CN2709730Y

CN2709730Y - High vacuum rotary valve

Info

Publication number: CN2709730Y
Application number: CN 200420032155
Authority: CN
Inventors: 孙德玉
Original assignee: JINZHOU ELECTRIC STOVE CO Ltd
Current assignee: JINZHOU ELECTRIC STOVE CO Ltd
Priority date: 2004-06-16
Filing date: 2004-06-16
Publication date: 2005-07-13
Anticipated expiration: 2014-06-16

Abstract

The utility model relates to a high vacuum rotary valve which is used among each vacuum chamber of a vacuum device. The utility mode solves the problem that the existing vacuum valve is unable to be heated and ash can fall on a sealing ring, etc. The utility model is provided with a valve body, with a valve plate provided in the valve body. The utility model is characterized in that: the valve plate is installed on a cantilever which is arranged on a main shaft; the main shaft and a vertical lifting oil cylinder are connected with each other, and a crank hinged with a parallel translation oil cylinder is installed on the main shaft; the valve plate can rise, drop and move in the form of parallel through the vertical lifting and the parallel translation of the oil cylinder, so the action of opening and closing the valve can finished. The utility model has the following advantages: the valve body and the valve plate all adopt a double-layer water cooling structure, and thermal baffles are installed at the upper surface of the valve plate and at the lower surface of the valve plate, so the high temperature resistance of the utility mode is enhanced; after the valve is opened, the sealing ring on the valve plate tightly clings to the inner surface at the upper part of the valve body, so dust or particulate material can be avoided to fall on the sealing ring, and well sealing property can be ensured all along.

Description

The high vacuum rotary valve

Technical field

The utility model belongs to a kind of vacuum valve, particularly a kind of high vacuum rotary valve that uses between each vacuum chamber of vacuum equipment.

Background technique

Vacuum valve is the vitals on the vacuum equipment, and its effect is that constituent elements different on the vacuum equipment is separated, so that the degree of vacuum of each constituent element of vacuum equipment is controlled.Existing vacuum valve has many kinds, as solenoid valve, butterfly valve, flapper valve, push-pull valve or the like.Wherein, solenoid valve and butterfly valve mostly are smaller diameter valve, are mainly used in the vacuum system.Flapper valve and push-pull valve mostly are large bore valves, are mainly used in the joint of vacuum system and vacuum chamber.Flapper valve mainly is made of valve body, baffle plate and Pneumatic actuator etc.Wherein, baffle plate is installed in the valve body, and Pneumatic actuator is installed in outside the valve body, and baffle plate overturns in valve body under the driving of Pneumatic actuator, realizes the switch of valve.This valve will overturn in valve body owing to baffle plate, thereby the volume ratio of valve body is bigger, and the suction port of this valve and relief opening vertical setting usually, so, be not suitable between each vacuum chamber, using.In addition, the seal ring on this valve guard is not protected facility yet, is not suitable at high temperature, has on the vacuum equipment of dust and use.Push-pull valve is mainly by valve body, spool, formations such as drive unit.The valve body of push-pull valve is generally rectangular, and thickness is less, and its suction port and relief opening are oppositely arranged, and is positioned at the front end of valve body.This valve both can be applied to the joint of vacuum system and vacuum chamber, also can be applied between each vacuum chamber of vacuum system.But because the valve body and the spool of this valve are thinner, so, cooling structure is not set usually, thereby, the valve body of this valve and spool can not be heated, in case valve body and spool are heated, seal ring will wear out rapidly, thereby limited the application area of push-pull valve, especially be not suitable on the vacuum chamber of the higher vacuum electric furnace of temperature, using.In addition, the seal ring on the push-pull valve spool is not protected facility, and behind the valve opening, the ash that falls easily on the seal ring reduces sealability, and the technical performance of vacuum equipment is had bad influence.

Summary of the invention

The technical problems to be solved in the utility model is, overcomes that existing vacuum valve can not be heated, problem such as the ash that falls on the seal ring, provide a kind of high temperature resistant, seal ring be not easy contaminated, be suitable for the high vacuum rotary valve that between each vacuum chamber of vacuum equipment, uses.

The utility model has a valve body, valve plate is housed in the valve body, its special way is, described valve plate is installed on the cantilever, and cantilever is installed on the main shaft, and main shaft is connected with the vertical lift oil cylinder, crank also is housed on main shaft, crank is hinged with parallel mobile oil cylinder, makes valve plate lifting, translation by the vertical lift oil cylinder with parallel mobile oil cylinder, finishes the action of switch valve.

Described valve body and valve plate are double-deck water-cooling structure, on valve plate and below thermal baffle is housed respectively, to reduce heat radiation to valve plate.

With the joint of parallel mobile oil cylinder position-limited lever is housed also at crank, puts in sealing of spindles position-limited rack is housed, the limit switch that matches with position-limited lever is housed on position-limited rack,, realize the automatic control of valve plate to limit the lifting position of main shaft.

The utility model compared with prior art has following advantage:

1, valve body and valve plate adopt double-deck water-cooling structure, and on valve plate and below the installation thermal baffle, effectively reduced the temperature of valve body and valve plate, and then reduced the temperature of seal ring, prevented the aging of seal ring, prolonged the working life of seal ring, and improved resistance to high temperature of the present utility model, enlarged using scope, extensive use in the multicell vacuum equipment.

2, make valve plate lifting and translation with the vertical lift oil cylinder with parallel mobile oil cylinder, and move on to the opposite side of valve body at valve opening, valve plate after, the drive valve plate rises, seal ring on the valve plate is close on the internal surface on valve body top, avoided dust or particulate material to fall on the seal ring, guaranteed that the utility model has excellent sealing performance all the time in the process of using.

