JPH0899262A - Wire saw device - Google Patents

Abstract

PURPOSE: To sufficiently feed slurry containing abrasive grains between a wire and a workpiece without causing any reduction in machining precision so as to improve cutting efficiency of the workpiece. CONSTITUTION: At least one auxiliary roller 7 is brought into contact with a wire 3 between groove rollers 1, 2 from the front side of the traveling direction of the wire 3. Multiple guide grooves 10 are formed on the outer circumference of the auxiliary roller 7, and traveling of the wire 3 is guided by means of the guide grooves 10. A recessed part, 11 is formed on the outer circumference of the auxiliary roller 7, and vertical motion is applied to the wire 3 by means of the recessed part. 11, so that slurry containing abrasive grains can be easily penetrate between the wire 3 and a workpiece 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a semiconductor material,
The present invention relates to a wire saw device for cutting brittle materials such as magnetic materials and ceramics with a wire.

[0002]

2. Description of the Related Art In a wire saw device, a wire is spirally wound at a predetermined pitch between a plurality of groove rollers each having a large number of grooves, the wire travels as the groove roller rotates, and abrasive grains are laid on the wire. Slurry containing is supplied. Then, in this state, the wire and the work are pressed against each other to cut the work.

By the way, in this type of wire saw device,
The more slurry is supplied between the wire and the work,
The work cutting ability is improved. For this reason, for example, Japanese Patent Application Laid-Open Nos. 51-123987 and 4-101761.
A wire saw device as shown in Japanese Patent Publication has been proposed in the past.

In the former configuration, a vibrator supporting the work is provided with a vibrator, and the vibrator imparts vibration to the work, and the vibration is used to introduce the amount of slurry introduced between the wire and the work. Are configured to increase. In the latter configuration, a pair of keyboards are installed in the vicinity of the wire between the groove rollers, and the keyboard strikes and vibrates the wire, and the amount of slurry introduced between the wire and the work as described above. Are configured to increase.

[0005]

However, in these conventional configurations, the wire is vibrated in any of the up, down, left and right directions. Therefore, in these conventional configurations, there is a problem in that the work accuracy cannot be accurately cut due to lateral deflection of the wire and the work cannot be cut into a predetermined thickness.

The present invention has been made by paying attention to the problems existing in such conventional techniques. An object of the invention is to provide a wire saw device capable of sufficiently supplying a slurry between a wire and a work without lowering processing accuracy and improving the cutting efficiency of the work. It is in.

[0007]

In order to achieve the above object, in the invention of the wire saw device according to the first aspect, the wire between the groove rollers is at least upstream in the traveling direction of the wire with the work as a boundary. The auxiliary roller which is located on the side is brought into contact with the auxiliary roller, and an uneven portion is formed on the outer periphery of the auxiliary roller for moving the wire in the contacting and separating directions with respect to the work.

According to a second aspect of the present invention, in the first aspect of the invention, the auxiliary roller is provided with a large number of guide grooves on the outer periphery thereof for guiding the running of the wire.
According to a third aspect of the present invention, in the first or second aspect of the invention, the auxiliary rollers are a pair of rollers arranged on both sides of the work in the wire traveling direction.

According to a fourth aspect of the invention, in the invention according to any one of the first to third aspects, the concave portion is formed by a spiral groove. According to the invention of claim 5, claim 1
In the invention described in any one of (1) to (4), the auxiliary roller is arranged on the opposite side of the work through the wire, and the outer peripheral surface of the convex portion is located on the work side of the guide groove lower surface of the groove roller. .

According to a sixth aspect of the present invention, in the invention according to any one of the first to fourth aspects, the auxiliary roller is arranged closer to the work than the wire, and the outer peripheral surface of the convex portion is lower than the lower surface of the guide groove of the groove roller. It is located on the side away from the work.

In the invention described in claim 7, claims 1 to 6 are provided.
In the invention described in any one of 1, the auxiliary roller can freely rotate. In the invention described in claim 8,
In the invention described in any one of 6 above, a transmission means for transmitting the rotation of the groove roller to the auxiliary roller is interposed between the groove roller and the auxiliary roller.

In the invention described in claim 9, claims 2 to 8 are provided.
In any one of the inventions described above, a transmission means for transmitting the rotation of one auxiliary roller to the other auxiliary roller is interposed between the pair of auxiliary rollers.

According to the tenth aspect of the present invention,
In the invention described in any one of 9), the auxiliary roller is a polygonal roller, an eccentric roller or a twist roller.

[0014]

In the wire saw device according to the first, fifth and sixth aspects, while the wire travels in one direction between the groove rollers, the slurry containing abrasive grains is supplied onto the wire. Then, in this state, the work is pressed against the wire, and the work is cut into a predetermined thickness.

