JP2007273527A - Cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform positional adjustment of the jet nozzle of a cutting water jet nozzle means with high workability and high precision for the outer circumference of the cutting edge of a cutting blade. <P>SOLUTION: Relative positional relation of the jet nozzle 41 of a cutting water jet nozzle means 40, and the outer circumference 21a of the cutting edge of a cutting blade 21, can be recognized by an image picked up at an imaging section 46 and displayed at a display unit 47. A worker can locate the jet opening of the jet nozzle 41 correctly in the center of the outer circumference 21a of the cutting edge of the cutting blade 21, by performing the adjusting work for locating the jet nozzle 41 at a required position of the cutting blade 21 in the direction of the axis of rotation through a jet nozzle position adjuster 48, while viewing the image displayed at a display unit 47. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a cutting apparatus including a chuck table that holds a workpiece and a cutting unit that cuts the workpiece held on the chuck table.

  Conventionally, a wafer in which devices such as IC, LSI, etc. are partitioned and formed by a division line is cut by a cutting device including a cutting blade, divided into individual devices, and packaged. It is used for electronic equipment.

  The cutting apparatus is generally composed of a chuck table for holding a wafer and a cutting means to which a cutting blade for cutting the wafer held on the chuck table is mounted, and cuts a wafer division planned line with high accuracy. be able to.

  Further, the cutting means is provided with cutting water spray nozzle means for supplying cutting water to the outer peripheral portion of the cutting blade, and the cutting water is jetted to the outer peripheral portion of the cutting blade to cut the cutting blade. The point is cooled and cleaned to improve the cutting efficiency by the cutting blade (see, for example, Patent Document 1).

  Here, it is important that the cutting water spraying by the cutting water spray nozzle means is performed on the central portion of the outer peripheral portion of the cutting blade of the cutting blade so that the cutting water is evenly distributed on both the front and back surfaces of the blade. . Therefore, the conventional cutting apparatus is provided with an adjusting means for adjusting the position of the injection nozzle of the cutting water injection nozzle means with respect to the outer peripheral portion of the cutting blade, and the operator uses a mirror or the like to cut the cutting blade and the injection nozzle. The position of the injection nozzle is adjusted while visually confirming the positional relationship with

JP 2004-31415 A

  However, the diameter of the injection nozzle of the injection nozzle is relatively small, such as about 0.5 mm to 2 mm, so that the injection port faces the center of the outer peripheral portion of the cutting blade of the cutting blade even if adjustment work is performed by the adjusting means. It may not be positioned accurately. That is, adjustment work related to parts that are difficult to see hidden behind the blade cover, etc., and requires skill that the operator relies on the human sense while visually checking using a mirror or the like, and the workability is poor In addition, there is a large variation in personnel among workers, and it is extremely difficult to accurately position the injection port so that it is always facing the center of the outer peripheral portion of the cutting blade in the same way regardless of who adjusts it.

  If the injection port of the injection nozzle is not positioned at the center of the outer periphery of the cutting blade, the cutting water is not supplied so as to be evenly distributed on both the front and back surfaces of the blade, and cooling of the heat generated during cutting is not effective. If the blade is burnt enough and the cutting blade wears abnormally, the blade is bent, the cutting blade is damaged, or the cutting blade is bent due to poor cutting, causing the workpiece to kerf, or cleaning with cutting water is not possible. If the contamination of the cutting blade is not sufficient to be removed or the chipping level is deteriorated due to defective cutting, the processing quality becomes unstable.

  The present invention has been made in view of the above, and provides a cutting apparatus capable of adjusting the position of the injection nozzle of the cutting water injection nozzle means with respect to the outer peripheral portion of the cutting blade with high workability and high accuracy. For the purpose.

