JP2008089491A - Radiographic image detection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the occurrence of image retention owing to charge remaining in a charge accumulation portion. <P>SOLUTION: A plurality of first linear electrodes 6 which read as signal charges a radiographic image accumulated in the charge accumulation portion when a photoconductive layer 5 for reading is irradiated with reading light, and are arranged into a stripe-like shape, and a plurality of second linear electrodes 7 which discharge residual charges remaining in the charge accumulation portion or the photoconductive layer 5 when erasing light is emitted, and are arranged between the plurality of first electrodes 6 into a stripe-like shape, are formed at positions different in height. The first electrodes 6 and the second electrodes 7 are arranged alternately in such a way as to be continuous leaving no space, when looked from the height direction (direction of an arrow X). <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention records a radiographic image by irradiation with radiation carrying a radiographic image, scans with reading light, reads a signal corresponding to the radiographic image, and erases residual charges by receiving irradiation with erasing light. The present invention relates to a radiological image detection apparatus including the radiological image detection apparatus.

  2. Description of the Related Art Conventionally, in the medical field and the like, various radiological image detection apparatuses that generate a charge upon irradiation of radiation that has passed through a subject and record a radiation image related to the subject by accumulating the charge have been proposed and put into practical use. For example, Patent Document 1 discloses a first electrode layer that transmits radiation, a photoconductive layer for recording that generates charges when irradiated with radiation, an insulator for latent image charges, and a latent image. A charge transport layer that acts as a conductor for transport charges having a polarity opposite to that of the charge, a read photoconductive layer that generates charges when irradiated with read light, and a transparent line that extends in a line that transmits the read light A second electrode layer in which a linear electrode (first linear electrode) and a light-shielding linear electrode (second linear electrode) extending in a linear shape that shields reading light are alternately arranged in parallel are stacked in this order. A radiological image detection apparatus has been proposed.

  In order to record a radiographic image using this radiographic image detection device, first, a negative high voltage is applied to the first electrode layer, and a positive high voltage is applied to the second electrode layer. Is irradiated. Then, radiation is applied to the recording photoconductive layer, and charge pairs are generated in the irradiated portion of the recording photoconductive layer. The positive charge of the charge pair moves toward the negatively charged first electrode layer, and is combined with the negative charge in the first electrode layer and disappears. On the other hand, the negative charge of the charge pair moves toward the positively charged second electrode layer, but as described above, the charge transport layer acts as an insulator for the negative charge. For this reason, the negative charge is accumulated in the charge storage unit that is the interface between the recording photoconductive layer and the charge transport layer, and the radiation image is recorded by the accumulation of the negative charge in the storage unit.

Moreover, when reading the recorded radiographic image from a radiographic image detection apparatus, reading light is irradiated from the 2nd electrode layer side. The irradiated reading light is applied to the reading photoconductive layer, and charge pairs are generated in the reading photoconductive layer. The positive charge of the charge pair is combined with the negative charge stored in the power storage unit, and the negative charge is combined with the positive charge charged on the transparent linear electrode. Due to this combination of charges, a current is detected by a current detection amplifier connected to the transparent linear electrode, and the current is converted into a voltage and output as an image signal. Then, the charge remaining in the charge storage portion is erased by irradiation with erasing light.
JP 2000-284056 A

  Here, the charge accumulated in the charge storage unit cannot be completely removed by reading the signal charge and irradiating the erasing light, and a part of the charge is between the first linear electrode and the second linear electrode. In particular, it tends to occur when a large dose of radiation is applied to the recording photoconductive layer. This residual charge can be reduced as the gap between the first linear electrode and the second linear electrode is narrowed. However, when the gap between the first linear electrode and the second linear electrode is narrowed, the first linear electrode and the second linear electrode may be electrically short-circuited. There is a problem that the residual charge cannot be reduced.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a radiological image detection apparatus and a method for manufacturing the same, which can reduce the amount of charge remaining between the first linear electrode and the second linear electrode. It is what.

