JP2008111665A - Brine feeder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a brine feeder capable of controlling stably a temperature of brine to operate the brine feeder stably, while reducing a running cost of the brine feeder and compactifying a size of the brine feeder. <P>SOLUTION: This brine feeder is installed with a return flow passage 2, a temperature sensor 4 for detecting the temperature of the brine, a brine tank 5, and a pump 6, and is provided with a heat exchanger 13 disposed in a brine cooling flow passage 12 with the flowing brine, in one of branches branched into two from the flow passage 2, a heater 26 provided in a brine heating flow passage 25 with the brine returned from the load 1 side flowing therethrough, in the other of the branches branched into two, a mixing part 30 disposed in a connection part between the brine cooling flow passage 12 and the brine heating flow passage 25, a mixing part outlet side temperature sensor 32 provided in an outlet side of the mixing part 30, a mixing regulation means 33, and an ion exchanger 35 arranged between the mixing part 30 and a load 1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a brine supply device for supplying brine after adjusting the brine to match the target temperature of the load for at least one load.

2. Description of the Related Art Conventionally, there is known a brine supply device that uses a refrigerator composed of a compressor (compressor), a condenser, an expansion valve, and a heat exchanger (evaporator) (see Patent Document 1) . In the brine supply device provided with such a refrigerator, the brine returned from the load is cooled to the target temperature of the load by the refrigerator and supplied again to the load side.

JP 2002-174438 A

  In the brine supply device provided with the conventional refrigerator as described above, since the refrigerator is used, the running cost such as power consumption of the device becomes high, and the presence of the refrigerator increases the size of the device. There was a problem such as. On the other hand, however, cooling the brine without using the refrigerator has a problem that the apparatus cannot be stably operated because it is very difficult to control the temperature of the brine with high accuracy without the refrigerator.

  The present invention has been made paying attention to such problems of the prior art, and reduces the running cost such as the power consumption of the apparatus and reduces the size of the apparatus while simultaneously controlling the temperature of the brine stably. It is an object of the present invention to provide a brine supply device that can enable stable operation of the device.

The brine supply device according to the present invention for solving the problems of the prior art adjusts and supplies a brine composed of pure water to at least one load so as to match the target temperature of the load. In the brine supply device, a return flow path for returning the brine from the load side to the brine supply apparatus side, a temperature sensor for detecting the temperature of the brine in the return flow path, and the brine returned from the return flow path A brine tank for storing brine and a pump for sending brine from the inside of the brine tank to the flow path on the side of the brine supply device, and a brine cooling flow in which the brine flows into one of the two branches from the flow path provided the road, and a heat exchanger for cooling the industrial water to the brine, into two branched one from the flow path, the brine cooling Provided in a brine heating passage formed in parallel with the passage and through which the brine returned from the load side flows, a heater for heating the brine, the brine cooling passage, and the brine heating passage Provided in the connecting portion, for mixing the brine cooled by the heat exchanger and the brine heated by the heater, and provided on the outlet side of the mixing portion, the brine from the mixing portion A mixing section outlet-side temperature sensor for detecting temperature, and a mixing ratio of the brine cooled by the heat exchanger and the brine heated by the heater based on the output from the mixing section outlet-side temperature sensor and mixing adjustment means for, said conductivity of pure water an ion exchanger for maintaining below a predetermined value, is arranged between the load and the mixing unit, the mixing It is characterized in that and a ion exchanger having a volume fulfilling the relaxable buffer function rapid temperature fluctuations of the brine flowing into the load from.

  Further, in the present invention, a heat exchanger outlet-side temperature sensor is provided on the outlet side of the heat exchanger, and detects the temperature of the brine from the heat exchanger, and the heat exchanger outlet-side temperature sensor It is desirable to include a valve for adjusting the flow rate of industrial water supplied to the heat exchanger based on the output from the heat exchanger.

  In the present invention, the heating channel outlet side temperature sensor is provided on the outlet side of the heating channel, and detects the temperature of the brine from the heating channel, the heating channel outlet side temperature sensor It is desirable to provide power adjusting means for adjusting the power supplied to the heater based on the output from the heater.

  In the present invention, the mixing unit alternately switches between supply of the brine cooled by the heat exchanger to the load side and supply of brine heated by the heater to the load side. It is desirable to include a three-way valve.

