JP2007229889A - Chuck table inspection method - Google Patents

Chuck table inspection method Download PDF

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JP2007229889A
JP2007229889A JP2006056666A JP2006056666A JP2007229889A JP 2007229889 A JP2007229889 A JP 2007229889A JP 2006056666 A JP2006056666 A JP 2006056666A JP 2006056666 A JP2006056666 A JP 2006056666A JP 2007229889 A JP2007229889 A JP 2007229889A
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suction
chuck table
suction passage
flow resistance
resistance value
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JP4782587B2 (en
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Kazutaka Kuwana
一孝 桑名
Chonsu Pe
チョンス ペ
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Disco Corp
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Disco Abrasive Systems Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a chuck table inspection method capable of properly inspecting the suction holding performance of a chuck table. <P>SOLUTION: The method of inspecting the chuck table composed of a chuck table body 2 equipped with a holding area on an upper surface and a suction passage 52 communicating with the holding area, and a suction holding member 3 arranged in the holding area and having permeability; comprises a sucking force producing step communicating the suction passage 52 of the chuck table 2 with a sucking means 51 to produce sucking force in the holding area; a flow rate resistance calculating step measuring the flaw rate of air flowing in the suction passage 52 and the pressure of the suction passage, and obtaining a circulation resistance value by dividing the suction passage pressure by the air flow rate; and a determining step determining the chuck table 2 as a non-defective product when the circulation resistance value calculated by the circulation resistance calculating step is within a predetermined permissible area, and determining the chuck table 2 as a defective product when the circulation resistance value is out of the predetermined permissible range. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、半導体ウエーハ等の被加工物の裏面を研削する研削装置や半導体ウエーハ等の被加工物を切断するダイシング装置等の加工装置に装備され被加工物を吸引保持するチャックテーブルの吸引保持性能を検査するチャックテーブルの検査方法に関する。   The present invention relates to a suction holding of a chuck table that is equipped in a processing device such as a grinding device for grinding a back surface of a workpiece such as a semiconductor wafer or a dicing device for cutting a workpiece such as a semiconductor wafer, and sucks and holds the workpiece. The present invention relates to a chuck table inspection method for inspecting performance.

半導体デバイス製造工程においては、略円板形状である半導体ウエーハの表面に格子状に配列されたストリートと呼ばれる分割予定ラインによって複数の領域が区画され、この区画された領域にＩＣ、ＬＳＩ等のデバイスを形成する。そして、半導体ウエーハを切削装置等のダイシング装置によりストリートに沿って切断することによりデバイスが形成された領域を分割して個々のデバイス（チップ）を製造している。また、半導体ウエーハを個々のデバイス（チップ）に分割される前にその裏面を研削装置によって研削して所定の厚さに形成されている。   In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets by a dicing apparatus such as a cutting apparatus to divide the region where the devices are formed to manufacture individual devices (chips). Further, before the semiconductor wafer is divided into individual devices (chips), the back surface thereof is ground by a grinding device to have a predetermined thickness.

上述した研削装置や切削装置等の加工装置は、半導体ウエーハ等の被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物に所定の加工を施す加工手段とを具備している。このような加工装置において、被加工物に精密加工を施すには被加工物がチャックテーブルに確実に保持されていることが重要であり、チャックテーブルは被加工物を吸引保持するように構成されている。このようなチャックテーブルは、上面に保持領域を備えるとともに該保持領域に連通する吸引通路を備えたチャックテーブル本体と、該保持領域に配設された通気性を有する吸引保持部材とからなっている。   A processing apparatus such as the above-described grinding apparatus or cutting apparatus includes a chuck table that holds a workpiece such as a semiconductor wafer, and a processing unit that performs a predetermined process on the workpiece held on the chuck table. Yes. In such a processing apparatus, it is important that the workpiece is securely held by the chuck table in order to perform precision machining on the workpiece, and the chuck table is configured to suck and hold the workpiece. ing. Such a chuck table comprises a chuck table body having a holding area on the upper surface and a suction passage communicating with the holding area, and a suction holding member having air permeability disposed in the holding area. .

上述したチャックテーブルにおいては、チャックテーブル本体と保持領域に配設される吸引保持部材との接合が不十分であったり、チャックテーブル本体と吸引保持部材との間に段差がある場合、また、吸引保持部材自体に欠陥がある場合には、被加工物を吸引保持部材上に確実に吸引保持することができず、加工時においてチャックテーブルから被加工物が脱落して破損するという問題がある。このような問題を解消するためにチャックテーブルの製造時に吸引力を検査するとともに、チャックテーブルを加工装置に装着した状態で再度吸引力を検査している。このチャックテーブルの吸引保持性能を検査する方法としては、吸引保持部材を流通する空気の流量を測定することによりチャックテーブルの良否を判定していた。   In the above-described chuck table, when the chuck table main body and the suction holding member disposed in the holding area are insufficiently joined, or when there is a step between the chuck table main body and the suction holding member, suction is also performed. If the holding member itself has a defect, the workpiece cannot be reliably sucked and held on the suction holding member, and there is a problem that the workpiece falls off from the chuck table during processing and is damaged. In order to solve such a problem, the suction force is inspected when the chuck table is manufactured, and the suction force is inspected again with the chuck table mounted on the processing apparatus. As a method for inspecting the suction holding performance of the chuck table, the quality of the chuck table is determined by measuring the flow rate of air flowing through the suction holding member.

而して、チャックテーブルを製造するメーカーと加工装置を製造するメーカーが異なる場合に、検査に用いる吸引手段の吸引能力が異なると吸引保持部材を流通する空気の流量が異なり、チャックテーブルの良否を適切に判定することが困難である。即ち、チャックテーブルの吸引保持部材上に被加工物を載置しない状態で吸引保持部材の性能を検査する場合、吸引能力が大きい吸引手段を用いた場合には吸引保持部材に多少の目詰まりが生じていても所定の流量が得られ良品として判定される場合がある。また、チャックテーブルの吸引保持部材上に被加工物を載置した状態でチャックテーブルとしての吸引性能を検査する場合、吸引能力が大きい吸引手段を用いた場合には吸引保持部材に欠陥がなくても所定以上の流量となって不良品として判定される場合がある。   Thus, when the manufacturer that manufactures the chuck table is different from the manufacturer that manufactures the processing device, if the suction capability of the suction means used for the inspection is different, the flow rate of the air flowing through the suction holding member is different, and the quality of the chuck table is determined. It is difficult to determine properly. In other words, when the performance of the suction holding member is inspected without placing the workpiece on the suction holding member of the chuck table, when the suction means having a large suction capacity is used, the suction holding member is somewhat clogged. Even if it occurs, a predetermined flow rate may be obtained and determined as a non-defective product. Also, when inspecting the suction performance of the chuck table with the work piece placed on the suction holding member of the chuck table, the suction holding member is free of defects when using suction means with a high suction capability. May also be determined as a defective product because the flow rate exceeds a predetermined value.

