JP2007220838A - Process for manufacturing ceramic package - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a process for manufacturing a ceramic package having required profile and dimensions surely between at least one of the front surface and the backside, and the side face. <P>SOLUTION: The process for manufacturing a ceramic package P1 comprises a step for forming a green sheet laminated body S1 having recesses 7a, 8a opening to the front surface 2 and the backside 3 by laminating a first green sheet s1 having a pair of (a plurality of) products 1a, and second green sheets s2, s3 each having a pair of products 1a and through-holes 7b, 8b penetrating between the front surface and the backside across a scheduled truncation surface L of the boundary between these products 1a; and a step for cutting the green sheet laminated body S1 and an insert 12 in the thickness direction of the laminated body S1 along the scheduled truncation surface L between a pair of products 1a, under a state where the insert 12 having cross-section substantially identical to that of the recess 8a in the laminated body S1 on the backside 3 is inserted into the recess 8a. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a ceramic package having a step portion between at least one of a front surface and a back surface and a side surface.

There has been proposed an optical communication package including a package body made of ceramic and having a cavity that opens on the surface and mounts a semiconductor element on the bottom surface, and a through hole that horizontally penetrates a side wall that surrounds the cavity. (For example, refer to Patent Document 1).
In order to obtain the package body of the optical communication package, on a flat lower green sheet made of ceramic, a through-hole having the same outer shape and penetrating between the front and back surfaces and between the through-hole and the outer surface are provided. A middle-layer green sheet having a communication groove communicating with the upper-layer green sheet having the same through hole as above is laminated. As a result, a green sheet laminate having a cavity opened on the surface and a through-hole penetrating horizontally through the side wall surrounding the cavity is formed, and by firing the laminate in a predetermined temperature zone, The package body can be obtained.

Japanese Patent Laid-Open No. 11-95070 (pages 1 to 6, FIGS. 1 and 2)

  By the way, when forming a package body having a step portion between at least one of the front surface and the back surface and a side surface, a green sheet having a plurality of product portions is used by a green sheet having an ear portion around the periphery. Are manufactured by taking many pieces. In this case, in the green sheet laminated body in which a plurality of green sheets are laminated, there is an upward or downward concave portion extending over the ear portion and the product portion including the cavity adjacent to the ear portion or between the adjacent product portions. It is formed. In particular, when cutting in the thickness direction of the green sheet laminate along the planned cutting surface crossing the downward-facing recess, the portion of the green sheet that forms the ceiling surface of the recess hangs down due to the pressure associated with the insertion of the blade during the cutting. End up. As a result, there is a problem that a step having a required shape and size cannot be formed.

  The present invention solves the problems described in the background art, and provides a method for manufacturing a ceramic package that can reliably manufacture a ceramic package having a step portion having a required shape and size between at least one of the front and back surfaces and the side surface. The issue is to provide.

Means for Solving the Problems and Effects of the Invention

In order to solve the above problems, the present invention is conceived to cut the insert and the laminate in a state where the insert for preventing the deformation is inserted into the concave portion of the green sheet laminate to be a step portion. It was made as a result.
That is, a method for manufacturing a ceramic package according to the present invention (Claim 1) includes a first green sheet having at least one product part, and a cutting scheduled surface having at least one product part and defining the periphery of the product part. A step of laminating a second green sheet having a through-hole penetrating between the front surface and the back surface across the surface and forming a green sheet laminate having a recess opening in at least one of the front surface and the back surface, and the like Cutting the laminate and the insert in the thickness direction of the green sheet laminate along the planned cutting surface with the insert having a cross section substantially the same as the cross section of the recess inserted in the recess of the green sheet laminate And a step of performing.

  According to this, in the green sheet laminated body in which the first and second green sheets having at least one product part are laminated, the through hole is formed in at least one of the front surface and the back surface of the green sheet laminated body. The laminate is cut along the planned cutting surface in a state where an insert having substantially the same cross section as that of the cross section is inserted into the recess. For this reason, in the cutting process, in the recesses opened on the front and back surfaces opposite to the front and back surfaces into which the blade used for cutting enters, a part of the first green sheet forming the ceiling surface enters the blade. Since it is not deformed even by pressure, the original shape can be maintained. Therefore, it is possible to reliably manufacture a ceramic package having a step portion having a required shape and size between at least one of the front and back surfaces and the side surface.

