気圧にすることが可能である。供給槽30の減圧時の圧力は、
液晶セル60など液晶装置の半製品への液晶の供給に支障がなく、脱気槽20の減圧解除
時の圧力よりも低い圧力であれば適宜であり、例えば6Pa程度とする。供給槽30の減
圧状態を解除した際の圧力は、前記大気圧にする以外にも、液晶セル60など液晶装置の
半製品への液晶の供給に支障がない圧力であれば適宜であり、例えば減圧時に閉塞してい
るバルブ33の開放量を少なくして大気圧より低い圧力にしてもよい。
As shown in FIG. 1, the supply tank 30 has a sealable structure that maintains a reduced pressure state, is provided with a vacuum pump 32 via a valve 31, and opens the supply tank 30 to the atmosphere. The supply tank 30 is depressurized by closing the valve 33, driving the vacuum pump 32, and opening the valve 31, and closing the valve 31 and opening the valve 33.
It is possible to release the reduced pressure state to atmospheric pressure. The pressure when the supply tank 30 is depressurized is:
There is no problem in the supply of liquid crystal to the semi-finished product of the liquid crystal device such as the liquid crystal cell 60, and any pressure may be used as long as the pressure is lower than the pressure when the deaeration tank 20 is released from decompression. The pressure when the reduced pressure state of the supply tank 30 is released is appropriate as long as it does not interfere with the supply of liquid crystal to the semi-finished product of the liquid crystal device such as the liquid crystal cell 60 other than the atmospheric pressure. The opening amount of the valve 33 closed at the time of depressurization may be reduced to a pressure lower than the atmospheric pressure.

供給槽30の上部には、液晶を滴下するディスペンサ34が設けられている。ディスペ
ンサ34には移送管50の他端が導入され、移送管50を介して移送される液晶がディス
ペンサ34内に供給される。供給槽30には、図示しない搬送機構で液晶セル60が搬送
されて所定位置に配置され、減圧状態で液晶充填口631近傍の基板61上にディスペン
サ34から液晶73が滴下され、バルブ31の閉塞、バルブ33の開放により供給槽30
内を大気に開放し、後述する液晶セル60の空間66の減圧状態と供給槽30内の大気圧
との圧力差により、即ち真空注入法により液晶セル60の空間66に液晶を注入して充填
する。
A dispenser 34 for dropping liquid crystal is provided on the upper part of the supply tank 30. The other end of the transfer pipe 50 is introduced into the dispenser 34, and the liquid crystal transferred through the transfer pipe 50 is supplied into the dispenser 34. The liquid crystal cell 60 is transported to the supply tank 30 by a transport mechanism (not shown) and disposed at a predetermined position, and the liquid crystal 73 is dropped from the dispenser 34 onto the substrate 61 in the vicinity of the liquid crystal filling port 631 in a decompressed state, thereby closing the valve 31. , Supply tank 30 by opening valve 33
The inside is opened to the atmosphere, and liquid crystal is injected into the space 66 of the liquid crystal cell 60 by a pressure difference between the decompressed state of the space 66 of the liquid crystal cell 60 described later and the atmospheric pressure in the supply tank 30, that is, by vacuum injection. To do.

ここで、液晶セル60について説明する。図3(a)は供給槽で液晶が滴下される液晶
セルを示す平面構成図、(b)はそのA−A線矢視断面図である。液晶セル60は、図3
に示すように、一対の基板61、62がシール材63を介して対向配置され、シール材6
3は基板61、62の周縁内側に沿って略額縁状に設けられている。一方の基板61は他
方の基板62よりも僅かに大きく形成され、平面視で、一方の基板61の各側辺が他方の
基板62より僅かに側方へ突出するように配置されている。シール材63には、その一部
を開放して、基板61、62間のシール材63で囲まれる空間66に液晶を充填するため
の液晶充填口631が設けられており、液晶充填口631は液晶充填後に封止材で封止さ
れる。一方の基板61には、シール材63より内側の表示領域に複数の画素がマトリクス
状に形成され、画素毎に、画素電極と、画素電極に接続されるTFT(薄膜トランジスタ
)等のスイッチング素子と、スイッチング素子に接続される配線が設けられ、これらを覆
って配向膜64が形成されている。前記配線は、基板61のシール材63の外側領域等に
設けられる駆動回路と接続される。また、他方の基板62には、対向電極が設けられ、対
向電極を覆うように配向膜65が形成されている。尚、液晶セル60を構成する一対の基
板61、62の何れを素子基板とし、対向基板とするかは適宜である。
Here, the liquid crystal cell 60 will be described. FIG. 3A is a plan view showing a liquid crystal cell in which liquid crystal is dropped in a supply tank, and FIG. 3B is a cross-sectional view taken along line AA. The liquid crystal cell 60 is shown in FIG.
As shown in FIG. 2, a pair of substrates 61 and 62 are arranged to face each other with a sealing material 63 interposed therebetween, and the sealing material 6
3 is provided in a substantially frame shape along the inner periphery of the substrates 61 and 62. One substrate 61 is formed slightly larger than the other substrate 62, and is arranged such that each side of one substrate 61 slightly protrudes sideways from the other substrate 62 in plan view. The sealing material 63 is provided with a liquid crystal filling port 631 for partially filling the space 66 surrounded by the sealing material 63 between the substrates 61 and 62 and filling the liquid crystal with the liquid crystal filling port 631. After filling with liquid crystal, it is sealed with a sealing material. On one substrate 61, a plurality of pixels are formed in a matrix in a display area inside the sealing material 63. For each pixel, a pixel electrode, a switching element such as a TFT (thin film transistor) connected to the pixel electrode, Wirings connected to the switching elements are provided, and an alignment film 64 is formed so as to cover them. The wiring is connected to a drive circuit provided in an outer region of the sealing material 63 of the substrate 61. The other substrate 62 is provided with a counter electrode, and an alignment film 65 is formed so as to cover the counter electrode. It should be noted that which of the pair of substrates 61 and 62 constituting the liquid crystal cell 60 is used as an element substrate and a counter substrate is appropriate.

