JP2008007360A - Mother glass substrate, glass substrate and method for manufacturing the glass substrate - Google Patents

Mother glass substrate, glass substrate and method for manufacturing the glass substrate Download PDF

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JP2008007360A
JP2008007360A JP2006178234A JP2006178234A JP2008007360A JP 2008007360 A JP2008007360 A JP 2008007360A JP 2006178234 A JP2006178234 A JP 2006178234A JP 2006178234 A JP2006178234 A JP 2006178234A JP 2008007360 A JP2008007360 A JP 2008007360A
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glass substrate
glass
chemical strengthening
cut
mother
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Masao Ozeki
正雄 尾関
Satoshi Ihara
聡 渭原
Yoshiki Otani
新樹 大谷
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Kyocera Display Corp
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Kyocera Display Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To obtain a mother glass substrate which can be easily cut although it has high strength, a glass substrate, and a method for manufacturing the glass substrate. <P>SOLUTION: The mother glass substrate 1 is cut at a cutting part so as to obtain the glass substrate. In the mother glass substrate 1, a tempered part 4 where is subjected to a chemical tempering treatment is provided on the outside of the cutting part, and a non-tempered part 3 not subjected to the chemical tempering treatment is provided in the cutting part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

マザーガラス基板及びガラス基板ならびにそのガラス基板の製造方法に関する。   The present invention relates to a mother glass substrate, a glass substrate, and a method for manufacturing the glass substrate.

化学強化ガラスは、薄くても充分な強度を保つことができるため、フラットパネルディスプレイ、タッチパネル等に使用される電子材料分野に用いられている。また、携帯電話や時計などのカバーガラスとしても用いられている。   Chemically strengthened glass is used in the field of electronic materials used for flat panel displays, touch panels, and the like because it can maintain sufficient strength even when it is thin. It is also used as a cover glass for mobile phones and watches.

例えば、フラットパネルディスプレイは、基板として、透明性、絶縁性、耐水性を持つガラスを用いることが多い。ガラスは本来、理論的にはかなりの強度を有するものである。しかし、実用的には、いとも簡単に脆性破壊を起こしてしまう。その原因として挙げられているのは、ガラス表面には引っ張り応力が存在することである。そのため、表面に何らかの形の欠陥が分布していると、その欠陥に応力が集中してしまい、そこが破壊開始点となり理論強度よりもかなり低い力で壊れてしまう。また、フラットパネルディスプレイは外部から圧力を受けることも多く、さらに、軽量薄型化が進み、それに伴い割れやすくなっている。従って、通常使用下においても、印加され得る引っ張り応力に対して充分に耐え得る割れ強度が要求されている。このため、液晶表示装置等のフラットパネルディスプレイのガラス基板に化学強化処理を施した化学強化ガラスを用いる提案がなされている（特許文献１）。   For example, flat panel displays often use glass having transparency, insulation, and water resistance as a substrate. Glass is inherently quite strong. However, in practice, brittle fracture is easily caused. The reason for this is the presence of tensile stress on the glass surface. For this reason, if some form of defect is distributed on the surface, stress concentrates on the defect, which becomes a fracture start point and breaks with a force considerably lower than the theoretical strength. In addition, flat panel displays are often subjected to pressure from the outside, and further, the weight and thickness have been reduced, and as a result, they are easily cracked. Therefore, a crack strength that can sufficiently withstand the tensile stress that can be applied even under normal use is required. For this reason, the proposal using the chemically strengthened glass which performed the chemical strengthening process to the glass substrate of flat panel displays, such as a liquid crystal display device, is made | formed (patent document 1).

化学強化ガラスの製造方法としては、種々の方法が考えられている。例えば、小さなイオン半径の原子を大きなイオン半径の原子に置き換える方法、ガラスの粘性流動を利用して大きなイオン半径の原子を小さなイオン半径の原子に置き換える方法、熱膨張率の差を利用する方法、結晶を晶出させる方法、上述の方法を組み合わせる方法など多くの方法がある。   Various methods are considered as a manufacturing method of chemically strengthened glass. For example, a method of replacing atoms of small ionic radius with atoms of large ionic radius, a method of replacing atoms of large ionic radius with atoms of small ionic radius using the viscous flow of glass, a method of utilizing difference in thermal expansion coefficient, There are many methods such as a method of crystallizing crystals and a method of combining the above methods.

