JP2008006724A - Manufacturing method of microflow pipe chip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a microflow pipe chip capable of preventing the closure of a flow pipe or a change in the flow channel cross-sectional area of the flow pipe and the lowering of airtightness caused by adhesive irregularity. <P>SOLUTION: First flat sheet members 1 and 3 having elongated grooves 11 and 31 becoming a flow pipe formed to the surfaces thereof and the second flat sheet members 2 and 4 arranged in opposed relation to the surfaces of the first flat sheet members are set so that the mutually opposed surfaces of them are superposed one upon another. Subsequently, energy directors 14 and 34, which have a triangular vertical cross-sectional shape, are integrated with one of the first and second flat sheet members so as to be respectively provided along the grooves and formed into ridges toward to the other flat sheet members, are melted from the leading end parts of them and the molten parts of them are allowed to flow in the recessed parts 13 and 43 formed to the surfaces of the opposed parts of the energy directors of the other flat sheet members arranged in opposed relation to the base end parts or leading end parts of the energy directors and cured to integrate the first and second flat sheet members to form the flow pipe due to the grooves. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method of manufacturing a micro flow tube chip that is a basic unit of a microreactor used in a microchemical factory, a research facility such as pharmaceuticals and foods, emergency treatment, and other medical sites.

  The micro flow tube chip is a component for chemical reaction and article production using a space in units of microns. For example, a first flat plate member having an elongated groove formed on the surface thereof, and the first flat plate member By integrating the second flat plate member disposed opposite to the surface, a flow tube having a tube diameter of 100 microns or less is formed by the groove (for example, Patent Document 1).

These flat plate members are integrated by adhering the outer periphery of the groove using an adhesive, and the thickness of the adhesive layer varies depending on conditions such as the amount of adhesive used and the pressure applied. Since the amount is so large that it cannot be ignored with respect to the diameter of the flow tube, there is a problem that the actual flow path cross-sectional area changes significantly.
In particular, when the amount of adhesive used is large, the adhesive may flow into the groove and become blocked. On the contrary, when the amount of the adhesive used is small, uneven adhesion occurs, and there is a risk that the airtightness is lowered at a portion where the adhesive is small, leading to leakage of the fluid circulating in the flow tube.
For this reason, in order to avoid such a problem, it is required to carefully perform the affixing work between the flat plate members so that the usage amount and the affixing pressure of the adhesive do not deviate from the specified values.

Japanese Patent Laid-Open No. 2005-22364

  The present invention has been made in view of such circumstances, and is a micro flow tube chip that can prevent a flow tube from being blocked and a change in an actual flow path cross-sectional area, and can prevent a decrease in the airtightness of the flow tube due to uneven adhesion. It is an object to provide a manufacturing method.

  The method of manufacturing a micro flow tube chip according to the first aspect of the present invention includes a first flat plate member in which an elongated groove serving as a flow tube is formed on the surface, and the surface of the first flat plate member. By integrating the second flat plate member arranged opposite to each other, the flow tube is formed by the groove, and the first flat plate member or the position corresponding to the end of the flow tube is formed respectively. A method of manufacturing a micro flow tube chip, wherein an outflow port of the flow tube is formed by a through-hole formed in the plate thickness direction of a second flat plate member, the first flat plate member and the second flat plate Each member is formed of a material that can be welded by pressing force, and along the groove, respectively, on both sides of the groove integrally with one of the first flat plate member or the second flat plate member, Suitable for the other flat plate member Forming an energy director having a triangular shape in the longitudinal section formed on the ridge, and the energy director of the other flat plate member disposed opposite the base end of the energy director or the tip of the energy director. A recess having a volume equal to or larger than a protruding volume capacity protruding from the surface of the one flat plate member of the energy director is formed on the surface of the opposing portion, and then the energy director is connected to the tip of the other flat plate member. After the first flat plate member and the second flat plate member are overlapped with each other, the energy director is removed from the tip portion by ultrasonic welding. After melting and flowing the melted portion of the energy director into the recess, the melted portion is placed in the recess. By curing Te, it is integrated and the first flat member and the second flat plate member, is characterized by forming the flow tubes by the groove.

