JP2008012549A - Apparatus and method of working fine shape, and sliding member - Google Patents

Apparatus and method of working fine shape, and sliding member Download PDF

Info

Publication number
JP2008012549A
JP2008012549A JP2006183971A JP2006183971A JP2008012549A JP 2008012549 A JP2008012549 A JP 2008012549A JP 2006183971 A JP2006183971 A JP 2006183971A JP 2006183971 A JP2006183971 A JP 2006183971A JP 2008012549 A JP2008012549 A JP 2008012549A
Authority
JP
Japan
Prior art keywords
fine
elastic body
processing apparatus
cylindrical portion
shape processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006183971A
Other languages
Japanese (ja)
Other versions
JP4876740B2 (en
Inventor
Yoshitaka Uehara
義貴 上原
Minoru Ota
稔 太田
和彦 ▲高▼嶋
Kazuhiko Takashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP2006183971A priority Critical patent/JP4876740B2/en
Publication of JP2008012549A publication Critical patent/JP2008012549A/en
Application granted granted Critical
Publication of JP4876740B2 publication Critical patent/JP4876740B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Cylinder Crankcases Of Internal Combustion Engines (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method of working fine shapes by which the fine shapes can be worked with high accuracy by restraining protuberance in the periphery of a worked fine shape, and a sliding member. <P>SOLUTION: The apparatus of working fine shapes is constituted so that fine recessed parts are worked by pressing a cylindrical tool member against the surface of a material to be worked. In the cylindrical tool member 4 having fine projecting and recessing parts which have high hardness, a tube part for forming the fine recessed parts and tube parts 5A, 5B having elastic bodies including fine particles are closely equipped and the outer periphery of the head part with the elastic bodies is made larger than the outer periphery of the fine recessed part forming tube part. The fine projecting parts and recessing parts are worked on the surface of the material to be worked by performing at least two stages which are selected from: 1. a polishing stage of the surface to be worked; 2. a fine projecting and recessing part working stage and 3. a projecting-part polishing stage by using the fine shape working apparatus. The sliding member on which the fine projecting and recessing parts are worked is worked by using the fine shape working method. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、微細形状加工装置、微細形状加工方法及び摺動部材に係り、更に詳細には、例えば、自動車用エンジンにおけるシリンダブロックのシリンダボアの内周面やカムシャフトのジャーナル部の外周面、トラクションドライブ式変速機の転動体の表面などのように摺動接触を伴う被加工物の表面に、低フリクション化を実現するための微細凹部(油だまり)を形成するのに用いられる微細形状加工装置、微細形状加工方法及び摺動部材に関する。   The present invention relates to a fine shape processing apparatus, a fine shape processing method, and a sliding member, and more specifically, for example, an inner peripheral surface of a cylinder bore of a cylinder block in an automobile engine, an outer peripheral surface of a journal portion of a camshaft, and traction. Fine shape processing equipment used to form fine recesses (oil pools) to achieve low friction on the surface of a work piece with sliding contact such as the surface of a rolling element of a drive transmission The present invention relates to a fine shape processing method and a sliding member.

従来から、マイクロロールフォーミング(MRF)による微細加工は、スプリングなどを介してローラをワークに押し付けることにより行われており、常にほぼ一定の荷重がワークにかかるようになっていた。
例えば、外周面に凹凸のあるローラを被加工物に所定の荷重で押込み、被加工物を回転させ、被加工物表面に微細な凹凸を形成する加工装置及び加工方法が提案されている(例えば特許文献1参照)。
特開2002−361351号公報
Conventionally, microfabrication by micro roll forming (MRF) has been performed by pressing a roller against a workpiece via a spring or the like, and an almost constant load has always been applied to the workpiece.
For example, a processing apparatus and a processing method have been proposed in which a roller having irregularities on the outer peripheral surface is pressed into a workpiece with a predetermined load, the workpiece is rotated, and fine irregularities are formed on the workpiece surface (for example, Patent Document 1).
JP 2002-361351 A

かかる微細加工では、図1に示すように、微細な凹凸を有するフォームローラを被加工物に押付け、フォームローラの微細な凹凸を転写し、被加工物表面を塑性変形させて微細な形状を加工しているので、加工した微細形状周辺部に盛上がりが生じ、微細形状を加工した後に、この盛上がりを除去する工程が必要となり、加工時間及びコストが増加するという問題点があった。
また、かかる微細加工では、工具がすべり、凹凸パターンが乱れるという問題点があった。
In such fine processing, as shown in FIG. 1, a foam roller having fine irregularities is pressed against a workpiece, the fine irregularities of the foam roller are transferred, and the surface of the workpiece is plastically deformed to form a fine shape. Therefore, there is a problem in that the processed fine shape peripheral portion is swelled, and after the fine shape is processed, a step of removing this swell is required, which increases processing time and cost.
In addition, such fine processing has a problem that the tool slips and the uneven pattern is disturbed.

本発明は、このような従来技術の有する課題に鑑みてなされたものであり、その目的とするところは、加工した微細形状周辺部の盛上がりを抑制し、高精度に微細形状を加工することのできる微細形状加工装置、微細形状加工方法及び摺動部材を提供することにある。   The present invention has been made in view of such problems of the prior art, and the object of the present invention is to suppress the rising of the peripheral portion of the processed fine shape and to process the fine shape with high accuracy. Another object is to provide a fine shape processing apparatus, a fine shape processing method, and a sliding member.

本発明者らは、上記課題を解決すべく鋭意検討を重ねた結果、フォームローラ(微細凹部形成筒部)と一体又は別体で研磨材となる微細な粒子を含んだ弾性体を設置し、微細凹部を加工するとともに、その周辺部の盛上がりを除去することにより、上記課題が解決できることを見出し、本発明を完成するに至った。   As a result of intensive studies to solve the above problems, the inventors of the present invention installed an elastic body containing fine particles that become an abrasive material integrally or separately from the foam roller (fine concave portion forming cylindrical portion), The present inventors have found that the above problems can be solved by processing the fine recesses and removing the bulges in the periphery thereof, and have completed the present invention.

