JP2007237081A - Housing for brush-rotating driving shaft - Google Patents

Housing for brush-rotating driving shaft Download PDF

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Publication number
JP2007237081A
JP2007237081A JP2006063134A JP2006063134A JP2007237081A JP 2007237081 A JP2007237081 A JP 2007237081A JP 2006063134 A JP2006063134 A JP 2006063134A JP 2006063134 A JP2006063134 A JP 2006063134A JP 2007237081 A JP2007237081 A JP 2007237081A
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Prior art keywords
air
housing
brush
drive shaft
rotation drive
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Satoshi Shiraishi
聡 白石
Akira Nagase
明 長瀬
Setsuo Shibuya
節男 渋谷
Kenichi Kitagawa
賢一 北川
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SPC Electronics Corp
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SPC Electronics Corp
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Priority to JP2006063134A priority Critical patent/JP2007237081A/en
Publication of JP2007237081A publication Critical patent/JP2007237081A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a housing for a brush-rotating driving shaft which has air buffer to be used for a brush-rotating driving shaft in a washing apparatus having a washing brush. <P>SOLUTION: The housing for a brush-rotating driving shaft of a cleaning brush comprises an air purge part 1 having air buffer, an air pipe 2, and an air supply part 3. The air supply part 3 supplies compressed air to the air purge part 1 through the air pipe 2 and the air purge part 1 releases the compressed air from the air buffer along the brush-rotating driving shaft 5. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、洗浄ブラシを有する洗浄装置のブラシ回転駆動軸に用いるハウジングに関し、詳しくは、エアバッファを有するブラシ回転駆動軸用ハウジングに関する。   The present invention relates to a housing used for a brush rotation drive shaft of a cleaning apparatus having a cleaning brush, and more particularly to a brush rotation drive shaft housing having an air buffer.

図3は、従来の洗浄ブラシを有する洗浄装置の構成を示す構成図である。図3において、洗浄装置100の回転ブラシ4は、ブラシ回転駆動軸5に接続されている。ブラシ回転駆動軸5は、ベアリング7を有する軸受け用ハウジング6に取り付けられている。軸受け用ハウジング6は、槽外の固定アーム11に取り付けられて、固定されている。ブラシ回転駆動軸5は、モータ12に接続されて駆動トルクを得ている。また、軸受け用ハウジング6は、洗浄装置の筐体10により、槽内と槽外とを切り離して密封されている。   FIG. 3 is a configuration diagram showing a configuration of a conventional cleaning apparatus having a cleaning brush. In FIG. 3, the rotating brush 4 of the cleaning device 100 is connected to a brush rotation drive shaft 5. The brush rotation drive shaft 5 is attached to a bearing housing 6 having a bearing 7. The bearing housing 6 is fixed by being attached to a fixed arm 11 outside the tank. The brush rotation drive shaft 5 is connected to the motor 12 to obtain drive torque. Further, the bearing housing 6 is sealed by separating the inside of the tank from the outside of the tank by the housing 10 of the cleaning device.

軸受け用ハウジング6と回転ブラシ4との間のブラシ回転駆動軸5の部分には、液切板8が装着されている。さらにパネル9が、2枚の液切板8の間に挟まる形で挿入されている。洗浄装置100は、上下に2本の回転ブラシ4を設け、洗浄対象物を挟み込んで洗浄するように構成されているが、回転ブラシ4が1本による構成であっても良い。図4は、軸受け用ハウジング部分の拡大図である。   A liquid cutting plate 8 is attached to a portion of the brush rotation drive shaft 5 between the bearing housing 6 and the rotary brush 4. Further, the panel 9 is inserted so as to be sandwiched between the two liquid cutting plates 8. The cleaning apparatus 100 is configured to provide two rotating brushes 4 at the top and bottom and sandwich and clean the object to be cleaned. However, the cleaning apparatus 100 may be configured with one rotating brush 4. FIG. 4 is an enlarged view of a bearing housing portion.

