TW202042998A - Workpiece cutting method and wire saw - Google Patents

Abstract

A workpiece cutting method according to the present invention is for simultaneously cutting a workpiece, by a wire saw, at a plurality of portions arranged axially by infeeding the workpiece held by a workpiece holding means with respect to wire rows which is formed by winding a fixed abrasive grain wire on a plurality of rollers with grooves, while supplying a coolant to the fixed abrasive grain wire and axially reciprocating the fixed abrasive grain wire, the cutting method being characterized in that the flow rate of the coolant is set to 180 L/min. or higher, and the traveling speed of the fixed abrasive grain wire in the axial direction is set to 6-30 m/min. after completion of cutting the workpiece and during pulling-out of the workpiece from the wire rows. Accordingly, it is possible to provide a workpiece cutting method that enables preventing the workpiece from being caught in the fixed abrasive grain wire to suffer a saw mark or preventing the fixed abrasive grain wire from being cut off, during the pulling-out of the cut workpiece from the fixed abrasive grain wire.

Description

Cutting method of workpiece and wire saw

The invention relates to a method for cutting a workpiece and a wire saw.

In the past, wire saws are known as equipment for cutting wafers from silicon ingots or compound semiconductor ingots. When using this wire saw, a plurality of cutting wires are wound around a plurality of drums to form a line row, and the cutting wire is driven at a high speed along its axial direction, and the grinding is appropriately supplied. The workpiece is cut and fed in this line, and the workpiece is simultaneously cut at each position in the line (refer to Patent Document 1).

Here, FIG. 3 shows an outline of an example of a conventional general wire saw. As shown in Fig. 3, the wire saw 101 is mainly composed of the following parts: wire 102 (high-tensile steel wire), used to cut the workpiece W'; equipped with groove drums 103, 103', winding wire 102; 130. It is formed by winding the thread 102 on a plurality of grooved rollers 103, 103'; the tension adjustment mechanism 104, 104' adjusts the tension of the thread 102; the workpiece feeding mechanism 105 cuts the workpiece W'is sent down; and the refining supply mechanism 106 supplies refining when cutting.

The thread 102 is wound from the thread reel 107 on one side, passes through the traverse device 108, the pulley 109, and the tension adjustment mechanism 104, and is wound around the grooved drum 103, 103' for about 300 to 500 times, and then passes through the other side The tension adjusting mechanism 104', the pulley 109', and the traverse device 108' are wound on the wire reel 107'.

In addition, the grooved rollers 103, 103' are obtained by pressing polyurethane resin into the circumference of a steel cylinder, and cutting grooves on the surface at a substantially constant distance. With the grooved roller drive motor 110, the thread 102 wound around the grooved rollers 103, 103' can be driven in one direction, or driven in a reciprocating direction with a predetermined cycle.

The spools 107, 107' are driven by the spool drive motors 111, 111' to rotate. By controlling the speeds of the grooved roller drive motor 110 and the spool drive motors 111, 111' separately, it can be applied to the line 102. The tension is adjusted.

In addition, the workpiece feeding mechanism 105 in FIG. 3 that sends the workpiece W'downward, as shown in FIG. 4, includes a workpiece holding device 114 composed of a workpiece holding portion 112 and a workpiece plate 113, and is attached to The joining member (post) 120 of the work W′ joins the work W′ to the work plate 113.

When cutting the workpiece W', the workpiece W'is held by the workpiece feeding mechanism 105 while being relatively pressed down, and the thread formed by the thread 102 wound around the grooved roller 103, 103' Column 130 is sent.

When using this wire saw 101, the tension adjustment mechanism 104, 104' applies appropriate tension to the wire 102, while the wire reel drives the motors 111, 111' to make the wire 102 travel in the reciprocating direction, and from the refining supply mechanism 106 supplies the refining, and the workpiece W'is cut and fed by the workpiece feeding mechanism 105, thereby cutting the workpiece W'.

On the other hand, another method of cutting a workpiece is also known, which does not use abrasive particles containing abrasive grains, but instead uses fixed abrasive grain wires that fix diamond abrasive grains on the surface of the wire. This method has been partially practical for cutting small-diameter ingots with a diameter of about 150mm or less.

