JP2008010586A - Apparatus for transporting member, and electronic component mounting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for transporting member which can be driven to open or close a pair of clamper mechanisms in mechanical synchronism therewith. <P>SOLUTION: The apparatus for transporting member comprises a driving screw shaft 9 for driving a pair of members 7 provided to a base member 5 to be moved toward or away from each other, a guide rail 22 for guiding a substrate, a pair of feeding movable members provided to the member movable in their widthwise direction, a feeding screw shaft 43 for driving the feeding movable members so as to reciprocate, a spline shaft 23 coupled at its one end to an opening/closing drive source 25 provided to one of the feeding movable members and coupled at the other end to the other feeding movable member to be rotated and slid in its axial direction, a pair of cams 26, 27 one of which is fixed to the spline shaft and is movable in the axial direction of the spline shaft to be operatively connected with the movement of the pair of members movable in the width direction, and upper and lower clampers 31, 35 provided to the pair of feeding movable members respectively to be driven in a closing direction by the cams and to hold the substrate when the spline shaft is rotated. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a transport apparatus that transports a transported member such as a substrate or a carrier tape, and an electronic component mounting apparatus using the transport apparatus.

  When an electronic component is mounted on a transported member such as a substrate or a carrier tape by a mounting unit, the transported member is transported by a transport device. The transport device includes a pair of guide rails that support both ends of the transported member in the width direction.

  Both ends of the transported member guided by the guide rail are clamped by a pair of left and right clamper mechanisms. The clamper mechanism has a pair of upper and lower clampers that are driven to open and close, and is driven in the forward direction while being driven in the closing direction and sandwiching both ends in the width direction of the transported member.

  At the forward position, the pair of upper and lower clampers are driven in the opening direction to release the clamped state of the transported member. Then, it is repeated that the pair of left and right clamper mechanisms are driven in the backward direction. Accordingly, the transported member is sent in the forward direction along the guide rail.

On the other hand, when the type of the transported member is changed, the width dimension of the transported member may be different. In that case, the distance between the pair of left and right clamper mechanisms is adjusted so as to cope with a change in the width dimension of the conveyed member. Such a conveying apparatus is shown in Patent Document 1.
JP 2004-193182 A

  Incidentally, the transport device disclosed in Patent Document 1 has a configuration in which a pair of left and right clamper mechanisms are opened and closed by separate clamper opening and closing motors. The pair of left and right clamper mechanisms must be set to operate synchronously.

  However, when the pair of left and right clamper mechanisms are configured to be opened and closed by separate clamper opening / closing motors, the pair of left and right clamper mechanisms must be adjusted not only mechanically but also electrically synchronized. Therefore, the adjustment work is complicated and takes a lot of time and effort.

  In addition, since separate clamper opening / closing motors are used to operate the pair of clamper mechanisms, the number of motors increases, resulting in a complicated configuration and an increase in cost.

  Further, when the width dimension of the conveyed member is changed, one clamper opening / closing mechanism and the guide rail are moved in the width direction by the width adjusting mechanism to cope with the change. Therefore, when the width dimension of the transported member is changed, the center position in the width direction of the transported member transported according to the width dimension is shifted from the position serving as the reference of the transport apparatus.

  Therefore, when the width dimension of the transported member is changed, various devices provided before and after the transporting device, for example, a carry-in mechanism for transporting the transported member to the transporting device and a transported member transported and positioned by the transporting device are electronically transmitted. Since the center position of the mounting part on which the component is mounted has to be changed, the change work may require a lot of work.

  According to the present invention, the pair of left and right clamper mechanisms can be driven by one mechanism, and the center position in the width direction of the transported member changes when the width dimension of the transported member is changed. It is an object of the present invention to provide a transfer device that can be transferred without any problem and a mounting device using the transfer device.

