JP2006142287A - Microchemical chip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchemical chip capable of efficiently mixing a plurality of different fluids without making the constitution larger. <P>SOLUTION: The microchemical chip comprises a base body on which a flow path 12 for allowing fluid to be treated to flow and a plurality of supply parts 13a, 13b, connected to the flow path 12, for allowing a plurality of fluids to be treated to respectively flow in are formed. The microchemical chip allows the plurality of fluids to be treated to respectively flow into the flow path 12 from the plurality of supply parts 13a, 13b, merges the plurality of inflow fluids to be treated and performs treatment. Therein, the flow path 12 is connected to the upstream part which is arranged on the same height position as the supply part, on the rear end of the downstream part arranged on the lower side than the supply parts 13a, 13b, a heater is disposed just under the upstream part inside the base body, thereby, turbulence can be generated in the merged fluids to be treated, therefore, even when a flow path necessary for mixing is shortened, the merged plurality of fluids to be treated can be efficiently mixed and the samll-sized microchemical chip may be realized. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a microchemical chip capable of performing a predetermined process such as reaction or analysis on a fluid to be processed such as a substrate or a reagent that circulates through a minute flow path. The present invention relates to a microchemical chip capable of performing a predetermined process by mixing a plurality of different fluids to be processed, as in the case of mixing and reacting, and a manufacturing method thereof.

  In recent years, in the field of chemical technology and biotechnology, research for performing reaction to a sample, analysis of a sample, and the like in a minute region has been performed, and a micro electro mechanical system (abbreviation: MEMS). ) Microchemical systems are being researched and developed using technologies to reduce the size of systems such as chemical reactions, biochemical reactions, and sample analysis.

  Reactions and analyzes in a microchemical system are performed using a single chip called a microchemical chip on which a microchannel, a micropump, a microreactor, and the like are formed. For example, a supply port for supplying a fluid such as a sample or a reagent and a sampling port for deriving a processed fluid are formed on a single substrate made of silicon, glass, or resin. There has been proposed a microchemical chip in which a mouth is connected by a microchannel having a small cross-sectional area, and a micropump for feeding a liquid is disposed at an appropriate position in the channel (see Patent Document 1). In addition, as a means for feeding liquid, a capillary electrophoresis type using an electroosmosis phenomenon instead of a micropump has been proposed (see Patent Document 2). In these microchemical chips, the flow paths merge at a predetermined position, and fluids are mixed at the merge portion.

In the microchemical system, since the devices and methods are miniaturized compared to the conventional system, the reaction surface area per unit volume of the sample can be increased, and the reaction time can be greatly reduced. In addition, since the flow rate can be precisely controlled, reaction and analysis can be performed efficiently. Furthermore, the amount of samples and reagents necessary for reaction and analysis can be reduced.
Japanese Patent Laid-Open No. 2002-214241 (page 4-5, FIG. 1) JP 2001-108619 A (page 4-5, FIG. 1)

  In the above-described microchemical chip, the fluid to be processed flowing through the flow path is a laminar flow. Therefore, when a plurality of different fluids to be treated are supplied from a plurality of supply parts to the flow path and mixed, the plurality of fluids to be treated are mixed using a diffusion phenomenon that occurs while flowing through the flow path. Yes. Therefore, in order to sufficiently mix a plurality of fluids to be processed, it is necessary to form a channel on the downstream side longer than a connection position where the supply unit is connected to the channel.

  However, if the flow path is formed long in order to sufficiently mix the fluid to be processed, there arises a problem that the microchemical chip becomes large.

  On the other hand, if the flow path is formed short in order to reduce the size of the microchemical chip, there arises a problem that mixing of the fluid to be processed becomes insufficient. Further, in the state where the fluid to be processed is not sufficiently mixed, there is a problem that the possibility that the processing becomes insufficient even if a predetermined processing such as a reaction is performed.

  An object of the present invention is to provide a microchemical chip capable of efficiently mixing a plurality of different fluids to be processed without increasing the size of the configuration.

