JP2008114206A - Droplet discharge device and layout method of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a droplet discharge device which enables minifying of an installation space of a head maintenance part as much as possible, and a layout method of the droplet discharge device. <P>SOLUTION: The droplet discharge device 1 comprises a functional liquid discharge part 1A, 1A' moving relatively a set table 21 and a head unit 13 mounting a functional liquid discharge head 82, and discharging a functional liquid from the functional liquid discharge head 82, and the head maintenance part 10 carrying out a maintenance of the functional liquid discharge head 82. The head maintenance part 10 is installed on a place off a moving region of the set table 21. A plurality of functional liquid discharge parts 1A, 1A' share the head maintenance part 10. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a droplet discharge device that discharges a functional liquid from a functional droplet discharge head to a work while moving a head unit on which the functional droplet discharge head is mounted relative to the workpiece, and a method for arranging the droplet discharge device. Is.

  2. Related Art There is known a droplet discharge device that manufactures various products (for example, a color filter of a liquid crystal display device) by a droplet discharge method using a functional droplet discharge head. The droplet discharge device moves an X-axis direction moving mechanism that moves a substrate transfer table (set table) on which a substrate (workpiece) is set in the X-axis direction, and a head unit equipped with a functional droplet discharge head in the Y-axis direction. And a Y-axis direction moving mechanism. The area where the moving area of the head unit and the moving area of the substrate transfer table overlap is a droplet discharge area for drawing on the substrate. In the droplet discharge apparatus, the head unit and the substrate function while moving relatively. By driving the droplet discharge head to discharge, a predetermined drawing pattern is drawn on the substrate facing the droplet discharge region.

  On the other hand, the droplet discharge device is provided with a head maintenance unit for maintaining the functional droplet discharge head. The head maintenance unit performs capping, suction, wiping, ink weight measurement, and flushing of the functional liquid droplet ejection head during non-drawing processing in which drawing processing is not performed on the workpiece. The head maintenance unit is provided below the head unit moving area by the Y-axis direction moving mechanism and at a location adjacent to the substrate conveying table outside the moving area of the substrate conveying table. When performing the above, the head unit is moved to a position directly above the head maintenance section.

By the way, since the head maintenance unit is installed at a location adjacent to the substrate transfer table that is out of the movement area of the substrate transfer table, for example, when a plurality of droplet discharge devices are installed in parallel, each substrate transfer table The head maintenance section was installed at a position adjacent to the moving area, and the installation space for the head maintenance section was increased, resulting in poor factory floor layout efficiency. In particular, the droplet discharge device in which the substrate to be drawn is a large panel substrate is large, and the installation space for the head maintenance unit becomes very large and wasted.
JP 2006-76066 A

  The present invention has been made in view of the above-described points, and an object of the present invention is to provide a droplet discharge device and a method for arranging the droplet discharge device that can minimize the installation space of the head maintenance unit.

  The present invention relates to a functional liquid discharge unit that discharges a functional liquid from the functional liquid droplet discharge head by relatively moving a head unit on which the functional liquid droplet discharge head is mounted and a set table, and maintenance of the functional liquid droplet discharge head. A head maintenance unit to perform, wherein the head maintenance unit is installed at a location outside the moving area of the set table, and the plurality of functional liquid ejection units share the head maintenance unit. It is in the droplet discharge device.

  The present invention resides in a liquid droplet ejection apparatus in which a plurality of the functional liquid ejection units are arranged symmetrically with respect to the head maintenance unit.

  The present invention resides in a droplet discharge device characterized in that a plurality of the functional liquid discharge portions are installed symmetrically with the head maintenance portion as a center.

  The present invention relates to a functional liquid discharge unit that discharges a functional liquid from the functional liquid droplet discharge head by relatively moving a head unit on which the functional liquid droplet discharge head is mounted and a set table, and maintenance of the functional liquid droplet discharge head. And a head maintenance unit to be performed, and the head maintenance unit is disposed at a position outside the moving area of the set table and shared by the plurality of functional liquid ejection units. It is in the arrangement method of the droplet discharge device.

  The present invention lies in a method for arranging a droplet discharge device, wherein the plurality of functional liquid discharge units are arranged symmetrically with respect to the head maintenance unit.

  The present invention lies in a method for arranging a droplet discharge device, wherein the plurality of functional liquid discharge units are disposed symmetrically with respect to the head maintenance unit.

  According to the present invention, since the head maintenance unit is shared by the plurality of functional liquid ejection units, the head maintenance unit provided separately for each functional liquid ejection unit can be a single head maintenance unit, The equipment cost can be reduced accordingly, and the installation space for the head maintenance section can be eliminated as much as possible.

  According to the present invention, since the plurality of functional liquid ejection units are arranged symmetrically with the head maintenance unit as the center, the workpiece can be supplied to and taken out from each functional liquid ejection unit from the same direction. Therefore, the layout of the work transfer system can be simplified.

  According to the present invention, since the plurality of functional liquid ejection units are installed symmetrically with respect to the head maintenance unit, the side on which the head maintenance unit is installed is the same in any functional liquid ejection unit. Only one type of design variation is required for the discharge section.

  According to the present invention, since the head maintenance unit is arranged at a position shared by the plurality of functional liquid ejection units, it is not necessary to separately install a head maintenance unit for each functional liquid ejection unit, and the equipment cost is accordingly reduced. Not only can it be reduced, but the installation space for the head maintenance section can be eliminated as much as possible.

  According to the present invention, since the plurality of functional liquid ejection units are installed symmetrically with the shared head maintenance unit as the center, it is possible to supply and remove the workpieces to and from each functional liquid ejection unit from the same direction. it can. Therefore, the layout of the work transfer system can be simplified.

  According to the present invention, since the plurality of functional liquid ejection units are installed symmetrically around the shared head maintenance unit, the side on which the head maintenance unit is installed is the same side in any functional liquid ejection unit, Therefore, only one type of design variation is required for each functional liquid discharge unit.

  Hereinafter, a droplet discharge apparatus to which the present invention is applied will be described in detail with reference to the drawings. This droplet discharge device is incorporated in a so-called flat display production line, and R (red) and G (green) are applied onto a workpiece (substrate) by a droplet discharge method using a functional droplet discharge head. Forms a color filter of a liquid crystal display device composed of three colors of B (blue), a light emitting element serving as each pixel of an organic EL device, and the like.

  FIG. 1 is an overall schematic configuration diagram of a droplet discharge apparatus 1 to which the present invention is applied. As shown in the figure, the droplet discharge apparatus 1 uses a main scanning moving means for relatively moving a head unit 13 mounted with a functional droplet discharging head 82 described below in the main scanning direction (X-axis direction). The functional liquid droplet ejection head 82 is driven to discharge while the head unit 13 is relatively moved in the main scanning direction within the drawing area with respect to the set table 21 facing the area, and is set on the set table 21. Two functional liquid discharge units 1A and 1A ′ that perform drawing processing on the workpiece W are provided side by side, and one adjacent head functional maintenance unit 10 is shared by two adjacent functional liquid discharge units 1A and 1A ′. It is configured as follows. The head maintenance unit 10 is a unit (head cleaning unit) that performs maintenance (head cleaning) of the functional liquid droplet ejection head 82 by moving the head unit 13 directly above the head unit 13, and is out of the moving area of both set tables 21. Installed, that is, at a position between two adjacent functional liquid ejection sections 1A and 1A ′ (position between both head units 13).