The ceramic package is made of glass-ceramic, which is a kind of low-temperature fired ceramic, as well as alumina, mullite, aluminum nitride and the like.
In addition, the first and second green sheets include at least one product part and the planned cutting surface that divides the product part, and includes a form having an ear on the opposite side of the product part across the planned cutting surface. It is.
Furthermore, the through hole of the second green sheet has a rectangular shape (rectangle or square) in plan view.
The green sheet laminate may have a form in which a second green sheet having a through hole is laminated on at least one of the front and back surfaces of the first green sheet.
Further, the product portion has a through hole that becomes a cavity that opens to the surface of the laminate later, and a sheet having a part of the through hole on at least one of the front surface and the back surface adjacent to the side wall surrounding the through hole. Part.
Further, the insert is made of the same or the same material as the first and second green sheets, and at least a cross section along the cutting direction as in the vertical direction is the (vertical) of the recess. It is almost the same as the cross section.
In addition, the step portion obtained by cutting the concave portion is a substantially L-shaped section extending between the surface and the side surface to be cut, for example, an electronic component mounted along the cavity of the product portion A plurality of metallizations and the like are formed as pads for electrical connection between the device and the outside.

  In the present invention, a first green sheet having a plurality of product portions and a plurality of product portions and a portion to be cut that is a boundary for each of the plurality of product portions are penetrated between the front surface and the back surface. A step of laminating a second green sheet having a through hole to form a green sheet laminate having a recess opening in at least one of the front surface and the back surface, and a cross section of the recess in the recess of the green sheet laminate. Cutting the green sheet laminate and the insert in the thickness direction of the laminate along the planned cutting surface between a plurality of product parts in a state where the insert has a substantially the same cross section. Also included is a method for manufacturing a ceramic package (claim 2).

  According to this, at least one of the front surface and the back surface of the green sheet laminate in which the first and second green sheets each having a plurality of product portions are laminated and across the plurality of product portions, the concave portion defines the planned cutting surface. It is opened in the middle. The laminated body is cut along a planned cutting surface in a state where an insert having substantially the same cross section as that of the recess is inserted into the recess. For this reason, the recesses opened on the front and back surfaces opposite to the front and back surfaces where the blade used in the cutting process enters are also deformed by the pressure at which a part of the first green sheet forming the ceiling surface enters the blade. Therefore, the original shape can be maintained. Accordingly, it is possible to reliably and efficiently manufacture a plurality of ceramic packages having a stepped portion having a required shape and size between at least one of the front and back surfaces and the side surface.

The “plurality of product parts” includes a pair of product parts, three or more product parts arranged in a straight line, or four products that are partitioned around two cutting planes at right angles. Part is also included.
In other words, in the present invention, after the cutting step, the step of extracting the insert from the recess, the step of firing one or more product parts having a step portion around at least one of the front surface and the back surface, A method of manufacturing a ceramic package having In this case, it is possible to reliably manufacture a ceramic package having a step portion having a required shape and size between at least one of the front and back surfaces and the side surface.

In the following, the best mode for carrying out the present invention will be described.
1 to 5 relate to a method for manufacturing a ceramic package according to an embodiment of the present invention, and FIG. 6 is a perspective view of the ceramic package P1 obtained thereby.
A ceramic slurry was produced by mixing raw materials composed of alumina powder particles, a resin binder, a plasticizer, a solvent, and the like in advance. The ceramic blade was subjected to a doctor blade method to form three green sheets having a rectangular shape in plan view and a thickness of about 500 μm.

  One of them is formed by punching using a punch having a substantially square cross section and a die having a receiving hole having a substantially similar cross section, as shown in the middle of FIG. The 1st green sheet s1 which has a pair of through-hole 6b whose cross section penetrated between the surface and the back surface of this is substantially square was formed. The outer periphery surrounding the pair of through holes 6b is the side surfaces 4 and 5, and the planned cutting surface L that divides the pair of product portions 1a is located at the center of the wide partition wall 9b separating the pair of through holes 6b. A conductive paste (not shown) containing W or Mo powder was printed on the back surface of the partition wall 9b. In addition, including the following, the planned cutting surface L is an imaginary line for cutting in the cutting process described later.

