JP2004354180A - Microchemical chip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchemical chip capable of mixing efficiently a plurality of different fluids to be treated without enlarging the constitution. <P>SOLUTION: This microchemical chip 1 has a substrate 11 wherein a passage 12 for circulating the fluids to be treated and supply parts 13a, 13b for sending the fluids to be treated into the passage 12 respectively. In the chip 1, the plurality of fluids to be treated are sent respectively into the passage 12 from the supply parts 13a, 13b, and the plurality of sent fluids to be treated are joined, and a treatment determined beforehand is applied thereto. In the chip 1, a vibrating element X is arranged on a lid body 21 on the position corresponding to the inside surface of a passage part on the furthermore downstream side in the circulating direction of the fluids to be treated than the position 22 where the passage 12 is connected to the supply parts 13a, 13b. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a microchemical chip capable of performing a predetermined process such as a reaction or an analysis on a fluid to be processed such as a fluid or a reagent flowing through a minute flow path. The present invention relates to a microchemical chip that can perform a predetermined process by mixing a plurality of different fluids to be processed, such as in the case of mixing and reacting.
[0002]
[Prior art]
2. Description of the Related Art In recent years, in the field of chemical technology and biotechnology, research for performing a reaction on a sample, analysis of a sample, and the like in a minute area has been performed, and a micro electro mechanical system (abbreviation: MEMS) has been developed. ) Micro chemical systems have been researched and developed using technology to downsize systems for chemical reactions, biochemical reactions, and sample analysis.
[0003]
A reaction or analysis in a microchemical system is performed using one chip called a microchemical chip in which a microchannel, a micropump, a microreactor, and the like are formed. For example, a supply port for supplying a fluid such as a sample or a reagent and a collection port for leading out a fluid after processing are formed on one substrate made of silicon, glass or resin. There has been proposed a microchemical chip in which a mouth is connected to a microchannel having a small cross-sectional area, and a micropump for feeding liquid is disposed at an appropriate position in the channel (see Patent Document 1). In addition, a capillary electrophoresis type using an electroosmosis phenomenon instead of a micropump has been proposed as a liquid sending means (see Patent Document 2). In these microchemical chips, the flow paths merge at a predetermined position, and the fluid is mixed at the junction.
[0004]
In a microchemical system, the equipment and method are miniaturized as compared with the conventional system, so that the reaction surface area per unit volume of the sample can be increased and the reaction time can be greatly reduced. In addition, since the flow rate can be precisely controlled, the reaction and analysis can be performed efficiently. Further, the amounts of samples and reagents required for the reaction and analysis can be reduced.
[0005]
[Patent Document 1]
JP-A-2002-214241 (pages 4 to 5, FIG. 1)
[Patent Document 2]
Japanese Patent Application Laid-Open No. 2001-108619 (pages 4 to 5, FIG. 1)
[0006]
[Problems to be solved by the invention]
In the above-described microchemical chip, the fluid to be processed flowing in the flow channel has a laminar flow. Therefore, when flowing a plurality of different fluids to be processed into the flow path from the plurality of supply units and mixing them, the plurality of fluids to be processed are mixed using a diffusion phenomenon generated while flowing through the flow path. I have. Therefore, in order to sufficiently mix a plurality of fluids to be processed, it is necessary to form a flow path on the downstream side longer than a connection position where the supply unit is connected to the flow path.
[0007]
However, if a long flow path is formed in order to sufficiently mix the fluid to be processed, there is a problem that the microchemical chip becomes large.
[0008]
On the other hand, if the flow path is formed short in order to reduce the size of the microchemical chip, there arises a problem that mixing of the fluid to be processed becomes insufficient. In addition, in a state where the mixture of the fluids to be processed is insufficient, there is a problem that even if a predetermined process such as a reaction is performed, the possibility that the process becomes insufficient is increased.
[0009]
An object of the present invention is to provide a microchemical chip capable of efficiently mixing a plurality of different fluids to be processed without increasing the size of the configuration.
[0010]
[Means for Solving the Problems]
The present invention has a substrate formed with a flow path through which a fluid to be processed flows, and a plurality of supply units connected to the flow path and through which a plurality of fluids to be processed flow into the flow path, respectively. A microchemical chip that performs a predetermined process by flowing a plurality of fluids to be processed into the flow path from the supply unit, and merging the plurality of fluids that have flowed in,
A microchemical chip, wherein a vibrating element is arranged near a position where the flow path and the supply unit are connected.
