JP2007256209A - Connection state inspection method and device - Google Patents

Connection state inspection method and device Download PDF

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Publication number
JP2007256209A
JP2007256209A JP2006084181A JP2006084181A JP2007256209A JP 2007256209 A JP2007256209 A JP 2007256209A JP 2006084181 A JP2006084181 A JP 2006084181A JP 2006084181 A JP2006084181 A JP 2006084181A JP 2007256209 A JP2007256209 A JP 2007256209A
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height
flexible substrate
connection state
outermost electrode
electrode position
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Tomohiro Iguchi
知洋 井口
Takashi Nagatsuka
貴史 長塚
Tomomi Wakabayashi
伴実 若林
Michiko Oishi
美智子 大石
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Toshiba Corp
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Toshiba Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a connection state inspection method which enables automatic and accurate determination of the state of pressure-bonding connection of a board that uses ACF. <P>SOLUTION: In the connection state inspection method, the height of a flexible board is measured for each prescribed interval. For the height measurement data, in the surroundings of each prescribed reference position, corresponding to the vicinity of both ends of the pressure bonding connection portion, a range with the same height at a prescribed width is detected as the outermost electrode position. A position which is outside the electrode detected as the outermost electrode position on the flexible board and has a height the same as the electrode detected as the outermost electrode position is detected. The comparison of the distance from the outermost electrode position to the position with the same height is performed in each of both end parts of the pressure bonding connection portion on the flexible board, and this difference is determined as the connection failure, when the difference is not larger than the reference value. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、所定の電極面に対してフレキシブル基板を異方性導電接着剤にて圧着接続する工程における接続状態検査方法及び装置に関する。   The present invention relates to a connection state inspection method and apparatus in a step of crimping and connecting a flexible substrate to a predetermined electrode surface with an anisotropic conductive adhesive.

フレキシブル基板と電極との接続工程において、その接続状態の良否の判定は、人手による外観検査により行うか、検査装置による画像検査によって行っている。しかしながら、人手による外観検査では、検査点数が多くなればコストが高くなる問題点があり、検査装置による検査では接続状態の良否を正確に判別することができない問題点があった。
特開2003−269934号公報
In the connection process between the flexible substrate and the electrode, whether the connection state is good or bad is determined by manual appearance inspection or image inspection using an inspection apparatus. However, in the appearance inspection by hand, there is a problem that the cost increases as the number of inspection points increases, and in the inspection by the inspection apparatus, there is a problem that the quality of the connection state cannot be accurately determined.
JP 2003-269934 A

本発明は、このような従来の技術的課題に鑑みてなされたもので、自動的に正確に電極間の接続状態を判別できる接続状態検査方法及び装置を提供することを目的とする。   The present invention has been made in view of such a conventional technical problem, and an object thereof is to provide a connection state inspection method and apparatus that can automatically and accurately determine the connection state between electrodes.

本発明は、所定の電極面に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否を判定する接続状態検査方法であって、前記フレキシブル基板の表面高さを所定間隔毎に測定する高さ測定ステップと、前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において、所定幅で同一高さとなる範囲を最外電極位置として検出する最外電極位置検出ステップと、前記フレキシブル基板上で、前記最外電極位置検出ステップで最外電極位置とされた電極より外側の位置で、かつ、当該最外電極位置とされた電極の高さと同一の高さの位置を検出するステップと、前記フレキシブル基板上の前記圧着接続部分の両端近傍それぞれでの前記最外電極位置から前記同一の高さの位置までの距離を求め、その距離が基準値未満の場合に接続不良と判定する接続良否判定ステップとを有するものである。   The present invention is a connection state inspection method in which a flexible substrate is crimped and connected to a predetermined electrode surface with an anisotropic conductive adhesive, and the quality of the connection state is determined, and the surface height of the flexible substrate is determined. A height measurement step that measures at predetermined intervals and a range that is the same height with a predetermined width is detected as the outermost electrode position around each of the predetermined reference positions corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate. An outermost electrode position detecting step, and a position of the outermost electrode position on the flexible substrate outside the electrode determined as the outermost electrode position in the outermost electrode position detecting step and a height of the electrode set as the outermost electrode position. Detecting a position having the same height as the first electrode, and from the outermost electrode position in the vicinity of both ends of the crimp connection portion on the flexible substrate to the position having the same height. Distance determined, the distance is one having a determining connection quality determining step connected with poor if less than the reference value.