即ち、本発明の微細形状加工装置は、外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうる微細形状加工装置において、
上記円筒状工具部材は、微細な凹部を形成する筒部と微細な粒子を含む弾性体を有する筒部とが近設されて成り、該弾性体付筒部の外周が該微細凹部形成筒部の外周より大きいことを特徴とする。
That is, the fine shape processing apparatus of the present invention includes a cylindrical tool member having high hardness fine unevenness on the outer peripheral surface, and can press the cylindrical tool member against the surface of the workpiece to process a fine recess. In fine shape processing equipment,
The cylindrical tool member comprises a cylindrical portion forming a fine recess and a cylindrical portion having an elastic body containing fine particles, and the outer periphery of the cylindrical portion with the elastic body is the fine concave portion forming cylindrical portion. It is characterized by being larger than the outer periphery.

また、本発明の微細形状加工方法は、上記微細形状加工装置を使用して被加工物表面に微細な凹凸を加工するに当たり、
以下の1〜3工程
1.被加工物表面を弾性体で研磨する被加工面研磨工程、
2.微細凹部形成筒部によって被加工物表面に微細な凹凸を加工する微細凹凸加工工程、
3.微細凹凸形状周辺の盛上がりを研磨ローラで研磨する凸部研磨工程、
より選ばれた少なくとも2つの工程を行うことを特徴とする。
Further, the fine shape processing method of the present invention, when processing the fine irregularities on the workpiece surface using the fine shape processing apparatus,
The following 1-3 steps Work surface polishing step for polishing the work surface with an elastic body,
2. A fine unevenness processing step for processing fine unevenness on the surface of the work piece by the fine recessed portion forming cylindrical portion,
3. A convex polishing process that polishes the bulge around the fine irregular shape with a polishing roller,
It is characterized in that at least two steps selected from the above are performed.

更に、本発明の摺動部材は、上記微細形状加工方法を用いて微細な凹凸を加工したことを特徴とする。   Furthermore, the sliding member of the present invention is characterized in that fine irregularities are processed using the fine shape processing method.

本発明によれば、フォームローラ(微細凹部形成筒部)と一体又は別体で研磨材となる微細な粒子を含んだ弾性体を設置し、微細凹部を加工するとともに、その周辺部の盛上がりを除去することとしたため、加工した微細形状周辺部の盛上がりを抑制し、高精度に微細形状を加工することのできる微細形状加工装置、微細形状加工方法及び摺動部材を提供できる。   According to the present invention, an elastic body containing fine particles as an abrasive material is provided integrally with or separately from the foam roller (fine concave portion forming cylindrical portion), and the fine concave portion is processed and the peripheral portion is swelled. Since it was decided to remove, it is possible to provide a fine shape processing apparatus, a fine shape processing method, and a sliding member that can suppress the rising of the peripheral portion of the processed fine shape and can process the fine shape with high accuracy.

以下、本発明の微細形状加工装置について詳細に説明する。なお、本明細書及び特許請求の範囲において、濃度、含有量、充填量などについての「%」は、特記しない限り質量百分率を表すものとする。   Hereinafter, the fine shape processing apparatus of the present invention will be described in detail. In the present specification and claims, “%” for concentration, content, filling amount and the like represents a mass percentage unless otherwise specified.

上述の如く、本発明の第1の微細形状加工装置は、外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうる。また、上記円筒状工具部材は、微細な凹部を形成する筒部と微細な粒子を含む弾性体を有する筒部とが近設されて成り、該弾性体付筒部の外周を該微細凹部形成筒部の外周より大きくする。   As described above, the first fine shape processing apparatus of the present invention includes a cylindrical tool member having fine irregularities with high hardness on the outer peripheral surface, and presses the cylindrical tool member against the surface of the work piece. The recess can be processed. In addition, the cylindrical tool member includes a cylindrical portion forming a fine recess and a cylindrical portion having an elastic body containing fine particles, and the outer periphery of the cylindrical portion with the elastic body is formed as the fine concave portion. Make it larger than the outer periphery of the tube.

このように、上記円筒状工具部材は、微細凹部形成筒部と微細な粒子を含む弾性体付筒部とが双方の機能を発揮させながら回転する構成である。即ち、被加工物表面に微細形状を加工しながらその周辺の研磨も行うので、盛上がりを抑制又はその大きさを低減することができる。よって、微細形状加工工程の後工程での盛上がり除去加工時間を短縮できる。
また、円筒状工具部材のすべりが低減されるので、微細形状のパターンを高精度に加工できる。
Thus, the cylindrical tool member has a configuration in which the fine recessed portion forming cylindrical portion and the elastic-equipped cylindrical portion including fine particles rotate while exhibiting both functions. That is, since the periphery is also polished while processing a fine shape on the surface of the workpiece, the swell can be suppressed or the size thereof can be reduced. Therefore, the swell removal processing time in the subsequent step of the fine shape processing step can be shortened.
In addition, since the sliding of the cylindrical tool member is reduced, a fine pattern can be processed with high accuracy.

また、かかる効果をより向上させる観点からは、上記微細凹部形成筒部と上記弾性体付筒部とが一体で構成され、これらは同一の回転軸により回転することが好適である。   Further, from the viewpoint of further improving the effect, it is preferable that the fine recessed portion forming cylindrical portion and the elastic body-attached cylindrical portion are integrally formed and rotate by the same rotating shaft.

更に、上記微細凹部形成筒部と上記弾性体付筒部とを別体で構成し、これらを同一の回転軸により回転させ、該弾性体付筒部の回転軸の摩擦が該微細凹部形成筒部の回転軸の摩擦より大きくなるようにすることが好適である。
このときは、被加工物と、弾性体の間に大きなすべりを生じさせることができるので、微細な粒子を含んだ弾性体による研磨効果を増大できる。
Further, the fine concave portion forming cylinder portion and the elastic body-attached cylindrical portion are configured separately and rotated by the same rotation shaft, and the friction of the rotation shaft of the elastic body-attached cylindrical portion is the fine concave portion forming cylinder. It is preferable to make it larger than the friction of the rotating shaft of the part.
At this time, since a large slip can be generated between the workpiece and the elastic body, the polishing effect by the elastic body containing fine particles can be increased.

更にまた、同様の観点から、上記微細凹部形成筒部と上記弾性体付筒部とを別体で構成するときは、これらを異なる駆動力により回転させ、該微細凹部形成筒部と該弾性体付筒部とを任意の回転速度で回転できるようにすることも好適である。   Furthermore, from the same viewpoint, when the fine concave portion forming cylindrical portion and the elastic body-equipped cylindrical portion are configured separately, they are rotated by different driving forces, and the fine concave portion forming cylindrical portion and the elastic body are rotated. It is also preferable that the attached tube portion can be rotated at an arbitrary rotation speed.

