JP2007276028A - Glove roller for wire saw - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glove roller for a wire saw, wherein only a connecting end material is discarded, a metallic support coated with a lining material is reused, and the occurrence of cracks due to welding in a connecting part between the metallic support and the connecting end material is eliminated. <P>SOLUTION: The connecting end materials 52, 53 are connected to both end parts of the metallic support 50 using bolts 54, so that the glove rollers 12A to 12C for a wire saw are divided into three parts, i.e. the metallic support 50 and a pair of connecting end materials 52, 53. As a result, only the connecting end materials 52, 53 are discarded, and the metallic support 50 can be continuously used. The metallic support and the connecting end material are not welded as before, so that cracks due to welding are also eliminated. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw groove roller, and more particularly to a wire saw groove roller which can be divided into a base metal and a pair of connecting end members connected to both ends of the base metal by bolts.

  In the wire saw, an ingot cutting wire led out from a wire feeding reel (or bobbin) of a feeding device is wound around a plurality of wire saw groove rollers in a coil shape, and then the wire winding of the winding device is performed. The device configuration is such that it is wound on a take-up reel (or bobbin). Each wire saw groove roller is supported between tapered protrusions formed in a gradually tapered manner at the protruding ends of a pair of opposed spindles.

The basic structure of a conventional wire saw groove roller is as follows (for example, Patent Document 1). That is, the outer peripheral surface of the cylindrical base metal is coated with a lining material (urethane rubber) having a predetermined thickness, and a large number of wire grooves are formed on the outer peripheral surface of the lining material. In addition, a pair of connection end members having a thick disk shape are welded to both ends of the base metal. A tapered concave portion that can be fitted to the tapered convex portion is formed at an end (end surface) opposite to the welded side of the connecting end material.
When a single crystal silicon ingot is cut by a wire saw, a slurry-like abrasive liquid containing loose abrasive grains is supplied to the wrapping oil, and the ingot is relatively pressed against the wire row being reciprocated between the groove rollers for each wire saw. . Thereby, an ingot is cut | disconnected to many wafers with the grinding effect | action of an abrasive grain.
JP-A-11-245156

However, the wire saw groove roller of Patent Document 1 has the following problems.
(1) Since the base metal and the connecting end material are welded, the base material covered with the lining material can be used, but the end member is used by grinding it several times due to wear of the taper surface. Some parts were worn out and could not be used. Therefore, it is necessary to discard the entire wire saw groove roller.
(2) Further, since the welding method is employed for the connection between the base metal and the connecting end material in this way, cracks occurred in the welded part due to the action of the welding heat.
(3) Further, when wear occurs in the tapered recess due to use, repair is performed by grinding the tapered surface, but the conventional number of times of grinding has been limited to 3 or 4 times. Therefore, the lifetime of the wire saw groove roller has been shortened. This is because the quenching treatment of the connecting end material was performed by a carburizing quenching method (thickness of about 0.3 mm) after welding with the base metal and the quenching becomes shallow. Carburizing and quenching refers to steel materials such as various carburizing agents (solid carburizing agents such as charcoal and coke, liquid carburizing agents such as potassium cyanide and sodium cyanide, coal gas containing carbon monoxide and hydrocarbons, etc. It is a quenching method in which it is put in a gas carburizing agent and heated for 8 to 10 hours at 850 to 900 ° C. After heating, it is quenched with a refrigerant such as water.

Therefore, the present invention uses the base metal coated with the lining material semi-permanently, can discard only the connection end material, and cracks caused by welding at the connection portion of the base metal and the connection end material An object of the present invention is to provide a wire saw groove roller capable of eliminating the occurrence of the above.
Another object of the present invention is to provide a wire saw groove roller capable of increasing the number of times of grinding of the tapered recess and extending the life of the entire wire saw groove roller.

  According to the first aspect of the present invention, a plurality of wires are supported between a pair of taper convex portions that are gradually tapered at the protruding ends of a pair of opposed spindles, and the wires are laid on the outer peripheral surface. In a grooved roller for a wire saw in which a groove is formed, a cylindrical base metal, an outer peripheral surface of the base metal, a lining material having each of the wire grooves, and one end abutted against both ends of the base metal For a wire saw comprising a pair of connecting end members each connected by a bolt and having a tapered recess that can be fitted to the tapered protrusion at an end opposite to the side connected by the bolt Groove roller.

