TW202126452A - Method for restarting the operation of a wire saw to allocate the fixed abrasive sawing wire that has worn the abrasive at the feed position of the workpiece where the cutting of the workpiece is interrupted - Google Patents

Abstract

The present invention provides a method for restarting the operation of a wire saw. In the cutting of a workpiece by a wire saw using a fixed abrasive sawing wire, when the cutting of a workpiece that was interrupted halfway due to abnormalities such as wire breakage is restarted, the saw wire will not be broken due to the saw wire pulling the workpiece. The present invention is a method for restarting the operation of a wire saw. The fixed abrasive saw wire with abrasive fixed on the surface is wound and hung on a multi-groove drum to form a saw wire row, so that the aforementioned fixed abrasive saw wire travels back and forth in the axial direction, and the workpiece is relatively pushed to the saw wire row to advance. In the operation of cutting the workpiece into a wafer-like wire saw, when the cutting of the workpiece is interrupted halfway through the workpiece, the cutting of the workpiece is restarted. The method for restarting the operation has the feature that the fixed abrasive sawing wire that has worn the abrasive is allocated at the feed position of the workpiece where the cutting of the workpiece is interrupted, and the cutting of the workpiece is restarted.

Description

How to restart the wire saw

The present invention relates to the cutting of a workpiece by a saw wire, and particularly to a method of restarting the operation of the wire saw when the cutting is interrupted.

In the past, wire saws have been known for cutting wafers from silicon ingots and compound semiconductor ingots. In this wire saw, for example, in the free abrasive type, a wire row is formed by winding a plurality of cutting wires around a plurality of drums, and driving the cutting wire in the axial direction at a high speed, and It is appropriate to supply a cutting fluid and subject the workpiece to the saw wire array to advance, and the workpiece is cut at the position of each saw wire, and multiple wafers are cut out at the same time (Patent Document 1).

Here, Figure 2 shows an example of a general wire saw. As shown in Figure 2, the wire saw 201 is mainly composed of the following: a saw wire 202 (high tension steel wire) for cutting the workpiece W; a grooved drum 103 with a saw wire 202 around it; adjustment of the tension of the saw wire 202 The tension adjustment mechanism 104; the mechanism 105 that feeds the workpiece W to be cut downward; and the mechanism 206 that supplies the cutting fluid during cutting.

Saw wire 202 is paid out from one wire reel 107, passes through traverser 108, pulley 109, and tension adjustment mechanism 104, and is wound around grooved drum 103 for about 300 to 500 times, and then passes through the other tension adjustment mechanism. 104', pulley 109', and thread guide 108' are used to take up the wire by the saw wire reel 107'.

In addition, the grooved drum 103 is a drum that presses polyurethane resin into the circumference of a steel cylinder and cuts grooves on its surface at a substantially constant pitch. The saw wire 202 wound around can be sent to the drum by the grooved drum drive motor 110. Drive or drive back and forth along the axial direction with a predetermined cycle.

The wire reels 107, 107' are driven by the wire reel drive motors 111, 111' to rotate, and the speeds of the grooved drum drive motor 110 and the wire reel drive motors 111, 111' can be adjusted to adjust the speed of the saw wire reel drive motors 111, 111'. The tension of the thread 202.

In addition, the mechanism 105 for feeding the workpiece W downward in FIG. 2 is shown in FIG. 3, and has a workpiece holding mechanism 114 composed of a workpiece holding portion 112 and a workpiece plate 113. The workpiece plate 113 is attached to the workpiece W via a joining member (Beam) 120 and the workpiece W is bonded.

When the workpiece W is cutting, the workpiece W is held and relatively pressed down due to the mechanism 105 that feeds the workpiece W downward, and the saw wire row formed by the saw wire 202 wound on the grooved drum 103 is opposite to each other. Ground feed.

Use this wire saw 201, and use the tension adjustment mechanism 104, 104' to apply appropriate tension to the saw wire 202, and drive the saw wire 202 to move back and forth in the axial direction by the saw wire reel drive motor 111, 111', and The mechanism 105 that supplies the cutting fluid supplied by the cutting fluid supply mechanism 206 to feed the workpiece W downward causes the workpiece to feed to cut the workpiece.