When cutting with this fixed abrasive wire, replace the steel wire of the wire saw shown in Figure 3 by installing a fixed abrasive wire, and replace the grout with a coolant such as cooling water without abrasives. Use ordinary wire saw directly. [Prior Technical Literature]

[Patent Document 1] Japanese Patent Publication No. 9-262826

[The problem to be solved by the invention]

If cutting with a fixed abrasive grain line, since free abrasive grains are not used, it also has the advantage of less industrial waste in terms of environmental aspects. In addition, it also has the advantage of faster processing speed, which is more convenient than processing with a wire saw using free abrasive particles. However, when a wire saw is used, as shown in FIG. 3, the workpiece W'is pressed against and moved to cut one of the wire 102 wound around the grooved rollers 103, 103', so when the cutting is completed, The workpiece W'is located below the line 102 pressed by the workpiece W'. Therefore, in order to take out the workpiece W', it is necessary to move the workpiece W'upward so that the wire 102 is cut to form a gap between the wafer-like workpiece W', and the wire 102 is relatively drawn down. come out.

When the wire is drawn, in the case of a wire saw with free abrasive grains, as shown in Figure 5(a), a gap (clearance) of the width of the free abrasive grain G is generated between the wire 102 and the workpiece W' ), so the drawing of line 102 is easier. However, as shown in FIG. 5(b), in the case of using a wire saw with fixed abrasive grains, since there is no gap between the fixed abrasive grain wire 402 and the workpiece W', it is not easy to extract the fixed abrasive grain wire 402. .

Therefore, the fixed abrasive grain wire 402 is caught on the workpiece W'and floats. When the fixed abrasive grain wire 402 is to be released in this state, the cut surface of the workpiece is damaged and so-called saw marks are generated on the cut surface. , And cause Warp (warpage) to deteriorate and damage the quality. When the floating of the fixed abrasive grain wire 402 becomes larger, it may even cause wire breakage. In the event of wire breakage, it will be necessary to spend labor to rewind the fixed abrasive grain wire on the grooved drum, and additionally need to rewind the part of the fixed abrasive grain wire, and the loss is considerable.

The present invention was completed in view of the foregoing problems. The purpose of the present invention is to provide a method for cutting a workpiece and a wire saw. When the fixed abrasive wire is drawn after cutting the workpiece, the fixed abrasive wire will not be stuck on the workpiece. Saw marks or breakage of fixed abrasive grain lines occur. [Means to solve the problem]

To achieve the above object, the present invention provides a method for cutting a workpiece, which is a method for cutting a workpiece by a wire saw, by winding a fixed abrasive grain wire with abrasive grains fixed on the surface in a plurality of attached grooves The rollers form a line, one side supplies the coolant to the fixed abrasive grain wire, and makes the fixed abrasive grain wire reciprocate along its axial direction, and on the other side it is held by the workpiece holding device through the joining member attached to the workpiece The workpiece is cut into and fed to the line, thereby simultaneously cutting the workpiece at plural positions arranged in its axial direction; its characteristics are: When the workpiece is drawn out from the line after the cutting of the workpiece is completed, the flow rate of the coolant is set to be above 180L/min, and the speed of the fixed abrasive grain line along its axial direction is set to Above 6m/min and below 30m/min.

If the workpiece cutting method of the present invention is used, the lubricity between the workpiece and the fixed abrasive grain line can be improved, and the fixed abrasive grain line can be prevented from jamming when the workpiece is drawn. Therefore, if the workpiece cutting method of the present invention is used, it is possible to prevent the occurrence of saw marks due to the fixed abrasive grain wire being stuck on the workpiece, and to prevent the occurrence of the fixed abrasive grain wire breaking.

At this time, the flow rate of the coolant is preferably 250 L/min or less. By suppressing the supply of coolant in this way, the above-mentioned effects can be obtained, and at the same time, the amount of coolant used can be suppressed.

In order to achieve the above objective, the present invention provides a wire saw, which includes: The line is formed by winding a fixed abrasive grain wire with abrasive grains fixed on the surface on a plurality of grooved rollers; The coolant supply mechanism supplies coolant to the fixed abrasive grain line; and A workpiece feeding mechanism, which holds the workpiece with a workpiece holding device via a joining member attached to the workpiece on one side, and cuts and feeds the workpiece while facing the line; and While making the fixed abrasive grain line reciprocate along its axial direction, while cutting and feeding the work piece into the line by the work piece feeding mechanism, the work piece is simultaneously cut at a plurality of positions arranged in the axial direction; Its characteristics are: When the workpiece is drawn out from the line after the cutting of the workpiece is completed, the flow rate of the coolant is controlled to be above 180L/min, and the speed of the fixed abrasive grain line along its axial direction is controlled at Above 6m/min and below 30m/min.