  The radiation image detection apparatus of the present invention includes a charge storage unit that accumulates charges generated by irradiation of electromagnetic waves carrying radiation image information as a radiation image, a reading photoconductive layer that generates charge pairs by irradiation of reading light, A plurality of first linear electrodes arranged in a stripe shape for reading a radiographic image accumulated in the charge storage unit as signal charges when the reading photoconductive layer is irradiated with reading light, and a plurality of first linear electrodes A plurality of second linear electrodes arranged in stripes in the same direction as the arrangement direction of the first linear electrodes, and the first linear electrode and the second linear electrode are different in height. It is formed in the vertical position, and when viewed from the height direction, it is alternately provided continuously without a gap.

  The manufacturing method of the radiation image detection apparatus of the present invention includes a charge storage unit that accumulates charges generated by irradiation of electromagnetic waves carrying radiation image information as a radiation image, and a reading photoconductive device that generates charge pairs by irradiation of reading light. A plurality of first linear electrodes arranged in a stripe shape and reading a radiation image stored in the charge storage portion as a signal charge when the reading photoconductive layer is irradiated with reading light; and a first line A method of manufacturing a radiological image detection apparatus having a plurality of second linear electrodes arranged in stripes in the same direction as the arrangement direction of the first linear electrodes between the linear electrodes, A plurality of partition walls having a predetermined height for forming the one linear electrode and the second linear electrode at different height positions are formed in stripes, and a conductive film is formed on the surface of the substrate on which the partition layer is formed. On the partition wall layer A plurality of first linear electrodes and a plurality of second linear electrodes are formed between the partition walls, and the reading photoconductivity is formed on the formed first linear electrodes and the plurality of second linear electrodes. It is characterized by laminating layers.

  Here, the “height direction” refers to a stacking direction of the reading photoconductive layer, the first linear electrode, and the second linear electrode.

  Further, the first linear electrode and the second linear electrode may be formed at different height positions, but are preferably formed at a height position separated by about 5 μm or more.

  Further, if the first linear electrode and the second linear electrode are formed at different height positions, the height positions of the first linear electrode and the second linear electrode are read regardless of the structure. The first linear electrode may have a different structure in the photoconductive layer, and has a predetermined height for forming the first linear electrode or the second linear electrode at different height positions. Or you may have a structure further provided with the some partition layer provided on the 2nd linear electrode. In addition, the partition layer may be provided on the first linear electrode or may be provided on the second linear electrode.

  The shape of the partition layer is not limited, but is formed so as to taper from the first linear electrode or the second linear electrode formed on the partition layer toward the opposite side in the height direction. It is preferable that

  Further, a reading light shielding film that shields the reading light may be formed in a region on the second linear electrode. The reading light shielding film may further transmit erasing light. As long as the reading light shielding film is provided in a region on the second linear electrode, it may be laminated directly on the second linear electrode, or may be laminated via a planarizing layer or the like. .

  The second linear electrode may be an electrode for adjusting the electric field distribution of the recording photoconductive layer by applying a bias potential during recording. Also in that case, it is preferable that a reading light shielding film is formed.

  According to the radiological image detection apparatus of the present invention, a charge accumulating unit that accumulates charges generated by irradiation of electromagnetic waves carrying radiographic image information as a radiographic image, and a photoconductive layer for reading that generates charge pairs by irradiation of reading light A plurality of first linear electrodes arranged in a stripe shape for reading, as a signal charge, a radiographic image accumulated in the charge storage unit when the reading photoconductive layer is irradiated with reading light; and a first linear shape A plurality of second linear electrodes arranged in a stripe shape in the same direction as the arrangement direction of the first linear electrodes between the electrodes, and the first linear electrode and the second linear electrode are The first linear electrodes are formed in different height positions and are alternately provided continuously without gaps when viewed from the height direction, so that a part of the charge that has passed through the charge storage section is retained in the first linear electrode. And accumulated between the second linear electrode Preparative because there is no, it is possible to reduce the occurrence of residual image due to the residual charge, even especially when the radiation of a large dose has been irradiated, it is possible to reduce the generation of an afterimage due to residual charge.

  In addition, since the first linear electrode and the second linear electrode are formed at different heights depending on the partition layer, the first linear electrode and the second linear electrode are arranged without gaps in the width direction. Even so, it is possible to prevent an electrical short circuit.

