JP2007294384A - Electric connection body and manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electric connection body having a connecting element retaining mechanism suitable for increase in number of connecting elements. <P>SOLUTION: In the electric connection body 2 for electrically connecting electrodes opposed between two devices, a connecting element 10 having a first beam 12a having a first contact 14a connected to one of the opposed electrodes and a second beam 12b having a second contact 14b connected with the other of the opposed electrodes grasps and retains a carrier 4. According to such an electric connection body 2, increase in the arrangement number or narrowing of pitch of the connecting elements 10 can be easily performed since the retaining structure is simplified. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to inspection or mounting of a semiconductor, and more particularly to an electrical connection body that connects electrodes of an electronic device.

  In recent years, with the improvement of the degree of integration of semiconductors, the electrodes of the package are arranged in an array, and the number of electrodes is of the 5000 pin class. Array type packages are often soldered directly to the board as a BGA (ball grid array), but due to thermal stress cracking of the solder due to the increase in size and the need for replacement / maintenance, LGA via a socket by pressure connection ( Land grid array method is increasing. For example, in an LGA package, the size of its outer size is increasing and the electrode pitch is decreasing, and an electrical connection body such as an LGA socket corresponding to this has been demanded.

  Further, when the wafer size is increased from 300 mm to 400 mm in order to improve the productivity of semiconductors, the number of electrodes to be inspected at the same time dramatically increases from several thousand pins to tens of thousands of pins. Therefore, it is necessary to further reduce the pitch of the electrical connection body such as a probe in the semiconductor inspection apparatus to cope with such an increase in the size of the wafer. On the other hand, it is desired that the inspection apparatus also replaces only the electrical connection of the probe on the wafer side due to an increase in product form.

  However, in order to obtain an electrical connection body corresponding to an electrode formed on a large semiconductor package or wafer, there are the following problems. In other words, the warpage of the device increases as the size of the electrode holder, such as a semiconductor package, increases, so it is not possible to handle with a displacement connector that has been used in the past, and the connector is securely in contact with the electrode on the device To do so, a connector with a large displacement is required. In general, it is said that the size of the warp is proportional to the square of the size of the device, and a displacement corresponding to the increase in the warp is required for the displacement of the connection body. Further, when the number of pins of the electrical connection body is increased, an increase in the overall contact load of the electrical connection body is caused, and this increase in load may cause damage or deformation of the device. In addition, the conventional connector that is similar in size to a narrow pitch cannot obtain the same characteristics as a connector having a larger pitch.

For this reason, there is a demand for a connecting body that can accurately arrange a connector having a large displacement and a low contact load even at a narrow pitch and ensure connection reliability. For example, there is a wire-like probe that has a through-hole penetrating through an insulator vertically and holds the probe by the internal shape of the through-hole (Patent Document 1). In addition, the cantilever type connector is generally considered to be able to adjust the displacement by the length of the beam and to easily obtain a low contact load, and also to increase the conductor resistance when bent in the plate thickness direction. It is suppressed. As a form of fixing such a connector, the connector is protruded from a hole opening on the surface of the insulator by sandwiching and fixing the retainer tab portion of the beam in the hole formed between the insulator units arranged in the plane direction. There exists a thing made into the structure to perform (patent document 2). In addition, there is a type in which a beam connecting portion in a connector is embedded and fixed when forming a carrier (Patent Document 3). Further, a fixed form is adopted in which a bent probe is press-fitted and fixed in a hole provided in an insulator so that both beams of the probe protrude displaceably from the surface of the insulator (Patent Document 4).
US Pat. No. 6,404,211 U.S. Pat. No. 5,800,194 US Pat. No. 6,604,850 US Pat. No. 5,653,598

  However, in the method of securing the displacement by holding the wire-like probe in the shape of the bent through-hole in the laminated body, it is difficult to ensure a constant displacement and contact load stably at a low height, Since the probe is vertically long, the conductor resistance tends to increase. Further, in the structure in which the connectors having the cantilevers on both sides are sandwiched between the units in the planar direction, there is a problem that the sandwiching strength of the insulator is insufficient and the pitch cannot be reduced. Furthermore, in the structure in which the cantilever connector is embedded and fixed by molding, it is difficult to increase the number of pins and types because a mold is required, and it is also difficult to replace the connector once fixed. It was. Furthermore, in the configuration in which the cantilever connector is press-fitted and fixed, the beam length is limited by the length of the press-fitting hole portion in which the beam is accommodated, so that it is particularly difficult to simultaneously realize a narrow pitch and a large displacement. Met.

  In other words, to date, there is no electrical connection structure that can accommodate multiple pins while ensuring connection reliability by satisfying large displacement, low contact load, low conductor resistance, etc. corresponding to large size and narrow pitch, There was no electrical connection structure with a high degree of freedom that can freely change the connector satisfying the displacement, contact load, etc. corresponding to each of various types of devices. Furthermore, there was no electrical connection body structure with defective connector replacement.

  Accordingly, an object of the present invention is to provide an electrical connector having a connector holding structure suitable for increasing the number of connectors, a method for manufacturing the electrical connector, and use of the electrical connector. Another object of the present invention is to provide an electrical connector having a connector holding structure suitable for an increase in connectors having connection reliability, a manufacturing method thereof, and use thereof. In addition, the present invention provides an electrical connection body having a high degree of freedom in designing a connection body such as the type and arrangement of connectors and the size of the connection body, a method for manufacturing the same, and use of the electrical connection body. Objective.

  According to the present invention, there is provided an electrical connection body that electrically connects opposing electrodes between two devices, and includes a carrier and a first contact that is connected to one of the opposing electrodes. A beam, a second beam having a second contact connected to the other of the opposing electrodes, and a sandwiching part for sandwiching the carrier in a state where each of these beams protrudes from different surfaces of the carrier , An electrical connection body is provided.

  In this connection body, it is preferable that the connector is provided via a through-hole penetrating the carrier, and the clamping portion clamps an opening edge of the through-hole. In this aspect, it is preferable that a part of the clamping part abuts on a step part inside the opening edge to clamp the carrier. The through hole may include a rotation restricting portion that restricts the connector from rotating axially. By doing so, it is possible to prevent the direction of the beam of the connector from being directed in a direction different from the desired direction. The rotation restricting portion may be an edge of a cover that covers a part of the opening of the circular hole having a circular cross section. The connector is formed in a shape that generates an urging force in a direction of expanding the peripheral wall of the through hole when received in the through hole, and the rotation restricting portion includes at least two points in the width direction of the connector. The connector may be restricted from rotating about the shaft. In addition, the said connector may be formed in the shape which produces the urging | biasing force of the direction which expands the surrounding wall of the said through-hole, if it accommodates in the said through-hole regardless of the presence or absence of a rotation control part.

  In this connection body, it is also preferable that a part of the clamping portion abuts on the surface of the carrier to clamp the carrier. Furthermore, the clamping unit may clamp the carrier by mounting the connection body on the device. Further, an adhesive layer may be provided between the sandwiching portion and the carrier.

  In this connection body, it is preferable that the first beam and the second beam of the connector protrude from the carrier in a cantilever shape. In this aspect, the beam angles of the first beam and the second beam are preferably 15 ° or more and 50 ° or less, respectively. It is also preferable that the ratio between the beam width and the beam length is 1 or more and 18 or less. Furthermore, the ratio of the beam thickness to the beam width is preferably 2 or more and 40 or less.

  Further, in this connection body, a plurality of beams protruding from at least one surface of the carrier of the connector provided in a large number can be opposed to each other in the center of the carrier. In this connection body, at least one of the beams may include a solder ball and a land portion provided with the solder ball.

