JP2008048315A5 - - Google Patents
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- Publication number
- JP2008048315A5 JP2008048315A5 JP2006223928A JP2006223928A JP2008048315A5 JP 2008048315 A5 JP2008048315 A5 JP 2008048315A5 JP 2006223928 A JP2006223928 A JP 2006223928A JP 2006223928 A JP2006223928 A JP 2006223928A JP 2008048315 A5 JP2008048315 A5 JP 2008048315A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- piezoelectric thin
- piezoelectric
- manufacturing
- vibrating piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 16
- 238000004519 manufacturing process Methods 0.000 claims 7
- 239000000463 material Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000001552 radio frequency sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223928A JP4978114B2 (ja) | 2006-08-21 | 2006-08-21 | 圧電振動片の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223928A JP4978114B2 (ja) | 2006-08-21 | 2006-08-21 | 圧電振動片の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008048315A JP2008048315A (ja) | 2008-02-28 |
| JP2008048315A5 true JP2008048315A5 (https=) | 2009-09-17 |
| JP4978114B2 JP4978114B2 (ja) | 2012-07-18 |
Family
ID=39181588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006223928A Expired - Fee Related JP4978114B2 (ja) | 2006-08-21 | 2006-08-21 | 圧電振動片の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4978114B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5429385B2 (ja) | 2010-08-12 | 2014-02-26 | 株式会社村田製作所 | 圧電薄膜素子の製造方法、圧電薄膜素子及び圧電薄膜素子用部材 |
| CN103531706B (zh) * | 2013-10-22 | 2016-05-25 | 深圳市豪恩声学股份有限公司 | 压电驻极体材料及其制备方法 |
| US20160352307A1 (en) * | 2015-05-27 | 2016-12-01 | Murata Manufacturing Co., Ltd. | Mems resonator with high quality factor |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3576788B2 (ja) * | 1998-02-13 | 2004-10-13 | 株式会社東芝 | 電子部品及びその製造方法 |
| JP3127245B1 (ja) * | 1999-09-03 | 2001-01-22 | 工業技術院長 | 多層型電子材料、その製造方法、それを用いたセンサー及び記憶デバイス |
| JP4122430B2 (ja) * | 2003-03-26 | 2008-07-23 | 独立行政法人産業技術総合研究所 | 強誘電体膜 |
-
2006
- 2006-08-21 JP JP2006223928A patent/JP4978114B2/ja not_active Expired - Fee Related
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