JP2008046512A5 - - Google Patents
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- JP2008046512A5 JP2008046512A5 JP2006223659A JP2006223659A JP2008046512A5 JP 2008046512 A5 JP2008046512 A5 JP 2008046512A5 JP 2006223659 A JP2006223659 A JP 2006223659A JP 2006223659 A JP2006223659 A JP 2006223659A JP 2008046512 A5 JP2008046512 A5 JP 2008046512A5
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- JP
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- Prior art keywords
- resin
- silicon
- mass
- main material
- elastic
- Prior art date
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- 239000011347 resin Substances 0.000 claims 55
- 229920005989 resin Polymers 0.000 claims 55
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 35
- 239000000463 material Substances 0.000 claims 30
- 229910052710 silicon Inorganic materials 0.000 claims 21
- 239000010703 silicon Substances 0.000 claims 21
- 230000003321 amplification Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims 3
- 230000003287 optical Effects 0.000 claims 3
- 238000001579 optical reflectometry Methods 0.000 claims 3
Claims (4)
前記質量部は、樹脂材料を主材料として構成された板状の第１の樹脂部と、シリコンを主材料として構成された板状の第１のシリコン部とが積層した積層構造をなし、
各前記弾性部は、前記第１の樹脂部の主材料である前記樹脂材料と同一の樹脂材料を主材料として構成された第２の樹脂部と、前記第２の樹脂部に接合され、シリコンを主材料として構成された第２のシリコン部とで構成され、
前記支持部は、前記第１の樹脂部の主材料である前記樹脂材料と同一の樹脂材料を主材料として構成された第３の樹脂部と、前記第３の樹脂部に接合され、シリコンを主材料として構成された第３のシリコン部とで構成され、
前記第１の樹脂部、前記第２の樹脂部および前記第３の樹脂部が一体的に形成されているとともに、前記第１のシリコン部、前記第２のシリコン部および前記第３のシリコン部が一体的に形成されており、
前記駆動手段は、前記第１の樹脂部の前記シリコン部と反対側の面に設けられたコイルと、
前記コイルに交流電圧を印加する交流電源と、
前記質量部を介して前記質量部の回動中心軸に直交する方向に対向配置されるとともに、対向する面側が互いに異なる磁極となるよう設けられた一対の永久磁石とを有し、
前記交流電源から前記コイルへ前記交流電圧を印加することにより、前記質量部を前記支持部に対して回動させるように構成され、
前記挙動検知手段は、前記弾性部に設けられたピエゾ抵抗素子と、
前記第１のシリコン部の前記第１の樹脂部側の面に形成され、前記ピエゾ抵抗素子と電気的に接続された増幅回路とを有し、
前記弾性部の捩れ変形の程度に応じて変化する前記ピエゾ抵抗素子を流れる電気信号を、前記増幅回路で増幅し、増幅後の信号に基づいて前記質量部の挙動を検知するよう構成されていることを特徴とするアクチュエータ。 A plate-shaped mass part, a support part for supporting the mass part, and the mass part and the support part are connected so as to be rotatable with respect to the support part, and a longitudinal shape is formed. And a pair of elastically deformable elastic parts, a drive means for rotationally driving the mass part, and a behavior detection means for detecting the behavior of the mass part, and by operating the drive means An actuator configured to rotate the mass portion while twisting and deforming the elastic portion,
The mass portion has a laminated structure in which a plate-shaped first resin portion configured with a resin material as a main material and a plate-shaped first silicon portion configured with silicon as a main material are laminated,
Each of the elastic portions is bonded to the second resin portion, a second resin portion composed mainly of the same resin material as the resin material that is the main material of the first resin portion, and silicon. And a second silicon portion composed of a main material,
The support portion is bonded to the third resin portion, a third resin portion composed of the same resin material as the main material of the first resin portion, and the silicon resin. Consists of a third silicon part configured as the main material,
The first resin part, the second resin part, and the third resin part are integrally formed, and the first silicon part, the second silicon part, and the third silicon part Is integrally formed,
The driving means includes a coil provided on a surface of the first resin portion opposite to the silicon portion,
An AC power source for applying an AC voltage to the coil;
A pair of permanent magnets disposed so as to be opposed to each other in a direction orthogonal to the rotation center axis of the mass unit via the mass unit, and the opposed surface sides are different magnetic poles,
By applying the AC voltage from the AC power source to the coil, the mass portion is configured to rotate with respect to the support portion,
The behavior detecting means includes a piezoresistive element provided in the elastic part,
An amplification circuit formed on a surface of the first resin portion side of the first silicon portion and electrically connected to the piezoresistive element;
An electric signal flowing through the piezoresistive element that changes according to the degree of torsional deformation of the elastic part is amplified by the amplifier circuit, and the behavior of the mass part is detected based on the amplified signal. actuator, characterized in that.