The present invention is a transport device for transporting a transported member,
A base member;
A pair of movable members in the width direction provided on the base member so as to be movable along a width direction intersecting the feeding direction of the transported member;
A width direction drive mechanism for driving a pair of width direction movable members in an approach direction and a separation direction symmetrically with respect to a predetermined center line;
A guide rail provided in each width direction movable member for guiding the transported member in a direction intersecting the width direction;
A pair of movable movable members provided on each movable member in the width direction so as to be movable along the feed direction of the transported member intersecting the width direction;
A feed direction drive mechanism that reciprocally drives a pair of feed movable members along the feed direction of the transported member;
A spline shaft having one end connected to an open / close drive source provided on one feed movable member and the other end rotatably provided to the other feed movable member and slidable in the axial direction;
One of the spline shafts is provided at one end and the other end of the spline shaft. One of the spline shafts is fixed to the spline shaft, and the other is integrally movable with the feed movable member in the axial direction of the spline shaft. A pair of cam bodies interlocking with the movement when the movable member is driven in the approaching direction or the separating direction;
A member to be conveyed that is provided on each of the pair of movable movable members and is held on the guide rail when the spline shaft is rotated and opened and closed in the vertical direction and driven in the closing direction via the cam body. And a pair of clamper mechanisms each having an upper clamper and a lower clamper for sandwiching both end portions in the width direction.

  The said width direction drive mechanism has a right-hand thread part and a left-hand thread part, one screw part is screwed into the nut body provided in one width direction movable member, and the other thread part is the other width direction movable member. A drive screw shaft that is screwed into a nut body provided on the shaft, and rotationally drives the drive screw shaft in the forward direction or the reverse direction to drive the pair of width direction movable members in the approach direction or the separation direction. It is preferable that the width adjusting drive source is configured.

  The cam body is composed of an upper cam and a lower cam provided on the spline shaft with the top dead center and the bottom dead center shifted by 180 degrees, and the upper cam is driven by rotating the spline shaft. It is preferable that the upper clamper and the lower clamper of the clamper mechanism are respectively driven in the opposite directions by the upper and lower cams.

The other end of the spline shaft is inserted and supported so as to be slidable in the axial direction on a spline nut provided rotatably on the movable movable member.
It is preferable that the other cam body is integrally attached to the spline nut.

  It is preferable that the feed direction drive mechanism can change the reciprocating stroke of the pair of feed movable members according to the length of the transported member.

The present invention is a mounting apparatus for mounting an electronic component on a transported member,
A mounting portion for mounting the electronic component on the transported member;
A first transport device that transports the member to be transported to the mounting unit in a direction to carry in;
A second transport device that transports the transport member on which the electronic component is mounted in the mounting unit in a direction of unloading from the mounting unit;
The first and second transport apparatuses are in an electronic component mounting apparatus having the structure described in claim 1.

  According to the present invention, the spline shaft is provided on the pair of movable movable members, and the cam body for opening and closing the clamper mechanism is provided at one end and the other end of the spline shaft, respectively, so that the spline shaft is driven to rotate. Thus, the pair of left and right clamper mechanisms can be driven in synchronization.

  In addition, since the pair of width direction movable members are driven in the contact / separation direction symmetrically with respect to a predetermined center line by the width direction drive mechanism, even if the width dimension of the transported member is changed, each width direction movable member The center position does not change in the width direction of the transported member transported by the pair of guide rails provided.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 shows a mounting device in which a first transport device 2 and a second transport device 3 are arranged in a row with the mounting portion 1 interposed therebetween, and the mounting device is shown in FIGS. 5 (a) and 5 (b). In addition, an electronic component P such as a semiconductor chip can be mounted on a substrate W having a predetermined length as a transported member. One electronic component P may be mounted on the substrate W as shown in FIG. 5A, or a plurality of electronic components may be mounted at predetermined intervals as shown in FIG. 5B.

  The first transport device 2 transports the substrate W supplied from the previous process to the mounting unit 1 as described later. The mounting portion 1 is a backup tool 1a that receives the substrate W that is transported and positioned by the first transport device 2, and a mounting tool that mounts the electronic component P on a portion of the substrate W supported by the backup tool 1a (see FIG. (Not shown). And the said board | substrate W with which the electronic component P was mounted is carried out to the following process by the said 2nd conveying apparatus 3. FIG.

