JP2007333386A - Inspection system for semiconductor integrated circuit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To maintain electrical connection between a load board and an inspection system, even if displacement occurs at a load board side connector, while facilitating connection of a connector. <P>SOLUTION: An inspection system side connector 3 is provided with a restriction tool 8, having a gap with respect to the inspection system side connector 3 and a guide slope 31 which guides the position of the inspection system side connector 3 so that it is aligned with the position of the load board side connector. The inspection system side connector 3 can thereby be fixed to the inspection system 1 to the connector 3 which is movable by an amount corresponding to the gap, maintaining electrical connection between the load board and the inspection system 1, even if a displacement occurs at the load board side connector, while readily carrying out connection of the connector 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an inspection apparatus for a semiconductor integrated circuit used for quality inspection or the like in a manufacturing process of a semiconductor integrated circuit.

In general, a load board that forms a peripheral circuit for a measurement device and mounts a measurement device such as a semiconductor integrated circuit is electrically connected by a pogo pin to an inspection apparatus that measures the measurement device. However, with the increase in the number of pins in recent inspection apparatuses, connection with pogo pins may cause poor contact between the inspection apparatus and the load board and increase in cost. Therefore, an inspection apparatus that performs electrical connection using a connector instead of a connection using pogo pins has been proposed (see, for example, Patent Document 1 and Patent Document 2).
Hereinafter, a conventional semiconductor integrated circuit inspection apparatus will be described with reference to FIGS.

FIG. 12 is a schematic view showing a conventional semiconductor integrated circuit inspection apparatus, and FIG. 13 is a schematic view showing a conventional semiconductor integrated circuit inspection apparatus in which a connector and a measurement board are connected by a cable.
12 and 13, the load board 5 and the inspection apparatus 1 are electrically joined by fitting the connector 4 attached to the load board 5 and the connector 3 installed in the inspection apparatus 1. . The connector 4 attached to the load board 5 is fixed to the load board 5, and the connector 3 installed in the inspection apparatus 1 is inserted into a board (not shown) fixed to the inspection apparatus 1 or the inspection apparatus 1. The measurement device 2 is fixed to a measurement board 2 that applies and measures current and voltage.
JP-A-2005-321238 JP 2002-71751 A

  With the recent increase in the number of pins of semiconductor integrated circuits, a large number of connectors are used in inspection apparatuses. In addition, load boards have become larger due to the complexity of semiconductor integrated circuits. Therefore, in the configuration shown in FIG. 12, if any one of the plurality of connectors 4 attached to the load board 5 or the plurality of connectors 3 installed in the inspection apparatus 1 is slightly deviated from a predetermined place, the connectors are connected to each other. Of the load board 5 and the inspection device fail to be electrically connected. That is, the electrical connection between the inspection apparatus 1 and the load board 5 requires a highly accurate alignment of the connector, that is, the positional accuracy of the connector. As the position accuracy of the connector increases, the higher the number of connectors, the higher the required accuracy. Further, as the load board becomes larger, the warpage of the load board that occurs as time passes tends to increase, and the displacement of the connector position due to the influence of the warpage also increases. As shown in FIG. 13, the connector 3 installed in the inspection apparatus 1 is not directly fixed to the board (not shown) or the measurement board 2 fixed to the inspection apparatus 1, but the connection between the connector 3 and the measurement board 2 is connected by the cable 6. If the floating state is achieved by means such as, the position accuracy of the connector becomes unnecessary. However, when the connectors 3 of a large number of inspection apparatuses 1 are installed during maintenance or assembly, the connector 3 in a floating state may move unintentionally from a specified place due to unintended external force such as pressure due to the bent cable 6. There is a problem that it is difficult to install the connector 3 of the inspection apparatus 1.

  The semiconductor integrated circuit inspection device of the present invention aims to maintain the electrical connection between the load board and the inspection device even if the load board side connector is displaced while easily connecting the connector. To do.

  In order to achieve the above object, an inspection apparatus for a semiconductor integrated circuit according to claim 1 is an inspection apparatus for a semiconductor integrated circuit that inspects the semiconductor integrated circuit by being electrically connected to a load board on which the semiconductor integrated circuit is mounted. Each connector is provided with a gap between each connector and one or more connectors electrically connected to each of the one or more load board connectors provided on the load board. And one or a plurality of restricting jigs that are positioned so as to be movable by the gap.