At the time of cutting the work, the auxiliary roller comes into contact with the wire and is rotated in association with the traveling of the wire. Then, with the rotation of the auxiliary roller, the movement of the wire in the contacting or separating direction with respect to the work is imparted to the wire by the uneven portion on the outer circumference. Therefore, the slurry containing abrasive grains is sufficiently supplied between the wire and the work, and the work can be efficiently cut.

Further, in the invention of claim 2, since the traveling of the wire is guided by the guide groove provided in the auxiliary roller, the wire is displaced in the direction orthogonal to the traveling direction while the wire is vertically moved. There is no such thing. Therefore, there is no possibility that the wire is biased in the direction orthogonal to the traveling direction and the machining accuracy is deteriorated.

Further, in the wire saw device according to the third aspect, a pair of auxiliary rollers are in contact with the wire on both sides of the work. Therefore, when the work is cut, the up-and-down movement is effectively given to the wire by the cooperative action of both auxiliary rollers. Therefore, the slurry containing abrasive grains is effectively supplied between the wire and the work, so that the cutting efficiency of the work can be further improved.

In addition, in the invention described in claim 4, the concave portion on the outer periphery of the auxiliary roller is formed by a spiral groove.
Therefore, when the auxiliary roller is rotated when cutting the work, the spiral groove sequentially moves the wire up and down. Therefore, the possibility of slippage of the auxiliary roller is reduced, and the wear of the auxiliary roller is reduced.

In the wire saw device according to the seventh aspect, since the auxiliary roller can freely rotate, the auxiliary roller is rotated by the groove roller via the wire, and the drive device for the auxiliary roller is not required.

In the invention of claim 8, the rotation of the groove roller is transmitted to the auxiliary roller by the transmission means, and the rotation of the auxiliary roller coincides with the rotation of the groove roller. In the wire saw device according to the ninth aspect, even if the concave portion of the auxiliary roller faces the wire, the auxiliary roller is rotated by the other auxiliary roller.

According to the tenth aspect of the invention, the auxiliary roller constituted by a polygonal roller, an eccentric roller or a twisting roller imparts a motion to or against the work with respect to the wire, thereby cutting the work. Is increased.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a wire saw device embodying the present invention will be described in detail below with reference to FIGS.

As shown in FIGS. 1 and 2, the frame 15 of the wire saw device has a pair of side plates 16. The pair of groove rollers 1 and 2 are rotatably supported between the both side plates 16 so as to be parallel to each other at a predetermined interval.
A motor 17 is connected to. A large number of grooves 1a, 2a are formed on the outer circumference of both groove rollers 1, 2 at a predetermined pitch. A cutting wire 3 made of a steel wire is continuously wound around the grooves 1a and 2a of the groove rollers 1 and 2 in a spiral shape. Then, one groove roller 1 is rotated by the drive of the motor 17, and this rotation is performed via the wire 3 on the other groove roller 2
Be transmitted to.

Therefore, the wire 3 runs stepwise in one direction while reciprocating between the groove rollers 1 and 2. The wire 3 is supplied onto the groove rollers 1 and 2 from a supply reel (not shown) and is wound up on a winding reel (not shown). The wire 3 travels stepwise in one direction as a whole while reciprocating with a constant stroke.

A pair of slurry supply pipes 4 are disposed above the groove rollers 1 and 2, and a slurry containing abrasive grains is applied to the wire 3 between the lower portions of the slurry supply pipe 4 and the groove rollers 1 and 2. Supplied. The saddle 5 is arranged above the groove rollers 1 and 2 so as to be vertically movable, and a work 6 is adhered and fixed to the lower surface thereof. Then, as the saddle 5 descends, the work 6 is pressed against the wires 3 of the groove rollers 1 and 2, and the work 6 is cut into a wafer by the lapping action.

As shown in FIGS. 3 and 4, a pair of support grooves 18 and 19 opened upward are formed at the upper ends of both side plates 16 between the groove rollers 1 and 2, and these support grooves 18 and 19 are formed.
Bushings 20 and 21 are detachably fitted to 19
It is fixed by a plurality of bolts 22. Bush 2
The bolt insertion holes 0 and 21 are formed in a long hole shape so that the auxiliary roller 7 can be adjusted in the vertical direction. The pair of auxiliary rollers 7 are located on the support shafts 23 and 24 so as to be opposed to the front and rear sides of the work 6 with the work 6 as a boundary in the traveling direction of the wire 3.
It is supported by 1 so as to be freely rotatable. Air supply passage 34
Is provided in both side plates 16 and bushes 20 and 21, and blows air to the support shaft 24 to prevent mixing of slurry into the bearing portion. These auxiliary rollers 7 are composed of a round bar-shaped core material 8 made of a metal material and a synthetic resin coating layer 9 formed on the outer peripheral surface of the core material 8 so as to cover it.