  Like the droplet discharge device 1, the head maintenance unit 10 is shared by the functional liquid discharge units 1A and 1A ′ that are installed adjacent to each other, and thus is provided separately for each of the functional liquid discharge units 1A and 1A ′. The head maintenance unit 10 can be a single head maintenance unit 10, which not only reduces the equipment cost by that amount, but also eliminates unnecessary installation space as much as possible. In particular, the droplet discharge device 1 for a large panel substrate is very large, and the space of the head maintenance unit 10 of the droplet discharge device 1 is very useless, and therefore the layout efficiency of the factory floor is poor. However, according to this droplet discharge device 1, the waste of the installation space for the head maintenance unit 10 can be greatly eliminated.

  In the case of the droplet discharge device 1 shown in FIG. 1, the functional liquid discharge portions 1A and 1A ′ on both sides of the common head maintenance portion 10 are arranged symmetrically. If comprised in this way, supply and taking-out of the workpiece | work W to the functional liquid discharge parts 1A and 1A 'can be performed from the same direction (conveyance system B). Accordingly, the layout of the work transfer system B is simplified. In the transport system B, for example, a transport robot (not shown) is installed which transports the work W and supplies and removes the work W from the set table 21.

  FIG. 2 is an overall schematic configuration diagram of a droplet discharge device 1-2 according to another embodiment to which the present invention is applied. In the droplet discharge device 1-2 shown in the figure, the same or corresponding parts as those in the droplet discharge device 1 according to the embodiment shown in FIG. Items other than those described below are the same as those in the embodiment shown in FIG. Also in the case of the droplet discharge device 1-2, a main scanning moving unit that relatively moves the head unit 13 mounted with the functional droplet discharge head 82 described below in the main scanning direction (X-axis direction) is used in the drawing region. A work set on the set table 21 is driven by ejecting the functional liquid droplet ejection head 82 while moving the head unit 13 relative to the set table 21 facing the main table in the main scanning direction. Two functional liquid ejection units 1A and 1A ′ for performing drawing processing on W are provided side by side, and one head maintenance unit 10 is shared by two adjacent functional liquid ejection units 1A and 1A ′. It is composed.

  Also in this embodiment, since the head maintenance unit 10 is shared by the functional liquid discharge units 1A and 1A ′ installed adjacent to each other, the head maintenance unit 10 provided separately for each of the functional liquid discharge units 1A and 1A ′. Can be used as one head maintenance unit 10, and not only the equipment cost can be reduced correspondingly, but also a useless installation space can be eliminated as much as possible. In particular, the droplet discharge device 1-2 for a large panel substrate is very large, and the installation space of the head maintenance unit 10 is very useless. Accordingly, it is possible to eliminate a significant waste of installation space for the head maintenance unit 10.

  The difference between the droplet discharge device 1-2 and the droplet discharge device 1 is that the functional liquid discharge portions 1A and 1A 'on both sides of the common head maintenance portion 10 are placed symmetrically. This is the point. With this configuration, the side on which the head maintenance unit 10 is installed becomes the same side when viewed from any one of the functional liquid discharge units 1A and 1A ′. Therefore, there is one type of design variation for each functional liquid discharge unit 1A and 1A ′. That's it. Therefore, the facility cost can be reduced also from this point.

  Next, a specific configuration example of the droplet discharge device 1 shown in FIG. 1 will be described. 3 is an overall schematic perspective view of the droplet discharge device 1, FIG. 4 is a plan view of the droplet discharge device 1 with the bridge plate 71 removed, and FIG. 5 is a side view of the droplet discharge device 1. The figure also shows a state in which the set table (suction table) 21 faces the workpiece replacement position. As shown in FIGS. 3 to 5, the droplet discharge device 1 includes two functional liquid discharge units 1 </ b> A and 1 </ b> A ′, and one unit for each of the two functional liquid discharge units 1 </ b> A and 1 </ b> A ′. The head maintenance unit 10 (not shown in FIGS. 3 and 5) is shared. That is, the head maintenance unit 10 is installed at a position between two adjacent functional liquid ejection units 1A and 1A ′ (a position between both head units 13).

  Each of the functional liquid discharge units 1A and 1A ′ is disposed on the X-axis support base 2 (stone surface plate) and extends in the X-axis direction which is the main scanning direction, thereby moving the workpiece W in the X-axis direction (main An X-axis table 11 (main scanning movement means) that is moved in the scanning direction) and a pair (two) of Y-axis support bases 3 that are spanned across the X-axis table 11 via a plurality of columns 4. Seven carriage units mounted on the Y-axis table 12 (sub-scanning moving means) disposed above and extending in the Y-axis direction serving as the sub-scanning direction, and a plurality of functional liquid droplet ejection heads 82 (not shown) And a head unit 13 supported by the Y-axis table 12 so as to be movable in the Y-axis direction (sub-scanning direction). One set of Y-axis support base 3 is shared by the two functional liquid discharge units 1A and 1A ′. Then, the functional liquid droplet ejection head 82 described below is driven to discharge in synchronization with the driving of the X-axis table 11 and the Y-axis table 12, thereby discharging R, G, and B3 functional liquid droplets to the workpiece W in a predetermined manner. The drawing pattern is drawn (drawing process).

  The functional liquid discharge units 1A and 1A ′ include a flushing unit 14, a suction unit 15, a wiping unit 16, and a discharge defect inspection unit 17 (collectively referred to as maintenance means), which are used as a functional liquid droplet discharge head. For the maintenance of the function 82, the function of the functional liquid droplet ejection head 82 is maintained and recovered (maintenance processing). Of the units constituting the maintenance means, the flushing unit 14 and the ejection failure inspection unit 17 are mounted on the X-axis table 11, and the head maintenance unit 10 including the suction unit 15 and the wiping unit 16 is the X-axis table. The head unit 13 is installed on a pedestal 5 disposed at a position where the head unit 13 can be moved by the Y-axis table 12.

  Although not shown, the droplet discharge device 1 is provided with a control unit 18 that controls the entire apparatus, and the above drawing process and maintenance process are performed based on the control by the control unit 18. Yes.

  Hereinafter, each component of the functional liquid ejection units 1A and 1A ′ will be described. 3 to 5, the X-axis table 11 includes a set table 21 for setting a workpiece W, an X-axis air slider 22 for slidably supporting the set table 21 in the X-axis direction, and an X-axis direction. A pair of left and right X-axis linear motors (not shown) that extend and move the workpiece W in the X-axis direction via the set table 21 and the X-axis linear motor are arranged in parallel to guide the movement of the X-axis air slider 22 And a pair of (two) X-axis guide rails 23.

  The set table 21 includes a suction table 31 for sucking and setting the work W, and a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. Yes. As shown in FIG. 11, the suction table 31 is fixed to a table body 41 for sucking and setting the workpiece W, three sets of table support members (not shown) for supporting the table body 41 at three points, and a θ table 32, And a support base 42 that supports the table main body 41 via a table support member. The table main body 41 is made of a thick plate-shaped stone, and is formed in a substantially square shape with a side of 1800 mm in plan view. A plurality of suction grooves 43 for sucking the workpiece W are formed on the surface of the table main body 41, and suction holes (not shown) are formed through the suction grooves 43. Thus, a sufficient suction force can be applied to the workpiece W.