However, although the steel wire saw wire used for wire saws is rich in abrasion resistance and tension resistance, and the grooved drum uses a resin drum with a predetermined hardness to prevent damage to the saw wire, the saw wire may sometimes be affected by the saw wire. Due to the long-term wear and fatigue, the wire is broken during the cutting of the workpiece, and the cutting of the workpiece cannot be continued.

In this case, the conventional method is as follows: After performing the separation operation to separate the saw wire from the cut of the workpiece, wire the broken wire to the new wire. After that, after winding the wire point to the wire reel 107' on the recovery side, each row of the saw wire is correspondingly engaged with each cut of the workpiece, and the row of saw wire is arranged at the position of the workpiece when the wire is broken. And restart the cutting of the workpiece.

On the other hand, there is also a known method for cutting a workpiece. As shown in Figure 1, a fixed abrasive saw wire 402 that fixes diamond abrasives on the surface of the saw wire is used instead of using a cutting fluid containing abrasives. Instead, the cutting of small-diameter ingots below 150mm in diameter has been put into practical use in a certain range.

In the cutting with the fixed abrasive saw wire 402, a fixed abrasive saw wire 402 is installed as shown in FIG. 1 to replace the steel wire saw wire 202 in the general wire saw 201 shown in FIG. In addition, the following wire saw 101 is used: including a cooling liquid supply mechanism 106, the cutting liquid supplied in the general wire saw 201 shown in FIG. 2 is changed to cooling water without abrasives in the wire saw 101 shown in FIG. Wait for the coolant. In such cutting by the fixed abrasive saw wire 402, a general wire saw can be used directly.

The fixed abrasive sawing wire may also be broken. The following methods must be carried out in the same way as the free abrasive sawing wire: perform the separation operation to separate the sawing wire from the incision of the workpiece, and connect the broken wire to the new wire, so that the wire is rolled up. To the saw wire reel 107' on the recovery side, and make each row of the saw wire correspond to each cut of the workpiece, arrange the saw wire row at the workpiece feed position when the wire is broken, and restart the cutting of the workpiece. [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Application Laid-Open No. 9-262826

(The problem to be solved by the invention)

In the case of the wire saw using the above-mentioned free abrasive, as shown in Figure 4(a), a gap (Clearance) of the width of the free abrasive G is formed between the saw wire 202 and the workpiece W, so it is easier to divide the rows of the saw wire Corresponding to each cut that is engaged with the workpiece, the saw line is arranged at the workpiece feed position when the wire is broken. However, as shown in Figure 4(b), in the case of using the above-mentioned fixed abrasive wire saw, because there is no gap between the fixed abrasive saw wire 402 and the workpiece W, there is the following problem: it is difficult to match each row of the saw wire to the card Fit to each cut of the workpiece.

In addition, when the saw wire is involved with the workpiece, the saw wire may be broken. In the case of saw wire breakage, the wiring of the saw wire must be performed again, and there must be a fixed abrasive saw wire that is re-wound, and the loss is huge.

In view of the aforementioned problems, the present invention aims to provide a method for restarting the operation of a wire saw. In the cutting of a workpiece by a wire saw using a fixed abrasive saw wire, even if the restart is due to wire breakage, etc. Abnormal and interrupted cutting of the workpiece can also make the saw wire return to the cutting position of the workpiece, and the saw wire will not be broken when the saw wire is set to the feed position. (The way to solve the problem)

In order to achieve the above-mentioned object, the present invention provides a method for restarting the operation of a wire saw. The fixed abrasive saw wire with abrasive fixed on the surface is wound around a multi-groove drum to form a saw wire row, so that the fixed abrasive saw wire is axially aligned. Go back and forth, and push the workpiece to the saw wire row to advance the knife, and cut the workpiece into a wafer-like wire saw during the operation, after the cutting of the workpiece is interrupted halfway through the workpiece The method for restarting the operation in the case of restarting the cutting of the workpiece is characterized in that the fixed abrasive sawing wire that has worn the abrasive is placed at the feed position of the workpiece that interrupted the cutting of the workpiece, and the workpiece is restarted Cutting.

