JP2008105125A - Apparatus for correcting deflection of carrier robot system - Google Patents

Apparatus for correcting deflection of carrier robot system Download PDF

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JP2008105125A
JP2008105125A JP2006289348A JP2006289348A JP2008105125A JP 2008105125 A JP2008105125 A JP 2008105125A JP 2006289348 A JP2006289348 A JP 2006289348A JP 2006289348 A JP2006289348 A JP 2006289348A JP 2008105125 A JP2008105125 A JP 2008105125A
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rack
hand
thin plate
shaft
axis
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Akira Maruyama
章 丸山
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Nachi Fujikoshi Corp
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Nachi Fujikoshi Corp
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<P>PROBLEM TO BE SOLVED: To provide an apparatus for correcting the deflection of a carrier robot system, which straightly inserts a thin sheet into a rack without stopping the movement of a forward and backward shaft, a vertical shaft, and a turning shaft of the robot for inserting the thin sheet into the rack even when the vertical deflection of the forward and backward shaft due to gravity has become large. <P>SOLUTION: The apparatus for correcting the deflection of the carrier robot system comprises a displacement detector 7a attached to the tip end portion of a hand 3 so as to measure the distance between the reference member of the rack 4 and the end of the hand 3 or displacement detectors 7b attached to the inlet portions of the respective racks so as to measure the distance between the reference member of the rack and the tip end of the hand. The vertical distance d between the lower surface of the tip end of the hand and the reference member of the racks for storing the thin sheets is kept constant during the period of the movement for carrying-in and taking-out the thin sheets 2 by a correction control circuit for carrying out the correction by determining the correcting movement of the vertical shaft 5 and/or the turning movement shaft 6 so as to correct the deflection of the vertical shaft 5 and the turning movement shaft 6 due to the gravity based on the information about the distance from the displacement detectors 7a, 7b. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明はガラス板を含む大型で壊れやすい大型の薄板をラックへ搬送するロボットシステムに関し、地面と平行で長い動作範囲を有する前後動作軸に取り付けられた大型の薄板を置くことのできるハンドをラックに挿入する際、重力でたわむ影響をキャンセルして、地面に対して平行に動作することができる搬送ロボットシステムのたわみ補正装置に関する。   The present invention relates to a robot system for transporting a large and fragile thin plate including a glass plate to a rack, and a rack capable of placing a large thin plate attached to a front and rear operation shaft having a long operation range parallel to the ground. The present invention relates to a deflection correction apparatus for a transfer robot system that can cancel the influence of bending due to gravity and can operate parallel to the ground.

従来、フラットパネルディスプレイなどのガラス板に代表とされる大型で壊れやすい薄板は保管する際にラックへ1枚づつ格納することが行われているが、大型化、薄膜化がすすむ現在では、すでに人手では搬送が不可能となり、その搬送に適したロボットによって実施されるのが標準となってきている。かかるロボットは地面に水平に動作する軸を有し、その先に薄板を置くことができるハンドを取り付けて前後動作させることで薄板のラックへの収納、取出しを行う。通常、その前後軸の垂直高さを変えることができる上下軸も有しており、同一ラックへ高さを変えて何枚も薄板を収納、取り出しを実施する。
特許第3170493号公報 特開平6−246658号公報 発明協会公開技報 公技番号94−2002(発行日 1994.2.1)
Conventionally, large and fragile thin plates represented by glass plates such as flat panel displays have been stored one by one in a rack when stored, but at present, the trend toward larger and thinner films has already been made. It is impossible to carry it manually, and it has become a standard practice to use a robot suitable for carrying it. Such a robot has an axis that moves horizontally on the ground. A hand that can place a thin plate is attached to the tip of the robot and moved back and forth to store and take out the thin plate in a rack. Usually, it also has a vertical axis that can change the vertical height of its front and rear axes, and stores and takes out a number of thin plates by changing the height to the same rack.
Japanese Patent No. 3170493 JP-A-6-246658 Japan Society for Invention and Innovation Technical Bulletin No. 94-2002 (issue date 1994.2.1)

