JP2008098288A - Positioning unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning unit wherein a slide table can be held at the central position with no load and it can be moved in X and Y directions by a slight control force with devices placed on the slide table, and wherein the slide table is positioned and fixed when the movement (adjustment) is completed. <P>SOLUTION: While a device 1 is not placed on a slide table 2, an engaging part 16 formed in the periphery of a table position regulating plate 13 is energized and engaged with a positioning opening 15, thus positioning the slide table 2 at the central position. When the device 1 is placed on the slide table 2, the table position regulating plate 13 is lowered against the energizing force of an energizing means 12, and the energizing state of an engaging part 16 with the positioning opening 15 is released, and the slide table 2 can be positioned freely. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a positioning unit including a slide table that receives equipment and is movable in a plane, and an operation member for positioning the slide table.

  In the manufacturing process of electronic devices and the like where work is performed in a clean room, for example, a cassette containing a thin substrate such as a liquid crystal panel is transported to a work station by transport means (AGV, etc.), and is placed on the work station via the cargo handling means. After transferring the cassette and positioning the cassette with respect to the robot waiting separately by the positioning device, the robot hand grips the object to be processed (thin substrate) and performs processing. A transporting process is provided in which the material is returned to the transporting means via the cargo handling means and unloaded again.

  In such a transfer process, there is usually a slight error in the stop position of the transfer means with respect to the work station. Therefore, as described above, the cassette transferred on the work station is positioned by the positioning device. In such a positioning device, in order to return the cassette to the conveying means again after the completion of processing, the slide table on which the cassette is placed is moved to the original position (transferred) on the work station by a resilient member such as a coil spring, for example. Position) (see, for example, Patent Documents 1 and 2).

By the way, a high-accuracy positioning unit is required even when a heavy device is installed at a predetermined position in a clean room. In such a positioning unit, the slide table in a state where the device is received can be moved in the X and Y directions with a slight operating force, and the slide table can be easily moved when the position adjustment operation is completed. It is desirable that it can be fixed securely.
JP 2003-152054 A JP-A-2005-109443

  In the positioning device used in the transporting process as described above, the slide table in a state where the device is received can be moved in a plane with a slight operating force, and when the position adjustment work is completed. An operation member that can fix the position of the slide table is not provided. Therefore, as described above, it cannot be used when a heavy device is installed in a fixed position.

  The present invention has been made in view of such circumstances, and in a no-load state, the slide table is held at the center position, and the slide table can be moved in a plane with a slight operating force in a state where the device is received. And it aims at providing the positioning unit which enabled it to fix the position of a slide table when the movement (adjustment) was complete | finished.

(1) The positioning unit of the present invention is provided in the main body housing 3 so that the slide table 2 for receiving the device 1 is movable in a plane, and the slide table 2 is fixedly held at a desired position. Positioning means 4 and 5 for positioning are positioning units that can be disposed in two directions orthogonal to each other in association with the main body housing 3 and the slide table 2;
A support mechanism 6 for supporting the slide table 2 is provided in the main body housing 3, and the support mechanism 6 is provided so as to surround the support member 7 fixed to the slide table 2 and the support member 7. A lower open casing 8, a space portion 9 formed between the casing 8 and the support member 7, and a base plate 10 laid at the bottom of the main body housing 3 to close the lower portion of the space portion 9. And a plurality of spheres 11 that are inserted into the space 9 and circulate while rolling on the base plate 10,
A table position restricting plate 13 urged upward by the urging means 12 is mounted on the upper surface of the casing 8 and fixed to the lower part of the slide table 2, and the top of the main body housing 3 is fixed. The plate portion 14 is formed with a positioning opening 15 for positioning the table position restricting plate 13 at the center position. When the slide table 2 is not receiving the device 1, When the slide table 2 is positioned at the center position by the urging engagement of the engaging portion 16 formed on the peripheral edge with the positioning opening 15, the urging means moves when the slide table 2 receives the device 1. The table position restricting plate 13 descends against the urging force of 12, and the engagement state of the engagement portion 16 with respect to the positioning opening 15 is released, so that the slide De table 2 is characterized by comprising a free position adjustment.