  In order to solve the above-described problems and achieve the object, a cutting apparatus according to the present invention includes a chuck table for holding a workpiece, and a cutting means for cutting the workpiece held on the chuck table; The cutting means comprises a cutting blade, a mount that supports the cutting blade, a spindle coupled to the mount, a housing that rotatably supports the spindle, and a fixed to the housing A blade cover that covers the cutting blade, and a cutting water spray nozzle unit that is disposed on the blade cover and has a spray nozzle that supplies cutting water to an outer peripheral portion of the cutting blade. The means includes an imaging unit that images the outer peripheral portion of the cutting blade, a display unit that displays an image captured by the imaging unit, and the cutting blade. And positioning the injection nozzle to the required position of the rotation axis direction injection nozzle position adjusting unit, characterized in that it comprises a.

  Moreover, the cutting device according to the present invention is characterized in that, in the above-mentioned invention, the imaging unit is disposed adjacent to the injection nozzle.

  Moreover, the cutting device according to the present invention is characterized in that, in the above-mentioned invention, the imaging unit is arranged in a flow path reaching the injection port of the injection nozzle.

  Moreover, the cutting device which concerns on this invention is provided with the air supply part which discharges | emits the residual cutting water in the said flow path in the said invention, It is characterized by the above-mentioned.

  The cutting device according to the present invention is a cutting device comprising: a chuck table that holds a workpiece; and a cutting unit that cuts the workpiece held on the chuck table, wherein the cutting unit includes: A cutting blade, a mount that supports the cutting blade, a spindle coupled to the mount, a housing that rotatably supports the spindle, a blade cover that is fixed to the housing and covers the cutting blade, and the blade Cutting water spray nozzle means disposed on a cover and having a spray nozzle for supplying cutting water to an outer peripheral portion of the cutting blade, the cutting water spray nozzle means at a position corresponding to the cutting blade A cutting blade alternative jig having an imaging unit that images the ejection port of the ejection nozzle, a display unit that displays an image captured by the imaging unit, Serial and wherein positioning the injection nozzle ejection nozzle position adjusting unit to the required position of the rotation axis direction of the cutting blade, characterized in that it comprises a.

  According to the cutting device of the present invention, the relative positional relationship between the spray nozzle of the cutting water spray nozzle means and the outer peripheral portion of the cutting blade is recognized by the image captured by the image capturing unit and displayed on the display unit. Therefore, the operator performs the adjustment work so that the injection nozzle is positioned at a required position in the rotational axis direction of the cutting blade by the injection nozzle position adjustment unit while looking at the image displayed on the display unit. The injection nozzle's injection port can be accurately positioned in the center of the outer periphery of the cutting edge of the blade, and therefore the position adjustment of the injection nozzle of the cutting water injection nozzle means relative to the outer periphery of the cutting blade's cutting edge is highly accurate with high workability. The effect that it can be performed is produced.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS A cutting apparatus that is the best mode for carrying out the present invention will be described below with reference to the drawings.

(Embodiment 1)
FIG. 1 is a schematic perspective view showing a configuration example of a cutting apparatus according to Embodiment 1 of the present invention. The cutting apparatus 10 according to the first embodiment is an apparatus for cutting a plate-like object such as a semiconductor wafer or a CSP substrate. For example, when the semiconductor wafer W is diced, the workpiece 11 is a semiconductor wafer W. A plurality of cassettes 12 are accommodated in a state of being integrated with the frame F via the holding tape T. The cutting apparatus 10 according to the first embodiment includes a chuck table that holds a workpiece 11 made of a semiconductor wafer W integrated with a frame F, together with carry-in / out means 13, conveyance means 14, cleaning means 15, and conveyance means 16. 17, an alignment camera 18, and a cutting means 20 for cutting the workpiece 11 held on the chuck table 17.

  The unloading / unloading means 13 unloads the workpiece 11 stored in the cassette unit 12 to a placement area that can be conveyed by the conveying unit 14, and also transfers the workpiece 11 to which the semiconductor wafer W has been subjected to the cutting process to the cassette unit 12. It will be brought in. The conveying means 14 conveys the workpiece 11 carried out to the placement area by the carrying-in / out means 13 onto the chuck table 17. The cleaning means 15 is for cleaning the workpiece 11 that has been processed by the cutting means 20 by the semiconductor wafer W. The transport means 16 is for transporting the workpiece 11 processed by the cutting means 20 from the chuck table 17 to the cleaning means 15 by the semiconductor wafer W.