[0011]
According to the present invention, when the fluid to be processed flows in from a plurality of supply units, the fluids to be processed that have flowed in are merged and flow through the flow path, and a predetermined process is performed. Therefore, if a plurality of different fluids to be processed are respectively flowed from the plurality of supply units, the plurality of fluids to be processed are merged and flow through the flow path, and predetermined processing is performed. The connection between the plurality of supply units and the flow path may be all connected to the same position in the flow path, for example, the most upstream part, or may be connected at different positions.
[0012]
In the present invention, since the vibrating element is arranged near the position where the flow path and the supply unit are connected, the vibration from the vibrating element is transmitted to the combined fluid to be processed, and the disturbance is generated in the combined fluid to be processed. Flow occurs. By generating a turbulent flow in the fluids to be merged as described above, a plurality of fluids to be processed can be mixed.
[0013]
Thus, a plurality of fluids to be processed can be sufficiently mixed even if the flow path is shorter than the case where mixing is performed only by diffusion as in the related art. In addition, since the predetermined processing is performed in a state where the plurality of fluids to be processed are sufficiently mixed, the predetermined processing can be performed more reliably than when the mixing is insufficient. Furthermore, compared to the case of mixing only by diffusion, the length of the flow path on the downstream side in the flow direction of the fluid to be treated can be shorter than the position where the supply unit is connected, so that the size of the microchemical chip can be reduced. Can be planned.
[0014]
Further, according to the present invention, the base body includes a base body having a groove formed therein and a covering member arranged to cover the groove, and the flow path covers the groove formed in the base body. Formed by covering with a member,
The vibration element is a position corresponding to the inner surface of the flow path portion near the downstream side in the flow direction of the fluid to be processed than the position where the supply unit is connected, and is arranged on the coating member. I do.
[0015]
According to the present invention, on the inner surface of the flow path portion near the downstream side in the flow direction of the target fluid from the position where the supply unit and the flow channel are connected, that is, on the inner surface of the flow channel portion where the plurality of target fluids that have joined flow Since the vibrating element is arranged on the covering member at the corresponding position, the vibration from the vibrating element is efficiently transmitted to the fluid to be merged. As a result, the joined fluids to be processed can be sufficiently mixed.
[0016]
Further, in the present invention, the base further includes a sampling unit connected to the flow channel, and for guiding the processed fluid to the outside,
The vibrating element is provided downstream of the position to which the supply unit is connected in the flow direction of the fluid to be processed and upstream of the position to which the sampling unit is connected in the flow direction of the fluid to be processed. ,
A plurality of fluids to be processed are respectively flowed into the flow path from the plurality of supply units, and after a plurality of fluids to be processed are combined and subjected to a predetermined process, the fluid after the processing is collected from the collection unit to the outside. Is derived.
[0017]
According to the present invention, the plurality of fluids to be processed respectively flowing into the flow path from the plurality of supply units are quickly mixed by the vibration of the vibrating element after being merged, and after being subjected to a predetermined process, the sampling unit. Is derived to the outside. Therefore, for example, after having two supply units, a compound serving as a raw material flows in from one supply unit, a reagent flows in from the other supply unit, and the compound and the reagent are sufficiently mixed and reacted. A small microchemical chip from which the obtained compound can be taken out from the collecting section can be obtained.
[0018]
Further, in the present invention, the base performs a predetermined process on the merged target fluid downstream of a position where the supply unit and the flow path are connected to each other in a flow direction of the target fluid. It has a processing unit,
The vibration element is provided downstream of a position where the supply unit is connected in a flow direction of the fluid to be processed and upstream of the processing unit in a flow direction of the fluid to be processed. .
[0019]
According to the present invention, the plurality of fluids to be processed respectively flowing into the flow path from the plurality of supply units are quickly mixed by the vibration of the vibrating element after being merged, and the processing unit performs a predetermined process. Therefore, for example, two supply units are provided, a compound serving as a raw material flows in from one supply unit, a reagent flows in from the other supply unit, and the compound and the reagent are combined and reacted by heating in the processing unit. In this case, since the compound and the reagent can be heated in a sufficiently mixed state, the compound and the reagent can be efficiently reacted, and the yield of the reaction product can be improved.
