JP2008011138A - Processing tray of frequency adjusting apparatus for piezoelectric vibrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a processing tray of a frequency adjusting apparatus for a piezoelectric vibrator, capable of performing frequency adjustment of the piezoelectric vibrator, and cleaning a sealing surface and the inside of a package. <P>SOLUTION: The frequency adjusting apparatus irradiates an ion beam at a piezoelectric vibration chip of a piezoelectric vibrator and adjusts the frequency of the piezoelectric vibrator. The apparatus comprises a processing tray 10 on which the piezoelectric vibrator is placed. The processing tray 10 comprises an accommodation hole 11, formed in a rectangular form bigger than the outer shape of the piezoelectric vibrator package, and a projection 12 formed on one surface of the processing tray 10 and projected from the four corners of the accommodation hole 11 so as to engage with the piezoelectric vibrator package. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a processing tray of a frequency adjusting device for a piezoelectric vibrator that is used in a frequency adjusting device for a piezoelectric vibrator using an ion etching technique and on which a piezoelectric vibrator is placed during ion etching.

Conventionally, a method is known in which an excitation beam formed on a piezoelectric vibrating piece of a piezoelectric vibrator is irradiated with an ion beam, the excitation electrode is shaved by ion etching, and the frequency of the piezoelectric vibrator is adjusted. For example, Patent Literature 1 discloses a frequency adjustment device for a piezoelectric vibrator (hereinafter also referred to as an f-adjustment device) by ion etching. As shown in FIG. 5A, this f-adjusting device holds the ion gun 100 that is the source of the ion beam and the piezoelectric vibrator 120 disposed above the ion gun 100 and moves it in a specified direction by the tray moving means 103. A possible processing tray 110, a mask 102 for restricting the ion beam, and a shutter 101 for controlling the irradiation of the ion beam are provided between the ion gun 100 and the processing tray 110.
In such an f-adjustment apparatus, the ion beam irradiated from the ion gun 100 is irradiated to the piezoelectric vibrating piece 126 of the piezoelectric vibrator 120 through the slit of the mask 102 by opening the shutter 101. Then, the excitation electrode formed on the piezoelectric vibrating piece 126 is etched and adjusted to increase the frequency. Meanwhile, the frequency is measured by the frequency measuring device 104, and when the desired value is reached, the shutter 101 is closed and the frequency of the piezoelectric vibrator 120 is adjusted to a specified value.
FIG. 5B is a plan view of the processing tray 110 viewed from the bottom side. The processing tray 110 is provided with a storage hole 112 in which a plurality of piezoelectric vibrator packages 121 can be stored, and an opening hole 111 is provided on one surface corresponding to the excitation electrode of each piezoelectric vibrating piece 126. The excitation electrode of the piezoelectric vibrating piece 126 is irradiated with an ion beam through the opening hole 111. As described above, the processing tray 110 holds the piezoelectric vibrator downward (so that the piezoelectric vibrating piece 126 faces the ion gun 100) and enables frequency adjustment by ion etching.

Japanese Patent Laying-Open No. 2005-223893 (FIG. 8)

In the manufacturing process of the piezoelectric vibrator, after the frequency adjusting process by the above-described f-adjustment device is finished, the process proceeds to a process of sealing the piezoelectric vibrating piece by joining the lid to the piezoelectric vibrator package by seam welding or the like.
In this hermetic sealing process, when the sealing surface is dirty, there is a problem that good bonding is not performed and the hermeticity cannot be maintained. In addition, when there is dirt or the like inside the piezoelectric vibrator package that is hermetically sealed, the frequency aging characteristics of the piezoelectric vibrator after hermetic sealing may be deteriorated.
In order to remove these stains, it may be possible to provide a wet or dry cleaning step before the hermetic sealing step, but this increases the number of steps.
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an object of the present invention is to adjust the frequency of the piezoelectric vibrator, and to adjust the frequency of the piezoelectric vibrator that can clean the sealing surface and the inside of the package. The object is to provide a processing tray for the apparatus.

  In order to solve the above-described problems, the present invention is provided in a frequency adjustment device for a piezoelectric vibrator that irradiates a piezoelectric vibrating piece of a piezoelectric vibrator with an ion beam to adjust the frequency of the piezoelectric vibrator, and the piezoelectric vibration A processing tray of a frequency adjustment device for a piezoelectric vibrator on which a child is placed, wherein the processing tray has a storage hole formed in a rectangular shape larger than the outer shape of the piezoelectric vibrator, and one surface of the processing tray And a protrusion formed so as to protrude from the four corners of the storage hole so that the piezoelectric vibrator is locked.

