JP3032125B2 - Wire saw equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to, for example, semiconductor materials,
The present invention relates to a wire saw device for cutting a brittle material such as a magnetic material and a ceramic with a wire.

[0002]

2. Description of the Related Art In a wire saw device, a wire is spirally wound at a predetermined pitch between a plurality of groove rollers each having a large number of grooves, and the wire runs with the rotation of the groove roller, and abrasive grains are formed on the wire. Slurry including is supplied. Then, in this state, the wire and the work are pressed, and the work is cut.

By the way, in this type of wire saw device,
The more slurry supplied between the wire and the workpiece,
Work cutting ability is improved. For this reason, for example, JP-A-51-123987 and JP-A-4-101761.
A wire saw device as shown in Japanese Patent Application Laid-Open Publication No. H10-26095 has been conventionally proposed.

In the former configuration, a vibrator is attached to a base supporting the work, and vibration is applied to the work by the vibrator, and the amount of slurry guided between the wire and the work using the vibration is utilized. Is configured to increase. Further, in the latter configuration, a pair of keyboards are provided in the vicinity of the wire between the groove rollers, and the keyboard strikes and vibrates the wire, and the amount of slurry guided between the wire and the work as described above. Is configured to increase.

[0005]

However, in these conventional arrangements, the wire is vibrated in any of up, down, left and right directions. Therefore, in these conventional configurations, there has been a problem that the processing accuracy is reduced due to the lateral deflection of the wire or the like, and the work cannot be accurately cut to a predetermined thickness.

The present invention has been made by paying attention to such problems existing in the prior art. It is an object of the present invention to provide a wire saw device capable of sufficiently supplying a slurry between a wire and a workpiece without lowering the processing accuracy and improving the cutting efficiency of the workpiece. It is in.

[0007]

In order to achieve the above object, in the invention of the wire saw device according to the first aspect, the wire between the groove rollers is at least upstream of the traveling direction of the wire with respect to the workpiece. A rotatable auxiliary roller located on the side is brought into contact with the roller, and an outer periphery of the auxiliary roller is formed with an uneven portion for moving the wire in contact with and away from the workpiece.

According to a second aspect of the present invention, in the first aspect of the invention, the outer periphery of the auxiliary roller is provided with a number of guide grooves for guiding the traveling of the wire.
According to a third aspect of the present invention, in the first or second aspect of the invention, the auxiliary rollers are a pair of auxiliary rollers disposed on both sides in the wire running direction with the workpiece as a boundary.

According to a fourth aspect of the present invention, in the first aspect of the present invention, the concave portion is formed by a spiral groove. According to the fifth aspect of the invention, in the first aspect,
In the invention according to any one of the above-described aspects, the auxiliary roller is disposed on the opposite side of the work via a wire, and the outer peripheral surface of the convex portion is located closer to the work than the lower surface of the guide groove of the groove roller. .

According to a sixth aspect of the present invention, in any one of the first to fourth aspects of the invention, the auxiliary roller is disposed closer to the work than the wire, and the outer peripheral surface of the convex portion is smaller than the lower surface of the guide groove of the groove roller. It is located on the side away from the work.

[0011] According to the invention described in claim 7, in claims 1 to 6,
In the invention described in any one of the above, the auxiliary roller is freely rotatable. In the invention according to claim 8, claims 1 to
In the invention according to any one of the sixth to sixth aspects, a transmission means for transmitting the rotation of the groove roller to the auxiliary roller is interposed between the groove roller and the auxiliary roller.

According to the ninth aspect of the present invention, the second to eighth aspects are provided.
In any one of the inventions described above, a transmission means for transmitting the rotation of one auxiliary roller to the other auxiliary roller is interposed between the pair of auxiliary rollers.

According to the tenth aspect of the present invention, in the first aspect,
In the invention described in any one of the above 9, the auxiliary roller is a polygonal roller, an eccentric roller, or a twist roller.

[0014]

In the wire saw device according to the first, fifth and sixth aspects, while the wire runs in one direction between the groove rollers, a slurry containing abrasive grains is supplied onto the wire. Then, in this state, the work is pressed against the wire, and the work is cut into a predetermined thickness.

When the work is cut, the auxiliary roller is brought into contact with the wire, and is rotated in cooperation with the traveling of the wire. Then, with the rotation of the auxiliary roller, a movement of the wire in the contact or separation direction with respect to the work is given to the wire by the uneven portion on the outer periphery. For this reason, the slurry containing abrasive grains is sufficiently supplied between the wire and the work, and the work can be cut efficiently.