If the wire saw of the present invention is used, the lubricity between the workpiece and the fixed abrasive grain line can be improved, and the fixed abrasive grain line can be prevented from jamming when the workpiece is drawn. Therefore, if the wire saw of the present invention is used, it is possible to prevent the occurrence of saw marks due to the fixed abrasive wire being stuck on the workpiece, and to prevent the occurrence of the broken wire of the fixed abrasive wire.

In addition, the flow rate of the coolant is preferably 250 L/min or less. By suppressing the supply of coolant in this way, the above-mentioned effects can be obtained, and at the same time, the amount of coolant used can be suppressed. [Effects of Invention]

As mentioned above, if the workpiece cutting method and wire saw of the present invention are used, when the fixed abrasive grain wire is pulled out after the workpiece is cut, it can prevent the fixed abrasive grain wire from being stuck on the workpiece to produce saw marks or fixation. Broken wire of abrasive grain. As a result, it is not necessary to rewind the fixed abrasive grain wire due to contact with the workpiece, or to add the fixed abrasive grain wire of the rewinding part, and the workpiece can be successively cut by a wire saw.

The following describes the implementation aspects of the present invention, but the present invention is not limited to this.

As mentioned above, when the fixed abrasive wire is used to cut the workpiece, when the cut workpiece is pulled out from the line, the fixed abrasive wire is stuck on the workpiece and saw marks or fixed grinding are generated on the cut surface. The thread breaks the problem.

Therefore, in order to solve this problem, the inventor of the present invention has repeatedly and intensively studied and explored. As a result, it was found that in the method of cutting a workpiece with a wire saw using a fixed abrasive wire, the workpiece is cut from the line When the workpiece is drawn out, as long as the coolant flow rate and the speed of the fixed abrasive grain wire traveling along its axial direction are set to a predetermined value, the workpiece can be drawn out without the fixed abrasive grain wire stuck in the workpiece. And, the present invention was completed based on this research discovery.

That is, the present invention provides a method of cutting a workpiece, which is a method of cutting a workpiece with a wire saw, by winding a fixed abrasive grain wire with abrasive grains fixed on the surface on a plurality of grooved rollers. A line is formed, a coolant is supplied to the fixed abrasive grain wire, and the fixed abrasive grain wire is reciprocated along its axial direction, and the workpiece is held by a workpiece holding device via a joining member attached to the workpiece. Cutting and feeding the line, thereby simultaneously cutting the workpiece at plural positions arranged in its axial direction; Its characteristics are: When the workpiece is drawn out from the line after the cutting of the workpiece is completed, the flow rate of the coolant is set to be above 180L/min, and the speed of the fixed abrasive grain line along its axial direction is set to Above 6m/min and below 30m/min.

In addition, the present invention provides a wire saw including: The line is formed by winding a fixed abrasive grain wire with abrasive grains fixed on the surface on a plurality of grooved rollers; The coolant supply mechanism supplies coolant to the fixed abrasive grain line; and A workpiece feeding mechanism, which holds the workpiece with a workpiece holding device via a joining member attached to the workpiece on one side, and cuts and feeds the workpiece while facing the line; and While making the fixed abrasive grain line reciprocate along its axial direction, while cutting and feeding the work piece into the line by the work piece feeding mechanism, the work piece is simultaneously cut at a plurality of positions arranged in the axial direction; Its characteristics are: When the workpiece is drawn out from the line after the cutting of the workpiece is completed, the flow rate of the coolant is controlled to be above 180L/min, and the speed of the fixed abrasive grain line along its axial direction is controlled at Above 6m/min and below 30m/min.

Hereinafter, the present invention will be described in detail with reference to the drawings, but the present invention is not limited to these.

[Wire saw] First, the wire saw that can be used for the method of cutting a workpiece of the present invention will be described with reference to FIG. 1. As shown in Figure 1, the wire saw 1 of the present invention is mainly composed of the following components: a fixed abrasive grain wire 2 with abrasive grains fixed on the surface used to cut the workpiece W; grooved rollers 3, 3', coils The fixed abrasive grain wire 2 is wound; the thread row 30 is formed by winding the fixed abrasive grain wire 2 on a plurality of grooved rollers 3, 3'; the workpiece feeding mechanism 5 cuts the thread row 30 The workpiece W is sent downward; and the coolant supply mechanism 6 supplies coolant to the fixed abrasive grain wire 2. The workpiece feeding mechanism 5, like the conventional workpiece feeding mechanism 105, has a workpiece holding device as shown in FIG. 4, and the workpiece holding device is attached to the workpiece W via a joining member (column) 20 (FIG. 1). Hold the workpiece W.