本発明は上記事実に鑑みてなされたものであり、その主たる技術的課題は、チャックテーブルの吸引保持性能を適切に検査することがチャックテーブルの検査方法を提供することにある。   The present invention has been made in view of the above-mentioned facts, and a main technical problem thereof is to provide a chuck table inspection method that appropriately inspects the suction holding performance of the chuck table.

上記主たる技術課題を解決するため、本発明によれば、上面に保持領域を備えるとともに該保持領域に連通する吸引通路を備えたチャックテーブル本体と、該保持領域に配設された通気性を有する吸引保持部材とからなるチャックテーブルの検査方法であって、
チャックテーブルの該吸引通路を吸引手段に連通して該保持領域に吸引力を生成せしめる吸引力生成工程と、
該吸引力生成工程を実施している際に、該吸引通路を流通する空気の流量と該吸引通路の圧力を測定し、該吸引通路圧力を該空気流量で除算（吸引通路圧力÷空気流量）して流通抵抗値を求める流量抵抗算出工程と、
該流通抵抗算出工程によって算出された該流通抵抗値が所定の許容範囲ならばチャックテーブルは良品と判定し、該流通抵抗値が所定の許容範囲外の場合にはチャックテーブルは不良品と判定する判定工程と、を含む、
ことを特徴とするチャックテーブルの検査方法が提供される。 In order to solve the above main technical problem, according to the present invention, there is provided a chuck table main body having a holding area on the upper surface and a suction passage communicating with the holding area, and air permeability disposed in the holding area. A chuck table inspection method comprising a suction holding member,
A suction force generation step of causing the suction passage of the chuck table to communicate with suction means to generate a suction force in the holding region;
During the suction force generation step, the flow rate of the air flowing through the suction passage and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure / air flow rate). A flow resistance calculation step for obtaining a flow resistance value,
If the flow resistance value calculated by the flow resistance calculation step is within a predetermined allowable range, the chuck table is determined as a non-defective product, and if the flow resistance value is outside the predetermined allowable range, the chuck table is determined as a defective product. A determination step,
A chuck table inspection method is provided.

上記吸引力生成工程および上記流量抵抗算出工程は、チャックテーブルの吸引保持部材に被加工物相当部材を載置しない状態で実施する。
また、上記吸引力生成工程および上記流量抵抗算出工程は、チャックテーブルの吸引保持部材の全面に被加工物相当部材を載置した状態で実施する。 The suction force generation step and the flow resistance calculation step are performed in a state where the workpiece equivalent member is not placed on the suction holding member of the chuck table.
Further, the suction force generation step and the flow resistance calculation step are performed in a state where a workpiece equivalent member is placed on the entire surface of the suction holding member of the chuck table.

また、本発明によれば、上面に保持領域を備えるとともに該保持領域に連通する吸引通路を備えたチャックテーブル本体と、該保持領域に配設された通気性を有する吸引保持部材とからなるチャックテーブルの検査方法であって、
チャックテーブルの該吸引保持部材に被加工物相当部材を載置しない状態で該吸引通路を吸引手段に連通して該保持領域に吸引力を生成せしめる第１の吸引力生成工程と、
該第１の吸引力生成工程を実施している際に、該吸引通路を流通する空気の流量と該吸引通路の圧力を測定し、該吸引通路圧力を該空気流量で除算（吸引通路圧力÷空気流量）して流通抵抗値を求める第１の流通抵抗算出工程と、
チャックテーブルの該吸引保持部材の全面に被加工物相当部材を載置した状態で該吸引通路を吸引手段に連通して該保持領域に吸引力を生成せしめ該吸引保持部材上に被加工物相当部材を吸引保持する第２の吸引力生成工程と、
該第２の吸引力生成工程を実施している際に、該吸引通路を流通する空気の流量と該吸引通路の圧力を測定し、該吸引通路圧力を該空気流量で除算（吸引通路圧力÷空気流量）して第２の流通抵抗値を求める第２の流通抵抗算出工程と、
該第１の流通抵抗値および第２の流通抵抗値がそれぞれ所定の許容範囲ならばチャックテーブルは良品と判定し、該第１の流通抵抗値および第２の流量抵抗値の少なくとも一方がそれぞれ所定の許容範囲外の場合にはチャックテーブルは不良品と判定する判定工程と、を含む、
ことを特徴とするチャックテーブルの検査方法が提供される。 Further, according to the present invention, a chuck comprising a chuck table body having a holding area on the upper surface and a suction passage communicating with the holding area, and a breathable suction holding member disposed in the holding area. A table inspection method,
A first suction force generation step of generating a suction force in the holding region by communicating the suction passage with a suction means in a state where no workpiece equivalent member is placed on the suction holding member of the chuck table;
While performing the first suction force generation step, the flow rate of air flowing through the suction passage and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure ÷ A first flow resistance calculation step for obtaining a flow resistance value by air flow),
With the workpiece equivalent member placed on the entire surface of the suction holding member of the chuck table, the suction passage is communicated with the suction means to generate a suction force in the holding region, and the workpiece is equivalent to the workpiece on the suction holding member. A second suction force generation step of sucking and holding the member;
While performing the second suction force generation step, the flow rate of air flowing through the suction passage and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure ÷ A second flow resistance calculation step for obtaining a second flow resistance value by air flow rate);
If the first flow resistance value and the second flow resistance value are each within a predetermined allowable range, the chuck table is determined to be non-defective, and at least one of the first flow resistance value and the second flow resistance value is predetermined. A determination step for determining that the chuck table is a defective product when it is outside the allowable range,
A chuck table inspection method is provided.

本発明によるチャックテーブルの検査方法においては、チャックテーブルの吸引通路を流通する空気の流量と吸引通路の圧力を測定し、吸引通路圧力を空気流量で除算（吸引通路圧力÷空気流量）して流通抵抗値を求め、この流通抵抗値に基づいてチャックテーブルの良否を判定するので、吸引手段の能力に影響されることなくチャックテーブルの吸引保持性能を適切に検査することができる。   In the chuck table inspection method according to the present invention, the flow rate of air flowing through the suction passage of the chuck table and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow amount (suction passage pressure ÷ air flow amount). Since the resistance value is obtained and the quality of the chuck table is judged based on the flow resistance value, the suction holding performance of the chuck table can be appropriately inspected without being affected by the ability of the suction means.