[0020]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1A is a simplified plan view showing a configuration of a microchemical chip 1 according to an embodiment of the present invention. FIG. 1B is a partial cross-sectional view showing a cross-sectional configuration of the microchemical chip 1 shown in FIG. 1A along section lines II, II-II, and III-III. In FIG. 1B, the cross-sectional configurations along the cutting plane lines II, II-II, and III-III are shown side by side.
[0021]
The microchemical chip 1 includes a flow path 12 through which a fluid to be processed flows, two supply units 13a and 13b through which the fluid to be processed flows into the flow path 12, a processing unit 14, and a fluid after processing is led out. And a base unit 11 provided with a sampling unit 15 to be used. The base body 11 includes a base body 20 having a groove 33 formed on one surface and a lid 21 serving as a covering member. The cover 21 covers the surface of the base body 20 where the groove 33 is formed with the lid 21. Is formed.
[0022]
In this microchemical chip 1, the vibrating element X is arranged near a position 22 where the flow path 12 and the supply units 13a and 13b are connected. In the present embodiment, the position corresponding to the inner surface of the flow path portion near the downstream side in the flow direction of the fluid to be processed than the position where the supply units 13a and 13b and the flow path 12 are connected, Are located.
[0023]
FIG. 2 is a cross-sectional view illustrating an arrangement state of the vibration element X. FIG. 2A is a cross-sectional view showing an arrangement state when a piezoelectric element made of lead zirconate titanate (PZT; composition formula: Pb (Zr, Ti) O ₃ ) or the like is used as the vibration element X. . The outer surface of the lid 21 is provided with a recess at a position facing the inner surface of the flow path 12 near the downstream side in the flow direction of the fluid to be processed from the position where the flow path 12 is connected to the supply units 13a and 13b. 21a are formed. The vibration element X is arranged in the concave portion 21a. Power for driving the vibration element X is supplied by wiring formed on the outer surface of the lid 21. The connection between the wiring and the vibration element X is realized by, for example, wire bonding.
[0024]
Due to the vibration from the vibration element X, the portion of the lid 21 where the vibration element X is disposed vibrates, and this vibration is transmitted to the fluid to be processed flowing through the flow path 12. As a result, a turbulent flow occurs in the merged fluids to be processed, and the merged plural fluids can be mixed. In addition, by disposing the vibration element X in the concave portion 21 a formed in the lid 21, the vibration element X is disposed in a portion having a thickness smaller than that of the periphery, so that the arrangement portion of the vibration element X can be more reliably. It is possible to vibrate, and the fluids to be treated can be efficiently mixed.
[0025]
FIG. 2B is a cross-sectional view illustrating an arrangement state when a crystal resonator is used as the vibration element X. The lid 21 has a flow direction of the flow path 12 at a position on the inner surface of the flow path portion near the downstream side in the flow direction of the fluid to be processed than a position where the flow path 12 and the supply units 13a and 13b are connected. A through-hole 21b, which is a long hole, is formed along the direction perpendicular to the plane of FIG. 2 (b). The vibration element X is attached to the inner surface of the lid 21 so as to cover the through hole 21b. The electric power for driving the vibration element X is supplied from a wire formed from the outer surface of the lid 21 along the inner surface of the through hole 21b and connected to the vibration element X. The vibration from the vibration element X is directly transmitted to the fluid to be processed flowing through the flow path 12.
[0026]
FIG. 2C is a cross-sectional view illustrating an arrangement state when an ultrasonic transducer is used as the vibration element X. The ultrasonic vibrator is attached to the large-diameter end of a cone (a cylindrical member whose outer shape is substantially conical). The cone CE to which the ultrasonic vibrator is attached has a small-diameter side end on the outer surface of the lid 21 and a position of the fluid to be processed that is smaller than a position where the flow path 12 and the supply units 13a and 13b are connected. The ultrasonic vibrator is attached to the lid 21 at a position facing the inner surface of the flow path portion near the downstream side in the flow direction. Electric power for driving the ultrasonic vibrator is supplied by wiring formed on the outer surface of the lid 21 and connected to the ultrasonic vibrator. The vibration from the ultrasonic transducer is transmitted to the fluid to be processed flowing through the flow path 21 via the cone CE and the lid 21.
