JP2008040475A - 波長変換レーザー装置 - Google Patents
波長変換レーザー装置 Download PDFInfo
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- JP2008040475A JP2008040475A JP2007155080A JP2007155080A JP2008040475A JP 2008040475 A JP2008040475 A JP 2008040475A JP 2007155080 A JP2007155080 A JP 2007155080A JP 2007155080 A JP2007155080 A JP 2007155080A JP 2008040475 A JP2008040475 A JP 2008040475A
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 38
- 239000013078 crystal Substances 0.000 claims abstract description 85
- 230000003287 optical effect Effects 0.000 claims abstract description 81
- 230000008859 change Effects 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims description 15
- 238000012544 monitoring process Methods 0.000 claims description 7
- 230000003595 spectral effect Effects 0.000 claims description 7
- 238000002310 reflectometry Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
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- 230000004048 modification Effects 0.000 description 2
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- 238000006467 substitution reaction Methods 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3544—Particular phase matching techniques
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2/00—Demodulating light; Transferring the modulation of modulated light; Frequency-changing of light
- G02F2/02—Frequency-changing of light, e.g. by quantum counters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0092—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3544—Particular phase matching techniques
- G02F1/3546—Active phase matching, e.g. by electro- or thermo-optic tuning
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/06837—Stabilising otherwise than by an applied electric field or current, e.g. by controlling the temperature
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
【解決手段】波長変換レーザー装置は、第1波長光を放出するレーザー光源11と、第1波長光を第2波長光に変換させて出力する非線形光学結晶15と、この結晶をこれに対する第1波長光の入射角が変わるように回転させる回転駆動部と、第2波長光の出力の一部を検出し、その変化に応じて上記光学結晶の回転制御信号を生成して上記回転駆動部へ転送する回転駆動制御部17と、上記光学結晶から出力された第2波長光が上記光学結晶を通じて上記レーザー光源から上記光学結晶へ進行された第1波長光の経路とほぼ同一の経路に沿って回帰するように上記第2波長光を反射させるビーム位置保持用ミラー19と、上記レーザー光源と上記光学結晶との間に配置され上記回帰した第2波長光を所望の出力方向へ進行させる出力用ビーム分配器14とを含む。
【選択図】 図2
Description
11a、11b 第1及び第2ミラー層
14 出力用ビーム分配器
15 非線形光学結晶
16 非線形光学結晶用回転部
17 回転駆動制御部
17a モニタ用ビーム分配器
17b 光出力モニタ
17c 駆動制御部
19 ビーム位置保持用ミラー
Claims (7)
- 第1波長光を放出するレーザー光源と、
前記第1波長光を第2波長光に変換させて出力する非線形光学結晶と、
前記非線形光学結晶に対する第1波長光の入射角が変わるように前記非線形光学結晶を回転させる回転駆動部と、
前記第2波長光の出力の一部を検出し、その出力の変化に応じて前記非線形光学結晶の回転制御信号を生成して前記回転駆動部へ転送する回転駆動制御部と、
前記非線形光学結晶から出力された第2波長光が前記非線形光学結晶を通じて前記レーザー光源から前記非線形光学結晶へ進行された第1波長光の経路とほぼ同一の経路に沿って回帰するように前記第2波長光を反射させるビーム位置保持用ミラーと、
前記レーザー光源と前記非線形光学結晶との間に配置され前記回帰した第2波長光を所望の出力方向へ進行させる出力用ビーム分配器と
を含む波長変換レーザー装置。 - 前記非線形光学結晶用回転駆動制御部は、
前記非線形光学結晶の第2波長光の出力変化に応じて前記第1波長光との位相整合を成すように前記非線形光学結晶回転部を駆動させる電子制御部と、
前記非線形光学結晶から出力された光の一部をサンプリングして前記電子制御部に提供するモニタ用ビーム分配器と
を含むことを特徴とする請求項1に記載の波長変換レーザー装置。 - 前記電子制御部は、
前記第2波長光の出力変化を検出する出力モニタ部と、
前記検出された第2波長光の出力変化に基づいて前記第1波長光との位相整合のための前記非線形光学結晶の入射角の変化量に相応する回転制御信号を生成して前記非線形光学結晶用回転部へ転送する駆動制御部と
を含むことを特徴とする請求項2に記載の波長変換レーザー装置。 - 前記モニタ用ビーム分配器は、前記出力用ビーム分配器により提供される出力経路上に配置されたことを特徴とする請求項2に記載の波長変換レーザー装置。
- 前記非線形光学結晶用回転駆動制御部は、
前記電子制御部と前記モニタ用ビーム分配器との間に配置され前記第2波長光を選択的に分離して前記電子制御部に提供する分光フィルタをさらに含むことを特徴とする請求項2に記載の波長変換レーザー装置。 - 前記出力用ビーム分配器は、前記第2波長光のみ選択的に分離して前記所望の出力経路へ進行させることを特徴とする請求項1に記載の波長変換レーザー装置。
- 前記ビーム位置保持用ミラーは、前記第1波長光に対して高反射性を有し、
前記出力用ビーム分配器は前記第1波長光に対して無反射性を有し、
これによって、前記レーザー光源側に配置されたミラーと共に第1波長光に対する外部共振構造を提供することを特徴とする請求項1に記載の波長変換レーザー装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR1020060075406A KR100723148B1 (ko) | 2006-08-09 | 2006-08-09 | 파장변환 레이저 장치 |