以下、本発明によるチャックテーブルの検査方法の好適な実施形態について、添付図面を参照して更に詳細に説明する。
図１には、本発明による検査方法によって検査されるチャックテーブルの断面図が示されている。図１に示すチャックテーブル２は、チャックテーブル本体２１と、該チャックテーブル本体２１の保持領域２１０に配設された通気性を有する吸引保持部材３とからなっている。チャックテーブル本体２１は、円盤状の保持部２１１と、該保持部２１１の下面に突出して設けられた回転軸部２１２とからなっており、ステンレス鋼等の金属材やセラミックス等によって一体的に形成されている。保持部２１１の上面には保持領域２１０に円形の嵌合凹部２１３が設けられている。この嵌合凹部２１３には、底面の外周部に吸引保持部材３が載置される環状の支持棚２１３aが設けられている。チャックテーブル本体２１を形成する保持部２１１および回転軸部２１２には、嵌合凹部２１３に開口する吸引通路２１４が設けられている。 Hereinafter, a preferred embodiment of a chuck table inspection method according to the present invention will be described in more detail with reference to the accompanying drawings.
FIG. 1 shows a cross-sectional view of a chuck table inspected by an inspection method according to the present invention. The chuck table 2 shown in FIG. 1 includes a chuck table main body 21 and a suction holding member 3 having air permeability disposed in a holding region 210 of the chuck table main body 21. The chuck table main body 21 includes a disk-shaped holding portion 211 and a rotating shaft portion 212 provided so as to protrude from the lower surface of the holding portion 211, and is integrally formed of a metal material such as stainless steel or ceramics. Has been. A circular fitting recess 213 is provided in the holding region 210 on the upper surface of the holding portion 211. The fitting recess 213 is provided with an annular support shelf 213a on which the suction holding member 3 is placed on the outer periphery of the bottom surface. The holding portion 211 and the rotary shaft portion 212 that form the chuck table main body 21 are provided with a suction passage 214 that opens to the fitting recess 213.

上記吸引保持部材３は、図示の実施形態においてはポーラスなセラミックスによって円形に形成されている。この吸引保持部材３は、チャックテーブル本体２１の保持部２１１の上面に形成された嵌合凹部２１１に嵌合され環状の支持棚２１３a上に載置され、吸引保持部材３の外周面と嵌合凹部２１１の内周面が適宜の接着剤によって接合されている。このようにしてチャックテーブル本体２１の保持部２１１に設けられた嵌合凹部２１３に嵌合され吸引保持部材３は、その上面が保持部２１１の上面と同一平面を形成するように構成されている。   In the illustrated embodiment, the suction holding member 3 is formed in a circular shape with porous ceramics. The suction holding member 3 is fitted in a fitting recess 211 formed on the upper surface of the holding portion 211 of the chuck table main body 21 and is placed on the annular support shelf 213 a and is fitted to the outer peripheral surface of the suction holding member 3. The inner peripheral surface of the recess 211 is joined by an appropriate adhesive. Thus, the suction holding member 3 fitted in the fitting recess 213 provided in the holding portion 211 of the chuck table main body 21 is configured such that the upper surface thereof is flush with the upper surface of the holding portion 211. .

以上のように構成されたチャックテーブル２は、研削装置や切削装置等の加工装置に装着され、チャックテーブル本体２１に形成された吸引通路２１４が図示しない吸引手段に接続される。従って、チャックテーブル本体２１の保持領域２１０に配設された吸引保持部材３上に被加工物を載置し、図示しない吸引手段を作動することにより、吸引通路２１４を介して吸引保持部材３の上面に負圧が作用し、該吸引保持部材３の上面に被加工物が吸引保持される。   The chuck table 2 configured as described above is mounted on a processing apparatus such as a grinding apparatus or a cutting apparatus, and a suction passage 214 formed in the chuck table main body 21 is connected to a suction means (not shown). Accordingly, the workpiece is placed on the suction holding member 3 disposed in the holding region 210 of the chuck table main body 21, and the suction means (not shown) is operated to operate the suction holding member 3 via the suction passage 214. A negative pressure acts on the upper surface, and the workpiece is sucked and held on the upper surface of the suction holding member 3.

次に、上述したチャックテーブル２の吸引保持性能を検査する検査方法の第１の実施形態について、図２を参照して説明する。
先ず、検査装置について説明する。図２に示す検査装置４は、吸引ポンプ５１と、該吸引ポンプ５１とチャックテーブル２の吸引通路２１４とを接続する吸引パイプ５２と、該吸引パイプ５２に配設された可変絞り弁５３とからなる吸引手段５を具備している。この吸引手段５の吸引パイプ５２には、吸引通路２１４を流通する空気の流量を測定する流量計６と、吸引通路２１４の圧力を測定する圧力計７が配設されている。 Next, a first embodiment of the inspection method for inspecting the suction holding performance of the chuck table 2 described above will be described with reference to FIG.
First, the inspection apparatus will be described. 2 includes a suction pump 51, a suction pipe 52 connecting the suction pump 51 and the suction passage 214 of the chuck table 2, and a variable throttle valve 53 disposed in the suction pipe 52. The suction means 5 is provided. The suction pipe 52 of the suction means 5 is provided with a flow meter 6 for measuring the flow rate of air flowing through the suction passage 214 and a pressure gauge 7 for measuring the pressure of the suction passage 214.

上述した検査装置を用いてチャックテーブル２の吸引保持性能を検査するには、図２に示すように吸引手段５の吸引パイプ５２をチャックテーブル２の吸引通路２１４に接続する。そして、吸引ポンプ５１を作動すると、吸引パイプ５２および吸引通路２１４を介してチャックテーブル本体２１の保持領域２１０に形成された嵌合凹部２１３に吸引力が生成せしめられる（吸引力生成工程）。この結果、嵌合凹部２１３に嵌合されている通気性を有する吸引保持部材３を通して空気が吸引され、この吸引された空気が吸引通路２１４および吸引パイプ５２を介して吸引ポンプ５１に吸引される。そして、吸引パイプ５２に配設された流量計６によって吸引パイプ５２（吸引通路２１４）を流通する空気の流量(Q1)を測定するとともに、吸引パイプ５２に配設された圧力計７によって吸引パイプ５２（吸引通路２１４）の吸引通路圧力値(P1)が測定される。なお、この測定においては後述する流通抵抗値の計算を容易にするために吸引通路圧力値(P1)が一定（例えば、−３５kPa）になるように可変絞り弁５３を調整する。従って、吸引パイプ５２（吸引通路２１４）の圧力が安定した状態においては、圧力計７によって測定される吸引通路圧力値(P1)は一定（例えば、−３５kPa）となる。そして、測定した空気流量値(Q1)と吸引通路圧力値(P1)に基づいて、吸引保持部材３の流通抵抗値(R1)を計算する（流通抵抗算出工程）。この流通抵抗値(R1)は、吸引通路圧力値(P1)を空気流量値(Q1)で除算（(R1＝P1÷Q1)することによって求められる。   In order to inspect the suction holding performance of the chuck table 2 using the inspection apparatus described above, the suction pipe 52 of the suction means 5 is connected to the suction passage 214 of the chuck table 2 as shown in FIG. When the suction pump 51 is operated, a suction force is generated in the fitting recess 213 formed in the holding region 210 of the chuck table body 21 via the suction pipe 52 and the suction passage 214 (suction force generation step). As a result, air is sucked through the breathable suction holding member 3 fitted in the fitting recess 213, and the sucked air is sucked into the suction pump 51 through the suction passage 214 and the suction pipe 52. . Then, the flow rate (Q1) of the air flowing through the suction pipe 52 (suction passage 214) is measured by the flow meter 6 disposed in the suction pipe 52, and the suction pipe is measured by the pressure gauge 7 disposed in the suction pipe 52. The suction passage pressure value (P1) of 52 (suction passage 214) is measured. In this measurement, the variable throttle valve 53 is adjusted so that the suction passage pressure value (P1) is constant (for example, −35 kPa) in order to facilitate calculation of a flow resistance value described later. Therefore, when the pressure of the suction pipe 52 (suction passage 214) is stable, the suction passage pressure value (P1) measured by the pressure gauge 7 is constant (for example, −35 kPa). Then, the flow resistance value (R1) of the suction holding member 3 is calculated based on the measured air flow rate value (Q1) and the suction passage pressure value (P1) (flow resistance calculation step). The flow resistance value (R1) is obtained by dividing the suction passage pressure value (P1) by the air flow rate value (Q1) ((R1 = P1 ÷ Q1).