  The support base 42 supports a pre-drawing flushing unit 111, which will be described later, together with three sets of table support members. The pre-drawing flushing unit 111 is disposed on a pair of sides parallel to the Y-axis direction of the table body 41. A pair of pre-drawing flushing boxes 121 (to be described later) is attached. Reference numeral 44 in the figure denotes a number of loose insertion holes for loosely inserting a number of lifter pins (not shown) of a lifter mechanism (not shown). The suction table 31 includes a lifter mechanism that removes workpieces from the suction table 31. The lifter mechanism is supported by the support base 42 and has a number of lifter pins configured to be movable up and down. Then, by unloading a large number of lifter pins from a large number of loose insertion holes 44 formed in the table main body 41, an unprocessed work W is received from a robot arm (not shown) and delivered to the suction table 31, The processed work W is lifted up from the set table 21 and transferred to the robot arm.

  As shown in FIGS. 3 and 5, the X-axis air slider 22 is fixed to the slider main body 51 that supports the set table 21 (θ table 32) and the lower part of the slider main body 51, and is attached to the pair of X-axis guide rails 23. And a pair (two sets of four) of engaging portions 52 to be engaged. Along with the set table 21, a regular flushing unit 112 of the flushing unit 14 and a drawing unit 161 of the ejection failure inspection unit 17 (both described later) are mounted on the slider body 51. When the pair of X-axis linear motors are driven (synchronized), the X-axis air slider 22 moves in the X-axis direction while being guided by the pair of X-axis guide rails 23 by the pair of engaging portions 52 and set. The workpiece W set on the table 21 moves in the X-axis direction (main scanning movement).

  Note that the position on the near side in the figure in FIG. 4 is the position where the workpiece W is replaced, and when the unprocessed workpiece W is introduced into the suction table 31 or when the processed workpiece W is collected, the suction table. 31 is moved to this position. Reference numeral 62 in the figure denotes a work alignment camera for recognizing the position of the work W, and θ correction of the work W by the θ table 32 is performed based on the imaging result of the work alignment camera 62.

  The Y-axis table 12 includes seven bridge plates 71 that are respectively inserted and fixed to the seven carriage units 81 (carriages 85) that constitute the head unit 13, and seven sets 14 that support the seven bridge plates 71 in both ends. A pair of Y-axis sliders (not shown) and a pair of Y-axis installed on the above-described pair of Y-axis support bases 3 and moving the bridge plate 71 in the Y-axis direction via 14 sets of 14 Y-axis sliders A pair of Y motors installed on the Y-axis support base 3 alongside the linear motor (not shown) and the Y-axis linear motor, supporting seven sets of 14 Y-axis sliders and guiding the movement of each Y-axis slider A shaft guide rail (not shown).

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates simultaneously in the Y-axis direction using the pair of Y-axis guide rails as a guide. As a result, the bridge plate 71 moves in the Y-axis direction with both ends being held, and at the same time, the carriage unit 81 moves in the Y-axis direction (sub-scanning movement). In this case, each bridge plate 71 (carriage unit 81) can be moved independently by controlling the drive of the Y-axis linear motor, or all seven bridge plates 71 are integrated. It is also possible to move it.

  As shown in FIGS. 3 to 5, the head unit 13 is configured by aligning seven similarly configured carriage units 81 in the Y-axis direction. Each carriage unit 81 includes twelve functional liquid droplet ejection heads 82 described below, six head holding plates 83 described below that hold two of these twelve functional liquid droplet ejection heads 82, and six heads. A head plate 84 on which twelve functional liquid droplet ejection heads 82 are mounted and a carriage 85 that supports the head plate 84 are provided via a holding plate 83.

  As shown in FIG. 6, the functional liquid droplet ejection head 82 is a so-called double series, a functional liquid introduction part 91 having two series of connecting needles 92, and a double series of head substrates connected to the functional liquid introduction part 91. 93, and a head main body 94 which is connected to the lower side of the functional liquid introducing portion 91 and has an in-head flow path filled with the functional liquid therein. The connection needle 92 is connected to a functional liquid tank (not shown), and supplies the functional liquid to the functional liquid introduction unit 91. The head main body 94 includes a cavity 95 (piezoelectric piezoelectric element) and a nozzle plate 96 having a nozzle surface 97 in which a large number of discharge nozzles 98 are opened. When the functional droplet discharge head 82 is driven to discharge, a functional droplet is discharged from the discharge nozzle 98 by the pump action of the cavity 95 (a voltage is applied to the piezoelectric element).

  A large number of discharge nozzles 98 formed on the nozzle surface 97 are aligned at an equal pitch (2-dot pitch interval) to form two divided nozzle rows 98b composed of 180 discharge nozzles 98. The two divided nozzle rows 98b are displaced from each other by one dot pitch. That is, in the functional liquid droplet ejection head 82, a nozzle row 98a having a 1-dot pitch interval is formed by two divided nozzle rows 98b, and drawing at a 1-dot pitch (high resolution) is possible.

  As shown in FIG. 7, each of the six head holding plates 83 is a thick plate made of stainless steel or the like and is formed in a rectangular shape in plan view. Two mounting openings (not shown) for positioning and mounting are provided. The two mounting openings are formed at a nozzle row pitch for 6 heads.

  As shown in FIG. 7, the head plate 84 is a thick plate made of stainless steel or the like and is formed in a substantially parallelogram in plan view. The head plate 84 is provided with an opening (not shown) for positioning and mounting the head holding plate 83, and the six head holding plates 83 are approximately in the nozzle row direction of the functional liquid droplet ejection head 82. The nozzle row length L for one head is displaced in a stepped manner. As a result, the nozzle rows 98a of the twelve functional liquid droplet ejection heads 82 mounted on each head plate 84 are continuous (partially overlapped) in the Y-axis direction to form one divided drawing line.

  The carriage 85 supports the head plate 84 so as to be capable of θ correction (θ rotation), and the suspension for supporting the head plate 84 on the Y-axis table 12 (each bridge plate 71) via the θ rotation mechanism 101. The installation member 102 is provided. The θ rotation mechanism 101 supports the head plate 84 so that the divided drawing lines are parallel to the Y-axis direction. Although not shown, the suspension member 102 incorporates a head lifting mechanism (not shown) that lifts and lowers the head plate 84 via the θ rotation mechanism 101, and the head plate 84 (functional liquid droplet ejection head). The height position of 82 nozzle surfaces 97) is configured to be adjustable.

  Then, the seven carriages 85 are respectively supported by the seven bridge plates 71, and the seven carriage units 81 are aligned in the Y-axis direction, whereby the head unit 13 is configured. In the head unit 13, 12 × 7 all-function droplet discharge heads 82 are continuous in the Y-axis direction, and seven divided drawing lines of each carriage unit 81 are continuously formed in the Y-axis direction to form one drawing line. ing. 4 is the home position of the head unit 13, and the drawing process for the workpiece W is started from this position.

