JP2007266268A - Thermocompression bonding jig, thermocompression bonding device, and board connecting method - Google Patents

Thermocompression bonding jig, thermocompression bonding device, and board connecting method Download PDF

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JP2007266268A
JP2007266268A JP2006088712A JP2006088712A JP2007266268A JP 2007266268 A JP2007266268 A JP 2007266268A JP 2006088712 A JP2006088712 A JP 2006088712A JP 2006088712 A JP2006088712 A JP 2006088712A JP 2007266268 A JP2007266268 A JP 2007266268A
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substrate
interval
thermocompression bonding
jig
electrode
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Shuji Hiramoto
修二 平元
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Toshiba Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermocompression bonding jig capable of a connection between boards at a high reliability. <P>SOLUTION: The thermocompression bonding jig 20 has a thermocompression face for connecting a first board 100 having a first electrode 102 arranged laterally at a given interval, with a second board 200 having a second electrode 202 arranged laterally at a given interval. The thermocompression face comprises a plurality of first grooves provided based on a first interval with a given depth, and a plurality of second grooves which are provided perpendicular to the first grooves, and provided based on a second interval with a given depth. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、熱圧着治具に係り、特に高い信頼性の基板間接続が可能な熱圧着治具に関する。   The present invention relates to a thermocompression bonding jig, and more particularly to a thermocompression bonding jig capable of highly reliable inter-substrate connection.

基板間接合方法の1つに熱圧着工法がある。熱圧着工法とは、圧着治具を瞬時に温め、その熱で被溶接物を溶かして接合する方法である。外部(セラミックヒーターチップ)から熱を与えて接合するので、基本原理は半田付けに近い技術である。主に樹脂類の接合、フラットケーブル類の半田付け、金属類のろう付け等に適している。   One method of bonding between substrates is a thermocompression bonding method. The thermocompression bonding method is a method in which a crimping jig is instantly warmed and the workpieces are melted and joined by the heat. Since heat is applied from the outside (ceramic heater chip), the basic principle is a technique close to soldering. Mainly suitable for joining resins, soldering flat cables, brazing metals, etc.

従来熱圧着工法は、圧着治具の圧着する部分が平面を有していたため、半田付け不良が発生しやすいという問題が生じていた。例えば、特許文献1ではこの問題を解決するために圧着面(押圧面)に多数の条溝を形成する圧着治具が提案されている。
特開平11−320088号公報(第4頁、図3)
Conventional thermocompression bonding methods have had a problem that soldering defects are likely to occur because the portion to be crimped of the crimping jig has a flat surface. For example, Patent Document 1 proposes a crimping jig that forms a large number of grooves on the crimping surface (pressing surface) in order to solve this problem.
Japanese Patent Laid-Open No. 11-320088 (page 4, FIG. 3)

上述した提案は、条溝の凹部に圧着時に圧着面に付着した溶融フラックスを流入させて熱伝導を良好に保持して半田付け不良を防止することにある。   The above-described proposal is to prevent the soldering failure by causing the molten flux adhering to the crimping surface to flow into the concave portion of the groove so as to maintain good heat conduction.

一方、ACF(Anisotropic Condactive Film)やACP(Anisotropic Conductive Paste)に代表される、FPC(Flexible Printed Circuit)とPWB(Printed Wiring Board)間の接合に利用される接着材料を用いた熱圧着接合工法において、近年I/O信号線数の増加により電極数が多くなる傾向がある。その結果、従来熱圧着工法で用いる平面のみの圧着治具では1つの電極当たりの圧着のための荷重(例えば10MPa以上)を確保するために、圧着治具に与える推力を高くする必要がある。従って熱圧着装置の仕様上の問題により、必要とされる推力を確保できなくなる場合が生ずるという問題がある。   On the other hand, a bonding method using FPC (Flexible Printed Circuit) and PWB (Printed Wired Bond) bonding materials using FPC (Flexible Printed Circuit) bonding, represented by ACF (Anisotropic Conductive Film) and ACP (Anisotropic Conductive Paste). In recent years, the number of electrodes tends to increase as the number of I / O signal lines increases. As a result, it is necessary to increase the thrust applied to the pressure bonding jig in order to secure a load (for example, 10 MPa or more) for pressure bonding per electrode in a flat surface pressure bonding jig used in the conventional thermocompression bonding method. Therefore, there is a problem that the required thrust force may not be ensured due to a problem in the specification of the thermocompression bonding apparatus.