上述したように求められた流通抵抗値(R1)に基づいて、チャックテーブルが良品か不良品かを判定する。即ち、流通抵抗値(R1)がそれぞれ所定の許容範囲内ならば良品と判定し、流通抵抗値(R1)が所定の許容範囲外の場合には不良品と判定する(判定工程)。   Based on the flow resistance value (R1) obtained as described above, it is determined whether the chuck table is a good product or a defective product. That is, if the distribution resistance value (R1) is within a predetermined allowable range, it is determined as a non-defective product, and if the distribution resistance value (R1) is outside the predetermined allowable range, it is determined as a defective product (determination step).

上記判定工程について、更に詳細に説明する。
下記表１は７個のチャックテーブルについて上記吸引力生成工程および流通抵抗算出工程を実施したデータである。 The determination process will be described in more detail.
Table 1 below shows data obtained by performing the suction force generation step and the flow resistance calculation step on seven chuck tables.

Figure 2007229889
Figure 2007229889

上述した表１に示す例においては吸引通路圧力値(P1)の設定値を変えると空気流量値(Q1)は変化するが、流通抵抗値(R1)は変わらない。従って、チャックテーブルの良否を判定する基準として流通抵抗値(R1)が例えば−０．３以上であればチャックテーブルの吸引保持部材は十分な通気性を有しており、良品であると判定する。表１に示す例においては、No．１〜No．６のチャックテーブルは流通抵抗値(R1)が−０．２２で判定基準である−０．３以上であるので良品と判定する。一方、No．７のチャックテーブルは流通抵抗値(R1)が−０．３２で判定基準である−０．３より小さいので、吸引保持部材が目詰まり等により十分な通気性を有していないため、不良品であると判定する。   In the example shown in Table 1 above, when the set value of the suction passage pressure value (P1) is changed, the air flow rate value (Q1) changes, but the flow resistance value (R1) does not change. Therefore, if the flow resistance value (R1) is, for example, −0.3 or more as a criterion for determining the quality of the chuck table, the chuck table suction holding member has sufficient air permeability and is determined to be a non-defective product. . In the example shown in Table 1, no. 1-No. The chuck table No. 6 has a flow resistance value (R1) of −0.22 and is equal to or more than −0.3 which is a determination criterion, and thus is determined as non-defective. On the other hand, No. The chuck table No. 7 has a flow resistance value (R1) of -0.32, which is smaller than the criterion of -0.3, so the suction holding member does not have sufficient air permeability due to clogging, etc. It is determined that

次に、上述したチャックテーブル２の吸引保持性能を検査する検査方法の第２の実施形態について、図３を参照して説明する。
図３に示すように、チャックテーブル２の保持領域２１０の全面、即ち吸引保持部材３の全面にウエーハ等の被加工物相当部材Wを載置するとともに、吸引ポンプ５１を作動する。従って、吸引パイプ５２および吸引通路２１４を介してチャックテーブル本体２１の保持領域２１０を形成する嵌合凹部２１３に吸引力が生成せしめられる。この結果、嵌合凹部２１３に嵌合されている通気性を有する吸引保持部材３を通して空気が吸引され、吸引保持部材３に載置された被加工物相当部材Wが吸引保持部材３上に吸引保持される（吸引力生成工程）。この吸引力生成工程を実施している際に、吸引パイプ５２に配設された流量計６によって吸引パイプ５２（吸引通路２１４）を流通する空気の流量(Q2)を測定するとともに、吸引パイプ５２に配設された圧力計７によって吸引パイプ５２（吸引通路２１４）の吸引通路圧力値(P2)が測定される。なお、この測定においても後述する流通抵抗値の計算を容易にするために吸引通路圧力値(P2)が一定（例えば、−６０kPa）になるように可変絞り弁５３を調整する。従って、吸引パイプ５２（吸引通路２１４）の圧力が安定した状態においては、圧力計７によって測定される吸引通路圧力値(P2)は一定（例えば、−６０kPa）となる。そして、測定した空気流量値(Q2)と吸引通路圧力値(P2)に基づいて、吸引保持部材３の流通抵抗値(R2)を計算する（流通抵抗算出工程）。この流通抵抗値(R2)は、吸引通路圧力値(P2)を空気流量値(Q2)で除算（(R2＝P2÷Q2することによって求められる。 Next, a second embodiment of the inspection method for inspecting the suction holding performance of the chuck table 2 described above will be described with reference to FIG.
As shown in FIG. 3, a workpiece equivalent member W such as a wafer is placed on the entire surface of the holding region 210 of the chuck table 2, that is, the entire surface of the suction holding member 3, and the suction pump 51 is operated. Accordingly, a suction force is generated in the fitting recess 213 that forms the holding region 210 of the chuck table main body 21 via the suction pipe 52 and the suction passage 214. As a result, air is sucked through the breathable suction holding member 3 fitted in the fitting recess 213, and the workpiece equivalent member W placed on the suction holding member 3 is sucked onto the suction holding member 3. Is held (attraction force generation step). During the suction force generation step, the flow rate (Q2) of the air flowing through the suction pipe 52 (suction passage 214) is measured by the flow meter 6 disposed in the suction pipe 52, and the suction pipe 52 is measured. The suction passage pressure value (P 2) of the suction pipe 52 (suction passage 214) is measured by the pressure gauge 7 disposed in the section. In this measurement as well, the variable throttle valve 53 is adjusted so that the suction passage pressure value (P2) is constant (for example, −60 kPa) in order to facilitate the calculation of the flow resistance value described later. Accordingly, when the pressure of the suction pipe 52 (suction passage 214) is stable, the suction passage pressure value (P2) measured by the pressure gauge 7 is constant (for example, −60 kPa). Based on the measured air flow rate value (Q2) and suction passage pressure value (P2), the flow resistance value (R2) of the suction holding member 3 is calculated (flow resistance calculation step). This flow resistance value (R2) is obtained by dividing the suction passage pressure value (P2) by the air flow rate value (Q2) ((R2 = P2 ÷ Q2).