ところで、昨今のフラットパネルディスプレイの大型化する要求に対してそのガラス板も大型化し、そのため、搬送ロボットシステムのハンドも大型重量化し、前後軸の動作量も大きくなっており、重力による前後軸の垂直方向へのたわみも大きくなる。そのたわみのため、薄板をラックへまっすぐ挿入することができないことから、たわみ分ラックのピッチを広げることが実施された。しかし、薄板を格納するラックのピッチを広く取るとどうしても一度に保管できるガラスの枚数が少なくなり、大量のガラスを保管することができなくなる。かかる課題を解決するために、例えば特許文献1に開示する、前後軸のたわみ量にあわせて上下軸の高さを変えて薄板を地面に平行に動作させる方法や、前後軸の根元やハンドの根元に前後軸の動作方向を変化させる回転軸を設けてその回転軸をたわみ量にあわせて動作させ、地面と平行に搬送させる方法などが提案されている。それらのたわみ量はハンドやワークの形状や重さ、前後アームの鉛直方向の剛性などのロボット個々の機差で容易に変化するため、使用条件でたわみ量を計算するか、事前に測定してデータとして保存し、そのデータからたわみ量を求めることになる。しかしたわみ量の計算は非常に複雑でかつワークの重さが間違って指定されれば、間違ったたわみ量が得られるし、事前に測定する場合は多品種のワークに対応することは非常に手間のかかることになる。   By the way, in response to the recent demand for larger flat panel displays, the size of the glass plate has also increased, so the hand of the transfer robot system has also increased in size and weight, and the amount of movement of the front and rear axes has increased. The vertical deflection is also increased. Because of the deflection, the thin plate cannot be inserted straight into the rack, so the pitch of the rack was increased by the deflection. However, if the racks for storing the thin plates have a wide pitch, the number of glasses that can be stored at one time is inevitably reduced, and a large amount of glass cannot be stored. In order to solve such a problem, for example, disclosed in Patent Document 1, a method of operating the thin plate in parallel with the ground by changing the height of the vertical axis according to the amount of deflection of the longitudinal axis, the root of the longitudinal axis and the hand There has been proposed a method in which a rotating shaft that changes the operation direction of the front and rear axes is provided at the base, the rotating shaft is operated in accordance with the amount of deflection, and conveyed in parallel with the ground. The amount of deflection easily changes depending on the individual machine difference, such as the shape and weight of the hand or workpiece, and the vertical rigidity of the front and rear arms, so calculate the amount of deflection under the operating conditions or measure it in advance. It is saved as data, and the amount of deflection is obtained from the data. However, the calculation of the amount of deflection is very complicated, and if the weight of the workpiece is specified incorrectly, an incorrect amount of deflection can be obtained, and it is very troublesome to handle a wide variety of workpieces when measuring in advance. It will take.

特許文献2では、LCD基板の重量によるたわみを、発光素子と受光素子を使用して補正するロボットシステムのたわみ補正装置を開示するが、ガラス板を含む薄板の大型化、搬送ロボットシステムのハンドも大型重量化及び前後軸の動作量の増大による、重力による前後軸の垂直方向へのたわみが大きくなっても、薄板をラックへ挿入するロボットの前後軸、上下軸及び回転軸の動作を停止することなく、薄板をラックへまっすぐ挿入することができる搬送ロボットシステムのたわみ補正装置には使用できない。又、特許文献3では、渦流れセンサーを使用してロボットによるワークの位置決めの際のずれを補正する装置を開示するが、ワークの前で一時停止して測定する必要があり、薄板をラックへ挿入するロボットの前後軸、上下軸及び回転軸の動作を停止することなく、薄板をラックへまっすぐ挿入することができる搬送ロボットシステムのたわみ補正装置には使用できない。   Patent Document 2 discloses a deflection correction apparatus for a robot system that corrects deflection due to the weight of an LCD substrate using a light emitting element and a light receiving element. However, an increase in the size of a thin plate including a glass plate and a hand of a transfer robot system are also disclosed. Even if the vertical deflection of the longitudinal axis due to gravity increases due to the increase in the weight and the amount of movement of the longitudinal axis, the motion of the longitudinal axis, vertical axis and rotary axis of the robot inserting the thin plate into the rack is stopped. Without being able to be used in the deflection correction device of the transfer robot system that can insert the thin plate straight into the rack. Patent Document 3 discloses a device that uses a vortex flow sensor to correct a displacement when a workpiece is positioned by a robot. However, it is necessary to pause and measure before the workpiece, and the thin plate is placed in a rack. It cannot be used for a deflection correction device of a transfer robot system that can insert a thin plate straight into a rack without stopping the operation of the front and rear axes, the vertical axis, and the rotation axis of the robot to be inserted.