Description of drawings

Fig. 1 is a structural representation of the present utility model;

Fig. 2 is the plan view of Fig. 1;

Fig. 3 is the assembly structure schematic representation of the utility model main shaft portion.

Embodiment

As shown in drawings, the utility model has a valve body 1, valve plate 4 is housed in the valve body 1, and valve body 1 and valve plate 4 are double-deck water-cooling structure, and cooling water is received on the valve plate 4 by the metal hose connector, described valve body 1 is circular, also can be square or rectangular, two corresponding valve ports up and down be arranged, on valve plate 4, seal ring is housed in the one side, and match with last valve port, constitute the sealing configuration of vacuum valve; Described valve plate 4 is installed on the cantilever 3, a mounting hole is arranged in the end of cantilever 3, link 5 and link 6 are housed in mounting hole, both link together with bolt, the outer surface of link 5 is a screw thread, in there is a band at the center of valve plate 4, externally threaded nut, valve plate 4 links together by this nut and link 5, during for fear of throttle down between valve plate 4 and the valve body 1 rigid collision takes place, at link 5, between link 6 and the cantilever 3, and all leave enough gaps between the mounting hole of link 5 and cantilever 3, and between link 5 and cantilever 3, saucer washer is installed, so that when throttle down, play buffer function; On valve plate 4 and below thermal baffle 2 and thermal baffle 7 are housed respectively, reducing heat radiation, reduce the temperature of valve plate 4 to valve plate 4; Described cantilever 3 is installed on the main shaft, and main shaft is made of overcoat 8 and interior pipe 20, is water-cooling structure; Described main shaft is installed in the stuffing box gland 10, between main shaft and stuffing box gland 10, sliding bearing and seal ring are housed also, to guarantee that main shaft moves along sliding in stuffing box gland 10, and has an excellent sealing performance, stuffing box gland 10 is fixed on the valve body 1 by flange 9, three supporting rods 14 are housed on flange 9, and a flange 9 also is equipped with in the lower end of supporting rod 14, on this flange 9 vertical lift oil cylinder 13 is housed; The lower end of described main shaft is connected with vertical lift oil cylinder 13, drives it by vertical lift oil cylinder 13 and moves up and down, and vertical lift oil cylinder 13 links together by a spherical link and flange and main shaft, leaves certain activity space between the two; Crank 12 also is housed on main shaft, and crank 12 is hinged with parallel mobile oil cylinder 17, links together with a spherical member between the two, makes valve plate 4 liftings, translation by vertical lift oil cylinder 13 with parallel mobile oil cylinder 17, finishes the action of switch valve; With the joint of parallel mobile oil cylinder 17 position-limited lever 15 is housed also at crank 12, two positive stop lug boss are arranged on position-limited lever 15, on stuffing box gland 10, position-limited rack is housed, described position-limited rack is made of sleeve 11, support 19 and limiting board 16, sleeve 11 is fixed on the stuffing box gland 10, limiting board 16 has two, is fixed on the both sides of sleeve 11 with support 19; Two groups of limit switches 18 that match with position-limited lever 15 are housed on the limiting board 16 of position-limited rack, and the contact on the limit switch 18 matches with two positive stop lug boss on the position-limited lever 15, limits the lifting position of main shaft, realizes the automatic control of valve plate 4.

Working procedure of the present utility model is as follows:

When valve is in closed condition, in the time of need opening, 13 startings of vertical lift oil cylinder,. drive main shaft and move downward, the position-limited lever 15 that is connected with main shaft moves downward synchronously, when the contact of the limit switch of bottom in the positive stop lug boss on the position-limited lever 15 and the one group of limit switch 18 contacts, 13 stop motions of vertical lift oil cylinder, at this moment, valve plate 4 is separated from valve port, and certain distance is arranged; At this moment, parallel mobile oil cylinder 17 startings, and by crank 12 promotion main shafts rotations, main shaft drives valve plate 4 by cantilever 3 and moves, when the positive stop lug boss on the position-limited lever 15 contacts with another contact of organizing limit switch following in limit switch 18, parallel mobile oil cylinder 17 stop motions, at this moment, valve plate 4 has been moved to the opposite side of valve body 1; In parallel mobile oil cylinder 17 stop motions, vertical lift oil cylinder 13 starts once more, the promotion main shaft moves upward, when the positive stop lug boss on the position-limited lever 15 contacts with this contact of organizing the limit switch of top in

limit switch

18,13 stop motions of vertical lift oil cylinder, at this moment, the seal ring on the valve plate 4 is close on the internal surface on valve body 1 top, valve is opened, whole working procedure that valve plate 4 is finished decline, moved, rises; When valve is in open mode, in the time of need closing, the working procedure of the working procedure of vertical lift oil cylinder 13 and parallel mobile oil cylinder 17 when opening valve is opposite fully, valve plate 4 also will be finished first decline, move again, whole working procedure of Shang Shenging at last, only the movement direction of the movement direction of valve plate 4 when driving valve is opposite.

Claims

1, a kind of high vacuum rotary valve, it has a valve body, and valve plate is housed in the valve body, it is characterized in that described valve plate is installed on the cantilever, cantilever is installed on the main shaft, main shaft is connected with the vertical lift oil cylinder, and crank also is housed on main shaft, and crank is hinged with parallel mobile oil cylinder.

2, high vacuum rotary valve according to claim 1 is characterized in that, described valve body and valve plate are double-deck water-cooling structure, on valve plate and below thermal baffle is housed respectively.

3, high vacuum rotary valve according to claim 1 is characterized in that, with the joint of parallel mobile oil cylinder position-limited lever is housed also at crank, puts in sealing of spindles position-limited rack is housed, and the limit switch that matches with position-limited lever is housed on position-limited rack.