The wire saw 1 may be further equipped with tension adjustment mechanisms 4, 4'for adjusting the tension of the fixed abrasive grain wire 2. In Figure 1, the fixed abrasive grain thread 2 is wound from the thread reel 7 on one side, passes through the traverse device 8, the pulley 9, and the tension adjustment mechanism 4, and winds three hundred to five hundred on the grooved drum 3, 3' After the next time, it passes through the tension adjustment mechanism 4', pulley 9', and traverse device 8'on the other side, and is wound on the spool 7'.

The grooved rollers 3 and 3'are obtained by, for example, pressing polyurethane resin around a steel cylinder, and cutting grooves on the surface at a substantially constant interval. With the grooved roller driving motor 10, the fixed abrasive grain wire 2 wound on the grooved rollers 3, 3'can be driven in one direction or in a reciprocating direction with a predetermined cycle.

The spools 7, 7'are driven by the spool drive motors 11, 11' to rotate. By controlling the speeds of the grooved roller drive motor 10 and the spool drive motors 11, 11' separately, the effect on the fixed mill can be controlled. The tension of the thread 2 is adjusted.

The wire saw 1 reciprocates the fixed abrasive grain wire 2 along its axial direction on one side, and cuts and feeds the workpiece W on the wire row 30 by the workpiece feeding mechanism 5, so that the workpiece W is arranged in the axial direction. Cut multiple places at the same time. The reciprocating movement of the fixed abrasive grain wire 2 is carried out by the following method: the fixed abrasive grain wire 2 wound between a plurality of grooved rollers 3 and 3'first advances a predetermined length in one direction, and then to another The direction retreat is less than the length of the aforementioned advance amount, which is regarded as a feeding cycle, and the thread is sent out in one direction by repeating this cycle. As for the grooved roller 3', the fixed abrasive grain thread 2 wound can be driven in a reciprocating direction at a predetermined cycle by the grooved roller drive motor 10.

Furthermore, in the wire saw 1 of the present invention, when the workpiece W is drawn out from the line 30 after the cutting of the workpiece W, the flow rate of the coolant is controlled to be above 180L/min, and the abrasive grain line is fixed 2 Control the speed of travel along its axial direction above 6m/min and below 30m/min.

In addition, (a) and (c) of Figure 2 respectively show the workpiece W at the end of the cutting of the workpiece, the workpiece W at the end of the drawing of the workpiece, and the fixed abrasive grain wire 202 wound on the grooved rollers 203, 203' Schema of positional relationship. As shown in Fig. 2(a), at the end of cutting, the workpiece W is positioned on the lower side of the line. Therefore, if the workpiece W is to be taken out, it is necessary to move the workpiece W upward so that the fixed abrasive grain wire 202 is cut to form a gap between the wafers of the wafer-shaped workpiece W. 202 pulls out relatively to the lower side.

However, if such a conventional wire saw with fixed abrasive grains is used, since there is no clearance between the fixed abrasive grains 202 and the workpiece W (refer to FIG. 5(b)), the fixed abrasive grains 202 are stuck in the workpiece. W up, and float up as shown in Figure 2(b), and saw marks or wire breaks occur on the cut surface of the workpiece W.

In contrast to this, the wire saw 1 of the present invention increases the gap between the workpiece W and the fixed abrasive wire 2 by controlling the coolant flow rate and the speed of the fixed abrasive grain wire 2 along its axial direction by the controller 31 as described above. The lubricity can prevent the fixed abrasive grain line 2 from jamming when the workpiece W is drawn. Therefore, with the wire saw 1 of the present invention, it is possible to prevent the occurrence of saw marks due to the fixed abrasive wire 2 being stuck on the workpiece W, and to prevent the occurrence of wire breakage of the fixed abrasive wire.

In addition, the flow rate of the coolant is preferably 250 L/min or less. By suppressing the supply of coolant in this way, the above-mentioned effects can be obtained, and at the same time, the amount of coolant used can be suppressed.