  The chuck table 17 is connected to a drive source (not shown) and can rotate. The chuck table 17 is provided so as to be movable in the X-axis direction by a feed mechanism such as a ball screw, a nut, a pulse motor or the like. The camera 18 is for imaging the surface of the semiconductor wafer W held on the chuck table 17, and an alignment unit (not shown) detects an area portion to be cut based on an image acquired by the camera 18, and performs cutting. This is used for positioning of the cutting operation by means 20.

  The cutting means 20 is for cutting the semiconductor wafer W in the workpiece 11 held on the chuck table 17 with a cutting blade 21, and is moved up and down in the Z-axis direction by a not-shown cutting feed mechanism such as a ball screw, nut, pulse motor or the like. It is provided so as to be movable, and is provided so as to be movable in the Y-axis direction by an index feed mechanism (not shown) such as a ball screw, nut, pulse motor or the like.

  Here, the configuration of the cutting means 20 will be described. FIG. 2 is an exploded perspective view showing a configuration example of the cutting means 20 of the first embodiment, and FIG. 3 is a perspective view of the assembled state. The cutting means 20 according to the first embodiment includes a cutting blade 21, a mount 22 that supports the cutting blade 21, and a spindle 23 that has an axis in the horizontal direction (Y-axis direction) and has a tip connected to the mount 22. And a housing 24 that rotatably supports the spindle 23, a blade cover 25 that is fixed to the housing 24 and covers the cutting blade 21, and supplies cutting water to the outer peripheral portion 21 a of the cutting blade 21 disposed on the blade cover 25. And a cutting water spray nozzle means 40 having a spray nozzle 41 for performing the above operation.

  The cutting blade 21 is loaded on the mount 22 and brought into contact with the contact portion 22a, and is supported and fixed to the mount 22 by screwing a nut 26 into a male screw portion 22b formed on the mount 22, and is fixed in the XZ plane. High speed rotation is possible. The blade cover 25 is detachably attached to the first cover portion 25a by a mounting screw 27 located on the surface side of the first cover portion 25a fixed to the housing 24 and the first cover portion 25a. And a third cover detachably attached to the first cover portion 25a by a mounting screw 28 so as to close the upper open portion of the first and second cover portions 25a and 25b. Part 25c.

  The cutting water injection nozzle means 40 is connected to the cutting water supply unit 42 via an on-off valve 43 and supplies a cutting channel 21 to the cutting blade outer peripheral portion 21a of the cutting blade 21 (FIG. 4-1, a flow path 44). A substantially L-shaped injection nozzle 41 that forms the shape of the injection nozzle 41 is mainly configured, and an attachment block 45 in which the injection nozzle 41 is embedded is attached to the first cover portion 25a, whereby the injection port 41a of the injection nozzle 41 is provided. Is disposed on the blade cover 25 so as to face the outer peripheral portion 21a of the cutting edge. Here, the mounting block 45 is prevented from rotating by the rectangular groove 45a being fitted between the rectangular guide rails 25d and 25e formed separately on one end face of the first cover portion 25a while being prevented from rotating. It is possible to slide in the direction (Y-axis direction).