  The present invention includes a base body on which a flow path for flowing a fluid to be processed and a plurality of supply portions connected to the flow path and allowing a plurality of fluids to be processed to flow into the flow path are formed. A microchemical chip that causes a plurality of fluids to be treated to flow into the flow path from the supply section and performs processing by merging the plurality of fluids to be treated, the flow path being more than the supply section. An upper flow passage portion disposed at the same height as the supply portion is connected to a rear end of the lower flow passage portion disposed below, and a heater is provided directly below the upper flow passage portion within the base body. It is provided.

  The microchemical chip of the present invention is characterized in that the upper flow path portion has a bent portion bent in a plane parallel to the main surface of the substrate.

  Furthermore, the microchemical chip of the present invention is characterized in that the heater is provided meandering in a direction intersecting with a bent portion of the upper flow path portion.

  Furthermore, the microchemical chip of the present invention is characterized in that the substrate is made of a ceramic material.

  Furthermore, the microchemical chip of the present invention is characterized in that the ceramic green sheet on which the substrate is laminated is fired and integrated.

  Furthermore, the microchemical chip of the present invention is characterized in that a lid formed by firing and integrating a ceramic green sheet with respect to the substrate is disposed on the substrate.

  According to the present invention, the flow path is formed by connecting the upper flow path portion disposed at the same height position as the supply portion to the rear end of the lower flow passage portion disposed below the supply portion. In the base, a heater is provided directly below the upper flow path portion, thereby allowing a plurality of combined fluids to flow through the bent portion of the flow path formed by the upper flow path portion and the lower flow path portion. Therefore, a plurality of fluids to be processed can be mixed with high mixing efficiency even in a short flow path as compared with the case where mixing is performed only by diffusion as in the prior art. Moreover, since the predetermined process is performed in a state where the plurality of fluids to be processed are sufficiently mixed with high mixing efficiency, the predetermined process can be reliably performed as compared with the case where the mixing is insufficient. Furthermore, since the length of the flow path can be shortened compared to the case of mixing only by diffusion, the microchemical chip can be miniaturized, and the flow path is heated at a predetermined temperature using a heater, A plurality of fluids to be treated can be reacted.

  According to the present invention, the upper flow path portion has a bent portion that is bent in a plane parallel to the main surface of the base body, and the heater intersects the bent portion of the upper flow path portion. For example, the reaction is performed by flowing a compound as a raw material from one supply unit, flowing a reagent from the other supply unit, and merging the compound and the reagent and heating them with a heater. In this case, since the compound and the reagent can be heated in a sufficiently mixed state, the compound and the reagent can be reacted efficiently and the yield of the reaction product to be taken out can be improved.

  Furthermore, according to the present invention, since the substrate is made of a ceramic material, it is possible to obtain a microchemical chip excellent in chemical resistance as compared with a resin or the like.

  Furthermore, according to the present invention, the laminated ceramic green sheets are integrated by firing to form a substrate, thereby performing an etching process required when forming a flow path in the substrate made of silicon, glass, or resin. A microchemical chip can be manufactured only by performing simple processing without performing such complicated processing.

  Further, according to the present invention, by attaching the ceramic green sheet to the substrate by baking and integrating the lid on the substrate, it is not necessary to attach the lid after forming the substrate. Can be improved.

  FIG. 1A is a plan view showing a simplified configuration of a microchemical chip 1 according to an embodiment of the present invention. FIG. 1B is a partial cross-sectional view showing a cross-sectional configuration taken along cutting plane lines II, II-II, and III-III of the microchemical chip 1 shown in FIG. In FIG. 1B, cross-sectional configurations along section line II, II-II, and III-III are shown side by side.