また本発明は、配線基板に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否判定を判定する接続状態検査方法であって、前記フレキシブル基板の所定範囲の高さを測定する高さ測定ステップと、前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において、最外電極位置を検出する最外電極位置検出ステップと、前記フレキシブル基板上で、前記最外電極位置検出ステップで検出した最外電極位置の外側の所定範囲内での最下点の高さを検出する最下点検出ステップと、前記フレキシブル基板上で前記最外電極位置の高さと前記最下点の高さとの差を比較し、その差が基準値未満の場合に接続不良と判定する接続良否判定ステップとを有するものである。   The present invention also relates to a connection state inspection method in which a flexible substrate is crimped and connected to a wiring substrate with an anisotropic conductive adhesive, and the connection state inspection method for determining whether the connection state is good or not is provided. A height measuring step for measuring the height, an outermost electrode position detecting step for detecting an outermost electrode position around each of predetermined reference positions corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate, and the flexible A lowermost point detecting step for detecting a height of a lowermost point within a predetermined range outside the outermost electrode position detected by the outermost electrode position detecting step on the substrate; and the outermost electrode position on the flexible substrate. A connection quality determination step of comparing a difference between the height of the electrode position and the height of the lowest point and determining a connection failure when the difference is less than a reference value.

上記発明の接続状態検査方法においては、前記高さ測定ステップでは、レーザ変位計にて前記フレキシブル基板の表面高さを所定間隔毎に測定し、この測定データに対して、前記所定の基準位置の高さを基準にしてレベリングを行い、このレベリング処理後のデータを高さ測定データとして用いるものとすることができる。   In the connection state inspection method of the above invention, in the height measurement step, the surface height of the flexible substrate is measured at a predetermined interval with a laser displacement meter, and the predetermined reference position of the measurement data is measured. Leveling is performed based on the height, and the data after the leveling process can be used as height measurement data.

上記発明の接続状態検査方法においては、さらに、前記高さ測定ステップにて測定した高さのデータの移動平均を求める移動平均ステップを有するものとすることができる。   The connection state inspection method according to the invention may further include a moving average step for obtaining a moving average of the height data measured in the height measuring step.

また、本発明は、所定の電極面に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否を判定する接続状態検査装置であって、前記フレキシブル基板の外表面の高さを所定間隔毎に測定する高さ測定手段と、前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置の周辺において、所定幅で同一高さとなる範囲を最外電極位置として検出する最外電極位置検出手段と、前記フレキシブル基板上で、前記最外電極位置検出手段が最外電極位置とした電極より外側の位置で、かつ、当該最外電極位置とした電極の高さと同一の高さの位置を検出する位置検出手段と、前記フレキシブル基板上の前記圧着接続部分の両端近傍それぞれでの前記最外電極位置から前記同一の高さの位置までの距離を求め、その距離が基準値未満の場合に接続不良と判定する接続良否判定手段とを備えたものである。   In addition, the present invention is a connection state inspection apparatus for crimping and connecting a flexible substrate to a predetermined electrode surface with an anisotropic conductive adhesive, and determining the quality of the connection state, the outer surface of the flexible substrate A height measuring means for measuring the height of the outer peripheral electrode at a predetermined interval, and an outermost electrode having a predetermined width and the same height around a predetermined reference position corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate. An outermost electrode position detecting means for detecting a position of the electrode on the flexible substrate at a position outside the electrode at which the outermost electrode position detecting means is the outermost electrode position and the outermost electrode position. A position detecting means for detecting a position having the same height as the height, and a distance from the outermost electrode position to the position having the same height in the vicinity of both ends of the crimping connection portion on the flexible substrate. , In which the distance is a determining connection quality determination unit connected to the failure in the case of less than the reference value.

また本発明は、配線基板に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否判定を判定する接続状態検査装置であって、前記フレキシブル基板の所定範囲の高さを測定する高さ測定手段と、前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において、最外電極位置を検出する最外電極位置検出手段と、前記フレキシブル基板上で、前記最外電極位置検出手段が検出した最外電極位置の外側の所定範囲内での最下点の高さを検出する最下点検出手段と、前記フレキシブル基板上で前記最外電極位置の高さと前記最下点の高さとの差を比較し、その差が基準値未満の場合に接続不良と判定する接続良否判定手段とを備えたことを特徴とするものである。   In addition, the present invention is a connection state inspection apparatus that crimps and connects a flexible substrate to a wiring substrate with an anisotropic conductive adhesive, and determines whether or not the connection state is good. A height measuring means for measuring the height, an outermost electrode position detecting means for detecting an outermost electrode position around each of predetermined reference positions corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate, and the flexible A lowermost point detecting means for detecting a height of the lowest point within a predetermined range outside the outermost electrode position detected by the outermost electrode position detecting means on the substrate; and the outermost electrode on the flexible substrate. A connection quality determination unit is provided that compares the difference between the height of the electrode position and the height of the lowest point, and determines that the connection is defective when the difference is less than a reference value.

