JP2007287739A5 - - Google Patents

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Publication number
JP2007287739A5
JP2007287739A5 JP2006109978A JP2006109978A JP2007287739A5 JP 2007287739 A5 JP2007287739 A5 JP 2007287739A5 JP 2006109978 A JP2006109978 A JP 2006109978A JP 2006109978 A JP2006109978 A JP 2006109978A JP 2007287739 A5 JP2007287739 A5 JP 2007287739A5
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JP
Japan
Prior art keywords
ink jet
recording head
jet recording
piezoelectric
thru
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JP2006109978A
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Japanese (ja)
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JP2007287739A (en
JP5035504B2 (en
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Priority to JP2006109978A priority Critical patent/JP5035504B2/en
Priority claimed from JP2006109978A external-priority patent/JP5035504B2/en
Publication of JP2007287739A publication Critical patent/JP2007287739A/en
Publication of JP2007287739A5 publication Critical patent/JP2007287739A5/ja
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Publication of JP5035504B2 publication Critical patent/JP5035504B2/en
Expired - Fee Related legal-status Critical Current
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Claims (9)

下部電極と、
前記下部電極の上方に形成され、下記一般式（１）で表される圧電材料からなる圧電体層と、
前記圧電体層の上方に形成された上部電極と、を有する圧電素子を備えた、インクジェット式記録ヘッド。
（Ｂｉ１−ｘＬａｘ）ＦｅＯ３ ・・・（１）
但し、０＜ｘ＜１である。 A lower portion electrode,
A piezoelectric layer formed above the lower electrode and made of a piezoelectric material represented by the following general formula (1) ;
An ink jet recording head comprising a piezoelectric element having an upper electrode formed above the piezoelectric layer .
(Bi 1-x La x ) FeO 3 (1)
However, 0 <x <1. 請求項１において、
０＜ｘ≦０．３０である、インクジェット式記録ヘッド。 In claim 1 ,
An ink jet recording head in which 0 <x ≦ 0.30 . 下部電極と、A lower electrode;
前記下部電極の上方に形成され、Ｂｉ、ＬａおよびＦｅを構成金属として含む圧電体層と、A piezoelectric layer formed above the lower electrode and containing Bi, La and Fe as constituent metals;
前記圧電体層の上方に形成された上部電極と、を有する圧電素子を備え、A piezoelectric element having an upper electrode formed above the piezoelectric layer,
前記圧電体層のペロブスカイト型構造のＡサイトにおけるＬａの組成ｘが０＜ｘ≦０．３０である、インクジェット式記録ヘッド。An ink jet recording head, wherein the composition x of La at the A site of the perovskite structure of the piezoelectric layer is 0 <x ≦ 0.30. 請求項１乃至３のいずれかにおいて、In any one of Claims 1 thru | or 3,
前記圧電体層の膜厚は２００ｎｍ〜１．５μｍである、インクジェット式記録ヘッド。An ink jet recording head, wherein the piezoelectric layer has a thickness of 200 nm to 1.5 μm. 請求項１乃至４のいずれかにおいて、
前記圧電材料は、擬立方晶の表示で（１００）に配向している、インクジェット式記録ヘッド。 In any one of Claims 1 thru | or 4 ,
An ink jet recording head in which the piezoelectric material is oriented to (100) in a pseudo cubic display . 請求項１乃至５のいずれかにおいて、
前記圧電材料は、擬立方晶の表示で（１１０）に配向している、インクジェット式記録ヘッド。 In any one of Claims 1 thru | or 5 ,
The ink jet recording head , wherein the piezoelectric material is oriented to (110) in a pseudo cubic crystal display . 請求項１乃至６のいずれかにおいて、
前記圧電材料は、ロンボヘドラル構造を有する、インクジェット式記録ヘッド。 In any one of Claims 1 thru | or 6 .
The piezoelectric material is an ink jet recording head having a rhombohedral structure . 請求項１乃至７のいずれかにおいて、
前記圧電材料は、モノクリニック構造を有する、インクジェット式記録ヘッド。 In any one of Claims 1 thru | or 7 ,
The piezoelectric material is an ink jet recording head having a monoclinic structure . 請求項１乃至８のいずれかに記載のインクジェット式記録ヘッドを備える、インクジェットプリンタ。An ink jet printer comprising the ink jet recording head according to claim 1.
JP2006109978A 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer Expired - Fee Related JP5035504B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006109978A JP5035504B2 (en) 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006109978A JP5035504B2 (en) 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer

Publications (3)

Publication Number Publication Date
JP2007287739A JP2007287739A (en) 2007-11-01
JP2007287739A5 true JP2007287739A5 (en) 2009-05-14
JP5035504B2 JP5035504B2 (en) 2012-09-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006109978A Expired - Fee Related JP5035504B2 (en) 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer

Country Status (1)

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JP (1) JP5035504B2 (en)

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JP5041121B2 (en) * 2006-04-12 2012-10-03 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP5041120B2 (en) * 2006-04-12 2012-10-03 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP5354538B2 (en) 2008-07-30 2013-11-27 キヤノン株式会社 Metal oxide and piezoelectric materials
JP5599185B2 (en) * 2009-01-07 2014-10-01 キヤノン株式会社 Piezoelectric material and piezoelectric element
US8216858B2 (en) 2009-02-18 2012-07-10 Canon Kabushiki Kaisha Ferroelectric material, method of producing ferroelectric material, and ferroelectric device
US8400047B2 (en) 2009-03-12 2013-03-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric device, and method of producing the piezoelectric device
US8299688B2 (en) 2009-03-12 2012-10-30 Canon Kabushiki Kaisha Piezoelectric material, method of manufacturing the same, and piezoelectric device
JP2010214841A (en) * 2009-03-18 2010-09-30 Seiko Epson Corp Liquid ejection head, liquid ejection device, and actuator device
KR101318516B1 (en) * 2009-03-31 2013-10-16 고쿠리츠다이가쿠호징 야마나시다이가쿠 Ceramic, piezoelectric device, and production method thereof
US9356224B2 (en) * 2009-10-30 2016-05-31 The Regents Of The University Of California Thin film bismuth iron oxides useful for piezoelectric devices
JP2011207202A (en) 2009-11-02 2011-10-20 Seiko Epson Corp Liquid-ejecting head, liquid-ejecting apparatus, piezoelectric element, and piezoelectric material
JP5888344B2 (en) * 2009-11-02 2016-03-22 セイコーエプソン株式会社 Piezoelectric element driving method and piezoelectric device
JP5621964B2 (en) 2009-11-02 2014-11-12 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic device
JP5577844B2 (en) 2009-11-02 2014-08-27 セイコーエプソン株式会社 Liquid ejector
JP5660288B2 (en) * 2010-01-05 2015-01-28 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and liquid ejecting head manufacturing method
JP5832091B2 (en) 2010-03-02 2015-12-16 キヤノン株式会社 Piezoelectric material, piezoelectric element, liquid discharge head, and ultrasonic motor
JP5599203B2 (en) 2010-03-02 2014-10-01 キヤノン株式会社 Piezoelectric thin film, piezoelectric element, method for manufacturing piezoelectric element, liquid discharge head, and ultrasonic motor
JP5885931B2 (en) * 2010-03-15 2016-03-16 キヤノン株式会社 Bismuth iron oxide powder, method for producing the same, dielectric ceramics, piezoelectric element, liquid discharge head, and ultrasonic motor
JP2011142287A (en) * 2010-05-13 2011-07-21 Seiko Epson Corp Liquid-jet head, liquid-jet device, and piezoelectric element
JP5585197B2 (en) * 2010-05-13 2014-09-10 セイコーエプソン株式会社 Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
JP2012139920A (en) * 2010-12-28 2012-07-26 Seiko Epson Corp Liquid ejection head, liquid ejection apparatus and piezoelectric element
US9022531B2 (en) 2012-02-28 2015-05-05 Canon Kabushiki Kaisha Piezoelectric element, liquid discharge head and liquid discharge apparatus
JP5967988B2 (en) 2012-03-14 2016-08-10 キヤノン株式会社 Piezoelectric material, piezoelectric element, liquid discharge head, ultrasonic motor, and dust removing device
JP2014088030A (en) * 2013-12-19 2014-05-15 Seiko Epson Corp Liquid jet head, liquid jet device, and actuator device

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JPH0817245A (en) * 1994-06-30 1996-01-19 Tdk Corp Ferro-electric thin film and manufacture thereof
JP2004128492A (en) * 2002-09-13 2004-04-22 Matsushita Electric Ind Co Ltd Piezoelectric thin-film element and actuator using it, ink jet head and ink jet recording device
JP4165347B2 (en) * 2003-06-25 2008-10-15 セイコーエプソン株式会社 Method for manufacturing piezoelectric element
JP2005347364A (en) * 2004-06-01 2005-12-15 National Institute Of Advanced Industrial & Technology Extendible and contractible piezoelectric element
JP4600647B2 (en) * 2004-08-30 2010-12-15 セイコーエプソン株式会社 Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic device
JP4753028B2 (en) * 2006-04-12 2011-08-17 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP4753027B2 (en) * 2006-04-12 2011-08-17 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP5041120B2 (en) * 2006-04-12 2012-10-03 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP5041121B2 (en) * 2006-04-12 2012-10-03 セイコーエプソン株式会社 Inkjet recording head and inkjet printer

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