  Furthermore, in this connector, the connector mainly comprises a conductive material selected from beryllium copper, titanium copper, copper / nickel / tin alloy, copper / nickel / silicon alloy, and nickel beryllium. It is preferable to do. The carrier is preferably mainly composed of an insulating material containing any one selected from glass fiber-containing epoxy resins, ceramics, and engineering plastics.

  In this connection body, it is preferable that the device includes the electrodes arranged in an array. The electrical connection body is preferably a socket or an interposer.

  According to this invention, an electronic device provided with one of the said connection bodies is also provided. Such electronic devices include PCs, semiconductors, and chip inspection devices.

  According to the present invention, there is provided a method of manufacturing an electrical connection body for electrically connecting electrodes facing each other between two devices, wherein the electrode is connected to one of the electrodes facing the through hole of a carrier having a through hole. A connector having a first beam having a first contact and a second beam having a second contact connected to the other of the opposing electrodes from different faces of the carrier. There is provided a manufacturing method comprising: a step of inserting each of the protrusions into a protruding state; and a step of bending so that a portion of the connector arranged in the vicinity of the carrier sandwiches the carrier.

  In this manufacturing method, the bending process can be performed by pressing the first contact and the second contact. In addition, the bending process includes a step of applying a first bending process to a portion of the connector disposed in the vicinity of the carrier and tilting the connector toward the carrier surface; and A step of applying a second bending process to the arranged portion to sandwich the carrier. In addition, at least before the bending process, an adhesive may be provided in a sandwiched portion of the carrier by the electrical connection body. The timing for supplying the adhesive is not particularly limited.

  Moreover, in this manufacturing method, it is preferable that the said connector has a bending part and / or a stress concentration part beforehand in the part arrange | positioned in the said carrier vicinity. Further, the connector may have a solder ball at one contact.

  The present invention is an electrical connection body for electrically connecting opposing electrodes between two devices, the carrier, and a first beam having a first contact connected to one of the opposing electrodes, A second beam having a second contact connected to the other of the opposing electrodes, and a clamping part for clamping the carrier in a state where each of the beams protrudes from different surfaces of the carrier. And a connector having the electrical connection body. In the electrical connection body of the present invention, the connector sandwiches the carrier so that the first beam and the second beam protrude from the respective surfaces of the carrier in a predetermined direction. It can be held. As described above, in the electrical connection body of the present invention, the number of connectors arranged on the carrier can be easily increased because the connector itself holds the carrier. Further, because of the simple immobilization form, the type, size, arrangement, carrier size, etc. of the connectors can be easily changed. Furthermore, according to the electrical connection body of the present invention, since the connector is fixed to the carrier in a predetermined form only when the carrier is sandwiched between the connectors, the connector having a predetermined form is attached to the carrier in advance. Unlike the conventional electrical connection body that has been fixed, the degree of freedom of the shape of the connector and the beam is increased, and the displacement, contact load, and conductor resistance can be easily adjusted. Therefore, it is possible to easily fix the connector in a form that takes into consideration various functions such as the magnitude of displacement, the magnitude of contact load, and the conductor resistance. Furthermore, according to the electrical connection body of the present invention, it is possible to easily replace the connector.

  In addition, the present invention is a method for manufacturing an electrical connection body that electrically connects opposing electrodes between two devices, and is connected to one of the opposing electrodes in the through hole of a carrier having a through hole. A connector having a first beam having a first contact and a second beam having a second contact connected to the other of the opposing electrodes from different faces of the carrier. A step of inserting each of the connector into a protruding state, a step of bending so that a portion of the connector arranged in the vicinity of the carrier sandwiches the carrier, and fixing the connector to the carrier; And a manufacturing method. According to the method for manufacturing an electrical connection body of the present invention, the connector is inserted into the through hole of the carrier in a predetermined form, and then the connector is fixed to the carrier by bending. Since the connector is fixed to the carrier by performing the fixing step by bending in this way, the number of connectors can be easily increased, and the shape of the connector to be fixed is fixed. In addition, the degree of freedom of the beam form to be finally obtained is high, and the electrical connection body can be manufactured with a high degree of design freedom. Accordingly, it is possible to manufacture an electrical connection body in which a connector having a configuration in consideration of various functions such as the magnitude of displacement, the magnitude of contact load, and the conductor resistance is easily fixed.

(First embodiment)
Hereinafter, the electrical connection body, the manufacturing method thereof, and the use of the electrical connection body according to the embodiment of the present invention will be described with reference to FIGS.

(Electrical connection)
In FIG. 1, an example of the electrical connection body 2 of this invention is shown. The electrical connection body 2 includes a carrier 4 and a connector 10.

(Carrier)
The carrier 4 may be in any form that can be disposed between the opposed devices, but is preferably a plate-like body. In addition, it is preferable that at least the surface layer side and the portion where the connector 10 may contact are insulative. More preferably, the whole is insulative. The insulating part of the carrier 4 is preferably made of an insulating plastic material or ceramic material. Such insulating materials include, but are not limited to, glass fiber-containing epoxy resins such as FR4, engineering plastics such as polyetheretherketone (PEEK), and various ceramics.

  The carrier 4 is preferably composed of a continuous solid phase. The continuous solid phase means that the entire carrier is homogeneous in material and does not have a discontinuous interface due to adhesion, bonding, fitting, or the like. Accordingly, the carrier 4 composed of a continuous solid phase is excluded from a unit in which a plurality of units are integrated, but it can be said that a normal FR4 substrate, PEEK substrate, and ceramic substrate are composed of a continuous solid phase. By using the carrier 4 made of a continuous solid phase, the flatness and dimensional accuracy of the carrier 4 can be easily ensured regardless of the thickness and size of the carrier 4, and as a result, the flatness and dimensional accuracy can be improved. An excellent electrical connection body 2 can be obtained.

  The carrier 4 is preferably provided with a through hole 6 for holding the connector 10. Here, the through hole 6 means a through hole provided in the carrier 4 in advance for inserting the connector 10. Such through holes 6 are formed according to the arrangement form of the connectors 10, but in many cases, are formed in a matrix shape including rows and columns. As shown in FIGS. 1 and 2, these through-holes 6 may be individually provided for each connector 10, or a plurality of connectors 10 arranged in a row, for example, may be provided. It may be provided in a slit shape or the like so that it can be held together.

  The through-hole 6 may be a hole that penetrates from one surface 5a of the carrier 4 to the other surface 5b, but preferably has a penetration configuration that penetrates substantially the thickness of the carrier 4 linearly. Further, the sectional form of the opening of the through hole 6 is not particularly limited. Depending on the form of the connector 10 or the like, a circular shape, a rectangular shape, or the like may be combined in the depth direction. Further, when the connector 10 is inserted into the through hole 6, a stopper such as a small diameter portion or a protrusion is provided inside the through hole 6 so that the insertion depth position of the connector 10 is limited and can be positioned at an appropriate position. May be.

  The through-holes 6 can be symmetrically arranged on both sides of the central part, for example, as shown in FIG. 1 and FIG. In this way, a large number of connectors 10 can be arranged on the left and right sides of the carrier 4, and the beams 12a and 12b can be opposed to each other so as to be directed to the center. Further, for example, a plurality of areas may be provided in the carrier 4, and the through holes 6 may be provided for each of these areas symmetrically within the area. The through-hole 6 is a part for holding the connector 10 on the carrier 4, and the carrier 4 is interposed between the two beams 12 a and 12 b included in the connector 10 via the through-hole 6, so that the beam 12 a, What is necessary is just to make it support the support | carrier 4 near the base part of 12b. Therefore, the through-hole 6 may not be provided in the carrier 4 in advance before holding the connector 10. For example, the connecting portion 30 of the two connectors 10 is integrated so that the connector 10 penetrates the carrier 4 simultaneously with the molding of the carrier 4, and the vicinity of the bases of the beams 12 a and 12 b protruding from the surface of the carrier 4 is connected. A configuration may be adopted in which the carrier 4 is held at the same time as a predetermined beam angle is secured by contacting a portion in the vicinity of the surface of the carrier 4 through which the child 10 has penetrated. Further, after the connector 10 is pierced and penetrated through the carrier 4 having a predetermined shape, the bases of the beams 12a and 12b may be sandwiched in the vicinity of the penetration part.