貯溜槽10と脱気槽20との間の移送管40、脱気槽20と供給槽30との間の移送管
50には、それぞれ液晶の移送量を制御する制御部としてバルブ41、51が設けられて
いる。バルブ41、51は、図示しない開閉制御部で開放モードと閉塞モードとに制御さ
れ、開放モードでは所定のON/OFF時間(開閉時間)で開放と閉塞を繰り返し、移送
管40、50に断続的に液晶を流通させ、閉塞モードでは完全に閉塞し、移送管40、5
0の液晶の流通を遮断する。バルブ41の開放モードに於けるON/OFF時間は例えば
0.1秒/0.3秒、バルブ51の開放モードに於けるON/OFF時間は例えば0.1
秒/0.3秒とするが、各バルブ41、51の開放モードのON/OFF時間は、適宜設
定し、或いは変更設定することが可能であり、前記ON/OFF時間の設定により、貯溜
槽10から脱気槽20、脱気槽20から供給槽30への液晶の移送量を調整可能である。
尚、開放モード時にはバルブ41、51を連続して開放する構成としてもよい。
The transfer pipe 40 between the storage tank 10 and the deaeration tank 20 and the transfer pipe 50 between the deaeration tank 20 and the supply tank 30 have valves 41 and 51 as control units for controlling the transfer amount of liquid crystal, respectively. Is provided. The valves 41 and 51 are controlled to an open mode and a closed mode by an open / close control unit (not shown). In the open mode, the valves 41 and 51 are repeatedly opened and closed in a predetermined ON / OFF time (open / close time), and intermittently connected to the transfer pipes 40 and 50. In the closed mode, the liquid crystal is circulated in the closed pipe and completely closed.
Block the distribution of zero liquid crystal. The ON / OFF time in the opening mode of the valve 41 is, for example, 0.1 second / 0.3 second, and the ON / OFF time in the opening mode of the valve 51 is, for example, 0.1.
The ON / OFF time of each valve 41, 51 in the open mode can be set or changed as appropriate, and the storage tank can be set by setting the ON / OFF time. The amount of liquid crystal transferred from 10 to the deaeration tank 20 and from the deaeration tank 20 to the supply tank 30 can be adjusted.
Note that the valves 41 and 51 may be continuously opened in the open mode.

次に、第1実施形態の液晶移送装置で液晶を移送する工程について説明する。図4は第
1実施形態の液晶移送工程のフローチャートである。先ず、貯溜槽10に液晶71が貯溜
され、脱気槽30のバルブ23が閉塞された状態で、真空ポンプ22を駆動してバルブ2
1を開放することにより、脱気槽20内を減圧する(S101)。次いで、貯溜槽10か
ら脱気槽20に液晶を移送する移送管40のバルブ41を開放モードにし(S102)、
貯溜槽10の大気圧と脱気槽20の減圧状態の圧力との圧力差により、移送管40を介し
て貯溜槽10の貯溜液晶71を脱気槽20内へ移送する(S103)。前記液晶の移送量
、即ち後述の脱気槽20に於ける吐出受面241への液晶の吐出量は、所要レベルの脱気
が行える範囲であれば適宜であるが、例えば200ml/時間程度の速度で移送・吐出さ
せるとよい。
Next, the process of transferring the liquid crystal by the liquid crystal transfer device of the first embodiment will be described. FIG. 4 is a flowchart of the liquid crystal transfer process of the first embodiment. First, in a state where the liquid crystal 71 is stored in the storage tank 10 and the valve 23 of the deaeration tank 30 is closed, the vacuum pump 22 is driven to operate the valve 2.
By opening 1, the inside of the deaeration tank 20 is depressurized (S 101). Next, the valve 41 of the transfer pipe 40 for transferring the liquid crystal from the storage tank 10 to the deaeration tank 20 is set to the open mode (S102),
The storage liquid crystal 71 of the storage tank 10 is transferred into the deaeration tank 20 through the transfer pipe 40 due to the pressure difference between the atmospheric pressure of the storage tank 10 and the pressure in the depressurized state of the deaeration tank 20 (S103). The transfer amount of the liquid crystal, that is, the discharge amount of the liquid crystal to the discharge receiving surface 241 in the deaeration tank 20 to be described later is appropriate as long as it can be degassed at a required level, for example, about 200 ml / hour. It is better to transfer and discharge at a speed.

脱気槽20に移送された液晶は、移送管40の他端からステージ24の吐出受面241
の中心近傍に吐出される。前記吐出された液晶は、図2の二点鎖線矢印の如く、吐出受面
241に沿って前記中心近傍から吐出受面241の外周縁に向かって放射状に拡がるよう
に流れ、表面積を拡大して流れるので脱気が促進される。そして、ステージ24の外周縁
や貫通孔242から下方へ落下し、脱気槽20内の下部に貯溜される(S104)。この
際、貫通孔242に挿通されている移送管50の外周面に液晶が付着し、液晶は、前記外
周面を落下面として、前記外周面を伝って表面積を拡大しながら落下するので、ここでも
液晶と減圧雰囲気との接触面積と接触時間が増加して脱気が促進される。所要量の液晶を
脱気した際には、移送管40のバルブ41を閉塞モードにして脱気槽20への液晶の移送
・吐出を停止し、脱気処理を停止する。
The liquid crystal transferred to the deaeration tank 20 is discharged from the other end of the transfer pipe 40 to the discharge receiving surface 241 of the stage 24.
It is discharged in the vicinity of the center. The discharged liquid crystal flows so as to expand radially from the vicinity of the center toward the outer peripheral edge of the discharge receiving surface 241 along the discharge receiving surface 241 as indicated by a two-dot chain line arrow in FIG. Degassing is promoted because it flows. And it falls below from the outer periphery of the stage 24 or the through-hole 242, and is stored by the lower part in the deaeration tank 20 (S104). At this time, the liquid crystal adheres to the outer peripheral surface of the transfer tube 50 inserted through the through-hole 242, and the liquid crystal falls while expanding the surface area along the outer peripheral surface with the outer peripheral surface as the falling surface. However, the contact area and contact time between the liquid crystal and the reduced-pressure atmosphere are increased, and deaeration is promoted. When the required amount of liquid crystal is degassed, the valve 41 of the transfer pipe 40 is set in the closed mode to stop the transfer / discharge of the liquid crystal to the deaeration tank 20 and stop the deaeration process.