[0027]
The supply unit 13a includes a supply flow path 17a connected to the flow path 12, a supply port 16a provided at an end of the supply flow path 17a, and a flow direction upstream of the processing target fluid from a position 22 connected to the flow path 12. And a micro pump 18a provided on the side. Similarly, the supply unit 13b includes a supply channel 17b, a supply port 16b, and a micro pump 18b. The supply ports 16a and 16b are opened so that the fluid to be processed can be injected into the supply flow paths 17a and 17b from outside. The sampling unit 15 is realized by an opening so that the fluid to be treated can be taken out of the flow channel 12 to the outside.
[0028]
A heater 19 is provided inside the base body 20 and below the flow path 12 of the processing unit 14. The flow path 12 of the processing unit 14 is formed, for example, bent in a zigzag shape so as to pass above the heater 19 a plurality of times. On the surface of the base 11, wires (not shown) for connecting the heater 19 and an external power supply are led out from the heater 19. This wiring is formed of a metal material having a lower electric resistance value than the heater 19.
[0029]
In the microchemical chip 1, two types of fluids to be processed flow into the flow channel 12 from the two supply units 13 a and 13 b, respectively, and merge, and the flow channel 12 is predetermined by using the heater 19 in the processing unit 14 as necessary. The two types of fluids to be processed are caused to react with each other, and the obtained reaction product is led out from the sampling unit 15.
[0030]
The cross-sectional area of the flow path 12 and the supply flow paths 17a and 17b is 2.5 × 10 ⁻³ mm in order to efficiently send and mix a specimen, a reagent, a washing liquid, or the like flowing from the supply units 13a and 13b. it is preferably ² or more 1 mm ² or less. However, the fluid cross-sectional area flows through the 2.5 × ¹⁰ -3 ^{mm 2} ~1mm 2 about the flow path, since generally flows in a laminar flow state, is only allowed to merge two supply passage 17a, the 17b, The two types of fluids to be processed that have flowed into the flow channel 12 from the supply units 13a and 13b and merged are mixed only by diffusion. Therefore, it is necessary to provide a long flow path in order to completely mix the two types of fluids to be combined, and there is a limit to miniaturization of a microchemical chip.
[0031]
On the other hand, in the present embodiment, since the vibration element X is disposed downstream of the connection position 22 between the flow path 12 and the supply units 13a and 13b in the flow direction of the fluid to be processed, a plurality of fluids to be processed are provided. Are joined, vibration from the vibrating element X is applied, thereby generating a turbulent flow in the combined processing target fluid.
[0032]
By generating a turbulent flow in the fluids to be merged as described above, a plurality of fluids to be processed can be mixed. Thereby, compared with the case of mixing only by diffusion, a plurality of fluids to be processed can be sufficiently mixed in a short flow path. Therefore, since the length of the flow channel 12 can be reduced, the size of the microchemical chip 1 can be reduced, and the size of a microchemical system using the microchemical chip 1 can be reduced. In addition, since the predetermined processing is performed in a state where the plurality of fluids to be processed are sufficiently mixed, the predetermined processing can be performed more reliably than when the mixing is insufficient.
[0033]
In the present embodiment, since the vibration element X is disposed between the connection position 22 and the processing unit 14, the combined processing target fluids are sufficiently mixed when reaching the processing unit 14. Therefore, for example, when a compound serving as a raw material flows in from the supply unit 13a, a reagent flows in from the supply unit 13b, and the compound and the reagent are combined and reacted by heating with the heater 19 of the processing unit 14, the compound and the reagent Can be heated in a state in which the compound is sufficiently mixed, the compound and the reagent can be efficiently reacted, and the yield of the reaction product taken out from the collecting section 15 can be improved.
[0034]
The base body 20 can be made of a ceramic material, silicon, glass, resin, or the like, and among these, it is preferable to use a ceramic material. Since the ceramic material is more excellent in chemical resistance than resin or the like, it is possible to obtain the microchemical chip 1 which is excellent in chemical resistance and can be used under various conditions when the base body 20 is made of the ceramic material. it can. As the ceramic material constituting the base body 11, for example, an aluminum oxide sintered body, a mullite sintered body, a glass ceramic sintered body, or the like can be used.