(Connector)
The connector 10 includes a first beam 12 a and a second beam 12 b that protrude from the respective surfaces of the carrier 4. The first beam 12a and the second beam 12b constitute both arms of the connector 10, and these beams 12a and 12b are integrated at the center of the connector 10, preferably, The connector 10 having these beams 12a and 12b is formed as a continuous integral conductor. By integrating the connector 10, it is possible to provide a connector 10 with stable quality by suppressing man-hour load due to bonding, diffusion, plating, and the like, and variations in quality due to these process defects. The material constituting the connector 10 is not particularly limited. For example, any one selected from beryllium copper, titanium copper, copper / nickel / tin alloy, copper / nickel / silicon alloy, and nickel beryllium may be used. it can. Especially, it is preferable to use beryllium copper from a viewpoint of electroconductivity and durability. The surface of such a material can be subjected to gold plating after being subjected to base plating such as nickel.

  The shapes of these beams 12a and 12b are not particularly limited. It is preferable that the entirety is elastically deformable so that the tip side can come into contact with the electrode of the device which is opposed to the device. Therefore, each may have a cantilever shape or various forms of buckling spring shapes. From the viewpoint of the magnitude of displacement and the degree of freedom in designing the contact load, a cantilever shape is preferable.

  When the beams 12a and 12b are cantilever-like, each beam 12a and 12b may be flat or wire-like, but from the viewpoint of reducing conductor resistance, it is flat. Is preferred. Further, the flat beam is preferably formed so that the beam width becomes narrower from the center side to the tip side of the connector 10. By narrowing the beam width, a large displacement can be applied while making the surface stress of the connector 10 uniform over the length direction of the beams 12a and 12b.

  The flat cantilever can be obtained by punching the flat plate into a predetermined shape or by partially removing the flat plate by etching. The flat plate cantilever includes a flat plate cantilever whose plate thickness corresponds to the spring thickness and a flat plate cantilever whose plate width corresponds to the spring thickness. Preferably, a flat plate cantilever whose plate thickness corresponds to the spring thickness is used. Is preferred. According to such a flat cantilever, a sufficient cross-sectional area can be easily secured, so that the conductor resistance can be kept low.

  The ratio of the beam thickness to the beam width (beam width / beam thickness) of the beams 12a and 12b constituting the flat plate cantilever corresponding to the spring thickness in the plate thickness direction is preferably 2 or more and 40 or less. If it is 2 or more, it is easy to obtain the advantage of lowering the conductor resistance by increasing the cross-sectional area, and if it is 40 or less, the beam width can be maintained within an allowable range with respect to the plate thickness that can be handled. The fixed pitch of the child 10 can be maintained below a certain level. The ratio of the beam thickness to the beam width is more preferably 3 or more, and further preferably 4 or more. The ratio is more preferably 20 or less, and still more preferably 15 or less. The beam width is the portion with the highest stress, and is, for example, the width of the first abutting portion to be described later or the portion that contacts the surface of the carrier 4 of the beams 12a and 12b.

  Further, the preferred beams 12a and 12b have a beam width to beam length ratio (beam length / beam width) of 1 to 18. If this ratio is 1 or more, the beam shape can be approximately maintained in a square shape, so that it is easy to ensure dimensional accuracy even during bending, and if it is 18 or less, a flat plate cantilever with a plate thickness corresponding to the spring thickness The increase in the conductor resistance can be suppressed by suppressing the lengthening of the conductor. This ratio is more preferably 2 or more, and further preferably 3 or more. Further, this ratio is more preferably 12 or less, and still more preferably 8 or less. The beam length refers to the length from the portion abutting the surface of the carrier 4 of 12a and 12b to the tip.

  In such a flat cantilever, the plate thickness is preferably 0.01 mm or more and 0.08 mm or less. In this range, when the plate thickness corresponds to the spring thickness, appropriate elasticity or flexibility can be obtained, and good conductivity can be easily obtained in relation to the spring width. Preferably, it is 0.02 mm or more and 0.06 mm or less. The beam width is preferably 0.15 mm or more and 0.70 mm or less. This is because, within this range, good conductivity can be easily obtained in relation to the plate thickness. More preferably, it is 0.15 mm or more and 0.50 mm or less. Furthermore, the length is 1.0 mm or more and 2.4 mm or less in a flat plate cantilever in which such a plate thickness corresponds to the spring thickness. As described above, the length is a preferable beam length with respect to the beam width, and in such a range, beams 12a and 12b that can cope with a large displacement can be obtained.

  Further, the beam length can be made longer than the formation pitch of the through holes 6. According to the electrical connection body 2 of the present invention, since the beam is tilted by bending when the connector 10 is fixed to the carrier 4, the beam length can be set without being limited by the pitch of the through holes 6. As a result, the desired displacement, load and electrical characteristics can be easily obtained regardless of the pitch. Therefore, the beam length can be formed exceeding the formation pitch of the through holes 6 and is preferably 120% or more, more preferably 150% with respect to the formation pitch of the through holes 6 although it depends on the pitch of the through holes 6. More preferably, it is 180% or more, and more preferably 200% or more. Furthermore, it can be 360% or more. In the present invention, the formation pitch of the through holes 6 in the carrier 4 is preferably 0.5 mm or more and 2.54 mm or less, more preferably 0.8 mm or more and 1.6 mm or less.

  Contact points 14a and 14b are provided at the tip portions of the beams 12a and 12b, respectively, for contacting the opposing electrodes. The contact form of the electrodes at the contacts 14a and 14b is not particularly limited. That is, the contact form with the electrode may be any form such as point contact or line contact. From the viewpoint of contact reliability, line contact is preferable. In addition, the number of contact parts in each of the contacts 14a and 14b may be at least one, but two or more may be provided. Contact reliability can be improved by having two or more contact parts. More preferably, two or more contact portions for line contact are provided. Furthermore, the preferable form of the contact part of a line contact is a form which makes a line contact by providing in the loose convex shape (curved surface shape) toward the electrode side. According to such a form, contact reliability per unit area can be increased and contact reliability can be improved. In addition, by making it loose convex shape, the sliding force to the horizontal direction which concerns on the beams 12a and 12b when the contacts 14a and 14b contact with an electrode can also be reduced.

  For example, as shown in FIG. 3, the contacts 14a and 14b are provided in a loosely convex shape directed toward the electrode side along the beam direction, thereby ensuring line contact and increasing the contact load per unit area. Can do. Further, as shown in FIG. 4, the contact 14a is provided in a bifurcated shape, and the tip end side of the bifurcated beam is convex on the electrode side as a whole, and the opposite edge portion of the bifurcated beam is used as a contact portion to the electrode It is possible to increase the contact load per unit area while ensuring two contact parts and ensuring line contact at each contact part. The opposing edge portions are preferably brought into contact with the electrode at an angle of 10 ° to 20 °, thereby effectively increasing the contact load per unit area. In addition, the bifurcated contact 14a can ensure contact at two locations by setting the width so that the stress level cooperates with the beam 12a.