また、本発明の微細形状加工装置において、上記弾性体付筒部は、上記微細凹部形成筒部に対して、加工時の送り方向の前進側、後進側のいずれか一方又は双方に配設することが好適である。
このときは、弾性体付筒部を前進側に配設することで、微細な粒子を含んだ弾性体が、高硬度な凹凸を有する微細凹部形成筒部が加工する直前の被加工面を研磨することとなるので、前加工面を高精度に調整することができ、微細形状の精度を向上できる。また、弾性体付筒部を前進側に配設することで、微細凹部形成筒部が加工した直後の被加工面を弾性体付筒部が研磨するので、微細形状を加工しながら盛上がりの大きさを抑制することができ、微細形状加工工程の後工程での盛上がり除去加工時間を短縮できる。
Further, in the fine shape processing apparatus of the present invention, the cylindrical portion with an elastic body is disposed on one or both of the forward side and the reverse side in the feed direction during processing with respect to the fine concave portion forming cylindrical portion. Is preferred.
At this time, by arranging the cylindrical portion with an elastic body on the forward side, the elastic body containing fine particles polishes the surface to be processed just before the micro concave portion forming cylindrical portion having high hardness is processed. Therefore, the pre-processed surface can be adjusted with high accuracy, and the accuracy of the fine shape can be improved. In addition, by arranging the cylindrical portion with the elastic body on the forward side, the cylindrical portion with the elastic body polishes the processed surface immediately after the processing of the fine concave portion forming cylindrical portion. Therefore, it is possible to shorten the swell removal processing time in the subsequent step of the fine shape processing step.

更に、上記弾性体付筒部は複数配設することが好適である。
このときは、1回の加工で微細な粒子を含んだ弾性体の研磨効果が複数回得られるので有効である。また、個々の弾性体に含まれる微細粒子の粒度を変えることで、粗加工、仕上げ加工を行うことも可能である。
Furthermore, it is preferable that a plurality of the cylindrical portions with elastic bodies are arranged.
This is effective because the polishing effect of the elastic body containing fine particles can be obtained a plurality of times by one processing. Further, it is possible to perform roughing and finishing by changing the particle size of the fine particles contained in each elastic body.

更にまた、上記弾性体付筒部に含まれる微細粒子は、均一に分散したり、規則的に配列することが好適である。
これにより、弾性体内に微細粒子を均一分散するときは、被加工物と工具(高硬度な凹凸を有する微細凹部形成筒部)の摩擦が大きくなりすべりを更に低減できる。また、弾性体に微細粒子を規則的に配列することで、微細粒子を含んだ弾性体による研磨効果が大きくなりうる。
例えば、微細粒子の大きさは30〜0.1μm程度で用いることができる。
Furthermore, it is preferable that the fine particles contained in the cylindrical portion with the elastic body are uniformly dispersed or regularly arranged.
As a result, when the fine particles are uniformly dispersed in the elastic body, the friction between the workpiece and the tool (the fine recessed portion forming cylindrical portion having high hardness unevenness) is increased, and the slip can be further reduced. Further, by regularly arranging the fine particles on the elastic body, the polishing effect by the elastic body containing the fine particles can be increased.
For example, the fine particles can be used with a size of about 30 to 0.1 μm.

また、上記弾性体付筒部は、外周面に微細な粒子の大きさよりも大きな凹凸を有しており、その凹凸面に微細な粒子が配設されていることが好適である。このときは、微細な粒子を含む弾性体の研磨効果が更に大きくなりうる。
更に、同様の観点から、上記弾性体付筒部に含まれる微細粒子は、例えば、セラミックス、ダイヤモンドのいずれか一方又は双方を用いることが好適である。
更にまた、上記弾性体付筒部に繊維状の物質が含まれていることが好適である。このときは、微細な粒子を含む弾性体の強度が向上しうる。上記繊維状の物質としては、例えば、カーボンファイバー,カーボンナノチューブ,カーボンナノファイバー,ガラスファイバーなどを使用できる。
Moreover, the said cylinder part with an elastic body has an unevenness | corrugation larger than the magnitude | size of a fine particle on an outer peripheral surface, and it is suitable for the fine particle to be arrange | positioned by the uneven surface. At this time, the polishing effect of the elastic body containing fine particles can be further increased.
Further, from the same point of view, it is preferable to use, for example, one or both of ceramics and diamond as the fine particles contained in the cylinder with elastic body.
Furthermore, it is preferable that a fibrous substance is contained in the cylinder portion with the elastic body. At this time, the strength of the elastic body containing fine particles can be improved. Examples of the fibrous substance include carbon fiber, carbon nanotube, carbon nanofiber, and glass fiber.

次に、本発明の第2の微細形状加工装置について説明する。
かかる微細形状加工装置は、上記第1の微細形状加工装置と同様に、外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうるが、以下の点が異なる。
即ち、上記円筒状工具部材は、外周面に凹凸部が形成され、その凸部表面の全面又は一部に微細な粒子が配設されて成る。
このときは、高硬度な凹凸を有する円筒状工具部材の外周に微細な粒子が配設されるので、該円筒状工具部材と被加工物のすべりが低減され、高精度なパターンの微細形状が加工できる。
Next, the second fine shape processing apparatus of the present invention will be described.
Similar to the first fine shape processing apparatus, the fine shape processing apparatus includes a cylindrical tool member having fine irregularities with high hardness on the outer peripheral surface, and presses the cylindrical tool member against the surface of the workpiece. Fine recesses can be processed, but the following points are different.
That is, the cylindrical tool member is formed by forming an uneven portion on the outer peripheral surface and arranging fine particles on the entire surface or a part of the surface of the convex portion.
At this time, since the fine particles are arranged on the outer periphery of the cylindrical tool member having high hardness unevenness, the sliding between the cylindrical tool member and the workpiece is reduced, and the fine shape of the highly accurate pattern is reduced. Can be processed.

次に、本発明の第3の微細形状加工装置について説明する。
かかる微細形状加工装置は、上記第1の微細形状加工装置と同様に、外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうるが、以下の点が異なる。
即ち、上記円筒状工具部材の外周面に凹凸部が形成され、その凸部表面の全面又は一部に微細な粒子を含有する弾性体が配設されて成る。
このときは、高硬度な凹凸を有する円筒状工具部材の外周に微細な粒子を含んだ弾性体が配設されるので、該円筒状工具部材の強度を向上できる
Next, a third fine shape processing apparatus of the present invention will be described.
Similar to the first fine shape processing apparatus, the fine shape processing apparatus includes a cylindrical tool member having fine irregularities with high hardness on the outer peripheral surface, and presses the cylindrical tool member against the surface of the workpiece. Fine recesses can be processed, but the following points are different.
That is, an uneven part is formed on the outer peripheral surface of the cylindrical tool member, and an elastic body containing fine particles is arranged on the entire surface or a part of the surface of the convex part.
At this time, since the elastic body containing fine particles is disposed on the outer periphery of the cylindrical tool member having high hardness unevenness, the strength of the cylindrical tool member can be improved.