回転ブラシ4がモータ12から回転駆動力を得て回転し、洗浄液が噴射されている状態で、洗浄対象物が搬送機構により回転ブラシ4に送り込まれると、洗浄対象物の洗浄が始まる。回転ブラシ4は500rpm程度の回転速度で回転しているため、遠心力により洗浄液が回転ブラシ4から液滴となって、周囲に飛ばされる。また洗浄対象物に向かって噴射された洗浄液の一部は、ミスト状態となる。これら洗浄液の液滴とミストは、洗浄装置100の筐体10内に飛散し、装置の部材表面に付着する。ダストの侵入を防ぐため、筐体10内は槽外に対して陽圧となっているため、その一部は、軸受け用ハウジング6のベアリング7を通ってハウジング内に侵入し、さらに槽外へ漏れ出していた。   When the rotating brush 4 is rotated by obtaining a rotational driving force from the motor 12 and the cleaning liquid is jetted, when the cleaning object is fed to the rotating brush 4 by the transport mechanism, cleaning of the cleaning object starts. Since the rotating brush 4 is rotating at a rotation speed of about 500 rpm, the cleaning liquid becomes droplets from the rotating brush 4 by the centrifugal force and is blown around. Further, a part of the cleaning liquid sprayed toward the cleaning object is in a mist state. These droplets and mist of the cleaning liquid scatter in the housing 10 of the cleaning apparatus 100 and adhere to the surface of the member of the apparatus. In order to prevent the intrusion of dust, the inside of the housing 10 has a positive pressure with respect to the outside of the tank, and a part thereof enters the housing through the bearing 7 of the bearing housing 6 and further to the outside of the tank. It was leaking out.

飛散した液滴やミストが軸受け用ハウジング6に直接付着するのを避けるため、液切板8とパネル9とが設けられている。図5は、液切板とパネルとが取り付けられている部分の拡大図である。飛散した液滴やミストは、矢印で示されるようにパネル9に付着し、パネル面を伝って下側に流れ落ちるため、軸受け用ハウジング6に直接付着することが防止される。   In order to avoid the scattered droplets and mist from directly adhering to the bearing housing 6, a liquid cutting plate 8 and a panel 9 are provided. FIG. 5 is an enlarged view of a portion where the liquid cutting plate and the panel are attached. The scattered liquid droplets and mist adhere to the panel 9 as indicated by the arrows and flow downward along the panel surface, so that they are prevented from directly adhering to the bearing housing 6.

ところが洗浄条件によっては、使用洗浄液が大量であったり、回転速度がより高速であると、液滴やミストが大量に発生する要因となる。図6は、洗浄液が軸受け用ハウジング内に侵入する侵入経路図である。大量に発生した液滴やミストはパネル9により捕らえられ、洗浄液の一部は液切板8に流れ落ちる。この洗浄液の量が大量であると、液切板8の回転送度により再び液滴が飛散する。   However, depending on the cleaning conditions, if a large amount of cleaning liquid is used or if the rotation speed is higher, a large amount of droplets and mist may be generated. FIG. 6 is an entry path diagram for the cleaning liquid to enter the bearing housing. Droplets and mist generated in large quantities are captured by the panel 9, and a part of the cleaning liquid flows down to the liquid cutting plate 8. If the amount of the cleaning liquid is large, the liquid droplets are scattered again due to the transfer rate of the liquid cutting plate 8.

この液滴は、パネル9の裏側、液切板8と軸受け用ハウジング6との間のブラシ回転駆動軸5の部分、及び軸受け用ハウジング6の表面に付着する。付着した洗浄液の一部は、軸受け用ハウジング6のベアリング7を通って、矢印方向に沿ってハウジング内に侵入し、槽外へ漏れて出る。このため耐食性の高い軸受けを必要とすると共に、ドレインの追加等、槽外の液漏れ対策が必要であった。特許文献1は、半導体ウエハ洗浄装置の加熱ランプが洗浄液により汚染されるのを防止するための汚染防止板について記載されている。
特開2002−231674号公報
The droplets adhere to the back side of the panel 9, the portion of the brush rotation drive shaft 5 between the liquid cutting plate 8 and the bearing housing 6, and the surface of the bearing housing 6. Part of the adhering cleaning liquid passes through the bearing 7 of the bearing housing 6 and enters the housing along the direction of the arrow, and leaks out of the tank. For this reason, bearings with high corrosion resistance are required, and countermeasures against liquid leakage outside the tank, such as addition of a drain, are necessary. Patent Document 1 describes a contamination prevention plate for preventing a heating lamp of a semiconductor wafer cleaning apparatus from being contaminated by a cleaning liquid.
JP 2002-231694 A

本発明は、このような問題を解決するためになされたものであり、その目的は、洗浄ブラシを有する洗浄装置のブラシ回転駆動軸に用いられる、エアバッファを有するブラシ回転駆動軸用ハウジングを提供することにある。   The present invention has been made to solve such problems, and an object thereof is to provide a brush rotation drive shaft housing having an air buffer used for a brush rotation drive shaft of a cleaning device having a cleaning brush. There is to do.