そして、供給槽30のバルブ33が閉塞された状態で、真空ポンプ32を駆動してバル
ブ31を開放することにより、供給槽30内を減圧し(S105)、供給槽30内と連通
しているディスペンサ34内も供給槽30内と同一圧に減圧すると共に、脱気槽20のバ
ルブ21を閉塞し且つバルブ23を開放して脱気槽20の減圧状態を解除し、脱気槽20
内を大気に開放して大気圧とする(S106)。次いで、脱気槽20から供給槽30に液
晶を移送する移送管50のバルブ51を所定時間開放モードにして(S107)、脱気槽
20の大気圧と供給槽30、ディスペンサ34の減圧状態の圧力との圧力差により、移送
管50を介して脱気槽20の貯溜液晶72を供給槽30のディスペンサ34内へ移送し(
S108)、バルブ51を閉塞モードとする。尚、脱気槽20は、ディスペンサ34へ液
晶を移送する時のみ大気圧とし、貯溜槽10からの液晶が供給される時や待機時には減圧
状態を維持する。
Then, in a state where the valve 33 of the supply tank 30 is closed, the vacuum pump 32 is driven to open the valve 31, thereby reducing the pressure in the supply tank 30 (S105) and communicating with the supply tank 30. The pressure in the dispenser 34 is reduced to the same pressure as in the supply tank 30, the valve 21 of the deaeration tank 20 is closed and the valve 23 is opened to release the depressurized state of the deaeration tank 20.
The inside is opened to the atmosphere and atmospheric pressure is set (S106). Next, the valve 51 of the transfer pipe 50 for transferring the liquid crystal from the deaeration tank 20 to the supply tank 30 is set to an open mode for a predetermined time (S107), and the atmospheric pressure of the deaeration tank 20 and the supply tank 30 and the dispenser 34 are in a decompressed state. Due to the pressure difference from the pressure, the storage liquid crystal 72 of the deaeration tank 20 is transferred into the dispenser 34 of the supply tank 30 via the transfer pipe 50 (
S108), the valve 51 is set to the closed mode. The deaeration tank 20 is at atmospheric pressure only when the liquid crystal is transferred to the dispenser 34, and is maintained in a reduced pressure state when the liquid crystal is supplied from the storage tank 10 or in standby.

ディスペンサ34内へ移送された液晶73は、図1及び図3の二点鎖線矢印の如く、供
給槽30内で配置されている液晶セル60の液晶充填口631近傍の基板61上に滴下さ
れる。ディスペンサ34で液晶を滴下することにより、液晶の使用量を必要最小限に抑え
ることが可能である。前記液晶滴下後には、バルブ31を閉塞し且つバルブ33を開放し
て供給槽30の減圧状態を解除し、供給槽30内を大気に開放して大気圧とし、供給槽3
0内の大気圧と液晶セル60の空間66の減圧された圧力との圧力差により、空間66に
液晶充填口631から液晶を充填する(S109)。液晶充填後の液晶充填口631は封
止材で封止される。
The liquid crystal 73 transferred into the dispenser 34 is dropped on the substrate 61 in the vicinity of the liquid crystal filling port 631 of the liquid crystal cell 60 arranged in the supply tank 30 as indicated by a two-dot chain line arrow in FIGS. . By dropping the liquid crystal with the dispenser 34, the amount of liquid crystal used can be minimized. After the liquid crystal is dropped, the valve 31 is closed and the valve 33 is opened to release the depressurized state of the supply tank 30, the inside of the supply tank 30 is opened to the atmospheric pressure, and the supply tank 3 is opened.
Due to the pressure difference between the atmospheric pressure in 0 and the pressure reduced in the space 66 of the liquid crystal cell 60, the space 66 is filled with liquid crystal from the liquid crystal filling port 631 (S109). The liquid crystal filling port 631 after the liquid crystal filling is sealed with a sealing material.

[第2実施形態]
次に、図5及び図6を参照して本発明の第2実施形態について説明する。尚、第2実施
形態の液晶移送装置は、脱気槽80のみが第1実施形態と異なり、貯溜槽10、供給槽3
0、移送管40、50及びバルブ41、51、液晶を充填される液晶セル60は第1実施
形態と同一であるため、以下では脱気槽80に関する箇所のみ説明する。図5は第2実施
形態の液晶移送装置に於ける脱気槽を示す断面説明図、図6はその脱気槽のステージを示
す斜視図である。
[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIGS. In the liquid crystal transfer device of the second embodiment, only the deaeration tank 80 is different from the first embodiment, and the storage tank 10 and the supply tank 3 are different.
Since 0, the transfer pipes 40 and 50, the valves 41 and 51, and the liquid crystal cell 60 filled with liquid crystal are the same as those in the first embodiment, only the portion relating to the deaeration tank 80 will be described below. FIG. 5 is a cross-sectional explanatory view showing a deaeration tank in the liquid crystal transfer device of the second embodiment, and FIG. 6 is a perspective view showing a stage of the deaeration tank.

第2実施形態に於ける脱気槽80は、図5に示すように、減圧状態を維持する密閉可能
な構造を有し、バルブ81を介して真空ポンプ82が設けられていると共に、脱気槽80
を大気に開放するためのバルブ83が設けられ、バルブ83の閉塞、真空ポンプ82の駆
動、バルブ81の開放により脱気槽80内を6Pa程度に減圧し、バルブ81の閉塞、バ
ルブ83の開放により脱気槽80の減圧状態を解除して大気圧にすることが可能である。
尚、脱気槽80の減圧時の圧力、脱気槽80の減圧解除時の圧力は、前記6Pa、大気圧
以外にも、第1実施形態と同様に適宜設定して構成することが可能である。
As shown in FIG. 5, the deaeration tank 80 in the second embodiment has a sealable structure that maintains a reduced pressure state, a vacuum pump 82 is provided via a valve 81, and a deaeration Tank 80
Is opened to the atmosphere, and the inside of the deaeration tank 80 is depressurized to about 6 Pa by closing the valve 83, driving the vacuum pump 82, and opening the valve 81, thereby closing the valve 81 and opening the valve 83. Thus, the depressurized state of the deaeration tank 80 can be released to the atmospheric pressure.
In addition, the pressure at the time of depressurization of the deaeration tank 80 and the pressure at the time of releasing the depressurization of the degassing tank 80 can be appropriately set and configured in the same manner as in the first embodiment other than the 6 Pa and the atmospheric pressure. is there.