上述したように求められた流通抵抗値(R2)に基づいて、チャックテーブルが良品か不良品かを判定する。即ち、流通抵抗値(R2)がそれぞれ所定の許容範囲内ならば良品と判定し、流通抵抗値(R2)が所定の許容範囲外の場合には不良品と判定する(判定工程)。   Based on the flow resistance value (R2) obtained as described above, it is determined whether the chuck table is a good product or a defective product. That is, if the distribution resistance value (R2) is within a predetermined allowable range, it is determined as a non-defective product, and if the distribution resistance value (R2) is outside the predetermined allowable range, it is determined as a defective product (determination step).

上記判定工程について、更に詳細に説明する。
下記表２は７個のチャックテーブルについて上記吸引力生成工程および流通抵抗算出工程を実施したデータである。 The determination process will be described in more detail.
Table 2 below shows data obtained by carrying out the suction force generation step and the flow resistance calculation step for seven chuck tables.

Figure 2007229889
Figure 2007229889

上述した表２に示す例において吸引通路圧力値(P2)の設定値を変えると空気流量値(Q2)は変化するが、流通抵抗値(R2)は変わらない。従って、チャックテーブルの良否を判定する基準として流通抵抗値(R2)が例えば−１．０以下であればチャックテーブルの吸引保持性能は十分であり、良品であると判定する。表２に示す例においては、No．１〜No．３およびNo．５〜No．７のチャックテーブルは流通抵抗値(R2)が判定基準である−１．０以下であるので良品と判定する。一方、No．４のチャックテーブルは流通抵抗値(R2)が−０．６０で判定基準である−１．０より大きいので、吸引保持部材の上面とチャックテーブル本体の上面との段差等によって空気の洩れがあり、吸引保持性能が不十分であるため、不良品であると判定する。   In the example shown in Table 2 above, when the set value of the suction passage pressure value (P2) is changed, the air flow rate value (Q2) changes, but the flow resistance value (R2) does not change. Accordingly, if the flow resistance value (R2) is, for example, −1.0 or less as a criterion for determining the quality of the chuck table, the chuck table has sufficient suction holding performance and is determined to be a non-defective product. In the example shown in Table 2, no. 1-No. 3 and No. 5-No. The chuck table No. 7 is determined to be a non-defective product because the flow resistance value (R2) is -1.0 or less, which is the criterion. On the other hand, No. The chuck table No. 4 has a flow resistance value (R2) of −0.60, which is larger than the criterion of −1.0. Therefore, there is air leakage due to a step between the upper surface of the suction holding member and the upper surface of the chuck table body. Since the suction holding performance is insufficient, it is determined that the product is defective.

次に、上述したチャックテーブル２の吸引保持性能を検査する検査方法の第３の実施形態について説明する。
第３の実施形態においては、同一のチャックテーブルについてそれぞれ図２に示す第１の実施形態における上記吸引力生成工程（第１の吸引力生成工程）と流通抵抗算出工程（第１の流通抵抗算出工程）および図３に示す第２の実施形態における上記吸引力生成工程（第２の吸引力生成工程）と流通抵抗算出工程（第２の流通抵抗算出工程）を実施する。そして、第１の流通抵抗算出工程によって算出された流通抵抗値(R1)（第１の流通抵抗値(R1)）および第２の流通抵抗算出工程によって算出された流通抵抗値(R2)（第２の流通抵抗値(R2)）に基づいて、 第１の流通抵抗値(R1)および第２の流通抵抗値(R2)がそれぞれ許容範囲内ならばチャックテーブルは良品と判定し、第１の流通抵抗値(R1)および第２の流通抵抗値(R2)の少なくとも一方がそれぞれ所定の許容範囲外の場合にはチャックテーブルは不良品と判定する。従って、上記表１および表２に示す実施例においては、No．１〜No．３およびNo．５〜No．６のチャックテーブルは良品と判定し、No．４とNo．７のチャックテーブルは不良品と判定する。 Next, a third embodiment of the inspection method for inspecting the suction holding performance of the chuck table 2 described above will be described.
In the third embodiment, for the same chuck table, the suction force generation step (first suction force generation step) and the flow resistance calculation step (first flow resistance calculation) in the first embodiment shown in FIG. Step) and the suction force generation step (second suction force generation step) and the flow resistance calculation step (second flow resistance calculation step) in the second embodiment shown in FIG. Then, the flow resistance value (R1) calculated by the first flow resistance calculation step (first flow resistance value (R1)) and the flow resistance value (R2) calculated by the second flow resistance calculation step (first) 2), if the first flow resistance value (R1) and the second flow resistance value (R2) are within allowable ranges, the chuck table is determined to be non-defective. If at least one of the flow resistance value (R1) and the second flow resistance value (R2) is outside a predetermined allowable range, the chuck table is determined to be defective. Therefore, in the examples shown in Tables 1 and 2, No. 1-No. 3 and No. 5-No. No. 6 chuck table is judged as non-defective, and No. 4 and No. 7 is determined to be defective.

次に、上述したチャックテーブル２の吸引保持性能を検査する検査方法の第４の実施形態について、図４を参照して説明する。
図４に示す検査方法においては、検査装置４にコンピュータ等の制御手段８が用いられる。そして、上記図２および図３に示す検査装置４における流量計６および圧力計７は、それぞれ計測した流量値および圧力値を制御手段８に送る。制御手段８は、流量計６および圧力計７から送られた流量値および圧力値に基づいて流量抵抗値を演算し、チャックテーブルの吸引性能を判定するとともに、これらの値を表示手段９に表示する。なお、図４に示す検査装置４においては、上記図２および図３に示す検査装置４における可変絞り弁５３を設ける必要はない。 Next, a fourth embodiment of the inspection method for inspecting the suction holding performance of the chuck table 2 described above will be described with reference to FIG.
In the inspection method shown in FIG. 4, control means 8 such as a computer is used for the inspection device 4. Then, the flow meter 6 and the pressure gauge 7 in the inspection apparatus 4 shown in FIGS. 2 and 3 send the measured flow value and pressure value to the control means 8, respectively. The control means 8 calculates the flow resistance value based on the flow value and the pressure value sent from the flow meter 6 and the pressure gauge 7 to determine the suction performance of the chuck table, and displays these values on the display means 9. To do. In the inspection apparatus 4 shown in FIG. 4, it is not necessary to provide the variable throttle valve 53 in the inspection apparatus 4 shown in FIGS.

