JP2008094002A5 - - Google Patents

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Publication number
JP2008094002A5
JP2008094002A5 JP2006279277A JP2006279277A JP2008094002A5 JP 2008094002 A5 JP2008094002 A5 JP 2008094002A5 JP 2006279277 A JP2006279277 A JP 2006279277A JP 2006279277 A JP2006279277 A JP 2006279277A JP 2008094002 A5 JP2008094002 A5 JP 2008094002A5
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JP
Japan
Prior art keywords
piezoelectric
pressure generating
head according
liquid ejecting
generating chamber
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JP2006279277A
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Japanese (ja)
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JP2008094002A (en
JP4888647B2 (en
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Priority to JP2006279277A priority Critical patent/JP4888647B2/en
Priority claimed from JP2006279277A external-priority patent/JP4888647B2/en
Publication of JP2008094002A publication Critical patent/JP2008094002A/en
Publication of JP2008094002A5 publication Critical patent/JP2008094002A5/ja
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Publication of JP4888647B2 publication Critical patent/JP4888647B2/en
Expired - Fee Related legal-status Critical Current
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Claims (8)

液体を噴射するノズル開口に連通する圧力発生室が設けられた流路形成基板と、該流路形成基板の前記圧力発生室に対応する領域に絶縁膜を介して設けられた下電極、該下電極上に設けられた圧電体層及び該圧電体層上に設けられた上電極からなる圧電素子とを具備し、
前記圧電素子は、前記圧力発生室に相対向する領域に実質的な駆動部となる圧電体能動部と、前記下電極が除去された除去部によって形成された実質的に駆動されない圧電体非能動部とを具備し、
前記圧電体非能動部が、前記圧力発生室に相対向する領域に当該圧力発生室の長手方向に亘って所定の間隔で複数設けられており、
複数の前記圧電体非能動部には、隣接する複数の前記圧電体能動部の間に設けられたものが含まれることを特徴とする液体噴射ヘッド。
A flow path forming substrate provided with a pressure generating chamber communicating with a nozzle opening for injecting a liquid, a lower electrode provided via an insulating film in a region corresponding to the pressure generating chamber of the flow path forming substrate, the lower electrode A piezoelectric layer comprising a piezoelectric layer provided on the electrode and an upper electrode provided on the piezoelectric layer;
The piezoelectric element includes a piezoelectric active portion that is substantially a driving portion in a region opposite to the pressure generating chamber, and a piezoelectric non-active portion that is not substantially driven formed by a removal portion from which the lower electrode is removed. Comprising
A plurality of the piezoelectric non-active parts are provided at predetermined intervals in the longitudinal direction of the pressure generation chamber in a region opposite to the pressure generation chamber ,
The liquid ejecting head according to claim 1, wherein the plurality of piezoelectric non-active parts include one provided between a plurality of adjacent piezoelectric active parts .
前記除去部には前記圧電体層が充填されていることを特徴とする請求項1記載の液体噴射ヘッド。  The liquid ejecting head according to claim 1, wherein the removing unit is filled with the piezoelectric layer. 前記圧力発生室の短手方向における前記除去部の幅が、前記圧電体能動部の幅よりも幅広に設けられていることを特徴とする請求項1又は2に記載の液体噴射ヘッド。 3. The liquid ejecting head according to claim 1, wherein a width of the removing portion in a short direction of the pressure generating chamber is wider than a width of the piezoelectric active portion. 前記圧力発生室の長手方向における前記除去部の長さが、前記圧力発生室の短手方向の幅よりも幅広に設けられていることを特徴とする請求項1〜3の何れか一項に記載の液体噴射ヘッド。 The length of the removed portion in the longitudinal direction of the pressure generating chamber, to any one of claims 1-3, characterized in that provided wider than the lateral direction of the width of the pressure generating chamber The liquid ejecting head described. 互いに隣接する前記除去部の間隔が、前記圧力発生室の短手方向の幅以上で、且つ前記圧力発生室の短手方向の幅の2倍以下であることを特徴とする請求項1〜の何れか一項に記載の液体噴射ヘッド。 Distance between the removal portions adjacent to each other, according to claim 1-4, wherein the pressure generating chambers the lateral direction of the width or more, is and less than twice the lateral direction of the width of the pressure generating chamber The liquid jet head according to any one of the above. 前記圧電体非能動部の前記圧電体層の厚さが、前記圧電体能動部の厚さよりも薄いことを特徴とする請求項1〜の何れか一項に記載の液体噴射ヘッド。 The thickness of the piezoelectric inactive part the piezoelectric layer of a liquid ejecting head according to any one of claim 1 to 5, characterized in that less than the thickness of the piezoelectric active part. 前記下電極が複数の圧電素子に亘って設けられて共通電極となっていると共に、前記上電極が複数の圧電素子毎に設けられて個別電極となっていることを特徴とする請求項1〜の何れか一項に記載の液体噴射ヘッド。 The lower electrode is provided over a plurality of piezoelectric elements to be a common electrode, and the upper electrode is provided for each of the plurality of piezoelectric elements to be an individual electrode. 6 liquid jet head according to any one of. 請求項1〜の何れか一項に記載の液体噴射ヘッドを具備することを特徴とする液体噴射装置。 A liquid ejecting apparatus comprising the liquid ejecting head according to any one of claims 1-7.
JP2006279277A 2006-10-12 2006-10-12 Liquid ejecting head and liquid ejecting apparatus Expired - Fee Related JP4888647B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006279277A JP4888647B2 (en) 2006-10-12 2006-10-12 Liquid ejecting head and liquid ejecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006279277A JP4888647B2 (en) 2006-10-12 2006-10-12 Liquid ejecting head and liquid ejecting apparatus

Publications (3)

Publication Number Publication Date
JP2008094002A JP2008094002A (en) 2008-04-24
JP2008094002A5 true JP2008094002A5 (en) 2009-10-22
JP4888647B2 JP4888647B2 (en) 2012-02-29

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Family Applications (1)

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JP2006279277A Expired - Fee Related JP4888647B2 (en) 2006-10-12 2006-10-12 Liquid ejecting head and liquid ejecting apparatus

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JP (1) JP4888647B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009292003A (en) * 2008-06-04 2009-12-17 Seiko Epson Corp Liquid droplet delivering head, inkjet printer, method for manufacturing liquid droplet delivering head, and method for manufacturing inkjet printer
JP5583143B2 (en) * 2009-01-20 2014-09-03 ヒューレット−パッカード デベロップメント カンパニー エル.ピー. Fluid ejection device structure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003008091A (en) * 2001-06-26 2003-01-10 Oki Data Corp Diaphragm type piezoelectric actuator and ink jet head
KR100909100B1 (en) * 2003-09-24 2009-07-23 세이코 엡슨 가부시키가이샤 Liquid ejection head, its manufacturing method and liquid ejection apparatus

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