次に、本発明の微細形状加工方法について説明する。
本発明は、上述した第1〜3の微細形状加工装置を使用して被加工物表面に微細な凹凸を加工するに当たり、
以下の1〜3工程
1.被加工物表面を弾性体で研磨する被加工面研磨工程、
2.微細凹部形成筒部によって被加工物表面に微細な凹凸を加工する微細凹凸加工工程、
3.微細凹凸形状周辺の盛上がりを研磨ローラで研磨する凸部研磨工程、
より選ばれた少なくとも2つの工程を行う微細形状加工方法である。
Next, the fine shape processing method of the present invention will be described.
The present invention, when processing the fine unevenness on the workpiece surface using the first to third fine shape processing apparatus described above,
The following 1-3 steps Work surface polishing step for polishing the work surface with an elastic body,
2. A fine unevenness processing step for processing fine unevenness on the surface of the work piece by the fine recessed portion forming cylindrical portion,
3. A convex polishing process that polishes the bulge around the fine irregular shape with a polishing roller,
This is a fine shape processing method for performing at least two processes selected from the above.

このような工程を行うことにより、簡単な構成で被加工物と、微細な粒子を含んだ弾性体との間により大きなすべりを生じさせることができ、該弾性体による研磨効果が大きくなる。   By performing such a process, a larger slip can be generated between the workpiece and the elastic body containing fine particles with a simple configuration, and the polishing effect by the elastic body is increased.

次に、本発明の摺動部材について説明する。
本発明の摺動部材は、上述の微細形状加工方法を用いて微細な凹凸を加工して成ることを特徴とする。
これにより、加工した微細形状は潤滑油溜まりとして利用でき、また潤滑油の流れを効率的に制御できるので、摺動部材の摩擦を低減することができる。
Next, the sliding member of the present invention will be described.
The sliding member of the present invention is characterized by processing fine unevenness using the above-described fine shape processing method.
Thereby, the processed fine shape can be used as a lubricating oil reservoir, and the flow of the lubricating oil can be controlled efficiently, so that the friction of the sliding member can be reduced.

代表的には、例えば、微細な凹凸を加工したジャーナル、ピンのいずれか一方又は双方を備えたクランクシャフトや、微細な凹凸を加工したジャーナル、カムロブのいずれか一方又は双方を備えたカムシャフトや、微細な凹凸を加工したジャーナルを備えたバランサシャフトや、微細な凹凸を加工したピストンピンや、微細な凹凸を加工したシリンダボアなどを挙げることができる。   Typically, for example, a crankshaft provided with one or both of a journal processed with fine irregularities, a pin, a camshaft equipped with either a journal or cam lobe processed with fine irregularities, Examples include a balancer shaft having a journal with fine irregularities, a piston pin with fine irregularities, and a cylinder bore with fine irregularities.

ここで、図2に、本発明の一実施形態である微細形状加工装置を用いて摺動部材を加工する際の概略を示す。
この微細形状加工装置は、被加工物1を保持するチャック2と、チャック2を回転させる主軸3と、外周面に微細な凸部を有する円盤状又は円筒状のフォームローラ部4(微細凹部形成筒部)と、フォームローラ部4の外径よりも大きく、フォームローラ部4と一体となり同軸で回転できる研磨ローラ部5(弾性体付筒部)とを有する。また、研磨ローラ部5は、フォームローラ部4の左右に設置され、微細な粒子を含んだ弾性体で構成される(5A及び5B)。
Here, in FIG. 2, the outline at the time of processing a sliding member using the fine shape processing apparatus which is one Embodiment of this invention is shown.
This fine shape processing apparatus includes a chuck 2 that holds a workpiece 1, a main shaft 3 that rotates the chuck 2, and a disk-shaped or cylindrical form roller portion 4 that has a fine convex portion on the outer peripheral surface (a fine concave portion is formed). A cylindrical portion) and a polishing roller portion 5 (a cylindrical portion with an elastic body) that is larger than the outer diameter of the foam roller portion 4 and can rotate coaxially with the foam roller portion 4. The polishing roller unit 5 is installed on the left and right sides of the foam roller unit 4 and is formed of an elastic body containing fine particles (5A and 5B).

また、この微細形状加工装置は、フォームローラ部4及び研磨ローラ部5を回転可能に保持できるアーム6と、フォームローラ部4及び研磨ローラ部5に所定の荷重をかけることができるバネなどの弾性部材で構成される荷重発生部7と、荷重発生部7によって、フォームローラ部4及び研磨ローラ部5にかかっている荷重を測定する荷重測定部8と、アーム6及び荷重発生部7及び荷重測定部8を保持し、図中のX方向、Z方向に移動可能なボディ9とを有する。   In addition, this fine shape processing apparatus includes an arm 6 that can rotatably hold the foam roller unit 4 and the polishing roller unit 5, and an elastic such as a spring that can apply a predetermined load to the foam roller unit 4 and the polishing roller unit 5. A load generating unit 7 composed of members, a load measuring unit 8 for measuring a load applied to the foam roller unit 4 and the polishing roller unit 5 by the load generating unit 7, an arm 6, a load generating unit 7, and a load measurement It has a body 9 that holds the portion 8 and is movable in the X and Z directions in the figure.

この微細形状加工装置を用いた加工方法について説明する。
まず、被加工物1をチャック2に取り付け、回転可能な状態で保持させる。
次いで、フォームローラ部4が加工開始位置の真上になるようにボディ9を移動させる。
その後、ボディ9をZ方向に移動させ、フォームローラ部4及び研磨ローラ部5を被加工物1に所定の荷重で押付ける。続いて、被加工物1の回転と、フォームローラ部4及び研磨ローラ部5の被加工物回転軸方向の移動を開始させ、加工を開始する。
A processing method using this fine shape processing apparatus will be described.
First, the workpiece 1 is attached to the chuck 2 and held in a rotatable state.
Next, the body 9 is moved so that the foam roller unit 4 is directly above the processing start position.
Thereafter, the body 9 is moved in the Z direction, and the foam roller portion 4 and the polishing roller portion 5 are pressed against the workpiece 1 with a predetermined load. Subsequently, the rotation of the workpiece 1 and the movement of the foam roller portion 4 and the polishing roller portion 5 in the workpiece rotation axis direction are started, and the processing is started.