本発明の課題はかかる従来の課題を解決した、ガラス板を含む薄板の大型化、搬送ロボットシステムのハンドも大型重量化及び前後軸の動作量の増大による、重力による前後軸の垂直方向へのたわみが大きくなっても、薄板をラックへ挿入するロボットの前後軸、上下軸及び回転軸の動作を停止することなく、薄板をラックへまっすぐ挿入することができる搬送ロボットシステムのたわみ補正装置を提供することにある。   The object of the present invention is to solve such a conventional problem, by increasing the size of a thin plate including a glass plate, increasing the weight of a transfer robot system hand, and increasing the amount of movement of the front and rear axes, and the vertical movement of the front and rear axes due to gravity. Provides a deflection correction device for a transfer robot system that can insert a thin plate straight into the rack without stopping the operation of the longitudinal axis, vertical axis, and rotation axis of the robot that inserts the thin plate into the rack even when the deflection increases. There is to do.

このため本発明の第1発明は、地面と平行で長い動作範囲を有する前後動作軸をもつロボットが、前記動作軸の先端にガラス板を含む薄板を置くことのできるハンドを取り付け、薄板を収納するラックへ前後軸を動作させて薄板の搬入、取り出しを行う動作において、ラックの基準部材とハンドの先端との距離を測定するハンドの先端部に取り付けられた変位検出器と、前記前後軸の動作高さを変えることができる上下動作軸及び前後軸の動作方向を変えることのできる回転動作軸を有し、前記変位検出器からの距離情報により、前記上下軸及び回転動作軸の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する補正制御回路により、前記ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、薄板の搬入、取り出しを行う動作中を通じて一定に保つことを特徴とする搬送ロボットシステムのたわみ補正装置によって上述した本発明の課題を解決した。
本発明の第2発明は、地面と平行で長い動作範囲を有する前後動作軸をもつロボットが、前記動作軸の先端にガラス板を含む薄板を置くことのできるハンドを取り付け、薄板を収納するラックへ前後軸動を動作させて薄板の搬入、取り出しを行う動作において、ラックの基準部材とハンドの先端との距離を測定する各ラック入口に取り付けられた変位検出器と、前記前後軸の動作高さを変えることができる上下動作軸及び前後軸の動作方向を変えることのできる回転動作軸を有し、前記変位検出器からの距離情報により、前記上下軸及び回転動作軸の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する補正制御回路により、前記ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、薄板の搬入、取り出しを行う動作中を通じて一定に保つことを特徴とする搬送ロボットシステムのたわみ補正装置によって上述した本発明の課題を解決した。
Therefore, according to the first aspect of the present invention, a robot having a longitudinal motion axis that is parallel to the ground and has a long motion range is attached with a hand that can place a thin plate including a glass plate at the tip of the motion shaft, and the thin plate is accommodated. A displacement detector attached to the front end of the hand for measuring the distance between the reference member of the rack and the front end of the hand in the operation of moving the front and rear shaft to the rack to carry in and taking out the thin plate; It has a vertical motion axis that can change the motion height and a rotational motion axis that can change the motion direction of the front and rear axes, and the deflection of the vertical and rotational motion axes due to gravity based on distance information from the displacement detector. The vertical direction of the lower surface of the front end of the hand and the reference member of the rack storing the thin plate is determined by a correction control circuit that determines and corrects the correction operation amount of the vertical axis and / or the rotation operation axis for correcting the amount. Distance, carrying the sheet, and solve the problems of the present invention described above by deflection correction apparatus of the transfer robot system, characterized in that kept constant throughout the operation for taking out.
A second invention of the present invention is a rack in which a robot having a longitudinal motion axis parallel to the ground and having a long motion range is attached with a hand capable of placing a thin plate including a glass plate at the tip of the motion shaft, and stores the thin plate. In the operation of carrying in and out the thin plate by moving the front and rear axial movements, a displacement detector attached to each rack inlet for measuring the distance between the reference member of the rack and the tip of the hand, and the operational height of the front and rear axes A vertical motion axis that can change the length and a rotational motion axis that can change the motion direction of the front and rear axes, and by the distance information from the displacement detector, the amount of deflection due to gravity of the vertical motion axis and the rotational motion axis The vertical distance between the lower surface of the front end of the hand and the reference member of the rack that stores the thin plate is determined by a correction control circuit that determines and corrects the correction operation amount of the vertical axis and / or the rotary operation axis to be corrected. Carrying the sheet, and solve the problems of the present invention described above by deflection correction apparatus of the transfer robot system, characterized in that kept constant throughout the operation for taking out.