本発明のブラシ回転駆動軸用ハウジングは、洗浄装置に組み込まれる、洗浄ブラシのブラシ回転駆動軸用ハウジングであって、
前記ハウジングは、エアバッファを有するエアパージ部と、エアパイプと、エア供給部とから成り、
前記エア供給部は、前記エアパイプを介して圧縮エアを前記エアパージ部へ供給し、
前記エアパージ部は、前記圧縮エアを前記エアバッファから前記ブラシ回転駆動軸に沿って放出することを特徴とする。
The brush rotation drive shaft housing of the present invention is a brush rotation drive shaft housing for a cleaning brush incorporated in a cleaning device,
The housing comprises an air purge part having an air buffer, an air pipe, and an air supply part,
The air supply unit supplies compressed air to the air purge unit via the air pipe,
The air purge unit discharges the compressed air from the air buffer along the brush rotation drive shaft.

本発明のブラシ回転駆動軸用ハウジングにおいて、前記エアパージ部が、軸受け用ハウジングに近接して取り付けられることを特徴とする。   The brush rotation drive shaft housing according to the present invention is characterized in that the air purge portion is attached close to the bearing housing.

本発明のブラシ回転駆動軸用ハウジングにおいて、前記エアパージ部が、軸受け用ハウジングに、嵌合により取り付けられることを特徴とする。   The brush rotation drive shaft housing of the present invention is characterized in that the air purge portion is attached to the bearing housing by fitting.

本発明のブラシ回転駆動軸用ハウジングによれば、付着した洗浄液の一部が、軸受け用ハウジングのベアリングを通ってハウジング内に侵入し、槽外へ漏れて出ることがなくなる。このため耐食性の高い軸受けを必要とせず、軸受けの寿命が長くなり、交換頻度が少なくなる。また、ドレインの追加等、槽外の液漏れ対策が不要となるため、メンテナンスが容易となる。さらに、ベアリングの軸受けでの発塵による槽内汚染を防ぐことが可能となる。   According to the brush rotation drive shaft housing of the present invention, a part of the adhering cleaning liquid does not enter the housing through the bearing of the bearing housing and leak out of the tank. For this reason, a bearing with high corrosion resistance is not required, the life of the bearing is extended, and the replacement frequency is reduced. In addition, since it is not necessary to take measures against liquid leakage outside the tank, such as addition of a drain, maintenance is facilitated. Furthermore, it becomes possible to prevent the inside of a tank from being contaminated by dust generation at the bearing of the bearing.

本発明による実施の形態について、図を用いて説明する。図1は、本発明のブラシ回転駆動軸用ハウジングの構成を示す構成図である。図1では、エアパージ部1とエアパイプ2とエア供給部3とが図4に新たに加わって、洗浄装置100が構成されている。図1において、エアパージ部1は、軸受け用ハウジング6に嵌合により取り付けられている。エアパイプ2は、両端をエアパージ部1とエア供給部3とに接続され、エア供給部3から供給される圧縮エアをエアパージ部1へ導いている。   Embodiments according to the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing the configuration of the brush rotation drive shaft housing of the present invention. In FIG. 1, an air purge unit 1, an air pipe 2, and an air supply unit 3 are newly added to FIG. In FIG. 1, the air purge unit 1 is attached to a bearing housing 6 by fitting. Both ends of the air pipe 2 are connected to the air purge unit 1 and the air supply unit 3, and guide the compressed air supplied from the air supply unit 3 to the air purge unit 1.