  By the way, the 12 × 7 functional liquid droplet ejection heads 82 mounted on the head unit 13 correspond to any of the R, G, and B color functional liquids, and the work W is composed of the three color functional liquids. A drawing pattern can be drawn. FIG. 8 is an explanatory diagram of a color arrangement pattern of the functional liquid droplet ejection head 82 in the head unit 13 of the present embodiment. As shown in the figure, the color arrangement pattern of the functional liquid droplet ejection heads 82 in the head unit 13 is 3 for R × G • B with respect to 12 × 7 functional liquid droplet ejection heads 82 continuous in the Y-axis direction. The colors are associated one by one in a predetermined order (in this embodiment, in the order of R, G, and B from the right side in the figure), and the color arrangement pattern of the functional liquid droplet ejection head 82 in each of the seven carriage units 81 Are all the same.

  Therefore, if the head unit 13 is moved in the sub-scanning direction by the nozzle row length for two heads, the R / G is applied to the region in which the functional liquid droplet ejection head 82 in the third moving direction or less faces (before the sub-scanning movement). The functional droplet discharge head 82 for the three colors B can be exposed, and a drawing pattern composed of three colors can be drawn in this region. Therefore, in the present embodiment, the length of one drawing line is set so that the drawing processing for the (one piece) work W can be completed by sub-scanning movement corresponding to the length of the two head nozzle rows. Specifically, the length of one drawing line is set based on the maximum width of the workpiece W that can be set in the set table 21, and drawing can be performed on the workpiece W having the maximum width by one main scanning movement. The nozzle row length (for the minimum number n) + the nozzle row length for 2 heads (ie, (n + 2) × L). In this embodiment, n = 82.

  Since the head holding plate 83 is provided as an integral multiple (6) of the number of functional liquid colors (three colors), the two functional liquid droplet ejection heads 82 held on the same head holding plate 83 are provided. The functional liquids of the same color correspond to each other. Thereby, the piping connection between the functional liquid tank and each functional liquid droplet ejection head 82 can be made relatively simple.

  Here, with reference to FIG. 10, a series of drawing processes in the functional liquid ejection units 1A and 1A ′ will be described by taking as an example the case of creating a color filter of a liquid crystal display device. The color filter 600 is formed on a light-transmitting (transparent) substrate 601, a large number of pixel regions (filter elements) 607 a arranged in a matrix in the X-axis direction and the Y-axis direction on the workpiece W, and the pixel region 607 a. The R, G, and B three color layers 608 (608R, 608G, and 608B) and a light-shielding bank 603 that partitions the pixel regions 607a are provided. In the drawing process, the substrate 601 in which the bank 603 is formed is introduced as the work W, and the work liquid is discharged so that any one of the corresponding R, G, and B functional liquids is discharged into each pixel region 607a. A predetermined drawing pattern is drawn on W.

  Note that the color filter has a color arrangement pattern in which all the rows of pixel regions 607a arranged in the Y-axis direction have the same color, and a stripe arrangement in which three colors of R, G, and B are repeatedly arranged in the X-axis direction (FIG. 9A). (See FIG. 9B), and a plurality of continuous pixel regions 607a in the vertical and horizontal rows, which are arranged in the X-axis direction and the Y-axis direction, have three different colors of R, G, and B (see FIG. 9B) The pixel regions 507a are arranged in a staggered pattern (shifted by half a pitch), and the three adjacent pixel regions 607a have three different colors of R, G, and B (see FIG. 9C). However, a case where a color filter having a stripe arrangement is created will be described here.

  The drawing process is performed following the movement of the workpiece W (suction table 31) from the workpiece transfer position, and first the first drawing operation is started. In the first drawing operation, the X-axis table 11 is driven as it is, and the workpiece W moves forward via the set table 21 and the functional liquid droplet ejection head 82 of the head unit 13 facing the home position is synchronized with this. The discharge is selectively performed, and the functional liquid is discharged onto the workpiece W. When the forward movement of the workpiece W is completed, the Y-axis table 12 is driven, and the head unit 13 moves slightly in the Y-axis direction. Then, the driving of the X-axis table 11 and the selective ejection driving of the functional liquid droplet ejection head 82 are again performed in synchronization with each other, and the functional liquid is ejected to the returning work. When the backward movement of the workpiece W is completed, the Y-axis table 12 is further driven, the head unit 13 is slightly moved in the Y-axis direction, the above-described series of operations are repeated again, and the first drawing operation is completed.

  As shown in FIG. 10A, one drawing line of the head unit 13 is orthogonal to the column of pixel regions 607a formed in a matrix on the work W, and the functional liquid droplet ejection head 82 is placed in each pixel region column. Has come to face. When the head unit 13 faces the home position, the two functional liquid droplet ejection heads 82 (corresponding to R and G) at the right end of the head unit 13 (corresponding to R and G) (located at the left end in FIG. 4) are It further deviates from the rightmost pixel region row in the drawing to the right side. When the first drawing operation is performed, each functional liquid droplet ejection head 82 faces each column, and the functional liquid is ejected to the pixel region 607a corresponding to the same color as the corresponding color.

  When the first drawing operation ends, the Y-axis table 12 is driven, and the head unit 13 moves in the Y-axis direction by approximately one head nozzle row length L. As a result, the functional liquid droplet ejection head 82 corresponding to the R color is located at the position where the functional liquid droplet ejection head 82 corresponding to the R color was facing during the first drawing operation, and the R color is located at the position corresponding to the G color. The functional liquid droplet ejection head 82 corresponding to G faces the position where the B liquid color corresponds to the position corresponding to B color. Subsequently, the second drawing operation is performed, and the reciprocating motion of the workpiece W and the accompanying ejection driving of the functional liquid droplet ejection head 82 are repeated twice as in the first drawing operation. As shown in FIG. 10B, in this way, in the second drawing operation, the B-color functional liquid is discharged to the pixel region row from which the R color is discharged in the first drawing operation, and the pixel region row from which the G color is discharged. The R color functional liquid is discharged to the pixel region row where the B color is discharged, and the G color functional liquid is discharged to the pixel region row.

  When the second drawing operation ends, the Y-axis table 12 is driven, and the head unit 13 further moves in the Y-axis direction by approximately one head nozzle row length. As a result, the functional liquid droplet ejection head 82 corresponding to the G color is located at the position where the functional liquid droplet ejection head 82 corresponding to the R color was facing during the first drawing operation, and the B color is located at the position corresponding to the G color. The functional liquid droplet ejection head 82 corresponding to R faces the position where the B color corresponds to the functional liquid droplet ejection head 82 corresponding to R. Thereafter, the third drawing operation is performed, and the reciprocation of the workpiece W is performed twice as in the first drawing operation and the second drawing operation. As a result, the functional liquids for all the colors R, G, and B are discharged to all the pixel areas 607a in each pixel area column, and the drawing process for the workpiece W is completed. At the end of the drawing process, two functional liquid droplet ejection heads 82 (corresponding to G and B) on the left end of the head unit 13 (corresponding to G and B) are located at the leftmost pixel area in the drawing. It is further off the left side of the row (see FIG. 10C).