脱気槽80内には、円板状のステージ84が吐出受面841である平滑な上面を略水平
にして中位の高さに配置されている。吐出受面841は第1実施形態と同様に撥水性の素
材で形成すると好適である。脱気槽80の下部に設置されたモータ86からは回転軸85
が上方へ立設され、回転軸85の上端がステージ84の下面中心に固定されており、モー
タ86の駆動で回転軸85を回転させてステージ84を回転可能である。ステージ84の
側方及び下方の周囲には、略W字断面の回転体の形状である受部87が設けられ、受部8
7の側周壁874はステージ84の外周縁から離間して配置されている。受部87の底板
875は、中心から外側に向かって斜め下方に傾斜して形成され、その中心には軸穴87
1が設けられており、軸穴871に回転軸85が挿通されている。側周壁874と底板8
75が突合する位置の底部873の所定箇所には液晶の流路872が形成され、底部87
3は流路872の上端開口に向かって低くなるように漸次傾斜している。流路872の下
端開口は液晶72を貯溜する貯溜部88に連通している。
In the deaeration tank 80, a disk-shaped stage 84 is disposed at a medium height with the smooth upper surface, which is the discharge receiving surface 841, substantially horizontal. The discharge receiving surface 841 is preferably formed of a water-repellent material as in the first embodiment. The motor 86 installed at the lower part of the deaeration tank 80 has a rotating shaft 85.
Is vertically installed, and the upper end of the rotary shaft 85 is fixed to the center of the lower surface of the stage 84, and the stage 84 can be rotated by rotating the rotary shaft 85 by driving the motor 86. Around the side of the stage 84 and around the lower side, a receiving portion 87 having a substantially W-shaped rotating body is provided.
7 side peripheral walls 874 are arranged apart from the outer peripheral edge of the stage 84. The bottom plate 875 of the receiving portion 87 is formed so as to be inclined obliquely downward from the center toward the outside.
1 is provided, and the rotation shaft 85 is inserted through the shaft hole 871. Side peripheral wall 874 and bottom plate 8
A liquid crystal flow path 872 is formed at a predetermined position of the bottom portion 873 at a position where 75 abuts.
3 is gradually inclined so as to become lower toward the upper end opening of the flow path 872. The lower end opening of the flow path 872 communicates with a storage portion 88 that stores the liquid crystal 72.

脱気槽80内には移送管40が導入され、図6に示すように、導入された移送管40の
他端はステージ84の吐出受面841の中心に近い位置まで延ばされ、移送管40で移送
される液晶を前記他端から吐出受面841の中心付近に滴下可能としている。また、気泡
が集まりやすい液晶72の液面を避け、貯溜部88の底部近傍、即ち、貯溜部88に貯溜
される液晶72の底部近傍に、脱気槽20から液晶を移送する移送管50の一端が配置さ
れ、移送管50は脱気槽20から導出されている。41、51はそれぞれ開閉制御で移送
管40、50の液晶移送量を調整するバルブである。
A transfer pipe 40 is introduced into the deaeration tank 80, and the other end of the introduced transfer pipe 40 is extended to a position near the center of the discharge receiving surface 841 of the stage 84 as shown in FIG. The liquid crystal transferred at 40 can be dropped from the other end to the vicinity of the center of the discharge receiving surface 841. The transfer pipe 50 for transferring liquid crystal from the deaeration tank 20 near the bottom of the reservoir 88, that is, near the bottom of the liquid crystal 72 stored in the reservoir 88, avoids the liquid level of the liquid crystal 72 where bubbles tend to collect. One end is arranged, and the transfer pipe 50 is led out from the deaeration tank 20. Reference numerals 41 and 51 denote valves for adjusting the liquid crystal transfer amounts of the transfer pipes 40 and 50 by opening / closing control, respectively.

脱気槽80で脱気処理を行う際には、図5及び図6に示すように、真空ポンプ82の駆
動等で脱気槽10内を減圧状態にし、図示しない回転制御部でモータ86を駆動し、回転
軸85を介してステージ84の吐出受面841を回転させる。吐出受面841の回転速度
は、例えば1000rpmとするが、所要レベルの脱気が可能であれば適宜であり、60
0〜1500rpmとすることが好ましく、より好適には800〜1200rpmとする
とよい。
When performing the deaeration process in the deaeration tank 80, as shown in FIGS. 5 and 6, the inside of the deaeration tank 10 is depressurized by driving the vacuum pump 82 or the like, and the motor 86 is turned on by a rotation control unit (not shown). Driven to rotate the discharge receiving surface 841 of the stage 84 via the rotation shaft 85. The rotational speed of the discharge receiving surface 841 is, for example, 1000 rpm, but is appropriate if a required level of deaeration is possible.
It is preferable to set it as 0-1500 rpm, and it is good to set it as 800-1200 rpm more suitably.

