JP2007210079A - Workpiece carrying device and workpiece carrying method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece carrying device which quickly and easily adjusts a sucking position of a frame according to an external diameter of the frame to be adsorbed, and also to provide a workpiece carrying method. <P>SOLUTION: The workpiece carrying device is composed of a plurality of sucking sections 31 for sucking the frame F, and a direct acting moving mechanism 4 for adjusting locations of the sucking sections 31 by moving the sucking sections 31 in interlock with each other according to the size of the diameter of the frame F. Thus the workpiece carrying device can carry out simultaneous adjustment of all the sucking sections 31 by a single action. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a work transfer device and a work transfer method for transferring a work such as a semiconductor device or an electronic component.

  As shown in FIG. 4, the back surface of a workpiece, which is a plate-like object having a semiconductor device or electronic component formed on the front surface, is attached to a dicing tape S having an adhesive material on the upper surface. The workpiece W adhered to the dicing tape S is mounted on the frame F via the dicing tape S. The workpiece W mounted on the frame F is conveyed in the dicing apparatus, the die bonding apparatus, or between the apparatuses in this state, and various processes are performed by each apparatus. In general, the work W is transported by vacuum suction of the frame F (see, for example, Patent Document 1).

Conventionally, a workpiece transfer device that transfers a frame F on which a workpiece W is mounted has a transfer arm shown in FIG. The transfer arm is provided with a plurality of suction portions 71 on a transfer arm main body 70 connected to a moving mechanism (not shown). As shown in FIG. 5B, the suction portion 71 is provided with a suction pad 72 at the tip, and a tube 73 is connected thereto. The tube 73 is connected to a vacuum generation source (not shown). By operating the vacuum generation source, the suction unit 71 sucks and conveys the frame F with the pad 72.
JP-A-7-169716

  The workpieces conveyed by such a conveying device are processed with various outer diameter sizes. Therefore, it is necessary to change the outer diameter size of the frame according to the outer diameter size of the workpiece. However, in the conventional workpiece transfer device, the suction part is fixed to the arm body, and the arm body is also integrally fixed with a screw or the like, so when the outer diameter of the frame is changed, the arm body is replaced. Or, it was necessary to remove the suction part and change the mounting position.

  The present invention has been made for such a problem, and provides a workpiece transfer device and a workpiece transfer method capable of quickly and easily adjusting the suction position according to the outer diameter size of the frame to be sucked. It is aimed.

  In order to achieve the above object, according to the present invention, the invention according to claim 1 is configured such that a plurality of suction portions for sucking a frame on which a work is mounted and the suction portion are interlocked according to the size of the diameter of the frame. And a linear movement mechanism that adjusts the position of the suction portion by moving the suction portion.

  According to the first aspect of the present invention, the plurality of suction portions provided according to the outer diameter size of the frame are connected by the direct-acting moving mechanism. When the outer diameter size of the frame changes and any one of the plurality of suction portions is moved to a new position where the frame can be sucked, the other suction portions are also moved to a position where they can be sucked together.

  As a result, it is possible to move all the suction portions to a new position with one operation, and it is possible to quickly and easily change the position of the suction portion to the suction position corresponding to the outer diameter size of the frame. .

  According to a second aspect of the present invention, in the first aspect of the present invention, a moving direction in which the suction portion is moved by the moving mechanism is a radial direction of the frame.

  According to the second aspect of the present invention, even if the outer diameter size of the frame is largely changed by moving all the suction portions in the radial direction of the frame by one operation, the suction position of the suction portion can be set without being detached from the frame. It becomes possible to adjust according to the outer diameter of the frame.

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the moving mechanism includes a base, four guide grooves formed in the base and directed toward the center of the base, and the guides at both ends. A pair of arms having suction portions guided by the grooves, a guide member that is disposed in a direction orthogonal to the arms and guides the arms, and is provided on the guide member, and drives the pair of arms to perform the suction. And a drive mechanism for moving the portion in the center direction of the base so as to freely advance and retract.

  According to the third aspect of the present invention, the suction portions penetrating the base through the guide grooves formed toward the center of the base are provided at both ends of the pair of arms. The pair of arms are guided by the guide member and are provided so as to be able to contact and separate, and move in conjunction with the drive mechanism to simultaneously move the suction portion toward the center of the base.

  Thereby, when a pair of arms move in conjunction with each other, each suction portion moves along the groove at the same time. Therefore, it is possible to easily adjust the position of the suction portion to the suction position of the frame having a different outer diameter size by moving all the suction portions in the radial direction of the same frame as the center direction of the base by one operation. .

  According to a fourth aspect of the present invention, there is provided a workpiece transfer device that sucks and transports a frame on which a workpiece is mounted by a plurality of suction portions, and the linear motion type moving mechanism according to the size of the diameter of the frame. By moving the suction portion in the radial direction of the frame in conjunction with each other, the suction position of the suction portion is adjusted and the frame is sucked and conveyed.

  According to the fourth aspect of the present invention, the outer diameter of the work is changed by the transfer device provided with the plurality of suction portions that can move in the radial direction of the frame by the linear motion type moving mechanism. Even when the outer diameter is changed, it is possible to quickly and easily adjust all the suction portions to a new position by one operation.

  As described above, according to the workpiece transfer device and the workpiece transfer method of the present invention, the suction position can be quickly and easily adjusted according to the outer diameter size of the suction frame.

  Hereinafter, preferred embodiments of a workpiece transfer apparatus and a workpiece transfer method according to the present invention will be described in detail with reference to the accompanying drawings.

