JP2007218867A - Linewidth-measuring device having macro-viewing functionality - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a size measuring device which avoids (1) a large space is needed for a macro illumination section in a conventional macro viewing mechanism by an enlargement of a substrate, (2) a structure is complicated, in order to make a sample table itself which carries a large-sized glass substrate incline, (3) a space for making the sample table incline is also needed, (4) a design man-days and production time or the adjustment time are increased, large cost is needed, which system also becomes large, and which can realize macro-viewing functionality and which is small, low cost and can be used readily. <P>SOLUTION: The linewidth-measuring device comprises a migration potential macro truck which carries a measuring object. Moreover, a rod lens which diffuses light which exists from an optical source, and the light which passed along this rod lens is reflected, and in order that the measuring object is irradiated for macro viewing, its position and its angle are made adjustable. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for improving a macro observation function in an apparatus for measuring the pattern line width and interval of a large glass substrate in a non-contact manner using a two-dimensional sensor such as a TV camera.

The prior art will be described with reference to FIG. FIG. 1 is a diagram for explaining the configuration of a basic dimension measuring apparatus having a conventional macro observation function.
The basic configuration of the dimension measuring device consists of a stage part 1 for mounting the object to be measured, a safety cover 2 for covering the stage part 1, an optical microscope 3 for enlarging the object to be measured, and an enlargement. The TV camera 4 that captures the aerial image of the measured object and the measurement control processing unit 5 that performs image processing dimension measurement calculation, stage control, and the like from the aerial image captured by the TV camera 4.
The object to be measured is, for example, a large glass substrate such as an FPD (Flat Panel Display) represented by a liquid crystal substrate or a PDP (Plasma Display Panel) substrate.

In the above dimension measuring apparatus, in order to perform macro observation, the macro illumination unit 6 for irradiating light to the substrate to be inspected fixed on the sample stage 18 of the stage unit 1 and the object to be inspected are inclined. A mechanism is required. In the example of FIG. 1, the macro illumination unit 6 is attached to the ceiling portion of the dimension measuring device.
The conventional macro illumination unit 6 uses a light source lamp 7, a reflection mirror 8, a Fresnel lens 9 for obtaining uniform illumination, and the like. For this reason, a considerably large space is required in the ceiling portion of the apparatus.

Next, a mechanism for tilting the object to be inspected is constructed on the sample stage 18 in FIG. Conventionally, in order to incline the object to be inspected, the sample stage 18 itself of the stage unit 1 on which the object to be inspected such as a large glass substrate is mounted is inclined (see the inclined sample stage 18 '). For this reason, the structure of the sample stage 18 becomes complicated, and a control system for tilting the sample stage 18 is also required.
An apparatus for macro inspection is described in Patent Document 1, for example.

JP 2003-315273 A

The conventional macro observation mechanism requires a large space for the macro illumination part, and the structure is complicated to tilt the sample stage itself on which a large glass substrate is mounted, and a space for tilting the sample stage is also required. Therefore, there are problems that the number of man-hours for design, production time, and adjustment time increase, which requires a high cost and increases the size of the apparatus.
An object of the present invention is to provide a dimension measuring apparatus that solves the above-described problems and that can realize a macro observation function that is small, inexpensive, and easy to use.

  In order to achieve the above object, a line width measuring apparatus having a macro observation function according to the present invention uses a light guide light source device for a macro illumination unit, and a rod lens capable of obtaining uniform illumination at a light guide mounting unit (emission port). Is attached.

That is, the line width measuring apparatus having the macro observation function of the present invention is characterized by including a movable macro carriage on which a measurement object is mounted.
The line width measuring apparatus having the macro observation function of the present invention also reflects a rod lens that diffuses the light emitted from the light source and the light that has passed through the rod lens to the object to be measured for macro observation. The position and angle can be freely adjusted for irradiation.

According to the present invention, a large Fresnel lens can be dispensed with. In addition, by using a macro carriage to mount and tilt a large glass substrate that is completely separate from the stage section, it is small and realizes simple macro observation without tilting the stage sample stage. The equipment could be provided.
Further, by adopting a separately installed macro carriage with a light guide light source device with a rod lens, the structure of the device itself is simplified, the external dimensions of the device can be reduced, and the cost can be reduced.

  An embodiment of the present invention will be described with reference to FIGS. 2 is a diagram showing a light source device applied to the present invention, FIG. 3 is a diagram showing a macro carriage mounted with a large glass substrate according to one embodiment of the present invention, and FIG. 4 is a dimension of one embodiment of the present invention. It is a figure for demonstrating the structure of the whole measuring apparatus.