  As described above, in this embodiment, the color arrangement pattern of the 12 × 7 functional liquid droplet ejection heads 82 that are continuous in the Y-axis direction is a repetitive pattern of three different colors of R, G, and B. By simply moving the nozzle row length (2L), the functional liquids for all colors can be discharged to all the pixel regions 607a of the workpiece W. In addition, since the functional liquids of the three colors R, G, and B are not simultaneously ejected to the pixel region 607a in the same column (in the case of a stripe arrangement, also to the pixel region 607a in the horizontal row). Even when the functional liquid lands on the bank 603 (due to a flight curve or the like), color mixing is unlikely to occur (because the functional liquid on the bank 603 dries due to a time difference), and a color filter is created with high accuracy. Is possible.

  In this embodiment, the drawing process is performed by reciprocating the head unit 13 twice for each pixel region 607a. However, the number of times can be arbitrarily set according to the actual situation.

  Next, the flushing unit 14, the suction unit 15, the wiping unit 16, and the ejection defect inspection unit 17 constituting the maintenance unit will be described in order. The flushing unit 14 is for receiving functional droplets ejected from all ejection nozzles 98 of the functional droplet ejection heads 82 by flushing (flushing), and includes a pre-drawing flushing unit 111, a regular flushing unit 112, and the like. , Is composed of.

  The pre-drawing flushing unit 111 is for receiving the functional liquid for pre-drawing flushing performed by discharging and driving the all-function liquid droplet ejection head 82 of the head unit 13 immediately before the functional liquid is ejected onto the workpiece W. A pair of pre-drawing flushing boxes 121 for receiving liquid and a pair of box support members (not shown) for supporting the pair of pre-drawing flushing boxes 121 on the suction table 31 (support base 42) (see FIG. 3 to 5 and FIG. 11). Each pre-drawing flushing box 121 is formed in an elongated box shape that is rectangular in plan view and is long in the Y-axis direction, and an absorbent material 123 that absorbs the functional liquid is laid on the bottom thereof. Since each pre-drawing flushing box 121 is supported by the suction table 31 via a box support member, when the suction table 31 is rotated with θ correction (by the θ table 32), it rotates with this.

  Each of the pair of box support members supports the pre-drawing flushing box 121 so as to protrude from the suction table 31 so as to be along a pair of sides (peripheries) parallel to the Y-axis direction of the suction table 31. That is, the pre-drawing flushing box 121 is arranged so as to sandwich the front and back of the suction table 31, and the functional liquid droplet ejection head 82 of the head unit 13 faces the work W when the work W is reciprocated in the X-axis direction. Immediately before that, the pre-drawing flushing box 121 can be faced to perform pre-drawing flushing.

  In this case, the length of the long side of the pre-drawing flushing box 121 is the length of one drawing line of the head unit 13 so as to receive the discarded discharge from the all-function liquid droplet discharge head 82 during the drawing process. The length is substantially the same as the length (+ (n + 4) × L) of the nozzle row length for +2 heads. That is, in the drawing process of this embodiment, the head unit 13 is moved in the Y-axis direction by two heads of the functional liquid droplet ejection head 82, and the pre-drawing flushing box 121 is set to the length of one drawing line + 2 heads. Corresponding to the length of the nozzle row of minutes, the discharge range in the Y-axis direction can be covered with respect to the functional liquid droplet discharge head 82 that faces any position during the drawing process. Thereby, the ejection of the functional liquid droplets from the functional liquid droplet ejection head 82 can be stabilized, and the drawing process can be accurately performed on the workpiece W.

  Although not shown, each box support member incorporates a box lifting mechanism for raising and lowering the pre-drawing flushing box 121. When drawing processing is performed, that is, when pre-ejection flushing is performed, each pre-drawing flushing box 121 is provided. Is supported at a position that matches the height of the surface of the workpiece W set on the suction table 31, and at the time of non-drawing processing, the upper end surface of each pre-drawing flushing box 121 is the upper surface of the suction table 31. This is supported at a position (standby position) that is lower than the height of the (set surface). Accordingly, the pre-drawing flushing functional liquid can be received by the pre-drawing flushing box 121 without splashing outside, and the pre-drawing flushing box 121 may interfere with the work W replacement work performed during non-drawing. Absent. In consideration of the expansion of the absorbent 123, the position of the upper end surface of the pre-drawing flushing box 121 at the time of ascent can be set slightly lower than the workpiece surface. The box lifting mechanism is not necessarily provided, and may be provided according to the actual situation.

  As shown in FIG. 3 to FIG. 5 and FIG. 11, the regular flushing unit 112 discharges all-function droplets of the head unit 13 when the drawing process is temporarily suspended, such as when the work W is replaced. This is for receiving functional fluid for periodic flushing performed by discharging the head 82, and is mounted on the periodic flushing box 131 that receives the functional fluid and the X-axis air slider 22, and both ends of the periodic flushing box 131 are connected to each other. And a pair of box column members 132 that are supported so as to be adjustable in height.

  The regular flushing box 131 is formed in a box shape having a rectangular shape in plan view with the upper surface open and long in the Y-axis direction. The regular flushing box 131 is configured to have a size capable of including 12 × 7 full-function liquid droplet ejection heads 82 mounted on the head unit 13, and the regular flushing box 82 is simultaneously flushed with the full-function liquid droplet ejection heads 82 of the head unit 13. It can be done. More specifically, the length of the long side of the regular flushing box 131 is the length of one drawing line + the length of the nozzle row for two heads ((n + 4) × L), like the pre-drawing flushing box 121. The length of the short side is set to a length substantially corresponding to the height (the length in the X-axis direction) of the above-described parallelogram-shaped parallelogram head plate 84. As shown in FIG. 11, a plurality of (three) ribs 133 extending in the Y-axis direction protrude from the bottom surface of the regular flushing box 131, and the functional liquid is absorbed on these ribs 133. A sheet-shaped sheet absorbent 134 is provided. The upper end surface of the sheet absorbent 134 is substantially coincident with the upper end surface of the regular flushing box 131.

  In the box column member 132, the upper end surface of the regular flushing box 131 is slightly lower (about 2 to 3 mm) than the height position of the nozzle surface 97 of the functional liquid droplet ejection head 82 mounted on the head unit 13. As described above, the regular flushing box 131 is supported. The box support member 132 is fixed to the slider main body 51 of the X-axis air slider 22 together with the set table 21. When the X-axis air slider 22 is moved, the periodic flushing box 131 also moves in the X-axis direction via the box stand. Is configured to move. The box column member 132 supports the regular flushing box 131 at a position behind the set table 21. When the X-axis air slider 22 is moved to bring the suction table 31 to the workpiece replacement position, the regular flushing box 131 is provided. A box 131 faces the head unit 13 and can receive a functional liquid for regular flushing.

  Although not shown, the regular flushing box 131 is provided with a warp prevention mechanism for preventing the sheet absorbent material 134 from warping or bending. In the present embodiment, since the gap between the sheet absorbent 134 and the nozzle surface 97 of the functional liquid droplet ejection head 82 is small, if the functional liquid is absorbed while the sheet absorbent 134 is warped (periodic flushing). The sheet absorbent 134 swollen by the functional liquid may interfere with the nozzle surface 97 of the functional liquid droplet ejection head 82. Therefore, in this embodiment, the periodic flushing box 131 is provided with a warpage prevention mechanism to prevent the sheet absorbent material 134 from warping, and the sheet absorbent material 134 is prevented from contacting the nozzle surface 97 of the functional liquid droplet ejection head 82. is doing.

