TW202134634A - Attached re-inspection system, and attached re-inspection method - Google Patents

Abstract

The present invention provides an attached re-inspection system, which is implemented in cooperation with a re-inspection device. The attached re-inspection system comprises an automatic operation device, an image recording device, and an image detection device. The automatic operation device outputs an operation instruction to the re-inspection device according to the position information of the defect of the object to be tested, so that a re-examination camera of the re-inspection device moves to the position above the defect of the object to be tested, and shoots Defective location image. The image recording device is set on the re-inspection device, and an image of the defect position is obtained from a display device on the re-inspection device. The image detection device is replaced with the image recording device, and an image re-inspection result is generated according to the defect position image on the display device.

Description

Symbiosis reinspection system and symbiosis reinspection method

The present invention relates to a symbiosis reinspection system and a symbiosis reinspection method, in particular to a fully automated symbiosis reinspection system and a symbiosis reinspection method.

Automatic optical inspection (Automated Optical Inspection, AOI) uses machine vision as the inspection standard technology to replace traditional human eye recognition through machine vision to achieve high-precision and high-efficiency inspections. As an improvement, traditional optical instruments are used by humans. The shortcomings of detection, the application level includes high-tech industry research and development, manufacturing quality control, national defense, people's livelihood, medical care, environmental protection, electric power and other fields.

Generally, machine vision inspection can greatly increase the efficiency of detection compared to human eye inspection. However, machine vision still often causes misdetection or misjudgment. For example, the hair and dust on the surface of the panel are often misjudged as scratches or noise on the panel, because they are quite close to the defects of the panel in form. Based on the above reasons, in order to reduce the probability of false detection and misjudgment, and to improve the yield and productivity of the product, the defect detected by the test object is generally re-examined through the human eye, and the test object is reconfirmed through the human eye Blemishes to reduce the possibility of overkill.

The object of the present invention is to provide a symbiosis reinspection system for implementation with a reinspection device. The symbiosis reinspection system includes an automatic operation device, an image recording device, and an image detection device. The automatic operating device outputs an operation command to the re-inspection equipment based on the defect location information of an object to be tested, so that a re-inspection camera of the re-inspection equipment moves above the defect location of the object to be tested, and photographs a defect Location image. The image skimming device is arranged on the re-inspection equipment, and obtains the defect location image from a display device on the re-inspection equipment. The image detection device is coupled to the image recording device, and generates an image review result according to the defect position image on the display device.

Another object of the present invention is to provide a symbiosis re-inspection system, including a re-inspection equipment, an automatic operation device, an image recording device, and an image detection device. The re-inspection equipment receives an object to be tested and the defect position information of the object to be tested provided by an automatic optical inspection device to perform a re-inspection procedure. The automatic operating device outputs an operation command to the re-inspection device according to the defect location information, so that a re-inspection camera of the re-inspection device moves to the defect location of the object to be tested, and shoots an image of the defect location. The image skimming device is arranged on the re-inspection equipment, and obtains the defect location image from a display device on the re-inspection equipment. The image detection device is coupled to the image recording device, and generates an image review result according to the defect position image on the display device. The re-inspection equipment has a manual control device connected to the re-inspection camera to control the operation of the re-inspection camera. The display device presents the defect location image taken by the re-inspection camera for visual inspection.

A further object of the present invention is to provide a symbiosis re-inspection method for implementation in conjunction with a re-inspection device, including: providing an automatic operating device, whereby the automatic operating device outputs a defect location information of an object to be tested Operation instructions are sent to the re-inspection equipment to move the re-inspection camera to the defect position of the object to be tested, and take an image of the defect position; provide an image recording device, coupled to the re-inspection equipment, from the re-inspection equipment An image of the defect location is obtained on a display device above; and an image detection module is provided, which is coupled to the image recording device, and generates an image review result according to the defect location image on the display device.

1. The present invention can improve the lack of traditional procedures that require a large number of manual re-checks, especially it can solve the problem of insufficient detection software ability or excessive over-checking and misjudgment caused by excessive manpower load during process changes. Through the present invention, Improve the detection efficiency and accuracy of re-inspection equipment, and can greatly reduce the workload of personnel.

2. The present invention can be applied to all kinds of re-inspection equipment to increase the scalability and practicability of the product. By adding software and hardware or programs, it can effectively automate the most labor-intensive tasks in traditional re-inspection, and achieve a significant reduction in manpower. the goal of.