[Workpiece cutting method] Next, the method of cutting a workpiece of the present invention will be described using the above-mentioned wire saw of the present invention as an example. First, as shown in Fig. 1, the fixed abrasive grain wire 2 having abrasive grains fixed on the surface is wound around a plurality of grooved rollers 3, 3'to form a line 30. Next, the motor 10 is driven by the grooved roller to make the fixed abrasive grain wire 2 reciprocate along its axial direction. At this time, the appropriate tension is applied to the fixed abrasive grain wire 2 by the tension adjusting mechanism 4, 4', and the wire reel drive motor 11, 11' is used to move the fixed abrasive grain wire 2 in the reciprocating direction, and the other side can be adjusted to act on Fix the tension of abrasive grain line 2. In addition, while the coolant is supplied from the coolant supply mechanism 6 to the fixed abrasive grain wire 2, and the fixed abrasive grain wire 2 is moved in the reciprocating direction, the joining member 20 attached to the cylindrical workpiece W is held by the workpiece. The workpiece W held by the equipment is cut and fed to the line 30, thereby simultaneously cutting the workpiece W at plural positions arranged in the axial direction.

The above content is the same as the aforementioned workpiece cutting method, but in the workpiece cutting method of the present invention, when the workpiece W is extracted from the line 30 after the workpiece W is cut, the coolant flow rate is set to 180L /min or more, and set the moving speed of the fixed abrasive grain line 2 along its axial direction to be 6m/min or more and 30m/min or less. This point is different from the usual workpiece cutting method.

If the workpiece cutting method of the present invention is used, the lubricity between the workpiece W and the fixed abrasive grain wire 2 can be improved, and the fixed abrasive grain wire 2 can be prevented from jamming when the workpiece W is drawn. Therefore, if the workpiece cutting method of the present invention is used, it is possible to prevent saw marks caused by the fixed abrasive grain wire 2 being stuck on the workpiece W, and to prevent the fixed abrasive grain wire from breaking.

At this time, the flow rate of the coolant is preferably 250 L/min or less. By suppressing the supply of coolant in this way, the above-mentioned effects can be obtained, and at the same time, the amount of coolant used can be suppressed. [Example]

Hereinafter, the present invention will be specifically described based on the embodiments and comparative examples of the present invention, but the present invention is not limited to these. (Examples and Comparative Examples)

The inventor used the wire saw 1 of the present invention as shown in FIG. 1 to cut the cylindrical work W according to the work cutting method of the present invention, and pulled the work W out of the line 30. In addition, the workpiece cutting method of the comparative example was used to cut the workpiece and extract the workpiece. Here, the common conditions of Examples and Comparative Examples are shown in Table 1.

[Table 1] Common test conditions Fixed abrasive line Core diameter 0.140mm Diamond grit 10~20μm Wire outer diameter (nominal) 0.174mm Abrasive fixing method Nickel plating Artifact diameter 301mm length 300mm Thread travel conditions when cutting off Thread tension 25N Line speed Up to 1500m/min Line advance 2114m Line retreat 2086m Line usage 9000m Workpiece feeding condition during cutting Workpiece feed speed Average 0.32mm/min Cooling water condition when cut off species Mixture of water + ethylene glycol Coolant flow 150L/min Coolant temperature 23℃

Next, the conditions of the examples and comparative examples when the workpieces were extracted from the line after the workpiece was cut are shown in Table 2, and the results are shown in Table 3.

[Table 2] Comparative example 1~2 Comparative example 3~4 Examples 1~6 Comparative example 5~8 Line travel conditions when drawing Thread tension 25N Line speed 1,3 m/min 6,15,30 m/min 45,60 m/min Workpiece feeding conditions during extraction Workpiece feed speed Average 60mm/min Cooling water conditions during extraction species Mixture of water + ethylene glycol Coolant flow 150L/min 180,250L/min Coolant temperature 23℃

[table 3] Line travel speed [m/min] Coolant flow rate [L/min] Whether there is any disconnection during drawing Whether there are saw marks during extraction Comparative example 1 1 150 Have Have 2 3 150 Have Have 3 3 180 Have Have 4 3 250 Have Have Example 1 6 180 no no 2 6 250 no no 3 15 180 no no 4 15 250 no no 5 30 180 no no 6 30 250 no no Comparative example 5 45 180 Have Have 6 45 250 Have Have 7 60 180 Have Have 8 60 250 Have Have

As a result, as shown in Table 3, when the workpiece is extracted from the line after the workpiece is cut, the flow rate of the coolant is set to 180L/min or more, and the fixed abrasive grain line travels along its axial direction. In Examples 1 to 6, where the speed is set at 6m/min or more and 30m/min or less, no broken wires or saw marks were produced during extraction. In contrast, in Comparative Examples 1 to 8 in which at least one of the coolant flow rate and the speed of the fixed abrasive grain line traveling in the axial direction is outside the scope of the present invention, it was confirmed that wire breakage and saw marks occurred during extraction .