  2. The semiconductor integrated circuit inspection apparatus according to claim 1, further comprising a guide mechanism for guiding the load board connector to the connector joint surface when the load board is joined. The guide mechanism has a gap of a maximum amount or less that can regulate a horizontal or vertical position of the load board connector.

  The semiconductor integrated circuit inspection device according to claim 3 is the semiconductor integrated circuit inspection device according to claim 1 or 2, wherein the regulating jig adjusts a distance of a gap between the connector and the connector. It has a mechanism.

  4. The semiconductor integrated circuit inspection apparatus according to claim 4, wherein the restriction jig is connected to the inspection jig at one end thereof. It is attached to the apparatus and has a function of switching between a restricted state and a non-restricted state by rotating around the one end.

  5. The semiconductor integrated circuit inspection apparatus according to claim 5, wherein two semiconductor integrated circuit inspection apparatuses are provided for each of the connectors. The restriction jig described above is provided, and the attachment position of one end of the restriction jig to each connector is located on a diagonal line.

  The semiconductor integrated circuit inspection apparatus according to claim 6 is the semiconductor integrated circuit inspection apparatus according to claim 1, claim 2, claim 3, claim 4, or claim 5. The restriction jig has a convex portion smaller than the depression.

  The semiconductor integrated circuit inspection apparatus according to claim 7 is the semiconductor integrated circuit inspection apparatus according to claim 1, claim 2, claim 3, claim 4, claim 5, or claim 6. The restriction jig surrounds at least a part of the connector by providing a gap.

  An inspection apparatus for a semiconductor integrated circuit according to claim 8 is the semiconductor integrated circuit according to claim 1, claim 2, claim 3, claim 4, claim 5, claim 6, or claim 7. The inspection apparatus has an elastic material in the gap portion.

  10. The semiconductor integrated circuit inspection apparatus according to claim 9, wherein the semiconductor integrated circuit inspection apparatus is configured to inspect the semiconductor integrated circuit by being electrically connected to a load board on which the semiconductor integrated circuit is mounted. , One or a plurality of connectors electrically connected to each of one or a plurality of load board connectors provided on the load board, and each of the connectors so as to be magnetic and position the connectors. It has one or a plurality of restricting jigs provided at a position corresponding to the magnetic body.

  The semiconductor integrated circuit inspection device according to claim 10 is the semiconductor integrated circuit inspection device according to claim 9, wherein the state is switched between the restricted state and the non-restricted state by adjusting the magnetism of the magnetic body with a current. And

  The inspection apparatus for a semiconductor integrated circuit according to claim 11 is the apparatus according to claim 1, claim 2, claim 3, claim 4, claim 5, claim 6, claim 7, claim 8, claim 9, or claim 10. Item 11. The semiconductor integrated circuit inspection apparatus according to Item 10, wherein the restriction jigs have convex portions at different positions, and the connector is fitted to the convex portion only when the corresponding restriction jig is positioned. It is characterized by having a dent.

  The semiconductor integrated circuit inspection apparatus according to claim 12 is the apparatus according to claim 1, claim 2, claim 3, claim 4, claim 5, claim 6, claim 7, claim 8, claim 9, or claim 10. 12. The semiconductor integrated circuit inspection apparatus according to claim 10, wherein the semiconductor integrated circuit inspection apparatus has a function of fixing a connection position with the load board.

  As described above, the electrical connection between the load board and the inspection device can be maintained even if the load board side connector is misaligned while easily connecting the connectors.

  As described above, by providing the inspection device side connector with a regulating jig having a gap between the inspection device side connector and a guide mechanism for guiding the connector provided in the semiconductor integrated circuit inspection device. Because the connector on the inspection device side can be fixed to the inspection device in a state where the connector can be operated by the gap, even if the load board side connector is misaligned while easily connecting the connector, The electrical connection of the inspection device can be maintained.