本発明では、ラックの基準部材とハンドの先端との距離を測定するハンドの先端部に取り付けられた変位検出器、又は、ラックの基準部材とハンドの先端との距離を測定する各ラック入口に取り付けられた変位検出器を有し、変位検出器からの距離情報により、前記上下軸及び回転動作軸の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する補正制御回路により、ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、薄板の搬入、取り出しを行う動作中を通じて一定に保つようにしたので、ガラス板を含む薄板の大型化、搬送ロボットシステムのハンドも大型重量化及び前後軸の動作量の増大による、重力による前後軸の垂直方向へのたわみが大きくなっても、薄板をラックへ挿入するロボットの前後軸、上下軸及び回転軸の動作を停止することなく、薄板をラックへまっすぐ挿入することができる搬送ロボットシステムのたわみ補正装置を提供するものとなった。特に搬送する前後動作軸のハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、変位検出器センサにて測定し、前後軸を直線に動作させるための軸の動作量をそのたわみ量を決定し補正制御することが、本発明の際立った特徴である。   In the present invention, a displacement detector attached to the tip of the hand that measures the distance between the reference member of the rack and the tip of the hand, or each rack inlet that measures the distance between the reference member of the rack and the tip of the hand. It has an attached displacement detector, and based on the distance information from the displacement detector, it determines and corrects the correction operation amount of the vertical axis and / or the rotation motion axis that corrects the deflection amount due to gravity of the vertical motion shaft and the rotation motion shaft. Since the vertical distance between the lower surface of the front end of the hand and the reference member of the rack storing the thin plate is kept constant throughout the operation of loading and unloading the thin plate, Even if the deflection of the vertical axis of the front and rear axes due to gravity increases due to the increase in size and the weight of the transfer robot system and the increase in the amount of movement of the front and rear axes, the thin plate is inserted into the rack. Longitudinal axis of the robot, without stopping the operation of the vertical axis and the rotation axis, was intended to provide a deflection correction apparatus of the transfer robot system thin plate can straight insertion into a rack. In particular, the vertical distance between the lower surface of the front end of the hand of the front and rear operation shaft to be transported and the reference member of the rack that stores the thin plate is measured by a displacement detector sensor, and the amount of movement of the shaft for linearly moving the front and rear shaft is calculated. It is a distinguishing feature of the present invention that the amount of deflection is determined and correction control is performed.

本発明の実施形態を、図1〜図3を参照して説明する。図1は本発明の実施形態の搬送ロボットシステムのたわみ補正装置を示す概略側面ブロック図、図2は図1の搬送ロボットシステムのハンド3のたわみ動作状態を示す説明図、図3は図1の搬送ロボットシステムのハンド3のたわみ動作状態を補正した状態を示す説明図、図4は従来の搬送ロボットシステムのハンドのたわみ動作状態が補正されていない状態を示す説明図を示す。   An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic side block diagram showing a deflection correcting device of a transfer robot system according to an embodiment of the present invention, FIG. 2 is an explanatory view showing a bending operation state of a hand 3 of the transfer robot system of FIG. 1, and FIG. FIG. 4 is an explanatory view showing a state in which the bending operation state of the hand 3 of the transfer robot system is corrected, and FIG. 4 is an explanatory view showing a state in which the bending operation state of the hand of the conventional transfer robot system is not corrected.