According to the second aspect of the present invention, the running of the wire is guided by the guide groove provided in the auxiliary roller, and thus the wire is deviated in the direction perpendicular to the running direction while the wire is moved up and down. Never. For this reason, there is no possibility that the wire will be deviated in a direction orthogonal to the running direction, thereby lowering the processing accuracy.

Further, in the wire saw device according to the third aspect, a pair of auxiliary rollers are in contact with the wire on both sides of the work. Therefore, when the workpiece is cut, the up-and-down motion is effectively applied to the wire by the cooperation of the two auxiliary rollers. Therefore, the slurry containing abrasive grains is effectively supplied between the wire and the work, and the cutting efficiency of the work can be further improved.

In addition, according to the fourth aspect of the invention, the concave portion on the outer periphery of the auxiliary roller is formed by a spiral groove.
For this reason, when the auxiliary roller is rotated at the time of cutting the work, the wire is sequentially moved up and down by the spiral groove. Therefore, the possibility that slippage occurs in the auxiliary roller is reduced, and its wear is reduced.

In the wire saw device according to the present invention, since the auxiliary roller is freely rotatable, the auxiliary roller is rotated by the groove roller via the wire, so that a driving device for the auxiliary roller is not required.

According to the present invention, the rotation of the groove roller is transmitted to the auxiliary roller by the transmission means, and the rotation of the auxiliary roller coincides with the rotation of the groove roller. In the wire saw device according to the ninth aspect, even if the concave portion of the auxiliary roller faces the wire, the auxiliary roller is rotated by the other auxiliary roller.

According to the tenth aspect of the present invention, the auxiliary roller constituted by a polygonal roller, an eccentric roller or a torsion roller imparts movement to the wire in the direction of coming into contact with or separating from the work, thereby cutting the work efficiently. Is enhanced.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a wire saw device embodying the present invention will be described below in detail with reference to FIGS.

As shown in FIGS. 1 and 2, the frame 15 of the wire saw device has a pair of side plates 16. A pair of groove rollers 1 and 2 are rotatably supported between both side plates 16 so as to be parallel at a predetermined interval.
Is connected to a motor 17. A large number of grooves 1a, 2a are formed at a predetermined pitch on the outer periphery of both groove rollers 1, 2. The cutting wire 3 made of a steel wire is continuously spirally wound around the grooves 1a and 2a of the groove rollers 1 and 2. Then, one groove roller 1 is rotated by the drive of the motor 17, and this rotation is performed via the wire 3 by the other groove roller 2.
Is transmitted to

Accordingly, the wire 3 travels stepwise in one direction while reciprocating between the groove rollers 1 and 2. The wire 3 is supplied from a supply reel (not shown) onto the groove rollers 1 and 2, and is wound on a take-up reel (not shown). The wire 3 travels stepwise in one direction as a whole while reciprocating at a constant stroke.

A pair of slurry supply pipes 4 are disposed above the groove rollers 1 and 2, and a slurry containing abrasive grains is applied to the wire 3 between the groove rollers 1 and 2 from below the slurry supply pipe 4. Supplied. The saddle 5 is disposed above the groove rollers 1 and 2 so as to be able to move up and down, and a work 6 is adhesively fixed to the lower surface thereof. Then, as the saddle 5 is lowered, the work 6 is pressed against the wires 3 of the groove rollers 1 and 2, and the work 6 is cut into a wafer by a lapping action.

As shown in FIGS. 3 and 4, a pair of support grooves 18 and 19 opened upward are formed at the upper end of both side plates 16 between the two groove rollers 1 and 2, respectively.
Bushs 20, 21 are detachably fitted to 19,
It is fixed by a plurality of bolts 22. Bush 2
The bolt insertion holes 0 and 21 are formed in an elongated shape so that the auxiliary roller 7 can be adjusted in the vertical direction. The pair of auxiliary rollers 7 are provided on their support shafts 23 and 24 so as to be opposed to both front and rear sides of the work 6 with respect to the work 6 in the traveling direction of the wire 3.
1 for free rotation. Air supply passage 34
Are provided in the side plates 16 and the bushes 20 and 21, and blow air to the support shaft 24 to prevent slurry from being mixed into the bearing portion. These auxiliary rollers 7 include a round bar-shaped core member 8 made of a metal material, and a synthetic resin coating layer 9 formed on the outer peripheral surface of the core member 8.

As is clear from FIG. 3, the width R1 of the support groove 18 on one side is larger than the diameter R2 of the auxiliary roller 7. The lid 20 a is detachably fixed to the bushes 20 and 21 so as to extract the auxiliary roller 7.