  Here, the energy director is formed so as to be able to absorb the pressure applied by ultrasonic welding in a concentrated manner, and is a first formed integrally with the energy director by melting and curing by ultrasonic welding. It forms so that a flat plate member and the 2nd flat plate member arrange | positioned facing this 1st flat plate member may be integrated reliably.

  According to a second aspect of the present invention, in the micro flow tube chip manufacturing method according to the first aspect of the present invention, two or more of the energy directors are formed outside both sides of the groove.

  According to a third aspect of the present invention, in the method for manufacturing a micro flow tube chip according to the first or second aspect, the outflow inlet and the concave portion are both formed in the first flat plate member, and the energy director is provided. Is formed in the recess.

  According to a fourth aspect of the present invention, in the method of manufacturing a micro flow tube chip according to the second aspect, the concave portion is widened at a position corresponding to the outer side of both sides of the groove of the second flat plate member. And the energy director is formed at positions corresponding to both end portions in the width direction of the concave portion of the first flat plate member.

  According to a fifth aspect of the present invention, in the micro flow tube chip manufacturing method according to the fourth aspect of the present invention, the first flat plate member has a notch step that is one step lower than the plate surface on both sides of the groove. And forming a side wall of the notch step portion integrally with a base end portion of the side wall of the energy director disposed in the vicinity of the groove, and the second flat plate member includes the second flat plate member. The flat plate member is formed integrally with the flat plate member 2 toward the notch step portion, and a lid portion formed so as to be fitted into the notch step portion is formed.

According to the manufacturing method of the micro flow tube chip according to any one of claims 1 to 5, the first flat plate member and the second flat plate member are each formed of a material that can be welded by pressure, Since the elongate groove serving as the flow tube is formed on the first flat plate member, the opposing surfaces of the first flat plate member and the second flat plate member are overlapped and then ultrasonically welded, whereby A tube is formed.
At that time, the pressure is concentrated and absorbed by the energy director formed integrally with one of the first flat plate member and the second flat plate member, so that the tip of the energy director and the other flat plate member are welded together. By doing so, the first flat plate member and the second flat plate member can be reliably integrated outside the both sides of the flow tube, and the flow tube can be formed airtight.

Further, the energy director is configured to have a triangular shape in the longitudinal section, and the tip portion thereof is arranged so as to be in line contact with the surface of the other flat plate member, and the first flat plate member and the second flat plate member are Since the opposing surfaces are overlapped with each other, the pressure applied by the ultrasonic waves is concentrated on the linear tip of the energy director, and a large amount of the melted portion can be caused to flow into the recess with a small pressure.
On the other hand, a concave portion having a volume equal to or larger than the protruding volume capacity of the energy director is formed on the surface of the opposing portion of the energy director of the other flat plate member disposed to face the base end of the energy director or the tip of the energy director. Since it formed, it can prevent that the fusion | melting part of an energy director overflows from a recessed part.
For this reason, it is possible to prevent the flow tube from being blocked or the actual flow cross-sectional area from changing when the melting portion of the energy director flows into the recess and the melting portion is cured in the recess.

  In particular, according to the second aspect of the present invention, since two or more energy directors are provided outside both sides of the groove, the obtained micro flow tube chip has a bending stress in the thickness direction. Even in the case of the action, the joined portion of the inner energy director disposed close to the flow tube follows the moving direction of the flow tube, and the outer energy disposed away from the flow tube. The joining portion by the melting portion of the director can follow the moving direction of the outer peripheral portion of the micro flow tube tip. Thereby, the intensity | strength with respect to the bending stress of a micro flow tube tip can be raised.

