JP2008006437A - Valve door with ball joint - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for sealing a substrate transfer passage in a chamber. <P>SOLUTION: In one embodiment, the apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member coupled to an actuator by a ball joint. The ball joint is configured to allow a movement of the door member relative to the lever arm around a center of the ball joint. In one embodiment, a sealing face of the elongated door is curved. In another embodiment, the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a metrology chamber, a thermal processing chamber, or a physical vapor deposition chamber, a load lock chamber, a substrate transfer chamber or a vacuum chamber. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

Background of the Invention

[Field of the Invention]
Embodiments of the present invention generally relate to a slit valve door for sealing a substrate passage in a vacuum processing system.

Background of related technology

  In general, thin film transistors (TFTs) are used in computers and television monitors, mobile phone displays, active matrix displays such as personal digital assistants (PDAs), and more and more devices. Usually, a flat panel includes two glass plates and a liquid crystal material layer sandwiched therebetween. At least one glass plate has thereon a conductive film connected to a power source. The orientation of the crystal material is changed by the power supplied from the power source to the conductive film, and a pattern display is formed.

  As flat panel technology is accepted in the market, equipment manufacturers can accommodate larger glass substrates for flat panel display assemblers in response to demands for larger displays, increased production and lower manufacturing costs. I have been working hard to develop new systems. Current glass substrate processing apparatuses are generally configured to accommodate substrates up to about 5 square meters, and it is anticipated that processing apparatuses capable of supporting substrates of sizes exceeding 5 square meters will appear in the near future. .

  Glass substrate processing is typically performed by subjecting the substrate to a plurality of sequential processes in a cluster tool to form devices, conductors, and insulators on the substrate. Each of these processes is typically performed in a processing chamber configured to perform a single step in the manufacturing process. In order to efficiently complete the entire sequence of processing steps, the cluster tool includes a number of processing chambers coupled to a central transfer chamber. A robot is housed in the transfer chamber and facilitates transfer of the substrate between the processing chamber and the load lock chamber. The load lock chamber allows transfer of the substrate between the vacuum environment of the cluster tool and the surrounding environment of the factory interface. Such cluster tools for processing glass substrates are available from AKT, a wholly owned subsidiary of Applied Materials, Santa Clara, California.

  As the size of a flat panel display manufacturing substrate increases, the size of such substrate manufacturing equipment increases as well. Thus, the doors or gates that isolate one vacuum chamber (or load lock chamber) from other chambers are also large, or especially longer, because the slot opening between the two chambers is the substrate that passes through it. This is because it needs to be wide corresponding to the width. As the door length increases, it becomes technically difficult to achieve a good separation between the two chambers, which is maintained by an elastomeric seal placed around the slot opening between the door and the chamber wall. ing.

  FIG. 1A is a partial cross-sectional view of a substrate passage 108 formed through a chamber body 106 and selectively sealed by a conventional slit valve door 110. Conventional slit valve doors are typically constructed from a flat aluminum member having a wide lateral extent. A closing force is applied toward the center of the door 110 by the bracket 102 attached to the rigid rotating shaft 104 as shown in FIGS. 1A-B. Between the passage 108 sealing position (as shown in FIG. 1A) and the passage 108 open position, the door 110 is rotated by an actuator 118 coupled to the shaft 104. A seal 116 is disposed between the door 110 and the chamber body 106.

  In order to better isolate the chamber, a large force is required to load the seal 116. When a high load is applied near the center of the door 110, as indicated by the arrow 112, a high load force is applied near the center of the door 110, and the sealing force near the end of the door is substantially weakened. Due to the long range of the door 110 between the bearing support 114 located on the wall of the chamber body 106 and the bracket 102 connected to the center of the door 110, the load is shown as shown by the phantom shaft 120. When applied, the shaft 104 bends. If the shaft 104 is bent while the door 110 is in the closed position, the low load state of the seal at the door end is further deteriorated. If the sealing force at the door end is low, leakage may occur from the passage 108, which is undesirable.