  The suction unit 15 sucks the functional liquid droplet ejection head 82 and forcibly discharges the functional liquid from the ejection nozzle 98 of the functional liquid droplet ejection head 82. As shown in FIG. 4, the suction unit 15 is configured to correspond to the head unit 13, that is, the seven carriage units 81, and seven divided suction units 141 configured in the same manner are placed on the gantry 5. They are aligned. Each of the divided suction units 141 faces the carriage unit 81 that performs suction from below, and each of the twelve corresponding liquid droplet ejection heads 82 mounted on the carriage unit 81 has 12 nozzles 97 corresponding thereto. A cap unit 142 for bringing the cap 143 into close contact with each other, a cap raising / lowering mechanism (not shown) for moving the cap unit 142 up and down to separate the cap from the functional liquid droplet ejection head 82 (nozzle surface 97), and a cap attached thereto And a suction means (ejector: not shown) that applies a suction force to each functional liquid droplet ejection head 82 via 143.

  The suction of the functional liquid is performed in order to eliminate / prevent clogging of the functional liquid droplet ejection head 82 (ejection nozzle 98), and when the functional liquid ejection sections 1A and 1A ′ are newly provided, or the functional liquid droplet ejection head For example, when the head 82 is exchanged, the functional liquid flow path from the functional liquid tank to the functional liquid droplet ejection head 82 is filled with the functional liquid. The cap 143 of the suction unit 15 is also used for storing the functional droplet discharge head 82 when the droplet discharge apparatus 1 is not in operation. In this case, the head unit 13 faces the suction unit 15, and the cap 143 is brought into close contact with the nozzle surface 97 of the functional liquid droplet ejection head 82 to seal the nozzle surface 97, so that the functional liquid droplet ejection head 82 (ejection) The drying of the nozzle 98) is prevented.

  Further, the cap 143 of the suction unit 15 has a function of a flushing box that receives the functional liquid ejected by the discarded ejection (preliminary ejection) of the functional liquid droplet ejection head 82, and a part of the cap 143 facing the suction unit 15. When suction is performed only on the carriage unit 81, the discharge is performed on the cap 143 from other carriage units 81 that do not perform suction. In this case, the cap 143 is moved to a position where the upper surface of the cap 143 is slightly separated from the nozzle surface 97 of the functional liquid droplet ejection head 82 by the cap lifting mechanism.

  The wiping unit 16 is installed on both sides of the suction unit 15 and wipes the nozzle surface 97 of the functional liquid droplet ejection head 82 with a wiping sheet 151 sprayed with a cleaning liquid (wiping is performed). A winding unit 152 that winds up the sheet 151 while feeding it out, a cleaning liquid supply unit 153 that sprays the cleaning liquid on the wiping sheet 151 that is fed out, and a wiping unit 154 that wipes the nozzle surface 97 with the wiping sheet 151 sprayed with the cleaning liquid. (See FIG. 4). The wiping operation is performed after suction by the suction unit 15 and wipes off dirt adhering to the nozzle surface 97. The wiping unit 16 is disposed closer to the X-axis table 11 than the suction unit 15 with respect to the two functional liquid discharge sections 1A and 1A ′, and returns to the home position after suction by the suction unit 15. Facing the unit 13 (each carriage unit 81), the wiping operation can be performed efficiently.

  Although not shown, each of the divided suction units 141 and the wiping unit 16 of the suction unit 15 are supported by the unit lifting mechanism so as to be lifted and lowered, and the units 15 (141) and 16 are moved to a predetermined retracted position. By lowering the head plate to the unit 15 (141), the work area for maintenance of the units 15 (141), 16 and replacement of the head plate 84 mounted on the carriage unit 81 (head replacement) can be secured on the units 15 (141), 16. It has become.

  As shown in FIG. 3 to FIG. 5 and FIG. 11, the ejection failure inspection unit 17 properly ejects the functional liquid from the all-function liquid droplet ejection head 82 (its ejection nozzle 98) mounted on the head unit 13. A drawing target unit for receiving a functional liquid inspected and discharged from all the discharge nozzles 98 of the full-function liquid droplet discharge head 82 of the head unit 13 and drawing a predetermined inspection pattern. 161 and an imaging unit 162 that images and inspects an inspection pattern drawn on the drawing unit 161.

  The drawing unit 161 receives the inspection discharge from the functional liquid droplet discharge head 82, is wound in a roll shape, and draws out a long drawing sheet 171 (roll paper or the like) for drawing an inspection pattern, and a drawing sheet 171. Winding means 172 that winds up while winding, a winding support member 173 that supports the winding means 172, and a unit base 174 that supports the winding support member 173 are provided. The winding means 172 is loaded with a drawing sheet 171 and feeds a drawing reel 175 for feeding the drawing sheet 171, a winding reel 176 for winding the drawn drawing sheet 171, and a winding for rotating the winding reel 176. A motor (geared motor: not shown). The drawn drawing sheet 171 travels horizontally in the Y-axis direction while being exposed to the outside, and is taken up by the take-up reel 176. The horizontal running portion of the drawing sheet 171 has an inspection pattern. It is a drawing part that receives. The length of the long side in the Y-axis direction of the horizontal traveling unit is set so as to be able to receive inspection discharge from the all-function liquid droplet discharge head 82 of the head unit 13. In this embodiment, the pre-drawing flushing box Similar to 121 and the regular flushing box 131, it is set corresponding to the length of one drawing line + the length of the nozzle row for two heads.

  The drawing sheet 171 is not wound every time the inspection pattern is drawn once, but after the inspection pattern is drawn a predetermined number of times on the drawn drawing sheet 171. In this case, the test pattern to be drawn next time is drawn with a slight misalignment in the X-axis direction with respect to the test pattern drawn last time so that the test patterns by the respective test ejections do not overlap. When the inspection pattern is drawn to the full width of the drawing sheet 171 (a predetermined number of inspection patterns have been drawn), the winding motor is driven to wind up the drawn drawing sheet 171 and to draw a new drawing sheet 171. It comes to pay out. In this embodiment, the drawing sheet 171 is automatically wound by a motor drive. However, a manual winding mechanism is provided (when the winding frequency is low, for example), and this is performed manually. May be.

  In this embodiment, the drawing sheet 171 wound in a roll shape is used as an inspection pattern drawing target. However, instead of this, a glass substrate or the like for the inspection pattern can be used. In this case, the glass substrate is appropriately replaced, but the drawn glass substrate is repeatedly used after being cleaned.

  The unit base 174 is positioned between the set table 21 and the regular flushing unit 112 and supported by the slider body 51. The winding support member 173 is one of the pre-drawing flushing boxes located on the regular flushing box 131 side. The winding means 172 is supported between the valve 121 and the regular flushing box 131. Therefore, when the suction table 31 is moved to the workpiece replacement position (for replacing the workpiece W) after the drawing processing is completed, the drawing sheet 171 fed out prior to the regular flushing box 131 facing the head unit 13. Faces the head unit 13 so that an inspection pattern can be drawn on the drawing sheet 171.

