JPH1044142A - Multiple wire saw - Google Patents
Multiple wire sawInfo
- Publication number
- JPH1044142A JPH1044142A JP20339496A JP20339496A JPH1044142A JP H1044142 A JPH1044142 A JP H1044142A JP 20339496 A JP20339496 A JP 20339496A JP 20339496 A JP20339496 A JP 20339496A JP H1044142 A JPH1044142 A JP H1044142A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- grooves
- pitch
- pitches
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
- B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、シリコン、水晶、
磁気ヘッド等の脆性材料を微小ピッチの精密切断、ある
いは微小ピッチの精密溝加工を行なうマルチワイヤーソ
ーに関する。The present invention relates to silicon, quartz,
The present invention relates to a multi-wire saw for performing fine-pitch precision cutting of a brittle material such as a magnetic head or precision-pitch processing of a fine pitch.
【0002】[0002]
【従来の技術】被加工物に多数の溝入れ加工または、被
加工物を多数に切断加工するマルチワイヤーソーは(図
2参照)、供給リール13から供給された切断工具とな
るワイヤー1は、加工部ロール3a及び3bの溝に案内
され所定のピッチ(図示しない)で多条配列され、収納
リール15へ排出される。この多条配列されたワイヤー
1を被加工物5に対して平行に高速往復走行させ、前記
ワイヤー1に被加工物5を押し付け、ワイヤーと被加工
物の接触する、摺動部に遊離砥粒を供給しながら多数の
切断又は多数の溝入れ加工を行う。ワイヤーを巻き付け
る多溝滑車3a及び3bの材質には、一般に製作が容易
な樹脂材(例えば、超高分子量ポリエチレン)が使用さ
れている。2. Description of the Related Art A multi-wire saw for processing a large number of grooving or cutting a large number of workpieces (see FIG. 2), a wire 1 serving as a cutting tool supplied from a supply reel 13 includes: The rolls are guided by the grooves of the processing rolls 3a and 3b, are arranged in multiple rows at a predetermined pitch (not shown), and are discharged to the storage reel 15. The multi-row wire 1 is reciprocated at high speed in parallel to the workpiece 5 to press the workpiece 5 against the wire 1, and the free abrasive grains are applied to the sliding portion where the wire comes into contact with the workpiece. And a large number of grooving processes are performed. As a material of the multi-groove pulleys 3a and 3b around which the wire is wound, a resin material (e.g., ultra-high molecular weight polyethylene) which is generally easy to manufacture is used.
【0003】[0003]
【発明が解決しようとする課題】被加工物に異なるピッ
チの多数の溝入れ加工または、切断加工をする場合に
は、加工部ロールにピッチの異なる溝を形成する必要が
ある。しかし異なるピッチの溝が形成された、加工部ロ
ール3a、3bの間では(図2参照)、ワイヤーの一周
分の長さに差が生じるので、ワイヤーの張力が不均一に
なり、精密な加工ができなくなる。本発明の目的は、被
加工物を、高精度に異なるピッチで多数に切断加工する
マルチワイヤーソーを提供することである。When a large number of grooving or cutting processes with different pitches are to be performed on a workpiece, it is necessary to form grooves with different pitches in a roll of a processing portion. However, between the processing rolls 3a and 3b in which grooves of different pitches are formed (see FIG. 2), there is a difference in the length of one round of the wire, so that the tension of the wire becomes uneven and precise processing is performed. Can not be done. SUMMARY OF THE INVENTION An object of the present invention is to provide a multi-wire saw for cutting a workpiece in a large number at a different pitch with high precision.