そして、第1実施形態と同様に貯溜槽10から脱気槽80に移送管40で移送した脱気
前の液晶を、移送管40の先端から吐出受面841の中心付近に吐出する。液晶の吐出量
は、所要レベルの脱気が行える範囲であれば適宜であるが、例えば200ml/時間程度
の速度で移送・吐出させると好ましい。前記吐出された液晶は、図6の二点鎖線矢印の如
く、吐出受面841に沿って前記中心付近から吐出受面841の外周縁に向かって放射状
に拡がるように流れ、表面積を拡大して流れるが、吐出受面841の回転の遠心力により
、液晶が薄く且つ均一に引き延ばされて表面積の拡大が促進される。前記表面積の拡大で
液晶と減圧雰囲気との接触面積が増加し、液晶の脱気率を高められ、又、液晶が均一に引
き延ばされるので、液晶に対する脱気の均一性を高められ、更に、遠心力で素早く液晶の
表面積が拡大されるので、脱気処理の効率を向上できる。
Then, the liquid crystal before deaeration transferred from the storage tank 10 to the deaeration tank 80 by the transfer pipe 40 is discharged from the tip of the transfer pipe 40 to the vicinity of the center of the discharge receiving surface 841 as in the first embodiment. The discharge amount of the liquid crystal is appropriate as long as it can be degassed at a required level. For example, it is preferable to transfer and discharge at a rate of about 200 ml / hour. The discharged liquid crystal flows so as to expand radially from the vicinity of the center toward the outer peripheral edge of the discharge receiving surface 841 along the discharge receiving surface 841, as indicated by a two-dot chain line arrow in FIG. Although flowing, the centrifugal force of the rotation of the discharge receiving surface 841 causes the liquid crystal to be thinly and uniformly stretched, and the expansion of the surface area is promoted. By increasing the surface area, the contact area between the liquid crystal and the reduced-pressure atmosphere is increased, the deaeration rate of the liquid crystal is increased, and since the liquid crystal is uniformly stretched, the uniformity of deaeration with respect to the liquid crystal can be enhanced, Since the surface area of the liquid crystal is quickly expanded by centrifugal force, the efficiency of the deaeration treatment can be improved.

吐出受面841で表面積を拡大された液晶は、吐出受面841の外周縁から受部87の
底部873へ落下するが、その一部は吐出受面841の遠心力で斜め下方へ飛ばされ、受
部87の側周壁874の内周面に付着し、前記内周面を落下面として、前記内周面を伝っ
て表面積を拡大しながら底部873へ落下する。ここでも液晶と減圧雰囲気との接触面積
と接触時間が増加して脱気が促進される。底部873へ落下した液晶は、底部873の傾
斜面に沿って流路872の上端開口に集まり、流路872を通って貯溜部88に貯溜され
る。その後、貯溜部88に貯溜された液晶72は、第1実施形態と同様に移送管50を介
して供給槽30のディスペンサ34へ移送される。
The liquid crystal whose surface area has been enlarged by the discharge receiving surface 841 falls from the outer peripheral edge of the discharge receiving surface 841 to the bottom portion 873 of the receiving portion 87, but a part thereof is blown obliquely downward by the centrifugal force of the discharge receiving surface 841, It adheres to the inner peripheral surface of the side peripheral wall 874 of the receiving portion 87 and drops to the bottom portion 873 while increasing the surface area along the inner peripheral surface using the inner peripheral surface as a falling surface. Again, the contact area and the contact time between the liquid crystal and the reduced-pressure atmosphere are increased to promote deaeration. The liquid crystal dropped to the bottom portion 873 gathers at the upper end opening of the flow path 872 along the inclined surface of the bottom portion 873 and is stored in the storage portion 88 through the flow path 872. Thereafter, the liquid crystal 72 stored in the storage unit 88 is transferred to the dispenser 34 of the supply tank 30 through the transfer pipe 50 as in the first embodiment.

[実施形態の変形例等]
本明細書に開示の発明は、上記課題解決手段の各発明の構成を一部変更したもの、或い
は各発明の構成を一部削除して上位概念化したものを包含するものであり、例えば以下の
ような上記実施形態等に種々の変更を加えたものも包含する。
[Modifications of Embodiment, etc.]
The invention disclosed in this specification includes a part of the configuration of each invention of the above problem solving means, or a part of the configuration of each invention that is partially deleted to create a superordinate concept. What added various changes to the said embodiment etc. is also included.

脱気槽20、80に於ける、ステージ24、84の吐出受面241、841、又は、移
送管50の外周面若しくは受部87の側周壁874の内周面等の液晶が伝って沿うように
落下する落下面など、脱気槽20、80内で減圧雰囲気と接触しながら液晶が沿うように
流れる接触促進面の形状は平滑面としたが、これに限定されず、例えば接触促進面の部分
領域若しくは全体領域に凹凸を形成すると、表面積の大きい状態での液晶と減圧雰囲気と
の接触時間を増加できて良好である。前記凹凸は、例えば液晶の流れが乗り越えられるよ
うに、凸条若しくは突起など微細な凸部、凹溝若しくは窪みなど微細な凹部を形成する構
成、又は、起伏となる凸部若しくは凹部を形成する構成とすることが好ましく、更に、凸
部若しくは凹部とその他の領域とが曲面状に連続する形状とすると、乱流化を抑制し液晶
の流れをスムーズにできて好適である。また、凹凸の形成パターンは適宜であるが、所定
ピッチの連続パターンとすることが好ましく、例えば凸条を格子状に形成する構成、或い
は吐出箇所から略同心円状に所定ピッチで凸条を形成する構成とするとよい。図7はステ
ージ24の吐出受面241に所定ピッチで格子状の凸条243を形成した例である。また
、凸条・突起など凸部の高さ、又は、凹溝・窪みなど凹部の深さは、吐出受面241、8
41など接触促進面に沿って流れる液晶の厚さより小さくするか略同一とすると好適であ
り、例えば1mm前後の厚さで液晶が流れる場合には0mm超1mm以下とすることが好
ましい。
In the deaeration tanks 20, 80, liquid crystals such as the discharge receiving surfaces 241, 841 of the stages 24, 84, the outer peripheral surface of the transfer pipe 50, or the inner peripheral surface of the side peripheral wall 874 of the receiving portion 87 are transmitted along. The shape of the contact promoting surface that flows along the liquid crystal while in contact with the reduced-pressure atmosphere in the degassing tanks 20 and 80, such as a falling surface that falls on the surface, is a smooth surface. When unevenness is formed in the partial region or the entire region, the contact time between the liquid crystal and the reduced-pressure atmosphere in a state where the surface area is large can be increased, which is favorable. For example, the projections and depressions are formed with fine convex portions such as ridges or protrusions, or fine concave portions such as concave grooves or depressions, or formed with undulating convex portions or concave portions so that the flow of liquid crystal can be overcome. Further, it is preferable that the convex portion or the concave portion and the other region have a curved surface shape so that the turbulent flow can be suppressed and the liquid crystal can flow smoothly. In addition, the irregularity formation pattern is appropriate, but it is preferable to use a continuous pattern with a predetermined pitch. For example, the convex stripes are formed at a predetermined pitch substantially concentrically from the discharge location, or a configuration in which the convex stripes are formed in a grid pattern. It may be configured. FIG. 7 shows an example in which grid-like ridges 243 are formed at a predetermined pitch on the discharge receiving surface 241 of the stage 24. Further, the height of the convex portions such as the convex stripes and protrusions or the depth of the concave portions such as the concave grooves and depressions is determined by the discharge receiving surfaces 241 and 8.
It is preferable that the thickness of the liquid crystal flowing along the contact promoting surface such as 41 is smaller than or substantially the same. For example, when the liquid crystal flows with a thickness of about 1 mm, the thickness is preferably more than 0 mm and 1 mm or less.