  According to such a configuration, for example, as shown in FIGS. 1 and 2, when the main body housing 3 is placed on the equipment installation surface and the equipment 1 is positioned, the slide table 2 receives the equipment 1. In a state where the slide table 2 is not engaged, the engaging portion 16 formed on the peripheral edge of the table position restricting plate 13 is urged and engaged with the positioning opening 15 so that the slide table 2 is positioned at the center position. If the device 1 is placed on the slide table 2, the adjustment allowance (adjustment width) of the slide table 2 can be sufficiently obtained. Further, since the slide table 2 can be shipped in a state in which the slide table 2 is positioned at the center position, it is possible to avoid a trouble that the slide table 2 is floated during the transfer or at the time of carry-in to cause a problem.

  When the device 1 is placed on the slide table 2, the table position regulating plate 13 descends against the urging force of the urging means 12 and the engagement state with the positioning opening 15 is released. The position of the slide table 2 can be adjusted by a plurality of spheres 11 that circulate and move with a slight operating force. When the position adjustment operation is completed, the slide table 2 is moved to the main body by the positioning means 4 and 5 at that position. It can be fixed to the housing 3, and the installation work of the device 1 is completed.

(2) The positioning means 4 and 5 have operation portions 4a and 5a and male screw portions 4b and 5b, and the male screw portions 4b and 5b are formed in the flange portion 31 of the slide table 2 in the lateral direction. The peripheries of the long holes 32 and 33 are movably fitted in the holes 32 and 33, and the male screw portions 4b and 5b and the pair of female screw members 4c and 5c engaged with the male screw portions 4b and 5b. May be fixed in a sandwiched state.

  In this way, if the male screw portions 4b and 5b are movable in the elongated holes 32 and 33 without fastening the male screw portions 4b and 5b and the female screw members 4c and 5c, the slide table can be obtained. Since 2 becomes movable in a plane, the device 1 can be placed on the slide table 2 to perform the positioning operation. When the positioning operation of the device 1 is completed, the operation members 4a and 5a are operated to fasten the screw members 4b, 4c, 5b, and 5c, thereby fixing the space between the main body housing 3 and the slide table 2. 1 can be fixed in a reliably positioned state.

(3) The ends of the male screw portions 4b and 5b of the positioning means 4 and 5 may be linked to the main body housing 3 via ball joints 4d and 5d. In this way, even when the device 1 is moved in the plane during the positioning operation, it may be absorbed by the ball joints 4d and 5d even if it is twisted in the XY direction. Therefore, it is possible to avoid an unreasonable load from acting on the positioning unit and to perform positioning with high accuracy.

(4) The positioning opening 15 formed in the top plate portion 14 of the main body housing 3 and the engaging surface of the engaging portion 16 of the table position restricting plate 13 that engages with the positioning opening 15 face upward. It may be formed in a tapered shape that narrows. In this way, the engaging portion 16 of the table position restricting plate 13 can be easily engaged with the positioning opening 15, and the engaging portion 16 of the table position restricting plate 13 is slightly displaced from the positioning opening 15. Even in the above position, the urging force can be applied by the urging force of the urging means 12.

  In the positioning unit of the present invention, in a state where the slide table is not receiving equipment, the engaging portion formed on the peripheral edge of the table position regulating plate is urged and engaged with the positioning opening, so that the slide table is positioned at the center position. Therefore, if the device is placed on the slide table at the center position, the adjustment allowance (adjustment width) of the slide table can be sufficiently obtained in the plane. Further, since the slide table can be shipped in a state where the slide table is positioned at the center position, it is possible to avoid a trouble such that the slide table floats during transport or loading and causes problems. And when the device is placed on the slide table, the table position restricting plate descends against the urging force of the urging means and the engagement state with the positioning opening is released, so that the slide table can be adjusted in position, When the position adjustment operation of the device is completed, the slide table can be fixed by the positioning means at that position, and the device installation operation is completed.

The positioning unit according to the best embodiment of the present invention will be described in detail below with reference to the drawings.
FIG. 1 is a sectional view of the main part of the positioning unit, and FIG. 2 is a plan view of the positioning unit. In these drawings, reference numeral 1 is a device (leg part) to be positioned, and 2 is a slide table that is movably provided in a plane for receiving the device 1. A square frame 2a for fitting the leg of the device 1 is attached, and a fixing bolt 2b is screwed around the frame 2a. Reference numeral 3 denotes a main body housing on which the slide table 2 is movably mounted, and reference numerals 4 and 5 denote positioning means for fixing and holding the slide table 2 at desired positions, which are linked to the main body housing 3 and the slide table 2. Thus, they are arranged in two directions orthogonal to each other.