一般に、ソーダ・ライム系ガラスでは小さなイオン半径の原子を大きなイオン半径の原子に置き換える方法が数多く用いられる。その中でも、多くの化学強化ガラスは化学強化処理槽中に浸漬する、いわゆる浸漬法で製造されている。すなわち、ガラスを高温の化学強化処理液、例えば硝酸カリウム（ＫＮＯ３）溶液中に浸積する方法である。これにより、ガラス中のナトリウムイオン（Ｎａ+）を硝酸カリウム中のカリウムイオン（Ｋ+）と置換し、表層に圧縮応力層を形成する。これが、化学強化層である。また、ガラス中にリチウム（Ｌｉ）を含む場合の化学強化処理液としては、硝酸ナトリウム（ＮａＮＯ３）、または硝酸ナトリウムと硝酸カリウムの混合塩が多用される。 In general, many methods of replacing atoms having a small ionic radius with atoms having a large ionic radius are used for soda-lime glass. Among them, many chemically strengthened glasses are manufactured by a so-called immersion method in which they are immersed in a chemical strengthening treatment tank. That is, it is a method of immersing glass in a high-temperature chemical strengthening treatment solution, for example, a potassium nitrate (KNO 3 ) solution. Thereby, sodium ions (Na + ) in the glass are replaced with potassium ions (K + ) in potassium nitrate, and a compressive stress layer is formed on the surface layer. This is the chemical strengthening layer. In addition, as the chemical strengthening treatment liquid when the glass contains lithium (Li), sodium nitrate (NaNO 3 ) or a mixed salt of sodium nitrate and potassium nitrate is frequently used.

しかし、化学強化ガラスは、切断性が悪いという問題がある。例えば、フラットパネルディスプレイを製造する際、多数の表示装置のセルが作り込まれたマザーガラス基板から個々の表示装置セルに切断分離する必要がある。これは、タッチパネル等においても同様である。この切断には、ガラス表面にダイアモンド等の硬い刃でスクライブ線を入れ、後に加圧し破断していく方法が一般的である。しかし、ガラスを化学強化処理後に切断する場合、ガラス表面の化学強化層の影響で切断のための垂直クラックが内部に伝搬しにくい。このため、硬い表面を破って切断しなければならず、高い圧力をかける必要がある。このように、高い圧力をかけて切断するので、八の字型の水平クラックが増加する。また、分断時にスクライブ線に沿って分割されず、スクライブ線から外れて分割されるという問題も生じる。   However, chemically tempered glass has a problem of poor cutting properties. For example, when a flat panel display is manufactured, it is necessary to cut and separate individual display device cells from a mother glass substrate on which many display device cells are formed. The same applies to a touch panel or the like. For this cutting, a general method is to put a scribe line on the glass surface with a hard blade such as diamond and then pressurize and break. However, when the glass is cut after the chemical strengthening treatment, vertical cracks for cutting hardly propagate to the inside due to the influence of the chemically strengthened layer on the glass surface. For this reason, a hard surface must be broken and cut, and high pressure must be applied. Thus, since it cuts by applying a high pressure, an 8-shaped horizontal crack increases. In addition, there is a problem in that the segmentation is not divided along the scribe line at the time of division and is separated from the scribe line.

このように、化学強化ガラスを切断分離することは難しく、分離されたセル端面（切断面）が直線にならない。これにより、静的な曲げによる割れ強度が、化学強化処理前のガラスよりも低くなる。つまり、化学強化処理を施すことにより、逆に割れ易くなってしまう。最初に商品サイズにガラスを切断した後に、化学強化処理を施した場合、このような問題が生じないが、生産性が低下してしまう。このように、化学強化処理を施すことによる切断性の低下は、生産時の歩留低下の主因となり、製品となった後も切断不良による破壊の問題などが発生している。
特開２００１−１９２２４０号公報 Thus, it is difficult to cut and separate chemically strengthened glass, and the separated cell end face (cut face) does not become a straight line. Thereby, the crack strength by static bending becomes lower than the glass before a chemical strengthening process. In other words, the chemical strengthening treatment makes it easy to break. When the chemical strengthening treatment is performed after the glass is first cut into the product size, such a problem does not occur, but the productivity is lowered. As described above, the deterioration of the cutting property due to the chemical strengthening treatment is a main cause of the yield reduction during the production, and the problem of the destruction due to the defective cutting occurs after the product is produced.
JP 2001-192240 A

本発明は、上記の問題を解決するためになされたものであり、強度が高くても、切断しやすいマザーガラス基板及びガラス基板ならびにそのガラス基板の製造方法を得ることを目的とする。   The present invention has been made to solve the above problems, and an object of the present invention is to obtain a mother glass substrate and a glass substrate that are easy to cut even when the strength is high, and a method for manufacturing the glass substrate.