  The beam angles of the beams 12a and 12b are preferably 15 ° or more and 50 ° or less as shown in FIG. When the beam angle is 15 ° or more, it is possible to secure a distance from the beams 12a and 12b of the connector 10 arranged in the forward direction in which the beams 12a and 12b are tilted, and avoid interference between adjacent beams 12a and 12a. Thus, the necessary displacement can be obtained. Further, when the beam angle is 50 ° or less, an increase in the vertical component of the load when the beams 12a and 12b are displaced due to contact with the electrodes can be suppressed, and the contacts 14a and 14b are in contact with the electrodes. Thus, it is possible to suppress the deformation of the beams 12a and 12b by suppressing an excessive force from being applied due to the friction when sliding. Further, when the angle is 50 ° or less, an increase in the amount of sliding of the contacts 14a and 14b in the horizontal direction with respect to the same displacement amount can be suppressed. Therefore, even when the pitch is small, the contacts 14a and 14b are reliably brought into contact with the electrodes. I can keep it. More preferably, the beam angle is 30 ° or more and 40 ° or less.

  As shown in FIG. 6, a solder ball 16 can be provided as at least one of the beams 12a and 12b, preferably one of the contacts 14a (or the contact 14b). When the solder ball 16 is provided as the contact 14a or 14b, it is preferable that a land portion 18 for fixing the solder ball 16 is provided at the tip of the beam 12a or the beam 12b. When the land portion 18 is provided, the beams 12a and 12b including the land portion 18 do not necessarily have the same length as the original beam, and the land portion 18 may be adjacent to the bent portion (the base portion of the beam).

  The central portion of the connector 10 can function as a connecting portion 30 that connects the beams 12a and 12b. The connecting portion 30 is provided through the carrier 4 with respect to the carrier 4. For example, when the connecting part 30 is provided in the carrier 4 in a state of passing through the through hole 6, the connecting part 30 may be elastically deformable so that it can be easily inserted into the through hole 6 and fixed. For example, as shown in FIG. 7, by providing a slit 32 in the connecting portion 30, the width of the connecting portion 30 can be adjusted within a certain range. That is, in the left diagram of FIG. 7, when the lateral width of the connecting portion 30 is slightly larger than the diameter of the through hole 6, the connecting portion 30 is inserted into the through hole 6 while the connecting portion 30 is inserted into the through hole 6. Is accommodated in the through hole 6 in a state of being elastically deformed by being pressed against the peripheral wall of the through hole 6 so as to be narrow. As a result, the connecting portion 30 exerts an elastic force in the direction of expanding the peripheral wall of the through hole 6 and is firmly fixed at that position. In addition, when a small-diameter portion or a protrusion is provided at a predetermined site in the through-hole 6 so that the insertion height position into the through-hole 6 can be positioned, the large-diameter portion locked by such a stopper. Or a protrusion may be provided.

(Fixed form of connector on carrier)
As shown in FIGS. 1 and 7, the connector 10 can include sandwiching portions 20 a and 20 b that sandwich the carrier 4 in the vicinity of the base portions of the beams 12 a and 12 b. The sandwiching portions 20a and 20b can sandwich the carrier 4 so that the beams 12a and 12b can be fixed to the carrier 4 in a state where the beams 12a and 12b protrude from different surfaces 5a and 5b of the carrier 4, respectively. By using an elastically deformable material or an elastically deformable form as the material of the connector 10, the holding portions 20 a and 20 b of the connector 10 can elastically hold the carrier 4.

  The sandwiching portions 20 a and 20 b have a portion where the connector 10 bends in order to sandwich the carrier 4. There are no particular limitations on the clamping form by the bent portion, but in order to construct a stable clamping form, it is preferable that each of the clamping parts 20a and 20b has two or more bent parts. An example of a fixed form by holding the connector 10 is shown in an enlarged manner in FIG. In the connector 10 in this embodiment, the connecting portions 30 of the beams 12a and 12b are inserted into the through holes 6 of the carrier 4, and the beams 12a and 12b protrude from the surfaces 5a and 5b of the carrier 4 at predetermined beam angles, respectively. Yes. The sandwiching portions 20a and 20b are directed to the surfaces 5a and 5b of the carrier 4 in the vicinity of the opening edge and bent and sandwiched, and the vicinity of the surfaces 5a and 5b of the carrier 4 from the through hole 6 And second bent portions 24a and 24b that are bent toward the surfaces 5a and 5b of the carrier 4. The connector 10 includes the first bent portions 22 a and 22 b and the second bent portions 24 a and 24 b, so that the carrier 10 is held by the carrier 4 while sandwiching the carrier 4. At the same time, the beams 12a and 12b are given a predetermined angle and elastic deformability.

  Although it is preferable that the first bent portions 22a and 22b or the vicinity thereof are in direct contact with the carrier surfaces 5a and 5b, the contact is not necessarily required. Further, when the connector 10 is made of a metal material having high hardness, the first bent portions 22a and 22b are likely to float from the carrier surfaces 5a and 5b due to the spring back against bending. Thus, the effect of such springback can be reduced to a level that can be substantially ignored.

  1 and 7 are provided with weak portions 26a and 26b that are weaker than the surroundings as stress concentrating portions at or near the second bent portions 24a and 24b of the beams 12a and 12b. In the embodiment shown in FIGS. 1 and 7, the fragile portions 26a and 26b are formed as narrower portions than the surroundings. By providing the fragile portions 26a and 26b, the portion protruding from the through hole 6 of the connector 10 can be processed so as to easily hold the carrier 4 by bending. Note that the stress concentration portion can be formed by reducing the width, reducing the thickness, or providing scratches or defects.

  Further, an adhesive layer may be provided between the sandwiching portions 20a and 20b and the carrier surfaces 5a and 5b. That is, an adhesive or the like is applied to the carrier surfaces 5a and 5b, and the first bent portions 22a and 22b of the sandwiching portions 20a and 20b are brought into contact with the carrier surfaces 5a and 5b via the adhesive layer. It may be in the form of pinching. Such a configuration is effective when, for example, spring back occurs and the first bent portions 22a and 22b are in direct contact with the carrier surfaces 5a and 5b and cannot be sandwiched. This adhesive layer may be thermoplastic or thermosetting, but in consideration of the movement of the beams 12a and 12b of the connector 10, the adhesive layer has a certain degree of elasticity even after exhibiting the adhesive effect. A layer is preferred.

  As shown in FIGS. 1 and 2, the connector 10 can be arranged so as to be opposed to each other in the left-right direction with the beam 12 a, 12 b pointing to a dividing line that divides the carrier 4 left and right. As a result of facing the directions of the beams 12a and 12b of the connector 10 in this way, when the beams 12a and 12b are largely displaced, the sliding force generated by friction when the electrodes and the contacts slide is canceled to cancel the beams 12a and 12b. A sufficient amount of wiping with the facing electrode is ensured to ensure stable contact. The group of connectors 10 arranged on the left and right sides effectively cancels the sliding force by arranging the same number of right and left by directing a dividing line that divides the carrier 4 into two substantially right and left, and the device and the carrier 4 Can be prevented from moving between.

(Method of manufacturing electrical connection body)
Next, a method suitable for manufacturing the electrical connection body of the first embodiment will be described. First, the connector 10 is prepared. In this method, the holding portions 20a and 20b of the connector 10 hold the carrier 4 so that the connector 10 is fixed to the carrier 4 and a predetermined directionality is imparted to the beams 12a and 12b of the connector 10. Therefore, the connector 10 can have different forms before and after immobilization. For example, the connector 10 in the electrical connection body 2 shown in FIGS. 1 and 2 can have the form shown in FIG. 8 before immobilization.