A large number of guide grooves 10 are formed on the outer periphery of the coating layer 9 of each auxiliary roller 7 at the same pitch as the grooves 1a and 2a of the groove rollers 1 and 2, and the wire 3 is provided between the groove rollers 1 and 2.
To guide you on the run. The auxiliary roller 7 is arranged on the opposite side of the work 6 via the wire 3, and the outer peripheral surface of the convex portion is located closer to the work 6 than the lower surface of the guide groove 10 of the groove rollers 1 and 2. A spiral groove 11 as a concave portion is formed on the outer periphery of the coating layer 9 of each auxiliary roller 7 to allow the wire 3 to move downward between the groove rollers 1 and 2.

Next, the operation of the wire saw device configured as described above will be described. Now, when cutting the work 6 in this wire saw device, the groove rollers 1
The wire 3 travels in one direction with reciprocating travel between the two, and a slurry containing abrasive grains is supplied onto the wire 3 from a slurry supply pipe 4. In this state, the work 6 is pressed against the wire 3, and the work 6 is cut into a predetermined thickness by the lapping action.

At this time, the pair of auxiliary rollers 7 is in contact with the wire 3 between the groove rollers 1 and 2, and is driven to rotate as the wire 3 travels. Thereby, each auxiliary roller 7
The spiral groove 11 on the outer periphery of the wire 3 sequentially opposes the wire 3, and a vertical movement is continuously applied to the wire 3. That is, the wire 3 moves downward so as to be separated from the work 6 when facing the spiral groove 11. For this reason, a gap is intermittently formed between the wire 3 and the work 6 with the rotation of the auxiliary roller 7, and a slurry containing abrasive grains is sufficiently supplied between them to cut the work 6 efficiently. be able to.

If the spiral groove 11 of one auxiliary roller 7 faces the wire 3 and the spiral groove 11 of the other auxiliary roller 7 does not face the wire 3, the wire 3
Becomes oblique. For this reason, as shown by the solid line and the two-dot chain line in FIGS. 5 and 6, the wire 3 is not only moved up and down in a horizontal state, but also urged to swing forward or backward. Therefore, the contact angle of the wire 3 to the work 6 changes, and the work 6 can be cut more efficiently.

Moreover, the grooves 11 formed in the auxiliary roller 7
Has a spiral shape. Therefore, one of the wires 3 is always in contact with the outer peripheral surface of the auxiliary roller 7. Therefore, a rotational force is always applied to the auxiliary roller 7 by the wire 3. Therefore, the auxiliary roller 7 reliably follows the travel of the wire 3 and no slippage occurs between the auxiliary roller 7 and the wire 3. Therefore, the auxiliary roller 7 is prevented from being worn by the wire 3. In addition, since a special drive source for rotating the auxiliary roller 7 is unnecessary,
The structure can be simplified.

The lateral movement of the wire 3 is restricted by the guide groove 10 of the auxiliary roller 7, and the wire 3 moves only in the vertical direction. Therefore, while the wire 3 travels while moving up and down, the wire 3 is not displaced in a direction perpendicular to the traveling direction. Therefore, there is no possibility that the processing accuracy is reduced.

In this embodiment, as shown in FIG. 3, the width R1 of the rear support groove 18 is set to be larger than the outer shape R2 of the auxiliary roller 7. Therefore, when the coating layer 9 of the auxiliary roller 7 is worn, the bolt 22 is loosened to remove the rear bush 20 upward from the support groove 18 and to remove the front support shaft 24 of the auxiliary roller 7 from the front bush 21. Thereby, the auxiliary roller 7 can be easily removed from between the both side plates 16. Further, by performing the operation in the reverse order of the removal, the new auxiliary roller 7 can be easily attached between the both side plates 16.

[0035]

Next, another embodiment of the present invention will be described with reference to FIGS.
This will be described with reference to FIG. First, in the second embodiment shown in FIGS. 7 to 9, the drive pulley 26
And a driven pulley 27 is attached to the support shaft 23 of each auxiliary roller 7 so as to correspond to the drive pulley 26.
Is attached. The belt 28 is mounted on a driving pulley 26 and both driven pulleys 27 and is held in a predetermined tension state by a tension pulley 29 on the side plate 16.
The pulleys 26 and 27, the belt 28, and the like constitute transmission means. When the groove roller 1 is rotated by the motor 17 and the wire 3 travels in one direction between the groove rollers 1 and 2, the auxiliary rollers 7 rotate via the pulleys 26 and 27 and the belt 28. Is done.