上記発明の接続状態検査装置においては、前記高さ測定手段は、前記フレキシブル基板の表面高さを所定間隔毎に測定するレーザ変位計と、このレーザ変位計の測定データに対して、前記所定の基準位置の高さを基準にしてレベリングを行い、このレベリング処理後のデータを高さ測定データとして出力するレベリング手段から成るものとすることができる。   In the connection state inspection apparatus according to the invention, the height measuring means measures the surface height of the flexible substrate at predetermined intervals, and the predetermined data is measured with respect to the measurement data of the laser displacement meter. Leveling means that performs leveling with reference to the height of the reference position and outputs the data after the leveling process as height measurement data can be used.

上記発明の接続状態検査装置においては、さらに、前記高さ測定手段の測定した高さのデータの移動平均を求める移動平均演算手段を備えたものとすることができる。   The connection state inspection apparatus according to the present invention may further include a moving average calculating means for obtaining a moving average of height data measured by the height measuring means.

本発明の接続状態検査方法及び装置によれば、所定の電極面に対するフレキシブル基板の接続状態を自動的に精度良く判別できる。   According to the connection state inspection method and apparatus of the present invention, it is possible to automatically and accurately determine the connection state of the flexible substrate to a predetermined electrode surface.

以下、本発明の実施の形態を図に基づいて詳説する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(第1の実施の形態)図1は、本発明の第1の実施の形態の接続状態検査システムを示しており、加熱圧着装置1のステージ2から搬出されてきた圧着済み部品3に対して形状測定を行うレーザ変位計4と、接続状態検査装置5から構成される。   (First Embodiment) FIG. 1 shows a connection state inspection system according to a first embodiment of the present invention. For the crimped component 3 carried out from the stage 2 of the thermocompression bonding apparatus 1, FIG. It consists of a laser displacement meter 4 that performs shape measurement and a connection state inspection device 5.

ここで、異方性導電接着剤として異方性導電フィルムACF(Anisotropic Condactive Film)を用いてプリント配線基板の所定の電極面にフレキシブル基板の電極を圧着接続する工程は、図10(a)、(b)に示すようなものであり、ステージ101上に、電極102が形成されたプリント配線基板103を載置し、これに対してACF104を重ねる。次に、電極105の形成されたフレキシブル基板106をその電極105面をプリント配線基板103側の電極が形成されている面(電極面)に向けてACF104上に重ね、圧着ツール107にてフレキシブル基板106を加熱加圧する。これにより、ACF104中の荷電粒子104Aが電極102,105間に介在して両電極間を電気的に接続し、同時に、ACF104の接着剤104Bがプリント配線基板103とフレキシブル基板106との間を絶縁状態で機械的に接着する。こうして圧着済み部品3を得る。   Here, the step of crimping and connecting the electrode of the flexible substrate to a predetermined electrode surface of the printed wiring board using an anisotropic conductive film ACF (Anisotropic Condactive Film) as the anisotropic conductive adhesive is shown in FIG. As shown in FIG. 6B, a printed wiring board 103 on which an electrode 102 is formed is placed on a stage 101, and an ACF 104 is overlaid thereon. Next, the flexible substrate 106 on which the electrode 105 is formed is overlaid on the ACF 104 with the electrode 105 surface facing the surface (electrode surface) on which the electrode on the printed wiring board 103 side is formed, and the flexible substrate 106 is used with the crimping tool 107. 106 is heated and pressurized. As a result, the charged particles 104A in the ACF 104 are interposed between the electrodes 102 and 105 to electrically connect both electrodes, and at the same time, the adhesive 104B of the ACF 104 insulates the printed wiring board 103 and the flexible board 106 from each other. Adhere mechanically. In this way, the crimped part 3 is obtained.

そして接続状態検査装置5は、レーザ変位計4の測定データを取り込み、これを所定の検査プログラムにより処理するコンピュータシステムによって実現されるものであるが、演算処理機能に分解して示せば、図2の機能ブロック図のような構成である。すなわち、レーザ変位計4による所定間隔、例えば、5μmごとの測定データを処理する形状測定データ入力部6と、この所定間隔ごとの測定データを所定個数ずつ移動平均計算する平均化処理部7と、移動平均処理後の測定データに対してレベリング処理を行うレベリング処理部8と、レベリング処理後のデータから両最外位置の電極の位置を検出する電極位置検出部9と、この電極位置検出部9の検出した両最外位置の電極の位置から接続基板電極間の接続状態の良否を判別する接続状態判別処理部10から構成されている。   The connection state inspection device 5 is realized by a computer system that takes in the measurement data of the laser displacement meter 4 and processes it according to a predetermined inspection program. This is a configuration as shown in FIG. That is, a shape measurement data input unit 6 for processing measurement data at predetermined intervals by the laser displacement meter 4, for example, every 5 μm, and an averaging processing unit 7 for calculating a moving average of the measurement data at predetermined intervals by a predetermined number, A leveling processing unit 8 that performs leveling processing on the measurement data after moving average processing, an electrode position detection unit 9 that detects the positions of both outermost electrodes from the data after leveling processing, and the electrode position detection unit 9 The connection state determination processing unit 10 determines whether the connection state between the connection substrate electrodes is good or bad from the positions of the electrodes at the outermost positions detected by the above.