  In order to provide a more rigid door with a more uniform hermetic load, the door and / or shaft can be constructed of a thicker material or a higher rigidity material. However, because high-strength materials are generally expensive, this approach increases the cost of the load lock chamber and larger loads to accommodate larger, higher-strength doors with sufficient clearance during operation. A lock chamber is required. Increasing the size of the load lock chamber is undesirable due to the need for higher pump performance to evacuate a larger load lock capacity, as well as increased material volume and manufacturing cost of the chamber itself. Further, when the load lock capacity increases, it is generally necessary to lengthen the exhaust time, which adversely affects the system throughput.

  The use of curved slit valves has been proposed to address these problems, and is assigned to the same assignee and is incorporated herein by reference above. No. 867100, “Curved Slit Valve Door”. The implementation of curved slit valve doors posed new engineering challenges. For example, in order to seal the slit valve passage, the door sealing surface is pressed against the flat chamber wall to form a flat plate, so that the projection length of the curved slit valve door can be changed to prevent excessive wear of the door operating mechanism. It must be prevented. Further, since the slit valve door rotates relative to the door sealing surface, lateral movement occurs between these surfaces if the slit valve door and the door sealing surface are non-parallel. The lateral movement causes seal wear and generation of particles, and in extreme cases, the seal is sandwiched between seal glands, which may cause a failure in sealing quickly.

  Accordingly, there is a need for an improved slit valve door.

Summary of the Invention

  Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a sealing surface coupled to an actuator by a ball joint. The chamber may be one of a chemical vapor deposition chamber, a load lock chamber, a measurement chamber, a heat treatment chamber, or a physical vapor deposition chamber, a load lock chamber, a substrate transfer chamber, a vacuum chamber, or the like.

  In another embodiment, an apparatus for sealing a substrate transfer passage in a vacuum chamber includes an elongated door member having a concave sealing surface connected to a lever arm by a ball joint. The ball joint is configured such that the door member can move relative to the lever arm with its center as an axis.

  In another embodiment, an apparatus for sealing a substrate transfer passage in a load lock chamber includes an elongated door member connected to an actuator by a ball joint. The ball joint is configured such that the door member can move relative to the lever arm with its center as an axis. In one embodiment, the sealing surface of the elongated door is curved.

Detailed description

  The present invention generally provides an improved slit valve door that is particularly suitable for use in large area substrate processing chambers. The slit valve door includes a curved sealing surface and a flexible joint, and responds to changes in the protruding length of the door, minimizing the generation of unintentional particles associated with the seizure of rotating parts, and the door Extend the service life of the operating mechanism. The present invention is described below assuming use in a flat panel processing system such as that available from AKT, a division of Applied Materials of Santa Clara, California. It should be understood that it is also useful for sealing substrate transport passages in other types of processing systems.

  FIG. 2 is a plan view of one embodiment of a processing system 250 suitable for processing large area substrates (eg, a glass or polymer substrate having a planar area greater than about 0.16 square meters). The processing system 250 typically includes a transfer chamber 208 coupled to the factory interface 212 by a load lock chamber 200. The transfer chamber 208 has at least one vacuum robot 234 disposed therein and adapted to transfer a substrate between a plurality of circumscribed processing chambers 232 and the load lock chamber 200. The processing chamber 232 may be a chemical vapor deposition chamber, a physical vapor deposition chamber, a measurement chamber, a heat treatment chamber, or the like. Typically, the transfer chamber 208 is maintained in a vacuum so that there is no need to adjust pressure between the transfer chamber 208 and the individual processing chambers 232 for each substrate transfer.

  The factory interface 212 typically includes a plurality of substrate storage cassettes 238 and at least one atmospheric robot 236. The cassette 238 is normally detachably disposed in a plurality of bays 240 formed on one side of the factory interface 212. The atmospheric robot 236 is adapted to transfer the substrate 210 between the cassette 238 and the load lock chamber 200. Typically, the factory interface 212 is maintained at atmospheric pressure or a pressure slightly above atmospheric pressure.