  An electrode formed by the first linear electrode and the second linear electrode when the first linear electrode and the second linear electrode are formed at a height position separated by about 5 μm or more. Since the inter-electrode capacity can be reduced, the generation of noise due to the inter-electrode capacity can be suppressed even when the first and second linear electrodes are arranged without gaps in the width direction. .

  Further, the first linear electrode and the second linear electrode are provided on the plurality of first linear electrodes or the plurality of second linear electrodes having a predetermined height for forming the first linear electrode and the second linear electrode at different height positions. If the configuration further includes a plurality of partition walls, the first linear electrode and the second linear electrode having different height positions can be efficiently formed.

  Further, when the partition layer is formed to taper from the first linear electrode or the second linear electrode formed on the partition layer toward the opposite side in the height direction, the first line The linear electrode and the second linear electrode can be formed so as to overlap each other, and it is possible to reliably prevent the first linear electrode and the second linear electrode from being electrically short-circuited.

  In addition, when a reading light shielding film that blocks the reading light is formed in the region on the second linear electrode, no charge pair is generated in the region on the second linear electrode, and the charge storage unit stores the charge pair. Since the discharge of the signal charge from the second linear electrode can be reduced, the reading efficiency can be improved (see Patent Document 1).

  According to the method for manufacturing a radiological image detection apparatus of the present invention, a charge storage unit that accumulates charges generated by irradiation of electromagnetic waves carrying radiographic image information as a radiographic image, and a reading unit that generates charge pairs by irradiation of reading light. A plurality of first linear electrodes arranged in stripes for reading a radiographic image accumulated in the charge storage section as signal charges when reading light is irradiated to the reading photoconductive layer; A method of manufacturing a radiographic image detection apparatus having a plurality of second linear electrodes arranged in a stripe shape between one linear electrode in the same direction as the arrangement direction of the first linear electrodes, A plurality of partition walls having a predetermined height for forming the first linear electrode and the second linear electrode at different height positions are formed in stripes on the surface side of the substrate on which the partition layer is formed. By forming a conductive film, A plurality of first linear electrodes and a plurality of second linear electrodes are formed on the layer and between the partition walls, and reading is performed on the formed first linear electrodes and the plurality of second linear electrodes. The first linear electrode and the second line which are electrically insulated by the partition wall layer and have different height positions are formed by laminating the photoconductive layer for use, and forming a conductive film on the substrate on which the partition wall layer is formed. Therefore, the radiation detection apparatus can be manufactured efficiently.

  When the partition layer is formed so as to taper from the side of the first linear electrode or the second linear electrode formed on the partition layer toward the opposite side in the height direction, the first linear shape The electrode and the second linear electrode can be formed so as to overlap each other, and it is possible to reliably prevent the first linear electrode and the second linear electrode from being electrically short-circuited.

  Hereinafter, an embodiment of a radiation image detection apparatus of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a preferred embodiment of the radiological image detection apparatus of the present invention, and FIG. 2 is a sectional view taken along the line II-II of the radiological image detection apparatus shown in FIG. The radiological image detection apparatus 1 is a so-called optical readout type solid state detector that reads a radiographic image recorded by irradiating a readout light, and includes a flat plate electrode 2, a recording photoconductive layer 3, a charge transport layer 4, and a readout. A photoconductive layer 5, a first linear electrode 6, a second linear electrode 7, a reading light shielding film 8, a partition wall layer 9 and the like. The radiological image detection apparatus 1 is formed on a light-transmitting substrate (for example, a glass substrate), and the substrate is not shown in FIGS. 1 and 2.

The flat plate electrode 2 is charged with negative charges when recording radiographic image information, and is formed in a flat plate shape. The plate electrode 2 is made of a material that transmits radiation. For example, Nesa film (SnO ₂ ), ITO (Indium Tin Oxide), IDIXO (Idemitsu Indium X-metal Oxide) which is an amorphous light-transmitting oxide film; The film is formed to a thickness of 50 to 200 nm using a material such as Co., Ltd.), or is formed to a thickness of 100 nm.

