JP2007237256A - Apparatus and method for ultra-sonic joining - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultra-sonic joining machine which can improve the joining quality. <P>SOLUTION: The ultra-sonic joining machine comprises an energy monitoring section 11 for measuring the electric power applied to the vibrator of the ultra-sonic joining machine 40, a Pk calculating section 12 for obtaining a peak value in the early period of the joining to actually cause the joining based on the monitored power, and an amplitude calculating section 16 for determining the amplitude to be applied to the vibrator from a specified function according to the peak value Pk. In this case, the friction force between members to be joined is regulated so as to be suitable for the joining by changing the amplitude of the vibrator in a constant frequency so as to coincide with the peak value Pk. As a result, the joining quality can be improved. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an ultrasonic bonding apparatus and an ultrasonic bonding method.

  In ultrasonic bonding, one or both of the members to be bonded are vibrated by applying ultrasonic waves to two or more members to be bonded, and at that time, heat is rapidly generated by the frictional force generated between the members to be bonded. This is a technique for locally melting and joining members.

Conventionally, as a technique for improving the bonding quality in this ultrasonic bonding, for example, a method of applying a predetermined energy so that dirt on the surface of the member to be bonded is removed and then moving to bonding (see Patent Document 1), applied energy (current) Value) and a displacement amount of the horn, and a method of detecting a defect in a joint portion (see Patent Document 2) has been proposed.
Japanese Patent Laid-Open No. 9-234575 JP 2000-317651 A

  However, in the conventional technology that adjusts the applied energy in consideration of the surface contamination of the members to be joined, after the friction is applied with the energy that does not lead to joining according to the degree of dirt, the joining is performed. However, other surface states of the bonded members are not considered.

  Further, even in the technique of measuring the applied energy and judging the bonding quality, energy control in consideration of the surface state during bonding is not performed.

  Accordingly, an object of the present invention is to provide an ultrasonic bonding apparatus and an ultrasonic bonding method capable of controlling the applied energy in accordance with the state of the surface of the member to be bonded and improving the bonding quality.

  In order to achieve the above object, the present invention provides a bonding energy measuring means for measuring energy applied to a vibrator of an ultrasonic bonding machine, and the energy measured by the bonding energy measuring means within a predetermined time from the start of bonding. An ultrasonic bonding comprising: a peak value calculating means for obtaining a peak value; and a bonding energy calculating means for determining a bonding energy after the predetermined time according to the peak value obtained by the peak value calculating means. Device.

  Further, the present invention for achieving the above object is to measure energy applied to a vibrator of an ultrasonic bonding machine within a predetermined time from the start of bonding, obtain a peak value of the energy within the predetermined time, and The ultrasonic bonding method is characterized in that the bonding energy after a predetermined time is determined according to the value.

  According to the present invention, the energy peak value from the start of joining which varies depending on the state of the surface of the member to be joined to the predetermined time is obtained, and the subsequent joining energy is determined according to this peak value. Since it becomes possible to apply an appropriate bonding energy according to various states of the surface of the bonding member, the bonding quality can be improved.

  One of the factors that influence the bonding quality in ultrasonic bonding is the difference in the surface state of the members to be bonded. Specifically, not only the contamination of the surface of the member to be joined, but also, for example, the environment at the time of joining the member to be joined, the environment of the place where it was stored, that is, the temperature and humidity of the member storage place, and the production of the joining member Difference in surface treatment. Such an influence due to the difference in the surface state appears as a difference in the coefficient of friction on the surface of the member to be joined even if the same member is used.

  The coefficient of friction can generally be measured using a tribometer. However, in the measurement by the friction meter, although the static friction coefficient of the members to be ultrasonically bonded can be measured in advance, it is difficult to measure the dynamic friction coefficient that changes depending on the surface state during the bonding. Moreover, the dynamic friction coefficient changes depending on the vibration speed during joining, that is, the difference in relative speed between the two objects to be joined.

  FIG. 1 is a graph showing the relationship between the coefficient of friction and the relative speed of two members to be joined.

  As shown in the drawing, the coefficient of friction is μ0 at rest (v0). This is the coefficient of static friction. As the speed increases from v0 to v1 and v2, the friction coefficient (dynamic friction coefficient) decreases with a gentle curve as shown in the figure. Moreover, even if the dynamic friction coefficient is the same member, it further changes depending on the state of the member surface as described above.