  Further, the cutting water jet nozzle means 40 of the first embodiment includes an imaging unit 46, a display unit 47, a jet nozzle position adjusting unit 48, and an air supply unit 49 in addition to the jet nozzle 41. FIGS. 4A and 4B are schematic front elevational views showing an example of the mounting configuration of the imaging unit 46, FIG. 4A shows a state during dicing, and FIG. The state of is shown. The imaging unit 46 is for imaging the cutting edge outer peripheral part 21a using an imaging element such as a CCD facing the cutting edge outer peripheral part 21a of the cutting blade 21, as shown in FIGS. As shown in the figure, the injection nozzle 41 is disposed integrally with the injection nozzle 41 so as to be positioned on an extension line of the flow path 44 that is horizontal in the X-axis direction to the injection port 41 a of the injection nozzle 41. Here, the imaging unit 46 is disposed in an airtight state at a boundary portion where the objective lens 50 for forming an image on the imaging element faces the distribution path 44. The display unit 47 is for displaying an image picked up by the image pickup unit 46, and for example, a monitor disposed at an appropriate location such as an upper portion of the cutting device 10 is used.

  FIG. 5 is a schematic horizontal sectional view showing a configuration example of the injection nozzle position adjusting unit 48. The injection nozzle position adjusting unit 48 includes an adjusting rod 52 having a ball screw 51 and an engaging portion 45c having a nut 45b that is formed on a mounting block 45 integrally having an image pickup unit 46 and is screwed to the ball screw 51. The adjusting rod 52 passes through the through holes 25f and 25g of the guide rails 25d and 25e so that the ball screw 51 is positioned between the guide rails 25d and 25e, and is prevented from being detached by the operation knob 53 and the retaining ring 54, and is freely rotatable. Is provided. The engaging portion 45 c is integrally provided at a central position corresponding to the injection nozzle 41 of the groove portion 45 a of the mounting block 45, and the nut 45 b is screwed to the ball screw 51, so that the adjusting rod 52 is rotated according to the rotational operation direction. Displacement moves forward or backward in the Y-axis direction. Thereby, the injection nozzle position adjusting unit 48 is configured to be able to position the injection nozzle 41 at a required position in the rotational axis direction (Y-axis direction) of the cutting blade 21.

  The air supply unit 49 supplies air for discharging residual cutting water in the flow path 44 to the injection nozzle 41 during position adjustment. As shown in FIG. It is connected to the injection nozzle 41 via

  Further, the cutting water jet nozzle means 40 of the present embodiment includes a back side blade nozzle 56 that supplies cutting water to the back side of the cutting blade 21, and a front side blade nozzle that supplies cutting water to the front side of the cutting blade 21. 57 (see FIG. 1). The back-side blade nozzle 56 is embedded in the first cover portion 25a and disposed so that the injection port faces the lower-side back surface of the cutting blade 21, and the front-side blade nozzle 57 is disposed on the second cover portion 25b. The injection port is embedded so as to face the lower surface of the cutting blade 21. Further, as shown in FIG. 3, these blade nozzles 56 and 57 are connected to the cutting water supply unit 42 via an on-off valve 58.

  Here, an operation during dicing (processing) will be described. When the semiconductor wafer W is cut by the cutting blade 21, the on-off valve 43 is opened, and cutting water is supplied from the cutting water supply unit 42 into the injection nozzle 41. As a result, as shown in FIG. 4A, the cutting blade 21 is ejected from the ejection port 41a of the ejection nozzle 41 toward the outer peripheral portion 21a of the cutting blade 21 through the cutting water passing through the flow path 44. Is cooled and washed. At this time, the objective lens 50 faces the flow path 44, but only clean cutting water passes, and the objective lens 50 is not soiled.

  Next, the adjustment of the position of the ejection port 41a of the ejection nozzle 41 with respect to the cutting blade 21 will be described. At the time of position adjustment, the on-off valve 43 is closed before the adjustment work, while the on-off valve 55 is opened, and air is supplied from the air supply unit 49 into the injection nozzle 41. Thereby, as shown to FIGS. 4-2, all the residual cutting water in the distribution path 44 is discharged | emitted by the ejection air out of the injection nozzle 41a. Therefore, the imaging unit 46 positioned on the extension line of the flow path 44 that is horizontal in the X-axis direction to the injection port 41a of the injection nozzle 41 can image the vicinity of the outer peripheral portion 21a of the cutting blade 21 through the injection port 41a. It becomes.