  The recording photoconductive layer 3 generates charge pairs when irradiated with radiation, and is excellent in that, for example, the quantum efficiency is relatively high with respect to radiation and the dark resistance is high. It is formed by depositing a film containing Se as a main component to a thickness of about 500 μm.

The charge transport layer 4 acts as an insulator for charges of one polarity among the charges generated in the recording photoconductive layer 3 and acts as a conductor for charges of the other polarity. It has become. The charge transport layer 4, for example the difference between the mobility of the charge as a mobility of the charge charged on the plate electrode 2 and the opposite polarity during the recording of a radiation image is large (e.g., 10 ² or more, preferably 10 ³ or more For example, poly N-vinylcarbazole (PVK), N, N′-diphenyl-N, N′-bis (3-methylphenyl)-[1,1′-biphenyl] -4,4′- It is made of an organic compound such as diamine (TPD) or discotic liquid crystal, a TPD polymer (polycarbonate, polystyrene, PVK) dispersion, or a semiconductor material such as a-Se doped with 10 to 200 ppm of Cl.

  The photoconductive layer 5 for reading generates charge pairs upon irradiation with the reading light L1 or the erasing light L2. For example, a-Se, Se-Te, Se-As-Te, metal-free phthalocyanine, metal The film is formed to a thickness of about 0.1 to 1 μm using a photoconductive material mainly containing at least one of phthalocyanine, MgPc (Magnesium phtalocyanine), VoPc (phase II of Vanadyl phthalocyanine), CuPc (Cupper phtalocyanine), and the like. It is formed by.

The plurality of first linear electrodes 6 read image information recorded in the radiation image detection device 1 as signal charges when the radiation image detection device 1 is irradiated with the reading light L1, and are arranged in a stripe shape. Has been. Each first linear electrode 6 is made of a material that transmits the reading light L1, for example, Nesa film (SnO ₂ ), ITO (Indium Tin Oxide), IDIXO (Idemitsu Indium X- metal Oxide (Idemitsu Kosan Co., Ltd.) or the like formed from 50 to 200 nm thick or made of a material that transmits the reading light L1 and the erasing light L2 such as Al or Au formed to a thickness of 10 nm .

  The plurality of second linear electrodes 7 are arranged in a stripe shape between the plurality of first linear electrodes 6 and are made of a material that transmits the erasing light L2. Specifically, the plurality of second linear electrodes 7 are made of ITO, IDIXO, or the like that transmits the reading light L1 and the erasing light L2, similarly to the first linear electrodes 6. Further, the plurality of second linear electrodes 7 are grounded when irradiated with the erasing light L2, so as to discharge the remaining charges remaining in the charge storage unit 11 or the reading photoconductive layer 5. It has become. The plurality of second linear electrodes 7 are charged with a positive charge when recording radiation image information on the radiation image detection apparatus 1 and are grounded when the radiation image detection apparatus 1 is irradiated with the reading light L1. It has become.

  Each first linear electrode 6 and each second linear electrode 7 are formed at different height positions. Specifically, the first linear electrode 6 is laminated on the substrate 10 a, and the second linear electrode 7 is formed on the partition layer 9 having a predetermined height formed between the first linear electrodes 6. Are stacked. The partition wall layer 9 is photosensitive such as a mixture of an epoxy resin, an acrylic resin, a urethane resin, a polyester resin, a polyimide resin, a polyolefin resin, gelatin, a novolac resin, and a haftquinonediadisulfonate ester. Alternatively, it is made of a material that transmits the reading light L1 and the erasing light L2, such as a non-photosensitive resin material.

  The partition layer 9 has a predetermined height such that the first linear electrode 6 and the second linear electrode 7 are formed at a height position h that is 5 μm or more apart. Thereby, an increase in interelectrode capacitance formed between the first linear electrode 6 and the second linear electrode 7 can be prevented, and an increase in noise due to the interelectrode capacitance can be prevented. Further, the partition wall layer 9 is tapered from the second linear electrode 7 toward the first linear electrode 6 and is formed so that the cross section has a substantially trapezoidal shape. Thus, the first linear electrode 6 is formed up to the region on the second linear electrode 7 so that the formation region of the first linear electrode 6 and the formation region of the second linear electrode 7 overlap each other. In addition, an electrical short circuit between the first linear electrode 6 and the second linear electrode 7 can be reliably prevented.