Therefore, in the second embodiment, when the work 6 is cut along with the travel of the wire 3, the pair of auxiliary rollers 7 is linked with the groove rollers 1 and 2 so that the peripheral speed becomes the same. Rotated. As a result, slippage between the wire 3 and the auxiliary roller 7 can be reliably prevented.

Next, in the third embodiment shown in FIG. 10, a pair of auxiliary rollers 7 are disposed on the upper surface of the wire 3 so as to be located on the front and rear sides of the work 6 and closer to the work 6 than the wire 3 is. ing. Each auxiliary roller 7 is formed so as to have a substantially hexagonal end surface, and a plurality of planar concave portions 30 are formed on the outer periphery thereof along the axial direction. Therefore, the corners of the outer peripheral surface of the auxiliary roller 7 form a convex portion. Although not shown, the guide grooves on the outer peripheral surface of the auxiliary roller 7 are formed only at the corners. Also in this embodiment, a transmission means such as a belt is provided between the auxiliary rollers 7 and the groove rollers 1 and 2 as in the embodiments of FIGS. In the third embodiment, a plurality of convex portions and concave portions 30 alternately contact the wire 3 with the rotation of the auxiliary roller 7 when the work 6 is cut, and the wire 3 is moved up and down in small increments.

Further, in the fourth embodiment shown in FIG. 11, one groove-shaped concave portion 31 is formed on the outer periphery of the auxiliary roller 7 along the axial direction. In addition, the fifth embodiment shown in FIG.
In the embodiment, one flat concave portion 32 is formed on the outer periphery of the auxiliary roller 7 along the axial direction. Further, in the sixth embodiment shown in FIG. 13, a plurality of groove-shaped concave portions 33 are formed on the outer periphery of the auxiliary roller 7 at positions displaced by a predetermined angle along the axial direction.

In addition, in the seventh embodiment shown in FIG. 14, the auxiliary roller 7 is constituted by an eccentric roller whose support shaft 24 is off the axis. In the eighth embodiment shown in FIG.
The auxiliary roller 7 is constituted by a twisting roller formed so that its outer peripheral surface is spirally twisted.

The present invention may be embodied by changing the configuration as follows, for example. (A) A pair of auxiliary rollers 7 are arranged so as to be adjustable in position along the traveling direction of the wire 3 so that the arrangement interval between the two auxiliary rollers 7 can be changed according to the size of the work 6. In addition, it can be adjusted in the vertical direction, and can be adjusted according to the wear of the auxiliary roller 7. (B) A transmission means including a pulley, a belt, etc., to which the rotation of the groove roller 1 is not transmitted, is provided between the pair of auxiliary rollers 7 so that both auxiliary rollers 7 rotate synchronously. With this configuration, one auxiliary roller 7
Is rotated, the other auxiliary roller 7 is also reliably rotated, so that slippage between the wire and the auxiliary roller can be prevented. (C) The auxiliary roller 7 is provided only on the upstream side of the workpiece 6 in the wire running direction. (D) Without providing irregularities on the outer periphery of the auxiliary roller 7,
Instead, the auxiliary roller 7 is configured to rotate eccentrically. With this configuration, as a result, it is the same as providing the irregularities on the outer peripheral surface of the auxiliary roller 7. (E) Supply oil to the air supply passage 34 and perform oil sealing. (F) The guide groove 10 is not provided on the outer peripheral surface of the auxiliary roller 7.

Incidentally, technical ideas other than the claims grasped from the above embodiment and other examples will be described below together with their effects. (1) The wire saw device according to claim 3, wherein the pair of auxiliary rollers are arranged so as to be adjustable in position along the traveling direction of the wire. According to this configuration, the arrangement interval between the two auxiliary rollers can be changed according to the size of the work. (2) The wire saw device according to claim 1, wherein the auxiliary roller is provided only on the upstream side of the workpiece in the wire running direction. According to this configuration, the configuration is suitable when the wire continuously travels in one direction, and the configuration is simplified.

[0042]

Since the present invention is configured as described above, it has the following effects.

According to the first, fifth and sixth aspects of the present invention, the slurry containing abrasive grains can be sufficiently supplied between the wire and the work without lowering the processing accuracy. Cutting efficiency can be improved.

According to the second aspect of the present invention, the wire can be guided reliably, and it is possible to prevent the wire from being deviated in the direction perpendicular to the running direction, thereby reducing the processing accuracy.