加工の際は、まず図3に示すように、研磨ローラ部5Aが被加工面と接触しながら移動する。このとき、研磨ローラ部5Aはフォームローラ部4の外径よりも大きいため、弾性変形した状態で被加工物1に押付けられているので、押付けられている部位の周速度Vwと押付けられていない部位の周速度Veで速度差が発生し、この速度差によって被加工面を研磨する。   At the time of processing, first, as shown in FIG. 3, the polishing roller portion 5A moves while being in contact with the surface to be processed. At this time, since the polishing roller portion 5A is larger than the outer diameter of the foam roller portion 4, it is pressed against the workpiece 1 in an elastically deformed state, so that it is not pressed against the peripheral speed Vw of the pressed portion. A speed difference occurs at the peripheral speed Ve of the part, and the surface to be processed is polished by this speed difference.

次いで、フォームローラ部4が被加工物1に押付けれられることによって、被加工物に微細な凹部と、その周辺に凸部Xが形成される。そして、その直後に、フォームローラ部4の移動方向で後進側に位置する研磨ローラ5Bが、被加工物1に押付けられながら凸部Xを通過する。研磨ローラ部5Bもフォームローラ部4の外径よりも大きいため、被加工部では弾性変形した状態で被加工物1に押付けられているので、押付けられている部位の周速度Vwと押付けられていない部位の周速度Veで速度差が発生し、この速度差によって凸部Xの全体又は一部を除去する。   Next, when the foam roller portion 4 is pressed against the workpiece 1, a fine concave portion and a convex portion X are formed around the concave portion. Immediately thereafter, the polishing roller 5 </ b> B positioned on the reverse side in the moving direction of the foam roller portion 4 passes through the convex portion X while being pressed against the workpiece 1. Since the polishing roller portion 5B is also larger than the outer diameter of the foam roller portion 4, the workpiece portion is pressed against the workpiece 1 in an elastically deformed state, so that it is pressed against the peripheral speed Vw of the pressed portion. A speed difference is generated at the peripheral speed Ve at a non-existing portion, and all or part of the convex portion X is removed by this speed difference.

ここで、図4に示すように、フォームローラ部4と研磨ローラ部5が別体で回転でき、研磨ローラ部5の回転軸の摩擦が、フォームローラ部4の回転軸の摩擦よりも大きい構造とすることもできる。このときは、研磨ローラ5と被加工物1のすべりが更に大きくなり、凸部Xの除去量が大きくなる。   Here, as shown in FIG. 4, the foam roller portion 4 and the polishing roller portion 5 can rotate separately, and the friction of the rotating shaft of the polishing roller portion 5 is larger than the friction of the rotating shaft of the foam roller portion 4. It can also be. At this time, the slip between the polishing roller 5 and the workpiece 1 is further increased, and the removal amount of the convex portion X is increased.

また、図5に示すように、フォームローラ部4の回転を遊星ギヤなどの回転反転部30を用いて、反転させ、研磨ローラ部5の回転とすることもできる。このときは、被加工物1と研磨ローラ部5のすべりを大幅に増加することができ、更に凸部Xの除去量が大きくなる。   In addition, as shown in FIG. 5, the rotation of the foam roller unit 4 can be reversed by using a rotation reversing unit 30 such as a planetary gear to rotate the polishing roller unit 5. At this time, the slip of the workpiece 1 and the polishing roller portion 5 can be greatly increased, and the removal amount of the convex portion X is further increased.

更に、図6に示すように、フォームローラ部4と研磨ローラ部5を別体で回転できる構造とし、研磨ローラ部を外部の駆動装置10からベルト31などを介して回転させることもできる。このときは、研磨ローラ部5と被加工物1のすべりを更に大きくすることができ、凸部Xの除去量が大きくなる。   Further, as shown in FIG. 6, the foam roller unit 4 and the polishing roller unit 5 can be rotated separately, and the polishing roller unit can be rotated from an external driving device 10 via a belt 31 or the like. At this time, the slip between the polishing roller portion 5 and the workpiece 1 can be further increased, and the removal amount of the convex portion X is increased.

また、研磨ローラ5に含まれる微細な粒子は、均一に分散されていても良いが、図7に示すように、規則的に配置したり、研磨ローラの外周部に粒子の大きさよりも大きな凹凸を形成し、その表面に配置したりすることで、研磨効果をより大きくすることができる。
この微細な粒子はセラミックスやダイヤモンドなどの高硬度な材料であると更に研磨効果が大きくなる。
Further, the fine particles contained in the polishing roller 5 may be uniformly dispersed, but as shown in FIG. 7, the fine particles are regularly arranged, or irregularities larger than the size of the particles on the outer periphery of the polishing roller. The polishing effect can be further increased by forming and arranging on the surface.
If the fine particles are made of a high hardness material such as ceramics or diamond, the polishing effect is further increased.

この加工を被加工面全面に行うことによって、被加工面全面に微細な凹部を形成すると同時に、その周辺部に発生する凸部の大きさを低減又は除去することができる。また、研磨ローラ部5と被加工物1との摩擦が大きくなるので、フォームローラ部4と被加工物1とのすべりが低減され、加工される微細な形状のパターンの精度も向上する。   By performing this processing on the entire surface to be processed, a fine recess can be formed on the entire surface to be processed, and at the same time, the size of the protrusion generated in the peripheral portion can be reduced or removed. Further, since the friction between the polishing roller portion 5 and the workpiece 1 is increased, the slip between the foam roller portion 4 and the workpiece 1 is reduced, and the precision of the fine pattern to be processed is improved.

ここで、フォームローラ部4の外周面は、図8に示すように、微細な粒子を配置することもできる。このときは、フォームローラ部4と被加工物1のすべりを更に低減することができ、加工される微細な形状のパターンの精度が更に向上する。
更に、フォームローラ部4の外周部の一部又は全面に弾性体10を設置することで、フォームローラ部4の破損を低減することもできる。
なお、本実施形態では、研磨ローラ部5が2個の例を示したが、研磨ローラ部は2個以上あってもよい。
Here, fine particles can be arranged on the outer peripheral surface of the foam roller portion 4 as shown in FIG. At this time, the slip of the foam roller part 4 and the workpiece 1 can be further reduced, and the accuracy of the fine pattern to be processed is further improved.
Furthermore, the damage of the foam roller part 4 can also be reduced by installing the elastic body 10 on a part or the whole of the outer peripheral part of the foam roller part 4.
In the present embodiment, an example in which there are two polishing roller portions 5 is shown, but two or more polishing roller portions may be provided.