According to the invention described in claim 3, since the outflow inlet and the recess are formed in the first flat plate member in which the groove serving as the flow tube is formed, and the energy director is formed in the concave portion, the first flat plate member By forming the recess or the like only in the second plate, it is not necessary to form the second flat plate member. For this reason, it is possible to save the effort of forming the flat plate member, and align the energy director and the concave portion as in the case where the first flat plate member is provided with the energy director and the concave portion is formed in the second flat plate member. The first flat plate member and the second flat plate member can be easily overlapped.
Furthermore, since the energy director is formed in the recess, the melted portion of the energy director that is melted from the tip by ultrasonic welding can be surely flowed into the recess. For this reason, the melted portion of the energy director does not sag outside the concave portion on the plate surface of the first flat plate member, and a gap is generated between the first flat plate member and the second flat plate member. It is possible to reliably prevent the flow path cross-sectional area from increasing.

According to invention of Claim 4, while forming the said recessed part in the position corresponding to the outer side of the both sides of the groove | channel of a 2nd flat plate member, respectively, the said energy director is the width direction of the said recessed part. Since the first flat plate member and the second flat plate member are arranged opposite to each other at positions corresponding to both end portions, the energy director is melted by ultrasonic welding at both end portions in the width direction of the concave portion. The first flat plate member and the second flat plate member can be integrated.
For this reason, even when a bending stress acts on the micro flow tube tip in the thickness direction, the joint portion by the melting portion of the inner energy director disposed in the vicinity of the flow tube is in the moving direction of the flow tube. The joined portion of the outer energy director located apart from the flow tube follows the moving direction of the outer peripheral portion of the micro flow tube chip and follows bending stress at both end portions in the width direction of the recess. Can be absorbed. As a result, the strength of the micro flow tube tip against bending stress can be further increased.

According to the fifth aspect of the present invention, the side wall of the lid portion formed so as to be able to be fitted into the notch step portion by ultrasonic welding is disposed in the vicinity of the groove formed integrally with the side wall of the notch step portion. The inner energy director provided can be melted in a state of being pressed toward the center in the width direction of the recess. As a result, the molten part can be efficiently allowed to flow into the central part in the recess, and the lid part is fitted into the notch step part, so that the melt can be reliably prevented from flowing into the flow tube.
As a result, since all the melted portions of the energy director flow toward the central portion of the recess, the first flat plate member and the second flat plate member can be integrated without adhesion unevenness at both ends in the width direction of the recess. And the airtightness of the flow tube can be further enhanced.

  Hereinafter, three embodiments according to the method of manufacturing a micro flow tube chip of the present invention will be described with reference to FIGS.

{First embodiment}
First, the manufacturing method of the micro flow tube chip in the first embodiment will be described with reference to FIGS.
First, a first flat plate member 1 made of a rectangular transparent resin plate and a second flat plate member 2 made of a transparent resin plate having the same shape as the first flat plate member 1 are prepared. Each of the first flat plate member 1 and the second flat plate member 2 is made of a material that can be welded by applying pressure, and at least one surface thereof is formed smoothly.

The first flat plate member 1 is formed by compression molding after injection, and a groove 11 having a depth of 0.1 to 0.3 mm and a width of 0.1 to 0.3 mm is formed on the smooth surface thereof. It is formed in a letter shape. Further, through-holes 12a and 12b are formed in the left and right end portions and the lower end portion of the groove 11 formed in a T shape from the bottom portion of the groove 11 toward the plate thickness direction, respectively.
Further, as shown in FIG. 3 and FIG. 4, wide concave portions 13 are formed on both sides of the groove 11 along the grooves 11, respectively. Energy directors 14 are provided on the protrusions close to each other.

  Each of these energy directors 14 is formed in a substantially triangular shape in the cross section, and is formed integrally with the flat plate member 1 in the longitudinal direction of the recess 13. In the recess 13, adjacent base end portions of the two energy directors 14 are arranged with a gap therebetween, and base end portions located in the vicinity of the edge 13 a of the recess 13 are separated from the edge 13 a. Arranged. As a result, the bottom of the recess 13 is exposed between the two energy directors 14 and between the edge 13 a of the recess 13 and the energy director 14, and the volume of the recess 13 is increased from the surface of the first flat plate member 1. It is formed so as to be larger than the protruding volume capacity of the energy director 14.