  The microchemical chip 1 has a flow channel 12 through which a fluid to be treated is circulated, two supply units 13a and 13b that allow the fluid to be treated to flow into the flow channel 12, a treatment unit 14, and a fluid after treatment to the outside. And a base 11 provided with a collecting portion 15 to be provided. The base body 11 includes a base body 20 having a groove portion formed on one surface and a lid body 21 which is a covering portion. The surface of the base body 20 on which the groove portions 33 and 34 are formed is covered with the lid body 21. 12 is formed. The flow path 12 has bent portions R1, R2, R3, and R4 in a region indicated by reference numeral 23 on the downstream side in the flow direction of the fluid to be treated from the position 22 to which the supply units 13a and 13b are connected. Yes. The bent portions R1 to R4 are formed by connecting two flow paths 12a and 12b having different distances from the surface of the base body 11 with two flow paths 12c and 12d extending in a direction perpendicular to the base surface. Yes. Further, as shown in FIG. 1B, the flow path 12 includes a lower flow path section disposed below the supply sections 13a and 13b, and the supply sections 13a and 13b at the rear end of the lower flow path section. The upper flow path part arrange | positioned in the same height position is connected.

  The supply unit 13a is connected to the flow path 12 upstream of the supply flow path 17a connected to the flow path 12, the supply port 16a provided at the end of the supply flow path 17a, and the position 22 connected to the flow path 12. And a micropump 18a provided on the side. Similarly, the supply part 13b contains the supply flow path 17b, the supply port 16b, and the micropump 18b. The supply ports 16a and 16b are opened so that the fluid to be processed can be injected into the supply channels 17a and 17b from the outside. The collection unit 15 is realized with an opening so that the fluid to be processed can be taken out from the flow path 12.

  A heater 19 is provided inside the base body 20 and below the flow path 12 of the processing unit 14. The flow path 12 of the processing unit 14 is formed to be bent so as to pass a plurality of times above the heater 19. A wiring (not shown) for connecting the heater 19 and an external power source is led out from the heater 19 on the surface of the base 11. This wiring is formed of a metal material having a resistance value lower than that of the heater 19.

  In the microchemical chip 1, two types of fluids to be processed are respectively introduced into the flow channel 12 from the two supply units 13 a and 13 b and merged, and the flow channel 12 is heated at a predetermined temperature using the heater 19 in the processing unit 14. Then, the two kinds of fluids to be treated that are flowed in are reacted, and the obtained reaction product is derived from the collection unit 15.

The cross-sectional areas of the flow channel 12 and the supply flow channels 17a and 17b are 2.5 × 10 ⁻³ mm in order to efficiently send and mix the specimen, reagent, or cleaning solution flowing from the supply units 13a and 13b. it is preferably ² or more 1 mm ² or less. However, the fluid cross-sectional area flows through the 2.5 × ¹⁰ -3 ^{mm 2} ~1mm 2 about the flow path, since generally flows in a laminar flow state, is only allowed to merge two supply passage 17a, the 17b, The two types of fluids to be processed that are respectively flowed into the flow path 12 from the supply units 13a and 13b and mixed together are mixed only by diffusion. Therefore, it is necessary to provide a long flow path in order to completely mix the two types of fluids to be treated, and there is a limit to downsizing the microchemical chip.

  On the other hand, in the present embodiment, the flow path 12 in the region 23 where the two types of fluids to be treated which are respectively flowed from the supply portions 13a and 13b and joined as described above has the bent portions R1 to R4. Therefore, turbulent flow can be generated when the joined fluids to be processed pass through the bent portions R1 to R4. Thereby, the joined fluids to be processed can be efficiently mixed, and the flow path 12 necessary for mixing can be shortened. Therefore, the microchemical chip 1 that can efficiently mix a plurality of fluids to be processed can be realized without increasing the size of the configuration. Thereby, the miniaturization of the microchemical system using the microchemical chip can be achieved.

  Moreover, in this embodiment, since the flow path 12 has bending part R1-R4 in the area | region 23 of the flow direction upstream of the to-be-processed fluid rather than the process part 14, the to-be-processed fluid merged is the process part. When reaching 14, it is well mixed. Therefore, for example, when a compound as a raw material is supplied from the supply unit 13a, a reagent is supplied from the supply unit 13b, the compound and the reagent are combined and heated by the heater 19 of the processing unit 14, the compound and the reagent are reacted. Can be heated in a sufficiently mixed state, so that the compound and the reagent can be reacted efficiently and the yield of the reaction product taken out from the collection unit 15 can be improved.