次に、図9及び図10に、本発明の微細形状加工装置の他の実施形態を用いて摺動部材を加工している概略を示す。
この微細形状加工装置は、研磨ローラ減速部20を備える以外は、上述の微細形状加工装置(図2、図3)と同様の構成を有する。
Next, FIG. 9 and FIG. 10 show an outline of processing a sliding member using another embodiment of the fine shape processing apparatus of the present invention.
This fine shape processing apparatus has the same configuration as the above-described fine shape processing apparatus (FIGS. 2 and 3) except that the polishing roller speed reduction unit 20 is provided.

即ち、まず、図9に示すように、フォームローラ部4を所定の荷重で被加工物1に押付け、被加工面全面に微細な凹凸を加工する。その後、図10に示すように、フォームローラ部4が被加工物1から離間し、研磨ローラ部5のみが被加工物に接触するような押付け荷重とする。その状態で研磨ローラ減速部20を作動させ、研磨ローラ5の回転を減速させ、被加工物1とのすべりを発生させ、被加工面全面を加工することで、被加工面の凸部Xの全体又は一部を除去することができる。また、研磨ローラ5を研磨ローラ減速部20によって固定するとさらに研磨効果は大きくなる。更に、このときに、研磨ローラの移動速度を遅くしたり、被加工面を移動させる回数を多くしたりすることで、凸部Xの除去量を多くすることができる。   That is, first, as shown in FIG. 9, the foam roller portion 4 is pressed against the workpiece 1 with a predetermined load to process fine irregularities on the entire surface to be processed. Thereafter, as shown in FIG. 10, the pressing load is set such that the foam roller portion 4 is separated from the workpiece 1 and only the polishing roller portion 5 is in contact with the workpiece. In this state, the polishing roller speed reduction unit 20 is operated, the rotation of the polishing roller 5 is decelerated, the slip with the workpiece 1 is generated, and the entire processing surface is processed. All or part of it can be removed. Further, when the polishing roller 5 is fixed by the polishing roller speed reducing unit 20, the polishing effect is further increased. Furthermore, at this time, the removal amount of the convex portion X can be increased by slowing the moving speed of the polishing roller or increasing the number of times of moving the work surface.

以上、本発明の微細形状加工装置を2つの実施形態を参照して説明したが、本発明では、円筒形状の外周面に加工するのみならず、円筒状の被加工物の内面に微細形状を加工する場合においても、同様の効果を得ることができる。
また、本発明の微細形状加工装置を用いて微細な凹凸を加工した摺動部材は、例えば、自動車用のクランクやカム、バランサなどの摺動部に適用することができ、加工された微細な形状が潤滑油溜りとして機能したり、潤滑油の流れを制御したりすることができ、その摩擦を低減することができる。
As mentioned above, although the fine shape processing apparatus of this invention was demonstrated with reference to two embodiment, in this invention, not only a cylindrical outer peripheral surface is processed but a fine shape is formed on the inner surface of a cylindrical workpiece. In the case of processing, the same effect can be obtained.
In addition, the sliding member obtained by processing fine irregularities using the fine shape processing apparatus of the present invention can be applied to sliding parts such as a crank, a cam, and a balancer for automobiles. The shape can function as a lubricating oil reservoir, or the flow of lubricating oil can be controlled, and the friction can be reduced.

従来の微細加工装置の一例を示す概略図である。It is the schematic which shows an example of the conventional fine processing apparatus. 本発明の微細形状加工装置の一実施形態を示す概略図である。It is the schematic which shows one Embodiment of the fine shape processing apparatus of this invention. 凸部Xが除去される様子を示す概略図である。It is the schematic which shows a mode that the convex part X is removed. フォームローラ部及び研磨ローラ部の一例を示す概略図である。It is the schematic which shows an example of a foam roller part and a grinding | polishing roller part. フォームローラ部及び研磨ローラ部の他の例を示す概略図である。It is the schematic which shows the other example of a foam roller part and a grinding | polishing roller part. フォームローラ部及び研磨ローラ部の更に他の例を示す概略図である。It is the schematic which shows the further another example of a foam roller part and a grinding | polishing roller part. フォームローラ部構造の一例を示す概略図である。It is the schematic which shows an example of a foam roller part structure. フォームローラ部構造の他の例を示す概略図である。It is the schematic which shows the other example of a foam roller part structure. 本発明の微細形状加工装置の他の実施形態を示す概略図である。It is the schematic which shows other embodiment of the fine shape processing apparatus of this invention. 本発明の微細形状加工装置の更に他の実施形態を示す概略図である。It is the schematic which shows other embodiment of the fine shape processing apparatus of this invention.

符号の説明Explanation of symbols

1 被加工物
2 チャック
3 主軸
4 フォームローラ部
5、5A、5B 研磨ローラ部
6 アーム
7 荷重発生部
8 荷重計測部
9 ボディ
10 駆動装置
20 研磨ローラ減速部
30 回転反転部
DESCRIPTION OF SYMBOLS 1 Workpiece 2 Chuck 3 Main shaft 4 Foam roller part 5, 5A, 5B Polishing roller part 6 Arm 7 Load generating part 8 Load measuring part 9 Body 10 Driving device 20 Polishing roller speed reduction part 30 Rotation reversal part

Claims (20)