  Hereinafter, a semiconductor integrated circuit inspection apparatus according to an embodiment of the present invention will be specifically described with reference to the drawings. 1 to FIG. 11, the same reference numerals are assigned to the corresponding parts, and the duplicate description is omitted.

First, a first embodiment of the present invention will be described with reference to FIG.
FIG. 1A is a schematic diagram of the inspection apparatus according to the first embodiment, and FIG. 1B is an enlarged view of a main part of the inspection apparatus-side connector according to the first embodiment.

  In FIG. 1, reference numeral 1 is a semiconductor integrated circuit inspection apparatus for the purpose of quality inspection or function / performance evaluation in the manufacturing process of a semiconductor integrated circuit, 5 is a load board on which a measurement target device such as a semiconductor integrated circuit is mounted, A load board side connector attached to the load board 5, 3 is an inspection apparatus side connector installed in the inspection apparatus 1 and connected to the load board side connector, and 7 has a gap in the movable direction of the inspection apparatus side connector. A restriction jig for restricting the position of the connector attached to the inspection apparatus 1 for each side connector, 2 for a measurement board, 6 for a cable, 31 for guiding a load board side connector (not shown) to the joining surface of the inspection apparatus side connector 3 The guide slope is provided with a gap that is less than the maximum value that can be regulated in the regulating jig 7.

The inspection apparatus side connector 3 is installed in the inspection apparatus 1 and is connected to the measurement board 2 via the cable 6 and is in a floating state. The restriction jig 7 for restricting the position of the connector is fixed to the inspection apparatus via the inspection apparatus side connector 3 and a gap. According to this configuration, the inspection apparatus-side connector 3 is in a floating state, and movement beyond the gap with the regulating jig 7 that regulates the position of the connector is restricted. Even if it occurs, the load board and the inspection device can be electrically joined by the movement of the inspection device side connector along the guide slope 31. That is, high positional accuracy is not necessary for the load board side connector. Also, movement beyond the gap of the connector on the inspection device side is restricted by the restriction jig that restricts the connector position, and there is a restriction jig that restricts the connector position by unintended external force when installing the connector on the inspection device No more moving.
The restricting jig for restricting the position of the connector need not always be fixed to the inspection device, and may have a configuration that can be removed from the inspection device. Further, the load board side connector may be movable, and the load board side connector may have a restriction jig for restricting the position of the connector.

  Further, according to the configuration of FIG. 1, when a plurality of load boards 5 are installed in the inspection apparatus 1, the positions between the load boards can be individually adjusted. When docking the semiconductor integrated circuit transfer device to be measured to the inspection device 1 and the load board 5, positional accuracy between the load boards is required. High positional accuracy is not required.

Next, a first to second embodiment of the present invention will be described with reference to FIGS.
FIG. 2 is an enlarged view of a main part of the inspection apparatus side connector in the 1-2 embodiment, and FIG. 3 is a top view showing the inspection apparatus for fixing a plurality of connectors on the diagonal line in the 1-2 embodiment, 4 is a side view showing an inspection apparatus for fixing a plurality of connectors diagonally in the first and second embodiments, and FIG. 5 is positioned by a regulating jig having a convex portion in the first and second embodiments. It is a side view which shows an inspection apparatus.

  2 is an enlarged view of the inspection device side connector 3 and the restriction jig 7 for restricting the position of the connector in FIG. 1. In FIG. 2, 8 is a restriction jig for restricting the position of the connector, and 9 is a connector jig. Screws 10 for fixing the restriction jig 8 for restricting the position to the inspection apparatus 1 are pins that are electrically connected to a load board side connector (not shown). A restricting jig 8 for restricting the position of the connector is fixed to the inspection apparatus 1 with a screw 9 and can be rotated around the screw 9, and rotates between a state where the one surface of the inspection apparatus side connector 3 is covered and a state where it is not covered. It is possible to switch by. In a state where the restriction jig 8 that restricts the position of the connector covers one surface of the inspection apparatus side connector 3, the inspection apparatus side connector 3 is in a floating state, and a gap between the restriction jig 8 that restricts the position of the connector. Movement of more than a minute is restricted. When the restriction jig 8 that restricts the position of the connector does not cover the inspection apparatus side connector 3, the restriction jig of the inspection apparatus side connector 3 is not limited, and the position is changed in any direction and distance. The inspection apparatus side connector 3 can be detached from the inspection apparatus 1 or the inspection apparatus side connector 3 can be attached to the inspection apparatus 1. That is, by rotating the restriction jig 8 that restricts the position of the connector, it is possible to easily switch between a state where the restriction jig of the inspection apparatus side connector 3 is restricted and a state where the restriction jig is not restricted. It becomes. Thus, by rotating around one end attached to the inspection device, there is a gap between one surface of the inspection device side connector, and the inspection device side connector has a simple configuration and easy operation. It is possible to limit the restriction jig.