また、本発明の接触促進部は、略面状の接触促進面に限定されず、例えば吐出受面24
1等に形成した液晶が沿うように流れる溝状の接触促進経路としてもよい。接触促進経路
の形状は、渦巻状の経路や、蛇行経路など適宜である。図8は吐出受面241に接触促進
経路として渦巻状の溝経路244を形成した例であり、吐出受面241の中心近傍に位置
する溝経路244の一端付近に液晶を滴下し、溝経路244に沿って液晶を流し、吐出受
面241の外周縁と接する溝経路244の他端から液晶を落下する構成である。溝経路2
44は、その一端から他端へ漸次低くなるように底面を傾斜させると、粘性を有する液晶
が流れやすくなり好適である。
Moreover, the contact promotion part of this invention is not limited to a substantially planar contact promotion surface, For example, the discharge receiving surface 24
It may be a groove-like contact promotion path that flows along the liquid crystal formed in the first grade. The shape of the contact promotion path is appropriate such as a spiral path or a meander path. FIG. 8 shows an example in which a spiral groove path 244 is formed as a contact promoting path on the discharge receiving surface 241. Liquid crystal is dropped near one end of the groove path 244 located near the center of the discharge receiving surface 241, and the groove path 244 is formed. And the liquid crystal is dropped from the other end of the groove path 244 in contact with the outer peripheral edge of the discharge receiving surface 241. Groove path 2
If the bottom surface is inclined so that it gradually becomes lower from one end to the other end, the liquid crystal having viscosity can easily flow.

また、本発明の液晶の種類は限定されず、ネマティック液晶、スメクティック液晶、コ
レステリック液晶など適宜である。また、本発明では、常温の液晶を移送する構成に限定
されず、部分的若しくは全体的な移送経路に於いて、昇温した液晶を移送する構成として
もよく、液晶を昇温することで粘度を低下させ、移送処理や脱気処理の速さを高めること
ができる。液晶を昇温する場合には、例えば図1の貯溜槽10にヒーターを設け、貯溜槽
10の液晶71を昇温して、移送管40を介して脱気槽20内に吐出する構成とする。液
晶を昇温する際の上限温度は、液晶の成分が変化する温度未満の所定温度とし、例えば6
0℃程度とする。また、貯溜槽10、脱気槽20の下部、貯溜部88には、貯溜する液晶
71、72の液面の上限と下限を認知するレベルセンサを設け、レベルセンサの認知情報
をディスプレイ装置やスピーカ装置など各種装置に送って報知する構成とすることが好ま
しい。前記レベルセンサを設ける場合には、移送管40、50の一端は前記レベルセンサ
の下限液面より下側に設けることが好ましい。
In addition, the type of the liquid crystal of the present invention is not limited, and a nematic liquid crystal, a smectic liquid crystal, a cholesteric liquid crystal, or the like is appropriate. Further, the present invention is not limited to the configuration for transferring the liquid crystal at room temperature, and may be configured to transfer the heated liquid crystal in a partial or overall transfer path. And the speed of the transfer process and deaeration process can be increased. When raising the temperature of the liquid crystal, for example, a heater is provided in the storage tank 10 of FIG. 1, and the liquid crystal 71 of the storage tank 10 is heated and discharged into the deaeration tank 20 through the transfer pipe 40. . The upper limit temperature for raising the temperature of the liquid crystal is a predetermined temperature lower than the temperature at which the liquid crystal component changes, for example, 6
Set to about 0 ° C. In addition, the storage tank 10, the lower part of the deaeration tank 20, and the storage unit 88 are provided with level sensors for recognizing the upper and lower limits of the liquid level of the liquid crystals 71 and 72 to be stored. It is preferable that the information is sent to various devices such as a device for notification. When the level sensor is provided, it is preferable that one end of the transfer pipes 40 and 50 is provided below the lower limit liquid level of the level sensor.

また、供給槽30で液晶が供給されるのは液晶セル60に限定されず、液晶を供給可能
な種々の液晶装置の半製品とすることが可能である。例えば図9に示すように、液晶セル
60の基板62又は61を貼り合わせる前の状態、即ち、略額縁状にシール材63が形成
された基板61又は62としてもよい。この場合、基板61のシール材63で囲まれた領
域内にディスペンサ34から所定ピッチで液晶74が滴下され、その後に基板62又は6
1を貼り合わせる滴下注入法で液晶が充填される。
In addition, the supply of liquid crystal in the supply tank 30 is not limited to the liquid crystal cell 60, and it is possible to make semi-finished products of various liquid crystal devices capable of supplying liquid crystal. For example, as shown in FIG. 9, a state before the substrates 62 or 61 of the liquid crystal cell 60 are bonded together, that is, a substrate 61 or 62 in which a sealing material 63 is formed in a substantially frame shape may be used. In this case, the liquid crystal 74 is dropped from the dispenser 34 at a predetermined pitch in the region surrounded by the sealing material 63 of the substrate 61, and then the substrate 62 or 6.
The liquid crystal is filled by a dropping injection method in which 1 is bonded.