According to the method for restarting the operation of the wire saw of the present invention, a gap can be formed between the workpiece and the saw wire by abrading the abrasive of the fixed abrasive saw wire, so it is easy to engage each row of the saw wire to the workpiece. Each cut can prevent the wire from breaking when the wire is set to the feed position.

Also, at this time, it is advisable to set the diameter of the core wire of the fixed abrasive saw wire as R, the new wire, that is, the diameter of the fixed abrasive saw wire as R1, and the diameter of the saw wire after the abrasive has been worn out as R2, then The fixed abrasive saw wire that has worn the abrasive and the R2 satisfies R≦R2≦R+(R1-R)x0.1 is placed at the cutting position of the workpiece that interrupted the cutting of the workpiece, and the cutting of the workpiece is restarted .

According to this method, since the abrasive of the fixed abrasive saw wire is worn, a gap can be formed between the workpiece and the saw wire, so it is easier to make each row of the saw wire correspondingly engage with the cuts of the workpiece, and it is more restrained. The saw wire is broken. When the saw line is arranged at the workpiece feed position when the wire is broken, it will not touch the workpiece and be involved, which can prevent the cutting surface of the workpiece from generating saw marks and impairing the quality of Warp.

In addition, at this time, it is preferable to set the wire diameter of the fixed abrasive saw wire different from the foregoing R2 to the wire diameter after the abrasive has been worn as R3, and R3 shall satisfy R2<R3≦R2+(R1-R)x0.5 The fixed abrasive saw wire that has worn the abrasive is arranged at a position between the fixed abrasive saw wire that has worn the abrasive and the new wire that meets R2, and the cutting of the workpiece is restarted.

According to this method, since the abrasive of the fixed abrasive saw wire is worn away, a gap can be formed between the workpiece and the saw wire. Therefore, when the saw wire is set to the feed position, it is easier to make each row of the saw wire correspond to the card. The cuts that are combined to the workpiece can prevent the sawing wire from breaking. When the saw line is arranged at the cutting position of the workpiece when the wire is broken, it will not contact the workpiece and be involved, so as to prevent the cutting surface of the workpiece from generating saw marks and impairing the quality of Warp. In addition, because the diameter of the saw wire has a small change, the load on the saw wire during cutting does not increase sharply, so the wire breakage during cutting restart can be prevented at the same time.

In addition, at this time, it is advisable to relatively push the grindstone against the fixed abrasive saw wire to abrade the abrasive.

According to this method, the fixed abrasive on the surface of the fixed abrasive saw wire can be effectively removed, and the saw wire can be returned to the cutting position of the workpiece more easily. Therefore, it is easier to control the diameter of the saw wire, so that the wire does not break again when the operation is restarted, and can further prevent the saw wire from pulling on the workpiece to generate saw marks, damage the quality of the workpiece, and cause the saw wire to be broken.

In addition, at this time, the aforementioned grindstone is preferably WA (White Alundum) grindstone.

This kind of grindstone can effectively remove the fixed abrasive on the surface of the fixed abrasive saw wire, making it easier to return the saw wire to the cutting position of the workpiece. Therefore, it is easier to control the diameter of the saw wire, so that the wire will not be broken again when the operation is restarted, and it can further prevent the workpiece from pulling the saw wire to produce saw marks, damage the quality of the workpiece, and cause the saw wire to be broken. (Effects of Invention)

As mentioned above, because the abrasive of the fixed abrasive saw wire is worn away, a gap can be formed between the workpiece and the saw wire, so it is easier to make each row of the saw wire correspondingly engage with the incisions of the workpiece. When setting to the feed position, the saw wire breakage can be suppressed even more. When the saw line is arranged at the workpiece feed position when the wire is broken, it will not touch the workpiece and be involved, and it can prevent the cutting surface of the workpiece from generating saw marks and impairing the quality of Warp. In addition, because the diameter of the saw wire has a small change, the load on the saw wire during cutting does not increase sharply, so the wire breakage during cutting restart can be prevented at the same time.

(Preferable form for implementing the invention)

The present invention will be described in detail below, but the present invention is not limited to this.