  In addition, as described above, the bent portions R1 to R4 of the flow channel 12 have two flow channels 12c and 12d extending in a direction perpendicular to the substrate surface through two flow channels 12a and 12b having different distances from the substrate surface. It is formed by connecting with. That is, the bent portions R <b> 1 to R <b> 4 are not formed on one plane parallel to the surface of the substrate 11, but three-dimensionally formed inside the substrate 11. Therefore, it will be bent. In this case, the bent portion is bent in the region 23 as compared to the case where the flow path 12 in the region 23 is bent in a plane by forming the bent portion on a plane parallel to the surface of the substrate 11. The area occupied by the projected image of the channel 12 on the surface of the substrate can be reduced. Therefore, the microchemical chip 1 can be further reduced in size.

  The base body 20 can be made of a ceramic material, silicon, glass, resin, or the like, and among these, it is preferable to use a ceramic material. Since the ceramic material is superior in chemical resistance compared to a resin or the like, the base body 20 is made of a ceramic material, thereby obtaining the microchemical chip 1 that is excellent in chemical resistance and can be used under various conditions. it can. As the ceramic material constituting the base body 20, for example, an aluminum oxide sintered body, a mullite sintered body, a glass ceramic sintered body, or the like can be used.

  The lid 21 can be made of glass or ceramic material.

As described above, the cross-sectional areas of the flow channel 12 and the supply flow channels 17a and 17b are 2.5 × in order to efficiently send and mix the specimen, reagent, or cleaning liquid flowing in from the supply units 13a and 13b. it is preferably 10 ^-3 mm ² or more 1 mm ² or less. If the cross-sectional area of the flow channel 12 and the supply flow channels 17a and 17b exceeds 1 mm ² , the amount of the specimen, reagent, or washing solution to be fed becomes too large, increasing the reaction surface area per unit volume and reducing the reaction time. The effect of the microchemical chip that can be greatly reduced cannot be obtained sufficiently. Moreover, when the cross-sectional areas of the flow path 12 and the supply flow paths 17a and 17b are less than 2.5 × 10 ⁻³ mm ² , pressure loss due to the micropumps 18a and 18b becomes large, causing a problem in liquid feeding. Thus, the channel 12 and the supply passage 17a, and the cross-sectional area of the 17b 2.5 × ¹⁰ -3 mm ² or more 1 mm ² or less.

  The width w of the flow channel 12 and the supply flow channels 17a and 17b is preferably 50 to 1000 μm, more preferably 100 to 500 μm. Further, the depth d of the flow channel 12 and the supply flow channels 17a and 17b is preferably 50 to 1000 μm, more preferably 100 to 500 μm, and the cross sectional area may be set. The relationship between the width and the depth is preferably short side length / long side length ≧ 0.4, and more preferably short side length / long side length ≧ 0.6. When the short side length / long side length is less than 0.4, the pressure loss increases and a problem occurs in liquid feeding.

  The external dimensions of the microchemical chip 1 are, for example, a width A of about 40 mm, a depth B of about 70 mm, and a height C of 1 to 2 mm. The dimensions may be used.

  In addition, the used microchemical chip 1 can be used again if it is washed by supplying a cleaning liquid from the supply units 13a and 13b.

  Next, a method for manufacturing the microchemical chip 1 shown in FIG. 1 will be described. In the present embodiment, a case where the base body 20 is made of a ceramic material will be described. FIG. 2 is a plan view showing a processed state of the ceramic green sheets 31 and 32. FIG. 3 is a partial cross-sectional view showing a state in which the ceramic green sheets 31 and 32 are laminated.

  First, an appropriate organic binder and solvent are mixed with the raw material powder, and if necessary, a plasticizer or a dispersant is added to form a slurry, which is then formed into a sheet by the doctor blade method or the calender roll method. A ceramic green sheet (also called a ceramic raw sheet) is formed. As the raw material powder, for example, when the base body 20 is made of an aluminum oxide sintered body, aluminum oxide, silicon oxide, magnesium oxide, calcium oxide, or the like is used.