また、携帯情報端末機器に代表される電子機器の軽薄短小化に伴い、例えばHDD等のモジュールとFPCやPWBとの接合等、当該電子機器内に収容される基板間接合において、接合面積が狭小となってきている。従って、熱圧着装置に用いる熱圧着治具の大きさも小さくなる傾向がある。   In addition, along with the reduction in size and size of electronic devices typified by portable information terminal devices, for example, bonding between substrates accommodated in the electronic device such as bonding of a module such as an HDD and an FPC or PWB is narrow. It has become. Therefore, the size of the thermocompression bonding jig used for the thermocompression bonding apparatus tends to be small.

熱圧着治具が小さくなると、それに対応して熱圧着治具に与えられる熱容量も小さくなる。このため、熱圧着治具の外周面等の直接外気に触れる面の温度が下がる傾向となる。   When the thermocompression bonding jig is reduced, the heat capacity given to the thermocompression bonding jig is also correspondingly reduced. For this reason, the temperature of the surface that directly contacts outside air such as the outer peripheral surface of the thermocompression bonding jig tends to decrease.

その結果、同じ熱圧着治具においても、例えば、中央部と両端部では、その温度が最大20℃〜30℃の温度差が生じ得る。従って、この温度差により熱圧着時にFPCや接合部材である接着剤の塑性変形の程度に著しい違いが生じ、接合不良発生の原因となってしまうという問題がある。 As a result, even in the same thermocompression bonding jig, for example, a temperature difference of 20 ° C. to 30 ° C. at the maximum can occur between the center and both ends. Therefore, this temperature difference causes a significant difference in the degree of plastic deformation of the FPC and the adhesive that is the joining member at the time of thermocompression bonding, which causes a problem of joining failure.

そこで本発明は、上記問題を解決する為になされたものであり、圧着面における溝部を所定の形態にすることで、高い信頼性の基板間接続が可能な熱圧着治具、熱圧着装置、基板接続方法を提供することを目的とする。   Therefore, the present invention has been made to solve the above problems, and by forming the groove portion on the crimping surface in a predetermined form, a thermocompression bonding jig, a thermocompression bonding apparatus, and the like that are capable of highly reliable inter-board connection, An object of the present invention is to provide a substrate connection method.

上記目的を達成するために、本発明に係る熱圧着治具は、幅方向に所定の間隔で配列された第1の電極部を有した第1の基板と、幅方向に前記所定の間隔で配列された第2の電極部を有した第2の基板とを接続するための圧着面を有した熱圧着治具であって、前記圧着面は、第1の間隔に基づいて複数設けられ、所定の深さを有した第1の溝部と、前記第1の溝部と垂直に設けられた第2の溝部であって、第2の間隔に基づいて複数設けられ、所定の深さを有した第2の溝部とを備えたことを特徴としている。   In order to achieve the above object, a thermocompression bonding jig according to the present invention includes a first substrate having first electrode portions arranged at a predetermined interval in the width direction, and the predetermined interval in the width direction. A thermocompression bonding jig having a crimping surface for connecting the second substrate having the arranged second electrode portions, wherein a plurality of the crimping surfaces are provided based on the first interval, A first groove portion having a predetermined depth and a second groove portion provided perpendicular to the first groove portion, wherein a plurality of the first groove portions are provided based on the second interval and have a predetermined depth. The second groove portion is provided.

また、本発明に係る熱圧着装置は、幅方向に所定の間隔で配列された第1の電極部を有した第1の基板、及び幅方向に前記所定の間隔で配列された第2の電極部を有した第2の基板とを接続部材を介して前記第1の基板の第1の電極部に対向するように前記第2の基板の第2の電極部を配して接続する熱圧着装置であって、接続対象の基板を配置するための台座と、前記第2の基板の第2の電極部の鉛直上から圧接および加熱する圧着面を有した熱圧着治具とであって、前記圧着面は、第1の間隔に基づいて複数設けられ、所定の深さを有した第1の溝部と、前記第1の溝部と垂直に設けられた第2の溝部であって、第2の間隔に基づいて複数設けられ、所定の深さを有した第2の溝部とを備えた熱圧着治具と、前記圧着治具の圧接及び加熱を制御するコントローラとを具備したことを特徴としている。   The thermocompression bonding apparatus according to the present invention includes a first substrate having first electrode portions arranged at a predetermined interval in the width direction, and second electrodes arranged at the predetermined interval in the width direction. Thermocompression bonding in which a second electrode portion of the second substrate is arranged and connected to a second substrate having a portion so as to face the first electrode portion of the first substrate via a connection member An apparatus, a pedestal for arranging a substrate to be connected, and a thermocompression bonding jig having a pressure bonding surface for pressure welding and heating from above the second electrode portion of the second substrate, A plurality of the crimping surfaces are provided based on a first interval, and are a first groove part having a predetermined depth, and a second groove part provided perpendicular to the first groove part. A thermocompression bonding jig provided with a plurality of second grooves having a predetermined depth, and pressure welding and heating of the crimping jig. It is characterized by comprising a controller for controlling.