  In the present invention, an ion exchanger outlet side temperature sensor for detecting a temperature of a brine from the ion exchanger is provided on the outlet side of the ion exchanger, and the mixing adjusting unit includes the mixing unit. The mixing ratio of the brine cooled by the heat exchanger and the brine heated by the heater is adjusted based on the output from the partial outlet side temperature sensor and the output from the ion exchanger outlet side temperature sensor. It is desirable to be.

  In the present invention, it is preferable that the ion exchanger has a volume of 10 liters or more.

  As described above, in the brine supply device of the present invention, the brine is cooled using a heat exchanger using industrial water without using a refrigerator and heated using a heater. Since the temperature is adjusted to an appropriate temperature, running costs such as power consumption can be greatly reduced as compared to the case where the brine is cooled using a conventional refrigerator, and the device is The size can be greatly reduced.

  In the present invention, when the brine is cooled by a heat exchanger using industrial water without using a refrigerator and is heated by a heater, the temperature of the brine fluctuates rapidly. However, since the brine is slowly passed through a tank having a volume of at least 10 liters before the brine is supplied to the load, a sudden temperature fluctuation of the brine is a function of the buffer. It is possible to supply pure water which is relaxed by the tank and also converged at an appropriate temperature to the load side.

  Further, in the present invention, as a result of cooling pure water as brine with a heat exchanger using industrial water without using a refrigerator and heating with pure water, the temperature of pure water changes rapidly. Even in such a case, the pure water is slowly passed through an ion exchanger having a volume of at least 10 liters before the pure water is supplied to the load. Rapid water temperature fluctuations are mitigated by the ion exchanger having a buffer function, and pure water converged to an appropriate temperature can be supplied to the load side.

  In the present invention, when a three-way valve is provided in a portion connecting the cooling flow path provided with the heat exchanger and the heating flow path provided with the heater, the brine from the cooling flow path is provided. The flow rate adjustment of both (pure water) and brine (pure water) from the heating channel can be performed stably.

  In the present invention, the pure water cooled by the heat exchanger and the heater are heated based on a signal from a temperature sensor that detects the temperature of the pure water from the ion exchanger having the buffer function. When the mixing ratio with the purified water is adjusted, the optimum mixing ratio between the cooled pure water and the heated pure water is taken into account in consideration of the buffer function of the ion exchanger. Adjustments can be made.

  Further, in the present invention, for heating pure water cooled by the heat exchanger based on a signal from a temperature sensor that detects the temperature of pure water from the ion exchanger that also has the function of the buffer. When the heating power of the heater is adjusted, optimal heating control of pure water cooled by the heat exchanger can be performed in consideration of the buffer function of the ion exchanger.

  Embodiments of the present invention will be described below. FIG. 1 is a piping block diagram showing a brine supply device according to this embodiment for supplying pure water as brine to a load such as a semiconductor manufacturing device. In FIG. 1, 1 is a load such as a semiconductor manufacturing apparatus, 2 is a return flow path for returning pure water (brine) that has finished the function for the load 1 from the load 1 side to the brine supply apparatus side, and 3 is the return path. A resistivity meter 4 provided in the flow path 2 for detecting the resistance value (conductivity) of pure water, and 4 is a temperature sensor provided in the return flow path 2 for preliminarily detecting the temperature of pure water. 5 is a pure water tank for temporarily accumulating the pure water from the return flow path 2, 6 is a pump for sending pure water in the pure water tank 5 to the next flow path 7, and 6a is the pump 6 An inverter for converting the frequency of power for driving the motor, 6b is a control unit (CPU) for controlling the inverter 6a, and 8 is a temperature for preliminarily detecting the temperature of pure water flowing through the flow path 7. Sensor 9 detects the flow rate of pure water flowing through the flow path 7 A flow sensor 10 for detecting the pressure of pure water flowing through the flow path 7 and detecting an abnormality such as a pipe clogging is a pressure switch for stopping the entire apparatus. It is a pump discharge pressure gauge for preliminarily detecting the discharge pressure of the pump 6 from the flow of pure water.