  FIG. 3 is a cross-sectional view of one embodiment of the load lock chamber 200 of FIG. The load lock chamber 200 includes a slit valve door assembly 300 adapted to seal a passageway (substrate access portion) 316 between the factory interface 212 and the transfer chamber 208. One example of a load lock chamber that can be adapted and beneficially utilized in the present invention is US Provisional Application No. 60 / 512,727, filed Oct. 20, 2003, "Load Lock Chamber for Large Area Substrate Processing Systems" by Kurita et al. And U.S. patent application Ser. No. 09 / 464,362 filed Dec. 15, 1999 by Kurita et al. The slit valve door assembly 300 of the present invention may be used with load lock chambers having other configurations. In addition, the substrate port formed in the transfer chamber 208, the processing chamber 232, or other vacuum chamber may be selectively sealed using the slit valve door assembly 300.

  In the embodiment illustrated in FIG. 3, the load lock chamber 200 includes a chamber body 312 that includes a plurality of vertically stacked and environmentally isolated substrate transfer chambers separated from each other by a vacuum-tight horizontal inner wall 314. Prepare. Although the embodiment of FIG. 3 illustrates three single substrate transfer chambers 320, 322, 324, the chamber body 312 of the load lock chamber 200 may include two or more substrate transfer chambers stacked vertically. . For example, the load lock chamber 200 includes N substrate transfer chambers separated by N−1 horizontal inner walls 314, where N is an integer greater than one.

  Since each of the substrate transfer chambers 320, 322, and 324 is configured to accommodate one large-area substrate 210, the capacity of each chamber is minimized, and a quick exhaust and ventilation cycle is promoted. In the embodiment illustrated in FIG. 3, the internal volume of each substrate transfer chamber 320, 322, 324 is less than about 2000 liters, and in one example is about 1400 liters, a planar area greater than about 3.7 square meters, For example, a substrate having a flat area of 5 square meters or more is accommodated. In order to accommodate substrates of different sizes, the width, length and / or height of the substrate transfer chamber of the present invention may be configured differently.

  The chamber body 312 has a first side wall 302, a second side wall 304, a third side wall 306, a bottom part 308, and an upper part 310. A fourth side wall 318 (partially shown in FIG. 3) faces the third side wall 306. The body 312 is formed from a rigid material suitable for use under vacuum conditions. The chamber body 312 is composed of a single block of aluminum or other suitable material (eg, a unitary construction), or a module portion.

  The substrate 210 is supported by a plurality of substrate supports 344 on an inner wall 314 that serves as a boundary between the bottom 308 of the first substrate transfer chamber 320 and the bottoms of the second and third substrate transfer chambers 322 and 324. Since the substrate support 344 is configured to support the substrate 210 at a certain height from the bottom 308 (or the inner wall 314), contact between the substrate and the chamber body 312 is avoided. The substrate support 344 is configured to minimize substrate scratching and contamination. In the embodiment illustrated in FIG. 3, the substrate support 344 is a stainless steel pin having a rounded upper end 346. Other suitable substrate supports are US Pat. No. 6,528,767, filed Mar. 5, 2003, US Patent Application No. 09/982406, filed Oct. 27, 2001, US Patent, filed Feb. 27, 2003. Application 60/376857.

  At least one sidewall of each substrate transfer chamber 320, 322, 324 includes a port 340 that passes therethrough and connects to the exhaust system 342, thereby facilitating control of the internal volume pressure of each chamber. . The exhaust system 342 includes a vent, a pump, and a flow control device that allows a predetermined one of the substrate transfer chambers 320, 322, and 324 to be selectively vented or exhausted. One example of an exhaust system that can be beneficially adapted with the present invention is U.S. Provisional Application No. 60 / 512,727, filed Oct. 20, 2003, "Load Lock for Large Area Substrate Processing Systems," incorporated by reference above, filed October 20, 2003. Chamber ".

  Each substrate transfer chamber 320, 322, 324 defined within the chamber body 312 includes two substrate access ports 316. The port 316 is configured to facilitate the loading / unloading of the large area substrate 210 into / from the load lock chamber 200. In the embodiment illustrated in FIG. 3, the substrate access ports 316 of each substrate transfer chamber 320, 322, 324 are disposed on both sides of the chamber 312, but the ports 316 may be disposed on adjacent walls of the body 312. Good. In one embodiment, the width of the first and second substrate access ports 316 is at least 1365 millimeters, but is not limited thereto.