  The positioning means 4 and 5 have operation portions 4a and 5a and male screw portions 4b and 5b. The male screw portions 4b and 5b are formed in two flange portions 31 formed at the edge of the slide table 2. It is loosely fitted in the laterally elongated long holes 32 and 33, and is long by the male screw portions 4b and 5b and a pair of female screw members 4c and 5c screwed into the male screw portions 4b and 5b. The peripheral edges of the holes 32 and 33 can be fixed in a clamped state, and the ends of the male screw portions 4b and 5b are linked to the side surface of the main body housing 3 via the ball joints 4d and 5d.

  A support mechanism 6 that supports the slide table 2 is provided in the main body casing 3, and the support mechanism 6 is a support member 7 that is fixed to the slide table 2 and a lower part that is provided so as to surround the support member 7. An open casing 8, a space 9 formed between the casing 8 and the support member 7, a base plate 10 laid on the bottom of the main body housing 3 to close the lower portion of the space 9, and the space A plurality of spheres 11 that are inserted into the portion 9 and circulate while rolling on the base plate 10.

  The upper surface of the casing 8 is fixed to the lower part of the slide table 2 with a table position restricting plate 13 urged upward by an urging means 12 made of, for example, a coil spring. The top plate portion 14 of the body 3 is formed with a positioning opening 15 for positioning the table position regulating plate 13 at the center position. In the state shown in FIG. 1 where the slide table 2 does not receive the device 1. The slide table 2 is positioned at the center position when the engaging portion 16 formed on the peripheral edge of the table position regulating plate 13 is urged and engaged with the positioning opening 15. The positioning opening 15 formed in the above-described top plate portion 14 and the engaging surface of the engaging portion 16 of the table position restricting plate 13 that engages with the positioning opening 15 are formed in a tapered shape that narrows upward. It is easy to engage.

  When the slide table 2 receives the device 1, the table position regulating plate 13 descends against the urging force of the urging means 12, and the engagement state of the engagement portion 16 with the positioning opening 15 is released, and the slide The table 2 is configured to be positionally adjustable by positioning means 4 and 5. In the state where the slide table 2 does not receive the device 1, as shown in FIG. 1, the table position regulating plate 13 is separated from the upper surface of the casing 8. Although omitted, the table position restricting plate 13 is seated on the upper surface of the casing 8, and the engaging state of the engaging portion 16 with respect to the positioning opening 15 is released as described above, so that the slide table 2 is movable in a plane. .

  According to the above configuration, when the main body housing 3 is placed on the ground device installation surface and the device 1 is positioned, the table position is determined when the slide table 2 does not receive the device 1. Since the slide table 2 is positioned at the center position by the engagement portion 16 formed on the periphery of the restriction plate 13 being urged and engaged with the positioning opening 15, the device 1 is placed on the slide table 2. Then, the adjustment allowance (adjustment width) of the slide table 2 can be obtained sufficiently (maximum) in the plane. Further, in a state where the slide table 2 is positioned at the center position, since the engaging portion 16 is urged and engaged with the positioning opening 15 by the coil spring 12, it can be shipped in a stable state and is being conveyed. In addition, it is possible to avoid a trouble that the slide table 2 floats when a carry-in or the like occurs and a problem occurs.

  When the device 1 is placed on the slide table 2, the male screw portions 4b, 5b and the female screw members 4c, 5c are loosened so that the male screw portions 4b, 5b can freely move in the long holes 32, 33. In this state, when the ride table 2 receives the device 1, the table position restricting plate 13 descends against the urging force of the urging means 12 and the engagement state with the positioning opening 15 is released. The slide table 2 becomes movable in a plane, and the position of the device 1 can be adjusted. In the positioning operation, as described above, the adjustment allowance (adjustment width) of the slide table 2 can be sufficiently obtained within the plane, and therefore high-accuracy positioning can be performed without being excessive. When the positioning operation is completed, the operation parts 4a and 5a are operated to fasten the screw members 4b, 4c, 5b, and 5c, thereby fixing the space between the main body housing 3 and the slide table 2 to ensure the device 1. It can fix to the state positioned to.

  Further, since the tips of the male screw parts 4b, 5b of the positioning means 4, 5 are linked to the slide table 2 via the ball joints 4d, 5d, the device 1 is moved in the XY direction (male) during the positioning operation. Even if it is distorted in a twisted state (in the direction of the screw portions 4b and 5b), it is absorbed by the ball joints 4d and 5d, so that an unreasonable load does not act on the positioning unit and remains as it is. The positioning can be performed with high accuracy regardless of the positioning conditions at that time.