  In FIG. 1, 12 is one pure water cooling channel branched from the flow channel 7 into two, and 13 is heat provided for cooling pure water provided in the middle of the pure water cooling channel 12. An exchanger 14 is a temperature sensor provided in the middle of the pure water cooling flow path 12 for detecting the temperature of pure water cooled by the heat exchanger 13. The heat exchanger 13 is always supplied with industrial water (factory circulating water) whose average temperature is maintained at about 20 to 28 ° C., for example. The heat exchanger 13 cools pure water flowing through the pure water cooling channel 12 with the industrial water.

  In FIG. 1, 15 is a cooling water introduction pipe for introducing industrial water from the outside and supplying it to the heat exchanger 13, and 16 is industrial water used for heat exchange in the heat exchanger 13. A cooling water discharge pipe for discharging to the outside, 17 is a flow sensor provided in the middle of the cooling water discharge pipe 16, 18 is a motor valve provided in the middle of the cooling water discharge pipe 16, and 19 is the heat exchange. The flow rate of the industrial water supplied to the heat exchanger 13 is adjusted by controlling the opening degree of the motor valve 18 based on the output from the temperature sensor 14 for detecting the temperature of pure water from the vessel 13 (by this) The control unit (CPU) 20 for varying the cooling capacity of the heat exchanger 13 detects the water pressure difference between the cooling water introduction pipe 15 and the cooling water discharge pipe 16 and clogs the pipe. A cooling water differential pressure switch for stopping the entire apparatus when any abnormality is detected, 21 is a cooling water pressure gauge for preliminarily detecting the pressure of pure water flowing through the cooling water introduction pipe 15, and 22 is cooling water. It is a temperature sensor for detecting the temperature of industrial water in the introduction pipe 15.

  In FIG. 1, reference numeral 25 denotes a pure water heating passage branched from the passage 7 in parallel with the pure water cooling passage 12, 26 denotes a heater provided in the middle of the pure water heating passage 25, 27. Is a temperature sensor for detecting the temperature of pure water heated by the heater 26, and 28 is a control unit (CPU) for controlling the heating power of the heater 26 based on the output from the temperature sensor 27. is there.

  In FIG. 1, reference numeral 30 denotes a motor-driven three-way valve provided at a position where the pure water cooling flow path 12 and the pure water heating flow path 25 merge and connect to the next feed flow path 31. The three-way valve 30 has a flow rate at which pure water from the pure water cooling channel 12 flows to the feed channel 31 and a flow rate at which pure water from the pure water heating channel 25 flows to the feed channel 31. Each can be varied by adjusting the opening of the valve.

  In FIG. 1, 32 is provided on the outlet side of the three-way valve 30, a temperature sensor for detecting the temperature of pure water mixed by the three-way valve 30, and 33 is an output from the temperature sensor 32 (and , A control unit (CPU) for controlling the three-way valve 30 based on an output from a temperature sensor 36 that detects the temperature of pure water from an ion exchanger 35 to be described later. In this embodiment, the control unit (CPU) 33 controls the three-way valve 30 so that the pure water cooled from the pure water cooling channel 12 and the pure water heating channel 25 are heated. The mixing ratio with pure water is adjusted, and pure water adjusted to an appropriate temperature is supplied to the feed passage 31.

  In FIG. 1, reference numeral 35 denotes an ion exchanger provided in the middle of the feed flow path 31 for maintaining the conductivity of pure water mixed by the three-way valve 30 at a predetermined value or less. As shown in FIG. 2, the ion exchanger 35 includes a disk-shaped net 35b provided below the cylindrical container 35a, and a disk-shaped net 35c provided above the container 35a. Between these, a granular ion exchange resin 35d is filled.

  In FIG. 2, 35e is an inlet hole formed between the bottom surface of the container 35a and the net 35b in order to allow pure water from the feed flow path 31 to flow into the container 35a. Further, 35f is formed between the upper surface of the container 35a and the mesh 35c in order to return the pure water flowing from the inlet hole 35e and passing through the ion exchange resin 35d to the feed flow path 31. It is an exit hole. Thus, in the container 35a of this embodiment, the ion exchange resin 35d is filled in almost all spaces except for the spaces necessary for forming the inlet hole 35e and the outlet hole 35f.