  As shown in FIG. 4, a macro illumination unit 16 is provided on the upper part of the safety cover 2 'of the apparatus. A light guide light source device (see FIG. 2) 10 is used for the macro illumination unit 16, and a rod lens 11 capable of obtaining uniform illumination is attached to the light guide mounting unit (exit port) 19.

Further, a reflection mirror 20 is provided, and the rod lens emission port is set toward the reflection mirror. The reflection mirror 20 is a mechanism whose position and angle can be adjusted so that light can be irradiated near the stage entrance 21.
In addition, the exit port 19 of the light guide light source device 10 is provided with a remotely controllable filter switching mechanism, and light of various wavelengths can be irradiated by switching the filter.

  FIG. 3 shows an example of a macro carriage equipped with a large glass substrate. 3 (a) is a view of the macro carriage 12 from the side, FIG. 3 (b) is a view of the macro carriage 12 from the front, and FIG. 3 (c) is a view of the vicinity of the base plate (sample stand) 13 of the macro carriage 12. FIG. 3 and FIG. 3 (d) are views for explaining the base plate 13 and the substrate fixing guide 14 of the macro carriage 12. In addition, 31 is in the horizontal direction (floor surface), 32 is in the vertical direction (PASS LINE), 33 is a caster for moving the macro carriage 12, 34 is a lock lever for fixing the inclination angle of the base plate 13, and 35 is a limit tie rod 36 is an angle changing handle, 37 is an adjustment angle range, and 38 is a gas spring.

  In FIG. 3, the macro carriage 12 can be clamped and mounted with a large glass substrate (not shown). In addition, the base plate 13 on which a large glass substrate is mounted can be tilted, and the substrate fixing guide 14 can move the base plate 13 according to the substrate size flexibly, so that substrates of any size can be mounted.

In FIG. 4, the gantry 15 of the apparatus stage is moved to the innermost position, the macro carriage 12 loaded with a large glass substrate is moved and inserted into the work entrance 21, and the macro illumination 6 'is turned on.
The illumination brightness adjustment and filter change can all be performed by an operator using an operation device (not shown) while viewing a display screen (not shown) using the measurement control application software of the measurement control processing unit 5 '.

An area sensor 17 is provided at the work carry-in port 21 and an interlock is provided to ensure safety so that the stage does not move while the macro carriage 12 is inserted.
With such a configuration, it is possible to perform macro observation while tilting the base plate 13 of the macro carriage 12 inserted into the apparatus at an angle that allows easy observation, and adjusting the brightness of the illumination, the filter, and the like.

  As described above, the light guide light source device with the rod lens and the separately mounted macro carriage simplify the structure of the device itself, reduce the external dimensions of the device, and reduce the cost of design, production, and adjustment. it can.

  When the line width measurement is performed with the apparatus of the present invention, the measurement is performed by mounting the glass substrate as the object to be measured on the sample stage of the stage portion 1 ′ in FIG.

The figure for demonstrating the structure of the dimension measuring apparatus provided with the conventional macro observation function. The figure which shows the light source device applied to this invention. The figure which shows the macro trolley | bogie of one Example of this invention. The figure for demonstrating the structure of the whole dimension measuring apparatus of one Example of this invention.

Explanation of symbols

  1, 1 ': Stage part, 2, 2': Safety cover, 3: Optical microscope, 4: TV camera, 5, 5 ': Measurement control processing part, 6, 6': Macro illumination part, 7: Light source lamp, 8: Reflection mirror, 9: Fresnel lens, 10: Light guide light source device, 11: Rod lens, 12: Macro carriage, 13: Base plate, 14: Guide for fixing board, 15: Gantry, 16: Macro illumination unit, 17: Area sensor, 18, 18 ': Sample stage, 19: Light guide mounting part, 20: Reflection mirror, 21: Stage inlet, 31: Horizontal direction, 32: PASS LINE, 33: Caster, 34: Lock lever, 35: Limit tie rod, 36: Handle for changing angle, 37: Adjustable angle range, 38: Gas spring.

Claims (2)

A line width measuring apparatus having a macro observation function, wherein the line width measuring apparatus has a macro observation function. The line width measuring apparatus has a macro observation function. 2. A line width measuring apparatus having a macro observation function according to claim 1, wherein a rod lens for diffusing light emitted from a light source and light passing through the rod lens are reflected to an object to be measured for macro observation. A line width measuring device having a macro observation function, wherein the position and angle can be freely adjusted for irradiation.

Images