  In FIG. 3, reference numerals 11 and 12 denote screws for fixing the restriction jig 8 and the inspection apparatus 1 for restricting the position of the connector, and there are two restriction jigs for the example shown in FIG. The inspection device side connector 3 is fixed by a regulating jig 8 that regulates the positions of the two connectors. The restriction jigs 8 for restricting the positions of the two connectors are fixed to the inspection apparatus 1 with screws 11 and 12 respectively. Moreover, the screw 11 and the screw 12 are located on a diagonal line. When an external force is applied to the inspection device side connector in the direction of one end not connected to the inspection device using a single restriction jig, the external force is applied only to the restriction jig that restricts the position of the connector. There is a possibility that a large external force will be applied to deform the restriction jig that restricts the position of the connector, or the connector may move beyond the place where the restriction jig that restricts the connector position is attached. If the part that is attached to the inspection device of each of the restriction jigs is on the diagonal, the part that is attached to the inspection device by the screws of the restriction jig that restricts the positions of the plurality of connectors is on the diagonal. It is possible to prevent the connector from moving at a fixed position with respect to the inspection apparatus even with an unintended external force in any direction. In addition, since an unintended external force applied to the connector can be suppressed by the fixing portion with respect to the inspection apparatus, it is possible to use a restricting jig that restricts the position of the connector having low strength.

  4 is a side view of FIG. 2. 27 is a gap between the screw 9 for fixing the restriction jig 8 for restricting the connector position to the inspection apparatus 1 and the inspection apparatus side connector 3, and 28 is a connector. This is a gap between the regulating jig 8 that regulates the position of the connector and the inspection device side connector 3. The restriction jig 8 for restricting the position of the screw 9 and the connector is integrated, and the gap 28 can be changed by moving the screw up and down to raise and lower the position of the restriction jig 8 for restricting the position of the connector. That is, the movable range on the inspection apparatus side connector 3 can be changed. Further, by changing the left and right positions for fixing the screw 9 to the inspection apparatus 1, the gap 27 can be changed, and the left movable range of the inspection apparatus side connector 3 can be changed.

  FIG. 5 is a diagram showing a case where the restriction jigs of a plurality of inspection apparatus side connectors are limited. Reference numeral 30 denotes a convex portion attached to the restriction jig 8 for restricting the position of the connector, and 29 denotes a recess formed in the inspection apparatus side connector 3. When attached to the restriction jig 8 that restricts the position of the connector, the convex portion 30 is different in position in each of the restriction jigs 8 that restrict the positions of the two connectors. , Located at the same position as the convex portion 30 of the restriction jig 8 for restricting the position of the corresponding connector. That is, when the inspection apparatus side connector 3 is restricted by the restriction jig 8 that restricts the position of the connector, the convex portion 30 and the recess 29 are fitted. Even if it is going to restrict | limit the control jig | tool of the inspection apparatus side connector 3 which has the hollow 29 in the position different from the position of the convex part 30, the convex part 30 and the hollow 29 do not fit. For this reason, it is possible to prevent the inspection apparatus side connector from being misplaced in the restricting jig 8 that restricts the position of the different connector. In other words, when the inspection device side connector is placed in the wrong position, even if the restriction jig restricting the connector position tries to restrict it, the connector recess does not match the protrusion of the restriction jig restricting the connector position. Can not be locked.

  Here, the case where two restricting jigs are used has been described. However, by providing the concave and convex portions at different positions in each of the plural restricting jigs, misplacement of the plurality of connectors can be prevented.