【0004】[0004]
【課題を解決するための手段】上記目的を達成するため
に、本発明は、1本の切削用ワイヤーと、前記ワイヤー
を供給する供給リールと、前記ワイヤーを案内する複数
のプーリと、前記ワイヤーを巻き取る収納リールと、前
記ワイヤーを巻き付けるための複数の加工部ロールとを
備え、前記加工部ロールに前記ワイヤーを巻き付けて、
切削加工用の複数のワイヤー列を形成し、所定の張力を
付与した前記ワイヤー列を被加工部材に押しあて、前記
ワイヤーを往復走行させながら供給リールから収納リー
ルの方向に移動させ、砥粒を含む加工液を供給しながら
被加工部材を切削するマルチワイヤーソーにおいて、前
記加工部ロールに、あるピッチで形成した溝と前記ピッ
チより長いピッチで形成した溝を有するときには、長い
ピッチで配設された溝の深さを他の溝の深さより浅くし
た。In order to achieve the above-mentioned object, the present invention provides a cutting wire, a supply reel for supplying the wire, a plurality of pulleys for guiding the wire, and a wire. Comprising a storage reel and a plurality of processing portion rolls for winding the wire, winding the wire around the processing portion roll,
Forming a plurality of wire rows for cutting, pressing the wire row given a predetermined tension against the workpiece, moving the wire from the supply reel to the storage reel while reciprocating the wire, the abrasive grains In a multi-wire saw for cutting a member to be processed while supplying a processing liquid including, when the processing portion roll has a groove formed at a certain pitch and a groove formed at a pitch longer than the pitch, they are arranged at a long pitch. The depth of the groove was made shallower than the depth of the other grooves.
【0005】[0005]
【発明の実施の形態】被加工物に多数の溝入れ加工また
は、被加工物を多数に切断加工するマルチワイヤーソー
は、図2に示す如く供給リール13から供給された切断
工具となるワイヤー1は、多溝滑車3a及び3bの溝に
案内され所定の異なるピッチ(図示しない)で多条配列
され、収納リール15へ排出される。この多条配列され
たワイヤー1を被加工物5に対して平行に高速往復走行
させ、前記ワイヤー1に被加工物5を押し付け、ワイヤ
ーと被加工物の接触する摺動部に、遊離砥粒を供給しな
がら多数の切断又は多数の溝入れ加工を行う。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A multi-wire saw for forming a large number of grooves in a workpiece or cutting a large number of workpieces comprises a wire 1 serving as a cutting tool supplied from a supply reel 13 as shown in FIG. Are guided in the grooves of the multi-groove pulleys 3a and 3b, are arranged in multiple rows at predetermined different pitches (not shown), and are discharged to the storage reel 15. The multi-row wire 1 is reciprocated at high speed in parallel to the workpiece 5, the workpiece 5 is pressed against the wire 1, and free abrasive grains are applied to a sliding portion where the wire comes into contact with the workpiece. And a large number of grooving processes are performed.
【0006】本発明によるマルチワイヤーソーで使用し
ている、ワイヤーを巻き付ける加工部ロール3a及び3
bの構成を図1に基づいて説明する。図1の(a)は本
発明による加工部ロールの概略図である。 図1の
(b)は、加工部ロール3a及び3bの部分拡大図であ
る。ワイヤー1を巻き付ける加工部ロール3a及び3b
は所定のピッチP1とP2でV形の溝が、樹脂材に設け
られている。前記V形の溝は、ピッチ幅が広く(P2)
配置された溝が、他の溝より浅くしてある。ピッチ幅が
広く(P2)配置されたV形の溝が他の溝より浅く、す
ることによって、次に記す、課題を解決することあがで
きる。すなわち、被加工部材に異なるピッチの多数の溝
入れ加工又は、切断加工をするためには、ワイヤソーの
加工部ロール3a及び3bにピッチの異なる溝を形成し
て、加工部ロール3a及び3bのピッチの異なる溝でワ
イヤーをガイドして、ピッチの異なる複数のワイヤー列
を形成し、所定の張力を付与した前記ワイヤー列を被加
工部材に押しあて、前記ワイヤーを往復走行させながら
供給リールから収納リールの方向に移動させ、砥粒を含
む加工液を供給しながら被加工部材を加工する必要があ
る。しかし、ワイヤソーの加工部ロール3a及び3bに
ピッチの異なる溝を形成して、加工部ロール3a及び3
bのピッチの異なる溝でワイヤーをガイドして、ピッチ
の異なる複数のワイヤー列を形成すると、加工部ロール
3aと加工部ロール3bを一周する、ワイヤ列の長さが
ばらつき、加工部ロールの回転に伴うワイヤーの移動量
が均一でなくなり、ワイヤー列のおのおのの張力が不均
一になるという解決すべき課題がある。前記課題すなわ
ち、ワイヤー列のおのおのの張力が不均一になるとその
結果として、異なるピッチの切断加工が高精度にできな
くなる。加工部ロールの作製は、旋盤等の回転装置に加
工部を装着し、樹脂材部に溝加工を切削バイト等の刃物
で切削加工で形成している。Processing part rolls 3a and 3 for winding a wire used in the multi-wire saw according to the present invention.