また、本発明に係る基板接続方法は、幅方向に所定の間隔で配列された第1の電極部を有した第1の基板、及び幅方向に前記所定の間隔で配列された第2の電極部を有した第2の基板を用意し、前記第1電極部上に接続部材を配置し、前記接続部材を介して前記第1の基板の第1の電極に対向するように前記第2の基板の第2の電極部を配置し、前記第2の基板の第2の電極部の鉛直上からこの第2の電極部の覆いうる圧着面を有し、前記圧着面は、第1の間隔に基づいて複数設けられ、所定の深さを有した第1の溝部と、前記第1の溝部と垂直に設けられた第2の溝部であって、第2の間隔に基づいて複数設けられ、所定の深さを有した第2の溝部とた熱圧着治具を圧接し、前記圧着治具を加熱して前記第1の基板と前記第2基板とを接続することを特徴としている。   Further, the substrate connection method according to the present invention includes a first substrate having first electrode portions arranged at a predetermined interval in the width direction, and second electrodes arranged at the predetermined interval in the width direction. A second substrate having a portion is provided, a connection member is disposed on the first electrode portion, and the second electrode is disposed so as to face the first electrode of the first substrate through the connection member. A second electrode portion of the substrate is disposed, and has a pressure-bonding surface that can cover the second electrode portion from above the second electrode portion of the second substrate, and the pressure-bonding surface has a first interval. A plurality of first groove portions having a predetermined depth and a second groove portion provided perpendicularly to the first groove portions, the plurality of grooves being provided based on the second interval, A thermocompression bonding jig having a second groove portion having a predetermined depth is pressed and heated to connect the first substrate and the second substrate. It is characterized in Rukoto.

高い信頼性の基板間接続が可能となる。   Highly reliable board-to-board connection is possible.

以下、本発明の実施の形態を図1〜図9を用いて説明する。図1は、本発明の実施の形態に係る熱圧着装置を示した図である。図1に示すように、本発明に係る熱圧着装置1は、台座10と、圧着治具20と、コントローラ30とを主たる構成要素とする。   Hereinafter, embodiments of the present invention will be described with reference to FIGS. FIG. 1 is a view showing a thermocompression bonding apparatus according to an embodiment of the present invention. As shown in FIG. 1, the thermocompression bonding apparatus 1 according to the present invention includes a pedestal 10, a crimping jig 20, and a controller 30 as main components.

台座10は、例えば接続対象である2つの基板(後述する第1の基板100、第2の基板200)を載せる台としての役目を担う。   The pedestal 10 serves as a table on which, for example, two substrates to be connected (a first substrate 100 and a second substrate 200 described later) are placed.

圧着治具20は、上記2つの基板を接続するための治具である。圧着治具20は、後述するように第2の基板200上の第2の接続部204(図4参照)を覆うように載せ、圧着治具202を加圧・加熱することで、第1の基板100と第2の基板200とを接続部材300を介して接続する。尚、圧着治具20はコントローラ30に制御されるためにコントローラ30と接続されている。   The crimping jig 20 is a jig for connecting the two substrates. As will be described later, the crimping jig 20 is placed so as to cover the second connection portion 204 (see FIG. 4) on the second substrate 200, and the first and second crimping jigs 202 are pressurized and heated to thereby form the first The substrate 100 and the second substrate 200 are connected via the connection member 300. The crimping jig 20 is connected to the controller 30 in order to be controlled by the controller 30.

圧着治具20は、セラミックや金属等の材質で形成され、複数の溝部(後述する第1の溝部20b及び第2の溝部20c)を有する。圧着治具20の形状については後述する。   The crimping jig 20 is made of a material such as ceramic or metal, and has a plurality of groove portions (a first groove portion 20b and a second groove portion 20c described later). The shape of the crimping jig 20 will be described later.