  In the present embodiment, the base body 20 is formed using two ceramic green sheets formed in this manner. First, as shown in FIG. 2A, a mold is pressed against the surface of the first ceramic green sheet 31 to form the grooves 33 and 34. Further, as shown in FIG. 2 (b), a mold is pressed against the surface of the second ceramic green sheet 32 to form a groove 37. At this time, a die having a shape in which the shape of desired grooves 33 and 34 is transferred in the case of the ceramic green sheet 31 is used as a die, and a shape in which the shape of the desired groove 37 is transferred in the case of the ceramic green sheet 32. Is used. The pressing force when pressing the mold is adjusted according to the viscosity of the slurry before being formed into the ceramic green sheet. For example, when the viscosity of the slurry is 1 to 4 Pa · s, the slurry is pressed with a pressing force of 2.5 to 7 MPa. The material of the mold is not particularly limited, and may be a mold or a wooden mold.

  As shown in FIG. 2A, through holes 35 and 36 for communicating the groove portions 33 and 34 of the ceramic green sheet 31 and the groove portion 37 of the ceramic green sheet 32 are formed in the ceramic green sheet 31. The through holes 35 and 36 can be formed by punching the ceramic green sheet 31 with a punch. It can also be formed using a laser or a micro drill. The through holes 35 and 36 correspond to the flow paths 12c and 12d extending in the direction perpendicular to the substrate surface described above.

  Further, as shown in FIG. 2B, the conductive paste is applied to the surface of the ceramic green sheet 32 where the groove 37 is formed in a predetermined shape by screen printing or the like, thereby connecting the heater 19 and the external power source. A wiring pattern 38 is formed. The conductive paste can be obtained by mixing an appropriate organic binder and a solvent with a metal material powder such as tungsten, molybdenum, manganese, copper, silver, nickel, palladium, or gold. As the conductive paste forming the heater 19, a paste obtained by adding 5 to 30% by weight of ceramic powder to the above-described metal material powder is used so that a predetermined resistance value is obtained after firing.

  Next, as shown in FIG. 3, the ceramic green sheet 31 in which the groove portions 33 and 34 are formed is laminated on the surface of the ceramic green sheet 32 in which the groove portion 37 is formed. At this time, the groove portion 37 of the ceramic green sheet 32 is covered with the ceramic green sheet 31, and the groove portions 33 and 34 of the ceramic green sheet 31 and the groove portion 37 of the ceramic green sheet 32 are formed in the through hole formed in the ceramic green sheet 31. Laminate 35 and 36 so as to communicate with each other. The laminated ceramic green sheets 31 and 32 are sintered at a temperature of about 1600 ° C. As described above, the base body 20 shown in FIG. 1 is formed.

  FIG. 4 is a plan view showing the configuration of the lid 21 in a simplified manner. As shown in FIG. 4, the supply ports 16 a and 16 b of the substrate 41 made of, for example, glass or a ceramic material, and the sampling portion 15 are positioned in the grooves 33 of the ceramic green sheet 31 shown in FIG. The through-holes 42 a and 42 b that communicate with each other and the through-hole 43 that communicates with the groove 34 are formed to obtain the lid 21.

  The lid 21 is bonded to the surface of the base body 20 where the grooves 33 and 34 are exposed. For example, when the lid 21 is made of glass, the lid 21 and the base body 20 are bonded by heating and pressing, and when the lid 21 is made of a ceramic material, they are bonded by a glass adhesive or the like.

The predetermined is the position of the surface of the lid 21, for example, lead zirconate titanate (PZT; composition _{formula: Pb (Zr, Ti) O} 3) a piezoelectric material 44a, such as, with paste 44b, the piezoelectric material 44a, 44b A wiring (not shown) for applying a voltage is formed. The piezoelectric materials 44a and 44b can vibrate the lid 21 above the supply flow paths 17a and 17b by expanding and contracting according to the applied voltage, so that the piezoelectric materials 44a and 44b are supplied to the supply flow paths 17a and 17b. The micropumps 18a and 18b for feeding liquid can be formed by sticking to the upper lid body 21.

  As described above, the substrate 11 shown in FIG. 1 is formed, and the microchemical chip 1 is obtained. In this manner, the three-dimensional flow path 12 formed by connecting the plurality of flow paths 12a and 12b having different distances from the surface of the base body 11 with the flow paths 12c and 12d extending in the direction perpendicular to the base surface is provided as the base body 11. The microchemical chip 1 in which the flow path 12 is bent in the region 23 downstream in the flow direction of the fluid to be processed from the position 22 to which the supply parts 13a and 13b are connected can be manufactured. it can.