  Each substrate access port 316 is each selectively sealed by a slit valve door assembly 300 adapted to selectively isolate the first substrate transfer chamber 320 from the environment of the transfer chamber 208 and the factory interface 212. Each slit valve door assembly 300 is moved between an open position and a closed position by at least one actuator 330 (actuators 330 are typically located on the fourth wall 318 outside the chamber body 312 of FIG. 3).

  FIG. 4 is a horizontal cross-sectional view of the load lock chamber 200 through one of the slit valve door assemblies 300. The slit valve door assembly 300 includes a door member 402 coupled to at least a first shaft 404 by a lever arm 413. The first shaft 404 and the lever arm 413 are rotated by the actuator 330 to move the door member 402 between the open / close positions. In the embodiment illustrated in FIG. 4, the slit valve door assembly 300 includes a second shaft 406 that is coupled to the door member 402 by a second lever arm 413. The door member 402 is rotated using the second actuator 430 illustrated in the state of being connected to the outside of the third wall portion 306 of the chamber body 312 together with the actuator 330. The second actuator 430 rotates the door member 402 in cooperation with the actuator 330. The first and second actuators 330, 430 may be hydraulic cylinders, pneumatic cylinders, motors or other actuators suitable for rotating the shafts 404, 406.

  A lever arm 413 coupled to each shaft 404, 406 is coupled to the door member 402 by a flexible coupling assembly 419. The flexible coupling assembly 419 flexes, resizes, and pivots the door member 402 without tying up the ball joint 460 and the shafts 404, 406 or other components used to move the door member 402. A link member 450 that enables bending. Ball joint 460 facilitates rotation of door member 402 in at least two planes relative to lever arm 413.

  Referring to the embodiment illustrated in FIG. 5A, the flexible coupling assembly 419 includes a link member 450, a ball joint 460, at least one elastic bushing 411, a thrust washer 421, a spacer 423, and a retainer 580. The link member 450 may be any structure suitable for securing the door member 402 to the lever arm 413, and in the embodiment of FIG. 5A, is a bell bolt 410 and a nut 415. The nut 415 may be secured by a locking mechanism, such as a set screw, securing adhesive, wire, plastic insert, spring, retaining ring or other suitable locking mechanism. In the embodiment illustrated in FIG. 5A, the locking mechanism is a retaining ring 582 that is pressed against the bell bolt 410 to prevent accidental rotation of the nut 415.

  The elastic bushing 411 is disposed in a recess 530 formed in the door member 402. The recess 530 includes a hole 532 that allows the bell-shaped bolt 410 to pass through the door member 402. The bell-shaped bolt 410 passes through the hole 504 of the bushing 411. The head 502 of the bell-shaped bolt 410 prevents the bell-shaped bolt 410 from coming off from the elastic bushing 411. The elasticity of the elastic bushing 411 allows the bell bolt 410 to pivot freely relative to the door member 402 (ie, rotate about at least two surfaces, eg, x and z axes, pivot point 590). ).

  The elastic bushing 411 may be formed from an elastic material such as a polymer, or may be formed in a spring shape. Examples of suitable polymeric materials include polyurethanes, polyamideimides, Torlon (trade name, TORLON), elastomers and soft plastics such as Vuitton (trade name, VITON), or other suitable elastic materials. Examples of other elastic materials that may constitute the bushing 411 include spring shapes such as disc springs formed from metal or other suitable spring material.

  In one embodiment, the inner diameter of the hole 504 of the elastic bushing 411 is larger than the diameter 506 of the bell bolt 410. Accordingly, the bell-shaped bolt 410 can move in the lateral direction within the elastic bushing 411, and the lateral movement of the door member 402 relative to the lever arm 413 is allowed.

  The thrust washer 421 is disposed between the lever arm 413 and the door member 402. Since the thrust washer 421 becomes a compliant member and increases the frictional resistance between the door member 402 and the lever arm 413, the rigidity and the direction of the door member 402 relative to the chamber sealing surface when the door member 402 is continuously opened and closed. And a restoring force that substantially maintains The thrust washer 421 is usually a non-metallic material such as a polymer, and prevents the metal and metal from contacting each other between the lever arm 413 and the door member 402. In one embodiment, the thrust washer 421 is formed from a peak (PEEK).