According to this configuration, the processing tray of the present invention is configured such that the piezoelectric vibrator is locked by the protrusions protruding from the four corners of the storage hole. When the piezoelectric vibrator is placed on the processing tray, the piezoelectric vibrating piece, the piezoelectric vibrator package, the sealing surface, and the like are exposed except for the portion that is applied to the protrusion. When the ion beam is irradiated to the piezoelectric vibrator in this state, the excitation electrode formed on the piezoelectric vibrating piece is ion-etched and the inside and the sealing surface of the piezoelectric vibrator package are cleaned.
As described above, the present invention can obtain the processing tray of the frequency adjusting device for a piezoelectric vibrator that can adjust the frequency of the piezoelectric vibrator and clean the inside and the sealing surface of the piezoelectric vibrator package. .

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.
(Embodiment)

1A and 1B are explanatory views showing a storage portion of a piezoelectric vibrator in a processing tray according to the present embodiment. FIG. 1A is a schematic partial plan view, and FIG. 1B is a broken line AA in FIG. FIG.
A plate-like processing tray 10 made of a metal material such as stainless steel is formed with a housing hole 11 that is formed larger than the outer shape of the piezoelectric vibrator package and that houses the piezoelectric vibrator.
On one surface of the processing tray 10, rectangular protrusions 12 that protrude from the four corners of the storage hole 11 toward the center of the storage hole 11 are formed. The protrusion 12 is configured such that the piezoelectric vibrator is locked by the protrusion 12 when the piezoelectric vibrator is placed on the processing tray 10.
Although one part of the storage hole 11 is shown and described in FIG. 1, a plurality of storage holes 11 are connected to the processing tray 10 to constitute one processing tray 10. Moreover, the arrangement | positioning of the storage hole 11 in the process tray 10 may be provided continuously in one direction, or may be provided in matrix form.

Next, a state where the piezoelectric vibrator is placed on the processing tray 10 will be described.
First, the piezoelectric vibrator will be described with reference to FIG. 3A is a schematic plan view showing the configuration of the piezoelectric vibrator, and FIG. 3B is a cross-sectional view taken along the line BB in FIG. 3A.
The piezoelectric vibrator 20 includes a piezoelectric vibrating piece 25 and a piezoelectric vibrator package 21 that accommodates the piezoelectric vibrating piece 25.
The piezoelectric vibrating piece 25 is made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate, and excitation electrodes 26 are formed on the main surfaces of the front and back surfaces.
In the piezoelectric vibrator package 21, a metal ring 23 made of kovar or the like is fixed to an insulating substrate 22 on which ceramics or the like are laminated, and a recess for accommodating the piezoelectric vibrating piece 25 is formed. A connection pad 24 is provided on the bottom surface of the recess, and the connection pad 24 and the piezoelectric vibrating piece 25 are connected to each other through a conductive adhesive 27. Further, the upper surface of the metal ring 23 is formed flat in order to join a lid or the like and hermetically seal it.
The piezoelectric vibrator 20 referred to here is in a state in the process of adjusting the frequency, and is in a state in which the piezoelectric vibrating piece 25 is exposed before the step of hermetically sealing with the lid.

FIG. 2 shows a state where the piezoelectric vibrator is placed on the processing tray, FIG. 2 (a) is a schematic partial sectional view, and FIG. 2 (b) is a partial plan view of the processing tray viewed from the bottom side. .
The processing tray 10 is placed so that the exposed surface of the piezoelectric vibrating piece 25 of the piezoelectric vibrator 20 faces downward. The accommodation hole 11 is formed to be larger than the outer shape of the piezoelectric vibrator package 21 and is configured to accommodate the piezoelectric vibrator 20. Further, since one protrusion (bottom surface) of the processing tray 10 is formed with protrusions 12 protruding from the four corners of the storage hole 11 toward the center of the storage hole 11, the protrusion 12 and the piezoelectric vibrator package 21 are formed. The four rings on the upper surface of the metal ring 23 are in contact with each other, and the piezoelectric vibrator 20 is locked.