The detailed description and technical content of the present invention will now be described in conjunction with the drawings as follows. Furthermore, the figures in the present invention are not necessarily drawn according to actual proportions for the convenience of description, and these figures and their proportions are not used to limit the scope of the present invention, and are described here first.

The following describes one of the preferred embodiments of the present invention, please refer to "Figure 1" and "Figure 2", which are the block diagrams (1) and block diagrams (1) and block diagrams ( Two), as shown in the figure:

This embodiment mainly includes an automatic optical inspection device 10, a re-inspection device 20, and a symbiotic re-inspection system 30 provided in conjunction with the re-inspection device 20.

The automatic optical inspection device 10 is used to detect defects of the object to be tested, and to record the coordinates and types of the defects of the object to be tested. The automatic optical inspection device 10 can be any existing automatic optical inspection (Automated Optical Inspection, AOI), which is used to perform image analysis on the test object H and evaluate the types of defects through machine vision. Among them, the method of image analysis can be obtained through general image processing methods (such as Gaussian, Fourier, binarization, image subtraction, morphological analysis) to obtain the type and location of defects, or through machine learning, deep learning, etc. The identification and positioning of the defect type performed by the network is not limited in the present invention.

In another preferred embodiment, the symbiosis reinspection system 30 may further include a reinspection device 20, by directly integrating the reinspection device 20 into the symbiosis reinspection system 30, so as to cooperate with the automatic optical inspection device 10. It is not limited in the present invention.

Please also refer to "Figure 3", which is a schematic diagram of the appearance of the re-inspection equipment, as shown in the figure:

The re-inspection device 20 is arranged at the back end of the automatic optical inspection device 10, and is used to receive the test objects classified as defective products output by the automatic optical inspection device 10, and according to the types and types of the defects. Re-check the location to confirm whether there is a misjudgment of the defect, reduce the overkill by re-judgment, and further improve the yield rate.

The re-inspection equipment 20 mainly includes a transfer device 21, a detection platform 22, a re-inspection camera 23, a manual operation device 24, and a display device 25.

The detection platform 22 is used to carry the test object H, and the transfer device 21 is used to transfer the test object H that has been detected by the automatic optical inspection equipment 10 to the detection platform 22, so that the detection platform 22 can The test object H is re-judged. In a feasible embodiment, in terms of the position of the machine, when there is a distance between the re-inspection device 20 and the automatic optical inspection device 10, the distance between the automatic optical inspection device 10 and the re-inspection device 20 A transport platform (such as a conveyor belt, a linear stage, etc.) can be further provided, through which the object H to be tested is moved from the automatic optical inspection device 10 to the re-inspection device 20; in another feasible embodiment, when When the distance between the automatic optical inspection device 10 and the re-inspection device 20 is relatively close, the transfer device 21 of the re-inspection device 20 can carry out the work of transferring the object H; in another feasible embodiment, there is no need The transfer device 21 is provided, and the test object H is directly placed on the detection platform 22 by manual feeding, which is not limited in the present invention.

The re-inspection camera 23 is used to photograph the object H on the inspection platform 22. The re-inspection camera 23 includes a camera body 231 and a re-inspection camera moving stage 232 for the camera body 231 to be installed and connected to the manual operating device 24.

Wherein, the camera body 231 can be a line scan camera (Line Scan Camera) or an area scan camera (Area Scan Camera), which is not limited in the present invention. The camera body 231 may further include an optical device through which the defect image of the object to be measured is enlarged to obtain a clearer enhanced defect image after the enlargement. In another feasible embodiment, the camera body 231 can also directly adjust the focal length through its own lens to achieve the function of magnifying the flawed image, which is not limited in the present invention. In another feasible embodiment, the flaw image can be enhanced through a light source, thereby enhancing the characteristics of the flaw in the flaw image.

The re-inspection camera moving stage 232 is used to move the camera body 24 to a corresponding position according to the control instruction input by the manual operating device 24, so as to photograph the defect of the test object H. In a preferred embodiment, the recheck camera moving stage 232 may be an XY stage (or XYZ stage), and the object under test is moved in the X direction or the Y direction through corresponding control commands. In addition to the XY stage, it does not rule out that a multi-axis robotic arm or other similar devices can be used to move the review camera to a corresponding position, which is not limited in the present invention.

The manual operating device 24 is connected to the review camera 23 and controls the operation of the review camera 23. The manual operation device 24 can be, for example, a keyboard, a button, or other similar man-machine interfaces. The manual operation device 24 includes an electric control device that outputs a control signal to the recheck camera according to an input command The stage 232 is moved to operate the camera body 231 to move to the defect position.

