JP2007260678A - Microchemical chip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchemical chip which has high productivity, is inexpensive, has an excellent chemical resistance and can be used under various conditions, and to provide a method for manufacturing the same. <P>SOLUTION: The microchemical chip is manufactured by previously pressing a die having a predetermined shape against the surface of a ceramic green sheet 32 to form a groove part 36, stacking another ceramic green sheet 31 so as to cover the groove part 36, sintering the stacked ceramic green sheets 31, 32 at a predetermined temperature to form a base formed of a ceramic material incorporating flow passages through which a fluid to be treated passes. This microchemical chip can be manufactured with high productivity and low manufacturing cost, and thus is inexpensive, and, at the same time, has excellent chemical resistance and can be used under various conditions. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a microchemical chip capable of performing a predetermined process such as reaction or analysis on a fluid to be processed such as a substrate or a reagent flowing in a minute channel.

  In recent years, in the field of chemical technology and biotechnology, research for performing reaction to a sample, analysis of a sample, and the like in a minute region has been performed, and a micro electro mechanical system (abbreviation: MEMS). ) Microchemical systems are being researched and developed using technologies to reduce the size of systems such as chemical reactions, biochemical reactions, and sample analysis.

  Reactions and analyzes in a microchemical system are performed using a single chip called a microchemical chip on which a microchannel, a micropump, a microreactor, and the like are formed. For example, a supply port for supplying a fluid such as a sample or a reagent and a sampling port for deriving a processed fluid are formed on a single substrate made of silicon, glass, or resin. There has been proposed a microchemical chip in which a mouth is connected by a microchannel having a small cross-sectional area, and a micropump for liquid feeding is disposed at an appropriate position in the microchannel (see Patent Document 1 and Patent Document 2). ). In addition, a capillary electrophoresis type using an electroosmosis phenomenon instead of a micropump has been proposed as a means for feeding liquid (see Patent Document 3). In these microchemical chips, the microchannels merge or branch at a predetermined position, and the fluid is mixed at the junction or the fluid is separated at the branch.

  In the microchemical system, since the devices and methods are miniaturized compared to the conventional system, the reaction surface area per unit volume of the sample can be increased, and the reaction time can be greatly reduced. In addition, since the flow rate can be precisely controlled, reaction and analysis can be performed efficiently.

Furthermore, the amount of samples and reagents necessary for reaction and analysis can be reduced.

  Because of these advantages, application of microchemical systems to the medical field is expected. For example, by using a microchemical chip for a blood test, the amount of blood as a sample can be reduced, so that the burden on the patient can be reduced. In addition, since the amount of reagent necessary for the inspection can be reduced, the cost of the inspection can be reduced.

Further, in the medical field, it is considered to combine a semiconductor technology with a microchemical chip. For example, as a device for testing the blood of a patient at home or on the go and sending the test results to a medical institution, in addition to a microchannel, micropump, and microreactor, blood is added to a single substrate made of silicon. Shows the concept of a “healthcare device” equipped with a needle to collect, a filter to filter blood and a micro-spectrometer to analyze blood, a microplasma power supply, an integrated circuit, a detection circuit (Refer nonpatent literature 1).
Japanese Patent Laid-Open No. 2002-214241 (page 4-5, FIG. 1) Japanese Patent Laid-Open No. 2002-233792 (page 5-6, FIGS. 1 and 3) JP 2001-108619 A (5th page, FIG. 1 and FIG. 2) “Nikkei MICRODEVICES, July 2000 issue”, Nikkei BP, July 2000, p. 88-97

  Since the substrate of the above-described microchemical chip is made of silicon, glass, or resin, it is necessary to perform etching using the MEMS technique when forming the flow path.

For example, in the technique described in Patent Document 2, a microchip having a protrusion in a flow path is manufactured by performing etching on a silicon substrate many times. Therefore, since the productivity is low and the manufacturing cost is high, a microchemical chip using a substrate made of silicon, glass or resin is expensive. In addition, since the etching process cannot control the surface shape of the side wall of the flow channel, it is difficult to form a flow channel having a desired surface shape on the side wall.

  In addition, the use conditions of the microchemical chip using the substrate made of resin are limited due to the problem of chemical resistance.

  An object of the present invention is to provide a microchemical chip that has high productivity, is inexpensive, has excellent chemical resistance, and can be used under various conditions.