図1の7aに示す変位検出器は、本発明の第1発明の実施形態の搬送ロボットシステムのたわみ補正装置を示し、地面と平行で長い動作範囲を有する前後動作軸1をもつロボットが(図1では1個の前後動作軸をもつが、2個以上の前後動作軸をもつてもよい)、動作軸1の先端にガラス板を含む薄板2を置くことのできるハンド3を取り付け、薄板2をハンド3にのせたまま、薄板2を収納するラック4へ前後軸1を動かして挿入し、薄板2をラックに搬入、取り出しを行う動作において、ラック4の図示しない基準部材である棒部材とハンド3の先端との距離を測定するハンドの先端部に取り付けられた変位検出器7aと、前後軸1の動作高さを変えることができる上下動作軸5及び前後軸1の動作方向を変えることのできる回転動作軸6とを有し、変位検出器7aからの距離情報により、上下軸5及び回転動作軸6の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する制御装置8に内蔵された補正制御回路10により、ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離dを、薄板の搬入、取り出しを行う動作中を通じて一定に保つことを特徴とするものである。図1において、実線で示す前後動作軸1は最も前方に前進した位置にあり、前後動作軸1が支持するハンド3aは薄板2をラック4の奥まで搬入した状態を示し、破線で示す前後動作軸1bは後方に後退しており、前後動作軸1bが支持するハンド3bも後退位置にある。   The displacement detector 7a shown in FIG. 1 shows a deflection correction device for a transfer robot system according to an embodiment of the first invention of the present invention. A robot having a longitudinal motion axis 1 parallel to the ground and having a long motion range (see FIG. 1 has one longitudinal motion axis, but may have two or more longitudinal motion axes), and a hand 3 on which a thin plate 2 including a glass plate can be placed at the tip of the motion shaft 1 is attached. In the operation of moving the longitudinal shaft 1 to the rack 4 for storing the thin plate 2 and inserting the thin plate 2 into and taking out the thin plate 2 with the hand 3 placed on the hand 3, a rod member which is a reference member (not shown) of the rack 4 and The displacement detector 7a attached to the tip of the hand 3 for measuring the distance from the tip of the hand 3, and the vertical motion shaft 5 that can change the motion height of the front and rear shaft 1 and the motion direction of the front and rear shaft 1 are changed. A rotating motion shaft 6 capable of And a control device 8 that determines and corrects the correction operation amount of the vertical axis and / or the rotary motion axis for correcting the deflection amount due to gravity of the vertical shaft 5 and the rotary motion shaft 6 based on the distance information from the displacement detector 7a. The built-in correction control circuit 10 keeps the vertical distance d between the lower surface of the front end of the hand and the reference member of the rack for storing the thin plate constant throughout the operation of loading and unloading the thin plate. is there. In FIG. 1, the front / rear operation shaft 1 indicated by the solid line is at the most forward position, and the hand 3a supported by the front / rear operation shaft 1 shows the state in which the thin plate 2 is carried into the back of the rack 4, and the front / rear operation indicated by the broken line. The shaft 1b is retracted rearward, and the hand 3b supported by the front / rear operation shaft 1b is also in the retracted position.

図1の7bに示す変位検出器は、本発明の第2発明の実施形態の搬送ロボットシステムのたわみ補正装置を示し、ラック4の図示しない基準部材である棒部材とハンド3の先端との距離を測定する各ラック4入口に取り付けられた6個の変位検出器7bを有す他は、図1の7aに示す変位検出器を有する、本発明の第1発明の実施形態の搬送ロボットシステムのたわみ補正装置と同じであり説明を省略する。   The displacement detector 7b shown in FIG. 1 shows a deflection correction device for a transport robot system according to an embodiment of the second invention of the present invention. The distance between a bar member (not shown) of the rack 4 and the tip of the hand 3 is shown. In addition to having six displacement detectors 7b attached to the inlets of the racks 4 to measure each of the racks, the transfer robot system according to the first embodiment of the present invention has the displacement detectors shown in 7a of FIG. Since this is the same as the deflection correction apparatus, description thereof is omitted.