コントローラ30は、圧着治具20の加圧や加熱を調整する制御部である。コントローラ30は、加圧や加熱のプロファイル等を表示する表示部31と、圧着治具20の位置、加圧、加熱を操作するための操作部32を有している。   The controller 30 is a control unit that adjusts the pressurization and heating of the crimping jig 20. The controller 30 includes a display unit 31 that displays a pressurization and heating profile and the like, and an operation unit 32 for operating the position, pressurization, and heating of the crimping jig 20.

次に本発明の実施の形態に係る基板接続方法を説明する。図2は、本発明の実施の形態に係る基板接続方法を示したフローチャートである。図5は、本発明の実施の形態に係る基板接続方法を実施した場合の各ステップを示した図である。   Next, a substrate connecting method according to an embodiment of the present invention will be described. FIG. 2 is a flowchart showing a substrate connection method according to an embodiment of the present invention. FIG. 5 is a diagram showing each step when the substrate connecting method according to the embodiment of the present invention is performed.

まず、本実施の形態に係る基板接続を行うために接続の対象となる基板(第1の基板100及び第2の基板200)を用意する(ステップS10)。   First, substrates (first substrate 100 and second substrate 200) to be connected are prepared in order to perform substrate connection according to the present embodiment (step S10).

図3は第1の基板100を示した図である。図3(a)は、第1の基板100を天面から見た図であり、図3(b)は、A−A断面を示した図である。図3に示すように第1の基板100は、絶縁材である基材101の上に導電材である複数の配線102が所定の間隔で積層され、その上に被覆材103が積層されている。また、第1の基板100は、基板間接続を行うために配線102の一部が露出する第1の接続部104の領域が設けられている。尚、配線102がない部分は基材101の上に直接被覆材103が積層されている。配線102の露出部分は電極としての役割を担う。   FIG. 3 is a view showing the first substrate 100. FIG. 3A is a view of the first substrate 100 as viewed from the top, and FIG. 3B is a view showing a cross section taken along the line AA. As shown in FIG. 3, in the first substrate 100, a plurality of wirings 102, which are conductive materials, are laminated at a predetermined interval on a base material 101, which is an insulating material, and a covering material 103 is laminated thereon. . In addition, the first substrate 100 is provided with a region of the first connection portion 104 where a part of the wiring 102 is exposed in order to perform inter-substrate connection. Note that the covering material 103 is directly laminated on the base material 101 in a portion where the wiring 102 is not provided. The exposed portion of the wiring 102 serves as an electrode.

図4は第2の基板200を示した図である。図4(a)は、第2の基板200を天面から見た図であり、図4(b)は、B−B断面を示した図である。図4に示すように第2の基板200は、絶縁材である基材201の上に導電材である複数の配線202が配線102と同じ所定の間隔で積層され、その上に被覆材203が積層されている。また、第2の基板200は、基板間接続を行うために配線202の一部が露出する第2の接続部204の領域が設けられている。尚、配線202がない部分は基材201の上に直接被覆材203が積層されている。配線202の露出部分は電極としての役割を担う。第2の基板200は、例えばFPCである。   FIG. 4 is a view showing the second substrate 200. FIG. 4A is a view of the second substrate 200 viewed from the top surface, and FIG. 4B is a view showing a BB cross section. As shown in FIG. 4, in the second substrate 200, a plurality of wirings 202 that are conductive materials are stacked on a base material 201 that is an insulating material at the same predetermined intervals as the wirings 102, and a covering material 203 is formed thereon. Are stacked. In addition, the second substrate 200 is provided with a region of a second connection portion 204 where a part of the wiring 202 is exposed in order to perform inter-substrate connection. Note that the covering material 203 is directly laminated on the base material 201 in a portion where the wiring 202 is not provided. The exposed portion of the wiring 202 serves as an electrode. The second substrate 200 is, for example, an FPC.

ステップS10で示した基板を用意した後、次に図5(a)に示すように第1の基板100を台座10に設置する(ステップS20)。   After preparing the substrate shown in step S10, next, the first substrate 100 is placed on the base 10 as shown in FIG. 5A (step S20).

次に、図5(b)に示すように第1の基板100の第1の接続部104上に接続部材300を配置する(ステップS30)。ここで接続部材300は、例えばACF、ACP、NCP(Non−Conductive Paste)、NCF(Non−Conductive Film)、その他熱可塑性接着材等である。   Next, as shown in FIG. 5B, the connection member 300 is disposed on the first connection portion 104 of the first substrate 100 (step S30). Here, the connection member 300 is, for example, ACF, ACP, NCP (Non-Conductive Paste), NCF (Non-Conductive Film), or other thermoplastic adhesives.