The display device 25 is used for presenting the defect location image taken by the re-inspection camera 23 for visual inspection. Specifically, the display device may be, for example, a liquid crystal display (LCD), an organic light emitting diode display (Organic Light Emitting Diode display, OLED display), an electrophoretic display (Electro-Phoretic Display, EPD), a plasma A display device such as a Plasma Display Panel (PDP) for presenting image information is not limited in the present invention.

The symbiosis re-inspection system 30 is set in conjunction with the re-inspection equipment 20 to perform fully automated image inspection functions. The symbiosis re-examination system 30 mainly includes an automatic operation device 31, an image recording device 32, and an image detection device 33.

The automatic operating device 31 is connected or coupled to the host system of the automatic optical inspection device 10 or the re-inspection device 20 to obtain the defect location information of the test object H, and output an operation command to the re-inspection device 10 to make the The re-inspection camera 23 of the re-inspection device 20 moves to the top of the defect position of the object H to be tested, and shoots an image of the defect position. Please also refer to "Figure 4", which is a working schematic diagram of the automatic operating device, as shown in the figure: when the object H to be tested is moved to the inspection platform 22, the automatic operating device 31 receives the defect position information ( For example, coordinates) output an operation instruction to the manual operation device 24. The operation instruction described here can be input to the manual operation device 24 through mechanical control, or input to the manual operation device 24 through electronic control. There is no limitation in the present invention.

After receiving the operation instruction, the manual operating device 24 moves the camera body 231 to the corresponding coordinate position (X ₁ , Y ₁ ) via the recheck camera moving stage 232 through the plane direction, thereby capturing the image of the object to be measured In this embodiment, it is suitable for detecting a flat object under test. In another feasible embodiment, in the detection of multi-faceted object images, the re-checking camera moving stage 232 can be implemented through a multi-axis robotic arm, and the input three-dimensional coordinates (X ₁ , Y ₁ , Z ₁ ) can be used to control the The multi-axis robotic arm moves to move the camera body 231 to the corresponding three-dimensional coordinate position.

The following describes two different embodiments of the automatic operating device 31, please refer to "Figure 5", which is a schematic diagram of the use state of the first embodiment of the automatic operating device in the present invention, as shown in the figure:

In one possible embodiment of mechanical contact, please refer to "Figure 5". The automatic operating device 31 includes a mechanical control device 31A connected to the manual operating device 24. The mechanical control device 31A is mechanically (for example, directly The thimble or button provided on the keyboard inputs the operation instruction to the manual operating device 24, so that the re-inspection camera 23 is moved to above the defect position of the test object H, and the defect position is photographed.

The physical buttons and virtual button distributions of the manual operating device 24 can be directly pre-stored in the controller 311A of the mechanical control device 31A or in a storage unit provided with the controller 311A. When the controller 311A receives the defect location information, The action of the mechanical unit 312A is controlled according to the received defect coordinates to enter the corresponding command. In a specific implementation aspect, the mechanical control device 31A may be a button pressing device installed on the operating interface of the manual operating device 24. The button pressing device includes one or more pressing units, a driving unit that drives the pressing unit to act, and a controller connected to the driving unit to output control commands. After receiving the controller instruction, the driving unit drives the pressing unit to press the corresponding button on the operation interface to operate the recheck camera to move to the defect position.

In another embodiment, please refer to "Figure 6", which is a schematic diagram of the operating state of the second embodiment of the automatic operating device in the present invention, as shown in the figure:

In one of the feasible embodiments of the electronic control method, please refer to "Figure 6". The automatic operating device 31 includes an electronic control device 31B, a signal is connected to the manual control device 24, and the operation command is input to The manual operating device 24 is used to operate the re-inspection camera 23 to the top of the defect position of the object to be tested, and to photograph the defect position. Specifically, the electric control device 31B is directly connected to the control circuit board of the manual operation device 24 to directly operate the recheck camera 23 by electric signals.

The above-mentioned methods are only a few of the implementations of the automatic operating device 31 specifically used to operate the re-inspection camera. In addition to the above-mentioned methods, it can also be directly connected to the re-inspection camera moving stage 232 to operate the camera body 231 in other ways. The position of the above method is not limited in the present invention.