According to the first aspect of the present invention, since the connecting end members are connected to the both ends of the base metal by the bolts, the wire saw groove roller is divided into the base metal and the pair of connecting end members. can do. As a result, when wear of the tapered portion occurs, only the connecting end material is discarded, and the base metal covered with the lining material can be reused.
Moreover, in the past, the base metal and both connecting end materials were welded, but in this invention, since the connection by bolts was adopted instead of welding, the occurrence of cracks in the base metal and the connecting end material due to welding was eliminated. be able to.

The kind of wire saw in which the wire saw groove roller of the present invention is used is arbitrary. For example, you may cut | disconnect by moving an ingot to a wire direction and pressing and contacting this to a wire row | line | column. On the contrary, the wire row may be moved to press and contact the ingot and cut. Further, the lower surface of the ingot may be in contact with the upper part of the wire row. Further, the upper surface of the ingot may be pressed against the lower part of the wire row.
The material of the ingot is arbitrary, and for example, a silicon single crystal, a compound semiconductor single crystal, a magnetic material, quartz, ceramics, or the like can be employed.
The number of wire saw groove rollers used may be two, for example, or three or more.

A taper convex portion is formed at the protruding end of the spindle. The tapered convex portion has a truncated cone shape that is gradually tapered. As a material for the tapered convex portion, for example, carbon steel for mechanical structure or alloy steel can be employed. The tapered convex portion may be provided so as not to be separable from the spindle, or may be provided so as to be separable.
As the material of the connecting end material, for example, carbon steel or alloy steel for machine structure can be employed.
The connecting end member is formed with a truncated cone-shaped tapered concave portion into which the tapered convex portion can be fitted. The inclination angle is arbitrarily changed according to the inclination angle of the outer peripheral surface of the taper convex portion.
As the lining material, for example, a synthetic resin such as urethane (polyurethane) or nylon can be employed.
The lining material is formed in an inseparable state on the outer peripheral surface of the base metal.

  The invention according to claim 2 is the wire roller for a wire saw according to claim 1, wherein the connecting end material is a member that has been subjected to vacuum quenching.

According to the second aspect of the present invention, since the vacuum quenching method is adopted as the quenching method of the connecting end material, compared with the conventional carburizing quenching method, the portion that has been stably strengthened is strengthened. The thickness can be increased (about 5 mm). As a result, the number of times of grinding (the number of repairs) of the tapered recess can be increased, and the life of the wire saw groove roller can be extended.
The connecting end material is quenched in a vacuum state. The vacuum quenching is performed, for example, by heating at 825 to 850 ° C. for 90 minutes or more at 1 × 10 ⁻³ to 1 × 10 ⁻⁷ Torr. After heating, it is quenched with a coolant such as water.

  According to the first aspect of the present invention, since the connecting end members are respectively connected to both ends of the base metal using bolts, the wire saw groove roller is connected to the base metal and the pair of connecting end materials. Can be divided into three parts. As a result, when wear of the tapered portion occurs, only the connecting end material is discarded, and the base metal covered with the lining material can be reused. Moreover, since the base metal and the connecting end material are not welded as in the prior art, cracks due to welding heat do not occur in the welded portion.

  In particular, according to the second aspect of the present invention, since the vacuum quenching method is adopted as the method for quenching the connection end material, the strength of the connection end material is increased compared to the conventional carburizing quenching method. Can be increased in thickness. As a result, the number of times of grinding the tapered recess can be increased, and the life of the wire saw groove roller can be extended.

  Examples of the present invention will be specifically described below.

  In FIG. 1, reference numeral 10 denotes a wire saw incorporating a wire saw groove roller according to the first embodiment of the present invention. This wire saw 10 is a single crystal silicon ingot I pulled up by a CZ method to a number of wafers. A device for cutting. The wire saw 10 has three wire saw groove rollers (hereinafter referred to as groove rollers) 12A to 12C arranged in an inverted triangle shape when viewed from the front. Between these groove rollers 12A to 12C, one wire W is wound at a constant pitch so as to be parallel to each other. Thereby, the wire row 11 appears between the groove rollers 12A to 12C.