次に、図5(c)に示すように第1の基板100上に第2の基板200を配置する(ステップS40)。この配置は第1の接続部104と第2の接続部204とを対向させるように配置する。尚、図5(f)は圧着治具20の詳細を示している。   Next, as shown in FIG. 5C, the second substrate 200 is placed on the first substrate 100 (step S40). In this arrangement, the first connection unit 104 and the second connection unit 204 are arranged to face each other. FIG. 5F shows the details of the crimping jig 20.

次に、図5(d)に示すようにコントローラ30を操作することにより第2の基板200上から圧着治具20を当接し加圧する(ステップS50)。更にコントローラ30を操作することにより圧着治具20を加熱する(ステップS60)。上記加圧と加熱を所定時間その状態を保持し、第1の基板100と第2の基板200との基板間接続を行う。尚、ステップS50とステップS60とを入れ替えて予め圧着治具20を加熱しておいても良い。   Next, as shown in FIG. 5D, by operating the controller 30, the pressure bonding jig 20 is brought into contact with and pressed from the second substrate 200 (step S50). Further, the crimping jig 20 is heated by operating the controller 30 (step S60). The pressurization and heating are maintained for a predetermined time, and the first substrate 100 and the second substrate 200 are connected to each other. It should be noted that step S50 and step S60 may be interchanged to heat the crimping jig 20 in advance.

図6は図5(d)のC−C断面を示した図である。ここで、図6(a)は全体を示しており、図6(b)は圧着治具20の詳細を示している。図6を見てわかる通り、圧着治具20は、第2の基板200と略同程度の幅Wを有しており、圧着面20aには、その一部が電極としての役割を担う配線102や配線202と対向した複数の溝部(第1の溝部20b)を有している。   FIG. 6 is a view showing a CC cross section of FIG. Here, FIG. 6A shows the whole, and FIG. 6B shows the details of the crimping jig 20. As can be seen from FIG. 6, the crimping jig 20 has a width W that is substantially the same as that of the second substrate 200, and a part of the crimping surface 20 a that serves as an electrode is a wiring 102. And a plurality of groove portions (first groove portions 20b) facing the wiring 202.

また、第1の溝部20bの深さ20bLは、圧着時の第2の基板等の食い込み等を考慮し、少なくとも第2の基板200の厚さと接続部材300との総和以上であることが好ましい。   The depth 20bL of the first groove 20b is preferably at least equal to or greater than the sum of the thickness of the second substrate 200 and the connection member 300, taking into account the biting of the second substrate and the like during crimping.

このように、第1の溝部20bを設けることにより、圧着面20aにおいて、実際に第2の基板200と接する面が小さくなり、同じ推力でも単位面積当たりの圧力が大きくなり、少ない推力で大きな圧力を加えることが可能となる。従って、熱圧着装置の仕様として必要以上に大きな圧力を確保する必要が少なくなる。従って、場合により従来の熱圧着装置を用いても接続の信頼性を確保することが出来る。   As described above, by providing the first groove portion 20b, the surface that is actually in contact with the second substrate 200 in the pressure-bonding surface 20a is reduced, and the pressure per unit area is increased even with the same thrust, and the pressure is increased with less thrust. Can be added. Therefore, it is less necessary to secure a pressure larger than necessary as the specification of the thermocompression bonding apparatus. Therefore, connection reliability can be ensured even if a conventional thermocompression bonding apparatus is used.

尚、第1の間隔20bTは、実際に第2の基板200に接する圧着面が電極上に設けられるように電極である各配線(配線102や配線202)の間隔と同等とすることが好ましい。これにより、電極上に集中的に圧力をかけることができ、第1の基板100と第2の基板200との接続信頼性を高めることがきる。   The first interval 20bT is preferably equal to the interval between the wirings (wirings 102 and 202) that are electrodes so that the crimping surface that is actually in contact with the second substrate 200 is provided on the electrodes. Thereby, pressure can be applied intensively on the electrodes, and the connection reliability between the first substrate 100 and the second substrate 200 can be improved.

図7は、図6のD1−D1断面又はD2−D2断面を示した図、図8は、図6のE1−E1断面又はE2−E2断面を示した図、図9は、図6のF1−F1断面又はF2−F2断面を示した図である。   7 is a diagram showing the D1-D1 cross section or D2-D2 cross section of FIG. 6, FIG. 8 is a diagram showing the E1-E1 cross section or E2-E2 cross section of FIG. 6, and FIG. 9 is F1 of FIG. It is the figure which showed -F1 cross section or F2-F2 cross section.