  For this reason, in order to improve the quality in ultrasonic welding, it is necessary to control energy during welding for each individual member in consideration of changes in the friction coefficient during welding.

  For energy control during joining for each member, first, the frictional force acting between the joining members during joining must be known. Therefore, the present invention predicts the coefficient of friction between members from the applied pressure and applied energy during ultrasonic bonding. By knowing the coefficient of friction during this joining, the frictional force acting between the members to be joined can be known.

  Here, in order to control the energy during joining, it is not necessary to know the absolute value of the frictional force, as long as it serves as an index for controlling the energy. Therefore, estimating the coefficient of friction is sufficient for energy control.

  The friction coefficient is estimated by measuring the applied pressure and applied energy during ultrasonic bonding. The applied pressure is obtained by measuring the load between the anvil and the horn (from the applied weight) in order to press the members to be joined. On the other hand, energy is electric power (= command voltage × current) applied to a vibrator (for example, a piezoelectric element).

  In the ultrasonic bonding, when the process is divided by time, first, it can be divided into a stage before the members are actually bonded (first half) and a stage after the bonding is started (second half).

  In the first half, the two members to be joined are in vibration with each other. On the other hand, since each member is joined in the second half, there is no relative movement of each member (or smaller than the first half).

  FIG. 2 is a graph showing energy consumption in the first half of the bonding, that is, in a state where the bonding has not yet started.

  In the first half of the joining, the consumed energy rapidly rises and shows the maximum in the initial time zone (from 0 to the initial time Tf in FIG. 2). The portion showing the maximum is expressed as a peak value Pk. And this peak value Pk can be measured as electric power. Electric power is converted into kinetic energy called vibration by a vibrator. Therefore, the measured peak value Pk is proportional to the force F in the vibration direction applied to the member.

  This relationship is expressed by the following equation (1).

Pk∝F = μN (1)
In the formula, N is the applied pressure.

  Here, if the applied pressure during joining is kept constant at all times, the friction coefficient is proportional to the energy peak value Pk as shown in the following equation (2).

Pk∝μ (2)
Thereby, the friction coefficient during joining can be estimated.

  And it becomes possible to produce an optimal joining state by controlling the energy applied during joining according to the estimated friction coefficient.

  In the specific energy control in this embodiment, if the measured Pk is large, the estimated friction coefficient μ is large, so that it is small. Conversely, if the measured Pk is small, the estimated friction coefficient μ is small, this is It was designed to be larger.

  The dynamic friction coefficient can be changed by changing the relative speed between the two members as shown in FIG. Here, the relative speed is changed by changing the amplitude of the vibrator. Note that, in the control of the vibrator in the ultrasonic bonding machine, the frequency is usually constant and the amplitude can be changed. Furthermore, in this embodiment, the minimum threshold value Pk_Min and the maximum threshold value Pk_Max are determined in advance, and the energy is changed according to the measured Pk during this time. The change rate of the amplitude changes between the minimum threshold value Pk_Min and the maximum threshold value Pk_Max from the adjustable minimum amplitude to the maximum amplitude.

  The minimum threshold value Pk_Min is a value such that when the energy is less than this, the heat generation between the materials becomes insufficient and the bonding strength is insufficient. On the other hand, if more energy is applied to the maximum threshold Pk_Max, the frictional force becomes too large and the ultrasonic bonding machine itself stops due to overload, or the heat generation between the materials increases so much that the material surface is cracked. It is a value that will cause.

  These values may be obtained by experiments using members to be joined in advance. Note that when obtaining the minimum threshold value Pk_Min and the maximum threshold value Pk_Max, the value of Pk naturally changes depending on the surface state of the member used in the experiment, but the minimum threshold value Pk_Min and the maximum threshold value Pk_Max are Since it is a limit value between materials, a slight difference does not become a problem, and actually, it is determined in consideration of a safety value from an experimental result.

  FIG. 3 is a block diagram showing a configuration of an ultrasonic bonding apparatus for performing energy control in the ultrasonic bonding described above.

  This ultrasonic bonding apparatus 1 is an apparatus that performs energy control of ultrasonic bonding using the above-described peak value Pk.