図4の場合と同様に、回転ブラシ4がモータ12から回転駆動力を得て回転し、洗浄液が噴射されている状態で、洗浄対象物が搬送機構により回転ブラシ4に送り込まれると、洗浄対象物の洗浄が始まる。この洗浄が、図6における状況であれば、大量に発生した液滴やミストはパネル9により捕らえられ、洗浄液の一部は液切板8に流れ落ち、液切板8の回転送度により再び液滴が飛散する。この液滴は、主にパネル9の裏側、液切板8とエアパージ部1との間のブラシ回転駆動軸5の部分、及びエアパージ部1の表面に付着する。   As in the case of FIG. 4, when the rotating brush 4 is rotated by obtaining a rotational driving force from the motor 12 and the cleaning liquid is sprayed, the object to be cleaned is sent to the rotating brush 4 by the transport mechanism. The washing of things begins. If this cleaning is the situation in FIG. 6, a large amount of droplets and mist are captured by the panel 9, and a part of the cleaning liquid flows down to the liquid cutting plate 8, and the liquid is again liquid by the transfer rate of the liquid cutting plate 8. Drops splash. The droplets adhere mainly to the back side of the panel 9, the portion of the brush rotation drive shaft 5 between the liquid cutting plate 8 and the air purge unit 1, and the surface of the air purge unit 1.

図2は、エアパージ部と、その近接部分を拡大した拡大図である。ブラシ回転駆動軸5の部分に溜まった液滴は一部エアパージ部1の方向へ流れようとする。とかろが、エアパージ部1のエアバッファが、エア供給部3からエアパイプ2を介して送り込まれた圧縮エアで満たされ、エアバッファ内を満たした圧縮エアは、エア供給部3とブラシ回転駆動軸5との間隙から、ブラシ回転駆動軸5の軸に沿って両側に噴き出す。   FIG. 2 is an enlarged view of the air purge portion and its proximity portion. Some of the liquid droplets accumulated on the brush rotation drive shaft 5 tends to flow toward the air purge unit 1. On the other hand, the air buffer of the air purge unit 1 is filled with the compressed air sent from the air supply unit 3 via the air pipe 2, and the compressed air filling the air buffer is divided into the air supply unit 3 and the brush rotation drive shaft. 5 is ejected from the gap between the two sides along the axis of the brush rotation drive shaft 5.

液切板8の方向へ噴き出した圧縮エアは、エアパージ部1の方向へ流れようとする液滴を阻止する。従って、ベアリング7を通って槽外へ流出するトラブルを解消することができる。さらに、軸受け用ハウジング6のベアリング7の方向へ噴き出した圧縮エアは、ベアリング7の回転による発塵を槽外へ押し出すことにより、槽内汚染を防ぐことが可能となる。   The compressed air ejected in the direction of the liquid cutting plate 8 blocks droplets that try to flow in the direction of the air purge unit 1. Therefore, the trouble which flows out of the tank through the bearing 7 can be solved. Further, the compressed air jetted in the direction of the bearing 7 of the bearing housing 6 pushes out the dust generated by the rotation of the bearing 7 to the outside of the tank, thereby preventing contamination in the tank.

以上説明したように、本発明のブラシ回転駆動軸用ハウジングは、付着した洗浄液の一部が、軸受け用ハウジングのベアリングを通ってハウジング内に侵入し、槽外へ漏れて出ることを防止する。このため耐食性の高い軸受けを必要とせず、軸受けの寿命が長くなり、交換頻度が少なくなる。また、ドレインの追加等、槽外の液漏れ対策が不要となるため、メンテナンスが容易となる。さらに、ベアリングの軸受けでの発塵による槽内汚染を防ぐことが可能となる。   As described above, the brush rotation drive shaft housing according to the present invention prevents a part of the adhering cleaning liquid from entering the housing through the bearing of the bearing housing and leaking out of the tank. For this reason, a bearing with high corrosion resistance is not required, the life of the bearing is extended, and the replacement frequency is reduced. In addition, since it is not necessary to take measures against liquid leakage outside the tank, such as addition of a drain, maintenance is facilitated. Furthermore, it becomes possible to prevent the inside of a tank from being contaminated by dust generation at the bearing of the bearing.