  The present invention is a microchemical chip having a base on which a flow path for flowing a fluid to be processed is formed, and performing a predetermined process on the liquid to be processed flowing through the flow path, wherein the base is made of a ceramic material. And a supply unit that allows the fluid to be processed to flow into the flow path, a sampling unit that extracts the processed fluid to the outside, and a processing unit that performs the processing, and the processing unit includes a predetermined substance. Is temporarily fixed, and a fluid to be treated is caused to flow into the flow path from the supply part, and the fluid to be treated is caused to react with the substance, and then the fluid after reaction is led out from the sampling part. This is a microchemical chip characterized by that.

  According to the present invention, a fluid to be processed such as a specimen or a substrate flows through a flow path formed in a substrate made of a ceramic material, and the fluid to be processed flowing through the flow path is predetermined for analysis or reaction. Processing is performed. Since the substrate is made of a ceramic material, it has a flow path by performing simple processing without performing complicated processing such as etching necessary for forming a flow channel in a substrate made of silicon, glass, or resin. A substrate can be formed. Therefore, the microchemical chip of the present invention is inexpensive because of high productivity and low manufacturing cost. In addition, since the ceramic material is superior in chemical resistance compared to a resin or the like, the microchemical chip of the present invention can be used under various conditions.

That is, when the substrate is made of a ceramic material, it is possible to obtain a microchemical chip that has high productivity, is inexpensive, has excellent chemical resistance, and can be used under various conditions.

Further, in the present invention, the base includes a supply unit that allows the fluid to be processed to flow into the flow path, and a sampling unit that guides the processed fluid to the outside.
A fluid to be treated is caused to flow into the flow path from the supply unit, and after a predetermined process is performed on the fluid to be treated, the processed fluid is led out from the sampling unit to the outside.

  According to the present invention, when the fluid to be treated is caused to flow into the flow path from the supply portion, the fluid to be treated is introduced to the outside from the collection portion after the fluid to be treated is subjected to a predetermined process. Therefore, for example, to obtain a microchemical chip that allows a fluid containing a substrate to flow into a flow path from a supply section, reacts the substrate at a predetermined position in the flow path, and then extracts a reaction product from the collection section. Can do.

  According to another aspect of the present invention, there is provided a base body made of a ceramic material having a groove formed on one surface thereof, and a covering portion that forms a flow path for circulating a fluid to be treated by covering the one surface of the base body with the covering portion. A microchemical chip that performs a predetermined process on the fluid to be treated flowing through the flow path, and a supply unit that allows the fluid to be treated to flow into the flow path, and a sampling for deriving the processed fluid to the outside And a processing unit that performs the processing, and a predetermined substance is temporarily fixed in the processing unit, and the fluid to be processed flows into the flow path from the supply unit, and the processing target that has flowed in A microchemical chip characterized in that after reacting a fluid with the substance, the fluid after reaction is led out from the sampling part.

  According to the present invention, the substrate includes a substrate body made of a ceramic material and a coating portion, and the fluid to be processed such as a specimen or a substrate covers the one surface of the substrate body having a groove formed on one surface with the coating portion. Then, a predetermined process such as analysis or reaction is performed on the fluid to be processed flowing through the flow path formed by the above process. Since the base body is made of a ceramic material, the flow path can be obtained by performing simple processing without performing complicated processing such as etching necessary for forming the flow path in the base body made of silicon, glass or resin. It is possible to form a base body having the following. Therefore, the microchemical chip of the present invention is inexpensive because of high productivity and low manufacturing cost. In addition, since the ceramic material is superior in chemical resistance compared to a resin or the like, the microchemical chip of the present invention can be used under various conditions. That is, when the base body is made of a ceramic material, it is possible to obtain a microchemical chip that has high productivity, is inexpensive, has excellent chemical resistance, and can be used under various conditions.

  According to the present invention, the base includes a supply unit that allows a fluid to be processed to flow into the flow path, and a collection unit that guides the processed fluid to the outside, and the fluid to be processed is supplied from the supply unit to the flow path. And after the fluid to be processed is subjected to a predetermined process, the processed fluid is led out from the sampling unit.

  According to the present invention, when the fluid to be treated is caused to flow into the flow path from the supply portion, the fluid to be treated is introduced to the outside from the collection portion after the fluid to be treated is subjected to a predetermined process. Therefore, for example, to obtain a microchemical chip that allows a fluid containing a substrate to flow into a flow path from a supply section, reacts the substrate at a predetermined position in the flow path, and then extracts a reaction product from the collection section. Can do.

  The microchemical chip of the present invention is, for example, manufactured by the following manufacturing method, that is, forming a groove by pressing a mold having a predetermined shape on the surface of the ceramic green sheet, and forming the groove on the surface of the ceramic green sheet on which the groove is formed. In another embodiment of the present invention, the substrate is formed by laminating another ceramic green sheet so as to cover the groove, and sintering the laminated ceramic green sheet at a predetermined temperature. can do.