  Furthermore, the first linear electrode 6 and the second linear electrode 7 are alternately arranged continuously without a gap as viewed from the height direction (arrow Z direction). That is, the first linear electrode 6 has a width greater than the arrangement interval of the second linear electrodes 7, and the second linear electrode 7 has a width greater than the arrangement interval of the first linear electrodes 6. Yes. Since the first linear electrode 6 and the second linear electrode 7 are formed at different height positions, the first linear electrode 6 and the second linear electrode 7 are continuously connected without gaps as viewed from the height direction (arrow Z direction) without being electrically short-circuited with each other. Are arranged.

  A reading light shielding film 8 that transmits the erasing light L2 and shields the reading light L1 is provided in a region on the second linear electrode 7. For example, when the reading light L1 is made of blue light having a wavelength of 400 nm to 480 nm and the erasing light L2 is made of red light having a wavelength of 580 nm to 700 nm, the reading light shielding film 8 is made of blue light (reading light). Is formed using a red resist that shields light and transmits red light (erasing light). Therefore, only the erasing light L2 is applied to the reading photoconductive layer 5 in the region on the reading light shielding film 8.

  FIGS. 3 to 5 are schematic diagrams showing how a radiographic image is recorded / reproduced on the radiographic image detection apparatus, and an operation example of the radiographic image detection apparatus will be described with reference to FIGS. First, as shown in FIG. 3A, a high voltage is applied between the plate electrode 2 and the plurality of first linear electrodes 6 and the plurality of second linear electrodes 7 by the high voltage source 20. In this state, radiation is emitted from the radiation source toward the subject.

  Then, the radiation that has passed through the subject is irradiated from the plate electrode 2 side, and is transmitted through the plate electrode 2 and applied to the recording photoconductive layer 3. Charge pairs are generated in the recording photoconductive layer 3 by irradiation of radiation, and as shown in FIG. 3B, the positive charges are combined with the negative charges charged on the plate electrode 2 and disappear, and the negative charges are lost. The charge is accumulated as a latent image charge in the charge storage unit 11 formed at the interface between the recording photoconductive layer 3 and the charge transport layer 4, and a radiation image is recorded.

  Next, reading of the radiographic image recorded with reference to FIG. 4 will be described. First, the plate electrode 2 and the second linear electrode 7 are grounded, and the first linear electrode 6 is electrically connected to the charge amplifier 30. In this state, the reading light L1 is irradiated to the reading photoconductive layer 5 from the first linear electrode 6 and the second linear electrode 7 side, and a charge pair is generated in the reading photoconductive layer 5. Of the charge pairs generated in the reading photoconductive layer 5, positive charges are combined with latent image charges in the charge storage unit 11, and negative charges are combined with positive charges charged in the first linear electrode 6. . Due to this coupling, a current flows through the charge amplifier 30, and this current is integrated and detected as an image signal.

  Thus, by providing the reading light shielding film 8, no charge pair is generated in the region on the second linear electrode 7, and the signal charge accumulated in the charge storage unit 11 is discharged from the second linear electrode 7. Therefore, reading efficiency can be improved. Further, since the first linear electrode 6 and the second linear electrode 7 have a step of 5 μm or more formed by the partition wall layer 9, the first linear electrode 6 and the second linear electrode 7 are arranged without a gap. However, since the interelectrode capacitance between the first linear electrode 6 and the second linear electrode 7 does not increase, the image signal detected by the charge amplifier 30 includes noise due to the interelectrode capacitance. Can be suppressed.

  After the radiographic image is read, the erasing light L2 is used to erase the residual charge remaining at the interface between the charge storage unit 11 and the photoconductive layer 5 for reading and the second linear electrode 7 of the radiographic image detection apparatus 1. The reading photoconductive layer 5 is irradiated from the first and second linear electrodes 6 and 7 side. At this time, the second linear electrode 7 is in a grounded state. Then, a charge pair is generated in the reading photoconductive layer 5, and a positive charge of the charge pair is combined with a residual charge and disappears, and a negative charge is a positive charge charged on the second linear electrode 7. Bonding will result in the residual charge disappearing.