本発明に係るマザーガラス基板は、切断部において切断することによってガラス基板を得るためのマザーガラス基板であって、化学強化処理が施された強化部が、前記切断部の外側に設けられ、前記化学強化処理が施されていない非強化部が、前記切断部に設けられているものである。これにより、強度が高くても、切断しやすくなる。   The mother glass substrate according to the present invention is a mother glass substrate for obtaining a glass substrate by cutting at a cutting part, and a strengthened part subjected to a chemical strengthening treatment is provided outside the cutting part, A non-strengthened portion that has not been subjected to chemical strengthening treatment is provided in the cut portion. Thereby, it becomes easy to cut | disconnect even if intensity | strength is high.

また、本発明に係るガラス基板の製造方法は、マザーガラス基板の切断部にマスクを形成する工程と、前記マスクを形成したマザーガラス基板の表面に、化学強化処理を施す工程と、前記化学強化処理を施したマザーガラス基板のマスクを除去する工程と、前記マスクを除去したマザーガラス基板を前記切断部で切断する工程とを備えたものである。これにより、切断面がきれいになり、エッジからの割れを抑えることができる。   Further, the method for manufacturing a glass substrate according to the present invention includes a step of forming a mask on a cut portion of the mother glass substrate, a step of applying a chemical strengthening treatment to the surface of the mother glass substrate on which the mask is formed, and the chemical strengthening The method includes a step of removing the mask of the mother glass substrate subjected to the treatment, and a step of cutting the mother glass substrate from which the mask has been removed by the cutting portion. Thereby, a cut surface becomes clean and the crack from an edge can be suppressed.

そして、本発明に係るガラス基板は、化学強化処理が施された強化部と、基板端に設けられ、前記化学強化処理が施されていない非強化部とを備えるものである。   And the glass substrate which concerns on this invention is equipped with the reinforcement | strengthening part to which the chemical strengthening process was performed, and the non-strengthening part which is provided in the board | substrate edge and has not been subjected to the said chemical strengthening process.

本発明によれば、強度が高くても、切断しやすいマザーガラス基板及びガラス基板ならびにそのガラス基板の製造方法を得ることを目的とする。   According to the present invention, it is an object to obtain a mother glass substrate and a glass substrate that are easy to cut even when the strength is high, and a method for manufacturing the glass substrate.

本実施の形態に係るガラス基板の製造方法について図１を用いて説明する。図１は、本実施の形態にかかるガラス基板の製造方法を示す平面図である。   The manufacturing method of the glass substrate which concerns on this Embodiment is demonstrated using FIG. FIG. 1 is a plan view showing a glass substrate manufacturing method according to the present embodiment.

最初に、マザーガラス基板１の切断部に、金属膜２をマスクとして形成する。また、マスクとして形成する金属膜２は、マザーガラス基板１の切断部の上下両面に設けてもよいが、本実施の形態では上面のみに設ける。まず、マザーガラス基板１上にスパッタなどで金属膜２を成膜する。その後、金属膜２上に感光性樹脂であるレジストをスピンコートによって塗布し、塗布したレジストを露光、現像する写真製版工程（フォトリソグラフィープロセス）を行う。これにより、所望の形状にフォトレジストがパターニングされる。その後、金属膜２をエッチングし、フォトレジストパターンを除去する。これにより、所望の形状に金属膜２が形成される。本実施の形態では、マザーガラス基板１として、ソーダガラス（旭硝子社製ＡＳ）を用いる。また、ソーダガラスの厚さは、０．７ｍｍである。そして、ソーダガラス上に、マスクとしてクロム（Ｃｒ）を網目状に形成する。ここでは、Ｃｒが形成された部分が切断部となる。また、本実施の形態では、Ｃｒを網目状に形成したが、網目状に限られるわけではない。もちろん、マザーガラス基板１から複数枚採りをしない場合は、網目状にする必要はない。つまり、金属膜２は、所望の形状のガラス基板を得るために、切断する部分に形成すればよい。以上の工程により、図１（ａ）に示すように金属膜２がマザーガラス基板１上に形成される。   First, the metal film 2 is formed as a mask on the cut portion of the mother glass substrate 1. Moreover, although the metal film 2 formed as a mask may be provided on both upper and lower surfaces of the cut portion of the mother glass substrate 1, it is provided only on the upper surface in the present embodiment. First, the metal film 2 is formed on the mother glass substrate 1 by sputtering or the like. Thereafter, a resist that is a photosensitive resin is applied onto the metal film 2 by spin coating, and a photolithography process (photolithographic process) is performed in which the applied resist is exposed and developed. As a result, the photoresist is patterned into a desired shape. Thereafter, the metal film 2 is etched and the photoresist pattern is removed. Thereby, the metal film 2 is formed in a desired shape. In the present embodiment, soda glass (ASA manufactured by Asahi Glass Co., Ltd.) is used as the mother glass substrate 1. The soda glass has a thickness of 0.7 mm. Then, chromium (Cr) is formed in a mesh shape on the soda glass as a mask. Here, the portion where Cr is formed becomes the cut portion. In the present embodiment, Cr is formed in a mesh shape, but is not limited to a mesh shape. Of course, when not taking a plurality of pieces from the mother glass substrate 1, it is not necessary to form a mesh. That is, the metal film 2 may be formed at a portion to be cut in order to obtain a glass substrate having a desired shape. Through the above steps, the metal film 2 is formed on the mother glass substrate 1 as shown in FIG.