  As shown in FIG. 5, the imaging unit 162 is supported by the Y-axis support base 3 described above, faces the X-axis table 11 from above, and performs two inspections for imaging the inspection pattern drawn on the drawing sheet 171. The camera 181, the camera holder 182 that holds the two inspection cameras 181, and the Y-axis support base 3 are fixed, and the two inspection cameras 181 are slidably supported in the Y-axis direction via the camera holder 182. A camera moving mechanism 183 and a camera moving motor (not shown) for moving the inspection camera in the Y-axis direction via the camera moving mechanism 183 are provided. The two inspection cameras 181 are configured to capture each half of the inspection pattern drawn on the drawing sheet 171. For example, two inspection cameras 181 are arranged at a distance of about half of the length of one drawing line of the head unit 13, and the two inspection cameras are moved in this state to check the inspection pattern. The left half is taken with the left inspection camera 181 and the right half is taken with the right inspection camera 181. As a result, the inspection pattern can be efficiently imaged (scanned) in a short time, and the time required for the ejection failure inspection of the functional liquid droplet ejection head 82 can be reduced.

  The imaging unit 162 is arranged so that the two inspection cameras 181 face the drawing sheet 171 when the suction table 31 faces the workpiece replacement position. In this embodiment, during the workpiece replacement, The inspection pattern can be imaged. Then, the imaging results of the two inspection cameras 181 are transmitted to the control means 18 described below for image recognition, and based on this image recognition, each ejection nozzle 98 of each functional liquid droplet ejection head 82 normally functions. It is determined whether or not nozzles are being discharged (no nozzle clogging). This determination is also made during workpiece replacement. In other words, the ejection failure inspection unit includes the imaging unit 162 and the control unit 18.

  Although not shown, a unit moving mechanism is provided between the unit base 174 and the winding support member 173 to move the entire winding unit 172 in the X-axis direction (slightly). As described above, the drawing position of the inspection pattern drawn on the drawing sheet 171 is shifted in the X-axis direction, but the winding means 172 is moved in the X-axis direction according to the drawing position of the inspection pattern. Thus, the inspection pattern can be reliably exposed to the fixed imaging unit (two inspection cameras 181) in the X-axis direction.

  Further, by using this ejection defect inspection unit 17, the position of each carriage unit 81 constituting the head unit 13 is corrected, and initial head alignment may be performed so that each divided drawing line constitutes one drawing line. Is possible.

  Next, the main control system of the droplet discharge device 1 (functional liquid discharge units 1A, 1A ′) will be described with reference to FIG. As shown in the figure, the droplet discharge device 1 (functional liquid discharge units 1A, 1A ′) includes a droplet discharge unit 191 having a head unit 13 (functional droplet discharge head 82) and an X-axis table 11. And a workpiece moving unit 192 for moving the workpiece in the X-axis direction, a Y-axis table 12, a head moving unit 193 for moving the head unit 13 in the Y-axis direction, and units for maintenance means. A maintenance unit 194, a detection unit 195 having various sensors and performing various detections, a drive unit 196 having various drivers for driving and controlling each unit, and a control connected to each unit and controlling the entire droplet discharge device 1. Unit 197 (control means 18).

  The control unit 197 includes an interface 201 for connecting each means, a storage area that can be temporarily stored, a RAM 202 that is used as a work area for control processing, and various storage areas. ROM 203 for storing control programs and control data; drawing data for drawing a predetermined drawing pattern on the work W; various data from each means; and a program for processing various data A hard disk 204, a CPU 205 that performs arithmetic processing on various data according to programs stored in the ROM 203 and the hard disk 204, and a bus 206 that connects them to each other.

  The control unit 197 inputs various data from each unit via the interface 201 and causes the CPU 205 to perform arithmetic processing according to a program stored in the hard disk 204 (or sequentially read by a CD-ROM drive or the like). The processing result is output to each means via the drive unit 196 (various drivers). Thereby, the whole apparatus is controlled and various processes of the functional liquid ejection units 1A and 1A ′ are performed.

  Here, a series of operations of the functional liquid discharge units 1A and 1A ′ from when an unprocessed work W is introduced to the set table 21 (suction table 31) until it is replaced with the next work W will be described. When the workpiece W is placed on the suction table 31 facing the workpiece placement position via a robot arm (work loading / unloading device) (not shown), the control unit 197 drives the workpiece alignment camera 62 to image the workpiece W. At the same time, this imaging result is recognized as an image. Based on this image recognition, the θ table 32 is driven to correct the position (θ) of the work W (during this time, the head unit 13 faces the regular flushing unit 112 and the functional liquid droplet ejection head 82 Regular flushing is done.)

  When the position correction of the workpiece W is completed, the control unit 197 drives the X-axis table 11 (terminates the regular flushing) and moves the suction table 31 from the workpiece replacement position to the head unit 13 side. A series of drawing processes is started. In this case, in the present embodiment, an area covering the suction table 31 and a pair of pre-drawing flushing boxes 121 attached thereto is set as a drawing area for performing the drawing process. During a series of drawing processes, the X-axis table 11 is driven and controlled so that the head unit 13 faces the drawing area, and the suction table 31 (work W) is reciprocated. Therefore, the pre-drawing flushing box 121 and the work W are sequentially faced to the head unit 13 during the drawing process, and the drawing is performed on the work following the pre-drawing flushing, and the regular flushing unit 112 and the discharge that are not involved in the drawing process. Since the defect inspection unit 17 does not face the head unit 13 during the drawing process, the drawing process can be performed efficiently and appropriately.

  After the discharge of the functional liquid to the workpiece W is finished and the drawing process (the second return of the workpiece W in the third drawing operation) is finished, the drive of the X-axis table 11 is continued and the workpiece W is placed on the workpiece. Move to the change position. At this time, the control unit 197 discharges and drives the all-function droplet discharge head 82 of the head unit 13 at a predetermined timing, and causes the all-function droplet discharge head 82 to perform inspection discharge. As a result, while the workpiece W is moving, an inspection pattern is drawn on the drawing sheet 171 of the ejection failure inspection unit 17 facing the head unit 13 (all-function liquid droplet ejection head 82). As described above, in the present embodiment, the drawing pattern 171 is drawn on the drawing sheet 171 by using the movement operation of the workpiece W to the workpiece replacement position after the drawing process is completed. It is not necessary to move the head unit 13 intentionally, and an inspection pattern can be drawn efficiently.

  When the workpiece W (suction table 31) reaches the workpiece replacement position, the control unit 197 stops driving the X-axis table 11 and drives the Y-axis table 12 to return the head unit 13 to the home position. Then, the all-function droplet discharge head 82 of the head unit 13 is driven to discharge, and the periodic flushing box 131 located immediately below the head unit 13 is periodically flushed, while the regular flushing is continued, and the robot (not shown). Using the arm, the processed workpiece W is collected and the unprocessed workpiece W is introduced into the set table 21.