次に、上記構成の接続状態検査装置による接続状態検査方法について、図3のフローチャートを用いて説明する。レーザ変位計4から、所定間隔ごと、例えば、5μmごとの測定データを変位測定部6で取り込む(ステップS1,S2)。図4(a)は、圧着済み部品3に対する5μmごと、全5mm長の高さ測定データをグラフ化して示している。   Next, a connection state inspection method by the connection state inspection apparatus having the above configuration will be described with reference to the flowchart of FIG. Measurement data at a predetermined interval, for example, every 5 μm is taken in from the laser displacement meter 4 by the displacement measuring unit 6 (steps S1 and S2). FIG. 4A is a graph showing height measurement data of a total length of 5 mm for each 5 μm of the crimped component 3.

次に、平均化処理部7が所定個数ずつの測定データ、例えば、連続する5個ずつのデータの移動平均を求め、測定ノイズを削減する(ステップS3)。図4(b)は、図4(a)に示した圧着済み部品3に対する5μmごと全5mm長の高さ測定データを5個ずつ、つまり、レンジ25μmの移動平均処理した結果を示している。   Next, the averaging processing unit 7 calculates a moving average of a predetermined number of pieces of measurement data, for example, five pieces of continuous data, and reduces measurement noise (step S3). FIG. 4B shows the result of moving average processing of five pieces of height measurement data of a total length of 5 mm for every 5 μm, that is, a range of 25 μm for the crimped part 3 shown in FIG.

次に、レベリング処理部8によって、測定開始点のデータから測定終了点のデータまで、平均化処理した測定データに対して、非測定対象の圧着済み部品3の長さを考慮し、横軸X軸の所定の座標点X=−α,αの高さを基準にしてレベリングする(ステップS4)。例えば、図4(c)は、図4(b)の平均化処理後の測定データに対して、X=−1.1とX=1.1の高さを基準にしてレベリングした結果を示している。尚、このグラフは、基準±0.1で最大値を基準としてレベリングした結果である。   Next, with respect to the measurement data averaged from the measurement start point data to the measurement end point data by the leveling processing unit 8, the length of the non-measurement target crimped part 3 is taken into consideration, and the horizontal axis X Leveling is performed on the basis of the height of predetermined coordinate point X = −α, α of the axis (step S4). For example, FIG. 4C shows the result of leveling the measurement data after the averaging process of FIG. 4B with reference to the heights of X = −1.1 and X = 1.1. ing. This graph shows the result of leveling with reference to ± 0.1 and the maximum value as a reference.

続いて、電極位置検出部9にて、基準座標点X=−α,αの周辺において所定の間隔で同一高さとなる範囲を最外電極位置として検出する(ステップS5)。図4(d)は最外位置の電極を検出した結果を示している。   Subsequently, the electrode position detector 9 detects a range having the same height at a predetermined interval around the reference coordinate point X = −α, α as the outermost electrode position (step S5). FIG. 4D shows the result of detecting the outermost electrode.

この電極位置の検出方法は、図5、そして図6のフローチャートに示している。   This electrode position detection method is shown in the flowcharts of FIGS.

(i)図5(a)に示すように、レベリング基準点を仮の電極中心として決定する(ステップS11)。   (i) As shown in FIG. 5A, the leveling reference point is determined as the temporary electrode center (step S11).

(ii)(i)で決定した仮の電極中心、すなわち、レベリング基準点の左右0.1mmの位置の高さ(A,B)を平均化測定データから抽出する(ステップS12)。   (ii) The temporary electrode center determined in (i), that is, the height (A, B) at the position 0.1 mm to the left and right of the leveling reference point is extracted from the averaged measurement data (step S12).

(iii)(ii)で抽出した(A,B)について次の判定を行う(ステップS13)。A>Bのとき、つまり、図5(a)の状態であれば、同図(b)のように仮の電極中心を左に移動させ(ステップS14)、逆にA<Bのとき、仮の電極中心を右へ移動させ(ステップS15)、(ii)のステップS12の処理を再度実行する。そして図5(b)に示すように、A=Bのときには、A,B点を電極端部と決定する(ステップS16)。   (iii) The following determination is performed for (A, B) extracted in (ii) (step S13). When A> B, that is, in the state of FIG. 5A, the temporary electrode center is moved to the left as shown in FIG. 5B (step S14). Conversely, when A <B, The center of the electrode is moved to the right (step S15), and the process of step S12 of (ii) is executed again. As shown in FIG. 5B, when A = B, the points A and B are determined as electrode ends (step S16).