As mentioned above, in the case of using a fixed abrasive wire saw, since there is no gap between the fixed abrasive saw wire 402 and the workpiece W, when the saw wire is set to the feed position, it is difficult to make each row of the saw wire engage correspondingly. For each incision of the workpiece, it is necessary to seek a method that does not cause the saw wire to be broken.

The inventor of the present case has deliberately reviewed the above problems and found that a method for restarting the operation of the wire saw can prevent the wire from being broken when the wire is set to the feed position, and completed the present invention, which is based on fixing the surface The fixed abrasive saw wire with abrasive is hung around the multi-groove drum to form a saw wire row, so that the fixed abrasive saw wire travels back and forth in the axial direction, and the workpiece is relatively pushed to the saw wire row to advance, and the workpiece During the operation of the wire saw that is cut into wafers, the cutting of the workpiece is interrupted in the middle of the workpiece, and then the cutting of the workpiece is restarted. The method is characterized in that the abrasive is worn out. The fixed abrasive saw wire is arranged at the feed position of the workpiece that interrupts the cutting of the workpiece.

Hereinafter, it will be described with reference to the drawings.

In the case of using a free abrasive wire saw, as shown in Figure 4 (a), because a gap (Clearance) of the width of the free abrasive G is formed between the saw wire 202 and the workpiece W, it is easier to make the saw wire Each row corresponds to each cut that is engaged with the workpiece, and the saw wire row is arranged at the workpiece feed position when the wire is broken. However, in the case of using the above-mentioned fixed abrasive type wire saw, as shown in FIG. 4(b), since there is no gap between the fixed abrasive saw wire 402 and the workpiece W, it is possible to make each row of the saw wire correspond to the card Fit to each cut of the workpiece.

Therefore, the inventor of the present case discovered a method for restarting the operation of the wire saw, which is to wind the fixed abrasive saw wire with abrasive fixed on the surface on a multi-groove drum to form a saw wire row, so that the aforementioned fixed abrasive saw wire travels back and forth in the axial direction. , And the workpiece is relatively pushed to the row of saw wires to advance, and the workpiece is cut into a wafer-like wire saw during the operation, after the cutting of the workpiece is interrupted in the middle of the workpiece, restart The method for restarting the operation in the case of cutting the workpiece is characterized in that the fixed abrasive saw wire that has worn the abrasive is arranged at the feed position of the workpiece that interrupted the cutting of the workpiece, and the cutting of the workpiece is restarted.

According to the method for restarting the operation of the wire saw of the present invention, a gap is formed between the workpiece and the saw wire by abrading the abrasive of the fixed abrasive saw wire, so it is easy to engage each row of the saw wire correspondingly to each of the workpiece. Cut, and can prevent the saw wire from breaking when the saw wire is set to the feed position.

In addition, the inventor of the present case discovered that when the diameter of the core wire of the fixed abrasive saw wire is R, the diameter of the new wire, that is, the diameter of the fixed abrasive saw wire is R1, and the diameter of the saw wire after abrasive wear is set to R2, by The fixed abrasive sawing wire with R2 satisfying R≦R2≦R+(R1-R)x0.1 that has worn the abrasive is placed at the feed position of the workpiece that interrupts the cutting of the workpiece, which can further suppress the wire breakage. Moreover, it will not be involved in contact with the workpiece, which can prevent the cutting surface of the workpiece from producing saw marks, impairing the quality of Warp, and so on.

In addition, after further investigation, it was found that there was no problem until it was placed in the workpiece feed position, but sometimes the disconnection occurred again immediately after the operation was restarted.

After investigating the broken wire, it was found that the wire was broken at the time when the diameter of the fixed abrasive saw wire was worn to meet R2, and the new wire passed through the workpiece near the boundary. As a result, the inventor of the present case speculates that the wear area of the fixed abrasive saw wire is greatly different from that of the new wire. When the diameter of the saw wire is greatly different, the feed for the workpiece before and after the drop portion becomes larger, and the load on the saw wire increases sharply. The disconnection occurred due to the large size.