次に、金属膜２が形成されたマザーガラス基板１に化学強化処理を施す。ガラスは、特に引っ張り応力対して脆弱であり、外部から圧力がかかると割れてしまうことが多い。そこで、ガラス表面の圧縮応力を増加させるために、化学強化処理を施す。これにより、引っ張り応力に対して逆向きの力がかかり、割れにくくなる。なお、化学強化処理については後述する。この工程により、金属膜２によってマスクされた部分以外では、マザーガラス基板１の表面に化学強化処理が施される。   Next, a chemical strengthening process is performed on the mother glass substrate 1 on which the metal film 2 is formed. Glass is particularly fragile to tensile stress and often breaks when pressure is applied from the outside. Therefore, in order to increase the compressive stress on the glass surface, a chemical strengthening treatment is performed. As a result, a force opposite to the tensile stress is applied, and it becomes difficult to break. The chemical strengthening process will be described later. By this step, the surface of the mother glass substrate 1 is subjected to a chemical strengthening process except for the portion masked by the metal film 2.

次に、マザーガラス基板１上の金属膜２を剥離する。本実施の形態では、ソーダガラス上のＣｒをエッチングによって除去する。以上の工程により、図１（ｂ）に示される破線部以外の部分に化学強化処理が施されたマザーガラス基板１が形成される。つまり、破線部が非強化部３、破線部以外の部分が強化部４となる。本実施の形態に係るマザーガラス基板１は以上のように処理されている。   Next, the metal film 2 on the mother glass substrate 1 is peeled off. In the present embodiment, Cr on the soda glass is removed by etching. Through the above steps, the mother glass substrate 1 is formed in which the chemical strengthening process is performed on the portion other than the broken line portion shown in FIG. That is, the broken line part is the non-strengthened part 3 and the part other than the broken line part is the reinforced part 4. The mother glass substrate 1 according to the present embodiment is processed as described above.

次に、金属膜２があった部分でマザーガラス基板１を切断する。これにより、所望の形状の小片のガラス基板が得られる。具体的には、図１（ｂ）の破線部に沿ってマザーガラス基板１を切断する。この切断には、ホイールカッターを用いる。まず、ホイールカッターでガラス表面を引きかき、内部にクラック（割れ目）をつくる。そのクラックに沿って曲げモーメントや衝撃力、または熱応力などを作用させてクラックを成長させ分断する。ホイールカッターによりクラックを発生させた場合、垂直クラックと八の字型の水平クラックが形成される。また、きれいな切断面を得るためには水平クラックをできるだけ少なくし、垂直クラックをスムーズに成長させるような応力を与えることが必要である。   Next, the mother glass substrate 1 is cut at a portion where the metal film 2 is present. Thereby, a small-sized glass substrate of a desired shape is obtained. Specifically, the mother glass substrate 1 is cut along the broken line portion of FIG. A wheel cutter is used for this cutting. First, scratch the glass surface with a wheel cutter to create cracks inside. A bending moment, impact force, thermal stress, or the like is applied along the crack to grow and divide the crack. When a crack is generated by a wheel cutter, a vertical crack and an eight-shaped horizontal crack are formed. Further, in order to obtain a clean cut surface, it is necessary to reduce the horizontal cracks as much as possible and to apply a stress that allows the vertical cracks to grow smoothly.