  The ball joint 460 is disposed in a recess 540 formed in the lever arm 413. A spacer 423 is disposed between the ball joint 460 and the lever arm 413 to prevent metal-to-metal contact. In one embodiment, the spacer 423 is formed from a polymer such as PEEK.

  The ball joint 460 includes a ball 562 captured by the carrier 564. Ball 562 and carrier 564 may be formed of any suitable material that enables rotation of ball 562 within carrier 564 without generation or wear of particles. In one embodiment, ball 562 and carrier 564 are formed from stainless steel.

  The bell-shaped bolt 410 passes through a hole 542 formed in the recess 540 and a hole 566 formed in the ball 562. The nut 415 is screwed into the bell-shaped bolt 410 and the ball joint 460 and the ball joint 460 are freely rotatable relative to the lever arm 413 around a pivot point 592 defined at the center of the ball 562. The lever arm 413 is captured by the door member 402.

  The holder 430 is connected to the lever arm 413 and fixes the ball joint 460 to the lever arm. In one embodiment, the retainer 480 includes a threaded portion that engages a female thread formed in the recess 540. The retainer 480 may include a drive mechanism such as a spanner key or a slot that facilitates rotation of the retainer 480.

  It is conceivable that the ball joint 460 is installed close to or inside the door member 402 or the lever arm 413. However, in order to minimize the movement of the sealing surface of the door member 402 relative to the sealing surface of the chamber body 312 surrounding the substrate access port 316, the pivot point 590 at the center of the ball 562 is the sealing surrounding the substrate access port 316. Should be placed close to the surface. Therefore, when the sealing surface of the door member 402 is on the side of the door member 402 opposite to the lever arm 413, the ball joint 460 may be disposed in the door member 402 as shown in FIG. 5B. Conversely, when the sealing surface of the door member 402 is on the same door member 402 side as the lever arm 413, the ball joint 460 may be disposed in the lever arm 413 as shown in FIG. 5B. In addition, since the ball joint 460 maintains good parallelism between the door member 402 and the sealing surface of the chamber body 316, the use of the ball joint 460 in applications having a door member with a flat sealing surface is It is also beneficial to maximize seal life and minimize seal wear.

  Returning to FIG. 4, the side walls 306, 318 include a recess 416 formed in the side wall that houses at least a portion of the lever arm 413, thereby minimizing the width and internal volume of the chamber body 316. It becomes. The shafts 404 and 406 are connected to actuators 330 and 430 by external actuator arms 414, respectively. Each external actuator arm 414 and shaft 404, 406 may be configured to be splined, keyed, etc. to prevent rotational slippage between them.

  Each shaft 404, 406 passes through a seal pack assembly 408 that allows the shaft to rotate while maintaining the vacuum integrity of the chamber body 312. The seal pack assembly 408 is typically mounted outside the chamber body 312 to minimize the width and internal volume of the chamber body 312.

  6A-6B are cross-sectional views of the door member 402 in the open and closed positions. FIG. 6A illustrates the curved slit valve door in the open position. In the open position, the door member 402 is curved, and the first of the bell-shaped bolt 410 between the lever arm 413 and the door member 402 due to the deflection of the elastic bushing 411 and the rotation of the ball 562 within the ball joint 460. The direction is adjusted. When the actuators 330 and 430 connected to the lever arm 413 rotate the door member 402 to the closed position, the door member 402 is pressed against the chamber body to become a flat plate, and closes the slit valve passage 316. Since the door member 402 is a flat plate, the end connected to the lever arm 413 by the flexible connecting assembly 419 moves outward. The difference in the protruding length of the door member 402 in the open position and the closed position (for example, the curved and flattened positions) is illustrated by the deviation of the imaginary lines 600 and 602 extending from the end of the door member 402 shown in FIGS. Is done. The direction of the bell-shaped bolt 410 is changed by the expansion of the door member 402, and is inclined at an angle relative to the lever arm 413. The bushing 411 also allows a change in the length of the door member 402 by allowing lateral movement of the bell-shaped bolt 410, and at the same time, the ball joint 460 provides a change in the angular direction of the bell-shaped bolt 410. Also, the flexible coupling assembly 419 does not substantially change the direction of the lever arm 413 relative to the shafts 404, 406 that penetrate the chamber body 316. In addition to the movement that occurs when the curved door member 402 is straight, rotation of the second surface also causes the ball of the flexible coupling assembly 419 to rotate as the surface of the door member 402 pivots and aligns with the chamber wall upon contact. Covered by joint 460.