図7〜図9を見てわかる通り、圧着治具20の圧着面(20a)には、前記第1の溝部20bと垂直に設けられた複数の溝部(第2の溝部20c)を有している。また、第2の溝部20cの夫々の間隔(第2の間隔20cT)は、中央部よりも両端部の方が密であることが好ましい。即ち、図7〜図9に示すように、図9に比して図8の方が第2の溝部20cの数が多くなっており、更に図8に比して図7の方が第2の溝部20cの数が多くなっている。   As can be seen from FIGS. 7 to 9, the crimping surface (20a) of the crimping jig 20 has a plurality of grooves (second grooves 20c) provided perpendicular to the first grooves 20b. Yes. Further, it is preferable that both ends of the second groove portion 20c (second interval 20cT) are denser at the both end portions than at the central portion. That is, as shown in FIGS. 7 to 9, the number of second grooves 20c is larger in FIG. 8 than in FIG. 9, and the second groove 20c in FIG. The number of the groove portions 20c is increased.

このように、第2の間隔を中央部よりも両端部に密に設けることとしたのは、圧着治具の表面温度と印加される圧力と接着剤の拡がり量とを考慮したためである。以下にその詳細を説明する。   The reason why the second interval is provided closer to both end portions than the central portion is because the surface temperature of the crimping jig, the applied pressure, and the amount of adhesive spread are taken into consideration. Details will be described below.

第2の間隔20cTを中央部よりも両端部に密に設けているため、圧着治具20の圧着面20aにおいては、長さL方向の端部に行くほど実際に第2の基板200と接する面が小さくなり、中央部に比して単位面積当りに大きな圧力が加わることとなる。   Since the second interval 20cT is provided closer to both ends than the center portion, the crimping surface 20a of the crimping jig 20 is actually in contact with the second substrate 200 toward the end in the length L direction. A surface becomes small and a big pressure will be added per unit area compared with a center part.

また、第2の間隔20cTを中央部よりも両端部により密に設けているため、第1の溝部20bと第2の溝部20cの深さ20cL方向で形成される外気と触れる表面積が、長さL方向の端部に行くほど、広くなり、中央部に比して熱伝導が促進しやすくなる。即ち、長さ方向の端部は熱伝導が促進されるため、中央部の熱が長さL方向の端部に伝わりやすくなる。従って、従来熱圧着治具が小さくなった場合に生じていた熱圧着治具の中央部と両端部との温度差の問題が解消されやすくなる。尚、深さ20cLと深さ20bLとは同じ深さであることが好ましい。   Further, since the second interval 20cT is provided closer to both ends than the center portion, the surface area of the first groove portion 20b and the second groove portion 20c that is in contact with the outside air formed in the depth 20cL direction is long. The closer to the end in the L direction, the wider, and heat conduction is easier to promote than at the center. That is, since heat conduction is promoted at the end portion in the length direction, heat at the center portion is easily transmitted to the end portion in the length L direction. Therefore, the problem of the temperature difference between the center portion and both end portions of the thermocompression bonding jig, which has occurred when the thermocompression bonding jig is reduced in size, is easily solved. In addition, it is preferable that the depth 20cL and the depth 20bL are the same depth.

一般的なACFや熱可塑性接着剤では、熱圧着時の樹脂拡がり量は印加する圧力および温度の増加に対応して拡がりやすいことが経験上分かっている。これは、例えば、上述した溝部20bや20cを有しない従来型の平面のみの圧着治具の場合、その端部では中央部に比して圧力がかかり、接着剤樹脂の流動性が低下すること等から言える。   Experience has shown that with general ACFs and thermoplastic adhesives, the amount of resin expansion during thermocompression bonding tends to expand in response to increases in applied pressure and temperature. This is because, for example, in the case of a conventional flat-type crimping jig that does not have the grooves 20b and 20c described above, pressure is applied at the end compared to the center, and the fluidity of the adhesive resin decreases. Etc.

以上より、溝部20cの形成は、接続部材300の流動を促進させる効果が生ずることとなる。これにより、圧着治具の長さ方向にも接続部材300が均一に拡がり、結果として第1の基板100と第2の基板200との接続信頼性を高めることがきる。   As described above, the formation of the groove 20c has an effect of promoting the flow of the connection member 300. As a result, the connection member 300 is spread evenly in the length direction of the crimping jig, and as a result, the connection reliability between the first substrate 100 and the second substrate 200 can be improved.