[0035]
The lid 21 may be made of glass or a ceramic material. However, it is preferable that the lid 21 is made of glass because the mixed state and the reaction state of the fluid to be processed can be confirmed.
[0036]
As described above, the cross-sectional area of the flow path 12 and the supply flow paths 17a and 17b is set to 2.5 × in order to efficiently send and mix the specimen, the reagent, the cleaning liquid, or the like flowing from the supply units 13a and 13b. it is preferably 10 ^-3 mm ² or more 1 mm ² or less. When the cross-sectional area of the flow path 12 and the supply flow paths 17a and 17b exceeds 1 mm ² , the amount of the sample, the reagent, or the cleaning solution to be sent becomes too large, so that the reaction surface area per unit volume is increased and the reaction time is shortened. The effect of the microchemical chip to greatly reduce the amount cannot be sufficiently obtained. If the cross-sectional area of the flow path 12 and the supply flow paths 17a and 17b is less than 2.5 × 10 ⁻³ mm ² , the pressure loss due to the micro pumps 18a and 18b becomes large, causing a problem in liquid sending. Thus, the channel 12 and the supply passage 17a, the cross-sectional area of the 17b 2.5 × ¹⁰ -3 mm ² or more 1mm preferably set to ² or less.
[0037]
Further, the width w of the flow channel 12 and the supply flow channels 17a and 17b is preferably 50 to 1000 μm, and more preferably 100 to 500 μm. Further, the depth d of the flow channel 12 and the supply flow channels 17a and 17b is preferably 50 to 1000 μm, more preferably 100 to 500 μm, and may be in the range of the above-described cross-sectional area. When the cross-sectional shapes of the flow path 12 and the supply flow paths 17a and 17b are rectangular, the relationship between the width (long side) and the depth (short side) is preferably short side length / long side length ≧ 0.4. And more preferably the ratio of short side length / long side length ≧ 0.6. If the length of the short side / length of the long side is less than 0.4, the pressure loss becomes large, and a problem occurs in liquid feeding.
[0038]
The external dimensions of the microchemical chip 1 are, for example, a width A of about 40 mm, a depth B of about 70 mm, and a height C of 1 to 2 mm. And it is sufficient.
[0039]
Note that the used microchemical chip 1 can be reused if it is washed by flowing a washing liquid from the supply units 13a and 13b.
[0040]
Next, a method for manufacturing the microchemical chip 1 shown in FIG. 1 will be described. In the present embodiment, a case where the base body 20 is made of a ceramic material will be described. FIG. 3 is a plan view showing a processing state of the ceramic green sheets 31 and 32. FIG. 4 is a cross-sectional view showing a stacked state of the ceramic sheets 31 and 32.
[0041]
First, an appropriate organic binder and a solvent are mixed with the raw material powder, and a plasticizer or a dispersant is added as necessary to form a powder, which is formed into a sheet by a doctor blade method or a calender roll method. Thus, a ceramic green sheet (also called a ceramic green sheet) is formed. As the raw material powder, for example, when the base body 20 is made of an aluminum oxide sintered body, aluminum oxide, silicon oxide, magnesium oxide, calcium oxide, or the like is used.
[0042]
In the present embodiment, the base body 20 is formed using two ceramic green sheets thus formed. First, as shown in FIG. 3A, a mold is pressed on the surface of the ceramic green sheet 31 to form a groove 33. At this time, a mold having a shape in which a desired shape of the groove 33 is transferred is used.
[0043]
The pressing force when pressing the mold is adjusted according to the viscosity of the slurry before being formed into the ceramic green sheet. For example, when the viscosity of the slurry is 1 to 4 Pa · s, pressing is performed with a pressing force of 2.5 to 7 MPa. The material of the mold is not particularly limited, and may be a mold or a wooden mold.