According to the third aspect of the present invention, the wire between the groove rollers can be moved up and down effectively by the cooperation of the pair of auxiliary rollers, and the cutting efficiency of the work can be further improved. Can be.

According to the fourth aspect of the present invention, it is possible to sequentially and continuously move the wire up and down with the rotation of the auxiliary roller, and it is possible to more reliably prevent the possibility of lowering the processing accuracy. it can.

According to the seventh aspect of the present invention, a driving device for the auxiliary roller is not required, and the configuration is simplified. According to the eighth aspect of the invention, the rotational speeds of the auxiliary roller and the groove roller surely coincide with each other, so that slippage between the wire and the auxiliary roller can be reliably prevented.

According to the ninth aspect of the present invention, even if the concave portion of the auxiliary roller faces the wire, the auxiliary roller can be rotated by the other auxiliary roller. Claim 1
According to the invention, slurry can be supplied between the wire and the work, and the cutting efficiency of the work can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part showing a wire saw device according to a first embodiment.

FIG. 2 is a plan view of a main part of the wire saw device.

FIG. 3 is a sectional view taken along line III-III in FIG. 2;

FIG. 4 is a partial front view showing a relationship between an auxiliary roller and a support groove.

FIG. 5 is a partial front view showing movement of a wire.

FIG. 6 is a partially enlarged front view of FIG. 5;

FIG. 7 is a main part plan view showing a wire saw device of a second embodiment.

FIG. 8 is a sectional view taken along line VIII-VIII in FIG. 7;

FIG. 9 is a sectional view taken along line IX-IX in FIG. 8;

FIG. 10 is an explanatory view of a movement of a wire in the third embodiment as viewed from the front.

FIG. 11 is a perspective view showing an auxiliary roller of a fourth embodiment.

FIG. 12 is a perspective view showing an auxiliary roller according to a fifth embodiment.

FIG. 13 is a perspective view showing an auxiliary roller of a sixth embodiment.

FIG. 14 is a perspective view showing an auxiliary roller of a seventh embodiment.

FIG. 15 is a perspective view showing an auxiliary roller according to an eighth embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Groove roller, 2 ... Groove roller, 3 ... Cutting wire, 4 ...
Slurry supply pipe, 6 ... Work, 7 ... Auxiliary roller, 10
... Guide grooves, 11 ... Spiral grooves as recesses, 30, 31,
32, 33 ... concave portions.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B24B 27/06 B28D 5/04

Claims (10)

(57) [Claims] A plurality of groove rollers having a large number of grooves are provided on an outer peripheral surface, a wire is wound between grooves of each groove roller, and the wire runs along with the rotation of the groove roller, and the wire contains abrasive grains. In a wire saw device in which a wire and a work are pressed while supplying a slurry to cut the work, the wire saw is positioned at least upstream of the wire between the groove rollers with respect to the work in the traveling direction of the wire. A wire saw device in which a rotatable auxiliary roller is brought into contact, and an outer periphery of the auxiliary roller is formed with a concave and convex portion for moving a wire in contact with and away from a workpiece. 2. The wire saw device according to claim 1, wherein an outer periphery of the auxiliary roller is provided with a number of guide grooves for guiding the traveling of the wire. 3. The wire saw device according to claim 1, wherein the auxiliary rollers are a pair of auxiliary rollers disposed on both sides of the workpiece in the wire running direction. 4. The method according to claim 1, wherein the recess is formed by a spiral groove.
4. The wire saw device according to any one of claims 1 to 3. 5. The auxiliary roller according to claim 1, wherein the auxiliary roller is disposed on the opposite side of the workpiece via a wire, and the outer peripheral surface of the projection is located closer to the workpiece than the lower surface of the guide groove of the groove roller. The wire saw device as described. 6. The auxiliary roller according to claim 1, wherein the auxiliary roller is disposed closer to the work than the wire, and the outer peripheral surface of the convex portion is positioned further away from the work than the lower surface of the guide groove of the groove roller. Wire saw equipment. 7. The wire saw device according to claim 1, wherein the auxiliary roller is freely rotatable. 8. The wire saw device according to claim 1, wherein transmission means for transmitting rotation of the groove roller to the auxiliary roller is interposed between the groove roller and the auxiliary roller. 9. The wire saw device according to claim 2, wherein transmission means for transmitting the rotation of one auxiliary roller to the other auxiliary roller is interposed between the pair of auxiliary rollers. 10. The wire saw device according to claim 1, wherein the auxiliary roller is a polygonal roller, an eccentric roller, or a twist roller.