外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうる微細形状加工装置において、
上記円筒状工具部材は、微細な凹部を形成する筒部と微細な粒子を含む弾性体を有する筒部とが近設されて成り、該弾性体付筒部の外周が該微細凹部形成筒部の外周より大きいことを特徴とする微細形状加工装置。
In a fine shape processing apparatus provided with a cylindrical tool member having fine irregularities with high hardness on the outer peripheral surface, pressing the cylindrical tool member against the surface of the workpiece, and processing a fine recess,
The cylindrical tool member comprises a cylindrical portion forming a fine recess and a cylindrical portion having an elastic body containing fine particles, and the outer periphery of the cylindrical portion with the elastic body is the fine concave portion forming cylindrical portion. A fine shape processing apparatus characterized in that it is larger than the outer periphery.
上記微細凹部形成筒部と上記弾性体付筒部とが一体で構成され、これらは同一の回転軸により回転することを特徴とする請求項1に記載の微細形状加工装置。   2. The fine shape processing apparatus according to claim 1, wherein the fine concave portion forming cylinder portion and the elastic body-attached cylindrical portion are integrally formed, and are rotated by the same rotation shaft. 上記微細凹部形成筒部と上記弾性体付筒部とが別体で構成され、これらは同一の回転軸により回転し、該弾性体付筒部の回転軸の摩擦が該微細凹部形成筒部の回転軸の摩擦よりも大きいことを特徴とする請求項1に記載の微細形状加工装置。   The fine recessed portion forming cylindrical portion and the elastic body-attached cylindrical portion are configured separately, and rotate by the same rotating shaft, and the friction of the rotating shaft of the elastic body-attached cylindrical portion is caused by the fine recessed portion forming cylindrical portion. The fine shape processing apparatus according to claim 1, wherein the fine shape processing apparatus is larger than the friction of the rotating shaft. 上記微細凹部形成筒部と上記弾性体付筒部とが別体で構成され、これらは異なる駆動力により回転し、該微細凹部形成筒部と該弾性体付筒部とが任意の回転速度で回転できることを特徴とする請求項1に記載の微細形状加工装置。   The fine concave portion forming cylindrical portion and the elastic body-attached cylindrical portion are configured separately, and these are rotated by different driving forces, and the fine concave portion forming cylindrical portion and the elastic body-equipped cylindrical portion are at an arbitrary rotational speed. The fine shape processing apparatus according to claim 1, wherein the apparatus can be rotated. 上記弾性体付筒部が上記微細凹部形成筒部に対して、加工時の送り方向の前進側及び/又は後進側に配設されていることを特徴とする請求項1〜4のいずれか1つの項に記載の微細形状加工装置。   The said cylinder part with an elastic body is arrange | positioned with respect to the said fine recessed part formation cylinder part in the advance side and / or reverse side of the feed direction at the time of a process, The any one of Claims 1-4 characterized by the above-mentioned. The fine shape processing apparatus according to one of the items. 上記弾性体付筒部が複数配設されていることを特徴とする請求項1〜5のいずれか1つの項に記載の微細形状加工装置。   The fine shape processing apparatus according to any one of claims 1 to 5, wherein a plurality of the cylindrical portions with elastic bodies are arranged. 上記弾性体付筒部に含まれている微細な粒子が均一に分散されていることを特徴とする請求項1〜6のいずれか1つの項に記載の微細形状加工装置。   The fine shape processing apparatus according to any one of claims 1 to 6, wherein fine particles contained in the cylindrical portion with an elastic body are uniformly dispersed. 上記弾性体付筒部に含まれている微細な粒子が規則的に配列されていることを特徴とする請求項1〜7のいずれか1つの項に記載の微細形状加工装置。   The fine shape processing apparatus according to any one of claims 1 to 7, wherein the fine particles included in the cylinder portion with the elastic body are regularly arranged. 上記弾性体付筒部は、外周面に微細な粒子の大きさよりも大きな凹凸を有しており、その凹凸面に微細な粒子が配設されていることを特徴とする請求項1〜8のいずれか1つの項に記載の微細形状加工装置。   The said cylinder part with an elastic body has an unevenness | corrugation larger than the magnitude | size of a fine particle on an outer peripheral surface, and the fine particle is arrange | positioned by the uneven surface. The fine shape processing apparatus according to any one of the items. 上記弾性体付筒部に含まれている微細な粒子がセラミックス及び/又はダイヤモンドであることを特徴とする請求項1〜9のいずれか1つの項に記載の微細形状加工装置。   The fine shape processing apparatus according to any one of claims 1 to 9, wherein the fine particles contained in the cylindrical portion with an elastic body are ceramics and / or diamond. 上記弾性体付筒部に繊維状の物質が含まれていることを特徴とする請求項1〜10のいずれか1つの項に記載の微細形状加工装置。   The fine shape processing apparatus according to any one of claims 1 to 10, wherein a fibrous substance is included in the cylindrical portion with an elastic body. 外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうる微細形状加工装置において、
上記円筒状工具部材は、外周面に凹凸部が形成され、その凸部表面の全面又は一部に微細な粒子が配設されていることを特徴とする微細形状加工装置。
In a fine shape processing apparatus provided with a cylindrical tool member having fine irregularities with high hardness on the outer peripheral surface, pressing the cylindrical tool member against the surface of the workpiece, and processing a fine recess,
The cylindrical tool member is characterized in that an uneven portion is formed on the outer peripheral surface, and fine particles are disposed on the entire surface or a part of the surface of the convex portion.
外周面に高硬度な微細凹凸を有する円筒状の工具部材を備え、該円筒状工具部材を被加工物の表面に押付け、微細な凹部を加工しうる微細形状加工装置において、
上記円筒状工具部材は、外周面に凹凸部が形成され、その凸部表面の全面又は一部に微細な粒子を含有する弾性体が配設されていることを特徴とする微細形状加工装置。
In a fine shape processing apparatus provided with a cylindrical tool member having fine irregularities with high hardness on the outer peripheral surface, pressing the cylindrical tool member against the surface of the workpiece, and processing a fine recess,
The cylindrical tool member is characterized in that an uneven portion is formed on the outer peripheral surface, and an elastic body containing fine particles is disposed on the entire surface or a part of the surface of the convex portion.
請求項1〜13のいずれか1つの項に記載の微細形状加工装置を使用して被加工物表面に微細な凹凸を加工するに当たり、
以下の1〜3工程
1.被加工物表面を弾性体で研磨する被加工面研磨工程、
2.微細凹部形成筒部によって被加工物表面に微細な凹凸を加工する微細凹凸加工工程、
3.微細凹凸形状周辺の盛上がりを弾性体で研磨する凸部研磨工程、
より選ばれた少なくとも2つの工程を行うことを特徴とする微細形状加工方法。
In processing fine irregularities on the workpiece surface using the fine shape processing apparatus according to any one of claims 1 to 13,
The following 1-3 steps Work surface polishing step for polishing the work surface with an elastic body,
2. A fine unevenness processing step for processing fine unevenness on the surface of the work piece by the fine recessed portion forming cylindrical portion,
3. A convex polishing process that polishes the bulge around the fine uneven shape with an elastic body,
A method of processing a fine shape, comprising performing at least two steps selected from the above.
請求項14に記載の微細形状加工方法を用いて微細な凹凸を加工したことを特徴とする摺動部材。   A sliding member obtained by processing fine irregularities using the fine shape processing method according to claim 14. 微細な凹凸を加工したジャーナル及び/又はピンを備えたクランクシャフトであることを特徴とする請求項15に記載の摺動部材。   The sliding member according to claim 15, wherein the sliding member is a crankshaft including a journal and / or a pin processed with fine irregularities. 微細な凹凸を加工したジャーナル及び/又はカムロブを備えたカムシャフトであることを特徴とする請求項15に記載の摺動部材。   The sliding member according to claim 15, wherein the sliding member is a camshaft including a journal and / or a cam lobe in which fine irregularities are processed. 微細な凹凸を加工したジャーナルを備えたバランサシャフトであることを特徴とする請求項15に記載の摺動部材。   The sliding member according to claim 15, wherein the sliding member is a balancer shaft provided with a journal in which fine irregularities are processed. 微細な凹凸を加工したピストンピンであることを特徴とする請求項15に記載の摺動部材。   The sliding member according to claim 15, wherein the sliding member is a piston pin processed with fine irregularities. 微細な凹凸を加工したシリンダボアであることを特徴とする請求項15に記載の摺動部材。   The sliding member according to claim 15, wherein the sliding member is a cylinder bore processed with fine irregularities.
JP2006183971A 2006-07-04 2006-07-04 Fine shape processing apparatus, fine shape processing method, and sliding member Expired - Fee Related JP4876740B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006183971A JP4876740B2 (en) 2006-07-04 2006-07-04 Fine shape processing apparatus, fine shape processing method, and sliding member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006183971A JP4876740B2 (en) 2006-07-04 2006-07-04 Fine shape processing apparatus, fine shape processing method, and sliding member