こうして圧着済み部品3の形状測定を完了すれば、次に、接続状態判別処理部10による接続状態判別処理に移行する(図3におけるステップS6)。ここでは、図7に示すように、前述のステップS16において決定した左右両側の最外位置の電極からさらに外側において、当該最外位置の電極それぞれと同一の高さになるまでの距離DA,DBを検出する。そして、DA又はDBの大きさが所定値δ未満であれば接続状態は悪いと判別し、所定値δ以上であれば接続状態は良いと判別し、その判別結果を接続状態検査装置5にて表示出力して検査員に知らせ、また必要な検査データを記憶装置に保存する。   When the shape measurement of the crimped component 3 is completed in this way, the process proceeds to the connection state determination process by the connection state determination processing unit 10 (step S6 in FIG. 3). Here, as shown in FIG. 7, distances DA and DB from the outermost electrodes on both the left and right sides determined in step S <b> 16 to the same height as the outermost electrodes on the outer side. Is detected. If the size of DA or DB is less than the predetermined value δ, it is determined that the connection state is bad, and if it is greater than or equal to the predetermined value δ, the connection state is determined to be good. The information is displayed and notified to the inspector, and necessary inspection data is stored in the storage device.

以上により、第1の実施の形態の接続状態検査装置及び接続状態検査方法では、フレキシブル基板の外表面までの距離を高さとして所定間隔毎に測定し、測定した高さのデータの移動平均を求め、この移動平均のデータに対して、所定の基準位置の高さを基準にしてレベリングを行い、所定の基準位置の周辺において、所定幅で同一高さとなる範囲を最外電極位置として検出し、さらに、最外電極位置とされた電極より外側の位置で、かつ、当該最外電極位置とされた電極の高さと同一の高さの位置を検出し、圧着接続部分の両端近傍それぞれでの最外電極位置から同一の高さの位置までの距離を求め、その距離が基準値未満の場合に接続不良と判定するものであり、所定の電極面に対するフレキシブル基板の接続状態を自動的に精度良く判別できる。   As described above, in the connection state inspection apparatus and the connection state inspection method according to the first embodiment, the distance to the outer surface of the flexible substrate is measured at predetermined intervals, and the moving average of the measured height data is calculated. The moving average data is leveled based on the height of a predetermined reference position, and a range having the same height and a predetermined width is detected as the outermost electrode position around the predetermined reference position. Further, a position outside the electrode set as the outermost electrode position and the same height as the height of the electrode set as the outermost electrode position is detected, and the positions near both ends of the crimping connection portion are detected. The distance from the outermost electrode position to the position of the same height is obtained, and when the distance is less than the reference value, it is determined that the connection is defective, and the connection state of the flexible board to the specified electrode surface is automatically accurate. Good size It can be.

尚、上記実施の形態にあって高さ測定データの平均化処理はノイズキャンセルのために行うものであり、個々の測定データの精度が高く、ノイズが少ない測定データが得られる環境では必ずしも必要ではないので、そのような場合には装置から割愛することができる。   In the above embodiment, the averaging process of the height measurement data is performed for noise cancellation, and is not necessarily required in an environment where the measurement data with high accuracy of each measurement data and low noise can be obtained. In such a case, it can be omitted from the device.

(第2の実施の形態)次に、本発明の第2の実施の形態の接続状態検査装置及び接続状態検査方法について説明する。第2の実施の形態の特徴は、フレキシブル基板の所定範囲の高さを測定し、そしてフレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において最外電極位置を検出し、さらに最外電極位置の外側の所定範囲内での最下点の高さを検出し、この最外電極位置の高さと最下点の高さとの差を比較し、その差が基準値未満の場合に接続不良と判定する点にある。   (Second Embodiment) Next, a connection state inspection apparatus and a connection state inspection method according to a second embodiment of the present invention will be described. The feature of the second embodiment is that the height of a predetermined range of the flexible substrate is measured, and the outermost electrode position is detected around each of the predetermined reference positions corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate. In addition, the height of the lowest point within a predetermined range outside the outermost electrode position is detected, and the difference between the height of the outermost electrode position and the height of the lowest point is compared, and the difference is the reference value. If it is less than that, it is determined that the connection is poor.