  For this purpose, the ultrasonic bonding apparatus 1 includes an energy monitoring unit 11 (bonding energy measuring unit) that measures the power applied to the vibrator of the ultrasonic bonding machine 40, and a peak value from the start of bonding to the initial time Tf. Pk calculation unit 12 (peak value calculation means) for obtaining Pk, initial time storage unit 13 that stores initial time Tf, friction force determination unit 14 that determines frictional force, maximum threshold value Pk_Max, and minimum threshold value The maximum / minimum threshold value storage unit 15 storing Pk_Min, the amplitude calculation unit 16 (joining energy calculation means) for obtaining the amplitude of an appropriate vibrator, and function data necessary for obtaining the amplitude of an appropriate vibrator The stored function data storage unit 17, the bonding energy control unit 18 that controls the energy applied to the vibrator so as to obtain the obtained amplitude, and the bonding condition that stores the bonding condition Having a 憶部 19, joint count storage unit 20 for accumulating and storing the number of times of use of the welding tool (bonding times storage means), and a tool change information input unit 21 for inputting that there was a tool change.

  The ultrasonic bonding apparatus 1 includes an input device such as a keyboard or a touch panel for inputting various data and conditions, and an output device such as a display.

  The function and operation of each part will be described in detail below.

  The energy monitoring unit 11 measures energy applied to the vibrator of the ultrasonic bonding machine 40, and specifically measures power applied to the vibrator of the ultrasonic bonding machine 40.

  The Pk calculation part 12 calculates | requires the peak value Pk from the monitored energy amount (electric power value). The Pk calculation unit 12 monitors the power value measured up to the initial time Tf stored in the initial time storage unit 13, and extracts and outputs the peak power value during that time.

  The initial time storage unit 13 stores an initial time Tf. The initial time Tf is a time during which an energy peak at the initial stage of bonding can occur. That is, the initial time Tf may be a time including a peak between the start of application of ultrasonic vibration and the actual joining between members. This initial time Tf is a predetermined time in the present invention. Note that. The initial time Tf varies depending on the materials to be joined, and for example, a time determined empirically or experimentally is stored. More specifically, for example, joining is performed while monitoring the power value by experiment, and after the peak is once recorded as shown in FIG. 2, the point at which the power value starts to be stabilized is set as the initial time Tf.

  The frictional force determination unit 14 compares the Pk value from the Pk calculation unit 12 with the maximum threshold value Pk_Max and the minimum threshold value Pk_Min stored in the maximum / minimum threshold value storage unit 15 to determine the peak value Pk. Determine if the value is within this range. When the Pk value falls within the maximum threshold value Pk_Max and the minimum threshold value Pk_Min, the frictional force determination unit 14 outputs the Pk value to the amplitude calculation unit 16 as it is. On the other hand, when the value of the peak value Pk is not within the minimum threshold value Pk_Min and the maximum threshold value Pk_Max, an error is output and the junction energy control unit 18 is instructed to stop the operation.

  In the present embodiment, the frictional force determination unit 14 has a tool change determination function. The tool change determination function will be described later.

  The amplitude calculation unit 16 calculates the amplitude according to the peak value Pk obtained from the frictional force determination unit 14 based on the function stored in the function data storage unit 17. Here, for example, as shown in FIG. 4, the function stored in the function data storage unit 17 changes between the minimum threshold value Pk_Min and the maximum threshold value Pk_Max from the minimum amplitude to the maximum amplitude. It is a function of energy versus amplitude. In the present embodiment, as shown in the figure, the minimum threshold value Pk_Min is 500 and the maximum threshold value Pk_Max is 2000, and this interval is changed from a minimum amplitude of 30 μm to a maximum amplitude of 50 μm. Although this function data is illustrated here, in practice, the function data storage unit 17 may store a linear function expression “amplitude ξ = f (Pk)” which is a function as shown in FIG.

  Specifically, for example, when the obtained peak value Pk is 1000 w, the amplitude calculator 16 sets the amplitude of the vibrator to 43.3 μm from the function “ξ = f (Pk)” shown in FIG. Will be determined. Of course, the same applies to other values of Pk.