As is clear from FIG. 3, the width R1 of the support groove 18 on one side is wider than the diameter R2 of the auxiliary roller 7. The lid 20a is detachably fixed to the bushes 20 and 21 in order to pull out the auxiliary roller 7.

A large number of guide grooves 10 are formed on the outer periphery of the coating layer 9 of each auxiliary roller 7 at the same pitch as the grooves 1a and 2a of the groove rollers 1 and 2, and the wire 3 is formed between the groove rollers 1 and 2.
To guide the running of. The auxiliary roller 7 is arranged on the opposite side of the work 6 via the wire 3, and the outer peripheral surface of the convex portion is located closer to the work 6 than the lower surface of the guide groove 10 of the groove rollers 1 and 2. The spiral groove 11 as a recess is formed on the outer periphery of the coating layer 9 of each auxiliary roller 7, and allows the wire 3 to move downward between the groove rollers 1 and 2.

Next, the operation of the wire saw device configured as described above will be described. When cutting the work 6 in this wire saw device, the groove rollers 1,
The wire 3 travels in one direction while traveling back and forth between the two, and slurry containing abrasive grains is supplied onto the wire 3 from the slurry supply pipe 4. In this state, the work 6 is pressed against the wire 3 and the work 6 is cut into a predetermined thickness by the lapping action.

At this time, the pair of auxiliary rollers 7 are in contact with the wire 3 between the groove rollers 1 and 2, and are driven to rotate as the wire 3 travels. Thereby, each auxiliary roller 7
The spiral groove 11 on the outer periphery of the wire sequentially faces the wire 3, and the wire 3 is continuously subjected to vertical movement. That is, the wire 3 moves downward so as to separate from the work 6 when facing the spiral groove 11. For this reason, a gap is intermittently formed between the wire 3 and the work 6 as the auxiliary roller 7 rotates, and a slurry containing abrasive grains is sufficiently supplied between them to efficiently cut the work 6. be able to.

If the spiral groove 11 of one auxiliary roller 7 faces the wire 3 and the spiral groove 11 of the other auxiliary roller 7 does not face the wire 3, the wire 3
Becomes diagonal. Therefore, as shown by the solid line and the chain double-dashed line in FIGS. 5 and 6, the wire 3 is vertically moved in the horizontal state, and is also urged in the swinging state of falling forward or backward. Therefore, the contact angle of the wire 3 to the work 6 changes, and the work 6 can be cut more efficiently.

Moreover, the groove 11 formed in the auxiliary roller 7
Has a spiral shape. Therefore, one of the wires 3 is always in contact with the outer peripheral surface of the auxiliary roller 7. Therefore, the rotating force is always applied to the auxiliary roller 7 by the wire 3. Therefore, the auxiliary roller 7 reliably follows the traveling of the wire 3, and no slippage occurs between the auxiliary roller 7 and the wire 3. Therefore, the auxiliary roller 7 is prevented from being worn by the wire 3. In addition, since a special drive source for rotating the auxiliary roller 7 is unnecessary,
The structure can be simplified.

The wire 3 is restricted in lateral movement by the guide groove 10 of the auxiliary roller 7 and moves only in the vertical direction. Therefore, the wire 3 is not displaced in the direction orthogonal to the traveling direction while traveling while being vertically moved. For this reason, there is no risk of lowering the processing accuracy.

Further, in this embodiment, as shown in FIG. 3, the groove width R1 of the rear support groove 18 is set to be larger than the outer shape R2 of the auxiliary roller 7. Therefore, when the coating layer 9 of the auxiliary roller 7 is worn, the bolt 22 is loosened to remove the rear bush 20 upward from the support groove 18, and the front support shaft 24 of the auxiliary roller 7 is pulled out from the front bush 21. Thus, the auxiliary roller 7 can be easily removed from between the side plates 16. Further, the new auxiliary roller 7 can be easily attached between the side plates 16 by performing the work in the reverse order of the removal.