  As shown in FIG. 8, the connector 10 before fixation has a first bent part 100 and a second bent part 110. The first bent portion 100 determines the angles of the beams 12a and 12b. By forming the bent portion 100 in advance, the connector 10 having no final form before immobilization can be used as a carrier. The beams 12a and 12b can be processed with high accuracy even by bending in a state of being temporarily held at 4. The second bent portion 110 is provided to make the connecting portion 30 and the beams 12a and 12b approximately parallel so that the connector 10 before fixation can be easily inserted through the linear through-hole 6. ing. The first bent portion 100 corresponds to the first bent portions 22a and 22b of the connector 10 after being fixed, and the second bent portion 110 similarly corresponds to the second bent portions 24a and 24b. . Such bent portions 100 and 110 can be formed by a bending process using a normal punch and die. It is preferable that the first bent portion 100 is first processed and then the second bent portion 110 is processed.

  As shown in FIG. 8, the second bent portion 110 is bent in the opposite direction with respect to the first bent portion 100, and an inflection point 105 is provided between the bent portions 100 and 110. Have. Further, in the vicinity of the second bent portion 110, weak portions 26a and 26b are provided. At the time of bending for fixing, the connector 10 is selectively bent at the fragile portions 26a and 26b, and a new angle can be given to the second bent portion 110. On the other hand, the first bent portion 100 has a sufficient width compared to the fragile portions 26a and 26b, and the initial bending angle is maintained in the bending process for fixation. Yes.

  Next, as shown in FIG. 9, the connector 10 bent in advance is inserted into the through hole 6 formed in the carrier 4. The method for inserting the connector 10 into the through hole 6 is not particularly limited. The connectors 10 may be inserted one by one, or a plurality of connectors 10 may be inserted together using a carrier and a bridge. The connector 10 is positioned so that both beams 12a and 12b are directed in a predetermined direction and project a predetermined amount from the carrier surfaces 5a and 5b.

  Next, the carrier 10 is clamped by bending the connector 10 before immobilization. The bending process can be performed by applying an external force in the direction of the carrier 4 so that the bent part 100 of the connector 10 sandwiches the carrier 4 like a normal bending process using a punch or a blade. It is also possible to apply the displacement directly to the connector 10 during use. In the latter bending process, the connector 10 not fixed to the carrier 4 is positioned, and the electrical connection body 2 is mounted on a device to be used for operation or used. Can be performed by performing an operation simulating the above. For example, as shown in FIG. 10, the connector 10 is deformed by the fragile portions 26a and 26b by pressing the contact points 14a and 14b side by a predetermined amount from above and below with a mirror-finished flat jig or the like, and the second bent portion A new angle can be given to 110 and the support | carrier 4 can be clamped in the 1st bending part 100 or its vicinity. As a result, the connector 10 is bent and the first bent portions 22a and 22b holding the carrier 4 and the second bent portions bent to form such a holding state in the first bent portions 22a and 22b. The holding parts 20a and 20b having 24a and 24b are formed and fixed to the carrier 4 in a predetermined form.

  According to this method, of the bent portions 100 and 110, the first bent portion 100 that determines the directionality of the beams 12a and 12b is formed so as to be able to maintain a predetermined angle given in advance, and the second bent portion. 110 uses the unfixed connector 10 formed so as to be given a new angle by bending, so that it is easy to ensure dimensional accuracy in the height direction of the beams 12a and 12b. A clamping form can be formed. That is, since the bent portions 100 and 110 and the fragile portions 26a and 26b are provided, the connector 10 can be fixed with high accuracy by realizing a highly accurate bending process.

  When the connector 10 is a high-hardness metal material, it may be difficult to bring the first bent portion 100 or the vicinity thereof into contact with the carrier 4 by a spring back and to directly hold it. Is greatly changed depending on the radius and length of the bent portion including the fragile portions 26a and 26b. Therefore, the floating amount can be suppressed to a level that can be substantially ignored by optimizing the combination of the plate widths at the bent portion. it can.

  Prior to bending for fixation, an adhesive layer may be disposed in advance on the carrier surfaces 5a and 5b to be sandwiched. By arranging the adhesive layer, when the bending point 105 between the first bent portion 100 and the second bent portion 110 is pressed against the surface of the carrier 4 during the bending process for fixing. It is fixed as it is with an adhesive layer. As a result, they are bonded together at a predetermined temperature and do not return with springback, and the connector 10 is stably fixed to the carrier 4. By doing so, it is possible to increase the dimensional accuracy in the height direction and the planar direction of the tips of the beams 12a and 12b. In use, since the load is generated after the connector 10 is displaced and the first bent portions 22a and 22b hit the carrier surfaces 5a and 5b, the spring characteristics and the like can be ensured. Moreover, when using an adhesive agent, the influence which it has on the movement of the connector 10 can be suppressed by selecting an elastic type after bonding.

  The method for arranging the adhesive layer is not particularly limited. An adhesive sheet may be affixed or an adhesive may be coated. Moreover, the arrangement | positioning timing of an adhesive layer should just be before the bending process for fixation. The adhesive layer is not necessarily limited to the carrier surfaces 5a and 5b, and can be applied to a predetermined portion of the connector 10.

  According to the electrical connection body and the manufacturing method thereof of the present embodiment described above, the operation provided by the electrical connection body and the manufacturing method of the present invention can be provided. In particular, since the beams 12a and 12b are arranged by bending after the connector 10 is arranged in the through hole 6 of the carrier 4, the length of the beams 12a and 12b of the connector 10 depends on the pitch interval for forming the through hole 6. Thus, even a cantilever beam can be formed without being limited by the formation pitch of the through holes 6 and sufficient displacement can be achieved. As a result, the number of large displacement connectors can be easily increased. Further, by using a cantilever beam so as to have flexibility in the plate thickness direction, the number of connectors having low conductor resistance can be easily increased. Furthermore, according to the present embodiment, since the integrity of the carrier 4 is ensured while ensuring such a long beam length, the connector 10 is fixed to the large carrier 4. However, since it is not necessary to integrate the units in the thickness direction and the width direction, it is possible to provide an electrical connection body with good flatness and dimensional accuracy.

  In addition, since conventional machining techniques and bending techniques can be used for drilling the carrier 4 and bending the connector 10, it is possible to efficiently manufacture even a wide variety of small-sized electrical connectors. it can. In addition, according to the present embodiment, the connector 10 is simply inserted into the through hole 6 formed in the carrier 4 and clamped by bending, and no press-fitting stress is applied to the through hole 6. Therefore, it is possible to easily increase the number of connectors at a narrower pitch. In addition, when the connector 10 is subjected to a bending process for fixing, all the pins can be bent together, so that the manufacturing process of the electrical connection body can be easily made more efficient.

(Second Embodiment)
Next, an electrical connection body, a method for manufacturing the electrical connection body, and an application of the electrical connection body according to another embodiment of the present invention will be described with reference to FIGS. The electrical connection body 120 of the second embodiment is different in the form of the through hole 6 from the electrical connection body 2 of the first embodiment, the form of the connector 10 itself, the immobilization form of the carrier 4 and the manufacturing method. ing. Hereinafter, these differences will be mainly described, and description of the same members and the like will be omitted.

  In FIG. 11, the electrical connection body 120 of this embodiment is shown. As shown in FIG. 11, concave stepped portions 127a and 127b that extend the opening edge to a predetermined depth can be provided on one side of the opening edge of the through hole 126 in the present embodiment. That is, stepped portions 127 a and 127 b can be provided inside one side of the opening edge of the through hole 126. The stepped portions 127 a and 127 b have bottom surfaces 128 a and 128 b and wall surfaces 129 a and 129 b inside the through hole 126. The stepped portions 127a and 127b may be provided on the side where the beams 132a and 132b of each through-hole 126 are directed, or may be provided in a large number of through-holes 6 constituting rows or columns arranged in a matrix. It is also possible to form a groove shape all together.