When the re-inspection camera 23 moves to the defect position of the test object H, the re-inspection camera 23 will automatically take an image of the test object H according to the instructions of the automatic operating device 31, and the captured image will be transferred to the The display device 25 of the reinspection device 20 displays. The image skimming device 32 is disposed on the re-inspection equipment 20, and obtains the defect location image from a display device 25 on the re-inspection equipment 20. In a possible embodiment, the image recording device 22 can be connected to the recheck camera 23 to obtain the defect location image captured by a signal connection; in another possible embodiment, it can also be received by the display 23 The image of the display device is captured at the end to obtain the defect location image; in another feasible embodiment, the image of the display device 25 can be captured by a camera to obtain the defect location image, which is not limited in the present invention.

The following describes two different embodiments of the image recording device 22. Please refer to "Figure 7", which is a schematic diagram of the use state of the first embodiment of the image recording device of the present invention, as shown in the figure:

In this embodiment, the image recording device 32 includes an external camera 32A, which shoots toward the display device 25 to obtain the defect location image presented by the display device 25. In this embodiment, the external camera 32A can be directly aligned to the position of the defect image on the display 23 during pre-calibration, or the defect position image can be captured from the image by image tracking. In the present invention No restrictions.

In another feasible embodiment, please refer to "Figure 8" first, which is a schematic diagram of the use state of the second embodiment of the image recording device in the present invention, as shown in the figure:

The image recording device 32 includes an image capturing device 32B, and a signal is coupled to the display device 25 to obtain the defect location image presented by the display device 25. Specifically, the image capture device 32B can be connected to the display device 25 that displays the defect image in the re-inspection device 20 via a signal, and the defect image is captured from the image input to the display device 25 to obtain the re-inspection camera 23. The image of the defect location captured. The connection method mentioned here can be to directly tap the signal from the connector input to the display device 25 through a tap, or directly connect to the main board of the display device 25 to obtain the signal, etc., which are not included in the present invention. limit.

In a feasible embodiment, the image capture device 32B can capture the display screen input to the display device 25 according to a preset range, for example, directly determine the capture range according to the preset pixel coordinates. In another feasible embodiment, a candidate image that may be a defect image in the display frame can be obtained through the significant boundary in the image, and the defect position image can be selected through image recognition from the candidate image, and the pixel coordinates can be recorded for continuous tracking.

The above-mentioned methods are only a few of the specific implementations for the image skimming device 32 to obtain defective images. In addition to the above-mentioned methods, it can also be connected or coupled to the recheck camera 23 and the display device 25. Any site in which captures the flawed image, the above method is not limited in the present invention.

Please also refer to "Figure 9" below, which is a block diagram of the image detection device of the present invention, as shown in the figure:

The image detection device 33 is coupled to the image recording device 32, and generates an image review result according to the defect position image on the display device 25. Specifically, the image detection device 33 may be a computer host, including a processor 331 and a storage unit 332 connected to the processor 331. In this embodiment, the processor 331 and the storage unit 332 can jointly constitute a computer or processor, such as a personal computer, a workstation, a host computer, or other types of computers or processors, and the types are not limited herein.

In this embodiment, the processor may be coupled to the storage unit. The processor is, for example, a central processing unit (CPU), or other programmable general-purpose or special-purpose microprocessors (Microprocessor), digital signal processor (DSP), programmable Controller, Application Specific Integrated Circuits (ASIC), Programmable Logic Device (PLD) or other similar devices or a combination of these devices.

In a feasible embodiment, the image detection device 33 includes a defect re-inspection module 33A, which determines whether the object H to be tested is a defect according to the defect position image on the display device 25. In another feasible implementation aspect, the image detection device 33 may further include a classification review module 33B, which classifies the defect type of the test object H according to the defect position image on the display device 25. Specifically, the image detection device 33 can use general image processing methods (such as Gaussian, Fourier, binarization, image subtraction, morphological analysis), or use neural networks such as machine learning, deep learning, etc. The image is used to determine whether the defect location image is indeed a defect or the type of defect.

Finally, the image inspection device 33 compares the defect type obtained from the detection result of the automatic optical inspection equipment with the image analysis result to output a re-inspection result, thereby confirming the correctness of the defect judgment through the re-inspection result, and Reduce the situation of overkill.

The following is a detailed description of the automatic re-inspection method of the present invention using the symbiosis-type automatic inspection equipment, please refer to "Figure 10", which is a schematic flow diagram of the symbiosis-type re-inspection method of the present invention, as shown in the figure:

This embodiment provides a symbiotic re-inspection method for implementation in cooperation with a re-inspection device. The method is executed according to the following steps to detect defects of the object under test through fully automated control.