前記質量部は、樹脂材料を主材料として構成された板状の第１の樹脂部と、前記第１の樹脂部の一方の面に設けられ、シリコンを主材料として構成された板状の第１のシリコン部と、前記第１のシリコン部の前記第１の樹脂部と反対の面に設けられた前記光反射部とを有し、 The mass part is provided on one surface of the plate-like first resin part made of a resin material as a main material and the first resin part, and a plate-like first part made of silicon as a main material. 1 silicon portion, and the light reflecting portion provided on the surface of the first silicon portion opposite to the first resin portion,
各前記弾性部は、前記第１の樹脂部の主材料である前記樹脂材料と同一の樹脂材料を主材料として構成された第２の樹脂部と、前記第２の樹脂部に接合され、シリコンを主材料として構成された第２のシリコン部とで構成され、 Each of the elastic portions is bonded to the second resin portion, a second resin portion composed mainly of the same resin material as the resin material that is the main material of the first resin portion, and silicon. And a second silicon part configured as a main material,
前記支持部は、前記第１の樹脂部の主材料である前記樹脂材料と同一の樹脂材料を主材料として構成された第３の樹脂部と、前記第３の樹脂部に接合され、シリコンを主材料として構成された第３のシリコン部とで構成され、 The support portion is bonded to the third resin portion, a third resin portion composed of the same resin material as the main material of the first resin portion, and the silicon resin. Consists of a third silicon part configured as the main material,
前記第１の樹脂部、前記第２の樹脂部および前記第３の樹脂部が一体的に形成されているとともに、前記第１のシリコン部、前記第２のシリコン部および前記第３のシリコン部が一体的に形成されており、 The first resin part, the second resin part, and the third resin part are integrally formed, and the first silicon part, the second silicon part, and the third silicon part Is integrally formed,
前記駆動手段は、前記第１の樹脂部の前記第１のシリコン部と反対側の面に設けられたコイルと、 The driving means includes a coil provided on a surface of the first resin portion opposite to the first silicon portion;
前記コイルに交流電圧を印加する交流電源と、 An AC power source for applying an AC voltage to the coil;
前記質量部を介して前記質量部の回動中心軸に直交する方向に対向配置されるとともに、対向する面側が互いに異なる磁極となるよう設けられた一対の永久磁石とを有し、 A pair of permanent magnets disposed so as to be opposed to each other in a direction orthogonal to the rotation center axis of the mass unit via the mass unit, and the opposed surface sides are different magnetic poles,
前記交流電源から前記コイルへ前記交流電圧を印加することにより、前記質量部を前記支持部に対して回動させるように構成され、 By applying the AC voltage from the AC power source to the coil, the mass portion is configured to rotate with respect to the support portion,
前記挙動検知手段は、前記弾性部に設けられたピエゾ抵抗素子と、 The behavior detecting means includes a piezoresistive element provided in the elastic part,
前記第１のシリコン部の前記第１の樹脂部側の面に形成され、前記ピエゾ抵抗素子と電気的に接続された増幅回路とを有し、 An amplification circuit formed on a surface of the first resin portion side of the first silicon portion and electrically connected to the piezoresistive element;
前記弾性部の捩れ変形の程度に応じて変化する前記ピエゾ抵抗素子を流れる電気信号を、前記増幅回路で増幅し、増幅後の信号に基づいて前記質量部の挙動を検知するよう構成されていることを特徴とする光スキャナ。 An electric signal flowing through the piezoresistive element that changes in accordance with the degree of torsional deformation of the elastic part is amplified by the amplifier circuit, and the behavior of the mass part is detected based on the amplified signal. An optical scanner characterized by that.