Next, a second embodiment of the present invention will be described with reference to FIG.
FIG. 6 is an enlarged view of a main part of the inspection apparatus side connector according to the second embodiment.
In FIG. 6, 13 is a recess made in the inspection apparatus side connector 3, 14 is a restriction jig for restricting the position of the convex connector created so as to be inserted into the recess 13, and 16 is a restriction for restricting the position of the connector. The notch 15 processed into the jig 14 is attached to the inspection apparatus 1 and inserted into the notch 16 of the regulating jig 14 that regulates the position of the connector. The regulating jig 14 is moved in the direction of the arrow shown in FIG. This is a table of a regulation jig for controlling the regulated state and non-regulated state of the contact 3 by the regulating jig 14.

  The restricting jig 14 for restricting the position of the connector is inserted in the recess 13 of the inspection apparatus side connector 3 by moving in the left direction of the arrow shown in FIG. 6, the inspection apparatus side connector 3 is in a floating state, and Movement beyond the gap between the convex portion of the restricting jig 14 for restricting the connector position and the recess 13 of the inspection apparatus side connector 3 is restricted.

  In this way, by providing a notch in the restriction jig and making the notch movable along the restriction jig base, the restriction of the connector by the restriction jig can be controlled, and the load board side connector is displaced. Even if it occurs, it is possible to electrically join the load board and the inspection apparatus by moving the inspection apparatus side connector. That is, high positional accuracy is not necessary for the load board side connector. Also, movement beyond the gap of the connector on the inspection device side is restricted by the restriction jig that restricts the connector position, and there is a restriction jig that restricts the connector position by unintended external force when installing the connector on the inspection device No more moving.

Next, a third embodiment of the present invention will be described with reference to FIG.
FIG. 7 is an enlarged view of a main part of the inspection apparatus side connector according to the third embodiment.
In FIG. 7, 17 is a restriction jig for restricting the connector position, 18 is a recess provided in the inspection apparatus side connector 3, and 19 is a bending point of the restriction jig 17 for restricting the connector position.

  The restricting jig 17 that restricts the position of the connector is fixed to an inspection device (not shown), and the bending point 19 is bent so that the convex portion of the restricting jig 17 that restricts the position of the connector is a recess in the inspection apparatus side connector 3. The restriction jig of the inspection apparatus side connector 3 is limited by being inserted into the connector 18.

In the third embodiment, a mechanism for changing the size of the gap described with reference to FIG. 4 can be provided.
Next, a fourth embodiment of the present invention will be described with reference to FIG.

FIG. 8 is a schematic view of an inspection apparatus according to the fourth embodiment.
In FIG. 8, 20 is a restriction jig that restricts the position of the connector surrounding the entire surface of the inspection apparatus side connector with a gap, and 21 is a restriction jig 20 that is fixed to the inspection apparatus 1 and restricts the position of the connector. The restriction jig 20 for restricting the position of the connector passing through the hole portion is a base for the restriction jig for restricting the position of the connector for moving in the direction of the arrow shown in FIG. A part of the inspection apparatus side connector 3 is surrounded by moving the restriction jig 20 for restricting the position of the connector in the left direction of the arrow shown in FIG. 8, the inspection apparatus side connector 3 is in a floating state, and Movement beyond the gap of the hole portion of the restricting jig 20 that restricts the position of the connector is restricted. When the restriction jig 20 that restricts the position of the connector in the right direction of the arrow shown in FIG. 8 is moved, the connector 3 becomes unrestricted and can be removed from the inspection apparatus 1.

  Thus, by surrounding the entire surface of the inspection device side connector with a gap, the restriction jig for the inspection device side connector can be restricted, and the connector can be restricted in all directions without the need for processing the connector. It is possible to limit the movable range of all the inspection apparatus side connectors.