The wire row 11 is reciprocated by the main motor M between the three groove rollers 12A to 12C. The middle of the two groove rollers 12A and 12B arranged on the upper side is the cutting position a of the ingot I. Above the both side portions of the cutting position a, for example, a pair of abrasive liquid supply units (not shown) for continuously supplying the abrasive liquid onto the wire row 11 are provided.
The wire W is led out from the bobbin 30 of the feeding device 23 and is laid over the groove rollers 12A to 12C via a supply-side guide roller (not shown), and then the lead-out guide roller (not shown). ) To the bobbin 31 of the winding device 25.

The rotation shafts of the feeding device 23 and the winding device 25 are connected to the output shafts of the drive motors 16 and 17, respectively. When the drive motors 16 and 17 are periodically driven, the bobbins 30 and 31 pivotally supported by the pair of bearings 18 rotate in the clockwise direction or the counterclockwise direction in FIG. 1 about the respective axis lines. The wire W travels back and forth.
In FIG. 1, reference numeral 19 denotes a lifting platform for the ingot I, and 19 a a carbon bed for fixing the ingot I to the lifting platform 19.

Next, the groove rollers 12A to 12C according to the first embodiment of the present invention will be described in detail with reference to FIGS. Since the three groove rollers 12A to 12C have the same structure, a groove roller (driving side roller roller) 12C disposed below is taken as an example here.
As shown in FIG. 2, the groove roller 12 </ b> C is pivotally supported between a pair of bearings (bearing units) 40 and 41 arranged at a predetermined interval. Each bearing 40, 41 has a cylindrical casing 42 fixed to an external member via a connecting plate. Inside the cylindrical casing 42, spindles 45 and 46 made of carbon steel and alloy steel for machine structure (Rockwell C hardness 30 to 72 HRC) are rotated around the axis via two (set) bearings 44. It is installed freely. At the projecting ends of both spindles 45 and 46, taper convex portions 45a and 46a made of the same material as the spindles 45 and 46 and gradually tapered are formed.

The groove roller 12C has a thick cylindrical base metal 50 made of carbon steel and alloy steel for machine structure. The outer peripheral surface of the base metal 50 is covered with a urethane rubber lining material 51 having a thickness of 5 to 20 mm. In addition, a large number of wire grooves 51 a that are parallel grooves with a short pitch are formed on the outer peripheral surface of the lining material 51.
At both ends of the base metal 50, connection end materials 52 and 53 made of carbon steel and alloy steel for machine structure (Rockwell C hardness 30 to 70 HRC) are connected to the corresponding connection end materials in a state where one end is abutted with each other. 6 bolts arranged at intervals of 60 ° in the circumferential direction centering on the axes of 52 and 53 are connected (fastened) by a total of 12 bolts 54. That is, six screw holes 50a... Are arranged on both end faces of the base metal 50 at a 60 ° pitch with the axis of the base metal 50 as the center. On the other hand, six screw holes 52a... 53a... Corresponding to the screw holes 50a. The bolts 54 are respectively screwed into the six pairs of screw holes 50a, 52a. Both connection end materials 52 and 53 are members that are vacuum-quenched under conditions of 1 × 10 ⁻³ to 1 × 10 ⁻⁷ Torr at 825 to 850 ° C. and heating time of 90 to minutes.

In addition, tapered end portions 52b and 53b that can be fitted to the tapered projecting portions 45a and 46a are formed on both ends of the connecting end members 52 and 53 at the end (end face) opposite to the side connected by the bolts 54. ing. However, here, the tapered recesses 52b and 53b penetrate to the end (end surface) of the connecting end members 52 and 53 connected by the bolts 54. The tapered convex portions 45a and 46a of the spindles 45 and 46 are fitted into the tapered concave portions 52b and 53b of the corresponding connecting end members 52 and 53, respectively. As a result, the left and right spindles 45, 46 and the central groove roller 12C can rotate together.
In FIG. 2, 60 is inserted into both spindles 45 and 46 and the base metal 50 in a lump, and a fastening bolt for tightening them together to enhance the coupling state. B is hung on the base of one of the spindles 45 and is connected to the main motor. This is an endless belt that transmits the rotational force from M to the groove roller 12C.