  FIG. 7 is a cross-sectional view of one embodiment of a seal pack assembly 408. The seal pack assembly 408 includes a housing 702, an internal bearing 704, an external bearing 706, and one or more shaft seals 708. The housing 702 is normally connected to the chamber body 312 by a plurality of fasteners 710. The O-ring 712 is disposed between the housing 702 and the chamber main body 312 and is vacuum-sealed therebetween.

  The housing 702 includes a through hole 714 through which the shaft 406 can penetrate the housing 702. The through-hole 714 has a counterbore at each end for receiving internal and external bearings 704, 706. The retaining ring 718 prevents the bearings 704 and 706 from being removed from the hole 714. Bearings 704 and 706 are press fit around shaft 406 to facilitate rotation. In the embodiment illustrated in FIG. 7, the bearings 704, 706 are cross roller bearings.

  One or more shaft seals 708 are disposed in the holes 714 to provide a dynamic vacuum seal between the second shaft 406 and the housing 702. In the embodiment illustrated in FIG. 7, the plurality of shaft seals 708 are illustrated separated by spacers 716.

  The inner end 720 of the second shaft 406 is connected to the arm 413 in such a manner that the rotational movement is reliably transmitted from the shaft 406 to the lever arm 413. For example, the lever arm 413 may be fitted with the shaft 406 or may be securely rotated by being keyed. Alternatively, the lever arm 413 may be pressed, pinned, press fitted, welded or glued to the shaft 406.

  FIG. 8 is a perspective view of one embodiment of a lever arm 413 where the outer end 740 of the first shaft 404 is such that the movement of the external actuator arm 414 is reliably transmitted to the first shaft 404 as a rotational movement. An external actuator arm 414 is connected. The second shaft 406 is similarly attached. For example, the external actuator arm 414 may be securely rotated by fitting with the shaft 404 or by providing a key 802. Alternatively, the external actuator arm 414 may be pressed, pinned, press fitted, welded or glued to the shaft 404.

  FIGS. 9-10 are front and plan views of one embodiment of the door member 402. The door member 402 is typically elongated and formed from aluminum or other suitable material. The door member 402 includes long sides 902 and 904, short sides 906 and 908, a sealing surface 910, and a back surface 912. Each of the lever arms 413 is connected to both ends of the back surface 912 of the door member 402 in the vicinity of the short sides 906 and 980 by a flexible connection assembly 419. In one embodiment, the door member 402 is rectangular and the width between the short sides 906, 908 is at least 1260 millimeters. The width of the door member 402 may be longer or shorter than this length for different size substrates.

  The seal gland 914 is formed on the inner sealing surface 910 of the sides 902, 904, 906, 908. The seal gland 914 circumscribes the central portion of the door member 402 that covers the access port 316 that penetrates the chamber body 312. A seal 916 is disposed within the seal gland 914 and seals the door member 402 against the chamber body 316. The seal 916 is generally configured to prevent the door member 402 and the chamber body 316 from contacting when pressed by the actuators 330, 430. In one embodiment, seal 916 is comprised of an O-ring formed from a fluoropolymer or other suitable material. Examples of other sealing materials include fluorocarbon (fkm) or perfluoroelastomer (ffkm), nitrile rubber (nbr) and silicone. Alternatively, the seal 916 and the seal gland 914 may be disposed on the chamber body 316.

  At least the sealing surface 910 of the door member 402 is curved relative to the main shaft 1002 connecting the short sides 906 and 908. The main shaft 1002 is parallel to the imaginary line 1000 defined by the sealing surface 1012 of the chamber body 316 where the door member 402 is sealed. For clarity, the sealing surface 1012 and door member 402 are shown exaggerated and spaced apart in FIG. The imaginary line 1000 may also be parallel to the shafts 404 and 406 and perpendicular to the short sides 906 and 908. In the embodiment illustrated in FIG. 10, the sealing surface 910 is convex relative to the line 1000, so when the door member 402 is closed, the center of the sealing surface 910 first contacts the chamber body 312 and the door. A spring force is generated in the member 402.