また、供給槽30で液晶装置の半製品に液晶を供給するのはディスペンサ34に限定さ
れず、適宜の供給手段とすることが可能である。例えば図10に示すように、ディスペン
サ34に代えて浸漬槽35を設けてもよい。この場合には、供給槽30を減圧状態としな
がら、浸漬槽35に移送管50から液晶を供給し、液晶セル60の液晶充填口631を浸
漬槽35内の液晶溜まりに浸漬し、その後にバルブ33を開放して大気に開放し、供給槽
30の大気圧と液晶セル60の空間66の減圧状態の圧力との圧力差により、液晶充填口
631から空間66内に液晶を注入する真空注入法で液晶を充填する。
Further, the supply of liquid crystal to the semi-finished liquid crystal device in the supply tank 30 is not limited to the dispenser 34, and any appropriate supply means can be used. For example, as shown in FIG. 10, an immersion tank 35 may be provided instead of the dispenser 34. In this case, while the supply tank 30 is in a reduced pressure state, liquid crystal is supplied from the transfer pipe 50 to the immersion tank 35, the liquid crystal filling port 631 of the liquid crystal cell 60 is immersed in the liquid crystal reservoir in the immersion tank 35, and then the valve 33 is opened to the atmosphere, and a vacuum injection method in which liquid crystal is injected into the space 66 from the liquid crystal filling port 631 by the pressure difference between the atmospheric pressure in the supply tank 30 and the pressure in the decompressed state of the space 66 of the liquid crystal cell 60. Fill the liquid crystal with.

本発明の液晶移送装置の第1実施形態を示す模式構成図である。It is a schematic block diagram which shows 1st Embodiment of the liquid-crystal transfer apparatus of this invention. 第1実施形態に於ける脱気槽のステージを示す斜視図である。It is a perspective view which shows the stage of the deaeration tank in 1st Embodiment. (a)は図1の液晶移送装置に於ける供給槽で液晶が滴下される液晶セルを示す平面構成図、(b)はそのA−A線矢視断面図である。(A) is a plane block diagram which shows the liquid crystal cell by which a liquid crystal is dripped by the supply tank in the liquid-crystal transfer apparatus of FIG. 1, (b) is the AA arrow directional cross-sectional view. 第1実施形態の液晶移送工程のフローチャートである。It is a flowchart of the liquid-crystal transfer process of 1st Embodiment. 第2実施形態の液晶移送装置に於ける脱気槽を示す断面説明図である。It is sectional explanatory drawing which shows the deaeration tank in the liquid-crystal transfer apparatus of 2nd Embodiment. 第2実施形態に於ける脱気槽のステージを示す斜視図である。It is a perspective view which shows the stage of the deaeration tank in 2nd Embodiment. (a)は吐出受面の変形例を示す平面図、(b)は同図(a)の吐出受面を有するステージの部分縦断面である。(A) is a top view which shows the modification of a discharge receiving surface, (b) is the partial longitudinal cross-section of the stage which has the discharge receiving surface of the same figure (a). 吐出受面の他の変形例を示す平面図。The top view which shows the other modification of an ejection receiving surface. 供給槽のディスペンサからシール材を有する基板に液晶が滴下される例を示す斜視説明図である。It is perspective explanatory drawing which shows the example by which a liquid crystal is dripped from the dispenser of a supply tank to the board | substrate which has a sealing material. 変形例の供給槽及び液晶が注入される液晶セルを示す断面説明図である。It is sectional explanatory drawing which shows the liquid crystal cell into which the supply tank and liquid crystal of a modification are inject | poured.

符号の説明Explanation of symbols

10…貯溜槽 20、80…脱気槽 21、23、81、83…バルブ 22、82…真
空ポンプ 24、84…ステージ 241、841…吐出受面 242…貫通孔 243
…凸条 244…溝経路 25…支柱 85…回転軸 86…モータ 87…受部 87
1…軸穴 872…流路 873…底部 874…側周壁 875…底板 88…貯溜部
30…供給槽 31、33…バルブ 32…真空ポンプ 34…ディスペンサ 35…
浸漬槽 40、50…移送管 41、51…バルブ 60…液晶セル 61、62…基板
63…シール材 631…液晶充填口 64、65…配向膜 66…空間 71、72
、73、74…液晶
DESCRIPTION OF SYMBOLS 10 ... Storage tank 20, 80 ... Deaeration tank 21, 23, 81, 83 ... Valve 22, 82 ... Vacuum pump 24, 84 ... Stage 241, 841 ... Discharge receiving surface 242 ... Through-hole 243
... ridge 244 ... groove path 25 ... support 85 ... rotating shaft 86 ... motor 87 ... receiving part 87
DESCRIPTION OF SYMBOLS 1 ... Shaft hole 872 ... Flow path 873 ... Bottom part 874 ... Side peripheral wall 875 ... Bottom plate 88 ... Storage part 30 ... Supply tank 31, 33 ... Valve 32 ... Vacuum pump 34 ... Dispenser 35 ...
Immersion tank 40, 50 ... Transfer pipe 41, 51 ... Valve 60 ... Liquid crystal cell 61, 62 ... Substrate 63 ... Sealing material 631 ... Liquid crystal filling port 64, 65 ... Alignment film 66 ... Space 71, 72
73, 74 ... Liquid crystal

Claims (15)