In this state, the imaging unit 46 images the cutting blade outer peripheral portion 21a of the cutting blade 21, and causes the display unit 47 to display an image captured by the imaging unit 46. The display image in this case is an image including the image A of the cutting edge outer peripheral portion 21a as shown in FIG. 3, for example. Here, since the imaging unit 46 images the vicinity of the cutting edge outer peripheral portion 21a at the center of the injection port 41a, the image A of the cutting blade outer peripheral portion 21a corresponds to the center of the injection port 41a indicated by the alternate long and short dash line. If it coincides with the center C _N , the injection port 41a is correctly facing the cutting edge outer peripheral portion 21a.

Therefore, as shown in FIG. 3, when the image A of the cutting edge outer peripheral portion 21 a is deviated from the nozzle center C _N , the operation knob 53 is rotated and operated by the injection nozzle position adjusting unit 48. By displacing the position of the mounting block 45, and hence the positions of the imaging unit 46 and the ejection port 41a, in the Y-axis direction, the nozzle center C _N is positioned at the position of the image A of the cutting blade outer peripheral part 21a imaged by the imaging unit 46. Match the positions.

  As described above, according to the first embodiment, the relative positional relationship between the injection nozzle 41 of the cutting water injection nozzle means 41 and the cutting blade outer peripheral portion 21a of the cutting blade 21 is imaged and displayed by the imaging unit 46. Since the operator can recognize the image from the image displayed on the unit 47, the operator can check the image displayed on the display unit 47 by the injection nozzle position adjusting unit 48 at the required position in the rotational axis direction of the cutting blade 21. By performing the adjustment work so as to position 41, the injection port 41a of the injection nozzle 41 can be accurately positioned at the center of the outer peripheral portion 21a of the cutting blade 21. In particular, in the case of the first embodiment, since the imaging unit 46 images the vicinity of the outer peripheral portion 21a of the cutting blade through the injection port 41a that is the target of position adjustment, position adjustment with extremely high accuracy is possible. Therefore, the position adjustment of the spray nozzle 41 of the cutting water spray nozzle means 40 with respect to the cutting blade outer peripheral portion 21a of the cutting blade 21 can be performed with high accuracy without any skill and without any human variation. .

  FIG. 6 is a bottom view showing a state in which the injection port 41a of the injection nozzle 41 is accurately positioned at the center portion of the outer peripheral portion 21a of the cutting blade 21. FIG. According to the first embodiment, as described above, the injection port 41a is accurately positioned at the center of the outer peripheral portion 21a of the cutting edge. Therefore, when dicing as shown in FIG. Cooling and cleaning can be performed by spraying cutting water so as to be evenly distributed on both sides. Therefore, problems such as abnormal wear of the cutting blade 21 and blade breakage can be avoided and the machining quality can be stabilized.

  Further, according to the first embodiment, since adjustment in an actual use state is possible, not only at the time of initial setting, for example, the position of the cutting device 10 over time at the time of blade replacement or 24 hours operation. Even in an environment in which a deviation may occur, the positional relationship between the cutting edge outer peripheral portion 21a and the ejection port 41a can be confirmed through the display unit 47 by imaging with the imaging unit 46 as necessary, and the deviation occurs. In the case of a failure, it can be adjusted to an appropriate position.

(Modification)
FIG. 7 is a perspective view showing a configuration example of the cutting means 20 showing a modification. In the first embodiment, the imaging unit 46 is disposed at the extended line position of the flow path 44 in the injection port 41a of the injection nozzle 41. However, in the present modification, the position is on the vertical line of the injection nozzle 41, in this case, the position directly below. The imaging unit 46 is disposed adjacent to the imaging unit 46. Moreover, in the case of this modification, the air supply part 49 is unnecessary.