  Next, the above-described first flat plate member 1 and second flat plate member 2 are arranged so that the smooth surfaces thereof are opposed to each other, and the tip portion of the energy director 14 is in substantially line contact with the smooth surface of the flat plate member 2. Overlapping.

Next, the surfaces of the first flat plate member 1 and the second flat plate member 2 are welded together by ultrasonic welding. At this time, the applied pressure is concentratedly absorbed at the tip of the energy director 14, the energy director 14 is melted from the tip, and the melted portion of the energy director 14 flows into the recess 13, and then the energy director 14. The molten portion is cured by being cooled together with the first flat plate member 1 and the second flat plate member 2.
Then, the first flat plate member 1 and the second flat plate member 2 are reliably integrated by curing the melted portion of the energy director 14, and the flow tube formed by the grooves 11 is formed in an airtight manner.

As a result, a micro flow tube chip in which a T-shaped flow tube formed by the groove 11 and an outflow port of the flow tube formed by the through holes 12a and 12b are formed on the first flat plate member is obtained.
In this micro flow tube chip, the first flat plate member 1 and the second flat plate member 2 are reliably integrated in the recesses 13 formed along the flow tube on both sides of the flow tube, The flow tube is formed airtight. In addition, since the melted portion of the two energy directors 14 disposed close to each other in the recess 43 is integrated with the second flat plate member 2, it has excellent strength against bending stress in the thickness direction. Have.

  Then, different fluids are injected from the two inlets by the through-holes 12a respectively arranged at the left and right ends of the T-shaped flow tube, and these fluids are mixed at the junction of the T-shaped flow tube. In addition, it reacts efficiently and flows toward the lower end, and is discharged from the outlet of the flow tube by the through-hole 12b formed at the lower end.

{Second Embodiment}
Next, the manufacturing method of the micro flow tube chip in the second embodiment will be described with reference to FIG.
First, a first flat plate member 3 made of the same material as that of the first flat plate member 1 in the first embodiment and a second flat plate member 4 made of the same material as that of the second flat plate member 2 are prepared. Each of the first flat plate member 3 and the second flat plate member 4 is formed by compression molding after injection, is formed in a rectangular plate shape having the same outer dimension, and at least one surface is smooth. Is formed.

In the first flat plate member 3, the same groove 31 as the groove 11 is formed on the smooth surface, and the through-hole 32 similar to the through-hole 12 is formed in the same manner as in the first embodiment. Yes.
Further, two energy directors 34 are provided on the ridges on the outer sides of the grooves 31 along the grooves 31.
Each of these energy directors 34 is formed in a substantially triangular shape in the longitudinal section and is formed integrally with the flat plate member 3. In addition, two energy directors 34 are disposed apart from each other.

On the other hand, in the second flat plate member 4, concave portions 43 are formed along the grooves 31 at positions corresponding to the outer sides of the both sides of the groove 31.
The concave portions 43 are respectively formed on the smooth surface of the second flat plate member 4, and are separated when the first flat plate member 3 and the second flat plate member 4 are integrated at both ends thereof. The two energy directors 34 arranged in this manner are arranged, and the energy director 34 is formed wide so that all the base end portions of the energy directors 34 are accommodated.
Further, like the recess 13, the capacity is formed to be equal to or larger than the protruding volume capacity of the energy director 34.

  Next, the above-described first flat plate member 3 and second flat plate member 4 are arranged so that the smooth surfaces thereof are opposed to each other, so that the front end portion of the energy director 34 is substantially in line contact with both end portions in the width direction of the recess 43. To overlay.