Next, a method for cutting the ingot I using the wire saw 10 according to the first embodiment will be described.
As shown in FIG. 1, the wire saw 10 rotates the groove roller 12C by the main motor M and the endless belt B while supplying the abrasive liquid from the abrasive liquid supply unit, and the bobbin 30 of the feeding device 23 is driven by the drive motor 16. While rotating, the wire W is supplied to the groove rollers 12A to 12C via the supply side guide rollers, while the bobbin 31 of the take-up reel 25 is rotated by the drive motor 17 so that the groove rollers 12A to 12C and the guide roller on the lead side are rotated. Then, the wire W is wound up. Then, by appropriately changing the rotation direction of the main motor M, the wire W travels back and forth.

As described above, when the drive side groove roller 12C is rotated by the main motor M and the wire row 11 is reciprocated, the other two driven side groove rollers 12A and 12B rotate between the bearings 40 and 41. Both guide rollers also rotate.
During reciprocating travel of the wire row 11, the ingot I is pressed against the wire row 11 from above. Thereby, the ingot I is cut into several wafers. That is, when the wire row 11 reciprocates, loose abrasive grains in the abrasive liquid are rubbed against the bottom of the cutting groove by the wire W of the wire row 11. As a result, the bottom of each cutting groove is gradually scraped and finally cut into a large number of thin wafers.

As described above, in the first embodiment, as the three groove rollers 12A to 12C, those in which the connecting end members 52 and 53 are respectively connected to both ends of the base metal 50 by the bolts 54. Therefore, the wire saw groove rollers 12 </ b> A to 12 </ b> C can be divided into the base metal 50 and the pair of connecting end members 52 and 53, respectively. As a result, when the connection end material is worn, only the connection end materials 52 and 53 are discarded, and the base metal 50 covered with the lining material 51 can be reused.
Moreover, in the past, welding was used as a method of connecting the base metal and both connecting end members. However, since connection using bolts 54 is used here, the base metal 50 and the connecting end members 52 and 53 are connected. Thus, the generation of cracks due to welding heat can be eliminated.

  Further, since the vacuum quenching method is adopted as the quenching method of the connecting end materials 52 and 53, the thickness of the portion of the connecting single plates 52 and 53 with increased strength is compared with the conventional carburizing quenching method. Increase (about 5mm). As a result, the number of times of grinding (the number of repairs) of the tapered recesses 52b and 53b can be increased, and the life of the groove rollers 12A to 12C can be extended.

It is a perspective view which shows the use condition of the wire saw in which the groove roller for wire saws concerning Example 1 of this invention was integrated. It is a front view including the expanded partial sectional view of the use condition of the grooved roller for wire saws concerning Example 1 of this invention. It is an expanded sectional view of the groove roller for wire saws concerning Example 1 of this invention. It is an enlarged side view of the grooved roller for wire saws concerning Example 1 of this invention.

Explanation of symbols

10 Groove roller for wire saw,
45,46 spindle,
45a, 46a taper convex part,
50 deposits,
51 lining materials,
51a wire groove,
52b, 53b taper recess,
52, 53 connecting end material,
54 volts,
W wire.

Claims (2)

A groove roller for a wire saw that is supported between a pair of tapered protrusions formed in a taper state on the protruding ends of a pair of opposed spindles and that has a plurality of wire grooves on which the wire is laid on the outer peripheral surface. In
A cylindrical base metal,
A lining material coated on the outer peripheral surface of the base metal and having the wire grooves;
Tapered recesses that can be fitted to the taper protrusions are formed at the ends opposite to the ends that are connected to each other by bolts, with one end abutted against both ends of the base metal 1 A grooved roller for a wire saw provided with a pair of connecting end members.   The wire roller groove roller according to claim 1, wherein the connecting end member is made of a metal member that has been subjected to vacuum quenching.

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