作動においては、図2に示すように、前後動作軸1bが支持するハンド3bの位置から前進して、ハンド 3c,3dの位置からハンド3aの位置まで前進すると、前後軸1の剛性不足もしくは、ハンド3、薄板2の重量によって、基準線sからたわみ量Lだけたわんでいき、最悪の場合ラック4と干渉する。そこでラックとの干渉を防ぐように、上下動作軸5をそのたわみ量Lをキャンセルするように動作させること、及び/又は、前後軸1の根元に取り付けられた回転軸6角度αだけを動作させることで、基準線sを通るように動作させることでラック4との干渉を防ぐことができる(図3)。しかし従来装置では、前後軸のハンドや薄板の形状が別のものに変わった場合、そのたわみ方も当然変化し、例えば、図4のようなたわみ量Hになり、図3に基づいてたわみ量のキャンセル動作ではそのたわみ量をキャンセルすることができないため、再度たわみ量を測りなおして上下動作、回転動作を決定し補正することになった。それに対して本発明では各ラック4入口もしくはハンド先端に、ラック4の図示しない基準部材である棒部材とハンド3の先端との距離を測定する変位検出器 7a,7bを取り付ける。そして前後軸の動作によってラックとハンドの間の距離が狭くなった場合、それを広げる方向へ上下軸もしくは回転軸を動作させ、広がった場合もその距離が狭くなるように上下軸もしくは回転軸を動作させる動作量を決定し補正する制御装置8に内蔵された補正制御回路10で、上下軸もしくは回転軸の動作を決定し補正し挿入動作を行うことで、ラックと薄板の間隔を一定に保ったまま、干渉することなく搬送作業が実施できる。このときハンドや薄板の形状や重量が変わった場合でも特別な計測や補正の計算を実施することなしに容易にラックへの挿入、取出し動作が行えるものである。変位検出器 7a,7bの取り付け位置は各ラック4入口もしくはハンド先端としたが、センサの信頼性や保守性の観点からは各ラック4入口に取り付けることが望ましいが、すべての挿入位置に変位検出器7bを取り付ける必要があり、コストの観点からは不利となる。しかしハンド先端に変位検出器7aを取り付ける場合は、変位検出器の数は少なくなるが、動作する部分への取り付けとなるため、センサへの線の断線や、センサそのものの故障が多くなる。   In operation, as shown in FIG. 2, when the front and rear operation shaft 1b moves forward from the position of the hand 3b and advances from the positions of the hands 3c and 3d to the position of the hand 3a, the rigidity of the front and rear shaft 1 is insufficient or Depending on the weight of the hand 3 and the thin plate 2, it bends by a deflection amount L from the reference line s and interferes with the rack 4 in the worst case. Therefore, in order to prevent interference with the rack, the vertical movement shaft 5 is operated so as to cancel the deflection amount L and / or only the rotation shaft 6 angle α attached to the root of the front and rear shaft 1 is operated. Thus, the interference with the rack 4 can be prevented by operating the reference line s (FIG. 3). However, in the conventional apparatus, when the shape of the hand or thin plate on the front and rear axes is changed to another, the way of deflection naturally changes, for example, the amount of deflection H is as shown in FIG. 4, and the amount of deflection is based on FIG. Since the amount of deflection cannot be canceled by this canceling operation, the amount of deflection is measured again to determine and correct the vertical and rotational motions. On the other hand, in the present invention, displacement detectors 7a and 7b for measuring the distance between a bar member (not shown) of the rack 4 and the tip of the hand 3 are attached to the entrance of each rack 4 or the tip of the hand. If the distance between the rack and the hand is reduced due to the movement of the front and rear axes, the vertical axis or rotary axis is moved in the direction to widen it, and the vertical axis or rotary axis is also adjusted so that the distance decreases when it is widened. The correction control circuit 10 built in the control device 8 that determines and corrects the operation amount to be operated determines the operation of the vertical axis or the rotation axis, corrects it, and performs the insertion operation, thereby keeping the distance between the rack and the thin plate constant. The conveyance work can be carried out without interference. At this time, even when the shape or weight of the hand or the thin plate is changed, it is possible to easily insert into and remove from the rack without performing any special measurement or correction calculation. The displacement detectors 7a and 7b are attached to the rack 4 inlet or the tip of the hand. From the viewpoint of sensor reliability and maintainability, it is desirable to attach the displacement detector 7a, 7b to each rack 4 inlet. It is necessary to attach the container 7b, which is disadvantageous from the viewpoint of cost. However, when the displacement detector 7a is attached to the tip of the hand, the number of displacement detectors is reduced, but since the attachment is to the operating part, the disconnection of the line to the sensor and the failure of the sensor itself increase.