  Next, the surfaces of the first flat plate member 3 and the second flat plate member 4 are welded together by ultrasonic welding. At that time, the first flat plate member 3 and the second flat plate member 4 are securely bonded by melting the energy director 14 and allowing it to flow into the concave portion 43 and then curing the same as in the first embodiment. In addition to being integrated, the flow tube by the groove 31 is formed in an airtight manner.

Thereby, the micro flow tube chip in which the flow tube by the groove 31 and the flow tube outlet / outlet port by the through-hole 32 are formed in the first flat plate member 3 is obtained.
In this micro flow tube chip, the first flat plate member 3 and the second flat plate member 4 are reliably integrated in the recesses 43 formed wide along the flow tube on both sides of the flow tube. The flow tube is formed in an airtight manner. Further, since the melted portions of the two energy directors 34 that are spaced apart from each other in the width direction of the concave portion 43 are integrated with the second flat plate member 4, compared with the first embodiment, the plate is further improved. Excellent strength against bending stress in the thickness direction.

  In the same manner as in the first embodiment, different fluids are injected from the two inlets of the through-hole 32a, mixed at the junction of the flow tube, react efficiently, and flow toward the lower end. In addition, the gas is discharged from the outlet of the flow tube by the through-hole 32b.

{Third embodiment}
Next, the manufacturing method of the micro flow tube chip in the third embodiment will be described with reference to FIG.
Since the manufacturing method of the micro flow tube chip in this embodiment is made by further processing the first flat plate member 3 and the second flat plate member 4 in the second embodiment, the second embodiment. The description of the same configuration as that of the second embodiment is omitted by attaching the same reference numerals.

In the manufacturing method of the micro flow tube chip according to the present embodiment, first, notched step portions 35 that are one step lower than the plate surface of the first flat plate member 3 are formed on both sides of the groove 31 of the first flat plate member 3. This is different from the second embodiment.
The notch steps 35 are gradually inclined toward the outer sides of the both sides so that the openings are gradually widened toward the plate surface of the flat plate member 3, and close to the grooves 31. It is formed integrally with the base end portion of the side wall of the disposed inner energy director 34.

  In addition, the second flat plate member 4 has a trapezoidal lid 45 having a trapezoidal section that can be fitted into the notch step 35 between the recesses 43 formed at positions corresponding to the outer sides of the both sides of the groove 31. It is formed integrally with the flat plate member 4.

  The lid portion 45 is formed in a reverse taper shape so that the base end portion is formed wider than the tip end portion, and the side portion is in contact with the side wall of the notch step portion 35. Further, the flat surface of the front end portion is formed in substantially the same shape as the bottom surface of the cutout step portion 35, and the cross section of the base end portion is formed on the plate surface of the first flat plate member 3 formed by the cutout step portion 35. It is formed in substantially the same shape as the opening surface, and is formed so as to have the same height as the depth of the notch step 35.

  Next, the above-described first flat plate member 3 and second flat plate member 4 are arranged so that the smooth surfaces thereof are opposed to each other, the tip portion of the energy director 34 is in line contact with both end portions in the width direction of the recess 43, and The lid 45 is overlapped so as to be fitted into the notch step 35.

  Next, the surfaces of the first flat plate member 3 and the second flat plate member 4 are welded together by ultrasonic welding. At that time, the first flat plate member 3 and the second flat plate member 4 are securely bonded by melting the energy director 14 and allowing it to flow into the recess 43 and then curing, as in the second embodiment. In addition to being integrated, the flow tube by the groove 31 is formed in an airtight manner.

Thereby, the micro flow tube chip in which the flow tube by the groove 31 and the flow tube outlet / outlet port by the through-hole 32 are formed in the first flat plate member 3 is obtained.
Similar to the second embodiment, the micro flow tube chip is configured such that the first flat plate member 3 and the second flat plate are formed on the outer sides of the flow tube at the recesses 43 formed wide along the flow tube. The member 4 is surely integrated and the flow tube is hermetically formed, and has an excellent strength against bending stress in the plate thickness direction as compared with the first embodiment.
In the same manner as in the first and second embodiments, different fluids are injected from the two inlets by the through-hole 32a, mixed at the junction of the flow tubes, react efficiently, and directed toward the lower end. And is discharged from the outlet of the flow tube by the through-hole 32b.