  In the present embodiment, the molds are pressed on the surfaces of the ceramic green sheets 31 and 32 to form the groove portions 33, 34, and 37, the ceramic green sheets 31 are laminated so as to cover the groove portions 37, and the laminated ceramic green sheets 31. 32 is sintered, and the base body 11 having the flow path 12 is formed by covering the grooves 33 and 34 on the surface of the base body 20 with the lid 21. Therefore, the microchemical chip 1 can be manufactured by performing simple processing without performing complicated processing such as etching processing required when forming a flow path in a substrate made of silicon, glass, or resin. it can.

  As described above, the microchemical chip 1 of the present embodiment includes the two supply units 13a and 13b, but is not limited thereto, and may include three or more supply units. When two or more supply units are provided, the supply units do not have to be provided to join at one point, and may be provided so as to be connected to different positions of the flow path 12. In this case, it is preferable that the flow path on the downstream side in the flow direction of the fluid to be processed from the position where each supply unit is connected is bent similarly to the flow path 12 in the region 23 shown in FIG.

  Moreover, although the heater 29 is a structure provided in one place, it is not limited to this, You may provide in two or more places. Thus, a complicated reaction can be controlled by providing three or more supply units and two or more heaters.

  In the present embodiment, the flow path 12 in the region 23 on the downstream side in the flow direction of the fluid to be processed from the position 22 to which the supply units 13 a and 13 b are connected has two flow paths having different distances from the surface of the substrate 11. Although the passages 12a and 12b are bent by being connected, the present invention is not limited thereto, and the passages 12a and 12b may be bent by connecting three or more flow paths having different distances from the surface of the base 11. . Further, similarly to the flow path 12 of the processing unit 14, it may be formed by being bent on a plane parallel to the surface of the substrate 11. The region where the flow path 12 is bent is not limited to the region 23.

  In the present embodiment, the flow path 12 of the processing unit 14 on the downstream side in the flow direction of the fluid to be processed also has a bent portion. Therefore, even if the flow path 12 is not bent in the region 23, the flow is merged. Since a turbulent flow is generated in the processed fluid when flowing through the flow path 12 of the processing unit 14, the processed fluid can be mixed efficiently. However, in order to sufficiently increase the efficiency of the reaction in the processing unit 14, it is preferable to form a bent portion in the flow path 12 on the upstream side of the processing unit 14 in the flow direction of the fluid to be processed as in this embodiment. .

  Further, in the microchemical chip 1 of the present embodiment, the collection unit 15 is provided and the reaction product is led out from the collection unit 15, but the detection unit is located upstream of the collection unit 15 or the collection unit 15 in the flow direction of the fluid to be processed. The reaction product of a biochemical reaction such as a chemical reaction, an antigen-antibody reaction, or an enzyme reaction can be detected. In this case, it is preferable to form a bent portion in the flow path 12 on the upstream side in the flow direction of the fluid to be processed with respect to the detection unit.

  In this embodiment, the micropumps 18a and 18b are provided as the liquid feeding means, but a configuration in which the micropumps 18a and 18b are not provided is also possible. In this case, when injecting the fluid to be processed from the supply ports 16a and 16b, the fluid to be processed is sent from the supply ports 16a and 16b to the collection unit 15 by pushing the fluid to be processed with a microsyringe or the like. be able to. Moreover, when inject | pouring, liquid can also be sent by injecting, applying pressure to a to-be-processed fluid with the pump etc. which are provided outside. Further, after injecting the fluid to be processed from the supply ports 16a and 16b, the liquid can be fed by sucking with a microsyringe or the like from the collection unit 15 realized by the opening.

  Further, although the lid body 21 is bonded to the base body 20, the lid body 21 is not limited thereto and may be detachably attached to the base body 20. For example, a configuration in which silicone rubber or the like is sandwiched between the base body 20 and the lid 21 and pressure is applied to the entire microchemical chip may be employed. By allowing the lid 21 to be removed from the base body 20 in this manner, cleaning when reused becomes easy.