本発明の実施形態では、ラックの基準部材とハンドの先端との距離を測定するハンドの先端部に取り付けられた変位検出器、又は、ラックの基準部材とハンドの先端との距離を測定する各ラック入口に取り付けられた変位検出器を有し、変位検出器からの距離情報により、前記上下軸及び回転動作軸の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する補正制御回路により、ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、薄板の搬入、取り出しを行う動作中を通じて一定に保つようにしたので、ガラス板を含む薄板の大型化、搬送ロボットシステムのハンドも大型重量化及び前後軸の動作量の増大による、重力による前後軸の垂直方向へのたわみが大きくなっても、薄板をラックへ挿入するロボットの前後軸、上下軸及び回転軸の動作を停止することなく、薄板をラックへまっすぐ挿入することができる搬送ロボットシステムのたわみ補正装置を提供するものとなった。   In the embodiment of the present invention, a displacement detector attached to the tip of the hand that measures the distance between the reference member of the rack and the tip of the hand, or each of measuring the distance between the reference member of the rack and the tip of the hand A displacement detector attached to the rack inlet, and a correction operation amount of the vertical axis and / or the rotary operation axis for correcting a deflection amount due to gravity of the vertical axis and the rotary operation axis based on distance information from the displacement detector; Because the correction control circuit that determines and corrects the vertical distance between the lower surface of the tip of the hand and the reference member of the rack that stores the thin plate is kept constant throughout the operation of loading and unloading the thin plate, Even if the deflection of the vertical axis of the front and rear axis due to gravity increases due to the increase in the size of the thin plate, the large weight of the transfer robot system hand, and the increase in the amount of movement of the front and rear axis, Longitudinal axis of the robot to be inserted into the click, without stopping the operation of the vertical axis and the rotation axis, was intended to provide a deflection correction apparatus of the transfer robot system thin plate can straight insertion into a rack.

本発明の実施形態の搬送ロボットシステムのたわみ補正装置を示す概略側面ブロック図である。1 is a schematic side block diagram illustrating a deflection correction device of a transport robot system according to an embodiment of the present invention. 図1の搬送ロボットシステムのハンド3のたわみ動作状態を示す説明図。Explanatory drawing which shows the bending operation state of the hand 3 of the conveyance robot system of FIG. 図1の搬送ロボットシステムのハンド3のたわみ動作状態を補正した状態を示す説明図。Explanatory drawing which shows the state which correct | amended the bending operation state of the hand 3 of the conveyance robot system of FIG. 従来の搬送ロボットシステムのハンドのたわみ動作状態が補正されていない状態を示す説明図。Explanatory drawing which shows the state by which the bending operation state of the hand of the conventional conveyance robot system is not correct | amended.

符号の説明Explanation of symbols

1、1b:前後動作軸、2:ガラス板を含む薄板、3:ハンド、3a〜3d:ハンドの位置
4:ラック、5:上下動作軸、6:回転動作軸、7a、7b:変位検出器
d:ラックの基準部材との垂直方向距離
DESCRIPTION OF SYMBOLS 1, 1b: Longitudinal motion axis | shaft, 2: Thin plate containing a glass plate, 3: Hand, 3a-3d: Hand position 4: Rack, 5: Vertical motion axis, 6: Rotary motion axis, 7a, 7b: Displacement detector d: Vertical distance from the reference member of the rack

Claims (2)