第2の実施の形態の接続状態検査システムの構成は、第1の実施の形態と同様に図1に示したものであり、また、接続状態検査装置5の機能構成も第1の実施の形態と同様に図2に示したものであり、さらに、接続状態検査装置5が行う接続状態検査方法も図3〜図6に示すものである。ただし、第2の実施の形態の場合、接続状態判別処理部10の行う接続状態判別処理、すなわち図3のフローチャートにおけるステップS6の処理内容が第1の実施の形態とは異なり、以下の通りである。尚、本実施の形態においても、第1の実施の形態と共通する構成要素について共通する符号を用いて説明する。   The configuration of the connection state inspection system of the second embodiment is the same as that of the first embodiment shown in FIG. 1, and the functional configuration of the connection state inspection device 5 is also the first embodiment. The connection state inspection method performed by the connection state inspection apparatus 5 is also shown in FIGS. However, in the case of the second embodiment, the connection state determination processing performed by the connection state determination processing unit 10, that is, the processing content of step S6 in the flowchart of FIG. 3 is different from the first embodiment and is as follows. is there. In the present embodiment also, components common to those in the first embodiment will be described using common reference numerals.

本実施の形態でも圧着部部品3の形状測定を完了すれば、次に、接続状態判別処理部10による接続状態判別処理(図3におけるステップS6)に移行する。本実施の形態の場合、図8、図9に示すように、図6のフローチャートにおけるステップS16において決定した左右両側A,Bにおいて、当該電極の外側の所定範囲L1A〜L2A、またL1B〜L2Bの内において、最下点LmA,LmBの高さを検出する。そして、最下点LmA,LmBの高さと電極A,Bの高さとの差がσ未満であれば接続状態は悪いと判別し、その判別結果を接続状態検査装置にて表示出力して検査員に知らせ、また必要な検査データを記憶装置に保存する。   If the shape measurement of the crimping part 3 is completed also in the present embodiment, the process proceeds to a connection state determination process (step S6 in FIG. 3) by the connection state determination processing unit 10 next. In the case of the present embodiment, as shown in FIGS. 8 and 9, in the left and right sides A and B determined in step S16 in the flowchart of FIG. 6, a predetermined range L1A to L2A outside the electrode and L1B to L2B The heights of the lowest points LmA and LmB are detected. If the difference between the heights of the lowest points LmA and LmB and the heights of the electrodes A and B is less than σ, it is determined that the connection state is bad, and the determination result is displayed and output by the connection state inspection device. And necessary inspection data is stored in a storage device.

本実施の形態によれば、第1の実施の形態と同様に所定の電極面に対するフレキシブル基板の接続状態を自動的に精度良く判別できる。   According to the present embodiment, as in the first embodiment, the connection state of the flexible substrate to the predetermined electrode surface can be automatically determined with high accuracy.

尚、上記実施の形態にあっても高さ測定データの平均化処理はノイズキャンセルのために行うものであり、個々の測定データの精度が高く、ノイズが少ない測定データが得られる環境では必ずしも必要ではないので、そのような場合には装置から割愛することができる。   Even in the above embodiment, the averaging process of the height measurement data is performed for noise cancellation, and is always necessary in an environment where the measurement data with high accuracy of each measurement data and low noise can be obtained. However, in such a case, it can be omitted from the apparatus.

本発明の第1、第2の実施の形態の接続状態検査システムのブロック図。The block diagram of the connection state test | inspection system of the 1st, 2nd embodiment of this invention. 上記実施の形態の接続状態検査システムにおける接続状態検査装置の機能ブロック図。The functional block diagram of the connection state inspection apparatus in the connection state inspection system of the said embodiment. 上記の接続状態検査装置による接続状態検査処理のフローチャート。The flowchart of the connection state inspection process by said connection state inspection apparatus. 上記の接続状態検査装置による接続状態検査処理の各ステップの処理結果を示すグラフ。The graph which shows the process result of each step of the connection state inspection process by said connection state inspection apparatus. 上記の接続状態検査処理における電極位置決定ステップの処理の説明図。Explanatory drawing of the process of the electrode position determination step in said connection state inspection process. 上記の接続状態検査処理における電極位置決定ステップの処理の詳細を示すフローチャート。The flowchart which shows the detail of the process of the electrode position determination step in said connection state inspection process. 本発明の第1の実施の形態による接続状態判別処理の説明図。Explanatory drawing of the connection state discrimination | determination process by the 1st Embodiment of this invention. 本発明の第2の実施の形態による接続状態判別処理の説明図その1。Explanatory drawing 1 of the connection state discrimination | determination process by the 2nd Embodiment of this invention. 本発明の第2の実施の形態による接続状態判別処理の説明図その2。Explanatory drawing 2 of the connection state discrimination | determination process by the 2nd Embodiment of this invention. 一般的なプリント配線基板に対するフレキシブル基板のACFを用いた電極圧着接続の方法を示す説明図。Explanatory drawing which shows the method of the electrode crimping connection using ACF of the flexible substrate with respect to a general printed wiring board.

