JP2007281033A5 - - Google Patents

Claims (8)

A piezoelectric element having a lower electrode, a piezoelectric layer and an upper electrode, and a protective film made of an insulating material and provided to cover the piezoelectric element;
An actuator device , wherein a plurality of recesses arranged in the width direction of the piezoelectric element are arranged in parallel in a region facing the upper electrode of the protective film . 2. The actuator device according to claim 1, wherein the total width of the plurality of recesses in the short direction of the piezoelectric element is 25% or more and 60% or less of the width in the short direction of the piezoelectric element .   The end of each recess in the longitudinal direction of the piezoelectric element is located closer to the end in the longitudinal direction of the piezoelectric element, as the recess is closer to the center in the width direction of the piezoelectric element. 2. The actuator device according to 2.   The actuator device according to claim 1, wherein the concave portion is a through-hole penetrating the protective film.   The actuator device according to claim 1, wherein the protective film is made of an inorganic insulating material. A liquid ejecting head comprising the actuator device according to claim 1. A liquid ejecting head that ejects liquid in a pressure generating chamber from a nozzle opening by displacement of the actuator device;
The liquid ejecting head according to claim 6 , wherein both ends in the longitudinal direction of the piezoelectric element are extended to the outside of a region facing the pressure generation chamber.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 6.