  Next, the first transfer device 2 and the second transfer device 3 will be described. In addition, since the 1st, 2nd conveying apparatuses 2 and 3 are the same structures, one conveying apparatus is demonstrated. That is, each transport device 2, 3 has a rectangular base member 5. A pair of first linear guides 6 are provided on the upper surface of the base member 5 at a predetermined interval with respect to the transport direction of the substrate W indicated by an arrow X in FIG. 1 and along a direction orthogonal to the transport direction. .

  The pair of first linear guides 6 are provided with a pair of width direction movable members 7 by slidably engaging receiving members 7a provided at both ends in the longitudinal direction of these lower surfaces. FIG. 2 is a plan view showing a pair of width direction movable members 7 provided on the base member 5. Nut bodies 8 a and 8 b are provided on the lower surface of the central portion in the longitudinal direction of each width direction movable member 7. One nut body 8a has a right female thread, and the other nut body 8b has a left female thread.

  A right male screw portion 9a and a left male screw portion 9b formed on a drive screw shaft 9 provided along the width direction of the base member 5 are respectively screwed into the pair of nut bodies 8a and 8b. One end of the drive screw shaft 9 is rotatably supported by a first support portion 11 erected at one end in the width direction of the base member 5, and the other end is provided at the other end in the width direction of the base member 5. The second support portion 12 is rotatably supported.

  The other end of the drive screw shaft 9 supported by the second support portion 12 is connected to the output shaft 14 a of the width adjusting drive source 14 via a coupling 13. As a result, when the width adjusting drive source 14 rotates the drive screw shaft 9 in the forward direction (right direction), the pair of width direction movable members 7 are driven away from each other via the pair of nut bodies 8a and 8b. If the drive screw shaft 9 is rotated in the reverse direction (left direction), the pair of width direction movable members 7 are driven in the approaching direction.

The width adjusting drive source 14, the drive screw shaft 9, and the pair of nut bodies 8a and 8b constitute a width direction drive mechanism that drives the pair of width direction movable members 7 in a contacting and separating direction.
A handle 15 is provided at one end of the drive screw shaft 9 supported by the first support portion 11. The drive screw shaft 9 can be manually rotated by the handle 15.

  On the upper surface of the pair of width direction movable members 7, as shown in FIG. 4, the second linear guide 18 is orthogonal to the first linear guide 6 and excludes one longitudinal end portion of the width direction movable member 7. It is provided over the entire length of the part. The second linear guide 18 is provided with a feed movable member 19 by slidably engaging a receiving member 19a provided on the lower surface thereof.

  A support member 21 is erected at one end portion in the longitudinal direction of the pair of width direction movable members 7. At the upper end of each support member 21, a guide rail 22 having an L-shaped engagement portion 22 a formed at a corner is provided along the same direction as the second linear guide 18. The engagement portion 22a of the pair of guide rails 22 is supported by engaging the both ends in the width direction, which is the direction intersecting the transport direction.

  The pair of movable movable members 19 have a substantially L-shaped side surface, and a ball spline shaft 23 is installed between the movable movable members 19. That is, one end of the ball spline shaft 23 is connected to an opening / closing drive source 25 provided on the outer surface of one feed movable member 19 and the other end is provided to the other feed movable member 19 as shown in FIG. The ball spline nut 24 is inserted and supported so as to be slidable in the axial direction.

  A first cam body 26 is fixedly provided at one end of the ball spline shaft 23, and a second cam body 27 connected to the ball spline nut 24 is provided at the other end together with the ball spline nut 24. The ball spline shaft 23 is slidably provided.

  In the first cam body 26 and the second cam body 27, the upper cams 26a and 27a and the lower cams 26b and 27b respectively shift the positions of the top dead center and the bottom dead center by 180 degrees in the circumferential direction. It is provided integrally.

  An upper cam follower 29 provided at one end of an L-shaped upper arm 28 is in contact with the outer peripheral surfaces of the upper cams 26a, 27a of the cam bodies 26, 27, respectively. An upper clamper 31 is provided at the other end of the upper arm 28. When the upper cam follower 29 is in contact with the top dead center of the upper cams 26 a and 27 a, the lower end of the upper clamper 31 is positioned slightly above the engaging portion 22 a of the guide rail 22.

