JP2007327960A5 - - Google Patents
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- Publication number
- JP2007327960A5 JP2007327960A5 JP2007152836A JP2007152836A JP2007327960A5 JP 2007327960 A5 JP2007327960 A5 JP 2007327960A5 JP 2007152836 A JP2007152836 A JP 2007152836A JP 2007152836 A JP2007152836 A JP 2007152836A JP 2007327960 A5 JP2007327960 A5 JP 2007327960A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- inspection unit
- lower roller
- unit according
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 13
- 238000007689 inspection Methods 0.000 claims 10
- 230000001105 regulatory Effects 0.000 claims 2
- 230000000875 corresponding Effects 0.000 claims 1
- 239000002783 friction material Substances 0.000 claims 1
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060051340A KR20070117287A (ko) | 2006-06-08 | 2006-06-08 | 기판 검사 유닛, 이를 갖는 기판 검사 장치 및 이를 이용한기판 검사 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007327960A JP2007327960A (ja) | 2007-12-20 |
JP2007327960A5 true JP2007327960A5 (zh) | 2010-07-22 |
Family
ID=38928509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007152836A Pending JP2007327960A (ja) | 2006-06-08 | 2007-06-08 | 基板検査ユニット、それを有する基板検査装置及びそれを用いた基板検査方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2007327960A (zh) |
KR (1) | KR20070117287A (zh) |
TW (1) | TW200801490A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100863340B1 (ko) * | 2008-02-29 | 2008-10-15 | 와이즈플래닛(주) | 컨베이어 설치용 이물 검사장치 |
KR101599541B1 (ko) * | 2015-11-16 | 2016-03-03 | 한국검사엔지니어링(주) | 비파괴 검사 보조장치 |
CN108983454A (zh) * | 2018-08-01 | 2018-12-11 | 惠科股份有限公司 | 一种测试装置及测试设备 |
CN109991243A (zh) * | 2019-04-04 | 2019-07-09 | 杭州载力科技有限公司 | 一种自动光学检测设备 |
CN110227655A (zh) * | 2019-04-29 | 2019-09-13 | 丽水奇异果信息技术有限公司 | 一种基于图像识别的芯片检测装置 |
CN110931405B (zh) * | 2019-11-18 | 2022-04-26 | Tcl华星光电技术有限公司 | 传输构件、传输方法及清洗装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59154312A (ja) * | 1983-02-23 | 1984-09-03 | Matsushita Electric Ind Co Ltd | 熱間連続鋳造スラブの表面疵検出用照明装置 |
JP2679828B2 (ja) * | 1988-11-22 | 1997-11-19 | 株式会社芝浦製作所 | 搬送ローラ装置 |
JPH02105155U (zh) * | 1989-02-08 | 1990-08-21 | ||
JPH0831710B2 (ja) * | 1990-10-17 | 1996-03-27 | ソマール株式会社 | 基板搬送装置 |
JPH11148902A (ja) * | 1997-11-17 | 1999-06-02 | Mitsubishi Chemical Corp | 平板状基板の表面欠陥検査装置 |
WO2000007031A1 (en) * | 1998-07-28 | 2000-02-10 | Matsushita Electric Works, Ltd. | Inspection system for inspecting discrete wiring patterns formed on a continuous substrate sheet of a flexible material |
-
2006
- 2006-06-08 KR KR1020060051340A patent/KR20070117287A/ko not_active Application Discontinuation
- 2006-12-21 TW TW095148224A patent/TW200801490A/zh unknown
-
2007
- 2007-06-08 JP JP2007152836A patent/JP2007327960A/ja active Pending
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