JP2008039626A - 圧力検出装置 - Google Patents

圧力検出装置 Download PDF

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Publication number
JP2008039626A
JP2008039626A JP2006215383A JP2006215383A JP2008039626A JP 2008039626 A JP2008039626 A JP 2008039626A JP 2006215383 A JP2006215383 A JP 2006215383A JP 2006215383 A JP2006215383 A JP 2006215383A JP 2008039626 A JP2008039626 A JP 2008039626A
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JP
Japan
Prior art keywords
cavity
pressure sensor
pressure
electrode
detection device
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Pending
Application number
JP2006215383A
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English (en)
Japanese (ja)
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JP2008039626A5 (enrdf_load_stackoverflow
Inventor
Toshinobu Sakurai
俊信 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyazaki Epson Corp
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Epson Toyocom Corp
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Publication date
Application filed by Epson Toyocom Corp filed Critical Epson Toyocom Corp
Priority to JP2006215383A priority Critical patent/JP2008039626A/ja
Publication of JP2008039626A publication Critical patent/JP2008039626A/ja
Publication of JP2008039626A5 publication Critical patent/JP2008039626A5/ja
Pending legal-status Critical Current

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JP2006215383A 2006-08-08 2006-08-08 圧力検出装置 Pending JP2008039626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006215383A JP2008039626A (ja) 2006-08-08 2006-08-08 圧力検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006215383A JP2008039626A (ja) 2006-08-08 2006-08-08 圧力検出装置

Publications (2)

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JP2008039626A true JP2008039626A (ja) 2008-02-21
JP2008039626A5 JP2008039626A5 (enrdf_load_stackoverflow) 2009-08-27

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JP2006215383A Pending JP2008039626A (ja) 2006-08-08 2006-08-08 圧力検出装置

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JP (1) JP2008039626A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203140A (ja) * 2010-03-25 2011-10-13 Seiko Epson Corp 圧力センサー
EP2477036A1 (en) 2011-01-17 2012-07-18 Nihon Dempa Kogyo Co., Ltd. External force detecting device and external force detecting sensor
EP2477035A1 (en) 2011-01-17 2012-07-18 Nihon Dempa Kogyo Co., Ltd. External force detecting method and external force detecting device
CN102620812A (zh) * 2011-01-25 2012-08-01 日本电波工业株式会社 振动检测装置
CN102645292A (zh) * 2011-02-15 2012-08-22 佳能株式会社 压电振动型力传感器和机器人装置
US8890391B2 (en) 2011-06-24 2014-11-18 Nihon Dempa Kogyo Co., Ltd. External force detection apparatus and external force detection sensor
CN104807486A (zh) * 2015-02-06 2015-07-29 纳米新能源（唐山）有限责任公司 气动传感器
RU2623182C1 (ru) * 2016-05-17 2017-06-22 Общество с ограниченной ответственностью "Специальное конструкторское техническое бюро электроники, приборостроения и автоматизации", ООО "СКТБ ЭлПА" Пьезорезонансный чувствительный элемент абсолютного давления
RU221604U1 (ru) * 2023-06-02 2023-11-14 Акционерное общество "ЭКА" Датчик измерения акустической эмиссии