  Here, since the first linear electrode 6 and the second linear electrode 7 are alternately arranged continuously without a gap, the recording photoconductive layer 3, the reading photoconductive layer 5, and the charge storage unit 11 are arranged. It is possible to reliably remove the charge remaining in the film and prevent the occurrence of an afterimage due to the residual charge. That is, when there is a gap between the first linear electrode 6 and the second linear electrode 7, the charge of the charge storage unit 11 in the region above the gap is read by the above-described reading of the signal charge and erasing of the residual charge. Is an area that is difficult to be discharged and remains. For this reason, even when the next radiographic image is recorded, it may remain and may appear as an afterimage.

  On the other hand, when there is no gap between the first linear electrode 6 and the second linear electrode 7, it is possible to prevent a region where charges are likely to remain in the charge storage unit 11 due to reading and erasing of signal charges. Therefore, the generation of residual charges can be reduced and the generation of afterimages can be suppressed. In particular, even when a large dose of radiation is irradiated, the generation of residual charges can be reliably reduced and the generation of afterimages can be suppressed.

  Further, even when the first linear electrode 6 and the second linear electrode 7 are arranged without a gap, the first linear electrode 6 and the second linear electrode 7 are formed at different height positions. Therefore, it is possible to prevent the first linear electrode 6 and the second linear electrode 7 from being electrically short-circuited. In particular, since the partition wall layer 9 is formed so as to taper from the second linear electrode 7 toward the first linear electrode 6, the first linear electrode 6 is formed in a region on the second linear electrode 7. The first linear electrode 6 and the second linear electrode 7 can be overlapped with each other, and the first linear electrode 6 and the second linear electrode 7 can be overlapped with each other. An electrical short circuit can be reliably prevented.

  FIG. 6 is a process diagram showing a preferred embodiment of a method for manufacturing a radiographic image detection apparatus according to the present invention. The method for manufacturing a radiographic image detection apparatus will be described with reference to FIGS. First, as shown in FIG. 6A, a red resist to be the reading light shielding film 8 is applied on a substrate 10a made of glass or the like. Thereafter, the red resist is patterned by exposure so as to form a stripe pattern on the formation region of the second linear electrode 7, and the reading light shielding film 8 is formed.

Next, as shown in FIG. 6B, a partition layer 9 is laminated on the reading light shielding film 8 by photolithography. Here, the partition wall layer 9 is formed to be tapered from the second linear electrode 7 side toward the first linear electrode 6 side by anisotropic etching or the like. Thus, the first linear electrode 6 is formed up to the region on the second linear electrode 7 so that the formation region of the first linear electrode 6 and the formation region of the second linear electrode 7 overlap each other. You can also. Thereafter, as shown in FIG. 6C, a conductive film is formed on the surface of the substrate 10a on which the partition layers 9 are stacked, whereby a plurality of first lines arranged in a stripe pattern on the substrate 10a. The electrode 6 is stacked, and a plurality of second linear electrodes 7 arranged in a stripe shape are stacked on the partition wall layer 9. At this time, since the partition wall layer 9 is tapered, even if the first linear electrode 6 and the second linear electrode 7 are formed simultaneously, the first linear electrode 6 and the second linear electrode are formed. An electrical short circuit with the electrode 7 can be reliably prevented. And, the reading photoconductive layer 5, the charge transport layer 4, and the recording photoconductive layer are formed on the first linear electrode 6 and the second linear electrode 7. 3. The radiographic image detection apparatus 1 is produced by sequentially laminating the plate electrodes 2 (see FIGS. 1 and 2).

  According to the above embodiment, the first linear electrode 6 and the second linear electrode 7 are formed at different height positions, and are alternately provided continuously without a gap when viewed from the height direction. As a result, the charge generated in the recording photoconductive layer 3 is not accumulated between the first linear electrode 6 and the second linear electrode 7, thereby reducing the occurrence of an afterimage due to the residual charge. can do.