  A lower cam follower 34 provided at one end of an L-shaped lower arm 33 is in contact with the outer peripheral surfaces of the lower cams 26b, 27b of the cam bodies 26, 27, respectively. At the other end of the lower arm 33, there is provided a lower clamper 35 that constitutes a clamper mechanism with the upper clamper 31. When the lower cam follower 34 is in contact with the bottom dead center of the lower cams 26b, 27b, the upper end of the lower clamper 35 is positioned slightly below the engaging portion 22a of the guide rail 22, and the It faces the lower end of the upper clamper 31 via a predetermined interval.

  From this state, the ball spline shaft 23 is driven to rotate 180 degrees by the opening / closing drive source 25, and when the cam bodies 26, 27 are interlocked therewith, the upper clamper 31 is lowered and the lower clamper 35 is raised. The width direction both ends of the board | substrate W engaged and supported by the engaging part 22a of the said guide rail 22 by 31 and 35 are clamped. At this time, the substrate W is slightly raised from the engagement surface 22a and is sandwiched.

  The upper arm 28 and the lower arm 33 are supported by a support member 36 so as to be slidable in the vertical direction. Each support member 36 is attached and fixed to the movable movable member 19 by an attachment arm 37.

  As shown in FIGS. 1 and 3, the pair of left and right feed movable members 19 are connected by a connecting member 41. A nut body 42 is provided on the lower surface of the middle part of the connecting member 41 in the longitudinal direction. A feed screw shaft 43 is screwed onto the nut body 42. The feed screw shaft 43 is arranged with its axis parallel to the transport direction of the substrate W, and one end and the other end of the feed screw shaft 43 are attached to a pair of support members 44 erected on the base member 5 as shown in FIG. It is rotatably supported.

  A driven pulley 45 is fitted to one end of the feed screw shaft 43 protruding from one support member 44. Below this driven pulley 45, a feed drive source 46 is provided. A drive pulley 47 is fitted to the output shaft 46 a of the feed drive source 46. A belt 48 is stretched between the driving pulley 47 and the driven pulley 45.

Accordingly, when the feed drive source 46 is operated and the feed screw shaft 43 is rotationally driven, the pair of feed movable members 19 connected by the connecting member 41 according to the rotational direction thereof is It is driven in the feed direction of the substrate W, which is the direction along the two linear guides 18.
The feed drive source 46, the feed screw shaft 43, the pair of pulleys 45 and 47, and the belt 48 are a feed drive mechanism that reciprocates the pair of feed movable members 19 along the transport direction of the substrate W. It is composed.

  In the mounting apparatus having such a configuration, when the substrate W is supplied from the previous process to the first conveying apparatus 2 to the pair of guide rails 22 in which the upper clamper 31 and the lower clamper 35 are open, The drive source 25 is activated to rotate the ball spline shaft 23 by 180 degrees.

  As a result, the upper clamper 31 and the lower clamper 35 are closed, so that both ends in the width direction of the substrate W held by the guide rail 22 are sandwiched between the pair of left and right upper clampers 31 and the lower clamper 35.

  When both end portions in the width direction of the substrate W are sandwiched between the upper clamper 31 and the lower clamper 35, the feeding drive source 46 is operated to rotate the feeding screw shaft 43 in a predetermined direction by a predetermined number of rotations. When the feed screw shaft 43 is rotated, the pair of feed movable members 19 are driven toward the mounting portion 1 with a stroke corresponding to the number of rotations. Therefore, the feed screw shaft 43 is provided integrally with the feed movable member 19. The clamper 31 and the lower clamper 35 are interlocked. As a result, the substrate W in which both end portions in the width direction are sandwiched and fixed by the upper clamper 31 and the lower clamper 35 is conveyed toward the mounting portion 1.