  According to the above-mentioned method, by pressing a mold on the surface of the ceramic green sheet to form a groove, another ceramic green sheet is laminated so as to cover the groove, and the laminated ceramic green sheet is sintered. A substrate having a flow path is formed. Therefore, a microchemical chip can be manufactured by performing simple processing without performing complicated processing such as etching processing required when forming a flow path in a substrate made of silicon, glass, or resin. . Further, in the above-described microchemical chip manufacturing method, the shape of the pressed mold is transferred to the groove portion serving as the flow path. Therefore, by adjusting the surface shape of the mold, the bottom surface and the side wall have the desired surface shape. The flow path which has can be formed easily.

In the above method, in forming the substrate by firing and curing a laminate of three or more ceramic green sheets,
On the surface of two or more ceramic green sheets, a mold having a predetermined shape is pressed to form grooves, and through holes for communicating the grooves formed on different ceramic green sheets are formed as necessary. And
On the surface of the ceramic green sheet in which the groove is formed, another ceramic green sheet is laminated so as to cover the groove,
The substrate is formed by sintering the laminated ceramic green sheets at a predetermined temperature.

  According to the above-described method, when a substrate is formed by sintering a laminate of three or more ceramic green sheets, the mold is pressed against the surface of the two or more ceramic green sheets. In addition, a through hole for communicating the groove portions formed in different ceramic green sheets is formed as necessary, and another ceramic is formed on the surface of the ceramic green sheet on which the groove portions are formed so as to cover the groove portions. By stacking the green sheets and sintering the stacked ceramic green sheets, a substrate having a three-dimensional flow path is formed.

  For example, when a microchemical chip substrate is formed by sintering a laminate of three ceramic green sheets, the substrate is formed as follows.

First, a die having a predetermined shape is pressed on the surface of two ceramic green sheets to form a groove portion, and two ceramic green sheets having the groove portion are formed on one of the two ceramic green sheets. A through hole is formed for communicating the grooves formed in the green sheet. Next, the ceramic green sheet in which the groove and the through hole are formed is laminated on the surface of the ceramic green sheet in which only the groove is formed so as to cover the groove of the ceramic green sheet. Further, another ceramic green sheet is laminated on the surface of the ceramic green sheet in which the groove and the through hole are formed so as to cover the groove of the ceramic green sheet, and the laminated ceramic green sheet is sintered at a predetermined temperature. To form a substrate. By forming the substrate in this manner, a microchemical chip in which the flow path is three-dimensionally formed can be manufactured.

The microchemical chip of the present invention is, for example, the following production method, that is,
On the surface of the ceramic green sheet, press a mold with a predetermined shape to form a groove,
The base body is formed by sintering the ceramic green sheet in which the groove is formed at a predetermined temperature.
The substrate is formed by covering the groove on the surface of the substrate body with a covering portion, and can be manufactured by a method for manufacturing a microchemical chip.

  According to the above manufacturing method, a die is pressed on the surface of the ceramic green sheet to form a groove, and the ceramic green sheet with the groove formed is sintered at a predetermined temperature to form a base body, and the base A base having a flow path is formed by covering the groove on the surface of the main body with a covering.

Therefore, a microchemical chip can be manufactured by performing simple processing without performing complicated processing such as etching processing required when forming a flow path in a substrate made of silicon, glass, or resin. .

Further, in the above-described microchemical chip manufacturing method, the shape of the pressed mold is transferred to the groove portion serving as the flow path. Therefore, by adjusting the surface shape of the mold, the bottom surface and the side wall have the desired surface shape. The flow path which has can be formed easily.

In the manufacturing method described above, the base body is formed by sintering a laminate of a plurality of ceramic green sheets.
On the surface of two or more ceramic green sheets, a mold having a predetermined shape is pressed to form grooves, and through holes for communicating the grooves formed on different ceramic green sheets are formed as necessary. And
On the surface of the ceramic green sheet in which the groove is formed, another ceramic green sheet is laminated so as to cover the groove,
The base body can be formed by sintering the laminated ceramic green sheets at a predetermined temperature.

  According to the above method, when a base body is formed by firing and curing a laminate of a plurality of ceramic green sheets, a mold is pressed against the surface of two or more ceramic green sheets. In addition to forming grooves, through holes for communicating the grooves formed in different ceramic green sheets are formed as necessary, and the surface of the ceramic green sheet in which the grooves are formed is separately provided so as to cover the grooves. The base body is formed by laminating the ceramic green sheets and sintering the laminated ceramic green sheets.

And the base | substrate which has a three-dimensional flow path can be formed by covering the groove part exposed on the base | substrate main body with a coating | coated part.