  In the method of manufacturing the microchemical chip 1 of the present embodiment, the base body 20 includes the ceramic green sheet 31 in which the groove portions 33 and 34 and the through holes 35 and 36 are formed, and the ceramic green sheet 32 in which the groove portion 37 is formed. However, the present invention is not limited to this, and may be formed from three or more ceramic green sheets. For example, a ceramic green sheet having a through hole is laminated between the ceramic green sheet 31 and the ceramic green sheet 32, and the ceramic green sheet 31 is formed by the through hole of the ceramic green sheet and the through hole of the ceramic green sheet 31. When the base body 20 is formed by communicating the groove portions 33 and 34 with the groove portion 37 of the ceramic green sheet 32, the flow path 12a can be formed at a deeper position from the surface of the base body 11.

  Further, in the method of manufacturing the microchemical chip 1 of the present embodiment, the base body 11 is fired while the groove portions 33 and 34 on the surface of the ceramic green sheet 31 are exposed to form the base body 20, and then the base body 20. Although it is formed by covering the groove portions 33 and 34 on the surface with the lid body 21, the present invention is not limited to this, and a through hole similar to the lid body 21 communicating with the groove portions 33 and 34 is formed on the surface of the ceramic green sheet 31. It may be formed by further laminating and firing a ceramic green sheet on which is formed. If the base is formed in this way, it is not necessary to attach the lid 21 after the base body 20 is formed, so that productivity can be improved. Further, when a ceramic piezoelectric material such as the above-described PZT is used for the piezoelectric materials 44a and 44b constituting the micropumps 18a and 18b, a ceramic green sheet in which a through hole communicating with the groove portions 33 and 34 is formed is predetermined. The ceramic piezoelectric material can be attached at a certain position and then fired at the same time.

FIG. 1A is a plan view showing a simplified configuration of a microchemical chip 1 according to an embodiment of the present invention. FIG. 1B is a partial cross-sectional view showing a cross-sectional configuration taken along cutting plane lines II, II-II, and III-III of the microchemical chip 1 shown in FIG. It is a top view which shows the processing state of the ceramic green sheets 31 and 32. FIG. It is a fragmentary sectional view showing the state where ceramic green sheets 31 and 32 were laminated. 3 is a plan view showing a simplified configuration of a lid body 21. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Micro chemical chip | tip 11 Base | substrate 12,12a, 12b, 12c, 12d Flow path 13a, 13b Supply part 14 Processing part 15 Sampling part 16a, 16b Supply port 17a, 17b Supply flow path 18a, 18b Micro pump 19 Heater 20 Base body 21 Lids 31, 32 Ceramic green sheets 33, 34, 37 Grooves 35, 36, 42a, 42b, 43 Through holes 38 Wiring patterns 41 Substrates 44a, 44b Piezoelectric materials R1 to R4 Bent portions

Claims (6)

A substrate having a flow path through which the fluid to be treated is circulated, and a plurality of supply portions connected to the flow path and into which the plurality of fluids to be treated are respectively introduced into the flow paths; A microchemical chip that causes a plurality of fluids to be treated to flow into the flow path and performs processing by joining the plurality of fluids to be treated,
The flow path is formed by connecting an upper flow path portion disposed at the same height position as the supply section to a rear end of a lower flow path section disposed below the supply section. A microchemical chip comprising a heater directly below the upper flow path. 2. The microchemical chip according to claim 1, wherein the upper flow path portion has a bent portion that is bent in a plane parallel to the main surface of the substrate. The microchemical chip according to claim 2, wherein the heater is provided meandering in a direction intersecting with a bent portion of the upper flow path portion. 4. The microchemical chip according to claim 1, wherein the substrate is made of a ceramic material. The microchemical chip according to any one of claims 1 to 4, wherein the substrate is formed by firing and integrating laminated ceramic green sheets. 6. The microchemical chip according to claim 5, wherein a lid made by firing and integrating a ceramic green sheet with respect to the substrate is disposed on the substrate.

Images