本発明におけるブラシ回転駆動軸用ハウジングの構成を示す構成図。The block diagram which shows the structure of the housing for brush rotation drive shafts in this invention. エアパージ部と、その近接部分を拡大した拡大図。The enlarged view which expanded the air purge part and its proximity | contact part. 従来の洗浄ブラシを有する洗浄装置の構成を示す構成図。The block diagram which shows the structure of the washing | cleaning apparatus which has the conventional washing brush. 軸受け用ハウジング部分の拡大図。The enlarged view of the housing part for bearings. 液切板とパネルとが取り付けられている部分の拡大図。The enlarged view of the part to which the liquid cutting board and the panel are attached. 洗浄液が軸受け用ハウジング内に侵入する侵入経路図。FIG. 6 is an intrusion path diagram for the cleaning liquid to enter the bearing housing.

符号の説明Explanation of symbols

1 エアパージ部
2 エアパイプ
3 エア供給部
4 回転ブラシ
5 回転ブラシ駆動軸
6 軸受け用ハウジング
7 ベアリング
8 液切板
9 パネル
10 洗浄装置の筐体
11 固定アーム
12 モータ
100 洗浄装置
DESCRIPTION OF SYMBOLS 1 Air purge part 2 Air pipe 3 Air supply part 4 Rotating brush 5 Rotating brush drive shaft 6 Housing for bearing 7 Bearing 8 Liquid cutting plate 9 Panel 10 Cleaning device case 11 Fixed arm 12 Motor 100 Cleaning device

Claims (3)

洗浄装置に組み込まれる、洗浄ブラシのブラシ回転駆動軸用ハウジングであって、
前記ハウジングは、エアバッファを有するエアパージ部と、エアパイプと、エア供給部とから成り、
前記エア供給部は、前記エアパイプを介して圧縮エアを前記エアパージ部へ供給し、
前記エアパージ部は、前記圧縮エアを前記エアバッファから前記ブラシ回転駆動軸に沿って放出することを特徴とするブラシ回転駆動軸用ハウジング。
A housing for a brush rotation drive shaft of a cleaning brush incorporated into a cleaning device,
The housing comprises an air purge part having an air buffer, an air pipe, and an air supply part,
The air supply unit supplies compressed air to the air purge unit via the air pipe,
The brush rotation drive shaft housing, wherein the air purge unit discharges the compressed air from the air buffer along the brush rotation drive shaft.
請求項1に記載のブラシ回転駆動軸用ハウジングにおいて、前記エアパージ部が、軸受け用ハウジングに近接して取り付けられることを特徴とするブラシ回転駆動軸用ハウジング。   2. The brush rotation drive shaft housing according to claim 1, wherein the air purge portion is attached in proximity to the bearing housing. 請求項2に記載のブラシ回転駆動軸用ハウジングにおいて、前記エアパージ部が、軸受け用ハウジングに、嵌合により取り付けられることを特徴とするブラシ回転駆動軸用ハウジング。   The brush rotation drive shaft housing according to claim 2, wherein the air purge portion is attached to the bearing housing by fitting.
JP2006063134A 2006-03-08 2006-03-08 Housing for brush-rotating driving shaft Pending JP2007237081A (en)

Priority Applications (1)

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JP2006063134A JP2007237081A (en) 2006-03-08 2006-03-08 Housing for brush-rotating driving shaft

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100892757B1 (en) * 2007-10-10 2009-04-15 세메스 주식회사 Apparatus and method for treating substrates
KR100922521B1 (en) * 2007-10-11 2009-10-20 세메스 주식회사 Brush assembly and apparatus for cleaning a substrate having the same
CN103390958A (en) * 2012-05-09 2013-11-13 发那科株式会社 Electric motor having air purge function

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100892757B1 (en) * 2007-10-10 2009-04-15 세메스 주식회사 Apparatus and method for treating substrates
KR100922521B1 (en) * 2007-10-11 2009-10-20 세메스 주식회사 Brush assembly and apparatus for cleaning a substrate having the same
CN103390958A (en) * 2012-05-09 2013-11-13 发那科株式会社 Electric motor having air purge function
JP2013236473A (en) * 2012-05-09 2013-11-21 Fanuc Ltd Motor having air purge function
US8791612B2 (en) 2012-05-09 2014-07-29 Fanuc Corporation Electric motor having air purge function
DE102013007568B4 (en) 2012-05-09 2023-11-09 Fanuc Corp. Electric motor with air purge function

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