  In the present embodiment, the pure water supplied from the three-way valve 30 to the feed channel 31 flows into the container 35a through the inlet hole 35e formed near the bottom surface of the container 35a, and then the ion It slowly passes through the exchange resin 35d and returns to the feed flow path 31 through an outlet hole 35f formed near the upper surface of the container 35a. While the pure water slowly passes through the ion exchange resin 35d, the temperature of the pure water is gradually converged to an appropriate temperature. Therefore, in this embodiment, even if a sudden fluctuation occurs in the temperature of the pure water from the three-way valve 30, the sudden temperature fluctuation of the pure water is caused by the pure water being the ion exchange resin. The temperature of pure water is relaxed while slowly passing through 35d, and the temperature of pure water is converged to an appropriate level.

  The container 35a of the ion exchanger 35 is formed to have a diameter of 220 mm, a height of 365 mm, and a volume of 14 liters, for example. In this embodiment, the volume of the ion exchanger 35 is set to 14 liters or more, even if the temperature of the pure water mixed by the three-way valve 30 fluctuates rapidly, the pure water is 14 liters or more. The abrupt temperature fluctuation is gradually relaxed while moving slowly inside the ion exchanger 35 having a volume of approximately 5 to allow it to converge to an appropriate temperature before being sent to the load 1 side. Because.

  Thus, in the present embodiment, the ion exchanger 35 is also provided with a buffer function for alleviating rapid temperature fluctuations of pure water from the three-way valve 30. This is related to the fact that this embodiment does not use a refrigerator as in the conventional brine supply device. That is, in the brine supply device using a conventional refrigerator, since the temperature control of the brine is performed with high accuracy by the refrigerator, it is not normally considered that the temperature of the brine sent to the load side fluctuates rapidly. However, when the temperature of pure water (brine) is to be adjusted by the heat exchanger 13 using industrial water and the heater 26 without using a refrigerator as in this embodiment, the temperature is supplied to the load side. It can occur with considerable probability that the temperature of the pure water fluctuates rapidly.

  In particular, as in the present embodiment, the pure water cooled from the pure water cooling channel 12 and the heated pure water from the pure water heating channel 25 are mechanically used using a three-way valve 30. When mixing, the temperature of pure water supplied from the three-way valve 30 is expected to fluctuate rapidly due to, for example, a delay in the operation timing of the valve opening adjustment motor of the three-way valve 30. The

  If the temperature of the deionized water can suddenly fluctuate like this, it is necessary to install a buffer such as a large-capacity deionized water tank. There is a problem that becomes larger. Therefore, in the present embodiment, an ion exchanger 35 is provided between the three-way valve 30 and the load 1 for maintaining the conductivity of pure water below a predetermined value. By making the volume more than 1 liter, this ion exchanger 35 also functions as a buffer at the same time, thereby avoiding the problem of enlargement of the apparatus.

  As a result of experiments conducted by the present inventors, when pure water is supplied to the load 1 side at a flow rate of 5 liters per minute, the moving speed of pure water in the ion exchanger 35 is 0.0022 m / s, and the load When pure water is supplied to one side at a flow rate of 10 liters per minute, the movement speed of pure water in the ion exchanger 35 is 0.0044 m / s, and pure water is supplied to the load 1 side at 20 liters per minute. When the pure water is supplied at a flow rate, the movement speed of pure water in the ion exchanger 35 is 0.0088 m / s, and the pure water is supplied to the load 1 side at a flow rate of 25 liters per minute. The moving speed of pure water was 0.011 m / s. Even when a sudden temperature fluctuation occurs in the pure water, if the pure water moves in the ion exchanger 35 at a slow moving speed of, for example, about 0.011 m / s, the abrupt temperature change occurs within the moving time. It is clear that the ion exchanger 35 can sufficiently perform the function of a buffer because temperature fluctuations are alleviated.

  In FIG. 1, 36 is a temperature sensor for detecting the temperature of pure water from the ion exchanger 35, and 37 is for detecting the resistivity (conductivity) of pure water sent to the load 1 side. A resistivity meter 38 is a brine outlet pressure meter for detecting the pressure of pure water sent to the load 1 side. In the present embodiment, a signal from the temperature sensor 36 is input to a control unit (CPU) 33 for controlling the three-way valve 30. The control unit (CPU) 33 includes the temperature of pure water from the three-way valve 30 (output from the temperature sensor 32) and the temperature of pure water from the ion exchange unit 35 (output from the temperature sensor 36). On the basis of the above, the three-way valve 30 is controlled to adjust the mixing ratio of the pure water cooled by the heat exchanger 13 and the pure water heated by the heater 26.