Therefore, the inventor of the present case discovered a method for restarting the operation of the wire saw as a method to prevent the wire from being disconnected again when the operation is restarted. , The fixed abrasive sawing wire that has worn abrasives with R3 satisfying R2<R3≦R2+(R1-R)x0.5 is arranged between the fixed abrasive sawing wire that has worn abrasives that satisfies R2 and the supplied new wire Position, and restart the cutting of the workpiece.

According to this method, the diameter of the saw wire increases in the order of R2=>R3=>new wire when the saw wire travels through the workpiece, so the change in the diameter of the saw wire is smaller than that of the new wire in the order of R2=>new wire. In this case, the load on the saw wire will not increase rapidly when the knife is advanced, and the saw wire can be prevented from breaking.

In addition, in order to wear the fixed abrasive saw wire, the grinding stone should be relatively pushed against the fixed abrasive saw wire. In addition, the grindstone is preferably WA (White Alundum) grindstone.

If this kind of operation restart method is used, the fixed abrasive on the surface of the fixed abrasive saw wire can be effectively removed, and the saw wire can be returned to the cutting position of the workpiece more easily. Moreover, the diameter of the saw wire can be easily controlled so that it can be set to the feed position. When sawing the wire, the wire will not be disconnected again when the operation restarts. [Example]

Hereinafter, the present invention will be specifically explained by the examples and comparative examples of the present invention, but the present invention is not limited thereto.

Use the wire saw shown in Figure 1 to start the cutting of the cylindrical workpiece under the common conditions in Table 1, and interrupt the cutting halfway. Thereafter, the saw wire is separated from the cut of the workpiece, and the saw wire is reeled to the recovery side reel until the unused part of the saw wire reaches the position of the workpiece.

[Table 1] Saw wire Core diameter 0.140mm Diamond size 10-20μm Saw wire outer diameter 0.174mm Abrasive attachment method Nickel plating attached Artifact diameter 301mm length 300mm Wire travel conditions during cutting Saw wire tension 25N Saw wire travel speed Up to 1500m/min. Saw wire advance 2114m Saw wire retreat 2086m Saw wire usage 9000m Workpiece feed condition during cutting Workpiece feed rate 0.32mm/min Feed depth 310mm Cooling water Liquid type Water + glycol mixture Coolant flow About 150L/min. Coolant temperature 23℃

(Example 1) Try to use the grindstone in Table 2, after the saw wire is worn to the conditions in Table 3, the rows of the saw wires are correspondingly engaged with the incisions of the workpiece, and the rows of saw wires are arranged in the workpiece when the cutting is interrupted. Knife position.

[Table 2] millstone type WA number #200

[table 3] Saw wire core diameter R Saw wire diameter R1 R+(R1-R)x0.1 Saw wire diameter after wear R2 Condition 1 0.14mm 0.174mm 0.1434mm 0.155mm Condition 2 0.145mm Condition 3 0.143mm Condition 4 0.141mm Condition 5 0.140mm

(Comparative example) Try not to wear the saw wire, and fit each row of the saw wire to each cut of the workpiece correspondingly, and arrange the saw wire row at the position of the workpiece when the cutting of the workpiece is interrupted.

The results of Example 1 and the comparative example, as shown in Table 4, saw scars and wire breakage in the comparative example. Regarding Example 1, saw wire breakage did not occur under any conditions, and when conditions 3 to 5 of "R≦R2≦R+(R1-R)ⅹ0.1" were met, neither saw marks nor saw wire breakage occurred.

[Table 4] Comparative example Example 1 Condition 1 Condition 2 Condition 3 Condition 4 Condition 5 Saw marks occur have have have none none none Saw wire breaks when arranging to the incision position have none none none none none

(Example 2) Use the grindstone of Table 2 to wear the saw wire to the conditions in Table 5, and fit each row of the saw wire to each cut of the workpiece correspondingly, and arrange the row of saw wire to feed the workpiece when the cutting of the workpiece is interrupted. Position and restart cutting.