  For example, when a base body is formed by sintering a laminate of two ceramic green sheets, the base is formed as follows.

First, a die having a predetermined shape is pressed on the surface of two ceramic green sheets to form a groove portion, and two ceramic green sheets having the groove portion are formed on one of the two ceramic green sheets. A through hole is formed for communicating the grooves formed in the green sheet.

Next, on the surface of the ceramic green sheet in which only the groove portion is formed, the ceramic green sheet in which the groove portion and the through hole are formed is laminated so as to cover the groove portion of the ceramic green sheet. A base body is formed by sintering at a predetermined temperature.

By covering the groove part exposed on the base body formed in this way with the covering part, it is possible to manufacture a microchemical chip in which the flow path is three-dimensionally formed.

  As described above, according to the present invention, since the substrate is made of a ceramic material, a microchemical chip that is high in productivity, inexpensive, excellent in chemical resistance, and usable under various conditions can be obtained. .

  According to the present invention, since the substrate body constituting the substrate is made of a ceramic material, it is possible to obtain a microchemical chip that is high in productivity, inexpensive, excellent in chemical resistance, and usable under various conditions. Can do.

  Further, according to the present invention, the fluid to be treated that has flowed into the flow path from the supply section is subjected to a predetermined process and then led out from the collection section. For example, the fluid containing the substrate is flowed into the flow path from the supply section. After the substrate is reacted at a predetermined position in the flow path, a microchemical chip that can take out the reaction product from the collection part can be obtained.

  FIG. 1A is a plan view showing a basic configuration of a microchemical chip 1 according to an embodiment of the present invention. FIG.1 (b) is sectional drawing which shows the cross-sectional structure in the cut surface line II of the microchemical chip 1 shown to Fig.1 (a).

  The microchemical chip 1 has a base body 11 made of a ceramic material in which a flow path 12 for flowing a fluid to be processed is formed, and performs a predetermined process on the fluid to be processed flowing through the flow path 12.

The base 11 is further provided with a supply unit 13 for allowing the fluid to be processed to flow into the flow path 12, a processing unit 14, and a collection unit 15 for leading the processed fluid to the outside.

The supply unit 13 is realized by an opening so that a fluid to be processed can be injected into the flow path 12 from the outside.

The collection unit 15 is realized by an opening so that the fluid to be processed can be taken out from the flow path 12 to the outside.

  In the microchemical chip 1, a fluid to be processed is caused to flow from the supply unit 13 into the flow path 12, and a predetermined process is performed on the fluid to be processed in the processing unit 14. To derive.

For example, if a reagent is temporarily fixed to the processing unit 14 and a fluid containing a substrate is introduced from the supply unit 13, the substrate and the reagent can be reacted in the processing unit 14. Can be taken out.

Furthermore, if heating means such as a heater is provided below the flow path 12 of the processing section 14 and the flow path 12 of the processing section 14 is heated, the substrate and the reagent can be reacted more reliably.

  As described above, since the base 11 is made of a ceramic material, simple processing can be performed without performing complicated processing such as etching required for forming a flow path in a base made of silicon, glass, or resin. The substrate 11 having the flow path 12 can be formed only by this.

Therefore, the microchemical chip 1 is inexpensive because of high productivity and low manufacturing cost.

In addition, since the ceramic material is superior in chemical resistance compared to a resin or the like, the microchemical chip 1 can be used under various conditions.

That is, when the base 11 is made of a ceramic material, it is possible to obtain the microchemical chip 1 that has high productivity, is inexpensive, has excellent chemical resistance, and can be used under various conditions.

  As the ceramic material constituting the substrate 11, for example, an aluminum oxide sintered body, a mullite sintered body, a glass ceramic sintered body, or the like can be used.

  In the microchemical chip 1, when the fluid to be processed is injected from the supply unit 13, the fluid to be processed is sent from the supply unit 13 to the sampling unit 15 by pushing the fluid to be processed with a microsyringe or the like. Can do.

Moreover, when inject | pouring, liquid can also be sent by injecting, applying pressure to a to-be-processed fluid with the pump etc. which are provided outside.

In addition, after injecting the fluid to be processed from the supply unit 13, the liquid can be fed by suction from the collection unit 15 with a microsyringe or the like.

  Next, the configuration of the microchemical chip according to the embodiment of the present invention will be specifically described.

FIG. 2A is a plan view showing a simplified configuration of the microchemical chip 2 according to the embodiment of the present invention.

FIG. 2B is a cross-sectional view showing a cross-sectional configuration taken along cutting plane lines II-II, III-III, and IV-IV of the microchemical chip 2 shown in FIG.