符号の説明Explanation of symbols

1…加熱圧着装置、2…ステージ、3…圧着済み部品、4…レーザ変位計、5…接続状態検査装置、6…形状測定データ入力部、7…平均化処理部、8…レベリング処理部、9…電極位置検出部、10…接続状態判別処理部。   DESCRIPTION OF SYMBOLS 1 ... Thermocompression bonding apparatus, 2 ... Stage, 3 ... Crimped part, 4 ... Laser displacement meter, 5 ... Connection state inspection apparatus, 6 ... Shape measurement data input part, 7 ... Averaging process part, 8 ... Leveling process part, 9 ... Electrode position detection unit, 10 ... Connection state determination processing unit.

Claims (8)

所定の電極面に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否を判定する接続状態検査方法であって、
前記フレキシブル基板の表面高さを所定間隔毎に測定する高さ測定ステップと、
前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において、所定幅で同一高さとなる範囲を最外電極位置として検出する最外電極位置検出ステップと、
前記フレキシブル基板上で、前記最外電極位置検出ステップで最外電極位置とされた電極より外側の位置で、かつ、当該最外電極位置とされた電極の高さと同一の高さの位置を検出するステップと、
前記フレキシブル基板上の前記圧着接続部分の両端近傍それぞれでの前記最外電極位置から前記同一の高さの位置までの距離を求め、その距離が基準値未満の場合に接続不良と判定する接続良否判定ステップとを有する接続状態検査方法。
A connection state inspection method for crimping and connecting a flexible substrate to a predetermined electrode surface with an anisotropic conductive adhesive, and determining the quality of the connection state,
A height measuring step for measuring the surface height of the flexible substrate at predetermined intervals;
An outermost electrode position detecting step for detecting a range having a predetermined width and the same height as the outermost electrode position around each of the predetermined reference positions corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate;
On the flexible substrate, a position outside the electrode determined as the outermost electrode position in the outermost electrode position detection step and a height equal to the height of the electrode determined as the outermost electrode position is detected. And steps to
Determine the distance from the outermost electrode position to the position of the same height in the vicinity of both ends of the crimp connection portion on the flexible substrate, and determine whether or not the connection is defective when the distance is less than a reference value A connection state inspection method comprising: a determination step.
配線基板に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否判定を判定する接続状態検査方法であって、
前記フレキシブル基板の所定範囲の高さを測定する高さ測定ステップと、
前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において、最外電極位置を検出する最外電極位置検出ステップと、
前記フレキシブル基板上で、前記最外電極位置検出ステップで検出した最外電極位置の外側の所定範囲内での最下点の高さを検出する最下点検出ステップと、
前記フレキシブル基板上で前記最外電極位置の高さと前記最下点の高さとの差を比較し、その差が基準値未満の場合に接続不良と判定する接続良否判定ステップとを有する接続状態検査方法。
It is a connection state inspection method for crimping and connecting a flexible substrate to a wiring substrate with an anisotropic conductive adhesive, and determining whether the connection state is good or bad,
A height measuring step for measuring the height of a predetermined range of the flexible substrate;
In the periphery of each of the predetermined reference positions corresponding to the vicinity of both ends of the crimping connection part on the flexible substrate, an outermost electrode position detection step for detecting the outermost electrode position;
On the flexible substrate, the lowest point detection step for detecting the height of the lowest point within a predetermined range outside the outermost electrode position detected in the outermost electrode position detection step;
A connection state inspection including a connection pass / fail determination step of comparing a difference between the height of the outermost electrode position and the height of the lowest point on the flexible substrate and determining a connection failure when the difference is less than a reference value. Method.
前記高さ測定ステップでは、レーザ変位計にて前記フレキシブル基板の表面高さを所定間隔毎に測定し、この測定データに対して、前記所定の基準位置の高さを基準にしてレベリングを行い、このレベリング処理後のデータを高さ測定データとして用いることを特徴とする請求項1又は2に記載の接続状態検査方法。   In the height measurement step, the surface height of the flexible substrate is measured at a predetermined interval with a laser displacement meter, and the measurement data is leveled based on the height of the predetermined reference position, The connection state inspection method according to claim 1 or 2, wherein the data after the leveling process is used as height measurement data. 前記高さ測定ステップにて測定した高さのデータの移動平均を求める移動平均ステップを有することを特徴とする請求項1〜3のいずれかに記載の接続状態検査方法。   The connection state inspection method according to claim 1, further comprising a moving average step of obtaining a moving average of height data measured in the height measuring step. 所定の電極面に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否を判定する接続状態検査装置であって、
前記フレキシブル基板の外表面の高さを所定間隔毎に測定する高さ測定手段と、