Further, the green sheet was punched using a punch having a rectangular cross section and a die having a receiving hole having a substantially similar cross section. As a result, as shown in the lower part of FIG. 1, a pair of left and right product parts 1 a and a through-hole 8 b having a rectangular cross section penetrating the central part of the front surface and the back surface 3 across the planned cutting surface L partitioning them. Then, a second green sheet s2 having was formed. A metallized layer (not shown) on which the conductive paste was printed was formed on the surface of the second green sheet s2.
Further, the remaining one of the green sheets was subjected to two types of punching using two types of punches having a substantially square and rectangular cross section and two types of dies having a receiving hole having a substantially similar cross section. . As a result, as shown in the upper part of FIG. 1, a pair of left and right product parts 1a, a pair of through-holes 6c having a substantially square cross section passing between the front surface 2 and the back surface, and the surface between them. A second green sheet s3 having a through-hole 7b having a rectangular cross section penetrating between 2 and the back surface was formed.
The pair of through holes 6c overlap with the pair of through holes 6b in plan view, and the outer periphery surrounding them is side surfaces 4 and 5, and a pair of product portions 1a are defined in the center of the through hole 7b. The planned cutting surface L crosses.

Next, as indicated by an arrow in FIG. 1, the first green sheet s1 was laminated on the second green sheet s2, and the second green sheet s3 was laminated on the first green sheet s1. At this time, the left and right product parts 1a overlap each other, and the pair of through holes 6b and 6c communicate with each other.
As a result, as shown in the perspective view of FIG. 2 and the vertical sectional view of FIG. 3, a pair of left and right product parts 1 a having a front surface 2 and a back surface 3, a pair of left and right cavities 6 opening on these front surfaces 2, A green sheet laminate S1 having a recess 7a extending between the pair of product parts 1a and opening on the front surface 2 and a recess 8a extending across the pair of product parts 1a and opening on the back surface 3 can be formed. It was.
The planned cutting surface L crosses the center of the recesses 7a and 8a. Further, the upper concave portion 7a was sandwiched between a pair of left and right partition walls 9a. Further, each cavity 6 had a bottom surface 6a that was the surface of the second green sheet s2.

Next, as shown in FIG. 4, the recess 8a on the back surface 3 side of the green sheet laminate S1 is made of the same material as the first and second green sheets s1 to s3, and is at least as vertical as the vertical section of the recess 8a. A cross-sectional insert 12 was inserted. The green sheet laminate S1 with the insert 12 inserted into the recess 8a was restrained on a surface plate (not shown).
In this state, as shown on the left and right of FIG. 5, the blade c from the surface 2 side along the planned cutting surface L crossing the center in the longitudinal direction of the green sheet laminate S <b> 1 and the center in the left and right direction of the insert 12. Thus, the green sheet laminate S1 was cut along its thickness (cutting step).
At this time, the lower concave portion 8a into which the insert 12 was inserted was not deformed by the pressure accompanying the entry of the blade c.

After the cutting step, the insert 12 cut in two was extracted from the cut-out concave portion 8a.
Then, the pair of divided product parts 1a were inserted into a firing furnace (not shown) by the cutting process, and heated and fired at a predetermined temperature range.
As a result, as illustrated in FIG. 6, the cavity 6 is formed of a ceramic package body (1 a) and is open on the surface 2 and has a bottom surface 6 a, and between the side surface on the right side 9 side, the surface 2, and the back surface 3. A pair of ceramic packages P1 provided with a pair of upper and lower stepped portions 7 and 8 located at the same position can be obtained. On the bottom surface 6a of the cavity 6, a conductive material mounting portion (not shown) in which the metallized layer was fired was formed, and electronic components such as a piezoelectric element and a SAW filter were subsequently mounted. Further, a plurality of pads (not shown) connected to the conductive path obtained by firing the metallized layer and extending from the mounting portion were formed on the ceiling surface of the lower step portion 8a.
The opening of the cavity 6 is sealed with a ceramic or metal lid after the electronic component is mounted.

  According to the manufacturing method of the ceramic package P1 as described above, in the green sheet laminate S1 in which the first and second green sheets s1 to 3s are laminated, the front surface 2 and the back surface 3 and the pair of product parts 1a are straddled. A pair of upper and lower recesses 7a and 8a were opened with the planned cutting surface L positioned in the middle. Further, the laminate S1 was cut along the planned cutting surface L in a state where the insert 12 having the same vertical cross section as the vertical cross section was inserted into the recess 8a on the back surface 3 side. For this reason, the recessed part 8a opened in the back surface 3 on the opposite side to the surface 2 into which the blade c used in the cutting process enters is formed by a pressure at which a part of the first green sheet s2 forming the ceiling surface enters the blade c. However, it was not deformed, so the original shape could be maintained. Therefore, the pair of ceramic packages P1 having the stepped portions 7 and 8 having a required shape and size between the front surface 2 and the back surface 3 and the side surfaces can be reliably and efficiently manufactured.

When the green sheet laminate S1 is turned upside down and the blade c enters from the back surface 3 side, the insert 12 is inserted into the recess 7a that opens on the surface 2 opposite to the back surface 3 side where the blade c enters. By inserting and cutting, it was possible to prevent deformation of the recess 7a.
In addition, the first and second green sheets s1 to 3s are large-sized sheets for taking a large number of sheets, and the pair of product parts 1a are used in pairs along the vertical and horizontal directions. The cut planned surfaces L were set along the product portions 1a and 1a and the side surfaces 4 and 5 which are the periphery of the product portions 1a and 1a. As a result, it was possible to efficiently manufacture a plurality of ceramic packages P1 by taking a large number.
Further, the second green sheet s3 is a first green sheet s1 in which the through-hole 7b is omitted, and this is used in combination with the first and second green sheets s1 and s2, so that only the concave portion 8a opened in the back surface 3 is formed. After forming the green sheet laminate having the insert 12, the insert 12 was inserted and cut, and then fired in the same manner as described above. As a result, a ceramic package (not shown) having only the cavity 6 and the step portion 8 could be obtained.

7 to 9 relate to different forms of manufacturing methods for obtaining different forms of the ceramic package P2, and FIG. 10 is a perspective view of the ceramic package P2.
Two green sheets were produced in advance in the same manner as described above.
Next, one of the green sheets was punched using a punch having a rectangular cross section and a die having a receiving hole having a substantially similar cross section. As a result, as shown in the lower part of FIG. 7, a pair of left and right product parts 1b and a through hole 8b having a rectangular cross section penetrating the center part of the front surface and the back surface 3 across the planned cutting surface L that divides them. Then, a second green sheet s2 having was formed. A metallized layer (not shown) printed with the conductive paste was formed on the surface of the second green sheet s2.

On the other hand, the other green sheet is punched using a punch having a substantially square cross section and a die having a receiving hole having a substantially similar cross section, as shown in the upper part of FIG. A first green sheet s1 having a pair of through-holes 6b having a substantially square cross section passing through between the front surface 2 and the back surface was formed. In the center of the wide partition wall 9b that separates the pair of through holes 6b, the planned cutting surface L that divides the pair of product portions 1b was located. A conductive paste (not shown) containing W or Mo powder was printed on the back surface of the partition wall 9b.
Next, as indicated by the arrows in FIG. 7, the first green sheet s1 was laminated on the second green sheet s2 so that the left and right product portions 1b overlap each other. At this time, the pair of through holes 6c and the through holes 8b were separated from each other in plan view.

As a result, as shown in the vertical cross-sectional view of FIG. 8, a pair of left and right product parts 1b having a front surface 2 and a back surface 3, a pair of left and right cavities 6d opened on these front surfaces 2, and a gap between them, A green sheet laminate S2 having a recess 8a that spans the pair of product portions 1b and opens at the center of the back surface 3 was formed. The planned cutting surface L crosses the center of the partition wall 9b and the recess 8a. Each cavity 6d had a bottom surface 6a that was the surface of the second green sheet s2.
Next, as shown in FIG. 9, in the recess 8a of the green sheet laminate S2, the insert 12 is made of the same material as the first and second green sheets s1 and s2, and has at least the same vertical cross section as the vertical cross section of the recess 8a. Inserted. The green sheet laminate S2 in which the insert 12 was inserted into the recess 8a was restrained on a surface plate (not shown).

In this state, as shown in FIG. 9, green is applied by the blade c from the surface 2 side along the planned cutting surface L that crosses the center in the longitudinal direction of the green sheet laminate S2 and the center in the left-right direction of the insert 12. Sheet laminated body S2 was cut | disconnected along the thickness (cutting process). At this time, the lower concave portion 8a into which the insert 12 was inserted was not deformed by the pressure accompanying the entry of the blade c. After the cutting step, the insert 12 cut in two was extracted from the recess 8a of the cut trace.
Then, the pair of divided product parts 1b was inserted into a firing furnace (not shown) by the cutting process, and heated and fired at a predetermined temperature range.

  As a result, as illustrated in FIG. 10, the cavity 6d is formed of a ceramic package body (1b) and has an opening on the front surface 2 and has a bottom surface 6a, and is positioned between the side surface on the right side 9d side and the back surface 3. A pair of ceramic packages P <b> 2 including the step portion 8 could be obtained. On the bottom surface 6a of the cavity 6d, a conductor mounting portion (not shown) in which the metallized layer was fired was formed, and an electronic component such as a piezoelectric element was subsequently mounted. Further, the metallized layer was baked on the ceiling surface of the stepped portion 8 to form a plurality of pads (not shown) connected to the conductive path extending from the mounting portion of the cavity 6d. The opening of the cavity 6d was sealed with a ceramic or metal cover plate after mounting the electronic component.

  According to the manufacturing method of the ceramic package P2 as described above, in the green sheet laminate S2 in which the first and second green sheets s1 and s2 are laminated, the recess 8a is formed on the back surface 3 and straddling the pair of product parts 1b. An opening was made with the planned cutting surface L positioned in the middle. With the insert 12 having the same vertical cross section as the vertical cross section inserted into the recess 8a, the laminate S2 was cut along the planned cutting surface L. For this reason, the recessed part 8a opened in the back surface 3 on the opposite side to the surface 2 into which the blade c used in the cutting step enters is caused by the pressure at which a part of the first green sheet s1 forming the ceiling surface enters the blade c. However, it was not deformed, so the original shape could be maintained. Therefore, the pair of ceramic packages P2 having the step portions 8 having the required shape and dimensions between the front surface 2 and the back surface 3 and the side surfaces can be reliably and efficiently manufactured.

FIGS. 11 to 14 relate to a manufacturing method of still another form by multi-cavity and a ceramic package P4 obtained thereby.
As shown in FIG. 11, in the second green sheet s33 for multi-piece production, a through hole 6c is formed in the central part of each product part 1a (1b) surrounded by the ear part m and the planned cutting surface L and adjacent to each other. And the through-hole 7b was formed ranging over the both ends of the longitudinal direction of each adjacent product part 1a, and the cutting plan surface L. As shown in FIG.
In addition, as shown in FIG. 12, in the first green sheet s11 that is a large plate type for taking a large number of pieces, the center of each product part 1a (1b) surrounded by the ear part m and the scheduled cutting surface L and adjacent to each other is provided. The through-hole 6c was formed in the part.
Further, as shown in FIG. 13, in the second green sheet s22 for multi-piece taking, both end portions in the longitudinal direction of the respective product portions 1a (1b) surrounded by the ear portion m and the cutting scheduled surface L and adjacent to each other, and A through-hole 7b was formed across the planned cutting surface L.

Next, the second green sheet s33 is stacked on the first green sheet s11 for multi-cavity so that the through holes 6c communicate with each other, and the second green sheet s22 is stacked below the first green sheet s11. . As a result, a green sheet laminate (not shown) in which a plurality of cavities 6 and recesses 7a alternately open on the front surface 2 and a plurality of recesses 8a open on the back surface 3 between the plurality of cavities 6 can be formed. It was.
Next, the green sheet laminate was cut in a state where the insert 12 was inserted into the concave portion 8a opened in the back surface 3 as described above. As a result, as shown in FIG. 14, a pair of stepped portions 7 parallel to each other between the cavity 6 opened to the front surface 2, and the front surface 2 and the back surface 3 and a pair of side surfaces located at both ends in the longitudinal direction, A plurality of ceramic packages P3 having 8 were obtained.

  Further, similarly to the above, the second green sheet s22 is laminated under the first green sheet s11, and the insert 12 is placed in the recess 8a that opens in the back surface 3 of the obtained green sheet laminate (not shown). The product was inserted and cut in the same manner as described above, and the resulting product parts 1b were fired. As a result, as shown in the vertical sectional view of FIG. 15, a pair of steps 8 parallel to each other are formed between the cavity 6d opened on the front surface 2 and the back surface 3 and a pair of side surfaces located at both ends in the left-right direction. A plurality of ceramic packages P4 were obtained.

The present invention is not limited to the embodiments described above.
In the first green sheet s11 for multi-piece production, through holes 8b are formed across the four scheduled cutting surfaces L that define the side surfaces of each product portion 1a (1b), and in the second green sheet s33, A through hole 7b may be formed across the four scheduled cutting surfaces L that define the side surface of each product portion 1a. Thereby, a ceramic package comprising the product portion 1a (1b) and having at least one of the four step portions 7 and the step portions 8 between the surface 2 where the cavities 6 and 6d are opened and the four side surfaces 4 and 5 is provided. It can be manufactured.

The perspective view which shows the lamination process in the manufacturing method of one form by this invention. The perspective view which shows the green sheet laminated body obtained by the said lamination process. FIG. 3 is a vertical sectional view showing the green sheet laminate of FIG. 2. FIG. 4 is a schematic cross-sectional view showing a manufacturing process subsequent to FIGS. 2 and 3. The schematic sectional drawing which shows the cutting process following FIG. The perspective view of the ceramic package obtained by the above manufacturing method. The perspective view which shows the lamination process in the manufacturing method of a different form. Sectional drawing which shows the green sheet laminated body obtained by the said lamination process. FIG. 8 is a schematic cross-sectional view showing a cutting process continued from FIG. The perspective view of the ceramic package obtained by the above manufacturing method. The top view which shows the outline of the 2nd green sheet for multi-piece picking. The top view which shows the outline of the 1st green sheet for multi-piece picking. The top view which shows the outline of the 2nd green sheet for multiple picking of another form. FIG. 5 is a perspective view showing a ceramic package in which a large number of first and second green sheets for a large number are used in the manufacturing method of the present invention. Sectional drawing which shows the ceramic package of the different form made into many pieces.

Explanation of symbols

1a, 1b ………………………… Product part 2 ………………………………… Front side 3 …………………………………… Back side 6, 6d ……… ………………… Cavity 7a, 8a ……………………… Recess 7b, 8b ……………………… Through hole 12 ……………………………… Insert s1, s11 …………………… First green sheets s2, s3, s22, s33… Second green sheets S1, S2 ……………………… Green sheet laminates P1 to P4 ………… …………… Ceramic package

Claims (2)

A first green sheet having at least one product part, and a first hole having at least one product part and having a through-hole penetrating between a front surface and a back surface across a planned cutting surface that divides the periphery of the product part. A step of laminating two green sheets to form a green sheet laminate having a recess opening in at least one of the front surface and the back surface;
In the state where the insert having an approximately the same cross section as that of the recess is inserted into the recess of the green sheet laminate, the laminate and the insert are inserted in the thickness direction of the green sheet laminate along the planned cutting surface. Cutting, and
A method of manufacturing a ceramic package characterized by the above. A first green sheet having a plurality of product parts, and a first hole having a plurality of product parts and a through-hole penetrating between the front surface and the back surface across the planned cutting surface that is a boundary for each of the plurality of product parts. A step of laminating two green sheets to form a green sheet laminate having a recess opening in at least one of the front surface and the back surface;
The green sheet laminate and the insert are applied to the concave portion of the green sheet laminate along the scheduled cutting surface between a plurality of product parts in a state where the insert having a cross section substantially the same as the cross section of the recess is inserted. Cutting in the thickness direction of the laminate,
A method of manufacturing a ceramic package characterized by the above.

Images