In FIG. 2 (b), cross-sectional configurations along section line II-II, III-III, and IV-IV are shown side by side.

  The microchemical chip 2 includes a base 21 made of a ceramic material. The base 21 is provided with a flow path 22, two supply parts 23 a and 23 b, a processing part 24, and a collection part 25.

The supply unit 23a includes a supply channel 27a, a supply port 26a provided at an end of the supply channel 27a, and a micropump 28a provided above the supply channel 27a.

Similarly, the supply unit 23b includes a supply channel 27b, a supply port 26b provided at an end of the supply channel 27b, and a micropump 28b provided above the supply channel 27b.

The supply ports 26a and 26b are opened so that the fluid to be processed can be injected into the supply flow paths 27a and 27b from the outside.

The collection unit 25 is realized by an opening so that the fluid to be processed can be taken out from the flow path 22 to the outside.

  A heater 29 is provided inside the base 21 and below the flow path 22 of the processing unit 24.

The flow path 22 of the processing unit 24 is formed to be folded back so as to pass a plurality of times above the heater 29.

Wiring (not shown) for connecting the heater 29 and an external power source is led out from the heater 29 on the surface of the base 21.

This wiring is formed of a metal material having a resistance value lower than that of the heater 29.

  In the microchemical chip 2, fluids to be processed are caused to flow into the flow path 22 from the two supply parts 23 a and 23 b and merge, and the flow path 22 is kept at a predetermined temperature using the heater 29 in the processing part 24 as necessary. Heating is performed, the two kinds of fluids to be treated that are introduced are reacted, and the obtained reaction product is led out from the collection unit 25.

  For example, if a fluid containing a compound as a raw material is introduced from the supply unit 23a, a fluid containing a reagent is introduced from the supply unit 23b, and the flow path 22 of the processing unit 24 is heated by the heater 29, the compound is synthesized. The obtained compound can be taken out from the collection part 25.

Although different from the present embodiment, if a detection unit is provided upstream of the collection unit 25 or the collection unit 25 in the flow direction of the fluid to be processed, a biochemical reaction such as a chemical reaction, an antigen-antibody reaction, or an enzyme reaction can be performed. Reactants can be detected.

  Note that the used microchemical chip 2 can be used again if it is cleaned by supplying a cleaning solution from the supply sections 23a and 23b.

  The cross-sectional areas of the flow path 22 and the supply flow paths 27a and 27b are 2.5 × 10 −3 mm 2 or more and 1 mm 2 in order to efficiently send and mix the specimen, reagent, or cleaning liquid flowing in from the supply sections 23a and 23b. The following is preferable.

If the cross-sectional area of the flow path 22 and the supply flow paths 27a and 27b exceeds 1 mm 2, the amount of the sample, reagent, or washing solution to be sent becomes too large, increasing the reaction surface area per unit volume and greatly increasing the reaction time. The effect of the microchemical chip that can be reduced to a sufficient level cannot be obtained.

Further, if the cross-sectional areas of the flow path 22 and the supply flow paths 27a and 27b are less than 2.5 × 10 −3 mm 2, pressure loss due to the micropumps 28a and 28b becomes large, causing a problem in liquid feeding.

Therefore, the cross-sectional areas of the flow path 22 and the supply flow paths 27a and 27b are set to 2.5 × 10 −3 mm 2 to 1 mm 2.

  The width w of the flow path 22 and the supply flow paths 27a and 27b is preferably 50 to 1000 μm, and more preferably 100 to 500 μm.

The depth d of the flow path 22 and the supply flow paths 27a and 27b is preferably 50 to 1000 μm, more preferably 100 to 500 μm, and the cross sectional area may be set.

The relationship between the width and the depth is preferably short side length / long side length ≧ 0.4, and more preferably short side length / long side length ≧ 0.6.

When the short side length / long side length is less than 0.4, the pressure loss increases and a problem occurs in liquid feeding.

  The external dimensions of the microchemical chip 1 are, for example, a width A of about 40 mm, a depth B of about 70 mm, and a height C of 1 to 2 mm. The dimensions may be used.

   In the above-described configuration, the base includes a plurality of supply units that allow a plurality of fluids to be processed to flow into the flow path, and a collection unit that guides the processed fluid to the outside. A plurality of fluids to be treated are respectively flowed into the flow paths, and after a predetermined treatment is performed by joining the plurality of fluids to be treated, the treated fluid is led out from the sampling unit. And

  According to the above-described configuration, when a plurality of fluids to be treated are flowed into the flow paths from the plurality of supply units, after the plurality of fluids to be treated are joined, a predetermined process is performed, The fluid is led out from the sampling part to the outside. Therefore, for example, it has two supply parts, a fluid containing a compound as a raw material is introduced from one supply part, a fluid containing a reagent is introduced from the other supply part, and a fluid containing a compound and a fluid containing a reagent are After the reaction, the obtained chemical compound can be obtained from the collection part.