上述した検査装置４を用いてチャックテーブル２の吸引保持性能を検査するには、図４に示すように吸引手段５の吸引パイプ５２をチャックテーブル２の吸引通路２１４に接続する。そして、吸引ポンプ５１を作動すると、吸引パイプ５２および吸引通路２１４を介してチャックテーブル本体２１の保持領域２１０に形成された嵌合凹部２１３に吸引力が生成せしめられる（吸引力生成工程）。この結果、嵌合凹部２１３に嵌合されている通気性を有する吸引保持部材３を通して空気が吸引され、この吸引された空気が吸引通路２１４および吸引パイプ５２を介して吸引ポンプ５１に吸引される。このとき、吸引パイプ５２に配設された流量計６によって吸引パイプ５２（吸引通路２１４）を流通する空気の流量が測定され、測定された空気流量値(Q1)が制御手段８に送られる。また、吸引パイプ５２に配設された圧力計７によって吸引パイプ５２（吸引通路２１４）の圧力が測定され、測定された吸引通路圧力値(P1)が制御手段８に送られる。なお、図４に示す実施形態においては上記図２および図３に示す検査装置４における可変絞り弁５３を設けていないので、圧力計７によって測定された吸引通路圧力値(P1)は、チャックテーブル２の吸引保持部材３の流通抵抗によって変化する。制御手段８は、入力した空気流量値(Q1)と吸引通路圧力値(P1)に基づいて、吸引保持部材３の流通抵抗値(R1)を演算する（流通抵抗算出工程）。この流通抵抗値(R1)は、吸引通路圧力値(P1)を空気流量値(Q1)で除算（(R1＝P1÷Q1)することによって求められる。そして、制御手段８は、上記空気流量値(Q1)、吸引通路圧力値(P1)および流通抵抗値(R1)を図示しないメモリに格納する。   In order to inspect the suction holding performance of the chuck table 2 using the inspection device 4 described above, the suction pipe 52 of the suction means 5 is connected to the suction passage 214 of the chuck table 2 as shown in FIG. When the suction pump 51 is operated, a suction force is generated in the fitting recess 213 formed in the holding region 210 of the chuck table body 21 via the suction pipe 52 and the suction passage 214 (suction force generation step). As a result, air is sucked through the breathable suction holding member 3 fitted in the fitting recess 213, and the sucked air is sucked into the suction pump 51 through the suction passage 214 and the suction pipe 52. . At this time, the flow rate of air flowing through the suction pipe 52 (suction passage 214) is measured by the flow meter 6 disposed in the suction pipe 52, and the measured air flow value (Q 1) is sent to the control means 8. Further, the pressure of the suction pipe 52 (suction passage 214) is measured by the pressure gauge 7 disposed in the suction pipe 52, and the measured suction passage pressure value (P 1) is sent to the control means 8. In the embodiment shown in FIG. 4, since the variable throttle valve 53 in the inspection apparatus 4 shown in FIGS. 2 and 3 is not provided, the suction passage pressure value (P1) measured by the pressure gauge 7 is the chuck table. It changes depending on the flow resistance of the two suction holding members 3. The control means 8 calculates the flow resistance value (R1) of the suction holding member 3 based on the input air flow rate value (Q1) and the suction passage pressure value (P1) (flow resistance calculation step). The flow resistance value (R1) is obtained by dividing the suction passage pressure value (P1) by the air flow rate value (Q1) ((R1 = P1 ÷ Q1). (Q1), the suction passage pressure value (P1) and the flow resistance value (R1) are stored in a memory (not shown).

上述したように求められた流通抵抗値(R1)に基づいて、制御手段８はチャックテーブルが良品か不良品かを判定する。即ち制御手段８は、上記図２に示す実施形態と同様に流通抵抗値(R1)がそれぞれ所定の許容範囲内ならば良品と判定し、流通抵抗値(R1)が所定の許容範囲外の場合には不良品と判定する(判定工程)。なお、制御手段８は、上記吸引通路圧力値(P1)、空気流量値(Q1)、流通抵抗値(R1)および判定結果を表示手段８に表示する。   Based on the flow resistance value (R1) obtained as described above, the control means 8 determines whether the chuck table is a good product or a defective product. That is, as in the embodiment shown in FIG. 2, the control means 8 determines that the distribution resistance value (R1) is a non-defective product if the distribution resistance value (R1) is within a predetermined allowable range, and the distribution resistance value (R1) is outside the predetermined allowable range. Is determined as a defective product (determination step). The control means 8 displays the suction passage pressure value (P1), the air flow rate value (Q1), the flow resistance value (R1), and the determination result on the display means 8.

次に、上述したチャックテーブル２の吸引保持性能を検査する検査方法の第５の実施形態について、図５を参照して説明する。図５に示す実施形態においても上記図４に示す検査装置４を用いて実施する。
図５に示すように、チャックテーブル２の保持領域２１０の全面、即ち吸引保持部材３の全面にウエーハ等の被加工物相当部材Wを載置するとともに、吸引ポンプ５１を作動する。従って、吸引パイプ５２および吸引通路２１４を介してチャックテーブル本体２１の保持領域２１０を形成する嵌合凹部２１３に吸引力が生成せしめられる。この結果、嵌合凹部２１３に嵌合されている通気性を有する吸引保持部材３を通して空気が吸引され、吸引保持部材３に載置された被加工物相当部材Wが吸引保持部材３上に吸引保持される（吸引力生成工程）。この吸引力生成工程を実施している際に、吸引パイプ５２に配設された流量計６によって吸引パイプ５２（吸引通路２１４）を流通する空気の流量が測定され、測定された空気流量値(Q2)が制御手段８に送られる。また、吸引パイプ５２に配設された圧力計７によって吸引パイプ５２（吸引通路２１４）の圧力が測定され、測定された吸引通路圧力値(P2)が制御手段８に送られる。なお、図５に示す実施形態においても上記図２および図３に示す検査装置４における可変絞り弁５３を設けていないので、圧力計７によって測定された吸引通路圧力値(P2)は、チャックテーブル２の吸引保持部材３の流通抵抗によって変化する。制御手段８は、入力した空気流量値(Q2)と吸引通路圧力値(P2)に基づいて、吸引保持部材３の流通抵抗値(R2)を演算する（流通抵抗算出工程）。この流通抵抗値(R2)は、吸引通路圧力値(P2)を空気流量値(Q2)で除算（(R2＝P2÷Q2)することによって求められる。そして、制御手段７は、上記空気流量値(Q2)、吸引通路圧力値(P2)および流通抵抗値(R2)を図示しないメモリに格納する。 Next, a fifth embodiment of the inspection method for inspecting the suction holding performance of the chuck table 2 described above will be described with reference to FIG. Also in the embodiment shown in FIG. 5, the inspection apparatus 4 shown in FIG. 4 is used.
As shown in FIG. 5, a workpiece equivalent member W such as a wafer is placed on the entire surface of the holding region 210 of the chuck table 2, that is, the entire surface of the suction holding member 3, and the suction pump 51 is operated. Accordingly, a suction force is generated in the fitting recess 213 that forms the holding region 210 of the chuck table main body 21 via the suction pipe 52 and the suction passage 214. As a result, air is sucked through the breathable suction holding member 3 fitted in the fitting recess 213, and the workpiece equivalent member W placed on the suction holding member 3 is sucked onto the suction holding member 3. Is held (attraction force generation step). During the suction force generation step, the flow rate of air flowing through the suction pipe 52 (suction passage 214) is measured by the flow meter 6 disposed in the suction pipe 52, and the measured air flow rate value ( Q2) is sent to the control means 8. Further, the pressure of the suction pipe 52 (suction passage 214) is measured by the pressure gauge 7 provided in the suction pipe 52, and the measured suction passage pressure value (P 2) is sent to the control means 8. In the embodiment shown in FIG. 5, the variable throttle valve 53 in the inspection apparatus 4 shown in FIGS. 2 and 3 is not provided, so that the suction passage pressure value (P2) measured by the pressure gauge 7 is the chuck table. It changes depending on the flow resistance of the two suction holding members 3. The control means 8 calculates the flow resistance value (R2) of the suction holding member 3 based on the input air flow value (Q2) and the suction passage pressure value (P2) (flow resistance calculation step). This flow resistance value (R2) is obtained by dividing the suction passage pressure value (P2) by the air flow rate value (Q2) ((R2 = P2 ÷ Q2). (Q2), the suction passage pressure value (P2) and the flow resistance value (R2) are stored in a memory (not shown).