次に、図5(e)に示すように当接していた圧着治具20を解除し(ステップS70)、第1の基板100と第2の基板200との基板間接続が完了する。   Next, as shown in FIG. 5E, the crimping jig 20 that has been in contact is released (step S70), and the inter-substrate connection between the first substrate 100 and the second substrate 200 is completed.

上述した基板接続方法を実施することにより、高い信頼性の基板間接続が可能となる。   By performing the above-described substrate connection method, highly reliable substrate-to-substrate connection is possible.

本発明の実施の形態に係る熱圧着装置を示した図。The figure which showed the thermocompression bonding apparatus which concerns on embodiment of this invention. 本発明の実施の形態に係る基板接続方法を示したフローチャート。The flowchart which showed the board | substrate connection method which concerns on embodiment of this invention. 第1の基板100を示した図。The figure which showed the 1st board | substrate 100. FIG. 第2の基板200を示した図。The figure which showed the 2nd board | substrate 200. FIG. 本発明の実施の形態に係る基板接続方法を実施した場合の各ステップを示した図。The figure which showed each step at the time of implementing the board | substrate connection method which concerns on embodiment of this invention. 図5(d)のC−C断面を示した図。The figure which showed CC cross section of FIG.5 (d). 図6のD1−D1断面又はD2−D2断面を示した図。The figure which showed the D1-D1 cross section or D2-D2 cross section of FIG. 図6のE1−E1断面又はE2−E2断面を示した図。The figure which showed the E1-E1 cross section or E2-E2 cross section of FIG. 図6のF1−F1断面又はF2−F2断面を示した図。The figure which showed the F1-F1 cross section or F2-F2 cross section of FIG.

符号の説明Explanation of symbols

1,1a 熱圧着装置
10 台座
20,21 圧着治具
20a 圧着面
20b 第1の溝部
20c 第2の溝部
20bT 第1の間隔
20cT 第2の間隔
20bL,20cL 深さ
30,30a コントローラ
31 表示部
32 操作部
300 接続部材
100 第1の基板
101 基材
102 配線
103 被覆材
104 第1の接続部
200 第2の基板
201 基材
202 配線
203 被覆材
204 第2の接続部
DESCRIPTION OF SYMBOLS 1,1a Thermocompression bonding apparatus 10 Base 20,21 Crimping jig 20a Crimp surface 20b 1st groove part 20c 2nd groove part 20bT 1st space | interval 20cT 2nd space | interval 20bL, 20cL Depth 30, 30a Controller 31 Display part 32 Operation unit 300 Connection member 100 First substrate 101 Base material 102 Wiring 103 Coating material 104 First connection unit 200 Second substrate 201 Base material 202 Wiring 203 Coating material 204 Second connection unit

Claims (9)

