JP2008033306A5 - - Google Patents

Claims (11)

In a defect correction apparatus for correcting defects on a substrate,
Based on the defect position information of the inspection data of the substrate inspected in the inspection step prior to the correction step, an imaging unit that images the defect to be reviewed,
An image processing unit that generates a thumbnail image by reducing the defect review inspection image captured by the imaging unit;
A storage unit that associates and stores the defect review inspection image and the thumbnail image;
A display for displaying a list of the thumbnail images ;
A defect selection unit for selecting defects to be corrected on the thumbnail images displayed in a list by the display unit;
A defect correcting section for correcting the defect selected by the defect selection unit,
A control unit that controls the imaging unit, the display unit, and the defect correction unit;
A defect correction device comprising: The control unit selects a true defect that needs to be corrected as a review target based on the defect position information of the inspection data, and causes the imaging unit to capture all the selected defects to be reviewed. The defect correction apparatus according to claim 1, wherein an inspection image is stored in the storage unit . The control unit classifies the defect as a review target that needs to be corrected by classifying the defect into a pseudo defect that does not need to be corrected and a true defect that needs to be corrected based on the size and position of the defect in the inspection data. The defect correction apparatus according to claim 1 . The control unit performs control to store the defect review inspection image and the thumbnail image obtained by reducing the review inspection image in the storage unit in association with each other, read the thumbnail image from the storage unit, and display the thumbnail image on the display unit as a list. The defect correction apparatus according to claim 1 . The defect correction apparatus according to claim 1, wherein the control unit highlights a frame of the thumbnail image specified by a cursor by the defect selection unit with respect to the thumbnail image displayed on the display unit. . The control unit associates and stores the defect review inspection image, the thumbnail image obtained by reducing the review inspection image, and defect data in the storage unit, reads the thumbnail image and defect data from the storage unit, and stores the defect image on the display unit. 2. The defect correction apparatus according to claim 1 , wherein thumbnail images are displayed as a list and the defect data corresponding to the thumbnail images are displayed on the display unit.   The defect correction apparatus according to claim 6, wherein the control unit displays the defect data of the defect designated by moving the cursor by the defect selection unit in a different color.   The control unit causes the imaging unit to capture a corrected image of the defect that is corrected by the defect correcting unit, and a corrected thumbnail image obtained by reducing the corrected image captured by the imaging unit. The defect correction apparatus according to claim 1, wherein the image is displayed on the display unit in association with a thumbnail image before correction. The control unit causes the imaging unit to capture a corrected image of the defect that is corrected by the defect correcting unit, and a corrected thumbnail image obtained by reducing the corrected image captured by the imaging unit. The defect correction apparatus according to claim 1, wherein the image is displayed on the display unit in association with the defect review inspection image. The control unit displays the corrected thumbnail image on the display unit, moves the cursor to the corrected thumbnail image by the defect selection unit, and re-registers the defect designated as a defect that needs to be corrected again. The defect correction apparatus according to claim 8 or 9, characterized by the above.   Based on the defect position information of the inspection data, the control unit causes the imaging unit to capture all defects to be reviewed before defect correction of the defect correction unit, and reduces the review inspection image and the reduced review inspection image. Is stored in the storage unit, and the review inspection image displayed in a reduced list on the display unit is specified to be enlarged, whereby the review inspection image before the reduction process is read from the storage unit and displayed on the display unit in an enlarged manner. The defect correction apparatus according to claim 1.