  The bonding energy control unit 18 controls energy applied to the vibrator based on each condition value stored in the bonding condition storage unit 19 and the amplitude value from the amplitude calculation unit 16. Here, the condition values stored in the joining condition storage unit 19 are an amplitude (referred to as an initial amplitude ξ0), a pressurizing force N, and a joining operation end time T that are applied before the initial time Tf.

  Therefore, the joining energy control unit 18 vibrates the vibrator with the initial amplitude ξ0 from the start of joining to the time Tf, and from the amplitude calculating unit 16 with the applied pressure remaining N from the time Tf until the time T. The vibrator is vibrated with an amplitude ξ.

  The number-of-joining storage unit 20 stores the number of times the frictional force determination result is output after the tool change input from the tool change information input unit 21 and a guideline for the maximum number of times the tool can be used as a tool change threshold value. (Predetermined number of times) is stored.

  The number-of-joining storage unit 20 is used to implement a tool change determination function provided to the frictional force determination unit 14. The frictional force determination unit 14 determines the frictional force and accumulates and stores the number of times the frictional force is determined in the joining number storage unit 20. The integrated value is reset to 0 when there is an input indicating that the tool has been changed from the tool change information input unit 21.

  Then, the frictional force determination unit 14 uses the tool change threshold stored in the joining number storage unit 20 as the tool change threshold when the peak value Pk is less than the minimum threshold value Pk_Min as the tool change determination function. When the value is below the value, it is displayed on the display etc. that it is time to change the tool. Thereby, in this embodiment, the tool replacement time can be automatically detected. In this case, the frictional force determination unit 14 functions as a tool change display unit.

  Here, instead of suddenly displaying the change according to the tool change threshold value, only when the peak value Pk is less than the minimum threshold value Pk_Min, the tool change time is determined based on the tool change threshold value. The tool change time is necessary when the tool is used frequently, the tip of the tool is worn, and the member to be joined cannot be grasped well. On the other hand, the degree to which the tool bites into the member to be joined varies depending on the member, and just because the number of times of joining generally increases does not mean that the tool will not be bite. However, the state in which the frictional force does not work, that is, one of the causes that the peak value Pk is less than the minimum threshold value Pk_Min is that the tool is worn and the member to be joined cannot be held well. . Therefore, in this embodiment, as described above, when the peak value Pk is less than the minimum threshold value Pk_Min and when the peak value Pk is used more than a predetermined replacement threshold value, it is the tool replacement time. It is supposed that the display which shows is performed.

  Although not shown in particular in FIG. 3, the ultrasonic bonding apparatus 1 has a time measuring function.

  The ultrasonic bonding apparatus 1 described above is substantially a computer, and the function of each unit described above is executed by executing a program for realizing a bonding processing procedure described later. In addition, the function of each part may be caused to function by processing in one computer, or the function of each part may be implemented by connecting different computers via a network or direct wiring. Good. In particular, the joining number storage unit 20 and the tool exchange information input unit 21 after tool replacement may be another computer connected to the computer having the function of the frictional force determination unit 14 via a network.

  Here, the ultrasonic bonding machine used in this embodiment will be described.

  FIG. 5 is an explanatory diagram for explaining a schematic configuration of the ultrasonic bonding machine 40.

  The ultrasonic bonding machine 40 includes an anvil 41 that is set in a state where a metal flat plate A and a flat plate B that are to be bonded are overlapped, and a horn 43 that amplifies ultrasonic vibrations transmitted by the vibrator connecting member 42. And a tip 44 detachably attached to the lower end of the horn 43. The number of joinings stored in the joining number storage unit 20 is the number of joinings after the tip 44 is replaced, and the tool replacement information input unit 21 inputs that the tool has been replaced when the tip is replaced. .

  The anvil 41 is firmly attached on a base (not shown). The vibrator connecting member 42 transmits the ultrasonic vibration from the vibrator 46 to the horn 43 in the horizontal direction in the figure. The vibrator 46 is vibrated by the high frequency power supply 45.

  The ultrasonic vibration generated by the vibrator 46 is controlled by the voltage and current applied to the high frequency power supply 45. In the actual ultrasonic bonding machine 40, the frequency is constant and only the amplitude (the amplitude at the tip of the horn 43) can be varied. When a desired amplitude is inputted, the amplitude is automatically set according to a predetermined frequency. The tip of the horn 43 is automatically controlled so as to vibrate. Therefore, the ultrasonic bonding machine 40 is provided with an automatic control device (not shown) for changing the amplitude.

