JP2007284262A5 - Ink jet recording head and ink jet printer - Google Patents

Ink jet recording head and ink jet printer Download PDF

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Publication number
JP2007284262A5
JP2007284262A5 JP2006110031A JP2006110031A JP2007284262A5 JP 2007284262 A5 JP2007284262 A5 JP 2007284262A5 JP 2006110031 A JP2006110031 A JP 2006110031A JP 2006110031 A JP2006110031 A JP 2006110031A JP 2007284262 A5 JP2007284262 A5 JP 2007284262A5
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JP
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Prior art keywords
ink jet
recording head
jet recording
piezoelectric
piezoelectric layer
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JP2006110031A
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Japanese (ja)
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JP4753028B2 (en
JP2007284262A (en
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Priority to JP2006110031A priority Critical patent/JP4753028B2/en
Priority claimed from JP2006110031A external-priority patent/JP4753028B2/en
Publication of JP2007284262A publication Critical patent/JP2007284262A/en
Publication of JP2007284262A5 publication Critical patent/JP2007284262A5/en
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Publication of JP4753028B2 publication Critical patent/JP4753028B2/en
Expired - Fee Related legal-status Critical Current
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Claims (9)

下部電極と、
前記下部電極の上方に形成され、下記一般式（１）で表される圧電材料からなる圧電体層と、
前記圧電体層の上方に形成された上部電極と、を有する圧電素子を備えた、インクジェット式記録ヘッド。
（Ｂｉ１−ｘＬａｘ）（Ｆｅ１−ｙ（Ｃｏ２／３Ｎｂ１／３）ｙ）Ｏ３ ・・・（１）
但し、０＜ｘ＜１であり、０＜ｙ＜１である。 A lower portion electrode,
A piezoelectric layer formed above the lower electrode and made of a piezoelectric material represented by the following general formula (1) :
An ink jet recording head comprising a piezoelectric element having an upper electrode formed above the piezoelectric layer .
(Bi 1-x La x) (Fe 1-y (Co 2/3 Nb 1/3) y) O 3 ··· (1)
However, 0 <x <1 and 0 <y <1. 請求項１において、
０＜ｘ≦０．２０であり、０＜ｙ≦０．３０である、インクジェット式記録ヘッド。 In claim 1 ,
An ink jet recording head , wherein 0 <x ≦ 0.20 and 0 <y ≦ 0.30 . 下部電極と、Lower electrode,
前記下部電極の上方に形成され、Ｂｉ、Ｌａ、Ｆｅ、ＣｏおよびＮｂを構成金属として含む圧電体層と、A piezoelectric layer formed above the lower electrode and containing Bi, La, Fe, Co and Nb as constituent metals;
前記圧電体層の上方に形成された上部電極と、を有する圧電素子を備え、A piezoelectric element having an upper electrode formed above the piezoelectric layer.
前記圧電体層のペロブスカイト型構造のＡサイトにおけるＬａの組成ｘが０＜ｘ≦０．２０であり、The composition x of La at the A site of the perovskite structure of the piezoelectric layer is 0 <x ≦ 0.20,
前記圧電体層のペロブスカイト型構造のＢサイトにおけるＣｏおよびＮｂの組成ｙが０＜ｙ≦０．３０である、インクジェット式記録ヘッド。An ink jet recording head, wherein the composition y of Co and Nb at the B site of the perovskite structure of the piezoelectric layer is 0 <y ≦ 0.30. 請求項１乃至３のいずれかにおいて、In any one of claims 1 to 3,
前記圧電体層の膜厚は２００ｎｍ〜１．５μｍである、インクジェット式記録ヘッド。The ink jet recording head, wherein the film thickness of the piezoelectric layer is 200 nm to 1.5 μm. 請求項１乃至４のいずれかにおいて、
前記圧電材料は、擬立方晶の表示で（１００）に配向している、インクジェット式記録ヘッド。 In any one of claims 1 to 4 ,
An ink jet recording head , wherein the piezoelectric material is oriented to (100) in a pseudo cubic display . 請求項１乃至５のいずれかにおいて、
前記圧電材料は、擬立方晶の表示で（１１０）に配向している、インクジェット式記録ヘッド。 In any one of claims 1 to 5 ,
An ink jet recording head , wherein the piezoelectric material is oriented to (110) in a pseudo cubic display . 請求項１乃至６のいずれかにおいて、
前記圧電材料は、ロンボヘドラル構造を有する、インクジェット式記録ヘッド。 In any one of claims 1 to 6 ,
The inkjet recording head , wherein the piezoelectric material has a rhombohedral structure . 請求項１乃至７のいずれかにおいて、
前記圧電材料は、モノクリニック構造を有する、インクジェット式記録ヘッド。 In any one of claims 1 to 7 ,
The inkjet recording head , wherein the piezoelectric material has a monoclinic structure . 請求項１乃至８のいずれかに記載のインクジェット式記録ヘッドを備える、インクジェットプリンタ。An ink jet printer comprising the ink jet recording head according to any one of claims 1 to 8.
JP2006110031A 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer Expired - Fee Related JP4753028B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006110031A JP4753028B2 (en) 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006110031A JP4753028B2 (en) 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer

Publications (3)

Publication Number Publication Date
JP2007284262A JP2007284262A (en) 2007-11-01
JP2007284262A5 true JP2007284262A5 (en) 2009-05-14
JP4753028B2 JP4753028B2 (en) 2011-08-17

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Family Applications (1)

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JP2006110031A Expired - Fee Related JP4753028B2 (en) 2006-04-12 2006-04-12 Inkjet recording head and inkjet printer

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5035504B2 (en) * 2006-04-12 2012-09-26 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP5041120B2 (en) * 2006-04-12 2012-10-03 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
JP5041121B2 (en) * 2006-04-12 2012-10-03 セイコーエプソン株式会社 Inkjet recording head and inkjet printer
US8114307B2 (en) * 2006-09-15 2012-02-14 Canon Kabushiki Kaisha Piezoelectric body and liquid discharge head
JP5267971B2 (en) * 2008-03-21 2013-08-21 国立大学法人金沢大学 Ferroelectric material and piezoelectric material
JP5394765B2 (en) * 2008-03-31 2014-01-22 富士フイルム株式会社 Perovskite oxide film, ferroelectric, piezoelectric element, liquid ejection device
JP5110703B2 (en) * 2008-05-28 2012-12-26 富士フイルム株式会社 Perovskite oxide film, ferroelectric, piezoelectric element, liquid ejection device
JP5313792B2 (en) * 2008-07-17 2013-10-09 富士フイルム株式会社 Perovskite oxide, oxide composition, oxide body, piezoelectric element, and liquid ejection device
KR101318516B1 (en) * 2009-03-31 2013-10-16 고쿠리츠다이가쿠호징 야마나시다이가쿠 Ceramic, piezoelectric device, and production method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001210794A (en) * 2000-01-27 2001-08-03 Seiko Epson Corp Ferroelectric memory material
JP4457587B2 (en) * 2002-09-05 2010-04-28 セイコーエプソン株式会社 Method for manufacturing substrate for electronic device and method for manufacturing electronic device
JP4165347B2 (en) * 2003-06-25 2008-10-15 セイコーエプソン株式会社 Method for manufacturing piezoelectric element
JP2005191154A (en) * 2003-12-25 2005-07-14 Seiko Epson Corp Capacitor and its production process, and semiconductor device
GB0421120D0 (en) * 2004-09-22 2004-10-27 Goodrich Control Sys Ltd Piezoelectric materials

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