本実施の形態では、切断部には化学強化処理が施されていない非強化部３が形成される。つまり、化学強化処理が施された強化部４が、切断部の外側に設けられ、化学強化処理が施されていない非強化部３が、切断部に設けられている。従って、従来の化学強化ガラスのように、化学処理が施された硬い表面を破って切断する必要がない。このため、高い圧力で切断する必要がないので、従来に比べて水平クラックが減少する。つまり、きれいな切断面が得られ、ガラスのエッジ近傍のクラックから割れることが少なくなる。また、小片にしたガラス基板のエッジでも化学強化処理が施されていないガラス程度の強化は保てる。以上のような工程により、マザーガラス基板１は切断され、割れにくい小片のガラス基板が得られる。   In the present embodiment, a non-strengthened portion 3 that is not subjected to chemical strengthening treatment is formed in the cut portion. That is, the reinforced portion 4 subjected to the chemical strengthening process is provided outside the cut portion, and the non-strengthened portion 3 not subjected to the chemical strengthening process is provided in the cut portion. Therefore, it is not necessary to break and cut a hard surface that has been subjected to chemical treatment unlike conventional chemically strengthened glass. For this reason, since it is not necessary to cut | disconnect with a high pressure, a horizontal crack reduces compared with the past. That is, a clean cut surface is obtained, and it is less likely to break from cracks near the edge of the glass. Moreover, the edge of the glass substrate made into the small piece can maintain the intensity | strength of the glass grade which has not been chemically strengthened. By the above process, the mother glass substrate 1 is cut and a small glass substrate that is difficult to break is obtained.

図２は、本実施の形態にかかる小片にしたガラス基板の平面図である。エッジ部は、化学強化処理が施されていない、つまり非強化部３である。これは、上述のように、金属膜２によって切断部をマスクして化学強化処理を施したためである。また、エッジ部以外のガラス基板の表面には化学強化処理が施されている、つまり強化部４である。   FIG. 2 is a plan view of a small glass substrate according to the present embodiment. The edge portion is not subjected to chemical strengthening treatment, that is, the non-strengthened portion 3. This is because the chemical strengthening treatment was performed by masking the cut portion with the metal film 2 as described above. Further, the surface of the glass substrate other than the edge portion is subjected to chemical strengthening treatment, that is, the strengthening portion 4.

次に、化学強化処理について説明する。化学強化ガラスは、ガラス表面に存在する引っ張り応力を圧縮応力に替えることにより破壊に対する強度を向上させるものである。具体的には、小さいイオン半径のアルカリイオン（リチウムイオンやナトリウムイオン）を含んだガラスを、そのガラス転移点以下の温度域（例えば４００℃）で大きなイオン半径のアルカリ溶融塩に浸漬する。これにより、ガラス表面で両者のイオン交換を行わせる。この結果、ガラス表面層では容積が増大し冷却後、圧縮応力が存在する状態となる。このように、ガラスに含まれるリチウムイオン（Ｌｉ+）やナトリウムイオン（Ｎａ+）よりもイオン半径が大きい陽イオンを持つ塩の溶液、もしくは溶融液にガラスを浸漬する工程を加えるだけで良く、非常に簡便である。さらにこの方法によれば、化学強化層の厚みは浸漬時間等の調整で簡便に行うことができる。また、ガラスの厚みが薄くても強化可能であり、異形や曲げガラスも強化可能である。 Next, the chemical strengthening process will be described. Chemically tempered glass improves strength against breakage by replacing tensile stress existing on the glass surface with compressive stress. Specifically, a glass containing alkali ions (lithium ions and sodium ions) having a small ion radius is immersed in an alkali molten salt having a large ion radius in a temperature range (for example, 400 ° C.) below the glass transition point. Thereby, both ion exchange is performed on the glass surface. As a result, in the glass surface layer, the volume is increased, and after cooling, a compressive stress is present. Thus, it is only necessary to add a step of immersing the glass in a solution of a salt having a cation with a larger ionic radius than lithium ion (Li + ) or sodium ion (Na + ) contained in the glass, or a melt, Very simple. Furthermore, according to this method, the thickness of the chemical strengthening layer can be easily performed by adjusting the immersion time or the like. Further, even if the glass is thin, it can be tempered, and deformed and bent glass can be tempered.

