JP2007217782A5 - - Google Patents
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- Publication number
- JP2007217782A5 JP2007217782A5 JP2006043012A JP2006043012A JP2007217782A5 JP 2007217782 A5 JP2007217782 A5 JP 2007217782A5 JP 2006043012 A JP2006043012 A JP 2006043012A JP 2006043012 A JP2006043012 A JP 2006043012A JP 2007217782 A5 JP2007217782 A5 JP 2007217782A5
- Authority
- JP
- Japan
- Prior art keywords
- corrosion
- rare earth
- earth element
- resistant film
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 45
- 238000005260 corrosion Methods 0.000 claims description 40
- 230000007797 corrosion Effects 0.000 claims description 40
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 18
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 9
- 229910052731 fluorine Inorganic materials 0.000 claims description 9
- 239000011737 fluorine Substances 0.000 claims description 9
- 239000012528 membrane Substances 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 7
- 239000002002 slurry Substances 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 6
- 239000010419 fine particle Substances 0.000 claims description 6
- 229910052727 yttrium Inorganic materials 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 229910052684 Cerium Inorganic materials 0.000 claims description 3
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims description 3
- 150000004696 coordination complex Chemical class 0.000 claims description 3
- 239000002612 dispersion medium Substances 0.000 claims description 3
- 238000003682 fluorination reaction Methods 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 238000007751 thermal spraying Methods 0.000 claims description 3
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 claims description 3
- 239000012808 vapor phase Substances 0.000 claims description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 3
- 239000006104 solid solution Substances 0.000 claims description 2
- 230000004888 barrier function Effects 0.000 claims 1
- 239000006185 dispersion Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- -1 rare earth fluoride Chemical class 0.000 description 3
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006043012A JP2007217782A (ja) | 2006-02-20 | 2006-02-20 | 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006043012A JP2007217782A (ja) | 2006-02-20 | 2006-02-20 | 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007217782A JP2007217782A (ja) | 2007-08-30 |
| JP2007217782A5 true JP2007217782A5 (de) | 2009-01-15 |
Family
ID=38495378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006043012A Abandoned JP2007217782A (ja) | 2006-02-20 | 2006-02-20 | 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007217782A (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6034156B2 (ja) | 2011-12-05 | 2016-11-30 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
| JP5597840B2 (ja) * | 2012-01-18 | 2014-10-01 | トーカロ株式会社 | フッ化物膜被覆サーメット複合皮膜被覆部材およびその製造方法 |
| JP5495165B1 (ja) * | 2012-12-04 | 2014-05-21 | 日本イットリウム株式会社 | 溶射材料 |
| US11326253B2 (en) | 2016-04-27 | 2022-05-10 | Applied Materials, Inc. | Atomic layer deposition of protective coatings for semiconductor process chamber components |
| US9850573B1 (en) | 2016-06-23 | 2017-12-26 | Applied Materials, Inc. | Non-line of sight deposition of erbium based plasma resistant ceramic coating |
| US10186400B2 (en) | 2017-01-20 | 2019-01-22 | Applied Materials, Inc. | Multi-layer plasma resistant coating by atomic layer deposition |
| CN110382730B (zh) * | 2017-03-01 | 2022-09-23 | 信越化学工业株式会社 | 喷镀被膜、喷镀用粉、喷镀用粉的制造方法和喷镀被膜的制造方法 |
| US10755900B2 (en) | 2017-05-10 | 2020-08-25 | Applied Materials, Inc. | Multi-layer plasma erosion protection for chamber components |
| US11279656B2 (en) | 2017-10-27 | 2022-03-22 | Applied Materials, Inc. | Nanopowders, nanoceramic materials and methods of making and use thereof |
| US10443126B1 (en) | 2018-04-06 | 2019-10-15 | Applied Materials, Inc. | Zone-controlled rare-earth oxide ALD and CVD coatings |
| US11667575B2 (en) | 2018-07-18 | 2023-06-06 | Applied Materials, Inc. | Erosion resistant metal oxide coatings |
| US11180847B2 (en) | 2018-12-06 | 2021-11-23 | Applied Materials, Inc. | Atomic layer deposition coatings for high temperature ceramic components |
| US10858741B2 (en) | 2019-03-11 | 2020-12-08 | Applied Materials, Inc. | Plasma resistant multi-layer architecture for high aspect ratio parts |
| KR20220166331A (ko) * | 2020-04-14 | 2022-12-16 | 엔테그리스, 아이엔씨. | 이트륨 플루오라이드 막 및 이트륨 플루오라이드 막의 제조 및 사용 방법 |
-
2006
- 2006-02-20 JP JP2006043012A patent/JP2007217782A/ja not_active Abandoned
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