上述したように求められた流通抵抗値(R2)に基づいて、制御手段７はチャックテーブルが良品か不良品かを判定する。即ち制御手段８は、流通抵抗値(R2)がそれぞれ所定の許容範囲内ならば良品と判定し、流通抵抗値(R2)が所定の許容範囲外の場合には不良品と判定する(判定工程)。なお、制御手段８は、上記吸引通路圧力値(P2)、空気流量値(Q2)、流通抵抗値(R2)および判定結果を表示手段８に表示する。   Based on the flow resistance value (R2) obtained as described above, the control means 7 determines whether the chuck table is a good product or a defective product. That is, the control means 8 determines that the flow resistance value (R2) is a non-defective product if the flow resistance value (R2) is within a predetermined allowable range, and determines that the flow resistance value (R2) is a defective product if the flow resistance value (R2) is outside the predetermined allowable range (determination step). ). The control means 8 displays the suction passage pressure value (P2), the air flow rate value (Q2), the flow resistance value (R2), and the determination result on the display means 8.

次に、上述したチャックテーブル２の吸引保持性能を検査する検査方法の第６の実施形態について説明する。
第６の実施形態においては、同一のチャックテーブルについてそれぞれ図４に示す第４の実施形態における上記吸引力生成工程（第１の吸引力生成工程）と流通抵抗算出工程（第１の流通抵抗算出工程）および図５に示す第５の実施形態における上記吸引力生成工程（第２の吸引力生成工程）と流通抵抗算出工程（第２の流通抵抗算出工程）を実施する。そして、第１の流通抵抗算出工程によって算出された流通抵抗値(R1)（第１の流通抵抗値(R1)）および第２の流通抵抗算出工程によって算出された流通抵抗値(R2)（第２の流通抵抗値(R2)）に基づいて、 第１の流通抵抗値(R1)および第２の流通抵抗値(R2)がそれぞれ許容範囲内ならばチャックテーブルは良品と判定し、第１の流通抵抗値(R1)および第２の流通抵抗値(R2)の少なくとも一方がそれぞれ所定の許容範囲外の場合にはチャックテーブルは不良品と判定する。 Next, a description will be given of a sixth embodiment of the inspection method for inspecting the suction holding performance of the chuck table 2 described above.
In the sixth embodiment, the suction force generation step (first suction force generation step) and the flow resistance calculation step (first flow resistance calculation) in the fourth embodiment shown in FIG. 4 for the same chuck table, respectively. Step) and the suction force generation step (second suction force generation step) and the flow resistance calculation step (second flow resistance calculation step) in the fifth embodiment shown in FIG. Then, the flow resistance value (R1) calculated by the first flow resistance calculation step (first flow resistance value (R1)) and the flow resistance value (R2) calculated by the second flow resistance calculation step (first) 2), if the first flow resistance value (R1) and the second flow resistance value (R2) are within allowable ranges, the chuck table is determined to be non-defective. If at least one of the flow resistance value (R1) and the second flow resistance value (R2) is outside a predetermined allowable range, the chuck table is determined to be defective.

以上のように、図示の実施形態におけるチャックテーブルの検査方法においては、チャックテーブルの吸引通路を流通する空気の流量と吸引通路の圧力を測定し、吸引通路圧力を空気流量で除算（吸引通路圧力÷空気流量）して流通抵抗値を求め、この流通抵抗値に基づいてチャックテーブルの良否を判定するので、吸引手段の能力に影響されることなくチャックテーブルの吸引保持性能を適切に検査することができる。   As described above, in the chuck table inspection method in the illustrated embodiment, the flow rate of air flowing through the suction passage of the chuck table and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure). ÷ air flow)) to determine the flow resistance value, and the quality of the chuck table is judged based on this flow resistance value, so that the suction holding performance of the chuck table should be inspected appropriately without being affected by the ability of the suction means Can do.

本発明によるチャックテーブルの検査方法によって検査されるチャックテーブルに一例を示す断面図。Sectional drawing which shows an example in the chuck table test | inspected by the test | inspection method of the chuck table by this invention. 本発明によるチャックテーブルの検査方法の第１の実施形態を示す説明図。Explanatory drawing which shows 1st Embodiment of the inspection method of the chuck table by this invention. 本発明によるチャックテーブルの検査方法の第２の実施形態を示す説明図。Explanatory drawing which shows 2nd Embodiment of the inspection method of the chuck table by this invention. 本発明によるチャックテーブルの検査方法の第４の実施形態を示す説明図。Explanatory drawing which shows 4th Embodiment of the inspection method of the chuck table by this invention. 本発明によるチャックテーブルの検査方法の第５の実施形態を示す説明図。Explanatory drawing which shows 5th Embodiment of the inspection method of the chuck table by this invention.

符号の説明Explanation of symbols

２：チャックテーブル
２１：チャックテーブル本体
２１０：保持領域
２１１：保持部
２１２：回転軸部
２１３：嵌合凹部
２１４：吸引通路
３：吸引保持部材
４：検査装置
５：検査装置
５１：吸引ポンプ
５２：吸引パイプ
５３：可変絞り弁
６：流量計
７：圧力計
８：制御手段
９：表示手段 2: Chuck table 21: Chuck table body 210: Holding region 211: Holding portion 212: Rotating shaft portion 213: Fitting recess 214: Suction passage 3: Suction holding member 4: Inspection device 5: Inspection device 51: Suction pump 52: Suction pipe 53: Variable throttle valve 6: Flow meter 7: Pressure gauge 8: Control means 9: Display means

Claims (4)

上面に保持領域を備えるとともに該保持領域に連通する吸引通路を備えたチャックテーブル本体と、該保持領域に配設された通気性を有する吸引保持部材とからなるチャックテーブルの検査方法であって、
チャックテーブルの該吸引通路を吸引手段に連通して該保持領域に吸引力を生成せしめる吸引力生成工程と、
該吸引力生成工程を実施している際に、該吸引通路を流通する空気の流量と該吸引通路の圧力を測定し、該吸引通路圧力を該空気流量で除算（吸引通路圧力÷空気流量）して流通抵抗値を求める流量抵抗算出工程と、
該流通抵抗算出工程によって算出された該流通抵抗値が所定の許容範囲ならばチャックテーブルは良品と判定し、該流通抵抗値が所定の許容範囲外の場合にはチャックテーブルは不良品と判定する判定工程と、を含む、
ことを特徴とするチャックテーブルの検査方法。 A chuck table inspection method comprising: a chuck table body provided with a holding area on an upper surface and a suction passage communicating with the holding area; and a breathable suction holding member disposed in the holding area,
A suction force generation step of causing the suction passage of the chuck table to communicate with suction means to generate a suction force in the holding region;
During the suction force generation step, the flow rate of the air flowing through the suction passage and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure / air flow rate). A flow resistance calculation step for obtaining a flow resistance value,
If the flow resistance value calculated by the flow resistance calculation step is within a predetermined allowable range, the chuck table is determined as a non-defective product, and if the flow resistance value is outside the predetermined allowable range, the chuck table is determined as a defective product. A determination step,
A chuck table inspection method characterized by the above. 該吸引力生成工程および該流量抵抗算出工程は、チャックテーブルの該吸引保持部材に被加工物相当部材を載置しない状態で実施する、請求項１記載のチャックテーブルの検査方法。   The chuck table inspection method according to claim 1, wherein the suction force generation step and the flow rate resistance calculation step are performed in a state where a workpiece equivalent member is not placed on the suction holding member of the chuck table. 該吸引力生成工程および該流量抵抗算出工程は、チャックテーブルの該吸引保持部材の全面に被加工物相当部材を載置した状態で実施する、請求項１記載のチャックテーブルの検査方法。   The chuck table inspection method according to claim 1, wherein the suction force generation step and the flow rate resistance calculation step are performed in a state in which a workpiece equivalent member is placed on the entire surface of the suction holding member of the chuck table. 上面に保持領域を備えるとともに該保持領域に連通する吸引通路を備えたチャックテーブル本体と、該保持領域に配設された通気性を有する吸引保持部材とからなるチャックテーブルの検査方法であって、
チャックテーブルの該吸引保持部材に被加工物相当部材を載置しない状態で該吸引通路を吸引手段に連通して該保持領域に吸引力を生成せしめる第１の吸引力生成工程と、
該第１の吸引力生成工程を実施している際に、該吸引通路を流通する空気の流量と該吸引通路の圧力を測定し、該吸引通路圧力を該空気流量で除算（吸引通路圧力÷空気流量）して流通抵抗値を求める第１の流通抵抗算出工程と、
チャックテーブルの該吸引保持部材の全面に被加工物相当部材を載置した状態で該吸引通路を吸引手段に連通して該保持領域に吸引力を生成せしめ該吸引保持部材上に被加工物相当部材を吸引保持する第２の吸引力生成工程と、
該第２の吸引力生成工程を実施している際に、該吸引通路を流通する空気の流量と該吸引通路の圧力を測定し、該吸引通路圧力を該空気流量で除算（吸引通路圧力÷空気流量）して第２の流通抵抗値を求める第２の流通抵抗算出工程と、
該第１の流通抵抗値および第２の流通抵抗値がそれぞれ所定の許容範囲ならばチャックテーブルは良品と判定し、該第１の流通抵抗値および第２の流量抵抗値の少なくとも一方がそれぞれ所定の許容範囲外の場合にはチャックテーブルは不良品と判定する判定工程と、を含む、
ことを特徴とするチャックテーブルの検査方法 A chuck table inspection method comprising: a chuck table body provided with a holding area on an upper surface and a suction passage communicating with the holding area; and a breathable suction holding member disposed in the holding area,
A first suction force generation step of generating a suction force in the holding region by communicating the suction passage with a suction means in a state where no workpiece equivalent member is placed on the suction holding member of the chuck table;
While performing the first suction force generation step, the flow rate of air flowing through the suction passage and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure ÷ A first flow resistance calculation step for obtaining a flow resistance value by air flow),
With the workpiece equivalent member placed on the entire surface of the suction holding member of the chuck table, the suction passage is communicated with the suction means to generate a suction force in the holding region, and the workpiece is equivalent to the workpiece on the suction holding member. A second suction force generation step of sucking and holding the member;
While performing the second suction force generation step, the flow rate of air flowing through the suction passage and the pressure of the suction passage are measured, and the suction passage pressure is divided by the air flow rate (suction passage pressure ÷ A second flow resistance calculation step for obtaining a second flow resistance value by air flow rate);
If the first flow resistance value and the second flow resistance value are each within a predetermined allowable range, the chuck table is determined to be non-defective, and at least one of the first flow resistance value and the second flow resistance value is predetermined. A determination step for determining that the chuck table is a defective product when it is outside the allowable range,
Inspection method for chuck table
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009095953A (en) * 2007-10-18 2009-05-07 Disco Abrasive Syst Ltd Wafer processing apparatus
JP2016131187A (en) * 2015-01-13 2016-07-21 株式会社ディスコ Processing device
JP2018206931A (en) * 2017-06-02 2018-12-27 株式会社ディスコ Method of grinding wafer
CN113369043A (en) * 2021-05-25 2021-09-10 内蒙古伟之杰节能装备有限公司 Hydraulic chuck device for spraying polyurethane thermal insulation pipe

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009095953A (en) * 2007-10-18 2009-05-07 Disco Abrasive Syst Ltd Wafer processing apparatus
JP2016131187A (en) * 2015-01-13 2016-07-21 株式会社ディスコ Processing device
JP2018206931A (en) * 2017-06-02 2018-12-27 株式会社ディスコ Method of grinding wafer
CN113369043A (en) * 2021-05-25 2021-09-10 内蒙古伟之杰节能装备有限公司 Hydraulic chuck device for spraying polyurethane thermal insulation pipe
CN113369043B (en) * 2021-05-25 2022-09-20 内蒙古伟之杰节能装备有限公司 Hydraulic chuck device for spraying polyurethane thermal insulation pipe

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