地面と平行で長い動作範囲を有する前後動作軸をもつロボットが、前記動作軸の先端にガラス板を含む薄板を置くことのできるハンドを取り付け、薄板を収納するラックへ前後軸を動作させて薄板の搬入、取り出しを行う動作において、ラックの基準部材とハンドの先端との距離を測定するハンドの先端部に取り付けられた変位検出器と、前記前後軸の動作高さを変えることができる上下動作軸及び前後軸の動作方向を変えることのできる回転動作軸を有し、前記変位検出器からの距離情報により、前記上下軸及び回転動作軸の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する補正制御回路により、前記ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、薄板の搬入、取り出しを行う動作中を通じて一定に保つことを特徴とする搬送ロボットシステムのたわみ補正装置。   A robot having a longitudinal motion axis that is parallel to the ground and has a long motion range attaches a hand that can place a thin plate including a glass plate to the tip of the motion shaft, and moves the longitudinal shaft to a rack that stores the thin plate to move the thin plate In the operation of loading and unloading, the displacement detector attached to the tip of the hand for measuring the distance between the reference member of the rack and the tip of the hand, and the vertical motion that can change the operating height of the front and rear shafts A vertical axis and / or a rotation having a rotary motion axis capable of changing the motion direction of the shaft and the front and rear axes, and correcting the deflection amount due to gravity of the vertical axis and the rotary motion axis based on distance information from the displacement detector A correction control circuit that determines and corrects the correction operation amount of the operation axis determines the vertical distance between the lower surface of the front end of the hand and the reference member of the rack for storing the thin plate. Deflection correction apparatus of the transfer robot system, characterized in that kept constant throughout the operation for. 地面と平行で長い動作範囲を有する前後動作軸をもつロボットが、前記動作軸の先端にガラス板を含む薄板を置くことのできるハンドを取り付け、薄板を収納するラックへ前後軸動を動作させて薄板の搬入、取り出しを行う動作において、ラックの基準部材とハンドの先端との距離を測定する各ラック入口に取り付けられた変位検出器と、前記前後軸の動作高さを変えることができる上下動作軸及び前後軸の動作方向を変えることのできる回転動作軸を有し、前記変位検出器からの距離情報により、前記上下軸及び回転動作軸の重力によるたわみ量を補正する上下軸及び/又は回転動作軸の補正動作量を決定し補正する補正制御回路により、前記ハンドの先端下面と薄板を格納するラックの基準部材との垂直方向距離を、薄板の搬入、取り出しを行う動作中を通じて一定に保つことを特徴とする搬送ロボットシステムのたわみ補正装置。   A robot having a longitudinal motion axis that is parallel to the ground and has a long motion range, attaches a hand that can place a thin plate including a glass plate to the tip of the motion shaft, and moves the longitudinal motion to a rack that houses the thin plate. In the operation of loading and unloading the thin plate, a displacement detector attached to each rack inlet for measuring the distance between the reference member of the rack and the tip of the hand, and a vertical operation capable of changing the operation height of the front and rear shafts A vertical axis and / or a rotation having a rotary motion axis capable of changing the motion direction of the shaft and the front and rear axes, and correcting the deflection amount due to gravity of the vertical axis and the rotary motion axis based on distance information from the displacement detector A correction control circuit that determines and corrects the correction operation amount of the operation axis determines the vertical distance between the lower surface of the front end of the hand and the reference member of the rack that stores the thin plate, and carries in and takes out the thin plate. Deflection correction apparatus of the transfer robot system, characterized in that kept constant throughout the operation for.
JP2006289348A 2006-10-25 2006-10-25 Apparatus for correcting deflection of carrier robot system Withdrawn JP2008105125A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101349606B1 (en) * 2012-03-19 2014-01-10 로체 시스템즈(주) Apparatus for transportation of glass substrate
JP2020505775A (en) * 2017-01-26 2020-02-20 ブルックス オートメーション インコーポレイテッド Method and apparatus for position compensation of a substrate transfer device
WO2021090693A1 (en) * 2019-11-05 2021-05-14 パナソニックIpマネジメント株式会社 Robot control method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101349606B1 (en) * 2012-03-19 2014-01-10 로체 시스템즈(주) Apparatus for transportation of glass substrate
JP2020505775A (en) * 2017-01-26 2020-02-20 ブルックス オートメーション インコーポレイテッド Method and apparatus for position compensation of a substrate transfer device
WO2021090693A1 (en) * 2019-11-05 2021-05-14 パナソニックIpマネジメント株式会社 Robot control method
JPWO2021090693A1 (en) * 2019-11-05 2021-05-14
JP7133757B2 (en) 2019-11-05 2022-09-09 パナソニックIpマネジメント株式会社 Robot control method

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