KR10-2006-0075406 | 2006-08-09 |
Publications (2)
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JP2008040475A true JP2008040475A (ja) | 2008-02-21 |
JP4879826B2 JP4879826B2 (ja) | 2012-02-22 |
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JP2007155080A Active JP4879826B2 (ja) | 2006-08-09 | 2007-06-12 | 波長変換レーザー装置 |
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US (1) | US7443892B2 (ja) |
JP (1) | JP4879826B2 (ja) |
KR (1) | KR100723148B1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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ITMI20081448A1 (it) * | 2008-08-01 | 2010-02-02 | Milano Politecnico | Sistema di generazione di segnali di analisi vibrazionale raman |
KR101332699B1 (ko) | 2012-05-25 | 2013-11-25 | 충북대학교 산학협력단 | 파장변환 레이저 장치 |
US9482928B2 (en) * | 2013-03-15 | 2016-11-01 | Quantel USA, Inc. | Apparatus for facilitating micro-rotational calibration for an NLO crystal enabled laser system |
GB2547268B (en) * | 2016-02-12 | 2019-11-13 | M Squared Lasers Ltd | Optical frequency mixing module |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63165825A (ja) * | 1986-12-27 | 1988-07-09 | Hamamatsu Photonics Kk | 波長可変レ−ザ装置 |
JPH06180463A (ja) * | 1992-12-15 | 1994-06-28 | Asukaru:Kk | 自動追尾型波長変換器 |
JPH07281228A (ja) * | 1994-04-08 | 1995-10-27 | Hamamatsu Photonics Kk | 光パラメトリック発振器 |
JPH1168210A (ja) * | 1997-08-19 | 1999-03-09 | Toshiba Corp | レ−ザ発振装置 |
JPH1167623A (ja) * | 1997-08-11 | 1999-03-09 | Hitachi Ltd | 露光光源および露光装置ならびに半導体装置の製造方法 |
JP2003043534A (ja) * | 2001-08-03 | 2003-02-13 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | レーザの第二高調波発生のための自動追尾装置 |
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JP3013121B2 (ja) | 1991-05-10 | 2000-02-28 | 富士写真フイルム株式会社 | 光波長変換装置 |
JPH05165072A (ja) * | 1991-12-11 | 1993-06-29 | Toshiba Corp | レ−ザ光の波長変換装置 |
JPH07313396A (ja) | 1994-05-20 | 1995-12-05 | Takeo Nakajima | トイレットペーパーホルダー |
EP0774684A3 (en) * | 1995-11-16 | 1998-04-22 | Matsushita Electric Industrial Co., Ltd. | Optical apparatus and method for producing the same |
US6614584B1 (en) * | 2000-02-25 | 2003-09-02 | Lambda Physik Ag | Laser frequency converter with automatic phase matching adjustment |
JP2003174222A (ja) | 2001-12-06 | 2003-06-20 | Shimadzu Corp | レーザ装置 |
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2006
- 2006-08-09 KR KR1020060075406A patent/KR100723148B1/ko active IP Right Grant
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2007
- 2007-06-12 JP JP2007155080A patent/JP4879826B2/ja active Active
- 2007-06-13 US US11/808,812 patent/US7443892B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63165825A (ja) * | 1986-12-27 | 1988-07-09 | Hamamatsu Photonics Kk | 波長可変レ−ザ装置 |
JPH06180463A (ja) * | 1992-12-15 | 1994-06-28 | Asukaru:Kk | 自動追尾型波長変換器 |
JPH07281228A (ja) * | 1994-04-08 | 1995-10-27 | Hamamatsu Photonics Kk | 光パラメトリック発振器 |
JPH1167623A (ja) * | 1997-08-11 | 1999-03-09 | Hitachi Ltd | 露光光源および露光装置ならびに半導体装置の製造方法 |
JPH1168210A (ja) * | 1997-08-19 | 1999-03-09 | Toshiba Corp | レ−ザ発振装置 |
JP2003043534A (ja) * | 2001-08-03 | 2003-02-13 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | レーザの第二高調波発生のための自動追尾装置 |
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Publication number | Publication date |
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JP4879826B2 (ja) | 2012-02-22 |
US20080037599A1 (en) | 2008-02-14 |
US7443892B2 (en) | 2008-10-28 |
KR100723148B1 (ko) | 2007-05-30 |
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