  During operation, door member 402 is rotationally closed by actuators 330, 430 coupled to lever arms 413 disposed on short sides 906, 908. The amount of load applied to the curved door by the actuators 330 and 430 is indicated by an arrow 1102 in FIG. As the door rotates and closes, lateral movement of the bell-shaped bolt 410 occurs and is allowed by the elastic bushing 411 to allow vertical movement relative to the lever arm 413. Due to the curvature of the door member 402, the center of the door member 402 first contacts the chamber body 312. As the door member 402 is flattened by the force of the actuators 330 and 430, a spring force is generated by the curvature of the door member 402, and the seal 916 in the central region of the door member 402 is strengthened. The load amount due to the spring force of the door member 402 is illustrated by an arrow 1104 in FIG. The high load applied to the door end via the actuators 330 and 430 is offset by combining with the spring force of the central portion of the door member 402, and the seal 916 surrounding the board access port 316 is uniformly compressed and loaded. . The sum of the load amounts 1102 and 1104 is represented by an arrow 1106 in FIG. Under the influence of both the actuator and the spring force of the door member 402, the flat sealing surface 910 applies a load uniformly to the seal 916 surrounding the passage through the chamber body 312. A reliable vacuum seal is established and at the same time the life of the seal is extended. The degree of curvature of the sealing surface 910 may be determined by beam deflection analysis for a predetermined door shape and a desired vacuum state.

  Furthermore, since the first and second shafts 404 and 406 are short relative to the width of the door member 402 and the load lock chamber 200, the shaft is less bent. For this reason, force is more efficiently transmitted from the actuators 330 and 430 to the door member 402. Also, the short shaft 404, 406 can have a smaller shaft diameter, thereby reducing the cost associated with longer shafts that require a larger diameter for rigidity and associated large hardware. In addition, because the internal actuator arm 412 is located in a recess 416 formed in the chamber body 316, the width and internal volume of the load lock chamber 200 is minimized relative to a predetermined substrate access port width. This reduces the manufacturing cost of the load lock chamber 200, and reduces the capacity of the load lock chamber 200 that requires ventilation and exhaust during operation, which is beneficial in improving throughput.

  FIG. 12 is a partial cross-sectional view of a load lock chamber 1200 according to another embodiment. The load lock chamber 1200 is substantially the same as the load lock chamber described above, except that actuators 1202 and 1204 connected to both sides of the door member 402 are disposed inside the chamber body 1212.

  While the above is directed to embodiments of the invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope of the invention is It is determined based on the scope of claims.

BRIEF DESCRIPTION OF THE DRAWINGS The above-described arrangement of the present invention can be understood in detail by obtaining a more specific description of the invention briefly outlined above with reference to the embodiments illustrated in the accompanying drawings.
FIG. 6 is a partial cross-sectional view of a chamber body having a substrate passage selectively sealed by a conventional slit valve door. FIG. 1B is a side view of the door actuator and the conventional slit valve door when the chamber body is removed in FIG. 1A. 1 is a plan view of one embodiment of a processing system for processing large area substrates having a load lock chamber of the present invention. FIG. FIG. 3 is a cross-sectional view of the load lock chamber taken along section line 3-3 of FIG. FIG. 4 is a cross-sectional view of the load lock chamber taken along section line 4-4 of FIG. FIG. 6 is a partial cross-sectional view of one embodiment of a flexible coupling assembly. FIG. 6 is a partial cross-sectional view of another embodiment of a flexible coupling assembly. FIG. 6 is a cross-sectional view of one embodiment of a curved slit valve door in an open position. FIG. 3 is a cross-sectional view of one embodiment of a curved slit valve door that is rotationally closed. FIG. 5 is a cross-sectional view of one embodiment of a seal pack assembly taken along section line 5-5 of FIG. FIG. 3 is a partial side cross-sectional view of one embodiment of the load lock chamber of FIG. 2. ~ It is the front and top view of one Embodiment of a door member. It is the schematic showing the sealing force concerning a door member. It is a fragmentary sectional view of other embodiments of a load lock chamber.

  To facilitate understanding, wherever possible, the same reference numbers are used to identify the same elements that are common to the figures. Elements and configurations in one embodiment may be used for convenience in other embodiments without particular description.