Next, a fifth embodiment of the present invention will be described with reference to FIG.
FIG. 9 is an enlarged view of a main part of the inspection apparatus side connector according to the fifth embodiment.
In FIG. 9, reference numeral 23 denotes a restricting jig for restricting the connector position, reference numeral 24 denotes an elastic metal fitting made by rolling a metal plate in contact with the inspection apparatus side connector 3, and reference numeral 22 denotes a restricting jig 23 for restricting the connector position. This is a screw for fixing to the inspection apparatus 1. The inspection device side connector 3 is in contact with a restricting jig 23 for restricting the position of the connector via an elastic fitting 24. Since the metal fitting 24 exhibits elasticity, the inspection apparatus side connector 3 in contact with the metal fitting 24 is in a floating state, and the position movement that exerts a force greater than the elastic force allowed by the metal fitting 24 is limited. When it deviates from the specified position, as soon as the external force disappears due to the elastic force of the metal fitting 24, a force to return to the original position is applied to the inspection apparatus side connector 3, and the inspection apparatus side connector 3 returns to its original position. Is possible. In addition, if the metal fitting 24 is an elastic material, it does not necessarily need to be a metal fitting.

Next, a sixth embodiment of the present invention will be described with reference to FIG.
FIG. 10 is an enlarged view of a main part of the inspection apparatus side connector according to the sixth embodiment.
In FIG. 10, 25 is an inspection apparatus side connector to which a magnetic body is attached, and 26 is a restriction jig for restricting the position of a connector having magnetism and attached to the inspection apparatus. The inspection apparatus side connector 3 is installed in the inspection apparatus 1 by attracting the magnetism of the restriction jig 26 that restricts the position of the connector fixed to the inspection apparatus 1 and the magnetic body of the inspection apparatus side connector 3. When a weak external force is applied to the magnetism and the magnetic force of the magnetic body, the inspection apparatus side connector moves, that is, enters a floating state. When the inspection device side connector 3 is displaced from the specified position by an external force, as soon as the external force is lost, the inspection device side connector 3 is applied with a force to return to the original position by the magnetic force. The same effect as that of returning to the position, that is, the position being restricted is obtained. It should be noted that the inspection device side connector 3 and the restriction jig 26 for restricting the position of the connector have at least one having magnetism, and the other is either a magnetic body or magnetism. Good.

  By using magnetism as an electromagnet and adjusting the presence or absence of magnetism by flowing a current (not shown), it is possible to switch between a state where the connector is position-limited by magnetic force and a state where there is no magnetic force and is not position-limited. . In addition, without restricting the restriction of the restriction jigs of multiple connectors individually between the position restriction state and the position restriction state, the plurality of connectors are simultaneously switched between the position restriction state and the position restriction state. It becomes possible.

Next, a seventh embodiment of the present invention will be described with reference to FIG.
FIG. 11 is a schematic diagram of an inspection apparatus according to the seventh embodiment.
In FIG. 11, 32 is a screw for fixing the load board 5 to the inspection device 1, 33 is a screw hole of the inspection device 1, and 34 is a screw hole formed in the load board 5. After the load board 5 and the inspection apparatus 1 are fitted together, the inspection apparatus side connector 3 moves along with the external force. Therefore, the load board 5 also moves along with the external force, but the load 32 is closed by closing the screw 32 through the screw holes 33 and 34. The position of the board 5 can be fixed.

  The present embodiment can be implemented in all the first to sixth embodiments.

  The present invention makes it possible to maintain the electrical connection between the load board and the inspection device even if the position of the load board side connector is displaced while easily connecting the connector. This is useful for a semiconductor integrated circuit inspection apparatus used for pass / fail inspection and the like.