  As shown in FIGS. 1 and 2, the first linear electrode 6 and the second linear electrode 7 are formed at different height positions by the partition wall layer 9. Even when the two-wire electrodes 7 are arranged without gaps in the width direction, it is possible to prevent an electrical short circuit.

  In addition, when the 1st linear electrode 6 and the 2nd linear electrode 7 are what is formed in the height position which separated about 5 micrometers or more, by the 1st linear electrode 6 and the 2nd linear electrode 7, Since the capacitance between the electrodes formed can be reduced, even if the first linear electrode 6 and the second linear electrode 7 are arranged without gaps in the width direction, noise due to the capacitance between the electrodes is generated. Can be suppressed.

  Further, the plurality of first linear electrodes 6 or the plurality of second linear electrodes 6 having a predetermined height for forming the plurality of first linear electrodes 6 and the plurality of second linear electrodes 7 at different height positions. If it is the structure further provided with the some partition wall layer 9 provided on the linear electrode 7, the 1st linear electrode 6 and the 2nd linear electrode 7 from which a height position differs can be formed efficiently. it can.

  Further, when the partition layer 9 is formed so as to taper from the second linear electrode 7 toward the first linear electrode 6, the first linear electrode 6 and the second linear electrode 7 overlap each other. The first linear electrode 6 and the second linear electrode 7 can be reliably prevented from being electrically short-circuited.

  Further, when the reading light shielding film 8 that transmits the erasing light L2 and shields the reading light L1 is formed in the region on the second linear electrode 7, a charge pair is generated in the region on the second linear electrode 7. In addition, since it is possible to reduce the discharge of the signal charge accumulated in the charge storage unit from the second linear electrode 7, it is possible to improve the reading efficiency.

  Furthermore, according to the manufacturing method of the radiological image detection apparatus in FIG. 6, a plurality of predetermined heights for forming the first linear electrode 6 and the second linear electrode 7 on the substrate 10a at different height positions. Are formed in a stripe shape, and a conductive film is formed on the surface of the substrate on which the partition layer 9 is formed, whereby a plurality of first linear electrodes are formed on the partition layer 9 and between the partition layers 9. 6 and a plurality of second linear electrodes 7, and a reading photoconductive layer is laminated on the plurality of first linear electrodes 6 and the plurality of second linear electrodes 7, thereby forming the first Even when the linear electrode 6 and the second linear electrode 7 are formed in different layers, the first linear electrode 6 and the second linear electrode 7 can be formed simultaneously, which is efficient. A radiation detection apparatus can be manufactured.

  The embodiment of the present invention is not limited to the above embodiment. For example, FIG. 6 illustrates the case where a conductive film is formed on the substrate 10a after the partition wall layer 9 is stacked. As shown in FIG. 7A, the first linear electrode 6 of the substrate 10a Alternatively, a base film made of a conductive material may be stacked in advance in a region, and then a partition layer 9 may be stacked to stack a conductive film. Thereby, the disconnection failure of the 1st linear electrode 6 can be suppressed. 7B to 7D are the same steps as FIGS. 6B to 6D, description thereof is omitted.

  Moreover, in FIG. 2, although illustrated about the case where the 1st linear electrode 6 and the 2nd linear electrode 7 are arranged without a gap, the 1st linear electrode 6 and the 2nd linear electrode 7 are , May be formed to overlap each other.

  Further, FIG. 2 illustrates the case where the first linear electrode 6 is laminated on the substrate 10a and the second linear electrode 7 is laminated on the partition wall layer 9, but FIG. ), The first linear electrode 6 may be stacked on the partition wall layer 9, and the second linear electrode 7 may be stacked on the substrate 10a.

  Further, in the radiological image detection apparatus 1 of FIGS. 1 to 5, the case where the first linear electrode 6 and the second linear electrode 7 are formed at different height positions using the partition wall layer 9 is illustrated. However, as shown in FIG. 8B, the first linear electrode 6 and the second linear electrode are formed by embedding the second linear electrode 7 in the reading photoconductive layer 5 without using the partition layer 9. 7 may be formed at a different height position.