  When the substrate W is transported with a predetermined stroke, the ball spline shaft 23 is driven to rotate 180 degrees, and the upper clamper 31 and the lower clamper 35 are opened. That is, the holding state of the substrate W by the clampers 31 and 35 is released. Next, the feed drive source 46 rotationally drives the feed screw shaft 43 by a predetermined number of rotations in the direction opposite to the previous direction. As a result, the upper clamper 31 and the lower clamper 35 return by a predetermined stroke in the direction opposite to the transport direction of the substrate W. That is, the clampers 31 and 35 return to the initial positions.

  At that initial position, the ball spline shaft 23 is driven to rotate 180 degrees, the upper clamper 31 and the lower clamper 35 are closed, and both ends in the width direction of the substrate W are clamped and fixed again by these clampers 31, 35. It is repeated that the drive source 46 rotates the feed screw shaft 43 by a predetermined number of revolutions and transports the substrate W at a predetermined stroke.

  When the portion of the substrate W on which the electronic component P is mounted is positioned on the backup tool (not shown) of the mounting portion 1, the mounting tool (not shown) that holds the electronic component P of the mounting portion 1 moves downward. And the electronic component P is mounted on the substrate W.

  As described above, since the electronic component P can be mounted on the substrate W at intervals corresponding to the strokes of the upper and lower clampers 31 and 35 that transport the substrate W, the stroke is adjusted according to the length of the substrate W. Thus, as shown in FIG. 5A, one electronic component P can be mounted, or a plurality of electronic components P can be mounted at a predetermined interval.

When the substrate W on which the electronic component P is mounted in the mounting unit 1 is transported with a predetermined stroke, the leading end is held by the guide rail 22 of the second transport device 3. The substrate W sent to the guide rail 22 of the second transport device 3 is transported with both ends in the width direction being sandwiched between the upper clamper 31 and the lower clamper 35 of the second transport device 3, and the second It is delivered from the transfer device 3 to the next process.
Accordingly, the substrate W supplied to the first transport device 2 can be transferred to the next process by the second transport device 3 after one electronic component P is mounted on the mounting unit 1.

  According to the transport apparatuses 2 and 3 configured as described above, the distance between the pair of left and right movable movable members 19 provided with the upper clamper 31 and the lower clamper 35 is adjusted by the width adjustment drive source 14 constituting the width direction drive mechanism. can do. By adjusting the distance between the pair of movable movable members 19, the distance between the pair of guide rails 22 provided integrally with the movable movable member 19 can be changed. Therefore, even when the width dimension of the substrate W is changed, both ends in the width direction of the substrate W can be held and transported by the pair of guide rails 22.

  When the distance between the pair of guide rails 22 is changed in accordance with the change in the width dimension of the substrate W, the pair of left and right upper clampers 31 and the lower clamper 35 move integrally with the feed movable member 19, and the clampers 31, 35 Since the upper cams 26a and 27a and the lower cams 26b and 27b of the first cam body 26 and the second cam body 27 that move up and down move along the ball spline shaft 23, the phases are not shifted.

  Therefore, in order to change the width dimension of the substrate W, it is not necessary to reset the phase of the upper cams 26a and 27a and the lower cams 26b and 27b even if the distance between the pair of guide rails 22 is changed. Therefore, workability is good.

  The pair of left and right upper clampers 31 and lower clamper 35 are driven to open and close by a single open / close drive source 25 via a ball spline shaft 23. For this reason, the opening / closing drive source 25 has only to be provided on one end side in the direction orthogonal to the transport direction of the substrate W, that is, the back side in the front-rear direction of the base member 5 in FIG. Compared to the case where the clamper 35 is driven by a separate driving source, the configuration can be simplified and the depth of the apparatus can be reduced. In addition, since the opening / closing drive source 25 is not provided on the front side of the base member 5 in the front-rear direction, operations such as adjustment of the transport devices 2 and 3 can be performed relatively easily from the front side.

  The pair of movable movable members 19 are provided on the pair of width direction movable members 7. Each width direction movable member 7 is provided with nut bodies 8a and 8b, and these nut bodies 8a and 8b are provided with right male screws provided on a drive screw shaft 9 which is rotationally driven by the width adjusting drive source 14. The portion 9a and the left male screw portion 9b are screwed together.