(A) Schematic diagram of the inspection apparatus in the first embodiment (b) Schematic diagram of the inspection apparatus in the first embodiment The principal part enlarged view of the inspection apparatus side connector in 1-2 embodiment. The top view which shows the test | inspection apparatus which fixes the some connector in the 1-2 embodiment on a diagonal line The side view which shows the test | inspection apparatus which fixes the some connector in 1st-2 embodiment on a diagonal. The side view which shows the test | inspection apparatus positioned with a control jig provided with the convex part in 1-2 embodiment. The principal part enlarged view of the inspection apparatus side connector in 2nd Embodiment The principal part enlarged view of the inspection apparatus side connector in 3rd Embodiment Schematic of the inspection apparatus in the fourth embodiment The principal part enlarged view of the inspection apparatus side connector in 5th Embodiment The principal part enlarged view of the inspection apparatus side connector in 6th Embodiment Schematic of the inspection device in the seventh embodiment Schematic showing a conventional semiconductor integrated circuit inspection device Schematic diagram showing a conventional semiconductor integrated circuit inspection device in which a connector and a measurement board are connected by a cable.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Measurement board 3 Connector 4 Connector 5 Load board 6 Cable 7 Restriction jig 8 Restriction jig 9 Screw 10 Pin 11 Screw 12 Screw 13 Indentation 14 Restriction jig 15 Restriction jig base 16 Notch 17 Restriction jig 18 Depression 19 Bending point 20 Restriction jig 21 Restriction jig base 22 Screw 23 Restriction jig 24 Metal fitting 25 Inspection device side connector 26 Restriction jig 27 Gap 28 Gap 29 Depression 30 Convex part 31 Guide slope 32 Screw 33 Screw hole 34 Screw Hole 35 socket

Claims (12)

A semiconductor integrated circuit inspection apparatus for inspecting the semiconductor integrated circuit by being electrically connected to a load board on which the semiconductor integrated circuit is mounted,
One or more connectors electrically connected to each of one or more load board connectors provided on the load board;
An inspection apparatus for a semiconductor integrated circuit, comprising: one or a plurality of regulating jigs that provide gaps between the connectors and position the connectors in a movable state by the gaps. .   The load board has a guide mechanism that guides the load board connector to the connector joining surface when the load board is joined, and the guide mechanism has a gap that is less than or equal to a maximum amount that can regulate a horizontal or vertical position of the load board connector. The semiconductor integrated circuit inspection apparatus according to claim 1.   3. The semiconductor integrated circuit inspection apparatus according to claim 1, wherein the regulating jig has a mechanism for adjusting a distance between the connector and the gap.   The restriction jig is attached to the inspection device at one end thereof, and has a function of switching between a restriction state and a non-restriction state by rotating around the one end. The semiconductor integrated circuit inspection apparatus according to claim 3.   The two or more said restriction jigs are provided with respect to each said connector, The attachment position of the end of the said restriction jig with respect to each said connector is located on a diagonal line, The claim 1 or Claim 2 characterized by the above-mentioned. The inspection apparatus for a semiconductor integrated circuit according to claim 3 or 5.   6. The connector according to claim 1, wherein the connector has a recess, and the restriction jig has a convex portion smaller than the recess. The inspection apparatus of the semiconductor integrated circuit as described.   The restriction jig surrounds at least a part of the connector by providing a gap, according to claim 1, claim 2, claim 3, claim 4, claim 5, or claim 6. The inspection apparatus of the semiconductor integrated circuit as described.   The semiconductor integrated circuit according to claim 1, wherein the gap portion has an elastic material, or the semiconductor integrated circuit according to claim 1, wherein the elastic material is provided in the gap portion. Inspection device. A semiconductor integrated circuit inspection apparatus for inspecting the semiconductor integrated circuit by being electrically connected to a load board on which the semiconductor integrated circuit is mounted,
One or a plurality of connectors comprising a magnetic body and electrically connected to each of one or a plurality of load board connectors provided on the load board;
An inspection apparatus for a semiconductor integrated circuit, comprising: one or a plurality of regulating jigs that are magnetized and are provided at positions corresponding to the magnetic bodies of the connectors so as to position the connectors.   10. The semiconductor integrated circuit inspection device according to claim 9, wherein the regulation state and the non-regulation state are switched by adjusting the magnetism of the magnetic body by a current.   2. The control jig according to claim 1, wherein each of the restricting jigs has a convex portion at a different position, and the connector has a recess that fits into the convex portion only when the corresponding restricting jig is positioned. Alternatively, the inspection apparatus for a semiconductor integrated circuit according to claim 2, claim 3, claim 4, claim 5, claim 6, claim 7, claim 8, claim 9, or claim 10.   A function of fixing a connection position with the load board is provided. The claim 1, the claim 2, the claim 3, the claim 4, the claim 5, the claim 6, the claim 7, or the claim 8, 12. The semiconductor integrated circuit inspection apparatus according to claim 9, 10 or 11.

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