[0044]
Further, as shown in FIG. 3 (b), a conductive paste is applied to the surface of the ceramic green sheet 32 in a predetermined shape by a screen printing method or the like, so that a wiring serving as a wiring for connecting the heater 19 and an external power supply is formed. A pattern 34 is formed. The conductive paste is obtained by mixing a metal material powder such as tungsten, molybdenum, manganese, copper, silver, nickel, palladium, or gold, with an appropriate organic binder and a solvent. The conductive paste for forming the wiring pattern 34 serving as the heater 19 is obtained by adding 5 to 30% by weight of ceramic powder to the above-described metal material powder so as to have a predetermined electric resistance after sintering. Used.
[0045]
Next, as shown in FIG. 4, on the surface of the ceramic green sheet 32 on which the wiring pattern 34 to be the heater 19 is formed, the ceramic green sheet 31 having the groove 33 formed thereon is laminated. The laminated ceramic green sheets 31 and 32 are sintered at a temperature of about 1600 ° C. As described above, the base body 20 shown in FIG. 1 in which the groove 33 serving as the flow channel 12 is formed.
[0046]
FIG. 5 is a plan view showing the configuration of the lid 21 in a simplified manner. As shown in FIG. 5, a groove 41 of the ceramic green sheet 31 shown in FIG. 3A is provided at predetermined positions on the substrate 41 made of, for example, glass or ceramic material so as to be the supply ports 16a and 16b and the sampling unit 15. The through holes 42a, 42b, and 43 communicating with 33 are formed. The outer surface of the substrate 41 has a concave portion 21a at a position corresponding to the inner surface of the flow path portion near the downstream side in the flow direction of the fluid to be processed from the position where the flow path 12 and the supply portions 13a and 13b are connected. Is formed, and the vibrating element X is arranged in the concave portion 21a. Further, a wiring (not shown) for supplying power for driving the vibration element X is formed on the outer surface of the substrate 41, and this wiring and the vibration element X are connected by, for example, wire bonding. Thus, the lid 21 is obtained.
[0047]
The lid 21 is bonded to the surface of the base body 20 where the groove 33 is exposed. For example, when the lid 21 is made of glass, the lid 21 and the base body 20 are bonded by heat and pressure, and when the lid 21 is made of a ceramic material, they are bonded with a glass adhesive or the like.
[0048]
The predetermined is the position of the surface of the lid 21, for example, lead zirconate titanate (PZT; composition _{formula: Pb (Zr, Ti) O} 3) a piezoelectric material 44a, such as, with paste 44b, the piezoelectric material 44a, 44b A wiring (not shown) for applying a voltage to is formed. The piezoelectric materials 44a and 44b can vibrate the lid 21 above the supply flow paths 17a and 17b by expanding and contracting according to the applied voltage, so that the piezoelectric materials 44a and 44b are moved to the supply flow paths 17a and 17b. The micro pumps 18a and 18b for feeding the liquid can be formed by sticking to the lid 21 above the.
[0049]
As described above, the base 11 shown in FIG. 1 is formed, and the microchemical chip 1 is obtained. As described above, the microchemical chip 1 in which the vibrating element X is disposed near the connection position 22 between the flow path 12 and the supply units 13a and 13b, specifically, on the downstream side of the connection position 22 in the flow direction of the fluid to be processed. Can be manufactured.
[0050]
In the present embodiment, the ceramic green sheet 31 in which the groove 33 is formed on the surface by pressing the mold and the ceramic green sheet 32 in which the wiring pattern 34 to be the heater 19 is formed are sintered. The base body 20 having the flow path 12 is formed by forming the base body 20 with the cover 21 so as to cover the groove 33 on the surface of the base body 20. Therefore, the microchemical chip 1 can be manufactured only by performing simple processing without performing complicated processing such as etching processing required when forming a flow path in a substrate made of silicon, glass, or resin. it can.
[0051]
As described above, the microchemical chip 1 of the present embodiment has two supply units 13a and 13b, but is not limited thereto and may have three or more supply units. When two or more supply units are provided, the supply units need not be provided so as to merge at one point, and may be provided so as to be connected to different positions of the flow channel 12. In this case, it is preferable to dispose the vibrating elements X in the vicinity of the position where the flow path 12 and each supply unit are connected.
[0052]
Further, the heater 19 is provided at one place, but is not limited thereto, and may be provided at two or more places. Thus, by providing three or more supply units and providing heaters at two or more locations, a complicated reaction can be controlled. The heater 19 does not need to be provided when the reaction proceeds without heating.