  FIG. 12 shows details of the connector 130 in this embodiment and how it is fixed. Since the connector 130 in this embodiment has the same beam form and contact form as shown in FIG. 4, the description thereof is omitted. The sandwiching portions 140a and 140b of the connector 130 are first bent portions 142a and 142b that bend toward the surfaces 5a and 5b of the carrier 4, respectively, and the second bent portions 142a and 142b that bend toward the surfaces 5a and 5b of the carrier 4. The point provided with the bending parts 144a and 144b is common to the connector 10 of the first embodiment. On the other hand, the connector 130 is different in that it includes third bent portions 146a and 146b that contribute to the directionality of the beams 132a and 132b. Further, in the connector 130, the vicinity of the first bent portions 142a and 142b is in contact with the surfaces 5a and 5b of the carrier 4 as in the first embodiment. In the first inflection portions 143a and 143b between the portions 142a and 142b and the second bent portions 144a and 144b, the first bent portions 142a and 142b come into contact with the bottom surfaces 128a and 128b of the stepped portions 127a and 127b. , Specifically, second inflection points 145a and 145b between the first bent portions 142a and 142b and the third bent portions 146a and 146b are formed on the wall surfaces 129a and 129b of the stepped portions 127a and 127b. The point of contact is different.

  In such an immobilization form, the second inflection portions 145a and 145b come into contact with the wall surfaces 129a and 129b of the stepped portions 127a and 127b, so that the blur on the tip side of the connector 10 is suppressed, and high dimensional accuracy is obtained in the planar direction. Can have. Further, since the directionality of the beams 132a and 132b is determined by the first bent portions 142a and 142b and the third bent portions 146a and 146b, it can have high dimensional accuracy in the height direction.

  Next, a method suitable for manufacturing the electrical connection body 120 of the second embodiment will be described. First, the connector 130 is prepared. In this method, as in the first embodiment, the connector 130 can have different forms before and after immobilization. For example, the connector 130 in the electrical connection body 2 shown in FIGS. 11 and 12 can have the form shown in FIG. 13 before immobilization.

  As shown in FIG. 13, the connector 130 before fixation has a first bent portion 200, a second bent portion 210, and a third bent portion 220. The first bent portion 200 corresponds to the first bent portions 142a and 142b of the connector 130 after fixing, and the second bent portion 210 is the second bent portion 144a of the connector 130 after fixing. The third bent portion 220 corresponds to the third bent portions 146a and 146 in the same manner. The first bent portion 200 and the third bent portion 220 determine the angles of the beams 132a and 132b, and are configured so that the angles do not change even by bending for fixation. By forming the bent portions 200 and 220 in advance, the beam 132a with high accuracy can be obtained by bending the connector 130 that does not have the final form before fixation temporarily held on the carrier 4. , 132b can be processed. The second bent portion 210 is provided to make the connecting portion 30 and the beams 132a and 132b approximately linear so that the connector 130 before fixation can be easily inserted through the linear through hole 6. ing. Such bent portions 200 to 220 can be formed by a bending process using a normal punch and die. It is preferable that the bent portions 200 and 220 are first processed and then the bent portion 210 is processed.

  More specifically, in the connector 130 before fixation, the second bent portion 210 and the third bent portion 220 are bent in opposite directions with respect to the first bent portion 200, and these bent portions are bent. Each part has an inflection point. In addition, weak portions 226 and 228 are provided on both sides of the second bent portion 210 so as to be weaker than the surroundings. In these two fragile portions 226 and 228, the fragile portion 226 on the inflection point side between the bent portion 200 and the bent portion 210 is formed to be more fragile, that is, narrower than the other. When an external force is applied to 130, it is most easily bent. Further, the weak portion 228 on the opposite side is formed to be weak next to the weak portion 226, that is, to be narrow, and is formed to bend easily next to the weak portion 226 when an external force is applied to the connector 130. Yes. That is, at the time of bending for fixing, the connector 130 is selectively bent at the weakened portions 226 and 228, and the weakened portions 226 and 228 cause the second bent portion 210 to be bent. Is provided with a new angle by bending.

  Next, based on FIG.14 and FIG.15, the fixation to the support | carrier 4 of the connector 130 before such fixation is demonstrated. As shown in FIG. 14, the connector 130 bent in advance is inserted into the through hole 126 formed in the carrier 4. The method for inserting the connector 130 into the through hole 126 is not particularly limited. As in the first embodiment, the connectors 130 may be inserted one by one, or a plurality of connectors 130 may be inserted together using a carrier and a bridge. The connector 130 is positioned so that both beams 132a and 132b are directed in a predetermined direction and a predetermined amount protrudes from the carrier surfaces 5a and 5b.

  Next, as shown in FIG. 15, bending is performed on the connector 130 before fixing. In the present embodiment, in particular, bending can be performed using the blade 300 having the first blade portion 310 and the second blade portion 312. According to the blade 300, two types of bending can be performed by one operation. That is, during bending for fixing the connector 130, the first blade portion 310 of the blade 300 changes between the bent portion 210 adjacent to the second bent portion 210 and the first bent portion 200. When it hits the bending point, only the weak weak part 226 is greatly deformed compared to the others, the second bent part 210 is narrowed, the first bent part 200 falls to the bottom surface 28a of the stepped part 127a of the carrier 4, and the beam 132a is Fall down. However, at this time, the connector 130 cannot sandwich the carrier 4 by the restoring force due to the spring back, and the first bent portion 200 is in a floating state.

  Next, when the second blade portion 312 of the blade 300 hits the vicinity of the second bent portion 210, the next weakest weak portion 228 is deformed. Then, the fragile portion 226 spreads on the contrary, and a final angle is given to the second bent portion 210. As a result, the inflection portion between the first bent portion 200 and the second bent portion 210 is brought into contact with the bottom surface 128a of the stepped portion 127a by the reverse spring back, so that the carrier 4 can be held. At this time, the inflection point between the first bent portion 200 and the third bent portion 220 abuts on the wall surface 129a of the stepped portion 127a, so that the blurring of the tip of the connector 130 is suppressed, and the planar Dimensional accuracy is ensured. Since the angles of the first bent portion 200 and the third bent portion 220 are not changed by these bending processes, the dimensional accuracy in the height direction is also ensured. Thereby, as shown in FIG.11 and FIG.12, the state by which the connector 130 was fixed to the support | carrier 4 by clamping part 140a, 140b can be obtained.

  According to this method, among the bent portions 200, 210, and 220, the first bent portion 200 and the third bent portion 220 that determine the directionality of the beams 12a and 12b can maintain a predetermined angle given in advance. The third bent portion 210 uses the unfixed connector 130 formed so as to be given a new angle by bending. Therefore, the height direction and plane of the beams 132a and 132b are used. The pinching form can be easily formed while ensuring the dimensional accuracy in the direction. That is, since the bent portions 200, 110, and 220 and the fragile portions 226 and 228 are provided, a highly accurate bending process can be realized and the connector 130 can be fixed with high accuracy.

  As described above, in the present embodiment, the bending process for fixing the connector 130 is performed in two stages. In the first stage, the beam 132a is tilted, and in the second stage, the clamping part 140a. , 140b can hold the carrier 4.

  According to the electrical connection body 120 and the manufacturing method thereof of the present embodiment, the operation of the electrical connection body and the manufacturing method of the present invention described above can be obtained, and the electrical connection body 2 of the first embodiment and Similar effects can be obtained. In addition, according to the present embodiment, there is an advantage that a reliable clamping form of the carrier 4 by the clamping portions 140a and 140b can be easily obtained by bending. In this embodiment, since the two-stage bending process is performed in one operation using one type of blade 300 including the two blade portions 310 and 312, the connector 130 can be bent reliably and easily. Processing can be performed. Further, in the present embodiment, the directivity and height accuracy of the beams 132a and 132b are generated by causing the connector 130 to contact the bottom surfaces 128a and 128b and the wall surfaces 129a and 129b of the stepped portions 127a and 127b. Both can be easily obtained.