  In addition, for example, the present invention is applied to a so-called direct conversion type radiation oblique line image detector that records radiation images by receiving radiation irradiation and directly converting the radiation into electric charges. For example, the present invention may be applied to a so-called indirect-conversion-type radiation image detection apparatus that records radiation images by once converting radiation into visible light and converting the visible light into electric charges. Good.

1 is a schematic configuration diagram showing an embodiment of a radiological image detection apparatus of the present invention. II-II sectional view of the radiation image detection apparatus shown in FIG. The schematic diagram which shows a mode that a radiographic image is recorded on the radiographic image detection apparatus shown in FIG. The schematic diagram which shows a mode that a radiographic image is read from the radiographic image detection apparatus shown in FIG. The schematic diagram which shows a mode that the residual charge of the radiographic image detection apparatus shown in FIG. 1 is erase | eliminated. Process drawing which shows preferable embodiment of the manufacturing method of the radiographic image detection apparatus of this invention The schematic block diagram which shows another embodiment of the manufacturing method of the radiographic image detection apparatus of this invention. The schematic block diagram which shows another embodiment of the radiographic image detection apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Radiation image detection apparatus 2 Flat plate electrode 3 Photoconductive layer for recording 4 Charge transport layer 5 Photoconductive layer for reading 6 First linear electrode 7 Second linear electrode 8 Reading light shielding film 9 Partition layer 10a Substrate 10 Flattening layer 11 Charge storage unit L1 Reading light L2 Erase light

Claims (7)

A charge storage unit that stores, as a radiation image, charges generated by irradiation of electromagnetic waves carrying radiation image information;
A photoconductive layer for reading that generates a charge pair by irradiation of reading light;
A plurality of first linear electrodes arranged in a stripe shape for reading, as signal charges, the radiation image accumulated in the charge storage unit when the reading photoconductive layer is irradiated with the reading light;
A plurality of second linear electrodes arranged in a stripe shape in the same direction as the arrangement direction of the first linear electrodes between the first linear electrodes;
The first linear electrode and the second linear electrode are formed at different height positions, and are alternately provided continuously with no gap when viewed from the height direction. Radiation image detection device.   The radiographic image detection apparatus according to claim 1, wherein the first linear electrode and the second linear electrode are formed at a height position separated by approximately 5 μm or more.   The apparatus further comprises a plurality of partition layers provided on the first linear electrode or the second linear electrode, wherein the first linear electrode and the second linear electrode are formed at different height positions. The radiographic image detection apparatus according to claim 1 or 2.   The partition layer is formed so as to taper from the side of the first linear electrode or the second linear electrode formed on the partition layer toward the opposite side in the height direction. The radiographic image detection apparatus according to claim 3, wherein   5. The radiographic image detection apparatus according to claim 1, wherein a reading light shielding film that shields the reading light is formed in a region on the second linear electrode. 6. A charge accumulator that accumulates as a radiation image charges generated by irradiation of electromagnetic waves carrying radiation image information, a reading photoconductive layer that generates charge pairs by irradiation of reading light, and the reading on the reading photoconductive layer A plurality of first linear electrodes arranged in stripes that read the radiographic image accumulated in the charge storage unit as signal charges when irradiated with light, and the first linear electrodes between the first linear electrodes. A method of manufacturing a radiological image detection apparatus having a plurality of second linear electrodes arranged in a stripe shape in the same direction as the arrangement direction of one linear electrode,
A plurality of partition walls having a predetermined height for forming the first linear electrode and the second linear electrode at different height positions on the substrate are formed in stripes,
The plurality of first linear electrodes and the plurality of second linear electrodes are formed on the partition layer and between the partition layers by forming a conductive film on the surface of the substrate on which the partition layer is formed. And form the
A method for manufacturing a radiation image detection apparatus, comprising: laminating the reading photoconductive layer on the plurality of formed first linear electrodes and the second linear electrodes.   The partition layer is formed to taper from the side of the first linear electrode or the second linear electrode formed on the partition layer toward the opposite side in the height direction. The manufacturing method of the radiographic image detection apparatus of Claim 6.

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