幅方向に所定の間隔で配列された第1の電極部を有した第1の基板と、幅方向に前記所定の間隔で配列された第2の電極部を有した第2の基板とを接続するための圧着面を有した熱圧着治具であって、
前記圧着面は、
第1の間隔に基づいて複数設けられ、所定の深さを有した第1の溝部と、
前記第1の溝部と垂直に設けられた第2の溝部であって、第2の間隔に基づいて複数設けられ、所定の深さを有した第2の溝部と
を備えたことを特徴とする熱圧着治具。
Connecting a first substrate having first electrode portions arranged at a predetermined interval in the width direction and a second substrate having second electrode portions arranged at a predetermined interval in the width direction A thermocompression bonding jig having a crimping surface for
The crimping surface is
A plurality of first grooves having a predetermined depth provided based on the first interval;
A second groove part provided perpendicular to the first groove part, wherein a plurality of second groove parts are provided based on the second interval and have a predetermined depth. Thermocompression jig.
前記第1の間隔は、前記所定の間隔であることを特徴とする請求項1に記載の熱圧着治具。   The thermocompression bonding jig according to claim 1, wherein the first interval is the predetermined interval. 前記第2の間隔は、中央部よりも両端部の方が密であることを特徴とする請求項1に記載の熱圧着治具。   The thermocompression bonding jig according to claim 1, wherein the second interval is denser at both end portions than at the center portion. 幅方向に所定の間隔で配列された第1の電極部を有した第1の基板、及び幅方向に前記所定の間隔で配列された第2の電極部を有した第2の基板とを接続部材を介して前記第1の基板の第1の電極部に対向するように前記第2の基板の第2の電極部を配して接続する熱圧着装置であって、
接続対象の基板を配置するための台座と、
前記第2の基板の第2の電極部の鉛直上から圧接および加熱する圧着面を有した熱圧着治具とであって、前記圧着面は、第1の間隔に基づいて複数設けられ、所定の深さを有した第1の溝部と、前記第1の溝部と垂直に設けられた第2の溝部であって、第2の間隔に基づいて複数設けられ、所定の深さを有した第2の溝部とを備えた熱圧着治具と、
前記圧着治具の圧接及び加熱を制御するコントローラと
を具備したことを特徴とする熱圧着装置。
Connecting a first substrate having first electrode portions arranged at predetermined intervals in the width direction and a second substrate having second electrode portions arranged at predetermined intervals in the width direction A thermocompression bonding apparatus for arranging and connecting the second electrode portion of the second substrate so as to face the first electrode portion of the first substrate via a member,
A pedestal for placing the board to be connected;
A thermocompression-bonding jig having a pressure-bonding surface for pressure-welding and heating from above the second electrode portion of the second substrate, wherein a plurality of the pressure-bonding surfaces are provided on the basis of a first interval; A first groove portion having a depth of 2 and a second groove portion provided perpendicularly to the first groove portion, wherein a plurality of grooves are provided based on the second interval and have a predetermined depth. A thermocompression bonding jig provided with two grooves,
A thermocompression bonding apparatus comprising a controller for controlling the pressure welding and heating of the crimping jig.
前記第1の間隔は、前記所定の間隔であることを特徴とする請求項4に記載の熱圧着装置。   The thermocompression bonding apparatus according to claim 4, wherein the first interval is the predetermined interval. 前記第2の間隔は、中央部よりも両端部の方が密であることを特徴とする請求項4に記載の熱圧着装置。   The thermocompression bonding apparatus according to claim 4, wherein the second interval is denser at both end portions than at the center portion. 幅方向に所定の間隔で配列された第1の電極部を有した第1の基板、及び幅方向に前記所定の間隔で配列された第2の電極部を有した第2の基板を用意し、
前記第1電極部上に接続部材を配置し、
前記接続部材を介して前記第1の基板の第1の電極に対向するように前記第2の基板の第2の電極部を配置し、
前記第2の基板の第2の電極部の鉛直上からこの第2の電極部の覆いうる圧着面を有し、前記圧着面は、第1の間隔に基づいて複数設けられ、所定の深さを有した第1の溝部と、前記第1の溝部と垂直に設けられた第2の溝部であって、第2の間隔に基づいて複数設けられ、所定の深さを有した第2の溝部とた熱圧着治具を圧接し、
前記圧着治具を加熱して前記第1の基板と前記第2基板とを接続する
ことを特徴とする基板接続方法。
A first substrate having first electrode portions arranged at predetermined intervals in the width direction and a second substrate having second electrode portions arranged at predetermined intervals in the width direction are prepared. ,
A connecting member is disposed on the first electrode portion;
Disposing the second electrode portion of the second substrate so as to face the first electrode of the first substrate via the connection member;
There is a pressure-bonding surface that can be covered by the second electrode portion from above the second electrode portion of the second substrate, and a plurality of the pressure-bonding surfaces are provided on the basis of the first interval, and have a predetermined depth. A first groove portion having a first groove portion and a second groove portion provided perpendicular to the first groove portion, wherein a plurality of second groove portions are provided based on a second interval and have a predetermined depth. Press the thermocompression bonding jig
A substrate connecting method, wherein the crimping jig is heated to connect the first substrate and the second substrate.
前記第1の間隔は、前記所定の間隔であることを特徴とする請求項7に記載の基板接続方法。   The substrate connection method according to claim 7, wherein the first interval is the predetermined interval. 前記第2の間隔は、中央部よりも両端部の方が密であることを特徴とする請求項7に記載の基板接続方法。   The substrate connection method according to claim 7, wherein the second interval is denser at both end portions than at the center portion.
JP2006088712A 2006-03-28 2006-03-28 Thermocompression bonding jig, thermocompression bonding device, and board connecting method Withdrawn JP2007266268A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013175647A (en) * 2012-02-27 2013-09-05 Disco Abrasive Syst Ltd Resin sticking device
CN113441805A (en) * 2021-06-29 2021-09-28 昂纳信息技术(深圳)有限公司 FPC (Flexible printed Circuit) separation device, system and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013175647A (en) * 2012-02-27 2013-09-05 Disco Abrasive Syst Ltd Resin sticking device
CN113441805A (en) * 2021-06-29 2021-09-28 昂纳信息技术(深圳)有限公司 FPC (Flexible printed Circuit) separation device, system and method

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