  In the case of this modification, the imaging unit 46 does not image the cutting blade outer peripheral portion 21a through the injection port 41a. However, since the cutting blade outer peripheral portion 21a is imaged immediately below the injection port 41a, the cutting blade 21 rotates. The position adjustment of the injection nozzle 41 with respect to the axial direction can be performed with high workability and high accuracy as in the case of the first embodiment. Further, in the case of this modification, a structure such as disposing the objective lens 50 so as to face the distribution path 44 is unnecessary, and the entire imaging unit 46 can be easily retrofitted to the mounting block 45.

(Embodiment 2)
Next, a second embodiment of the present invention will be described. FIG. 8 is an exploded perspective view showing a configuration example of the cutting means 60 including the cutting water jet nozzle means 70 of the second embodiment. The same parts as those shown in Embodiment Mode 1 are denoted by the same reference numerals.

  The cutting water jet nozzle means 40 of the first embodiment images the cutting blade 21 side from the jet nozzle 41 side relatively, but the cutting water jet nozzle means 70 of the second embodiment is relatively An image of the injection nozzle 41 side of the injection nozzle 41 is taken from a position on the cutting blade 21 side. The cutting water jet nozzle means 70 of the second embodiment picks up an image of the jet nozzle 41a using an imaging element such as a CCD at a position corresponding to the cutting blade 21 in addition to the jet nozzle 41 and the jet nozzle position adjusting unit 48. A cutting blade alternative jig 72 having a part 71 and a display part 73 for displaying an image picked up by the image pickup part 71 are provided.

  The cutting blade substitute jig 72 has a mounting structure that is detachably attached to the mount 22 in the same manner as the cutting blade 21, and is attached to the mount 22 in place of the cutting blade 21 only during adjustment. The imaging unit 71 is a position corresponding to the center of the cutting blade outer peripheral portion 21a of the cutting blade 21 in the cutting blade substitute jig 72 (position shifted to the back side in the Y-axis direction), and the injection port of the injection nozzle 41 The objective lens 74 is provided at a position directly opposite to 41a, and has an objective lens 74 for forming an image on the image sensor on the surface facing the ejection port 41a.

  Next, position adjustment of the injection port 41a of the injection nozzle 41 with respect to the cutting blade 21 according to the second embodiment will be described. At the time of position adjustment, a cutting blade substitute jig 72 is attached on the mount 22 instead of the cutting blade 21. At this time, the cutting blade alternative jig 72 is attached so that the imaging unit 71 is positioned to face the ejection port 41 a of the ejection nozzle 41. Thereby, the imaging unit 71 can image the vicinity of the ejection port 41a at a position corresponding to the cutting edge outer peripheral portion 21a of the cutting blade 21.

In this state, the imaging unit 71 images the ejection port 41a of the ejection nozzle 41, and causes the display unit 73 to display an image captured by the imaging unit 71. The display image in this case is, for example, an image including the image B of the ejection port 41a as shown in FIG. Here, since the imaging unit 71 captures the vicinity of the injection port 41a of the injection nozzle 41 at a position corresponding to the cutting blade outer peripheral portion 21a of the cutting blade 21, the image B of the injection port 41a is indicated by a dashed line. if it matches to the blade center C _B corresponding to the center of the cutting edge peripheral portion 21a of the blade 21, so that the injection port 41a is exactly directly opposite with respect to the cutting edge peripheral portion 21a.

Therefore, as shown in FIG. 8, the image B of the injection port 41a is, if the offset from the blade center C _B is mounting block by the action of the operating knob 53 is rotationally operated injection nozzle position adjusting unit 48 position 45, thus by displacing moving the position of the injection port 41a in the Y-axis direction, to match the position of the image B of the injection port 41a to be imaged by the imaging unit 71 to the position of the blade center C _B. After the adjustment, the cutting blade 21 can be used by mounting it on the mount 22 instead of the cutting blade replacement jig 72.