[0053]
Further, in the microchemical chip 1 of the present embodiment, the collection unit 15 is provided, and the reaction product is led out from the collection unit 15. However, the detection unit 15 or the detection unit is provided upstream of the collection unit 15 in the flow direction of the fluid to be treated. Is provided, a reaction product of a biochemical reaction such as a chemical reaction, an antigen-antibody reaction, and an enzymatic reaction can be detected. In this case, it is preferable to dispose the vibrating element X in the flow path portion on the upstream side of the detection unit in the flow direction of the fluid to be processed.
[0054]
Further, in the present embodiment, although the micropumps 18a and 18b are provided as the liquid sending means, a configuration without the micropumps 18a and 18b is also possible. In this case, when the fluid to be treated is injected from the supply ports 16a and 16b, the fluid to be treated is sent from the supply ports 16a and 16b to the collection unit 15 by pushing the fluid to be treated with a microsyringe or the like. be able to. In addition, at the time of injection, the liquid can also be sent by injecting while applying pressure to the fluid to be processed by a pump or the like provided outside. Alternatively, after the fluid to be processed is injected from the supply ports 16a and 16b, the liquid can be sent by suctioning the microfluidic device or the like from the sampling unit 15 realized by the opening.
[0055]
Further, although the lid 21 is adhered to the base body 20, the lid 21 is not limited thereto, and may be detachably attached to the base body 20. For example, a configuration may be employed in which silicone rubber or the like is interposed between the base body 20 and the lid 21 and pressure is applied to the entire microchemical chip. By making the lid 21 detachable, the microchemical chip can be easily cleaned at the time of reuse.
[0056]
In the method of manufacturing the microchemical chip 1 according to the present embodiment, the base body 20 is composed of the ceramic green sheet 31 in which the groove 33 is formed and the ceramic green sheet 32 in which the wiring pattern 34 to be the heater 19 is formed. Although formed from three ceramic green sheets, the present invention is not limited to this, and may be formed from three or more ceramic green sheets.
[0057]
In the method of manufacturing the microchemical chip 1 according to the present embodiment, the base 11 is sintered while exposing the grooves 33 on the surface of the ceramic green sheet 31 to form the base main body 20. Is formed by covering the groove 33 of the ceramic green sheet 31 with the lid 21, but is not limited to this. A ceramic through-hole similar to the lid 21 communicating with the groove 33 is formed on the surface of the ceramic green sheet 31. It may be formed by further laminating and sintering green sheets. When the base 11 is formed in this manner, it is not necessary to attach the lid 21 after the formation of the base body 20, so that productivity can be improved. When a ceramic piezoelectric material such as the above-described PZT is used for the piezoelectric materials 44a and 44b constituting the micropumps 18a and 18b, predetermined positions of the ceramic green sheet in which the through holes communicating with the grooves 33 are formed. After the ceramic piezoelectric material is attached to the substrate, it can be sintered at the same time.
[0058]
The microchemical chip of the present invention can be used for testing of blood, saliva, urine, and other body fluids with reagents for viruses, bacteria or body fluid components, for biological reactions between viruses, bacteria and drug solutions and body cells, and for the reaction between viruses, bacteria and drug solutions. Reaction experiment, reaction experiment between virus and bacteria with other viruses and bacteria, blood test, separation and extraction and decomposition of genes by chemical solution, separation and extraction by precipitation of chemical substances in solution, decomposition of chemical substances in solution, multiple It can be used for purposes such as mixing of chemical solutions, and can be used for purposes such as other biological reactions and chemical reactions.
[0059]
【The invention's effect】
As described above, according to the present invention, the vibration is applied to the merged target fluid in which the vibrating element is disposed in the vicinity of the position where the flow path and the supply unit are connected. Even if the flow path is shorter than the case where the fluids are mixed, a plurality of fluids to be processed can be sufficiently mixed. In addition, since the predetermined processing is performed in a state where the plurality of fluids to be processed are sufficiently mixed, the predetermined processing can be performed more reliably than when the mixing is insufficient. Furthermore, since the length of the flow path on the downstream side in the flow direction of the fluid to be processed can be shorter than the position where the supply unit is connected to the flow path, the microchemical chip can be downsized.
