JP2008014633A - 振動型ジャイロセンサ - Google Patents

振動型ジャイロセンサ Download PDF

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Publication number
JP2008014633A
JP2008014633A JP2006182745A JP2006182745A JP2008014633A JP 2008014633 A JP2008014633 A JP 2008014633A JP 2006182745 A JP2006182745 A JP 2006182745A JP 2006182745 A JP2006182745 A JP 2006182745A JP 2008014633 A JP2008014633 A JP 2008014633A
Authority
JP
Japan
Prior art keywords
vibration
support substrate
gyro sensor
type gyro
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2006182745A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008014633A5 (enExample
Inventor
Eiji Nakashio
栄治 中塩
Shigeto Watanabe
成人 渡邊
Shin Sasaki
伸 佐々木
Teruyuki Inaguma
輝往 稲熊
Junichi Honda
順一 本多
Kazuo Kurihara
一夫 栗原
Yuji Shishido
祐司 宍戸
Tomoyuki Takahashi
伴幸 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2006182745A priority Critical patent/JP2008014633A/ja
Priority to PCT/JP2007/063160 priority patent/WO2008001908A1/ja
Priority to EP07767944A priority patent/EP2040033A1/en
Priority to KR1020087031823A priority patent/KR20090024208A/ko
Priority to CNA2007800248221A priority patent/CN101484776A/zh
Priority to US12/306,860 priority patent/US20090320593A1/en
Publication of JP2008014633A publication Critical patent/JP2008014633A/ja
Publication of JP2008014633A5 publication Critical patent/JP2008014633A5/ja
Abandoned legal-status Critical Current

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JP2006182745A 2006-06-07 2006-06-30 振動型ジャイロセンサ Abandoned JP2008014633A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006182745A JP2008014633A (ja) 2006-06-07 2006-06-30 振動型ジャイロセンサ
PCT/JP2007/063160 WO2008001908A1 (en) 2006-06-30 2007-06-29 Oscillation gyro sensor
EP07767944A EP2040033A1 (en) 2006-06-30 2007-06-29 Oscillation gyro sensor
KR1020087031823A KR20090024208A (ko) 2006-06-30 2007-06-29 진동형 자이로 센서
CNA2007800248221A CN101484776A (zh) 2006-06-30 2007-06-29 振动型陀螺仪传感器
US12/306,860 US20090320593A1 (en) 2006-06-30 2007-06-29 Vibration type gyro sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006159033 2006-06-07
JP2006182745A JP2008014633A (ja) 2006-06-07 2006-06-30 振動型ジャイロセンサ

Publications (2)

Publication Number Publication Date
JP2008014633A true JP2008014633A (ja) 2008-01-24
JP2008014633A5 JP2008014633A5 (enExample) 2009-08-13

Family

ID=39071808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006182745A Abandoned JP2008014633A (ja) 2006-06-07 2006-06-30 振動型ジャイロセンサ

Country Status (1)

Country Link
JP (1) JP2008014633A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192459A (ja) * 2008-02-18 2009-08-27 Panasonic Corp 角速度センサ
JP2009264820A (ja) * 2008-04-23 2009-11-12 Panasonic Corp 慣性力センサ
WO2011074056A1 (ja) * 2009-12-14 2011-06-23 トヨタ自動車株式会社 半導体慣性センサ及びその製造方法
JP2012198098A (ja) * 2011-03-22 2012-10-18 Seiko Epson Corp 慣性センサー
JP2013113776A (ja) * 2011-11-30 2013-06-10 Tdk Corp 角速度センサ
JP2016130642A (ja) * 2015-01-13 2016-07-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
CN108025906A (zh) * 2015-09-30 2018-05-11 Tdk株式会社 带有阻尼的弹性安装传感器系统
JP2018185496A (ja) * 2017-04-27 2018-11-22 キヤノン株式会社 撮像装置
CN111682847A (zh) * 2019-03-11 2020-09-18 精工爱普生株式会社 振动器件、电子设备以及移动体

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192459A (ja) * 2008-02-18 2009-08-27 Panasonic Corp 角速度センサ
JP2009264820A (ja) * 2008-04-23 2009-11-12 Panasonic Corp 慣性力センサ
WO2011074056A1 (ja) * 2009-12-14 2011-06-23 トヨタ自動車株式会社 半導体慣性センサ及びその製造方法
JP2012198098A (ja) * 2011-03-22 2012-10-18 Seiko Epson Corp 慣性センサー
JP2013113776A (ja) * 2011-11-30 2013-06-10 Tdk Corp 角速度センサ
JP2016130642A (ja) * 2015-01-13 2016-07-21 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
CN108025906A (zh) * 2015-09-30 2018-05-11 Tdk株式会社 带有阻尼的弹性安装传感器系统
JP2018535101A (ja) * 2015-09-30 2018-11-29 Tdk株式会社 弾性的に取り付けられた、ダンピング部を有するセンサ構成体
US10683201B2 (en) 2015-09-30 2020-06-16 Tdk Corporation Resiliently mounted sensor system with damping
JP2018185496A (ja) * 2017-04-27 2018-11-22 キヤノン株式会社 撮像装置
CN111682847A (zh) * 2019-03-11 2020-09-18 精工爱普生株式会社 振动器件、电子设备以及移动体
CN111682847B (zh) * 2019-03-11 2023-10-24 精工爱普生株式会社 振动器件、电子设备以及移动体

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