  As described above, according to the second embodiment, the relative positional relationship between the injection nozzle 41 of the cutting water injection nozzle means 70 and the cutting blade outer peripheral portion 21a of the cutting blade 21 is imaged and displayed by the imaging unit 71. Since the operator can recognize the image from the image displayed on the unit 73, the operator can check the image displayed on the display unit 73 by the injection nozzle position adjusting unit 48 at the required position in the rotational axis direction of the cutting blade 21. By performing the adjustment work so as to position 41, the injection port 41a of the injection nozzle 41 can be accurately positioned at the center of the outer peripheral portion 21a of the cutting blade 21. Therefore, the position adjustment of the injection nozzle 41 of the cutting water injection nozzle means 70 with respect to the cutting blade outer peripheral portion 21a of the cutting blade 21 can be performed with high accuracy without any skill and without any human variation. .

It is a schematic perspective view which shows the structural example of the cutting device of Embodiment 1 of this invention. It is a disassembled perspective view which shows the structural example of the cutting means of this Embodiment 1. FIG. FIG. 3 is a perspective view of the assembled state of FIG. 2. It is a schematic bullet front view showing an example of a mounting configuration of an imaging unit, taking a state during dicing as an example. It is a rough longitudinal front view which shows the example of the attachment structure of an imaging part for the example at the time of adjustment. It is a schematic horizontal sectional view which shows the structural example of an injection nozzle position adjustment part. It is a bottom view which shows a mode that the injection nozzle of the injection nozzle was correctly located in the center part of the cutting-blade outer peripheral part of a cutting blade. It is a perspective view which shows the structural example of the cutting means which shows a modification. It is a disassembled perspective view which shows the structural example of the cutting means containing the cutting water injection nozzle means of this Embodiment 2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Cutting device 11 Workpiece 17 Chuck table 20 Cutting means 21 Cutting blade 21a Cutting blade outer peripheral part 22 Mount 23 Spindle 24 Housing 25 Blade cover 40 Cutting water injection nozzle means 41 Injection nozzle 41a Injection port 44 Flow path 46 Imaging part 47 Display Unit 48 injection nozzle position adjustment unit 49 air supply unit 60 cutting means 70 cutting water injection nozzle means 71 imaging unit 72 cutting blade alternative jig 73 display unit

Claims (5)

A cutting apparatus comprising: a chuck table for holding a workpiece; and a cutting means for cutting the workpiece held on the chuck table,
The cutting means includes a cutting blade, a mount that supports the cutting blade, a spindle coupled to the mount, a housing that rotatably supports the spindle, and a blade cover that is fixed to the housing and covers the cutting blade And a cutting water spray nozzle means having a spray nozzle that is disposed on the blade cover and supplies cutting water to an outer peripheral portion of the cutting blade.
The cutting water jet nozzle means is
An imaging unit that images the outer peripheral part of the cutting blade of the cutting blade;
A display unit for displaying an image captured by the imaging unit;
An injection nozzle position adjusting unit that positions the injection nozzle at a required position in the rotational axis direction of the cutting blade;
A cutting apparatus comprising:   The cutting apparatus according to claim 1, wherein the imaging unit is disposed adjacent to the injection nozzle.   The cutting device according to claim 1, wherein the imaging unit is disposed in a flow path that reaches an injection port of the injection nozzle.   The cutting apparatus according to claim 3, further comprising an air supply unit that discharges residual cutting water in the distribution path. A cutting apparatus comprising: a chuck table for holding a workpiece; and a cutting means for cutting the workpiece held on the chuck table,
The cutting means includes a cutting blade, a mount that supports the cutting blade, a spindle coupled to the mount, a housing that rotatably supports the spindle, and a blade cover that is fixed to the housing and covers the cutting blade And a cutting water spray nozzle means having a spray nozzle that is disposed on the blade cover and supplies cutting water to an outer peripheral portion of the cutting blade.
The cutting water jet nozzle means is
A cutting blade substitute jig having an imaging unit that images the injection port of the injection nozzle at a position corresponding to the cutting blade;
A display unit for displaying an image captured by the imaging unit;
An injection nozzle position adjusting unit that positions the injection nozzle at a required position in the rotational axis direction of the cutting blade;
A cutting apparatus comprising:

Images