The configuration of b will be described with reference to FIG. FIG. 1A is a schematic view of a processing section roll according to the present invention. FIG. 1B is a partially enlarged view of the working rolls 3a and 3b. Work rolls 3a and 3b around which wire 1 is wound
In the figure, a V-shaped groove is provided in a resin material at predetermined pitches P1 and P2. The V-shaped groove has a wide pitch width (P2)
The arranged grooves are shallower than the other grooves. The following problem can be solved by making the V-shaped groove arranged with a large pitch width (P2) shallower than the other grooves. That is, in order to perform a large number of grooving processes or cutting processes on the workpiece to be processed, grooves having different pitches are formed in the processing portion rolls 3a and 3b of the wire saw, and the pitches of the processing portion rolls 3a and 3b are formed. Guide the wires in different grooves, form a plurality of wire rows with different pitches, press the wire row with a predetermined tension against the workpiece, and move the wires back and forth from the supply reel to the storage reel. It is necessary to process the member to be processed while supplying the processing liquid containing the abrasive grains by moving the workpiece in the direction of. However, grooves having different pitches are formed in the processing part rolls 3a and 3b of the wire saw, and the processing part rolls 3a and 3b are formed.
When a plurality of wire rows with different pitches are formed by guiding the wires with grooves having different pitches b, the length of the wire row that goes around the processing part roll 3a and the processing part roll 3b varies, and the rotation of the processing part rolls Therefore, there is a problem to be solved in which the amount of movement of the wire becomes non-uniform, and the tension of each wire row becomes non-uniform. The above-mentioned problem, that is, when the tension of each of the wire arrays becomes uneven, as a result, it becomes impossible to perform cutting with different pitches with high precision. In the production of the processing part roll, the processing part is mounted on a rotating device such as a lathe, and the groove is formed in the resin material part by cutting with a cutting tool such as a cutting tool.
【0007】供給リール13から供給されたワイヤー1
は(図2、図1参照)、対向して、平行に設置された、
加工部ロール3aと3bとに、案内され巻き付けられ、
収納リール15へ回収される。The wire 1 supplied from the supply reel 13
(See FIGS. 2 and 1) are installed in parallel, facing each other.
It is guided and wound around the processing part rolls 3a and 3b,
It is collected on the storage reel 15.
【0008】[0008]
【発明の効果】上述のごとく本発明によれば、異なるピ
ッチの切断加工が高精度にできる。As described above, according to the present invention, cutting with different pitches can be performed with high precision.
【図1】本発明に、使用する加工部ロールの概略構成を
示した正面図。FIG. 1 is a front view showing a schematic configuration of a processing section roll used in the present invention.
【図2】本発明によるマルチワイヤーソーの概略構成を
示した正面図。FIG. 2 is a front view showing a schematic configuration of a multi-wire saw according to the present invention.