  Next, the operation of this embodiment will be supplementarily described. In this embodiment, when the target temperature (for example, 30 ° C.) of the load 1 brine is 2 ° C. or more higher than the temperature of industrial water (factory circulating water), pure water that is brine is used industrial water ( Cool to meet the target temperature (without using a refrigerator) and supply to load 1. That is, in this embodiment, when the target temperature of the load 1 brine is 2 ° C. or lower compared to the temperature of industrial water, it is not used.

  Moreover, in this embodiment, the said control part (CPU) 19 controls the opening degree of the said motor valve 18 based on the output from the temperature sensor 14 which detects the temperature of the pure water from the said heat exchanger 13, Thereby, the amount of industrial water supplied to the heat exchanger 13 is adjusted, and the cooling capacity of the heat exchanger 13 is appropriately varied.

  In the present embodiment, the pure water returned from the load 1 is divided into two flow paths, the pure water cooling flow path 12 and the pure water heating flow path 25. In the pure water cooling channel 12, the heat exchanger 13 is controlled so that the pure water has a temperature slightly lower than the target temperature of the brine of the load 1. Further, in the pure water heating channel 25, the heater 26 is controlled so that the pure water has a temperature slightly higher than the target temperature of the load 1 brine.

  In this embodiment, the three-way valve 30 mixes the pure water from the pure water cooling flow path 12 and the pure water from the pure water heating flow path 25 at an optimal mixing ratio. The pure water adjusted to the target temperature of 1 brine is supplied to the load 1 side.

  In the present embodiment, in particular, in order to adjust the mixing ratio of the pure water from the pure water cooling channel 12 and the pure water from the pure water heating channel 25, the valve of the three-way valve 30 is opened. Since both flow rates are mechanically adjusted by driving the degree adjusting motor, the temperature of the pure water after being mixed by the three-way valve 30 may fluctuate rapidly. Therefore, in this embodiment, the feed flow path 31 connecting the three-way valve 30 and the load 1 has a volume of about 14 liters or more, and the pure water moves slowly through the inside thereof. By using such an ion exchanger 35 and using this ion exchanger 35 as a buffer, the temperature of pure water supplied to the load 1 can be prevented from fluctuating rapidly. Yes.

  Further, the brine supply device according to the present embodiment is equipped with the following interlock function.

  (1) At the time of starting this embodiment, the temperature of industrial water is measured, and the temperature that can be set is only the temperature of “industrial water temperature + 2 ° C.” or higher. In addition, when the temperature of industrial water rises to “set temperature −2 ° C.” or higher after the start of the present embodiment, an alarm is issued or the apparatus is stopped.

  (2) The specific resistance of pure water is measured at both positions of the outlet to the pure water load 1 and the inlet (return) from the load 1 of this embodiment. When the specific resistance on the outlet side is below the control value, an alarm is issued or the device is stopped. If the specific resistance on the inlet side is below the control value, an alarm is issued or the device is stopped.

  (3) In the pure water cooling channel 12, the pressure on the inlet side and the pressure on the outlet side of the heat exchanger 13 for industrial water are constantly monitored, and “inlet side pressure−outlet side pressure” is below the control value. In such a case, since an abnormality such as a pipe clogging is predicted, an alarm is issued or the apparatus is stopped.

  In the present embodiment described above, the ion exchanger 35 having a volume of 14 liters is used, but the present invention is not limited to this. If it is an ion exchanger having a volume of at least about 10 liters or more, as described in this embodiment, “pure water undergoes rapid temperature fluctuations while pure water moves at a low speed in the ion exchanger. Can sufficiently fulfill the function of the buffer. Moreover, the ion exchanger of this invention is not restricted to a thing as shown in FIG. In the present invention, when pure water is not used as the brine, a tank having a volume of, for example, 10 liters or more can be used instead of the ion exchanger 35 of FIG.