   Next, a method for manufacturing the microchemical chip 2 shown in FIG. 2 will be described.

FIG. 3 is a plan view showing a processed state of the ceramic green sheets 31, 32, 33.

FIG. 4 is a cross-sectional view showing a state in which the ceramic green sheets 31, 32, and 33 are stacked.

  First, an appropriate organic binder and solvent are mixed with the raw material powder, and if necessary, a plasticizer or a dispersant is added to form a slurry, which is then formed into a sheet by the doctor blade method or the calender roll method. A ceramic green sheet (also called a ceramic raw sheet) is formed.

As the raw material powder, for example, when the substrate 21 is made of an aluminum oxide sintered body, aluminum oxide, silicon oxide, magnesium oxide, calcium oxide, or the like is used.

  In the present embodiment, three ceramic green sheets formed in this way are used.

First, as shown in FIG. 3 (a), the second ceramic shown in FIG. 3 (b) is placed in a predetermined position to be the supply ports 26a and 26b and the sampling unit 25 of the first ceramic green sheet 31. Through holes 34 a, 34 b and 35 communicating with the groove 36 formed in the green sheet 32 are formed.

  Next, as shown in FIG. 3B, the mold is pressed against the surface of the second ceramic green sheet 32 to form the groove 36.

At this time, a mold having a shape in which the shape of the desired groove 36 is transferred is used as the mold.

The pressing force when pressing the mold is adjusted according to the viscosity of the slurry before being formed into the ceramic green sheet.

For example, when the viscosity of the slurry is 1 to 4 Pa · s, the slurry is pressed with a pressing force of 2.5 to 7 MPa.

The material of the mold is not particularly limited, and may be a mold or a wooden mold.

   Next, as shown in FIG. 3C, a conductive paste is applied to the surface of the third ceramic green sheet 33 in a predetermined shape by screen printing or the like, thereby connecting the heater 29 and the external power source. The wiring pattern 37 is formed.

The conductive paste can be obtained by mixing an appropriate organic binder and a solvent with a metal material powder such as tungsten, molybdenum, manganese, copper, silver, nickel, palladium, or gold.

In addition, as the conductive paste for forming the heater 29, a paste obtained by adding 5 to 30% by weight of ceramic powder to the above-described metal material powder is used so that a predetermined resistance value is obtained after firing.

  As shown in FIG. 4, a ceramic green sheet 32 having a groove 36 is laminated on the surface of the ceramic green sheet 33 on which the heater 29 is formed, and the groove 36 is further covered on the surface of the ceramic green sheet 32. The ceramic green sheets 31 in which the through holes 34a, 34b, and 35 are formed are stacked.

The laminated ceramic green sheets 31, 32, 33 are fired at a temperature of about 1600 ° C. to be sintered and integrated.

  Next, a piezoelectric material such as lead zirconate titanate (PZT; composition formula: Pb (Zr, Ti) O3) is attached to a predetermined position on the surface side where the through holes 34a, 34b, 35 are formed, Micro pumps 28a and 28b are formed. Since the piezoelectric material can vibrate the base body 21 above the flow path 22 by expanding and contracting according to the applied voltage, it functions as micropumps 28a and 28b for feeding liquid.

  As described above, the base 21 shown in FIG. 2 is formed, and the microchemical chip 2 is obtained.

  As described above, in the manufacturing method of the microchemical chip 2 of the present embodiment, after forming the groove portion 36 on the surface of the ceramic green sheet 32, the ceramic green sheet 31 is laminated so as to cover the groove portion 36, and the laminated ceramic green The base | substrate 21 which has the flow path 22 is formed by baking and integrating the sheets 31, 32, and 33 by sintering. That is, it is possible to manufacture the microchemical chip 2 by performing simple processing without performing complicated processing such as etching processing required when forming a flow path in a substrate made of silicon, glass or resin. it can. Therefore, the microchemical chip 2 is inexpensive because of high productivity and low manufacturing cost. Further, in the method for manufacturing the microchemical chip 2 of the present embodiment, the shape of the pressed mold is transferred to the groove portion 36 that becomes the flow path 22, so that the bottom surface and the side wall are adjusted by adjusting the surface shape of the mold. The flow path 22 having a desired surface shape can be easily formed.

  As described above, the microchemical chip 2 of the present embodiment includes the two supply units 23a and 23b, but is not limited thereto, and may include three or more supply units.