本実施の形態では、まず、Ｃｒによってマスクされたソーダガラスを４００℃以上の硝酸カリウム溶液中に１０時間浸漬させる。これにより、ソーダガラスの表面層のＮａ+がカリウムイオン（Ｋ+）に置換される。イオン半径はＮａ+よりＫ+の方が大きいので、ガラス表面には圧縮応力が存在する。また、化学強化層の厚みは１０μｍ〜２０μｍである。 In this embodiment, first, soda glass masked with Cr is immersed in a potassium nitrate solution at 400 ° C. or higher for 10 hours. This replaces Na + in the surface layer of soda glass with potassium ions (K + ). Since the ion radius is larger than the Na + of K +, there is compressive stress on the glass surface. Moreover, the thickness of a chemical strengthening layer is 10 micrometers-20 micrometers.

次に、小片にしたガラス基板の割れ強度を比較する。また、割れ強度の測定には、静的加重と動的加重を用いることができる。また、静的加重には、一点押し付け法、三点曲げ法、四点曲げ法が挙げられる。ここで、それぞれの測定について説明する。一点押し付け法は、ガラス基板を台によって、四辺で支える。そして、ガラス基板の上から一点で加重を加え、ガラス基板が割れる時に加えた力を測定する方法である。三点曲げ法は、ガラス基板を二辺で支えて、ガラス基板の上から一辺で加重を加える。そして、ガラス基板が割れる時に加えた力を測定する方法である。四点曲げ法は、ガラス基板を二辺で支えて、ガラス基板の上から二辺で加重を加える。そして、ガラス基板が割れる時に加えた力を測定する方法である。動的加重は、ガラス基板を台によって、四辺で支える。そして、ガラス基板の上から、金属球を落下させ、ガラス基板が割れる時に加えた力を測定する方法である。それぞれの方法における主な割れの起点、割れやすさ等を表１にまとめる。   Next, the crack strength of the glass substrate made into a small piece is compared. In addition, static weighting and dynamic weighting can be used for the measurement of crack strength. Further, examples of the static load include a one-point pressing method, a three-point bending method, and a four-point bending method. Here, each measurement will be described. In the one-point pressing method, a glass substrate is supported on four sides by a table. And it is the method of applying a load at one point from the top of the glass substrate and measuring the force applied when the glass substrate breaks. In the three-point bending method, a glass substrate is supported on two sides and a weight is applied on one side from the top of the glass substrate. And it is the method of measuring the force added when the glass substrate cracks. In the four-point bending method, a glass substrate is supported on two sides, and a load is applied on two sides from the top of the glass substrate. And it is the method of measuring the force added when the glass substrate cracks. In the dynamic load, the glass substrate is supported on four sides by a table. And it is the method of measuring the force applied when a metal ball | bowl is dropped from on a glass substrate and a glass substrate cracks. Table 1 summarizes the starting points of main cracks and the ease of cracking in each method.

Figure 2008007360
Figure 2008007360

一点押し付け法は、一点での押し付けによりガラス割れが生じるため、面内のストレスを起点に割れる。このため、化学強化処理を従来のようにマスクなしで施しても、本実施の形態のように施しても強度を保つことができる。また、主な割れの起点は、エッジ又は中央である。動的加重は、一点への衝撃によりガラス割れが生じるため、主な割れの起点は、ガラス基板の中央からである。このため、化学強化処理を従来のようにマスクなしで施しても、本実施の形態のように施しても強度を保つことができる。また、主な割れの起点は、ガラス基板の中央からなので、化学強化処理を施すことにより、これらの方法の中で、最も割れにくくなる。三点曲げ法、四点曲げ法は、曲げによりガラス割れが生じるため、主な割れの起点は、ガラス基板のエッジからである。このため、化学強化処理を従来のようにマスクなしで施しても、本実施の形態のように施してもこれらの方法の中で、最も割れやすくなる。   In the one-point pressing method, since glass cracks are generated by pressing at one point, the stress in the plane can be broken. Therefore, the strength can be maintained even if the chemical strengthening treatment is performed without a mask as in the prior art or the present embodiment. Moreover, the starting point of the main crack is the edge or the center. In the dynamic load, a glass crack occurs due to an impact on one point, and therefore, the main starting point of the crack is from the center of the glass substrate. Therefore, the strength can be maintained even if the chemical strengthening treatment is performed without a mask as in the prior art or the present embodiment. Moreover, since the starting point of the main crack is from the center of a glass substrate, it becomes the hardest to break | break among these methods by performing a chemical strengthening process. In the three-point bending method and the four-point bending method, a glass crack is generated by bending, and therefore, the main crack starting point is from the edge of the glass substrate. For this reason, even if the chemical strengthening treatment is performed without a mask as in the prior art or as in the present embodiment, cracking is most likely among these methods.