  On the other hand, when the workpiece W reaches the workpiece transfer position, the control unit 197 drives the moving motor to move the two inspection cameras 181 in the Y-axis direction, and the inspection pattern drawn on the drawing sheet 171. Are picked up by two inspection cameras 181. Then, the imaging result is image-recognized, and it is determined whether or not ejection failure has occurred for each functional liquid droplet ejection head 82 of the head unit 13. Here, if it is determined that the all-function liquid droplet ejection head 82 is normally ejecting functional liquid droplets, the ejection defect inspection is terminated. Then, after the replacement of the workpiece W, the regular flushing is stopped and the X-axis table 11 is driven for a new drawing process, and the set table 21 is moved to the head unit 13 side.

  On the other hand, if it is determined that there is a defective functional droplet ejection head 82, maintenance processing of the functional droplet ejection head 82 is performed. Specifically, after the carriage unit 81 having the defective liquid droplet ejection head 82 faces the suction unit 15 (divided suction unit 141) and sucks the defective ejection liquid droplet head 82, Further, the wiping process is performed on the wiping unit 16. In this case, in this embodiment, since the home position of the head unit 13 is provided closer to the suction unit 15 (and the wiping unit 16), the head unit 13 facing the home position is quickly moved when a discharge failure is determined. The maintenance process can be performed by facing the suction unit 15. Since the suction unit 15 is shared by the two functional liquid discharge units 1A and 1A ′, the maintenance process by the suction unit 15 is performed for each one.

  Note that the head unit 13 of the present embodiment is composed of seven carriage units 81, and these can be moved independently, so that it is determined that there is a defective liquid droplet ejection head 82. In this case, it is not necessary for all the seven carriage units 81 to face the suction unit 15 or the wiping unit 16. For example, in FIG. 4, when an ejection failure is detected in the functional liquid droplet ejection head 82 of the third carriage unit 81 from the left of the right functional liquid ejection section 1A, the third carriage unit 81 from the left is detected. May be placed on the suction unit 15. Then, suction is performed only on the third carriage unit 81 from the left. In this case, periodic flushing is continued for the functional liquid droplet ejection head 82 of the carriage unit 81 remaining at the home position, and each normal carriage unit 81 facing the suction unit 15 is Each cap 143 of the suction unit 15 faces the functional liquid droplet ejection head 82 so as to perform a flushing operation on each cap 143.

  When a series of maintenance processing of the carriage unit 81 having the defective liquid droplet ejection head 82 is completed and the carriage unit 81 moved to the suction unit 15 returns to the home position, the X-axis table 11 is driven. Then, the drawing sheet 171 of the ejection failure inspection unit 17 is made to face the head unit 13, and the inspection pattern is drawn again on the drawing sheet 171. Thereafter, substantially the same operation as the series of operations described above is repeated, the head unit 13 is brought to the home position, periodic flushing is performed, and whether or not the ejection failure of the functional liquid droplet ejection head 82 has been recovered is confirmed. .

  As described above, in the liquid droplet ejection apparatus 1 of the present embodiment, the head maintenance unit 10 is shared by the functional liquid ejection units 1A and 1A ′ installed adjacent to each other. The head maintenance section provided separately can be used as one head maintenance section 10, and not only can the equipment cost be reduced correspondingly, but also the installation space for the head maintenance section 10 can be minimized.

  In addition, as an electro-optical device (device) configured using a workpiece that has been subjected to drawing processing using the droplet discharge device according to the present invention, a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, A PDP (Plasma Display Panel) device, an electrophoretic display device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical idea described in the claims and the specification and drawings. Is possible. Note that any shape or structure not directly described in the specification and drawings is within the scope of the technical idea of the present invention as long as the effects and advantages of the present invention are achieved. For example, in the present embodiment, the work W is moved in the main scanning direction and the head unit 13 is moved in the sub scanning direction. However, the head unit 13 is moved in the main scanning direction and the work W is moved in the sub scanning direction. It is also possible to adopt a configuration in which it is moved to. Alternatively, the work W may be fixed and the head unit 13 may be moved in the main scanning direction and the sub-scanning direction. Further, it goes without saying that various other changes can be made to the configuration of the droplet discharge device 1 and the configuration of each component constituting the droplet discharge device 1.

1 is an overall schematic configuration diagram of a droplet discharge device 1. FIG. It is a whole schematic block diagram of the droplet discharge apparatus 1-2. 1 is an overall schematic perspective view of a droplet discharge device 1. FIG. FIG. 3 is a plan view of the droplet discharge device 1 with a bridge plate 71 removed. 2 is a side view of the droplet discharge device 1. FIG. 2 is an external perspective view of a functional liquid droplet ejection head 82. FIG. FIG. 6 is a plan view of the head plate 84 as viewed from the lower side of the carriage unit 81. FIG. 6 is an explanatory diagram of a color arrangement pattern of a functional liquid droplet ejection head 82 mounted on the head unit 13. 9A and 9B are explanatory diagrams of a color filter color arrangement pattern, in which FIG. 9A shows a stripe arrangement, FIG. 9B shows a mosaic arrangement, and FIG. 9C shows a delta arrangement. FIGS. 10A and 10B are explanatory diagrams of a drawing process performed by the droplet discharge device 1. FIG. 10A is a schematic plan view of a first drawing operation, FIG. 10B is a second drawing operation, and FIG. FIG. It is an external perspective view around the X-axis air slider. It is a block diagram explaining the main control system of the drawing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge apparatus 1A, 1B Functional liquid discharge part 10 Head maintenance part 11 X-axis table 12 Y-axis table
13 Head unit 14 Flushing unit 15 Suction unit 16 Wiping unit 17 Discharge defect inspection unit 18 Control means
21 Set table 22 X-axis air slider 82 Functional droplet discharge head 98 Discharge nozzle 111 Pre-drawing flushing unit 112 Regular flushing unit 161 Drawing unit 162 Imaging unit 171 Drawing sheet 181 Inspection camera 183 Camera moving mechanism W Work 1-2 Droplet Discharge device

Claims (6)

A functional liquid discharge unit that discharges a functional liquid from the functional liquid droplet discharge head by relatively moving a head unit on which the functional liquid droplet discharge head is mounted and a set table;
A head maintenance unit that performs maintenance of the functional liquid droplet ejection head,
The head maintenance unit is installed at a location outside the moving area of the set table,
A plurality of the functional liquid discharge units share the head maintenance unit.   The liquid droplet ejection apparatus according to claim 1, wherein the plurality of functional liquid ejection units are arranged symmetrically with respect to the head maintenance unit.   2. The droplet discharge device according to claim 1, wherein a plurality of the functional liquid discharge units are arranged symmetrically with respect to the head maintenance unit. A functional liquid discharge unit that discharges a functional liquid from the functional liquid droplet discharge head by relatively moving a head unit on which the functional liquid droplet discharge head is mounted and a set table;
A head maintenance unit that performs maintenance of the functional liquid droplet ejection head; and
An arrangement method of a droplet discharge device, wherein the head maintenance unit is arranged at a position deviating from a moving region of the set table and shared by a plurality of the functional liquid discharge units.   5. The method of disposing a droplet discharge device according to claim 4, wherein the plurality of functional liquid discharge portions are arranged symmetrically with respect to the head maintenance portion.   5. The method of arranging a droplet discharge device according to claim 4, wherein the plurality of functional liquid discharge units are arranged symmetrically with respect to the head maintenance unit.

Images