  When two or more supply parts are provided, the supply flow paths of the supply parts need not be provided so as to merge at one point, and may be provided so as to be connected to different positions of the flow path 22. Moreover, although the heater 29 is a structure provided in one place, it is not limited to this, You may provide in two or more places. Thus, a complicated reaction can be controlled by providing three or more supply units and two or more heaters.

  The heater 29 need not be provided when the reaction proceeds without heating.

  In this embodiment, the micropumps 28a and 28b are provided as the liquid feeding means, but a configuration without the micropumps 28a and 28b as in the microchemical chip 1 shown in FIG. 1 is also possible. In this case, similarly to the microchemical chip 1, when the fluid to be processed is injected from the supply ports 26a and 26b, the fluid to be processed is pushed into the supply ports 26a and 26b by pushing the fluid to be processed with a microsyringe or the like. To the sampling port 25. Moreover, when inject | pouring, liquid can also be sent by injecting, applying pressure to a to-be-processed fluid with the pump etc. which are provided outside. Further, after injecting the fluid to be processed from the supply ports 26a and 26b, the fluid can be fed by sucking from the collection port 25 with a microsyringe or the like.

  Further, in the method of manufacturing the microchemical chip 2 of the present embodiment, when the substrate 21 is formed, another ceramic green sheet is formed so as to cover the groove portion 36 on the surface of the ceramic green sheet 32 in which the groove portion 36 is formed. After laminating 31, the laminated ceramic green sheets 31, 32, and 33 are fired, but without being limited thereto, firing is performed with the groove portions exposed, and then the substrate is covered by covering the groove portions with a covering portion. It may be formed.

In the substrate thus formed, a flow path is formed by the substrate body in which the groove portion is formed and the covering portion covering the groove portion.

  As the covering portion, a lid made of glass or a ceramic material can be used. The lid is bonded to the formed base body after firing the ceramic green sheet in which the groove is formed. For example, when the lid is made of glass, the lid and the base body are bonded by heating and pressing, and when the lid is made of a ceramic material, they are bonded by a glass adhesive or the like. The lid body does not necessarily have to be bonded to the base body, and may be detachably attached to the base body. For example, a configuration may be adopted in which silicone rubber or the like is sandwiched between the base body and the lid, and pressure is applied to the entire microchemical chip. By allowing the lid to be removed from the base body in this way, cleaning when reused becomes easy.

  In the method of manufacturing the microchemical chip 2 of the present embodiment, the portion of the flow path 22 of the substrate 21 includes the ceramic green sheet 32 in which the groove portion 36 is formed and the ceramic green sheet 31 laminated so as to cover the groove portion 36. Although formed from two ceramic green sheets, the present invention is not limited to this, and may be formed from three or more ceramic green sheets. In this case, a groove is formed in two or more ceramic green sheets, and a through-hole for communicating the grooves formed in different ceramic green sheets is formed.

  For example, when the channel portion is formed from three ceramic green sheets, the substrate is formed as follows. First, similarly to the ceramic green sheet 31 shown in FIG. 3A, a through hole communicating with a groove formed in the second ceramic green sheet is formed in the first ceramic green sheet. Next, a mold having a predetermined shape is pressed on the surfaces of the second and third ceramic green sheets to form grooves. In addition, a through hole is formed in the second ceramic green sheet for communicating the grooves formed in the second and third ceramic green sheets.

  Next, another ceramic green sheet is laminated on the surface of the ceramic green sheet on which the groove is formed so as to cover the groove.

That is, a second ceramic green sheet is laminated on the surface of the third ceramic green sheet so as to cover a groove formed in the third ceramic green sheet, and the second ceramic green sheet is formed on the surface of the second ceramic green sheet. The first ceramic green sheet is laminated so as to cover the groove formed in the second ceramic green sheet.

At this time, the groove formed in the second ceramic green sheet and the groove formed in the third ceramic green sheet communicate with each other through the through-hole formed in the second ceramic green sheet. Laminate each ceramic green sheet.

  The substrate is formed by sintering the ceramic green sheets laminated in this manner at a predetermined temperature as in the case of forming the substrate 21 described above.

In the substrate thus formed, the flow path is three-dimensionally formed.

  Since the fluid to be processed flowing through the flow path in the microchemical chip is a laminar flow, when the flow paths are joined together in a plane to mix a plurality of fluids to be processed, the mixing of the fluids to be processed occurs only by diffusion, A long distance is required until complete mixing, but by forming a three-dimensional flow path near the downstream of the merging section, it is possible to generate turbulence and easily mix multiple fluids to be processed Become.