前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置の周辺において、所定幅で同一高さとなる範囲を最外電極位置として検出する最外電極位置検出手段と、
前記フレキシブル基板上で、前記最外電極位置検出手段が最外電極位置とした電極より外側の位置で、かつ、当該最外電極位置とした電極の高さと同一の高さの位置を検出する位置検出手段と、
前記フレキシブル基板上の前記圧着接続部分の両端近傍それぞれでの前記最外電極位置から前記同一の高さの位置までの距離を求め、その距離が基準値未満の場合に接続不良と判定する接続良否判定手段とを備えたことを特徴とする接続状態検査装置。
It is a connection state inspection device that crimps and connects a flexible substrate with an anisotropic conductive adhesive to a predetermined electrode surface, and determines the quality of the connection state,
Height measuring means for measuring the height of the outer surface of the flexible substrate at predetermined intervals;
Outer electrode position detecting means for detecting a range having a predetermined width and the same height as the outermost electrode position around a predetermined reference position corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate;
On the flexible substrate, the position where the outermost electrode position detection means detects a position outside the electrode as the outermost electrode position and the same height as the height of the electrode as the outermost electrode position. Detection means;
Determine the distance from the outermost electrode position to the position of the same height in the vicinity of both ends of the crimp connection portion on the flexible substrate, and determine whether or not the connection is defective when the distance is less than a reference value A connection state inspection apparatus comprising: a determination unit.
配線基板に対してフレキシブル基板を異方性導電接着剤にて圧着接続し、その接続状態の良否判定を判定する接続状態検査装置であって、
前記フレキシブル基板の所定範囲の高さを測定する高さ測定手段と、
前記フレキシブル基板上の圧着接続部分の両端近傍に該当する所定の基準位置それぞれの周辺において、最外電極位置を検出する最外電極位置検出手段と、
前記フレキシブル基板上で、前記最外電極位置検出手段が検出した最外電極位置の外側の所定範囲内での最下点の高さを検出する最下点検出手段と、
前記フレキシブル基板上で前記最外電極位置の高さと前記最下点の高さとの差を比較し、その差が基準値未満の場合に接続不良と判定する接続良否判定手段とを備えたことを特徴とする接続状態検査装置。
A connection state inspection device that crimps and connects a flexible substrate to a wiring substrate with an anisotropic conductive adhesive, and determines whether the connection state is good or bad,
A height measuring means for measuring the height of the predetermined range of the flexible substrate;
In the periphery of each of the predetermined reference positions corresponding to the vicinity of both ends of the crimping connection portion on the flexible substrate, the outermost electrode position detecting means for detecting the outermost electrode position;
On the flexible substrate, the lowest point detection means for detecting the height of the lowest point within a predetermined range outside the outermost electrode position detected by the outermost electrode position detection means;
Comparing the difference between the height of the outermost electrode position and the height of the lowest point on the flexible substrate, and comprising a connection pass / fail judgment means for judging a connection failure when the difference is less than a reference value A connection state inspection device.
前記高さ測定手段は、前記フレキシブル基板の表面高さを所定間隔毎に測定するレーザ変位計と、このレーザ変位計の測定データに対して、前記所定の基準位置の高さを基準にしてレベリングを行い、このレベリング処理後のデータを高さ測定データとして出力するレベリング手段から成ることを特徴とする請求項5又は6に記載の接続状態検査装置。   The height measuring means includes a laser displacement meter that measures the surface height of the flexible substrate at predetermined intervals, and leveling the measurement data of the laser displacement meter with reference to the height of the predetermined reference position. The connection state inspection device according to claim 5, further comprising leveling means for performing the leveling process and outputting the leveled data as height measurement data. 前記高さ測定手段の測定した高さのデータの移動平均を求める移動平均演算手段を備えたことを特徴とする請求項5〜7のいずれかに記載の接続状態検査装置。

The connection state inspection device according to any one of claims 5 to 7, further comprising moving average calculation means for obtaining a moving average of height data measured by the height measuring means.

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010210576A (en) * 2009-03-12 2010-09-24 Daihatsu Motor Co Ltd Shape recognition device
CN110296657A (en) * 2018-03-23 2019-10-01 三菱电机株式会社 Measurement device, circuit substrate, display device and measuring method
JP2019168315A (en) * 2018-03-23 2019-10-03 三菱電機株式会社 Measurement device, circuit board, display device, and method for measurement
US10866085B2 (en) 2018-03-23 2020-12-15 Mitsubishi Electric Corporation Measurement apparatus, circuit board, display device, and measurement method
CN110296657B (en) * 2018-03-23 2021-07-23 三菱电机株式会社 Measuring device, circuit board, display device, and measuring method

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