1 ワイヤー 3a、3b 加工部ロール 5 被加工物 11 上下機構 13 供給リール 15 収納リール DESCRIPTION OF SYMBOLS 1 Wire 3a, 3b Processing part roll 5 Workpiece 11 Vertical mechanism 13 Supply reel 15 Storage reel
Claims (1)
を供給する供給リールと、前記ワイヤーを案内する複数
のプーリと、前記ワイヤーを巻き取る収納リールと、前
記ワイヤーを巻き付けるための複数の加工部ロールとを
備え、前記加工部ロールの溝に前記ワイヤーを巻き付け
て、切削加工用の複数のワイヤー列を形成し、所定の張
力を付与した前記ワイヤー列を被加工部材に押しあて、
前記ワイヤーを往復走行させながら供給リールから収納
リールの方向に移動させ、砥粒を含む加工液を供給しな
がら被加工部材を切削するマルチワイヤーソーにおい
て、 前記加工部ロールに、あるピッチで形成した溝と
前記ピッチより長いピッチで形成した溝を有するときに
は、長いピッチで配設された溝の深さを他の溝の深さよ
り浅くしたことを特徴とするマルチワイヤソー。1. A cutting wire, a supply reel for supplying the wire, a plurality of pulleys for guiding the wire, a storage reel for winding the wire, and a plurality of processes for winding the wire. Comprising a part roll, winding the wire around the groove of the processing part roll, forming a plurality of wire rows for cutting, pressing the wire row given a predetermined tension against the workpiece,
In a multi-wire saw for moving a wire from a supply reel to a storage reel while reciprocatingly traveling and cutting a workpiece while supplying a processing liquid containing abrasive grains, the processing part roll was formed at a certain pitch. A multi-wire saw having a groove and a groove formed at a pitch longer than the pitch, wherein the depth of the grooves arranged at the long pitch is made shallower than the depths of the other grooves.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20339496A JPH1044142A (en) | 1996-08-01 | 1996-08-01 | Multiple wire saw |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20339496A JPH1044142A (en) | 1996-08-01 | 1996-08-01 | Multiple wire saw |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1044142A true JPH1044142A (en) | 1998-02-17 |
Family
ID=16473327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20339496A Pending JPH1044142A (en) | 1996-08-01 | 1996-08-01 | Multiple wire saw |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1044142A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007175784A (en) * | 2005-12-26 | 2007-07-12 | Kyocera Corp | Wire saw device |
JP2010030000A (en) * | 2008-07-30 | 2010-02-12 | Sumco Corp | Structure of groove roller |
WO2012090828A1 (en) | 2010-12-28 | 2012-07-05 | 三菱化学株式会社 | Method for manufacturing hexagonal semiconductor plate crystal |
CN103182747A (en) * | 2011-12-27 | 2013-07-03 | 浙江昱辉阳光能源有限公司 | Multi-wire sawing wire net system |
CN104476687A (en) * | 2014-11-06 | 2015-04-01 | 江西赛维Ldk太阳能高科技有限公司 | Multi-wire cutting guide wheel and wiring method |
JP2015529190A (en) * | 2012-09-25 | 2015-10-05 | シックスポイント マテリアルズ, インコーポレイテッド | Method for growing group III nitride crystals |
CN107364023A (en) * | 2017-07-20 | 2017-11-21 | 阜宁协鑫光伏科技有限公司 | The method that cutting cuts silicon chip with separated time net and separated time net |
CN111516160A (en) * | 2020-05-11 | 2020-08-11 | 福建晶安光电有限公司 | Multi-wire cutting machine |
-
1996
- 1996-08-01 JP JP20339496A patent/JPH1044142A/en active Pending
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007175784A (en) * | 2005-12-26 | 2007-07-12 | Kyocera Corp | Wire saw device |
JP2010030000A (en) * | 2008-07-30 | 2010-02-12 | Sumco Corp | Structure of groove roller |
WO2012090828A1 (en) | 2010-12-28 | 2012-07-05 | 三菱化学株式会社 | Method for manufacturing hexagonal semiconductor plate crystal |
KR20130132878A (en) | 2010-12-28 | 2013-12-05 | 미쓰비시 가가꾸 가부시키가이샤 | Method for manufacturing hexagonal semiconductor plate crystal |
US11772301B2 (en) | 2010-12-28 | 2023-10-03 | Mitsubishi Chemical Corporation | Method for manufacturing hexagonal semiconductor plate crystal |
CN103182747A (en) * | 2011-12-27 | 2013-07-03 | 浙江昱辉阳光能源有限公司 | Multi-wire sawing wire net system |
JP2015529190A (en) * | 2012-09-25 | 2015-10-05 | シックスポイント マテリアルズ, インコーポレイテッド | Method for growing group III nitride crystals |
CN104476687A (en) * | 2014-11-06 | 2015-04-01 | 江西赛维Ldk太阳能高科技有限公司 | Multi-wire cutting guide wheel and wiring method |
CN107364023A (en) * | 2017-07-20 | 2017-11-21 | 阜宁协鑫光伏科技有限公司 | The method that cutting cuts silicon chip with separated time net and separated time net |
CN111516160A (en) * | 2020-05-11 | 2020-08-11 | 福建晶安光电有限公司 | Multi-wire cutting machine |
CN111516160B (en) * | 2020-05-11 | 2022-06-17 | 福建晶安光电有限公司 | Multi-wire cutting machine |
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