(Third embodiment)
FIGS. 16A and 16B are explanatory diagrams of the electrical connection body 320 according to the third embodiment. FIG. 16A is a plan view, and FIG. 16B is a cross-sectional view taken along line AA in FIG.

  As in the first embodiment, the electrical connection body 320 of the third embodiment is disposed between two devices, and is inserted into a carrier 324 and a through hole 326 penetrating the carrier 324. And a connector 330 fixed in a state.

  Since the carrier 324 is the same as the carrier 4 of the first embodiment, the description thereof is omitted here. However, the through hole 326 penetrating the carrier 324 is a round hole with a circular cross section opened by a drill or the like, but has a cover 328 made of a synthetic resin sheet such as polyimide covering a part of the opening. The edge of the cover 328 is formed in a straight line shape. The cover 328 is bonded to the carrier 324 via the adhesive layer 327 and is also bonded to the connector 330 via the adhesive layer 329.

  The connector 330 is basically the same material and configuration as the connector 10 of the first embodiment. That is, the connector 330 is connected to the first beam 331 having a first contact connected to the electrode of the device disposed above the electrical connector 320 and the electrode of the device disposed below. A second beam 332 having a second contact is provided, and a connecting portion 333 that sandwiches the carrier 324 with the first and second beams 331 and 332 projecting from the upper and lower surfaces of the carrier 324. The connecting portion 333 is bent at the weakened weak portions 334 and 335 arranged in the vicinity of the cover 328, and the upper and lower surfaces of the carrier 324 are formed near the base of the first beam 331 and the base of the second beam 332. It is pinched. In the present embodiment, since the interval between the root of the first beam 331 and the root of the second beam 332 is narrower than the interval between the fragile portion 334 and the fragile portion 335, the connecting portion 333 is a carrier. 324 is firmly held. In addition, the region from the fragile portion 334 to the root of the first beam 331 and the region from the fragile portion 335 to the root of the second beam 332 are bonded to each other through the cover 328 and the adhesive layer 329, so that the connecting portion 333 can maintain the posture of FIG. 16 also by the adhesive force. In addition, the connecting portion 333 has a bent portion 333 a that is bent in a V shape substantially at the center of the portion accommodated in the through hole 326. The angle θ of the V-shape of the bent portion 333a is wider after being accommodated than when the connecting portion 333 is accommodated in the through hole 326. The connecting portion 333 is accommodated in the through hole 326 while being elastically deformed by being pushed by the peripheral wall of the through hole 326, and both sides of the bent portion 333a (circles in the partially enlarged view of FIG. 16A) are through holes. A region including both sides in the vicinity of the fragile portions 334 and 335 (double circles in the partially enlarged view of FIG. 16A) is in contact with the linear edge of the cover 328. For this reason, the connecting portion 333 accommodated in the through hole 326 urges the peripheral wall of the through hole 326 to be expanded. The base of the first beam 331 is bent at the boundary with the connecting portion 333 and is inclined obliquely upward. The base of the second beam 332 is bent at the boundary with the connecting portion 333 and is inclined obliquely downward.

  Next, a method for manufacturing the electrical connection body 320 of the third embodiment will be described. 17 is a perspective view of a connector 330 used for assembling the electrical connection body 320, FIG. 18 is an explanatory view of an assembly process of the electrical connection body 320, (a) is a plan view, and (b) is ( It is BB sectional drawing of a).

  First, the connector 330 is prepared. The connector 330 before being accommodated in the through hole 326 of the carrier 324 has the same configuration as the connector 330 after being accommodated, but is not bent so much by the weakened portions 334 and 335 and is bent into a V shape. The angle θ of the bent portion 333a is narrower than that after being accommodated in the through hole 326 (see FIG. 16). In addition, a plurality of through holes 326 are formed in the carrier 324 in advance, and covers 328 are attached to both upper and lower opening edges of each through hole 326 via an adhesive layer 327. As described above, the cover 328 covers a part of the opening of the through hole 326, and the edge is formed linearly. Further, a thermosetting resin layer L that is cured by heating is laminated on the upper surface of the cover 328. These layers may be independent from each other, or three layers may be integrated.

  Next, the connector 330 is inserted into the through hole 326 so that the connecting portion 333 is accommodated in the through hole 326. At this time, the vicinity of the weakened portions 334 and 335 formed linearly in the width direction in the connecting portion 333 is made to contact the edge of the cover 328 of the through hole 326. The connecting portion 333 has both sides of the bent portion 333a (circles in the partially enlarged view of FIG. 18A) abut on the through-hole 326 and both sides in the vicinity of the fragile portions 334 and 335 (partly enlarged of FIG. 18A). The region including the double circle in the figure abuts on the straight edge of the cover 328, and the angle θ of the bent portion 333a is wider than before being accommodated in the through hole 326. It is energized to spread the peripheral wall. As a result, the connector 330 is fixed in a state where the vicinity of the fragile portions 334 and 335 formed linearly in the width direction is in contact with the edge of the cover 328, and the rotation of the connector 330 is restricted.

  Subsequently, by applying an external force to the first and second beams 331 and 332 in this state, the first beam 331 is rotated clockwise in FIG. The second beam 332 is rotated counterclockwise in FIG. 18B around the vicinity. As a result, the connector 330 is bent so as to be indicated by a two-dot chain line in FIG. At this time, since the connector 330 is restricted from rotating about its axis, the orientation does not change during bending. In addition, the base of the first beam 331 is pressed against the cover 328 via the thermosetting resin layer L. Furthermore, since the roots of the first and second beams 331 and 332 have a sufficient width as compared with the fragile portions 334 and 335, the original bending angle is maintained.

  And the thermosetting resin layer L is heated with the external force applied. Thereby, the thermosetting resin layer L is thermoset to become the adhesive layer 329, and the electrical connection body 320 of FIG. 16 is obtained.

  According to the present embodiment described in detail above, the same effect as that of the first embodiment described above can be obtained, and the cover 328 having a linear edge is provided at the opening of the through hole 326 to connect the connector 330. Since the V-shaped bent portion 333 a is provided in the portion 333, the axial rotation of the connector 330 can be restricted in the assembly process of the electrical connection body 320.

  Note that the cover 328 is provided in both the upper and lower openings of the through hole 326, but may be provided in either one of them, and even in that case, the axial rotation of the connector 330 can be restricted. However, in order to reliably restrict the axial rotation of the connector 330, it is preferable to provide both on the top and bottom. In the third embodiment described above, the rotation restricting portion is configured by making the through hole 326 a circular hole having a circular cross section and covering the opening with the cover 328. The through hole 326 is shown in FIG. As shown in FIG. 19B, a hole having a cross-section with a shape in which a part of a circle is linearly cut out is employed, or a square hole having a rectangular cross-section is employed as shown in FIG. As shown in FIG. 19D, a hole having an oval cross section is used, or a hole having a cross section of a circle and a quadrangle as shown in FIG. 19D (both sides of the bent portion 333a and the weakened portion 334 of the connecting portion 333). , 335 may enter the corner of this hole). In either case, the same effects as those of the above-described third embodiment are achieved. However, in consideration of making a hole in the carrier 324 with a drill, a configuration in which a part of the opening of the round hole having a circular cross section is covered with the cover is preferable. Other holes are difficult to form with a drill, but can be easily formed if, for example, mold forming is employed. Furthermore, although the connecting portion 333 has the bent portion 333a bent in a V shape, a plurality of such bent portions 333a may be connected. Furthermore, a urging force that elastically deforms the inside of the through hole and pushes the through hole may work by forming one or more V-shaped bent portions in the connecting portion other than the third embodiment. .