前記質量部は、樹脂材料を主材料として構成された板状の第１の樹脂部と、前記第１の樹脂部の一方の面に設けられ、シリコンを主材料として構成された板状の第１のシリコン部と、前記第１のシリコン部の前記第１の樹脂部と反対の面に設けられた前記光反射部とを有し、 The mass part is provided on one surface of the plate-like first resin part made of a resin material as a main material and the first resin part, and a plate-like first part made of silicon as a main material. 1 silicon portion, and the light reflecting portion provided on the surface of the first silicon portion opposite to the first resin portion,
各前記弾性部は、前記第１の樹脂部の主材料である前記樹脂材料と同一の樹脂材料を主材料として構成された第２の樹脂部と、前記第２の樹脂部に接合され、シリコンを主材料として構成された第２のシリコン部とで構成され、 Each of the elastic portions is bonded to the second resin portion, a second resin portion composed mainly of the same resin material as the resin material that is the main material of the first resin portion, and silicon. And a second silicon part configured as a main material,
前記支持部は、前記第１の樹脂部の主材料である前記樹脂材料と同一の樹脂材料を主材料として構成された第３の樹脂部と、前記第３の樹脂部に接合され、シリコンを主材料として構成された第３のシリコン部とで構成され、 The support portion is bonded to the third resin portion, a third resin portion composed of the same resin material as the main material of the first resin portion, and the silicon resin. Consists of a third silicon part configured as the main material,
前記第１の樹脂部、前記第２の樹脂部および前記第３の樹脂部が一体的に形成されているとともに、前記第１のシリコン部、前記第２のシリコン部および前記第３のシリコン部が一体的に形成されており、 The first resin part, the second resin part, and the third resin part are integrally formed, and the first silicon part, the second silicon part, and the third silicon part Is integrally formed,
前記駆動手段は、前記第１の樹脂部の前記第１のシリコン部と反対側の面に設けられたコイルと、 The driving means includes a coil provided on a surface of the first resin portion opposite to the first silicon portion;
前記コイルに交流電圧を印加する交流電源と、 An AC power source for applying an AC voltage to the coil;
前記質量部を介して前記質量部の回動中心軸に直交する方向に対向配置されるとともに、対向する面側が互いに異なる磁極となるよう設けられた一対の永久磁石とを有し、 A pair of permanent magnets disposed so as to be opposed to each other in a direction orthogonal to the rotation center axis of the mass unit via the mass unit, and the opposed surface sides are different magnetic poles,
前記交流電源から前記コイルへ前記交流電圧を印加することにより、前記質量部を前記支持部に対して回動させるように構成され、 By applying the AC voltage from the AC power source to the coil, the mass portion is configured to rotate with respect to the support portion,
前記挙動検知手段は、前記弾性部に設けられたピエゾ抵抗素子と、 The behavior detecting means includes a piezoresistive element provided in the elastic part,
前記第１のシリコン部の前記第１の樹脂部側の面に形成され、前記ピエゾ抵抗素子と電気的に接続された増幅回路とを有し、 An amplification circuit formed on a surface of the first resin portion side of the first silicon portion and electrically connected to the piezoresistive element;
前記弾性部の捩れ変形の程度に応じて変化する前記ピエゾ抵抗素子を流れる電気信号を、前記増幅回路で増幅し、増幅後の信号に基づいて前記質量部の挙動を検知するよう構成されていることを特徴とする画像形成装置。 An electric signal flowing through the piezoresistive element that changes in accordance with the degree of torsional deformation of the elastic part is amplified by the amplifier circuit, and the behavior of the mass part is detected based on the amplified signal. An image forming apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223659A JP4882595B2 (en) | 2006-08-18 | 2006-08-18 | Optical scanner and image forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223659A JP4882595B2 (en) | 2006-08-18 | 2006-08-18 | Optical scanner and image forming apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008046512A JP2008046512A (en) | 2008-02-28 |
| JP2008046512A5 true JP2008046512A5 (en) | 2009-08-20 |
| JP4882595B2 JP4882595B2 (en) | 2012-02-22 |
Family
ID=39180288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006223659A Expired - Fee Related JP4882595B2 (en) | 2006-08-18 | 2006-08-18 | Optical scanner and image forming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4882595B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6507550B2 (en) * | 2014-09-30 | 2019-05-08 | セイコーエプソン株式会社 | Optical device, image display device and projector |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000081589A (en) * | 1998-07-09 | 2000-03-21 | Olympus Optical Co Ltd | Light deflector |
| JP2000330067A (en) * | 1999-05-20 | 2000-11-30 | Olympus Optical Co Ltd | Torsional oscillation body |
| JP2001235702A (en) * | 2000-02-22 | 2001-08-31 | Olympus Optical Co Ltd | Actuator |
| JP2005326465A (en) * | 2004-05-12 | 2005-11-24 | Canon Inc | Optical deflector |
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2006
- 2006-08-18 JP JP2006223659A patent/JP4882595B2/en not_active Expired - Fee Related
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