今回は、三点曲げ法により割れ強度を比較した。表２は、小片にしたガラス基板の割れ強度を比較したものである。表２では、化学強化処理なしのマザーガラス基板と、化学強化処理をマスクなしで施したマザーガラス基板と、本実施の形態に係るマザーガラス基板とをそれぞれ切断したガラス基板を比較している。ここでは、化学強化処理なしのマザーガラス基板を切断して小片にしたガラス基板を化学強化なしガラス、従来のようにマスクなしで化学強化処理を施したマザーガラス基板を切断して小片にしたガラス基板を従来のガラスとする。ここでは、従来のガラス、本実施の形態では、３００×４００×０．７ｍｍのソーダガラス（旭硝子社製ＡＳ）を、上述のように化学強化処理を施し、５０×８０ｍｍのサイズに切断した。なお、化学強化処理なしガラスも同様のサイズに切断した。そして、８０ｍｍの辺を横にセットした。これらの小片にしたガラス基板をそれぞれ約３０枚用いて、ガラス基板に割れが生じる加重（割れ強度）の平均値、最小値を測定した。   This time, the crack strength was compared by the three-point bending method. Table 2 compares the cracking strength of the glass substrates made into small pieces. Table 2 compares a glass substrate obtained by cutting a mother glass substrate without chemical strengthening treatment, a mother glass substrate subjected to chemical strengthening treatment without a mask, and a mother glass substrate according to the present embodiment. Here, a glass substrate made by cutting a mother glass substrate that has not been chemically strengthened into small pieces is made from glass without chemical strengthening, and a glass that has been cut from a mother glass substrate that has been chemically strengthened without using a mask as in the past. The substrate is conventional glass. Here, the conventional glass, in this embodiment, 300 × 400 × 0.7 mm soda glass (ASA manufactured by Asahi Glass Co., Ltd.) was subjected to chemical strengthening treatment as described above and cut into a size of 50 × 80 mm. The glass without chemical strengthening treatment was also cut into the same size. And the side of 80 mm was set horizontally. About 30 pieces of each of these small glass substrates were used, and the average value and minimum value of the load (crack strength) at which the glass substrate was cracked were measured.

Figure 2008007360
Figure 2008007360

割れ強度を測定した結果、割れ強度の最小値は、３つのサンプルにおいてほとんど変化がない。これは、製造工程において、いくつかのガラスが切断よりもひどいダメージを受けたことによる。これにより、２５Ｎという低い値でも割れが生じたと考えられる。しかし、割れ強度の平均を比較すると、本実施の形態が最も高い値、つまり最も割れにくいことが分かった。割れモードは、エッジからの割れ（エッジ割れ）と面内からの割れ（面内割れ）の２つに分けられる。割れ強度が低い値だと、エッジ割れが生じている。また、割れ強度が約５０Ｎ以上になると、エッジ割れではなく、面内割れが生じている。本実施の形態では、割れ強度の平均が７０Ｎなので、化学強化なしガラスの割れ強度の平均５０Ｎと比較すると、面内割れの強度が上がっている。つまり、化学強化処理を施したことにより、ガラスの割れ強度が上がった。また、従来のガラスは、割れ強度の平均が３０Ｎであった。これは、エッジ割れの割合が多いためである。また、この値は、化学強化なしガラスの割れ強度の平均５０Ｎよりも低い値となっている。つまり、化学強化なしガラスよりもエッジ割れが多いことが分かる。従って、本実施の形態と異なり、化学強化処理を施す前よりも、逆に割れやすくなっている。これは、化学強化処理が施された部分を切断するため、上述のように水平クラックが増大し、切断面にクラックソースが生じているためである。   As a result of measuring the crack strength, the minimum value of the crack strength hardly changes in the three samples. This is due to the fact that some glasses suffered more damage than cutting during the manufacturing process. Thereby, it is considered that cracking occurred even at a low value of 25N. However, when the average crack strength was compared, it was found that the present embodiment had the highest value, that is, the smallest crack strength. The cracking mode is divided into two types: a crack from the edge (edge crack) and a crack from the surface (in-plane crack). If the crack strength is low, edge cracks occur. Moreover, when the crack strength is about 50 N or more, not an edge crack but an in-plane crack occurs. In this embodiment, since the average crack strength is 70 N, the strength of in-plane cracks is higher than the average 50 N crack strength of glass without chemical strengthening. That is, the cracking strength of the glass was increased by performing the chemical strengthening treatment. The conventional glass had an average crack strength of 30N. This is because the ratio of edge cracking is large. Further, this value is lower than the average 50N crack strength of the glass without chemical strengthening. That is, it can be seen that there are more edge cracks than glass without chemical strengthening. Therefore, unlike this embodiment, it is easier to crack than before the chemical strengthening treatment. This is because the portion subjected to the chemical strengthening treatment is cut, so that horizontal cracks increase as described above, and a crack source is generated on the cut surface.