  When the flow path portion is formed from four ceramic green sheets, grooves are formed in the second and fourth ceramic green sheets, and the second and third ceramic green sheets are formed. Through holes for communicating the grooves formed in the second and fourth ceramic green sheets are formed, and the third, second and first sheets are formed on the surface of the fourth ceramic green sheet. What is necessary is just to laminate | stack and bake a ceramic green sheet in order of eyes.

  In addition, the piezoelectric material functioning as the micropumps 28a and 28b is pasted after firing the laminated ceramic green sheets. However, when the ceramic piezoelectric material such as PZT is used, the ceramic green sheet 31 is predetermined. The ceramic piezoelectric material can be attached at a certain position and then fired at the same time.

  Further, a microchemical chip can be manufactured using a sheet made of a resin material instead of the ceramic green sheet.

  According to the microchemical chip manufacturing method described above, on the surface of the ceramic green sheet, after forming a groove by pressing a mold, another ceramic green sheet is laminated so as to cover the groove, and sintered, Since the substrate having the flow path is formed, the micro process can be performed by performing simple processing without performing complicated processing such as etching necessary for forming the flow path on the base made of silicon, glass, or resin. A chemical chip can be manufactured, and a channel having a desired surface shape on the bottom and side walls can be easily formed.

  In addition, according to the above-described microchemical chip manufacturing method, a die is pressed on the surface of the ceramic green sheet to form a groove, and the base body is formed by sintering. By covering, a substrate having a flow path is formed, so that simple processing can be performed without performing complicated processing such as etching necessary for forming a flow path on a substrate made of silicon, glass, or resin. A microchemical chip can be manufactured only by carrying out, and a channel having a desired surface shape on the bottom and side walls can be easily formed.

  Moreover, according to the manufacturing method of the above-mentioned microchemical chip, a groove is formed on the surface of two or more ceramic green sheets, and a through hole for communicating the grooves of different ceramic green sheets is formed as necessary. By laminating and sintering another ceramic green sheet so as to cover the groove portion on the surface of the ceramic green sheet in which the groove portion is formed, a base body or a base body having a three-dimensional flow path is formed. A three-dimensionally formed microchemical chip can be manufactured.

FIG. 1A is a plan view showing a basic configuration of a microchemical chip 1 according to an embodiment of the present invention. FIG.1 (b) is sectional drawing which shows the cross-sectional structure in the cut surface line II of the microchemical chip 1 shown to Fig.1 (a). FIG. 2A is a plan view showing a simplified configuration of the microchemical chip 2 according to the embodiment of the present invention. FIG. 2B is a cross-sectional view showing a cross-sectional configuration taken along cutting plane lines II-II, III-III, and IV-IV of the microchemical chip 2 shown in FIG. It is a top view which shows the processing state of the ceramic green sheets 31, 32, and 33. FIG. It is sectional drawing which shows the state which laminated | stacked the ceramic green sheets 31, 32, and 33. FIG.

Explanation of symbols

1, 2 Microchemical chip 11, 21 Base 12, 22 Flow path 13, 23a, 23b Supply section 14, 24 Processing section 15, 25 Sampling section 26a, 26b Supply port 27a, 27b Supply flow path 28a, 28b Micro pump 29 Heater 31, 32, 33 Ceramic green sheets 34a, 34b, 35 Through hole 36 Groove 37 Wiring pattern

Claims (2)

A microchemical chip having a substrate on which a flow path for flowing a fluid to be processed is formed, and performing a predetermined process on the fluid to be processed flowing through the flow path,
The base body is made of a ceramic material, and includes a supply unit that allows a fluid to be processed to flow into the flow path, a sampling unit that guides the processed fluid to the outside, and a processing unit that performs the processing.
A predetermined substance is temporarily fixed to the processing unit, and a fluid to be processed is caused to flow into the flow path from the supply unit, and the fluid to be processed is allowed to react with the substance, and then from the sampling unit. A microchemical chip characterized in that a fluid after reaction is led out. A base body made of a ceramic material having a groove formed on one surface; and a covering portion that forms a flow path through which a fluid to be treated flows by covering the one surface of the base body with a covering portion; A microchemical chip that performs a predetermined process on a fluid to be processed flowing through a flow path,
A supply unit that allows the fluid to be processed to flow into the flow path, a sampling unit that extracts the processed fluid to the outside, and a processing unit that performs the processing,
A predetermined substance is temporarily fixed to the processing unit, and a fluid to be processed is caused to flow into the flow path from the supply unit, and the fluid to be processed is allowed to react with the substance, and then from the sampling unit. A microchemical chip characterized in that a fluid after reaction is led out.

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