First, after the test object H is inspected by the automatic optical inspection device 10, it is transferred to the inspection platform 22, and the defect of the test object H is re-inspected according to the inspection result of the automatic optical inspection device 10 (step S01).

Next, according to the defect position information of the object H to be tested, the automatic operating device 31 is used to output an operation command to the re-inspection equipment 20, so that the re-inspection camera 23 is moved to the defect position of the object H to be tested, and a defect is captured Position image (step S02). In a feasible embodiment, the re-inspection camera 23 can operate the re-inspection camera 23 through the manual operating device 24 of the re-inspection device 20 to move to the top of the defect position and photograph the defect position. The re-inspection device can receive the object H and the defect location information from the automatic optical inspection device 10.

The defect location image is obtained from the display device 25 on the re-inspection device 20 (step S03). Step S03 may include using an external camera 32A to shoot toward the display device 25 to obtain the defect position image presented by the display device 25; or in another feasible embodiment, the display device may be captured via the image capturing device 32B Taking a screenshot 25 to obtain the defect position image presented by the display device 25 is not limited in the present invention.

Finally, the image detects the defect location image on the display device to generate an image recheck result (step S04). The image inspection process can be analyzed by computer equipment and image processing software. According to the defect position image on the display device, the defect type of the object to be tested can be classified to generate the re-inspection result, or according to the display device The defect location image is used to determine whether the object to be tested is a defect, so as to generate the re-inspection result.

After obtaining the result of the image re-examination, the personnel can perform a visual inspection of the position image of the object to be measured on the display device according to the result of the image re-examination, and finally perform a human inspection (step S05). The requirements can be omitted and are not limited in the present invention.

In summary, the present invention can improve the lack of traditional procedures that require a large amount of manual re-inspection, in particular, it can solve the problem of insufficient detection software capabilities or a large number of over-inspections and misjudgments caused by changes in the manufacturing process. The invention can improve the detection efficiency and accuracy of the re-inspection equipment, and can greatly reduce the workload of personnel. In addition, the present invention can be applied to various re-inspection equipment to increase the scalability and practicability of the product. By adding software, hardware or programs, the most labor-intensive tasks in traditional re-inspection can be effectively automated, and manpower can be greatly reduced. the goal of.

The present invention has been described in detail above, but what has been described above is only a preferred embodiment of the present invention. It should not be used to limit the scope of implementation of the present invention, that is, everything made in accordance with the scope of the patent application of the present invention is equal Changes and modifications should still fall within the scope of the patent of the present invention.

10: Automatic optical inspection equipment 20: Re-inspection equipment 21: Transfer device 22: Detection platform 23: Recheck the camera 231: Camera body 232: Recheck the camera mobile stage 24: Manual operation device 25: display device 30: Symbiosis recheck system 31: Automatic operation device 31A: Mechanical control device 311A: Controller 312A: Mechanical unit 31B: Electronic control device 32: Video recording device 32A: External camera 32B: Image capture device 33: Image detection device 331: processor 332: storage unit 33B: Category review module H: DUT

Figure 1 is a block diagram (1) of the symbiosis re-inspection system of the present invention applied to the re-inspection equipment.

Figure 2 is a block diagram (2) of the symbiosis re-inspection system of the present invention applied to the re-inspection equipment.

Figure 3 is a schematic diagram of the appearance of the re-inspection equipment in the present invention.

Figure 4 is a schematic diagram of the operation of the automatic operating device in the present invention.

Fig. 5 is a schematic diagram of the use state of the first embodiment of the automatic operating device in the present invention.

Fig. 6 is a schematic diagram of the use state of the second embodiment of the automatic operating device in the present invention.

FIG. 7 is a schematic diagram of the use state of the first embodiment of the video recording device in the present invention.

FIG. 8 is a schematic diagram of the use state of the second embodiment of the video recording device in the present invention.

Fig. 9 is a block diagram of the image detection device of the present invention.

Figure 10 is a schematic flow chart of the symbiosis re-examination method of the present invention.