本実施の形態に係るマザーガラス基板によれば、切断性もよく、切断面がきれいな小片のガラス基板を得られる。このため、フラットパネルディスプレイ、タッチパネルのようなマザーガラス基板から複数枚採りを行う場合においても、切断性がよいため歩留低下等の問題が起こらない。また、切断面もきれいなので、製品となった後も、想定加重よりも小さな値でエッジから破壊することもない。ここで、フラットパネルディスプレイとは、液晶表示装置や有機ＥＬ表示装置等の平面型表示装置である。  According to the mother glass substrate according to the present embodiment, it is possible to obtain a small glass substrate having a good cutting property and a clean cut surface. For this reason, even when a plurality of sheets are taken from a mother glass substrate such as a flat panel display or a touch panel, problems such as a decrease in yield do not occur due to good cutting performance. In addition, since the cut surface is clean, even after it becomes a product, it does not break from the edge at a value smaller than the assumed weight. Here, the flat panel display is a flat display device such as a liquid crystal display device or an organic EL display device.

また、ガラスの厚さを薄くしても十分な強度を有しているので、モバイル型パーソナルコンピュータ、携帯電話、小型液晶テレビの表示装置といった携帯型ディスプレイに用いることもできる。この場合でも、本実施の形態のように、切断部にマスクをしてから、化学強化処理を施すことにより、複数枚採りが可能になり、生産性が上がる。   In addition, since the glass has sufficient strength even when the glass is thinned, it can be used for a portable display such as a mobile personal computer, a mobile phone, and a display device of a small liquid crystal television. Even in this case, as in the present embodiment, by applying a chemical strengthening process after masking the cut portion, a plurality of sheets can be picked up and productivity is increased.

また、本実施の形態に係るガラス基板の製造方法は、複数枚採りをする場合に限られるわけではない。単に化学強化ガラスを切断する場合でも、本実施の形態と同様の方法で切断することができる。   Moreover, the manufacturing method of the glass substrate which concerns on this Embodiment is not necessarily restricted to taking multiple sheets. Even when the chemically strengthened glass is simply cut, it can be cut by the same method as in the present embodiment.

実施の形態１にかかるガラス基板の製造方法を示す平面図である。FIG. 3 is a plan view showing the method for manufacturing the glass substrate according to the first embodiment. 実施の形態１にかかる小片にしたガラス基板の平面図である。It is a top view of the glass substrate made into the small piece concerning Embodiment 1. FIG.

符号の説明Explanation of symbols

１ マザーガラス基板、２ 金属膜、３ 非強化部、４ 強化部 1 Mother glass substrate, 2 Metal film, 3 Non-strengthened part, 4 Reinforced part

Claims (3)

切断部において切断することによってガラス基板を得るためのマザーガラス基板であって、
化学強化処理が施された強化部が、前記切断部の外側に設けられ、
前記化学強化処理が施されていない非強化部が、前記切断部に設けられているマザーガラス基板。 A mother glass substrate for obtaining a glass substrate by cutting at a cutting part,
A strengthened portion subjected to a chemical strengthening treatment is provided outside the cut portion,
A mother glass substrate in which a non-strengthened portion not subjected to the chemical strengthening treatment is provided in the cut portion. マザーガラス基板の切断部にマスクを形成する工程と、
前記マスクを形成したマザーガラス基板の表面に、化学強化処理を施す工程と、
前記化学強化処理を施したマザーガラス基板のマスクを除去する工程と、
前記マスクを除去したマザーガラス基板を前記切断部で切断する工程とを備えたガラス基板の製造方法。 Forming a mask on the cut portion of the mother glass substrate;
A step of chemically strengthening the surface of the mother glass substrate on which the mask is formed;
Removing the mother glass substrate mask subjected to the chemical strengthening treatment;
And a step of cutting the mother glass substrate from which the mask has been removed at the cutting portion. 化学強化処理が施された強化部と、
基板端に設けられ、前記化学強化処理が施されていない非強化部とを備えるガラス基板。 Strengthening part that has been subjected to chemical strengthening treatment,
A glass substrate provided with a non-strengthened portion provided at an end of the substrate and not subjected to the chemical strengthening treatment.
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