JP2008034635A5 - - Google Patents

Download PDF

Info

Publication number
JP2008034635A5
JP2008034635A5 JP2006206449A JP2006206449A JP2008034635A5 JP 2008034635 A5 JP2008034635 A5 JP 2008034635A5 JP 2006206449 A JP2006206449 A JP 2006206449A JP 2006206449 A JP2006206449 A JP 2006206449A JP 2008034635 A5 JP2008034635 A5 JP 2008034635A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006206449A
Other languages
Japanese (ja)
Other versions
JP2008034635A (en
JP5101059B2 (en
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2006206449A external-priority patent/JP5101059B2/en
Priority to JP2006206449A priority Critical patent/JP5101059B2/en
Priority to KR1020070075292A priority patent/KR100890072B1/en
Priority to TW096127562A priority patent/TWI428976B/en
Priority to CN2007101397032A priority patent/CN101114589B/en
Priority to CN201010165751A priority patent/CN101847580A/en
Publication of JP2008034635A publication Critical patent/JP2008034635A/en
Publication of JP2008034635A5 publication Critical patent/JP2008034635A5/ja
Publication of JP5101059B2 publication Critical patent/JP5101059B2/en
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006206449A 2006-07-28 2006-07-28 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer storage medium, and storage medium storing processing recipe Active JP5101059B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006206449A JP5101059B2 (en) 2006-07-28 2006-07-28 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer storage medium, and storage medium storing processing recipe
KR1020070075292A KR100890072B1 (en) 2006-07-28 2007-07-26 Method and apparatus for manufacturing semiconductor device, computer storage medium, and storage medium for storing the processing recipe
CN201010165751A CN101847580A (en) 2006-07-28 2007-07-27 The manufacture method of semiconductor device and manufacturing installation
CN2007101397032A CN101114589B (en) 2006-07-28 2007-07-27 Method and apparatus for manufacturing semiconductor device
TW096127562A TWI428976B (en) 2006-07-28 2007-07-27 A manufacturing method of a semiconductor device, a manufacturing apparatus for a semiconductor device, a computer memory medium, and a memory medium having a memory program

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006206449A JP5101059B2 (en) 2006-07-28 2006-07-28 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer storage medium, and storage medium storing processing recipe

Publications (3)

Publication Number Publication Date
JP2008034635A JP2008034635A (en) 2008-02-14
JP2008034635A5 true JP2008034635A5 (en) 2009-07-23
JP5101059B2 JP5101059B2 (en) 2012-12-19

Family

ID=39022830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006206449A Active JP5101059B2 (en) 2006-07-28 2006-07-28 Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer storage medium, and storage medium storing processing recipe

Country Status (4)

Country Link
JP (1) JP5101059B2 (en)
KR (1) KR100890072B1 (en)
CN (2) CN101114589B (en)
TW (1) TWI428976B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101630640B (en) * 2008-07-18 2012-09-26 北京京东方光电科技有限公司 Photoresist burr edge-forming method and TFT-LCD array substrate-manufacturing method
JP5856543B2 (en) 2012-06-27 2016-02-09 東京エレクトロン株式会社 Etching method
CN103137815A (en) * 2013-02-28 2013-06-05 合肥彩虹蓝光科技有限公司 Novel pattern sapphire substrate (PSS) structure and manufacturing method
JP6606476B2 (en) * 2016-08-02 2019-11-13 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Semiconductor device manufacturing method, substrate processing apparatus, and program

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04157723A (en) * 1990-10-22 1992-05-29 Kawasaki Steel Corp Dry etching method of aluminum film
US6241739B1 (en) * 1999-11-12 2001-06-05 Altair Instruments, Inc. Microdermabrasion device and method of treating the skin surface
JP3425925B2 (en) * 2000-03-28 2003-07-14 鹿児島日本電気株式会社 Method for manufacturing thin film transistor
JP2002064101A (en) * 2000-08-21 2002-02-28 Casio Comput Co Ltd Method of forming wiring having chromium layer
JP2002151381A (en) * 2000-11-09 2002-05-24 Nec Kagoshima Ltd Method for forming pattern
JP4410951B2 (en) * 2001-02-27 2010-02-10 Ｎｅｃ液晶テクノロジー株式会社 Pattern forming method and manufacturing method of liquid crystal display device
TW561515B (en) * 2001-11-30 2003-11-11 Tokyo Electron Ltd Processing device, and gas discharge suppressing member
JP2005072443A (en) * 2003-08-27 2005-03-17 Advanced Display Inc Method for manufacturing thin film transistor and for display device

Similar Documents

Publication Publication Date Title
BRPI0720064A2 (en)
BRMU8603216U8 (en)
BRPI0715824A8 (en)
BRPI0713487A2 (en)
BRPI0708307B8 (en)
CH2121272H1 (en)
AT504380A8 (en)
BY9789C1 (en)
CN300726656S (zh) 锅蒸屉
CN300732324S (zh) 肤质测量器(aq836)
CN300725927S (zh) 童装(3795)
CN300725932S (zh) 童装(3829)
CN300729987S (zh) 数码相框
CN300728536S (zh) 拖鞋(3362)
CN300725917S (zh) 童装(3734)
CN300728397S (zh) 蜡烛灯
CN300725928S (zh) 童装(3809)
CN300728326S (zh) 道路中央隔离栏
CN300728222S (zh) 车用除臭器
CN300731881S (zh) 置物架(da001ss)
CN300731917S (zh) 酒瓶(手雷)
CN300731986S (zh) 酒包装箱(四)
CN300727835S (zh) 课本封面(3)
CN300727441S (zh) 蓄电池(evl16)
CN300725929S (zh) 童装(3811)