  However, the attached drawings only illustrate exemplary embodiments of the present invention, and the present invention may include other equally effective embodiments and therefore should not be construed to limit the scope of the present invention. It must be noted.

Claims (20)

A chamber body having a first substrate transfer port;
A door member having a sealing surface that can be positioned to selectively seal the first substrate transfer port;
Lever arm,
A chamber that includes a ball joint that connects the lever arm and the slit valve door to allow rotation of the lever arm about at least two axes. A second ball joint;
A second lever having a first end connected to a second shaft disposed through the chamber body and a second end connected to the second end of the slit valve door member by a second ball joint. The chamber of claim 1, further comprising an arm.   The chamber of claim 1, wherein the chamber body further comprises a plurality of stacked single substrate transfer chambers.   The chamber of claim 1 wherein the sealing surface has a convex curvature.   The chamber according to claim 1, wherein the chamber is one of a chemical vapor deposition chamber, a load lock chamber, a measurement chamber, a heat treatment chamber, or a physical vapor deposition chamber, a load lock chamber, a substrate transfer chamber, or a vacuum chamber. A transfer chamber having a plurality of substrate transfer ports, at least one of which has a substantially flat sealing surface;
A chamber body having a first substrate transfer port and at least a second substrate transfer port;
A door member having a curved sealing surface that is positionable relative to a flat sealing surface of the transfer chamber to selectively seal the first substrate transfer port;
Lever arm,
Lever arm in a form that is a ball joint and the door member rotates relative to the lever arm around the center of the ball joint when the door member is flattened by bringing it into contact with the flat sealing surface of the transfer chamber And a load lock chamber coupled to a transfer chamber including a ball joint coupled to the door member. The ball joint of the load lock chamber
With the ball,
A carrier that captures the ball and allows the ball to rotate therein;
The system of claim 6 further comprising a ball and a shaft extending through the carrier and connecting the door member to the lever arm.   The system of claim 7, wherein the lever arm of the load lock chamber further includes a recess in which the ball and carrier are disposed.   The load lock chamber door member further includes a recess having an elastic bushing disposed therein, and the shaft has a clearance hole formed through the elastic bushing that allows the shaft to move laterally relative to the door member. 9. The system of claim 8, wherein the system extends through the portion.   8. The system of claim 7, wherein the load lock chamber door member further comprises a recess in which the ball and carrier are disposed.   The system of claim 10, wherein the recess of the door member is formed in a sealing surface outside the seal gland.   The load lock chamber lever arm further includes a recess having an elastic bushing disposed therein, and the shaft has a clearance hole formed through the elastic bushing that allows the shaft to move laterally relative to the lever arm. The system of claim 11, extending through the section.   8. The system of claim 7, wherein the ball and carrier are formed from stainless steel. Actuating the first lever arm and the second lever arm connected to the door member by each ball joint to rotate the curved sealing surface of the door member to contact the flat sealing surface;
Including sealing the substrate access port defined between the load lock chamber and the transfer chamber by pressing the curved sealing surface of the door member against the flat sealing surface and flattening. A method for sealing a substrate access port, wherein the substrate rotates about a ball joint. Flattening
Rotating the door member about a first axis defined through the ball joint to substantially align the surface with the sealing surface;
15. The method of claim 14, further comprising rotating the end of the door member about second and third axes defined through each ball joint as the door is flattened.   The method of claim 14, wherein the flattening further comprises moving the end of the door member laterally outward.   The ball joint includes a shaft extending through the ball, and moving the end of the door member outward in the lateral direction further includes moving the end of the shaft outward, and by the outward movement of the shaft The method of claim 16, wherein the ball rotates.   The method of claim 14, wherein the flattening further comprises rotating a ball disposed in the recess of the door member.   15. The method of claim 14, wherein the flattening further comprises rotating a ball disposed in the recess of the lever arm.   Rotating the curved sealing surface of the door member into contact with the flat sealing surface brings the central portion of the door member into contact with the flat sealing surface prior to contacting the end of the door member with the flat sealing surface. 15. The method of claim 14, further comprising: a ball joint connecting the end of the door member to the lever arm.

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