  The positioning opening 15 formed in the top plate portion 14 and the engaging surface of the engaging portion 16 of the table position restricting plate 13 that engages with the positioning opening 15 are formed in a tapered shape that narrows upward. Therefore, the engaging portion 16 of the table position restricting plate 13 can be easily engaged with the positioning opening 15 by the urging of the coil spring 12, and the table position restricting is performed even after the device 1 is removed, for example. Even if the engaging portion 16 of the plate 13 is slightly displaced with respect to the positioning opening 15, it can be easily urged and engaged by the urging force of the urging means 12.

  Note that the present invention is not limited to the embodiment, and it is free to make design changes and improvements as necessary, as long as it does not depart from the gist of the invention. It may be a ball. The slide unit of the present invention can be applied not only to semiconductor-related manufacturing processes but also to other processing lines, automatic warehouses in logistics-related transport processes, and the like.

It is principal part sectional drawing of the positioning unit concerning embodiment of this invention. It is a top view of the slide unit. (A) is a plan view of the slider, and (b) is a side view. (A) is a plan view of the slider, and (b) is a side view.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Apparatus, 2 ... Slide table, 3 ... Main body housing, 4, 5 ... Positioning means, 6 ... Supporting mechanism, 7 ... Supporting member, 8 ... Casing, 9 ... Space part, 10 ... Base plate, 11 ... Sphere, DESCRIPTION OF SYMBOLS 12 ... Biasing means, 13 ... Table position control board, 14 ... Top plate part, 15 ... Positioning opening, 16 ... Engagement part, 4a, 5a ... Operation part, 4b, 5b ... Male screw part, 4c, 5c ... Female Screw member, 4d, 5d ... Ball joint, 31 ... Flange, 32, 33 ... Long hole

Claims (4)

A slide table (2) for receiving the device (1) is provided in the main body housing (3) so as to be movable in a plane, and the slide table (2) is fixedly held at a desired position. The positioning means (4) and (5) are positioning units that can be disposed in two directions orthogonal to each other in association with the main body casing (3) and the slide table (2),
A support mechanism (6) for supporting the slide table (2) is provided in the main body casing (3), and the support mechanism (6) is a support member (7) fixed to the slide table (2). ), A lower open casing (8) provided so as to surround the support member (7), a space (9) formed between the casing (8) and the support member (7), A base plate (10) laid on the bottom of the main body housing (3) to close the lower portion of the space portion (9), and a roll inserted on the base plate (10) inserted into the space portion (9). A plurality of spheres (11) that circulate while moving,
On the upper surface of the casing (8), a table position restricting plate (13) urged upward by the urging means (12) is mounted and fixed to the lower part of the slide table (2), and A positioning opening (15) for positioning the table position regulating plate (13) at the center position is formed in the top plate portion (14) of the main body housing (3), and the slide table (2) is provided. In a state where the device (1) is not received, the engaging portion (16) formed on the periphery of the table position restricting plate (13) is biased and engaged with the positioning opening (15). When the slide table (2) is positioned at the center position and the slide table (2) receives the device (1), the table position restricting plate (13) against the biasing force of the biasing means (12). Falls Positioning unit which engagement of the engaging portion with respect to the serial positioning openings (15) (16) is released, the slide table (2) is characterized by comprising a free position adjustment. The positioning means (4) (5) has operating portions (4a) (5a) and male screw portions (4b) (5b), and the male screw portions (4b) (5b) are provided on the slide table (2). The male screw portions (4b) (5b) and the male screw portions (4b) (5b) are loosely fitted in the laterally elongated holes (32) (33) formed in the flange portion (31). The positioning unit according to claim 1, wherein a peripheral edge of the elongated hole (32) (33) is fixed in a sandwiched state by a pair of female screw members (4c) (5c) that are screwed together. The tip of the male screw part (4b) (5b) of the positioning means (4) (5) is linked to the main body casing (3) via ball joints (4d) (5d). The positioning unit according to claim 1 or 2. Positioning opening (15) formed in the top plate part (14) of the main body housing (3), and engaging part (16) of the table position restricting plate (13) engaged with the positioning opening (15) The positioning unit according to any one of claims 1 to 3, wherein the engaging surface is formed in a tapered shape that narrows upward.

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