  Examples of the device to which the electrical connection body of the present invention is mounted include a semiconductor, an IC chip, and the like provided with the electrodes arranged in an array (the whole is an array or an area array). Moreover, as an application of the electrical connection body of the present invention, a socket, an interposer, and a probe card that ensure electrical connection in such a device can be cited. Furthermore, examples of the electronic device equipped with the electrical connection body of the present invention include those equipped with an IC chip, for example, a PC, a communication device, and the like. Moreover, an IC chip and a semiconductor inspection apparatus are also mentioned, for example, a semiconductor inspection apparatus etc. are mentioned.

  The present invention is not limited to the above-described embodiment, and can be carried out within the scope of the present invention. For example, the shape and number of the bent portions of the fixed connector can be changed as needed, and the location where the carrier is sandwiched and the location where the carrier contacts the carrier surface can also be changed as appropriate. it can.

Sectional drawing which shows the outline of the structure of the electrical connection body of 1st Embodiment. The top view which shows the electrical connection body of 1st Embodiment. The figure which shows an example of the beam structure of a connector. The figure which shows another example of the beam structure of a connector. The figure which shows the difference in a contact state with a device in case a beam angle is 50 degrees and 15 degrees. The figure which shows an example of the electrical connection body which equips the beam tip with a solder ball. The figure which shows an example of the fixation structure of a connector. The figure which shows an example of the connector before fixation. The figure which shows an example of the front | former stage of the fixation process to the support | carrier of a connector. The figure which shows an example of the back | latter stage of the fixing process to the support | carrier of a connector. FIG. 11A is a cross-sectional view showing the outline of the structure of the electrical connection body of the second embodiment, and FIG. 11B shows the carrier 4 in particular in the dotted circle in FIG. 11A. FIG. The figure which shows an example of the fixation structure of a connector. The figure which shows an example of the connector before fixation. The figure which shows an example of the front | former stage of a fixing process to the support | carrier of a connector. The figure which shows an example of the back | latter stage of the fixing process to the support | carrier of a connector. Explanatory drawing of the electrical connection body of 3rd Embodiment. The perspective view of the connector used for the electrical connection body of 3rd Embodiment. Explanatory drawing of the assembly process of the electrical connection body of 3rd Embodiment. Explanatory drawing which shows the other example of 3rd Embodiment.

Explanation of symbols

2,120 Electrical connection body, 4 carrier, 5a, 5b carrier surface, 6,126 through hole, 10,130 connector, 12a, 12b, 132a, 132b beam, 14a, 14b contact, 16 solder ball, 20a, 20b 140a, 140b clamping part, 22a, 22b, 142a, 142b first bent part, 24a, 24b, 144a, 144b second bent part, 26a, 26b, 226, 228 weak part, 30 connecting part, 32 slit, 100, 200 First bent portion (before fixing), 110, 210 Second bent portion (before fixing), 105 Inflection point, 127a, 127b Stepped portion, 128a, 128b Bottom surface of stepped portion, 129a, 129b Wall surface of stepped portion, 143a first inflection point, 145a second inflection point, 146a, 146b, third bent portion, 22 Third bent portion (before fixing), 310 First blade portion, 312 Second blade portion, 320 Electrical connection body, 324 carrier, 326 through-hole, 327 adhesive layer, 328 cover, 329 adhesive layer, 330 Connector, 331 first beam, 332 second beam, 333 connecting portion, 333a bent portion, 334, 335 weak portion.

Claims (27)

An electrical connection body for electrically connecting opposing electrodes between two devices,
A carrier;
From a different surface of the carrier, a first beam having a first contact connected to one of the opposing electrodes, a second beam having a second contact connected to the other of the opposing electrodes, and A connector having a clamping part that clamps the carrier in a state where each of these beams protrudes, and
A connection body comprising:   The connection body according to claim 1, wherein a part of the holding portion is in contact with the surface of the carrier to hold the carrier.   The connection body according to claim 1, wherein the connector is provided through a through-hole penetrating the carrier, and the sandwiching portion abuts near the opening edge of the through-hole to sandwich the carrier.   The connection body according to claim 3, wherein a part of the sandwiching portion comes into contact with a stepped portion inside the opening edge to sandwich the carrier.   The said through-hole is a connection body of Claim 3 or 4 provided with the rotation control part which controls that the said connector rotates axially.   The connection body according to claim 5, wherein the rotation restricting portion is an edge of a cover that covers a part of an opening of a circular hole having a circular cross section.   The connector is formed in a shape that generates an urging force in a direction to push the peripheral wall of the through hole when accommodated in the through hole, and the rotation restricting portion contacts at least two points in the width direction of the connector. The connection body according to claim 3, wherein the connection body regulates axial rotation of the connector.   The connection body according to any one of claims 1 to 7, wherein the clamping unit clamps the carrier by attaching the connection body to the device.   The connection body according to claim 1, further comprising an adhesive layer between the sandwiching portion and the carrier.   The connection body according to any one of claims 1 to 9, wherein the first beam and the second beam of the connector protrude from the carrier in a cantilever shape.   The connection body according to any one of claims 1 to 10, wherein a beam angle of each of the first beam and the second beam is 15 ° or more and 50 ° or less.   The connection body in any one of Claims 1-11 whose ratio of beam width and beam length is 1 or more and 18 or less.   The connection body according to claim 12, wherein the ratio of the beam thickness to the beam width is 2 or more and 40 or less.   The connection body according to any one of claims 1 to 13, wherein a plurality of beams projected on at least one surface of the carrier of the connector provided in a plurality are opposed to each other toward the center of the carrier. .   The connection body according to claim 1, wherein at least one of the beams includes a solder ball and a land portion provided with the solder ball.   The connector according to any one of claims 1 to 15, wherein the connector is mainly composed of a conductive material selected from beryllium copper, titanium copper, copper / nickel / tin alloy, copper / nickel / silicon alloy, and nickel beryllium. Connection body according to crab.   The connection body according to any one of claims 1 to 16, wherein the carrier mainly includes an insulating material including any one selected from glass fiber-containing epoxy resin, ceramics, and engineering plastics.   The connection device according to claim 1, wherein the device includes the electrodes arranged in an array.   The connection body in any one of Claims 1-18 which is a socket or an interposer.   An electronic device provided with the connection body in any one of Claims 1-19.   The electronic device according to claim 20, wherein the electronic device is an inspection device. A method of manufacturing an electrical connection body for electrically connecting opposing electrodes between two devices, comprising:
A first beam having a first contact connected to one of the opposing electrodes and a second contact connected to the other of the opposing electrodes in the through hole of the carrier having a through hole. Inserting a connector having two beams such that each of these beams protrudes from different faces of the carrier;
A step of bending so that a portion of the connector disposed near the carrier sandwiches the carrier;
A manufacturing method comprising:   The manufacturing method according to claim 22, wherein the bending is performed by pressing the first contact and the second contact.   The bending process includes a step of applying a first bending process to a portion of the connector disposed near the carrier and tilting the connector toward the carrier surface, and is disposed near the carrier of the connector. The manufacturing method according to claim 22, further comprising the step of: applying a second bending process to the bent portion to sandwich the carrier.   The manufacturing method according to any one of claims 22 to 24, wherein an adhesive is provided at a clamping portion of the carrier by the electrical connection body at least before the bending process.   The manufacturing method according to any one of claims 22 to 25, wherein the connector has in advance a bent portion and / or a stress concentration portion in a portion disposed in the vicinity of the carrier.   The manufacturing method according to any one of claims 22 to 26, wherein a solder ball is provided at one contact of the connector.

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