  In the ultrasonic bonding apparatus 1, the amplitude command value from the bonding energy control unit 18 is transmitted to the automatic control device of the ultrasonic bonding machine 40, and the amplitude is controlled as energy during bonding. Note that the change of the amplitude at the time of ultrasonic bonding can also be performed by changing the electric power from the high-frequency power source applied to the vibrator 46 without using the automatic control device. Therefore, the amount of electric power required to directly change the horn amplitude may be calculated by the bonding energy control unit 18 of the ultrasonic bonding apparatus 1 so that the electric power applied to the vibrator 46 can be varied. At this time, the frequency of the vibrator 46 is unique to the vibrator and does not fluctuate even if the power is changed.

  At the time of ultrasonic bonding, the flat plates A and B to be ultrasonically bonded are pressed by the tip 44 on the anvil 41 as illustrated. When the horn 43 causes ultrasonic vibration in this state, the tip 44 vibrates in the horizontal direction while receiving pressure. By this vibration, the metal atoms of the flat plates A and B are diffused, and further, the part located between the chips 44 is mechanically joined by recombination.

  Such an ultrasonic bonding machine 40 is merely an example, and any ultrasonic bonding machine 40 capable of changing the amplitude can be used.

  Next, an ultrasonic bonding procedure by the ultrasonic bonding apparatus 1 described above will be described.

  FIG. 6 is a flowchart showing an ultrasonic bonding procedure by the ultrasonic bonding apparatus 1.

  After the workpiece is set in the ultrasonic bonding machine 40 and ready for bonding, first, the bonding energy control unit 18 starts ultrasonic bonding with the initial amplitude ξ0 (S1). At this time, the energy monitor unit 11 starts measuring power at the same time as the start of bonding, and starts measuring time.

  And the Pk calculation part 12 calculates | requires the peak value Pk from the electric power value measured until the initial time Tf (S2).

  Subsequently, the frictional force determination unit 14 adds the number of joinings to the joining number storage unit 20 for storage (S3). Normally, the number of times of joining is added once when this step is reached.

  Furthermore, the frictional force determination unit 14 determines whether or not the obtained peak value Pk is less than the minimum threshold value Pk_Min (S4). Here, if the peak value Pk is less than the minimum threshold value Pk_Min (S4: Yes), the frictional force determination unit 14 determines whether or not the number of joinings stored in the joining number storage unit 20 is greater than or equal to the tool change threshold value. If it is determined (S10) and the tool replacement threshold is exceeded (S10: Yes), a display prompting tool replacement is performed (S11), and error processing (S12) is performed. Here, the error process is a process for stopping the bonding by causing the bonding energy control unit 18 to output 0, for example.

  On the other hand, when the number of times of joining does not exceed the threshold value in S10 (S10: No), the error force (S12) is performed and the frictional force is too small to maintain the quality after joining. End the process.

  If the peak value Pk is greater than or equal to the minimum threshold value Pk_Min in S4 (S4: No), it is subsequently determined whether or not the peak value Pk exceeds the maximum threshold value Pk_Max (S5). Here, if the peak value Pk is greater than or equal to the maximum threshold value Pk_Max (S5: Yes), the frictional force is too large and the error processing (S12) is performed and all processing is performed, assuming that the quality after joining cannot be maintained. Exit.

  On the other hand, if the peak value Pk is equal to or less than the maximum threshold value Pk_Max (S5: No), the amplitude ξ for making the frictional force appropriate from the peak value Pk obtained by the amplitude calculation unit 16 is subsequently obtained as function data. (S6).

Subsequently, the joining energy control unit 18 outputs an instruction to obtain the obtained amplitude ξ until the joining end time T is reached (S7).
As a result, the joining is performed by the joining energy (that is, the frictional force) suitable for the surface state of the members to be joined, and it becomes possible to finish the joint with very good quality.

  FIG. 7 is a graph in which the electric power when ultrasonic bonding is actually performed is monitored during the initial time according to the above-described processing procedure.