In addition, the present invention is not limited to the above-mentioned embodiments. The above-mentioned embodiments are exemplary, and any technology is included in the technical scope of the present invention as long as it has substantially the same structure and exerts the same effects with respect to the technical idea described in the patent application scope of the present invention.

1: Wire saw 101: Wire saw 2: Fixed abrasive grain line 102: line 202: fixed abrasive line 402: fixed abrasive line 3,3’: with grooved roller 103,103’: with grooved roller 203,203’: with grooved roller 4,4’: Tension adjustment mechanism 104,104’: Tension adjustment mechanism 5: Workpiece feeding mechanism 105: Workpiece feed mechanism 6: Coolant supply mechanism 106: Refining supply mechanism 7,7’: thread reel 107,107’: thread reel 8,8’: traverse device 108,108’: traverse device 9,9’: pulley 109,109’: pulley 10: With grooved roller drive motor 110: With grooved roller drive motor 11,11’: Thread reel drive motor 111,111’: thread reel drive motor 112: Workpiece holding part 113: Workpiece plate 114: Workpiece holding equipment 20: Joint member (column) 120: Joint member (column) 30: line 130: line 31: Controller G: Free abrasive W,W’: Workpiece

Fig. 1 is a schematic diagram showing an example of a wire saw that can be used in the method of cutting a workpiece of the present invention. [Figure 2] (a) is a diagram showing the positional relationship between the workpiece and the fixed abrasive grain line at the end of the workpiece cutting. (b) It is a diagram showing the state of the workpiece and the fixed abrasive grain line when the thread is jammed. (c) A diagram showing the positional relationship between the workpiece and the fixed abrasive grain line at the end of the extraction of the workpiece. [Figure 3] A schematic diagram showing an example of a general wire saw. [Figure 4] is a schematic diagram showing an example of workpiece holding equipment for a general wire saw. [Fig. 5] (a) is an explanatory diagram showing wire drawing when using a wire saw with free abrasive grains (free abrasive grain type). (b) is an explanatory diagram showing wire drawing when using a wire saw with fixed abrasive grains (fixed abrasive grain type).

1: Wire saw

2: Fixed abrasive grain line

3,3’: with grooved roller

4,4’: Tension adjustment mechanism

5: Workpiece feeding mechanism

6: Coolant supply mechanism

7,7’: thread reel

8,8’: traverse device

9,9’: pulley

10: With grooved roller drive motor

11,11’: Thread reel drive motor

20: Joint member (column)

30: line

31: Controller

W: Workpiece

Claims (4)

A method of cutting a workpiece, which is a method of cutting a workpiece with a wire saw. The fixed abrasive grain wire with abrasive grains fixed on the surface is wound on a plurality of grooved rollers to form a line row. Coolant is supplied to the fixed abrasive grain wire, and the fixed abrasive grain wire is reciprocated along its axial direction, and the workpiece held by the workpiece holding device through the joining member attached to the workpiece is cut into the wire row Give, thereby simultaneously cutting the workpiece at a plurality of positions arranged in its axial direction; Its characteristics are: When the workpiece is drawn out from the line after the cutting of the workpiece is completed, the flow rate of the coolant is set to be above 180L/min, and the speed of the fixed abrasive grain line along its axial direction is set to Above 6m/min and below 30m/min. Such as the cutting method of the workpiece in claim 1, where: Set the flow rate of the coolant below 250L/min. A wire saw with: The line is formed by winding a fixed abrasive grain wire with abrasive grains fixed on the surface on a plurality of grooved rollers; The coolant supply mechanism supplies coolant to the fixed abrasive grain line; and A workpiece feeding mechanism, which holds the workpiece with a workpiece holding device via a joining member attached to the workpiece on one side, and cuts and feeds the workpiece while facing the line; and While making the fixed abrasive grain line reciprocate along its axial direction, while cutting and feeding the work piece into the line by the work piece feeding mechanism, the work piece is simultaneously cut at a plurality of positions arranged in the axial direction; Its characteristics are: When the workpiece is drawn out from the line after the cutting of the workpiece is completed, the flow rate of the coolant is controlled to be above 180L/min, and the speed of the fixed abrasive grain line along its axial direction is controlled at Above 6m/min and below 30m/min. Such as the wire saw of claim 3, in which, The flow rate of the coolant is below 250L/min.

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