The processing tray 10 of the present embodiment is configured such that the piezoelectric vibrator package 21 is locked by the protrusions 12 protruding from the four corners of the storage hole 11. When the piezoelectric vibrator package 21 is placed on the processing tray 10, the piezoelectric vibrating piece 25, the piezoelectric vibrator package 21, the sealing surface of the metal ring 23, etc. are exposed, except for the portion that hangs on the protrusion 12. . When the ion beam is irradiated toward the processing tray 10 in this state, the excitation electrode 26 formed on the piezoelectric vibrating piece 25 is ion-etched and the ion beam is applied to the inside of the piezoelectric vibrator package 21 and the sealing surface of the metal ring 23. Hit and washed.
As described above, in the present embodiment, the frequency adjustment of the piezoelectric vibrator 20 is performed, and the processing tray 10 of the piezoelectric vibrator frequency adjusting device that can clean the inside and the sealing surface of the piezoelectric vibrator package 21 is provided. Obtainable.

Then, by adjusting the frequency of the piezoelectric vibrator 20 using the processing tray 10, the sealing surface of the metal ring 23 is cleaned together with the frequency adjustment. At this time, the four corners of the metal ring 23 are blocked by the protrusions 12 and cannot be cleaned. However, in a method such as seam welding that performs sealing by scanning the metal roller in the vertical and horizontal directions, the four corners of the sealing surface are provided. In this case, the roller passes twice, and a minute dirt does not affect the bonding property of the seal. Thus, it is possible to improve the joining property of sealing by using the processing tray 10 of this embodiment.
Furthermore, since the inside of the piezoelectric vibrator package 21 is also cleaned at the same time, the frequency aging characteristics of the piezoelectric vibrator 20 after sealing can be improved.
(Modification)

Next, a modified example of the shape of the protrusion in the processing tray for locking the piezoelectric vibrator will be described. In this modification, the shape of the storage hole is the same as that of the above embodiment, and only the shape of the protrusion is different.
FIGS. 4A to 4C are schematic plan views illustrating modifications of the shape of the protruding portion for locking the piezoelectric vibrator in the processing tray of the present embodiment.
In FIG. 4A, the processing tray 30 is configured such that the piezoelectric vibrator package is locked by the triangular protrusions 32 protruding from the four corners of the storage hole 31.
In FIG. 4B, the processing tray 40 is configured such that the piezoelectric vibrator package is locked by arc-shaped protrusions 42 protruding from the four corners of the storage hole 41.
In FIG. 4C, the processing tray 50 is configured such that the piezoelectric vibrator package is locked by tapered protrusions 52 protruding from the four corners of the storage hole 51.

As described above, various shapes can be taken into consideration so that the shape of the protrusions on the processing tray can be locked to the piezoelectric vibrator package, and can be appropriately changed.
As described above, also in this modification, the frequency adjustment of the piezoelectric vibrator is performed similarly to the above embodiment, and the inside and the sealing surface of the piezoelectric vibrator package can be cleaned. The processing trays 30, 40, 50 of the apparatus can be obtained.

It is explanatory drawing which shows the accommodating part of the piezoelectric vibrator in the processing tray of this embodiment, (a) is a schematic partial top view, (b) is a fragmentary sectional view in alignment with the AA disconnection of (a). The state which mounted the piezoelectric vibrator in the process tray of this embodiment is shown, (a) is a schematic fragmentary sectional view, (b) is the partial top view seen from the bottom face side. It is a block diagram which shows the structure of a piezoelectric vibrator, (a) is a schematic plan view, (b) is sectional drawing which follows the BB disconnection of (a). The top view of the process tray which shows the modification of this embodiment. It is explanatory drawing explaining a prior art, (a) is a schematic explanatory drawing of the frequency adjustment apparatus for piezoelectric vibrators, (b) is the top view which looked at the process tray in which the piezoelectric vibrator was mounted from the bottom face.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Processing tray, 11 ... Storage hole, 12 ... Protrusion part, 20 ... Piezoelectric vibrator, 21 ... Piezoelectric vibrator package, 22 ... Insulating substrate, 23 ... Metal ring, 25 ... Piezoelectric vibrating piece, 26 ... Excitation electrode

Claims (1)

A frequency adjustment device for a piezoelectric vibrator that is provided in a frequency adjustment device for a piezoelectric vibrator that adjusts the frequency of the piezoelectric vibrator by irradiating the piezoelectric vibration piece of the piezoelectric vibrator with an ion beam, and the piezoelectric vibrator is mounted A processing tray of the device,
A storage hole formed in the processing tray in a rectangular shape larger than the outer shape of the piezoelectric vibrator;
A frequency adjustment device for a piezoelectric vibrator having a protrusion formed on one surface of the processing tray so as to protrude from the four corners of the storage hole so that the piezoelectric vibrator is locked. Processing tray.

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