  In this experimental example, an aluminum plate and a copper plate (both having a thickness of 0.2 mm) are ultrasonically bonded.

The joining conditions are initial time Tf = 0.07 sec, initial amplitude ξ0 = 40 μm, pressure N = 200 kPa, joining time T = 0.25 sec, Pk_min = 500 W, Pk_Max = 2000 W, and adjustable amplitude range is Pk_min (= 500 W). ) To Pk_Max (= 2000 W), 30 to 50 μm (see FIG. 4),
In Example 1, the peak value Pk measured during the initial time was 2010 W. In the case of Example 1, although the joining should be stopped in the above processing procedure, the ultrasonic joining was continued as it was with an amplitude of 40 μm. As a result, metal was severely worn at the joint, cracks were found in a part of the joint, and the joint quality was poor.

  In Example 2, the peak value Pk measured during the initial time was 1000 W. Therefore, the amplitude after the initial time Tf was adjusted to 43.3 μm (see FIG. 4), and ultrasonic bonding was continued. As a result, no cracks at the joints or insufficient joint strength were observed, and the joint quality was good.

  In Example 3, the peak value Pk measured during the initial time was 450 W. In the case of Example 3, although the joining should be stopped in the above processing procedure, the ultrasonic joining was continued as it was with an amplitude of 40 μm. As a result, the joint portion at the joint point was easily peeled off, resulting in poor joint.

  As described above, it can be seen that good bonding can be performed by changing the amplitude of the ultrasonic bonding in order to change the frictional force from the peak value of the power up to the initial time.

  Although the embodiment of the present invention has been described above, the present invention is not limited to such an embodiment.

  For example, in the above-described embodiment, when the peak value Pk is equal to or greater than the maximum threshold value Pk_Max, the subsequent joining operation is stopped, but instead, an application operation of a frictional force that does not lead to joining is performed. It may be performed a plurality of times. For example, first, when it is detected that the peak value Pk exceeds the maximum threshold value Pk_Max, the joining is temporarily stopped on the spot, and when the joined member starts joining again, the joining is not performed within the initial time Tf. After waiting to cool down, the joining operation is started again from the beginning. If the peak value Pk does not exceed the maximum threshold value Pk_Max at the second time, the processing is continued as it is. On the other hand, if the peak value Pk again exceeds the maximum threshold value Pk_Max even in the second time, it is once again stopped until the member to be joined starts joining again within the initial time Tf. After waiting for it to cool down, the joining operation is performed again from the beginning. By repeating this, it may be possible to perform good bonding.

  This indicates that the peak value Pk exceeds the maximum threshold value Pk_Max indicates that the frictional force is too strong. In such a case, by repeating the joining operation to such a degree that joining is not achieved, that is, during the initial time of joining, the surface of the member is gradually smoothed, and an unnecessary frictional force is not generated. Then, even when the peak value Pk is equal to or greater than the maximum threshold value Pk_Max at the beginning, it may be possible to perform good joining by repeating friction for an initial time that does not lead to joining. Depending on the material, it may not be possible to join even if this is repeated many times, so it is better to determine the number of repetitions in advance.

  In the above-described embodiment, the calculation of Pk is performed until the initial time Tf stored in the initial time storage unit 13, but instead of this, first, after applying ultrasonic vibration, the maximum energy is calculated. You may make it measure the time of becoming a value. As shown in FIG. 2, this has a characteristic that the energy consumption once reaches a peak at the initial stage of ultrasonic bonding and then decreases. Therefore, the peak value Pk of the energy used in the present invention can be detected by finding the first peak and measuring the energy at that time (that is, the power at that time). In this case, in order to find the peak value, for example, the time point when the measured power value changes from an increasing tendency to a decreasing tendency may be set as the peak value. The predetermined time in this case is not a predetermined time until actual joining occurs, but as a time until the peak value is detected. After the peak value is detected, joining is performed with the amplitude obtained from the peak value. You may do it.

  In addition, the ultrasonic joint described above uses the one whose frequency is constant and the speed is changed by changing the amplitude, and as a result, the frictional force is changed. Instead, this type can change the frequency. It may be.

  The present invention is suitable for ultrasonic bonding used for bonding dissimilar metals. Further, the present invention can be used not only for metal-to-metal bonding but also for resin bonding.