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105436A (ja) * 1984-10-30 1986-05-23 Matsushita Electric Ind Co Ltd 圧力検出装置
JPH038739U (enrdf_load_stackoverflow) * 1989-06-12 1991-01-28
JPH04130670A (ja) * 1990-09-20 1992-05-01 Seiko Instr Inc 静電容量型圧力センサ
JPH0682469A (ja) * 1992-09-04 1994-03-22 Japan Aviation Electron Ind Ltd 加速度計
JPH06102123A (ja) * 1992-09-18 1994-04-15 Fujitsu Ltd 圧力センサ
JPH10170375A (ja) * 1996-12-06 1998-06-26 Matsushita Electric Ind Co Ltd 圧力・振動検知装置
JP2004191128A (ja) * 2002-12-10 2004-07-08 Pacific Ind Co Ltd 半導体センサ及びタイヤ状態監視装置の送信機
JP2005318330A (ja) * 2004-04-28 2005-11-10 Kyocera Kinseki Corp 圧電振動子
JP2005318436A (ja) * 2004-04-30 2005-11-10 Toyo Commun Equip Co Ltd 発振回路用ｉｃ部品、及び圧電発振器
JP2006050529A (ja) * 2004-02-17 2006-02-16 Seiko Epson Corp 圧電発振器、及びその製造方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105436A (ja) * 1984-10-30 1986-05-23 Matsushita Electric Ind Co Ltd 圧力検出装置
JPH038739U (enrdf_load_stackoverflow) * 1989-06-12 1991-01-28
JPH04130670A (ja) * 1990-09-20 1992-05-01 Seiko Instr Inc 静電容量型圧力センサ
JPH0682469A (ja) * 1992-09-04 1994-03-22 Japan Aviation Electron Ind Ltd 加速度計
JPH06102123A (ja) * 1992-09-18 1994-04-15 Fujitsu Ltd 圧力センサ
JPH10170375A (ja) * 1996-12-06 1998-06-26 Matsushita Electric Ind Co Ltd 圧力・振動検知装置
JP2004191128A (ja) * 2002-12-10 2004-07-08 Pacific Ind Co Ltd 半導体センサ及びタイヤ状態監視装置の送信機
JP2006050529A (ja) * 2004-02-17 2006-02-16 Seiko Epson Corp 圧電発振器、及びその製造方法
JP2005318330A (ja) * 2004-04-28 2005-11-10 Kyocera Kinseki Corp 圧電振動子
JP2005318436A (ja) * 2004-04-30 2005-11-10 Toyo Commun Equip Co Ltd 発振回路用ｉｃ部品、及び圧電発振器

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203140A (ja) * 2010-03-25 2011-10-13 Seiko Epson Corp 圧力センサー
US8966980B2 (en) 2011-01-17 2015-03-03 Nihon Dempa Kogyo Co., Ltd. External force detecting device and external force detecting sensor
EP2477036A1 (en) 2011-01-17 2012-07-18 Nihon Dempa Kogyo Co., Ltd. External force detecting device and external force detecting sensor
EP2477035A1 (en) 2011-01-17 2012-07-18 Nihon Dempa Kogyo Co., Ltd. External force detecting method and external force detecting device
US9016128B2 (en) 2011-01-17 2015-04-28 Nihon Dempa Kogyo Co., Ltd. External force detecting method and external force detecting device
CN102620812A (zh) * 2011-01-25 2012-08-01 日本电波工业株式会社 振动检测装置
US8887582B2 (en) 2011-02-15 2014-11-18 Canon Kabushiki Kaisha Piezoelectric vibration type force sensor and robot apparatus
CN102645292B (zh) * 2011-02-15 2014-11-12 佳能株式会社 压电振动型力传感器和机器人装置
CN102645292A (zh) * 2011-02-15 2012-08-22 佳能株式会社 压电振动型力传感器和机器人装置
US8890391B2 (en) 2011-06-24 2014-11-18 Nihon Dempa Kogyo Co., Ltd. External force detection apparatus and external force detection sensor
CN104807486A (zh) * 2015-02-06 2015-07-29 纳米新能源（唐山）有限责任公司 气动传感器
RU2623182C1 (ru) * 2016-05-17 2017-06-22 Общество с ограниченной ответственностью "Специальное конструкторское техническое бюро электроники, приборостроения и автоматизации", ООО "СКТБ ЭлПА" Пьезорезонансный чувствительный элемент абсолютного давления
RU221604U1 (ru) * 2023-06-02 2023-11-14 Акционерное общество "ЭКА" Датчик измерения акустической эмиссии

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