10: Automatic optical inspection equipment

20: Re-inspection equipment

30: Symbiosis recheck system

Claims (18)

A symbiosis re-inspection system is used to cooperate with a re-inspection device, and the system includes: An automatic operating device, based on the defect position information of an object to be tested, outputs an operation command to the re-inspection equipment, so that a re-inspection camera of the re-inspection equipment moves to above the defect position of the object to be tested, and takes a picture. Image of defect location; An image skimming device, which is arranged on the re-inspection equipment, and obtains the defect location image from a display device on the re-inspection equipment; and An image detection device is coupled to the image recording device, and generates an image review result according to the defect position image on the display device. The symbiosis re-inspection system according to claim 1, wherein the re-inspection equipment includes: A detection platform for carrying the object to be tested; The re-inspection camera shoots the object to be tested on the inspection platform; A manual operating device connected to the re-inspection camera to control the operation of the re-inspection camera; and The display device presents the defect location image taken by the re-inspection camera for visual inspection. The symbiosis reinspection system according to claim 2, wherein the automatic operating device includes a mechanical control device connected to the manual operating device, and mechanically inputting the operation instruction to the manual operating device to move the re-inspection camera To the top of the defect position of the object to be tested, and photograph the defect position. The symbiosis retest system according to claim 2, wherein the automatic operation device includes an electric control device, the signal is connected to the manual control device, and the operation instruction is input to the manual operation device in an electronic control mode to operate the recheck The inspection camera is positioned above the defect position of the object to be tested, and photographs the defect position. The symbiosis review system according to claim 1, wherein the image recording device includes an external camera that shoots toward the display device to obtain the defect location image presented by the display device. The symbiosis review system according to claim 1, wherein the image recording device includes an image capturing device, and the signal is coupled to the display device to obtain the defect location image presented by the display device. The symbiosis re-inspection system according to claim 1, wherein the image detection device includes a defect re-inspection module, which determines whether the object to be tested is a defect based on the defect position image on the display device to generate the re-inspection Inspection result. The symbiosis re-inspection system according to claim 1, wherein the image detection device includes a category re-inspection module, which classifies the defect type of the object to be tested according to the defect position image on the display device to generate the re-inspection Inspection result. The symbiosis re-inspection system according to claim 1, wherein the re-inspection device receives the object to be tested and the defect location information from an automatic optical inspection device. A symbiosis reinspection system, including: A re-inspection device, which receives an object to be tested and the defect location information of the object to be tested provided by an automatic optical inspection device to perform a re-inspection procedure; An automatic operating device, based on the defect location information, outputs an operation command to the re-inspection device, so that a re-inspection camera of the re-inspection device moves to the defect location of the object to be tested, and shoots an image of the defect location; An image skimming device, which is arranged on the re-inspection equipment, and obtains the defect location image from a display device on the re-inspection equipment; and An image detection device, coupled to the image skimming device, to generate an image review result according to the defect position image on the display device; The re-inspection equipment has a manual control device connected to the re-inspection camera to control the operation of the re-inspection camera; The display device presents the defect location image taken by the re-inspection camera for visual inspection. A symbiotic re-inspection method, used to cooperate with a re-inspection device, includes: According to the defect location information of an object to be tested, an automatic operating device is used to output an operation command to the re-inspection equipment, so that the re-inspection camera is moved to the defect location of the object to be tested, and an image of the defect location is captured; Obtain an image of the defect location from a display device on the re-inspection equipment; and The image detects the defect position image on the display device, and generates an image recheck result. The symbiotic re-examination method described in claim 11 further includes: According to the result of the image reinspection, visually inspect the image of the position of the object to be tested on the display device. The symbiotic re-examination method described in claim 11 further includes: Through a manual operating device of the re-inspection equipment, the re-inspection camera is operated to move above the defect position, and the defect position is photographed. The symbiosis re-inspection method according to claim 11, wherein the step of obtaining the defect location image from the display device on the re-inspection equipment includes shooting toward the display device to obtain the defect presented by the display device Location image. The symbiosis re-inspection method according to claim 11, wherein the step of obtaining an image of the defect location on the display device on the re-inspection device includes taking a screenshot of the display device to obtain the defect presented by the display device Location image. The symbiotic reinspection method according to claim 11, wherein the image detecting the defect position image on the display device, and the step of generating the image reinspection result includes determining the to-be-tested image based on the defect position image on the display device Whether the object is a defect to produce the re-inspection result. The symbiotic reinspection method according to claim 11, wherein the image detecting the defect position image on the display device, and the step of generating the image reinspection result includes classifying the to-be-tested image according to the defect position image on the display device The defect type of the object to produce the re-inspection result. The symbiosis re-inspection method according to claim 11, wherein the re-inspection device receives the object to be tested and the defect location information from an automatic optical inspection device.

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