JP2003188433A5 - - Google Patents

Claims (13)

A substrate, a first alignment control layer provided on the substrate, a first electrode layer provided on the first alignment control layer, and a second provided on the first electrode layer A piezoelectric element comprising: an orientation control layer; a piezoelectric layer provided on the second orientation control layer; and a second electrode layer provided on the piezoelectric layer. Forming a first alignment control layer on the substrate using a plasma CVD method; forming a first electrode layer on the first alignment control layer using a sputtering method; and Forming a second alignment control layer on the electrode layer by sputtering, forming a piezoelectric layer on the second alignment control layer by sputtering, and on the piezoelectric layer; Forming a second electrode layer using a sputtering method. Forming a first alignment control layer on the substrate; forming a first electrode layer on the first alignment control layer; and forming a second alignment control layer on the first electrode layer. Forming, a step of forming a piezoelectric layer on the second orientation control layer, a step of forming a second electrode layer on the piezoelectric layer, and a vibration layer on the second electrode layer A method of manufacturing an ink jet head, comprising: a step of forming a pressure chamber; a step of bonding a pressure chamber for discharging ink onto the vibration layer; and a step of removing the substrate and the first orientation control layer. Forming a vibration layer on one surface of the substrate; forming a first alignment control layer on the vibration layer; forming a first electrode layer on the first alignment control layer; Forming a second orientation control layer on the first electrode layer; forming a piezoelectric layer on the second orientation control layer; and forming a second electrode layer on the piezoelectric layer. And a step of etching the substrate to form a pressure chamber. The first electrode layer, the second alignment control layer, the piezoelectric layer, and the second electrode layer are formed using a sputtering method, and the first alignment control layer is formed using a plasma CVD method. The manufacturing method of the inkjet head of Claim 3 or 4 to form. A pressure chamber substrate in which a pressure chamber for ejecting ink is formed on one surface; a vibration layer provided on the other surface of the pressure chamber substrate; and a first orientation provided on the vibration layer A control layer, a first electrode layer provided on the first alignment control layer, a second alignment control layer provided on the first electrode layer, and the second alignment control layer An inkjet head comprising: a piezoelectric layer provided on the piezoelectric layer; and a second electrode layer provided on the piezoelectric layer. An ink jet head according to claim 6, the ink jet recording apparatus that have a moving means for changing the relative position between the inkjet head and the recording medium. 2. The first orientation control layer is at least one selected from the group consisting of magnesium oxide, nickel oxide, cobalt oxide, iron oxide, and titanium oxide preferentially oriented to (100) having a NaCl-type crystal structure. Piezoelectric element. The first orientation control layer is at least one selected from the group consisting of magnesium oxide, nickel oxide, cobalt oxide, iron oxide, and titanium oxide preferentially oriented to (100) having a NaCl-type crystal structure. Inkjet head. The second orientation control layer is selected from the group consisting of magnesium, calcium, strontium, barium, lanthanum, niobium, manganese, zinc, and aluminum in lead titanate preferentially oriented to (001) or (100) in the perovskite crystal structure 2. The piezoelectric element according to claim 1, wherein one or more of these are added in excess of 0 and 25 mol% or less, and the amount of lead is more than 5 and 30 mol% or less in excess of the stoichiometric composition. The second orientation control layer is selected from the group consisting of magnesium, calcium, strontium, barium, lanthanum, niobium, manganese, zinc, and aluminum in lead titanate preferentially oriented to (001) or (100) in the perovskite crystal structure 7. The ink jet head according to claim 6, wherein one or more of these are added in excess of 0 and 25 mol% or less, and the amount of lead is more than 5 and 30 mol% or less in excess of the stoichiometric composition. . 2. The piezoelectric element according to claim 1, wherein the piezoelectric layer is lead zirconate titanate having a perovskite crystal structure preferentially oriented to (001) or (100). Perovals in which the piezoelectric layer is preferentially oriented to (001) or (100) The ink jet head according to claim 6, wherein the ink is a lead zirconate titanate having a skite type crystal structure.