  Therefore, if the drive screw shaft 9 is rotationally driven, the pair of movable movable members 19 approaches the predetermined center line O shown in FIG. 2, that is, the center lines O of the pair of width-direction movable members 7 that are opposed to each other. It will be driven in the direction and away direction.

  Therefore, even if the distance between the pair of guide rails 22 is changed with the change in the width dimension of the substrate W, the center position in the width direction of the substrate W on which both end portions in the width direction are supported by the guide rails 22 is changed. Therefore, the position where the substrate W is supplied to the first transfer device 2, the position where the electronic component P is mounted on the substrate W, or the position where the next process receives the substrate W unloaded from the second transfer device 3 is the substrate. It is not necessary to change the center position in the width direction of W.

  That is, even if the width dimension of the substrate W is changed, no extra work is required for transporting the substrate W or mounting the electronic component P on the substrate W.

  On the other hand, the pair of left and right upper clampers 31 and the lower clamper 35 that pitch-feed the substrate W operate in synchronization with the rotation of the ball spline shaft 23 that is rotationally driven by the opening / closing drive source 25. That is, the pair of left and right upper clampers 31 and lower clamper 35 are rotationally driven by one open / close drive source 25.

  Therefore, the pair of left and right upper clampers 31 and the lower clamper 35 are formed by the phases of the upper cams 26a and 27a and the lower cams 26b and 27b of the first cam body 26 and the second cam body 27 provided on the ball spline shaft 23. By mechanically setting, the opening / closing operation can be precisely synchronized.

  That is, the pair of left and right upper clampers 31 and the lower clamper 35 are mechanically synchronized with each other by the rotation of the ball spline shaft 23, so that it is not necessary to synchronize electrically as in the case of driving with separate drive sources. Adjustment work for synchronizing the left and right pair of upper clamper 31 and lower clamper 35 can be easily performed.

  The strokes of the upper clamper 31 and the lower clamper 35 that feed the pitch while sandwiching both ends in the width direction of the substrate W can be set by the rotational speed of the feed screw shaft 43 that is rotationally driven by the feed drive source 46, Changing the setting of the rotational speed can be easily performed electrically.

  Therefore, when the interval between the electronic components P mounted on the substrate W changes depending on, for example, the length dimension of the substrate W, it can be handled by changing the feeding stroke of the substrate W according to the mounting interval of the electronic components P. can do.

  That is, when the length dimension of the substrate W is changed and the feed pitch of the substrate W is changed according to the change, the stroke of the upper clamper 31 and the lower clamper 35 is changed by changing the number of rotations of the feed screw shaft 43. can do.

  If the strokes of the upper clamper 31 and the lower clamper 35 can be changed, regardless of whether the transported member is a substrate W of a predetermined length or a long carrier tape, it is pitch-feeded at a desired stroke. Can do.

  When transporting the carrier tape W1, the upper clamper 31 and the lower clamper 35 of the first transport device 2 and the second transport device 3 are operated in synchronization. That is, as shown in FIG. 6A, the opened upper clamper 31 and lower clamper 35 of each of the conveying devices 2 and 3 are closed as shown in FIG. 6B to hold the carrier tape W1.

  Next, as shown in FIG. 6C, the upper clamper 31 and the lower clamper 35 are synchronized and driven in the forward direction with a predetermined stroke S, and the carrier tape W1 is conveyed with the predetermined stroke S. After the conveyance, when the electronic component P is mounted on the portion positioned on the mounting portion 1 of the carrier tape W1, the upper clamper 31 and the lower clamper 35 are opened, and these are driven in the backward direction with a predetermined stroke S.

  Next, if the upper clamper 31 and the lower clamper 35 are closed and then driven in the forward direction is repeated, even if the member to be transported is a long carrier tape W1, it can be transported reliably. The electronic component P can be mounted on the carrier tape W1 at intervals corresponding to the stroke S.

  That is, regardless of whether the member to be transported is a short substrate or a long carrier tape, it is possible to transport the substrate or the carrier tape without performing adjustment work according to the change in the length. .