According to the manufacturing method of the micro flow tube chip according to the first to third embodiments described above, the first flat plate members 1, 3 and the second flat plate members 2, 4 are made of the transparent resin plate that can be welded by the applied pressure. In addition, since at least one of the surfaces is formed smoothly, the flow surfaces formed by the grooves 11 and 31 are formed by ultrasonically welding the smooth surfaces after placing the smooth surfaces facing each other. The
At that time, since the applied pressure is intensively absorbed by the tip portions of the energy directors 14 and 34 formed integrally with the first flat plate members 1 and 3, it is ensured that the outer sides of the grooves 11 and 31 are outside. In addition, the first flat plate members 1 and 3 and the second flat plate members 2 and 4 can be integrated, and the flow tube can be formed airtight.

  On the other hand, the base plate of the energy director 14 of the first flat plate member 1 or the opposed surface of the tip of the energy director 34 of the second flat plate member 4 has a volume that is equal to or larger than the protruding volume capacity of the energy directors 14, 34. Since the recesses 13 and 43 are formed, it is possible to prevent the melted portions of the energy directors 14 and 34 from overflowing from the recesses 13 and 43. For this reason, it is possible to prevent the flow tube from being blocked and the actual flow rate cross-sectional area from being changed when the melted portion flows into the recesses 13 and 43 and hardened.

  In addition, since two energy directors 14 and 34 are formed on the outer sides of the grooves 11 and 31, respectively, the obtained micro flow tube tip can be used even when bending stress acts in the plate thickness direction. The joint portion of the inner energy directors 14 and 34 disposed in the vicinity of the pipes by the melted portion follows the moving direction of the flow tube, and the outer energy directors 14 and 34 disposed away from the flow tube. The joining portion by the melted portion can follow the moving direction of the outer peripheral portion of the micro flow tube tip. Thereby, the intensity | strength with respect to the bending stress of a micro flow tube tip can be raised.

  In particular, according to the manufacturing method of the micro flow tube chip of the first embodiment, adjacent base end portions of the two energy directors 14 are disposed in the recess 13 with a gap therebetween, and Since the base end portions of the energy directors 14 located in the vicinity of the edge 13a are spaced apart from the edges 13a, the bottoms of the recesses 13 are exposed around the two energy directors 14, and the energy directors are exposed. Thus, the 14 melted portions can surely flow into the recess 13. For this reason, it can prevent that the fusion | melting part of the energy director 14 flows out of the recessed part 13 in the plate | board surface of a 1st flat plate member, and a clearance gap exists between a 1st flat plate member and a 2nd flat plate member. It is possible to prevent the actual channel cross-sectional area from increasing.

  Moreover, according to the manufacturing method of the micro flow tube chip of the third embodiment, the inner energy director 34 disposed in the vicinity of the groove 31 by the side wall of the lid portion 45 or the like is formed by the ultrasonic welding. It can be melted in a state of being pressurized toward the center in the width direction. For this reason, a fusion | melting part can be efficiently made to flow in into the said center part in the said recessed part 43. FIG.

  Further, the lid 45 has a first surface in which the flat surface of the front end portion is formed in substantially the same shape as the bottom surface of the notch step portion 35 and the cross section of the base end portion is formed by the notch step portion 35. The first flat plate member 3 and the first flat plate member 4 are integrated with each other because the flat plate member 3 is formed in substantially the same shape as the opening surface on the plate surface and has the same height as the depth of the notched step 35. When the first flat plate member 3 and the second flat plate member 4 are integrated into the notch step portion 35 without any gap, it is possible to reliably prevent the melt from flowing into the flow tube. And an increase in the actual flow cross-sectional area of the flow tube can be prevented.