液晶を貯溜する第1の槽と、
前記第1の槽から液晶が移送される第2の槽とを備え、
前記第1の槽と前記第2の槽との圧力差により、前記第1の槽から前記第2の槽へ液晶を
移送することを特徴とする液晶移送装置。
A first tank for storing liquid crystal;
A second tank in which liquid crystal is transferred from the first tank,
A liquid crystal transfer device, wherein the liquid crystal is transferred from the first tank to the second tank by a pressure difference between the first tank and the second tank.
前記第2の槽から液晶が移送される第3の槽とを備え、
前記第2の槽と前記第3の槽との圧力差により、前記第2の槽から前記第3の槽へ液晶を
移送することを特徴とする請求項1記載の液晶移送装置。
A third tank in which liquid crystal is transferred from the second tank,
The liquid crystal transfer device according to claim 1, wherein liquid crystal is transferred from the second tank to the third tank by a pressure difference between the second tank and the third tank.
前記第1の槽を、液晶を減圧雰囲気下で脱気して貯溜すると共に減圧状態を解除可能な脱
気槽とし、
前記第2の槽を、液晶を減圧雰囲気下で液晶装置の半製品に供給する供給槽とすること
を特徴とする請求項1記載の液晶移送装置。
The first tank is a deaeration tank capable of degassing and storing the liquid crystal in a reduced pressure atmosphere and releasing the reduced pressure state,
The liquid crystal transfer device according to claim 1, wherein the second tank is a supply tank that supplies liquid crystal to a semi-finished product of the liquid crystal device in a reduced pressure atmosphere.
前記第1の槽を、脱気前の液晶を貯溜する貯溜槽とし、
前記第2の槽を、液晶を減圧雰囲気下で脱気する脱気槽とすることを特徴とする請求項
1記載の液晶移送装置。
The first tank is a storage tank for storing liquid crystal before deaeration,
2. The liquid crystal transfer device according to claim 1, wherein the second tank is a deaeration tank for degassing the liquid crystal under a reduced pressure atmosphere.
前記第1の槽を、脱気前の液晶を貯溜する貯溜槽とし、
前記第2の槽を、液晶を減圧雰囲気下で脱気して貯溜すると共に減圧状態を解除可能な
脱気槽とし、
前記第3の槽を、液晶を減圧雰囲気下で液晶装置の半製品に供給する供給槽とすること
を特徴とする請求項2記載の液晶移送装置。
The first tank is a storage tank for storing liquid crystal before deaeration,
The second tank is a deaeration tank capable of degassing and storing the liquid crystal in a reduced pressure atmosphere and releasing the reduced pressure state,
3. The liquid crystal transfer device according to claim 2, wherein the third tank is a supply tank that supplies liquid crystal to a semi-finished product of the liquid crystal device under a reduced pressure atmosphere.
前記圧力差で移送される液晶の移送量を制御する制御部を設けることを特徴とする請求
項1〜5の何れかに記載の液晶移送装置。
The liquid crystal transfer device according to claim 1, further comprising a control unit that controls a transfer amount of the liquid crystal transferred by the pressure difference.
前記第1の槽、前記第2の槽若しくはその双方に貯溜される液晶の液面下に一端を配置
する移送管で液晶を移送することを特徴とする請求項1〜6の何れかに記載の液晶移送装
置。
The liquid crystal is transferred by a transfer pipe having one end disposed below the liquid surface of the liquid crystal stored in the first tank, the second tank, or both. Liquid crystal transfer device.
前記移送管の一端を前記貯溜される液晶の底部近傍に配置することを特徴とする請求項
7記載の液晶移送装置。
8. The liquid crystal transfer device according to claim 7, wherein one end of the transfer pipe is disposed in the vicinity of the bottom of the stored liquid crystal.
前記供給槽へ移送するために前記脱気槽に貯溜される脱気後の液晶の液面下に前記移送
管の一端を配置することを特徴とする請求項7又は8記載の液晶移送装置。
9. The liquid crystal transfer device according to claim 7, wherein one end of the transfer pipe is disposed below the liquid level of the liquid after deaeration stored in the deaeration tank for transfer to the supply tank.
前記供給槽のディスペンサに液晶を移送し、前記ディスペンサで前記液晶装置の半製品
に液晶を滴下することを特徴とする請求項3、5〜9の何れかに記載の液晶移送装置。
The liquid crystal transport device according to claim 3, wherein the liquid crystal is transported to a dispenser of the supply tank, and the liquid crystal is dropped onto a semi-finished product of the liquid crystal device by the dispenser.
前記脱気槽内に吐出された液晶が前記減圧雰囲気と接触しながら沿うように流れ、前記減
圧雰囲気と液晶との接触を促進する接触促進部を備えることを特徴とする請求項3〜10
の何れかに記載の液晶移送装置。
The liquid crystal discharged in the said deaeration tank flows so that it may contact along with the said decompression atmosphere, and the contact promotion part which accelerates | stimulates the contact with the said decompression atmosphere and a liquid crystal is provided.
A liquid crystal transfer device according to any one of the above.
前記接触促進部として、前記吐出された液晶が略放射状に拡がるように流れる吐出受面を
有することを特徴とする請求項11記載の液晶移送装置。
12. The liquid crystal transfer device according to claim 11, wherein the contact promoting portion has a discharge receiving surface that flows so that the discharged liquid crystal expands substantially radially.
前記吐出受面を回転させ、前記吐出受面の中心近傍に液晶を吐出することを特徴とする
請求項12記載の液晶移送装置。
The liquid crystal transfer device according to claim 12, wherein the discharge receiving surface is rotated to discharge liquid crystal in the vicinity of the center of the discharge receiving surface.
液晶を貯溜する第1の槽と第2の槽との圧力差により、前記第1の槽から前記第2の槽
へ液晶を移送することを特徴とする液晶移送方法。
A liquid crystal transfer method, wherein the liquid crystal is transferred from the first tank to the second tank by a pressure difference between the first tank and the second tank for storing liquid crystal.
請求項1〜13の何れかに記載の液晶移送装置で液晶を移送して液晶装置に充填するこ
とを特徴とする液晶装置の製造方法。
A method of manufacturing a liquid crystal device, wherein the liquid crystal is transferred by the liquid crystal transfer device according to claim 1 and filled in the liquid crystal device.
JP2006323101A 2006-11-30 2006-11-30 Liquid crystal transfer device and method of manufacturing liquid crystal device Expired - Fee Related JP5076463B2 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051970A (en) * 1972-12-04 1975-05-09
JPS60254118A (en) * 1984-05-31 1985-12-14 Fujitsu Ltd Liquid crystal injection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5051970A (en) * 1972-12-04 1975-05-09
JPS60254118A (en) * 1984-05-31 1985-12-14 Fujitsu Ltd Liquid crystal injection device

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