[table 5] Before saw wire abrasion treatment After saw wire abrasion treatment Core diameter R Diameter R1 Diameter R2 R2+(R1-R)x0.5 Diameter R3 Condition 1 0.14mm 0.174mm 0.143mm 0.16mm 0.174mm Condition 2 0.165mm Condition 3 0.16mm Condition 4 0.155mm Condition 5 0.15mm

As shown in Table 6, the results of Example 2 showed that under conditions 3 to 5 of "R2<R3≦R2+(R1-R)x0.5", no disconnection occurred during operation restart.

[Table 6] Example Condition 1 Condition 2 Condition 3 Condition 4 Condition 5 Disconnection during operation restart have have none none none

In addition, the present invention is not limited to the above-mentioned embodiment. The above-mentioned embodiments are exemplified, and those having substantially the same structure and the same effects as the technical ideas described in the scope of the patent application of the present invention are included in the technical scope of the present invention.

101: Wire saw (fixed abrasive type) 103: grooved drum 104,104’: Tension adjustment mechanism 105: Mechanism to feed the workpiece downward 106: Coolant supply mechanism 107,107’: Saw wire reel 108,108’: Wire guide 109,109’: Pulley 110: Slotted roller drive motor 111,111’: Saw wire reel drive motor 112: Workpiece holding part 113: Workpiece plate 114: Workpiece holding mechanism 120: Joint member (beam) 201: Wire saw (free abrasive type) 202: Saw wire (high tension steel wire) 206: Cutting fluid supply mechanism 402: Fixed Abrasive Saw Wire W: Workpiece G: Abrasive

Figure 1 shows an example of a fixed abrasive type wire saw. Figure 2 shows an example of a free abrasive type wire saw. Figure 3 shows the mechanism that feeds the workpiece downward. Figure 4 (a) and (b) are cross-sectional views of the workpiece and the saw wire when the saw wire is arranged at the workpiece feed position in order to restart the cutting of the workpiece.

101: Wire saw (fixed abrasive type)

103: grooved drum

104,104’: Tension adjustment mechanism

105: Mechanism to feed the workpiece downward

106: Coolant supply mechanism

107,107’: Saw wire reel

108,108’: Wire guide

109,109’: Pulley

110: Slotted roller drive motor

111,111’: Saw wire reel drive motor

402: Fixed Abrasive Saw Wire

W: Workpiece

Claims (5)

A method for restarting the operation of a wire saw is to wind a fixed abrasive saw wire with abrasive fixed on the surface on a multi-groove drum to form a saw line row, make the fixed abrasive saw wire travel back and forth in the axial direction, and place the workpiece relative to the ground. Pushing to the saw line to advance the knife, and cutting the workpiece into a wafer-like wire saw during operation, When the cutting of the workpiece is interrupted for a while in the middle of the workpiece, the operation restart method for restarting the cutting of the workpiece is characterized in that: The fixed abrasive saw wire that has worn the abrasive is arranged at the feed position of the workpiece where the cutting of the workpiece is interrupted, and the cutting of the workpiece is restarted. For example, the method for restarting the operation of the wire saw in claim 1, wherein the diameter of the core wire of the fixed abrasive saw wire is set as R, the new wire, that is, the diameter of the fixed abrasive saw wire is set as R1, after the abrasive has been worn When the diameter of the saw wire is set as R2, the fixed abrasive saw wire that has worn the abrasive and the R2 satisfies R≦R2≦R+(R1-R)x0.1 is placed on the workpiece where the cutting of the workpiece is interrupted The cutting position of the workpiece is restarted. For example, the operation restart method of the wire saw of claim 2, wherein, when the wire diameter of the fixed abrasive saw wire that is different from the R2 after the abrasive has been worn is set as R3, the R3 satisfies R2<R3≦R2+ (R1-R) x0.5 the fixed abrasive sawing wire that has worn the abrasive is arranged at a position between the fixed abrasive sawing wire that has worn the abrasive and the new wire that meets R2, and restarts the Cutting of the workpiece. The method for restarting the operation of a wire saw according to any one of claims 1 to 3, wherein the grinding stone is relatively pushed against the fixed abrasive saw wire to wear the abrasive. For example, the operation restart method of the wire saw in claim 4, wherein the WA (White Alundum) grindstone is used as the grindstone.

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