  In addition, this invention is not limited to the above-mentioned embodiment at all, For example, you may form three or more energy directors 14 and 34 in the outer side of the both sides of the grooves 11 and 31, respectively. In this case, it is desirable to arrange the energy directors 14 and 34 evenly in the width direction of the recesses 13 and 43.

It is a front schematic diagram which shows one Embodiment of the micro flow tube chip | tip obtained by the manufacturing method of the micro flow tube chip | tip of this invention. It is a side view of FIG. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1 when the first flat plate member 1 and the second flat plate member 2 are arranged to face each other before ultrasonic welding in the method of manufacturing the micro flow tube chip of the first embodiment. It is. The IV-IV line arrow figure in FIG. 1 at the time of arrange | positioning the 1st flat plate member 1 and the 2nd flat plate member 2 facing each other before ultrasonic welding in the manufacturing method of the micro flow tube chip of 1st Embodiment. It is. The VV arrow in FIG. 1 at the time of arrange | positioning the 1st flat plate member 1 and the 2nd flat plate member 2 facing each other before ultrasonic welding in the manufacturing method of the micro flow tube chip of 2nd Embodiment. It is. The VI-VI line arrow figure in FIG. 1 at the time of arrange | positioning the 1st flat plate member 1 and the 2nd flat plate member 2 facing each other before ultrasonic welding in the manufacturing method of the micro flow tube chip | tip of 3rd Embodiment. It is.

Explanation of symbols

1, 3 First flat plate member 2, 4 Second flat plate member 14, 34 Energy director 13, 43 Recess

Claims (5)

By integrating the first flat plate member having an elongated groove serving as a flow tube on the surface and the second flat plate member disposed facing the surface of the first flat plate member The flow tube is formed by the groove, and the through hole formed in the plate thickness direction of the first flat plate member or the second flat plate member at a position corresponding to the end of the flow tube, respectively. A method of manufacturing a micro flow tube chip that forms an outflow inlet of a flow tube,
The first flat plate member and the second flat plate member are each formed of a material that can be welded by pressure,
A longitudinal section formed integrally with one of the first flat plate member or the second flat plate member on the outer side of the both sides of the groove, along the groove and toward the other flat plate member. Forming a triangular energy director,
Projecting from the surface of the one plate member of the energy director on the surface of the energy director facing the energy director of the other plate member arranged to face the base end of the energy director or the tip of the energy director. Forming a recess having a volume greater than the protruding volume capacity,
Next, the energy director is disposed so that the tip portion is in line contact with the surface of the other flat plate member, and the first flat plate member and the second flat plate member are overlapped with each other. After matching
The energy director is melted from the tip by ultrasonic welding,
After flowing the melting part of this energy director into the recess,
Manufacturing the micro flow tube chip, wherein the melted portion is hardened in the recess to integrate the first flat plate member and the second flat plate member to form a flow tube by the groove. Method.   2. The method of manufacturing a micro flow tube chip according to claim 1, wherein two or more energy directors are formed outside both sides of the groove. 3. The micro flow tube chip according to claim 1, wherein both the outflow inlet and the recess are formed in the first flat plate member, and the energy director is formed in the recess. 4. Production method.   The recesses are formed wide at positions corresponding to the outer sides of both sides of the groove of the second flat plate member, and the energy directors are arranged at both ends in the width direction of the concave portion of the first flat plate member. The micro flow tube chip manufacturing method according to claim 2, wherein the micro flow tube chip is formed at a position corresponding to the portion. The first flat plate member is formed with a notch step portion that is one step lower than the plate surface at both sides of the groove, and the side wall of the notch step portion is disposed in the vicinity of the groove. The second flat plate member is formed integrally with the second flat plate member, and is formed in a protrusion toward the notch step portion. 5. The method of manufacturing a micro flow tube chip according to claim 4, wherein a lid portion formed so as to be fitted into the notch step portion is formed.

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