Publications (2)

Publication Number Publication Date
JP2008012549A true JP2008012549A (en) 2008-01-24
JP4876740B2 JP4876740B2 (en) 2012-02-15

Family

ID=39070100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006183971A Expired - Fee Related JP4876740B2 (en) 2006-07-04 2006-07-04 Fine shape processing apparatus, fine shape processing method, and sliding member

Country Status (1)

Country Link
JP (1) JP4876740B2 (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4954994A (en) * 1973-04-24 1974-05-28
JPS502476B1 (en) * 1970-11-10 1975-01-27
JPS5566015A (en) * 1978-11-13 1980-05-19 Nec Corp Shared line state detection system
JPS5758926A (en) * 1980-09-26 1982-04-09 Mitsubishi Heavy Ind Ltd Method and apparatus for forming cylindrical work
JPS57112914A (en) * 1980-12-29 1982-07-14 Mitsubishi Metal Corp Shaping device for outer and inner surface of metallic pipe
JPS62162475A (en) * 1986-01-08 1987-07-18 Toshiba Corp Brush
JPS6471060A (en) * 1987-09-10 1989-03-16 Ejison Watanabe Separator for sealed lead-acid battery
JPH01257555A (en) * 1988-04-04 1989-10-13 Toshiba Corp Grinder
JP2004188493A (en) * 2002-05-10 2004-07-08 Hokkai Can Co Ltd Method and apparatus for forming outline of can shell
JP2005525937A (en) * 2002-01-17 2005-09-02 マッシー, ヨハン Method for producing products having various diameters and molding machine therefor

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502476B1 (en) * 1970-11-10 1975-01-27
JPS4954994A (en) * 1973-04-24 1974-05-28
JPS5566015A (en) * 1978-11-13 1980-05-19 Nec Corp Shared line state detection system
JPS5758926A (en) * 1980-09-26 1982-04-09 Mitsubishi Heavy Ind Ltd Method and apparatus for forming cylindrical work
JPS57112914A (en) * 1980-12-29 1982-07-14 Mitsubishi Metal Corp Shaping device for outer and inner surface of metallic pipe
JPS62162475A (en) * 1986-01-08 1987-07-18 Toshiba Corp Brush
JPS6471060A (en) * 1987-09-10 1989-03-16 Ejison Watanabe Separator for sealed lead-acid battery
JPH01257555A (en) * 1988-04-04 1989-10-13 Toshiba Corp Grinder
JP2005525937A (en) * 2002-01-17 2005-09-02 マッシー, ヨハン Method for producing products having various diameters and molding machine therefor
JP2004188493A (en) * 2002-05-10 2004-07-08 Hokkai Can Co Ltd Method and apparatus for forming outline of can shell

Also Published As

Publication number Publication date
JP4876740B2 (en) 2012-02-15

Similar Documents

Publication Publication Date Title
US5664991A (en) Microfinishing and roller burnishing machine
RU81915U1 (en) DEVICE FOR FINISHING THE MIRROR OF THE INTERNAL COMBUSTION ENGINE CYLINDER
JP2008512255A (en) How to machine rotating parts
JP2018202578A (en) Superfinishing method for groove and manufacturing method for bearing
JP2005169496A (en) Micro-roll forming device of substantially columnar member
JP4812488B2 (en) Super finishing method of roller bearing raceway
JP4894753B2 (en) Super finishing whetstone and super finishing method using the same
US20210101244A1 (en) Narrow shoe journal microfinishing apparatus and method
JP4876740B2 (en) Fine shape processing apparatus, fine shape processing method, and sliding member
JP2007260830A (en) Device for super-finishing bearing ring of roller bearing
JPH0551425B2 (en)
JP4389554B2 (en) Super finishing equipment
CN105538126B (en) A kind of ultra-precision machine swing head mechanism
JP2007168048A (en) Working method of taper surface of part for continuously variable transmission
JP5852596B2 (en) Grinding apparatus and grinding method
JP4678219B2 (en) Micro recess processing equipment
JP3812401B2 (en) Gear tooth surface processing method and apparatus
JP5322020B2 (en) Micro recess processing equipment
JP2006123068A (en) Cylinder block honing device
JP2005271037A (en) Method and apparatus for machining minute recess
JP3985700B2 (en) Roller burnishing method
JP2006075966A (en) Polishing device and method of crank shaft
JP2008114346A (en) Finishing method and device of fine recessed part
KR101981481B1 (en) Solenoid body polishing device for automobile transmissions
JP2006326669A (en) Apparatus for forming fine recessed parts

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090326

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110704

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110726

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110926

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111101

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111114

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141209

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees