JP2007507602A - 電子ビームエンハンスト大面積堆積システム - Google Patents

電子ビームエンハンスト大面積堆積システム Download PDF

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Publication number
JP2007507602A
JP2007507602A JP2006523827A JP2006523827A JP2007507602A JP 2007507602 A JP2007507602 A JP 2007507602A JP 2006523827 A JP2006523827 A JP 2006523827A JP 2006523827 A JP2006523827 A JP 2006523827A JP 2007507602 A JP2007507602 A JP 2007507602A
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Japan
Prior art keywords
plasma
large area
electron beam
source
deposition system
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JP2006523827A
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English (en)
Japanese (ja)
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JP2007507602A5 (enExample
Inventor
ウォルトン，スコット，ジー
レオンハルト，ダーリン
メジャー，ロバート，エイ
ファーンスラー，リチャード
ミュラトー，クリストファー
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Government of the United States of America
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Government of the United States of America
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Publication date
Application filed by Government of the United States of America filed Critical Government of the United States of America
Publication of JP2007507602A publication Critical patent/JP2007507602A/ja
Publication of JP2007507602A5 publication Critical patent/JP2007507602A5/ja
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3471—Introduction of auxiliary energy into the plasma
    • C23C14/3478—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP2006523827A 2003-08-20 2004-05-13 電子ビームエンハンスト大面積堆積システム Pending JP2007507602A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/644,567 US20050040037A1 (en) 2003-08-20 2003-08-20 Electron beam enhanced large area deposition system
PCT/US2004/015273 WO2005020277A2 (en) 2003-08-20 2004-05-13 Electron beam enhanced large area deposition system

Publications (2)

Publication Number Publication Date
JP2007507602A true JP2007507602A (ja) 2007-03-29
JP2007507602A5 JP2007507602A5 (enExample) 2007-07-26

Family

ID=34194125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006523827A Pending JP2007507602A (ja) 2003-08-20 2004-05-13 電子ビームエンハンスト大面積堆積システム

Country Status (3)

Country Link
US (2) US20050040037A1 (enExample)
JP (1) JP2007507602A (enExample)
WO (1) WO2005020277A2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104498898B (zh) * 2008-08-04 2017-10-24 北美Agc平板玻璃公司 通过等离子体增强的化学气相沉积形成涂层的方法
JP6508746B2 (ja) 2014-12-05 2019-05-08 エージーシー フラット グラス ノース アメリカ，インコーポレイテッドＡｇｃ Ｆｌａｔ Ｇｌａｓｓ Ｎｏｒｔｈ Ａｍｅｒｉｃａ，Ｉｎｃ． マクロ粒子低減コーティングを利用したプラズマ源ならびにマクロ粒子低減コーティングを用いたプラズマ源を薄膜コーティングおよび表面改質に使用する方法
ES2883288T3 (es) 2014-12-05 2021-12-07 Agc Glass Europe Sa Fuente de plasma de cátodo hueco
US9799491B2 (en) * 2015-10-29 2017-10-24 Applied Materials, Inc. Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
US11257685B2 (en) * 2018-09-05 2022-02-22 Tokyo Electron Limited Apparatus and process for electron beam mediated plasma etch and deposition processes
CN112680700B (zh) * 2020-12-04 2022-07-26 安徽工业大学 一种电子束辅助碳基超润滑固体薄膜制备装置及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3393142A (en) * 1964-08-20 1968-07-16 Cons Vacuum Corp Cathode sputtering apparatus with plasma confining means
US3436332A (en) * 1965-07-15 1969-04-01 Nippon Electric Co Stabilized low pressure triode sputtering apparatus
JPH09111443A (ja) * 1995-10-12 1997-04-28 Mitsubishi Heavy Ind Ltd 薄膜コーティング方法及び装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336277A (en) * 1980-09-29 1982-06-22 The Regents Of The University Of California Transparent electrical conducting films by activated reactive evaporation
JPH01268859A (ja) * 1988-04-20 1989-10-26 Casio Comput Co Ltd 透明導電膜の形成方法および形成装置
US5182496A (en) * 1992-04-07 1993-01-26 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for forming an agile plasma mirror effective as a microwave reflector
US6416635B1 (en) * 1995-07-24 2002-07-09 Tokyo Electron Limited Method and apparatus for sputter coating with variable target to substrate spacing
CU22559A1 (es) * 1996-01-17 1999-05-03 Ct Ingenieria Genetica Biotech Sistema de expresión de antígenos heterologos en e. coli como proteínas de fusión
US5874807A (en) * 1997-08-27 1999-02-23 The United States Of America As Represented By The Secretary Of The Navy Large area plasma processing system (LAPPS)

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3393142A (en) * 1964-08-20 1968-07-16 Cons Vacuum Corp Cathode sputtering apparatus with plasma confining means
US3436332A (en) * 1965-07-15 1969-04-01 Nippon Electric Co Stabilized low pressure triode sputtering apparatus
JPH09111443A (ja) * 1995-10-12 1997-04-28 Mitsubishi Heavy Ind Ltd 薄膜コーティング方法及び装置

Also Published As

Publication number Publication date
WO2005020277A3 (en) 2005-05-12
WO2005020277A2 (en) 2005-03-03
US20090314633A1 (en) 2009-12-24
US20050040037A1 (en) 2005-02-24

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