JP2008094002A5 - - Google Patents

Claims (8)

A flow path forming substrate provided with a pressure generating chamber communicating with a nozzle opening for injecting a liquid, a lower electrode provided via an insulating film in a region corresponding to the pressure generating chamber of the flow path forming substrate, the lower electrode A piezoelectric layer comprising a piezoelectric layer provided on the electrode and an upper electrode provided on the piezoelectric layer;
The piezoelectric element includes a piezoelectric active portion that is substantially a driving portion in a region opposite to the pressure generating chamber, and a piezoelectric non-active portion that is not substantially driven formed by a removal portion from which the lower electrode is removed. Comprising
A plurality of the piezoelectric non-active parts are provided at predetermined intervals in the longitudinal direction of the pressure generation chamber in a region opposite to the pressure generation chamber ,
The liquid ejecting head according to claim 1, wherein the plurality of piezoelectric non-active parts include one provided between a plurality of adjacent piezoelectric active parts .   The liquid ejecting head according to claim 1, wherein the removing unit is filled with the piezoelectric layer. 3. The liquid ejecting head according to claim 1, wherein a width of the removing portion in a short direction of the pressure generating chamber is wider than a width of the piezoelectric active portion. The length of the removed portion in the longitudinal direction of the pressure generating chamber, to any one of claims 1-3, characterized in that provided wider than the lateral direction of the width of the pressure generating chamber The liquid ejecting head described. Distance between the removal portions adjacent to each other, according to claim 1-4, wherein the pressure generating chambers the lateral direction of the width or more, is and less than twice the lateral direction of the width of the pressure generating chamber The liquid jet head according to any one of the above. The thickness of the piezoelectric inactive part the piezoelectric layer of a liquid ejecting head according to any one of claim 1 to 5, characterized in that less than the thickness of the piezoelectric active part. The lower electrode is provided over a plurality of piezoelectric elements to be a common electrode, and the upper electrode is provided for each of the plurality of piezoelectric elements to be an individual electrode. 6 liquid jet head according to any one of. A liquid ejecting apparatus comprising the liquid ejecting head according to any one of claims 1-7.