[0060]
Further, according to the present invention, since the vibrating element is arranged on the covering member that constitutes the flow path portion where the merged fluid flows, the vibration of the vibrating element can be efficiently transmitted to the merged fluid to be processed. The processing fluid can be sufficiently mixed.
[0061]
Further, according to the present invention, on the downstream side in the flow direction of the fluid to be processed from the position where the flow path and the supply unit are connected, and on the upstream side in the flow direction of the fluid to be processed, relative to the position where the sampling unit is connected. Since the vibrating element is arranged, for example, it has two supply units, a compound serving as a raw material flows in from one supply unit, a reagent flows in from the other supply unit, and the compound and the reagent are sufficiently mixed. After the reaction, a small microchemical chip from which the obtained compound can be taken out from the collecting section can be obtained.
[0062]
Further, according to the present invention, the vibration element is disposed on the downstream side in the flow direction of the fluid to be processed from the position where the flow path and the supply unit are connected and on the upstream side in the flow direction of the fluid to be processed than the processing unit. Therefore, for example, two supply units are provided, a compound serving as a raw material flows in from one supply unit, a reagent flows in from the other supply unit, and the compound and the reagent are combined and heated in the processing unit. In the case of the reaction, the compound and the reagent are efficiently reacted, and the yield of the reaction product can be improved.
[Brief description of the drawings]
FIG. 1 (a) is a simplified plan view showing the configuration of a microchemical chip 1 according to an embodiment of the present invention, and FIG. 1 (b) is shown in FIG. 1 (a). FIG. 3 is a cross-sectional view showing a cross-sectional configuration of the microchemical chip 1 taken along section lines II, II-II and III-III.
FIGS. 2A to 2C are cross-sectional views each showing an arrangement state of a vibration element X.
FIGS. 3A and 3B are plan views showing processing states of ceramic green sheets 31 and 32, respectively.
FIG. 4 is a partial cross-sectional view showing a state in which ceramic green sheets 31 and 32 are stacked.
FIG. 5 is a plan view showing a simplified configuration of a lid 21.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Microchemical chip 11 Substrate 12 Flow paths 13a and 13b Supply section 14 Processing section 15 Collection sections 16a and 16b Supply ports 17a and 17b Supply flow paths 18a and 18b Micropump 19 Heater 20 Base body 21 Cover 22 Connection positions 31 and 32 Ceramic green sheet 33 Groove 34 Wiring pattern 41 Substrates 42a, 42b, 43 Through holes 44a, 44b Piezoelectric material X Vibration element

Claims (4)

A flow path through which the fluid to be processed flows, and a base formed with a plurality of supply units connected to the flow path and each of which allows a plurality of fluids to flow into the flow path, from the plurality of supply units A plurality of fluids to be processed are respectively flowed into the flow path, and a microchemical chip that performs a predetermined process by merging the flowed fluids to be processed,
A microchemical chip, wherein a vibrating element is arranged near a position where the flow path and the supply unit are connected. The base is configured to include a base body having a groove formed therein and a covering member disposed so as to cover the groove, and the flow path is configured by covering the groove formed in the base body with the covering member. Formed,
The vibration element is a position corresponding to the inner surface of the flow path portion near the downstream side in the flow direction of the fluid to be processed than the position where the supply unit is connected, and is arranged on the coating member. The microchemical chip according to claim 1, wherein The base further includes a sampling unit connected to the flow channel and for guiding the processed fluid to the outside,
The vibrating element is provided downstream of the position to which the supply unit is connected in the flow direction of the fluid to be processed and upstream of the position to which the sampling unit is connected in the flow direction of the fluid to be processed. ,
After a plurality of fluids to be flowed into the flow path from the plurality of supply units, respectively, the plurality of fluids to be processed are combined and subjected to a predetermined process. The microchemical chip according to claim 2, wherein the microchemical chip is derived. The substrate has a processing unit that performs a predetermined process on the merged fluid to be processed, on a downstream side in a flow direction of the fluid to be processed, from a position where the supply unit and the flow path are connected. ,
The vibration element is provided downstream of a position where the supply unit is connected in a flow direction of the fluid to be processed and upstream of the processing unit in a flow direction of the fluid to be processed. The microchemical chip according to claim 2.

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