[0035]

Another Embodiment Next, another embodiment of the present invention will be described with reference to FIGS.
It will be described with reference to FIG. First, in the second embodiment shown in FIGS. 7 to 9, the drive pulley 26 is one groove roller 1
The driven pulley 27 is attached to the support shaft 23 of each auxiliary roller 7 so as to correspond to the drive pulley 26.
Is attached. The belt 28 is wound around the drive pulley 26 and the driven pulleys 27, and is held in a predetermined tension state by the tension pulley 29 on the side plate 16.
These pulleys 26, 27, belt 28 and the like constitute a transmission means. When the groove roller 1 is rotated by the motor 17 and the wire 3 travels in one direction between the groove rollers 1 and 2, both auxiliary rollers 7 rotate via the pulleys 26 and 27 and the belt 28. To be done.

Therefore, in this second embodiment, when the work 6 is cut as the wire 3 travels, the pair of auxiliary rollers 7 interlock with the groove rollers 1 and 2 so that the peripheral speeds become the same. Is rotated. As a result, slippage between the wire 3 and the auxiliary roller 7 can be reliably prevented.

Next, in the third embodiment shown in FIG. 10, a pair of auxiliary rollers 7 are arranged on the upper surface of the wire 3 so as to be positioned on the work 6 side of the wire 6 on both front and rear sides of the work 6. ing. Each of the auxiliary rollers 7 is formed to have a substantially hexagonal end surface, and a plurality of flat recesses 30 are formed on the outer circumference of the auxiliary rollers 7 along the axial direction. Therefore, the corner portion of the outer peripheral surface of the auxiliary roller 7 forms a convex portion. Although not shown, the guide groove on the outer peripheral surface of the auxiliary roller 7 is formed only at a corner. Also in this embodiment, similarly to the embodiment shown in FIGS. 7 to 9, transmission means such as a belt is provided between the auxiliary rollers 7 and the groove rollers 1, 2. In the third embodiment, when the work 6 is cut, the plurality of convex portions and the concave portions 30 alternately contact the wire 3 as the auxiliary roller 7 rotates, and the wire 3 is vertically moved in small steps.

Further, in the fourth embodiment shown in FIG. 11, one groove-shaped recess 31 is formed on the outer periphery of the auxiliary roller 7 along the axial direction. In addition, the fifth shown in FIG.
In the embodiment, one flat recess 32 is formed on the outer circumference of the auxiliary roller 7 along the axial direction. Further, in the sixth embodiment shown in FIG. 13, a plurality of groove-shaped recesses 33 are formed on the outer periphery of the auxiliary roller 7 along the axial direction at positions displaced by a predetermined angle.

In addition, in the seventh embodiment shown in FIG. 14, the auxiliary roller 7 is composed of an eccentric roller whose support shaft 24 is off the axis. In the eighth embodiment shown in FIG. 15,
The auxiliary roller 7 is composed of a twisting roller whose outer peripheral surface is twisted in a spiral shape.

In the present invention, the configuration may be changed and embodied as follows, for example. (A) A pair of auxiliary rollers 7 are arranged so that their positions can be adjusted along the traveling direction of the wire 3, and the arrangement interval of both auxiliary rollers 7 can be set and changed according to the size of the work 6. It can also be adjusted in the vertical direction, and can be adjusted according to the wear of the auxiliary roller 7. (B) Between the pair of auxiliary rollers 7, a transmission means, which is composed of a pulley, a belt or the like, and which does not transmit the rotation of the groove roller 1, is provided so that both auxiliary rollers 7 rotate synchronously. According to this structure, one auxiliary roller 7
When is rotated, the other auxiliary roller 7 is also reliably rotated, and slippage between the wire and the auxiliary roller can be prevented. (C) The auxiliary roller 7 should be provided only on the upstream side of the work 6 in the wire traveling direction. (D) without providing uneven portions on the outer circumference of the auxiliary roller 7,
Instead, the auxiliary roller 7 should be configured to rotate eccentrically. With this configuration, the result is the same as providing the uneven portion on the outer peripheral surface of the auxiliary roller 7. (E) Supply oil to the air supply passage 34 and perform oil sealing. (F) The guide groove 10 should not be provided on the outer peripheral surface of the auxiliary roller 7.

By the way, technical ideas other than the claims understood from the above-mentioned embodiments and other examples will be described below together with their effects. (1) The wire saw device according to claim 3, wherein the pair of auxiliary rollers are arranged so that their positions can be adjusted along the traveling direction of the wire. With this configuration, the arrangement interval of both auxiliary rollers can be changed according to the size of the work. (2) The wire saw device according to claim 1, wherein the auxiliary roller is provided only on the upstream side of the work in the wire traveling direction. According to this configuration, it is suitable when the wire continuously travels in one direction, and the configuration is simplified.

[0042]

Since the present invention is constructed as described above, it has the following effects.

According to the invention described in claims 1, 5 and 6, it is possible to sufficiently supply the slurry containing abrasive grains between the wire and the work without deteriorating the working accuracy, and The cutting efficiency of can be improved.