  In the above embodiment, the pure water returned from the load 1 is divided into the pure water cooling channel 12 and the pure water heating channel 25, and the heat exchange interposed in the pure water cooling channel 12. Although the vessel 13 and the heater 26 interposed in the pure water heating channel 25 are connected in parallel to each other, the present invention is not limited to this. In the present invention, for example, pure water returned from the load 1 is first cooled by a heat exchanger, and the cooled pure water is heated by a heater, that is, the heat exchanger and the heater are connected in series. (In this case, the three-way valve 30 shown in FIG. 1 is not necessary, but ion exchange that also functions as a buffer to alleviate rapid temperature fluctuations of pure water heated by the heater. It is still necessary to install the vessel 35).

The piping block diagram of the brine supply apparatus by embodiment of this invention. The figure for demonstrating the structure of the ion exchanger used by this embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Load 2 Return flow path 3,37 Resistivity meter 4,8,14,22,27,32,36 Temperature sensor 5 Tank 6 Pump 6b, 19, 28, 33 Control part (CPU)
7 Flow path 12 Pure water cooling flow path 13 Heat exchanger 15 Cooling water introduction pipe 16 Cooling water discharge pipe 17 Flow rate sensor 18 Motor valve 20 Cooling water differential pressure switch 25 Pure water heating flow path 26 Heater 30 Three-way valve 31 Feed flow path 35 ion exchanger 35a container 35b, 35c disc network 35d ion exchange resin 35e inlet hole 35f outlet hole

Claims (5)

In a brine supply device that circulates a brine composed of pure water so as to meet the target temperature of the load for at least one load.
A return flow path for returning brine from the load side to the brine supply device side;
A temperature sensor for detecting the temperature of the brine in the return flow path;
A brine tank for accumulating brine returned from the return flow path;
A pump for sending brine from the brine tank to the flow path on the brine supply device side, and
A heat exchanger for cooling the brine with industrial water, provided in a brine cooling flow path through which brine flows in one of two branches from the flow path;
A heater for heating the brine, which is provided in a brine heating passage formed in parallel with the brine cooling passage, in which the brine returned from the load side flows , on the other of the two branches from the passage; ,
A mixing unit that is provided at a connection between the brine cooling channel and the brine heating channel, and mixes the brine cooled by the heat exchanger and the brine heated by the heater;
Provided on the outlet side of the mixing unit, and a mixing unit outlet side temperature sensor for detecting the temperature of the brine from the mixing unit;
A mixing adjusting means for adjusting a mixing ratio of the brine cooled by the heat exchanger and the brine heated by the heater based on an output from the mixing unit outlet side temperature sensor;
An ion exchanger for maintaining the conductivity of the pure water below a predetermined value, which is disposed between the mixing unit and the load, and causes a rapid temperature fluctuation of the brine flowing from the mixing unit to the load. An ion exchanger having a capacity to perform a relaxable buffer function;
A brine supply device comprising: The heat exchanger outlet-side temperature sensor for detecting the temperature of the brine from the heat exchanger, provided on the outlet side of the heat exchanger according to claim 1,
A brine supply device comprising a valve for adjusting a flow rate of industrial water supplied to the heat exchanger based on an output from the heat exchanger outlet side temperature sensor. In Claim 1 or 2, comprising a heating channel outlet side temperature sensor for detecting the temperature of the brine from the heating channel, provided on the outlet side of the heating channel,
A brine supply device comprising: a power adjusting unit that adjusts the power supplied to the heater based on an output from the heating channel outlet side temperature sensor.   4. The mixing unit according to claim 1, wherein the mixing unit alternately supplies the brine cooled by the heat exchanger to the load side and supplies the brine heated by the heater to the load side. A brine feeder comprising a three-way valve for switching. In any one of Claim 1 to 4, It is provided in the exit side of the above-mentioned ion exchanger, It is equipped with the ion exchanger exit side temperature sensor for detecting the temperature of the brine from the above-mentioned ion exchanger,
The mixing adjusting means includes a brine cooled by the heat exchanger and a brine heated by the heater based on an output from the mixing unit outlet side temperature sensor and an output from the ion exchanger outlet side temperature sensor. The brine supply device is characterized in that the mixing ratio is adjusted.

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