The top view which shows schematic structure of the mounting apparatus of one embodiment of this invention. The top view which shows a pair of width direction adjustment member provided in the base member. The side view of a conveying apparatus. Sectional drawing of the conveying apparatus which shows the movable member for a feed provided in the width direction adjustment member, and a guide rail. The top view of the board | substrate with which the electronic component was mounted. Explanatory drawing in the case of conveying a carrier tape.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 2 ... 1st conveying apparatus, 3 ... 2nd conveying apparatus, 5 ... Base member, 7 ... Width direction movable member, 9 ... Drive screw shaft, 14 ... Width adjustment drive source, 19 ... Feeding movable member, 23 DESCRIPTION OF SYMBOLS ... Ball spline shaft, 25 ... Open / close drive source, 26 ... First cam body, 27 ... Second cam body, 31 ... Upper clamper, 35 ... Lower clamper, 43 ... Feed screw shaft, 46 ... Feed drive source.

Claims (6)

A conveying device for conveying a member to be conveyed,
A base member;
A pair of movable members in the width direction provided on the base member so as to be movable along a width direction intersecting the feeding direction of the transported member;
A width direction drive mechanism for driving a pair of width direction movable members in an approach direction and a separation direction symmetrically with respect to a predetermined center line;
A guide rail provided in each width direction movable member for guiding the transported member in a direction intersecting the width direction;
A pair of movable movable members provided on each movable member in the width direction so as to be movable along the feed direction of the transported member intersecting the width direction;
A feed direction drive mechanism that reciprocally drives a pair of feed movable members along the feed direction of the transported member;
A spline shaft having one end connected to an open / close drive source provided on one feed movable member and the other end rotatably provided to the other feed movable member and slidable in the axial direction;
One of the spline shafts is provided at one end and the other end of the spline shaft. One of the spline shafts is fixed to the spline shaft, and the other is integrally movable with the feed movable member in the axial direction of the spline shaft. A pair of cam bodies interlocking with the movement when the movable member is driven in the approaching direction or the separating direction;
A member to be conveyed that is provided on each of the pair of movable movable members and is held on the guide rail when the spline shaft is rotated and opened and closed in the vertical direction and driven in the closing direction via the cam body. And a pair of clamper mechanisms having an upper clamper and a lower clamper for sandwiching both end portions in the width direction.   The said width direction drive mechanism has a right-hand thread part and a left-hand thread part, one screw part is screwed into the nut body provided in one width direction movable member, and the other thread part is the other width direction movable member. A drive screw shaft that is screwed into a nut body provided on the shaft, and rotationally drives the drive screw shaft in the forward direction or the reverse direction to drive the pair of width direction movable members in the approach direction or the separation direction. 2. A conveying apparatus for a member to be conveyed according to claim 1, wherein the conveying apparatus is constituted by a drive source for width adjustment.   The cam body is composed of an upper cam and a lower cam provided on the spline shaft with the top dead center and the bottom dead center shifted by 180 degrees, and the upper cam is driven by rotating the spline shaft. 2. The conveying device for a member to be conveyed according to claim 1, wherein the upper clamper and the lower clamper of the clamper mechanism are driven in the opposite directions by the upper and lower cams. The other end of the spline shaft is inserted and supported so as to be slidable in the axial direction on a spline nut provided rotatably on the movable movable member.
The said other cam body is integrally attached to the said spline nut, The conveying apparatus of the to-be-conveyed member of Claim 1 characterized by the above-mentioned.   2. The transported member according to claim 1, wherein the feed direction driving mechanism is capable of changing a reciprocating stroke of the pair of feed movable members according to a length of the transported member. Transport device. A mounting device for mounting electronic components on a transported member,
A mounting portion for mounting the electronic component on the transported member;
A first transport device that transports the member to be transported to the mounting unit in a direction to carry in;
A second transport device that transports the transport member on which the electronic component is mounted in the mounting unit in a direction of unloading from the mounting unit;
The electronic component mounting apparatus according to claim 1, wherein the first and second transfer apparatuses have the configuration described in claim 1.

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