According to the second aspect of the present invention, the wire can be reliably guided, and it is possible to prevent the wire from being biased in the direction orthogonal to the traveling direction and causing a reduction in processing accuracy.

According to the third aspect of the invention, the wire between the groove rollers can be effectively moved up and down by the cooperative action of the pair of auxiliary rollers, and the cutting efficiency of the work can be further improved. You can

According to the fourth aspect of the present invention, the wire can be successively moved up and down in accordance with the rotation of the auxiliary roller, so that the possibility of lowering the processing accuracy can be more reliably prevented. it can.

According to the invention described in claim 7, the driving device for the auxiliary roller is not required and the structure is simplified. According to the invention of claim 8, the rotation speeds of the auxiliary roller and the groove roller are surely matched with each other, and slippage between the wire and the auxiliary roller can be surely prevented.

According to the ninth aspect of the invention, even if the concave portion of the auxiliary roller faces the wire, the auxiliary roller can be rotated by the other auxiliary roller. Claim 1
According to the invention of No. 0, the slurry can be supplied between the wire and the work, and the cutting efficiency of the work can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view of a main part of a wire saw device according to a first embodiment.

FIG. 2 is a plan view of an essential part of the wire saw device.

FIG. 3 is a sectional view taken along line III-III in FIG.

FIG. 4 is a partial front view showing a relationship between an auxiliary roller and a support groove.

FIG. 5 is a partial front view showing the movement of the wire.

6 is a partially enlarged front view of FIG.

FIG. 7 is a plan view of a principal portion showing a wire saw device according to a second embodiment.

8 is a sectional view taken along line VIII-VIII of FIG.

9 is a sectional view taken along line IX-IX in FIG.

FIG. 10 is an explanatory view of the movement of the wire in the third embodiment as seen from the front.

FIG. 11 is a perspective view showing an auxiliary roller of a fourth embodiment.

FIG. 12 is a perspective view showing an auxiliary roller of a fifth embodiment.

FIG. 13 is a perspective view showing an auxiliary roller of a sixth embodiment.

FIG. 14 is a perspective view showing an auxiliary roller of a seventh embodiment.

FIG. 15 is a perspective view showing an auxiliary roller of an eighth embodiment.

[Explanation of symbols]

1 ... Groove roller, 2 ... Groove roller, 3 ... Cutting wire, 4 ...
Slurry supply pipe, 6 ... Work, 7 ... Auxiliary roller, 10
... guide groove, 11 ... spiral groove as a recess, 30, 31,
32, 33 ... Recesses.

Claims (10)

[Claims] 1. A plurality of groove rollers having a large number of grooves on the outer peripheral surface thereof are provided, and a wire is wound between the grooves of each groove roller so that the wire travels as the groove roller rotates, and the wire contains abrasive grains. A wire saw device in which a wire and a work are pressed against each other while supplying a slurry to cut the work. The wire saw device is located at least on the upstream side in the traveling direction of the work with respect to the wire between the groove rollers with the work as a boundary. A wire saw device in which a rotatable auxiliary roller is brought into contact with and an uneven portion is formed on the outer circumference of the auxiliary roller for moving the wire in the contacting direction with respect to the work and in the separating direction. 2. The wire saw device according to claim 1, wherein a plurality of guide grooves for guiding the traveling of the wire are provided on the outer circumference of the auxiliary roller. 3. The wire saw device according to claim 1 or 2, wherein the auxiliary rollers are a pair of rollers arranged on both sides of the work in the wire traveling direction. 4. The recess is formed by a spiral groove.
The wire saw device according to any one of to 3. 5. The auxiliary roller is arranged on the opposite side of the work through a wire, and the outer peripheral surface of the convex portion is located closer to the work than the lower surface of the guide groove of the groove roller. The described wire saw device. 6. The auxiliary roller is arranged on the work side of the wire, and the outer peripheral surface of the convex portion is located on the side farther from the work than the lower surface of the guide groove of the groove roller. Wire saw equipment. 7. The wire saw device according to claim 1, wherein the auxiliary roller can freely rotate. 8. The wire saw device according to claim 1, wherein a transmission means for transmitting the rotation of the groove roller to the auxiliary roller is interposed between the groove roller and the auxiliary roller. 9. The wire saw device according to claim 2, wherein a transmission means for transmitting the rotation of one auxiliary roller to the other auxiliary roller is interposed between the pair of auxiliary rollers. 10. The wire saw device according to claim 1, wherein the auxiliary roller is a polygonal roller, an eccentric roller or a twist roller.