It is a graph which shows the relationship between a friction coefficient and the relative speed of two members to join. It is a graph which shows the energy consumption in the state which has not yet started joining during joining. It is a block diagram which shows the structure of an ultrasonic bonding apparatus. It is a graph which shows function data. 3 is an explanatory diagram for explaining a schematic configuration of an ultrasonic bonding machine 40. FIG. It is a flowchart which shows the ultrasonic bonding procedure by an ultrasonic bonding apparatus. It is the graph which monitored the electric power value at the time of actually performing ultrasonic bonding according to a processing procedure.

Explanation of symbols

1 ... ultrasonic bonding device,
11 ... Energy monitor
12 ... Pk calculation part,
13 ... initial time storage unit,
14 ... frictional force determination unit,
15 ... maximum / minimum threshold value storage unit,
16: Amplitude calculation unit,
17 ... function data storage unit,
18 ... Junction energy control part,
19: Joining condition storage unit,
20: Joining number storage unit,
21 ... Tool change information input section,
40. Ultrasonic bonding machine,
42 ... vibrator connecting member,
43 ... Horn,
44 ... chip,
45 ... High frequency power supply,
46: Vibrator.

Claims (12)

A bonding energy measuring means for measuring energy applied to the vibrator of the ultrasonic bonding machine;
A peak value calculating means for obtaining a peak value of the energy measured within a predetermined time from the start of bonding by the bonding energy measuring means;
A joining energy calculating means for determining a joining energy after the predetermined time according to the peak value obtained by the peak value calculating means;
An ultrasonic bonding apparatus comprising:   The ultrasonic bonding apparatus according to claim 1, wherein the bonding energy measuring unit measures electric power applied to the vibrator.   3. The ultrasonic bonding apparatus according to claim 1, wherein the bonding energy calculation unit determines a vibration amplitude of the vibrator according to a predetermined function of energy versus amplitude.   When the peak value is between a predetermined minimum threshold value and a maximum threshold value of the energy, the junction energy calculating means determines a vibration amplitude of the vibrator as a function of a predetermined energy versus amplitude. The ultrasonic bonding apparatus according to claim 1, wherein the ultrasonic bonding apparatus is determined according to:   When the peak value exceeds the maximum threshold value, the joining energy calculation means temporarily stops the joining operation before the joined member joins, and the joined member does not join within the predetermined time. The ultrasonic bonding apparatus according to claim 4, wherein the bonding is started again from the beginning after waiting for cooling to an extent. A joining number storage means for accumulating and storing the number of joinings after the tool change of the ultrasonic joining machine;
Tool change display means for indicating that the peak value is less than the minimum threshold value and that the tool exchange time is reached when the number of times of joining stored in the number of times of joining storage means is equal to or greater than a predetermined number;
The ultrasonic bonding apparatus according to claim 4, further comprising: Measure the energy applied to the vibrator of the ultrasonic bonding machine within a specified time from the start of bonding,
Obtaining a peak value of the energy within the predetermined time;
An ultrasonic bonding method comprising determining bonding energy after a predetermined time according to the peak value.   The ultrasonic bonding method according to claim 7, wherein the energy is obtained by measuring electric power applied to the vibrator.   9. The ultrasonic bonding method according to claim 7, wherein the bonding energy after the predetermined time is determined according to a function of a predetermined energy-to-amplitude vibration amplitude of the vibrator.   When the peak value is between the predetermined minimum threshold value and the maximum threshold value of the energy after the predetermined time, the amplitude of the vibrator is determined based on the predetermined energy versus amplitude. 9. The ultrasonic bonding method according to claim 7, wherein the ultrasonic bonding method is determined according to a function of:   11. When the peak value is equal to or greater than a maximum threshold value, the joining operation is temporarily stopped before joining the joined members, and the joining is started again from the beginning after a predetermined time has elapsed. Ultrasonic bonding method. Furthermore, the number of times of joining after the tool change of the ultrasonic welding machine is accumulated and stored,
11. The ultrasonic wave according to claim 10, wherein the peak value is less than the minimum threshold value and indicates that it is time to change a tool when the stored number of times of joining becomes a predetermined number or more. Joining method.

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