  First, the configuration of the dicing apparatus in which the work transfer apparatus according to the present invention is incorporated and the work transfer apparatus will be described. 1 is an overall perspective view of the dicing apparatus, FIG. 2 is a perspective view of the frame holding mechanism with a cover removed, and FIG. 3 is a top view and a side view of the frame holding mechanism.

  The dicing apparatus 10 is mounted in the vicinity of the spindles 11 and 11 with high-frequency motors, which are opposed to each other and have a blade 12 and a wheel cover (not shown) attached to the tip thereof, in order to process the workpiece. A microscope 13 for observing the workpiece and a work table 16 for sucking and holding the workpiece.

  In addition, the dicing apparatus 10 includes workpiece transfer devices 1 and 1 that transfer workpieces, a spinner (not shown) that spin-cleans the processed workpiece W, and a cassette 17 that stores a large number of workpieces mounted on a frame. An elevator 14 is provided as a load port for mounting.

  The blade 12 is rotated at a high speed from 30,000 rpm to 60,000 rpm by the spindle 11, and moves in the Y direction and the Z direction together with the spindle 11 by a moving shaft (not shown).

  The work table 16 holds the work W by suction, reciprocates in the X direction by a moving shaft (not shown), and rotates in the θ direction.

  The workpiece transfer device 1 is provided with a frame holding mechanism 2 covered with a cover 3 at the tip, and the frame holding mechanism 2 sucks the frame on which the workpiece is mounted to transfer the workpiece. The workpiece conveyance device 1 conveys a workpiece W without dirt before processing and after cleaning, and conveys the workpiece W with dirt after processing on the other side.

  The work W mounted on the frame F as shown in FIG. 4 is supplied from the cassette 17 to the dicing apparatus 10, and is conveyed onto the work table 16 by one work conveyance apparatus 1 and held by suction. The workpiece W held by suction is cut vertically and horizontally by the blade 12 rotating at high speed.

  The cut workpiece W is transferred to a spinner (not shown) by the other workpiece transfer device 1 to perform spinner cleaning, and is returned to the cassette 17 again.

  As shown in FIG. 2, the frame holding mechanism 2 provided at the tip of the workpiece transfer device 1 is provided with a moving mechanism 4 that adjusts the suction position for sucking the frame F. The moving mechanism 4 is provided with a guide 22 on a base 21 and includes arms 23A and 23B, a guide member 28, a block 24, and sliders 29 and 30.

  As a drive mechanism, the guide member 28 is provided with pulleys 25 and 25 connected to each other by a timing belt 26 at both ends, and sliders 30 and 30 are provided inside the pulleys 25 and 25. The arm 23A is attached to the timing belt 26 by the attachment block 27A on the S1 side of the timing belt 26, and the arm 23B is attached to the S2 side by the attachment block 27B. The arms 23A and 23B move linearly in the direction of arrow A shown in FIG. 2 by sliders 30 and 30 provided on the guide member 28, respectively.

  Thereby, for example, when the arm 23B is moved to the arm 23A side with the handle 32, the attachment block 27B moves and the timing belt 26 moves, and accordingly the attachment block 27A moves so as to approach the attachment block 27B. Then, the arm 23A also moves so as to approach the arm 23B. Conversely, when the arm 23B is moved in the direction opposite to the arm 23A, the arm 23A moves in the direction opposite to the arm 23B along with the movement.

  The arms 23A, 23B are provided with sliders 29, 29,. Each slider 29 is attached with a block 24 provided with a suction portion 31, and each block 24 moves linearly in the direction of arrow B.

  The suction portion 31 is connected to a vacuum generation source (not shown) by a tube 33 connected via a block 24, and is formed on the base 21 via a guide 22 provided on the upper surface of the base 21 in the radial direction of the base 21. The frame F is penetrated to the back side of the base 21 through the guide groove M, and the frame F is sucked by the suction pad 34 provided at the tip as shown in FIG.

  When the arms 23A and 23B move in the direction of arrow A, the suction unit 31 moves along the guide groove M by moving the block 24 in the direction of arrow B.

  Thereby, for example, when the arm 23B is moved to the arm 23A side with the handle 32, the arm 23A moves so as to approach the arm 23B, and each suction portion 31 moves along the guide groove M to the center of the base 21. Move at the same time to gather. Conversely, when the arm 23B is moved in the direction opposite to the arm 23A, the suction portions 31 simultaneously move along the guide groove M in the direction opposite to the direction when the arm 23B is moved toward the arm 23A. To do.

  Therefore, even when the outer diameter of the frame F is changed, it is possible to move all the suction portions 31 in the radial direction of the frame F by one operation and quickly and easily adjust to a new position.

  In the present embodiment, the movement of the suction portion 31 is described in a manual form in which the suction portion 31 is moved by holding the handle 32. However, the present invention is not limited to this, and the arms 23A and 23B or other movable portions are moved. It can also be carried out by automatic movement by a driving device such as an air cylinder.

  Next, the work conveying method according to the present invention will be described. In the dicing apparatus 10 shown in FIG. 1, the work W mounted on the frame F as shown in FIG. 4 is supplied from the cassette 17 to the dicing apparatus 10, and a frame holding mechanism provided at the tip of one work transfer apparatus 1. The frame F is sucked by 2 and conveyed onto the work table 16.

  At this time, for example, when the workpiece W is a circle having an outer diameter of 12 inches, the outer diameter of the frame F is also an outer diameter corresponding to the workpiece W of 12 inches, and the suction portion 31 is formed as shown in FIG. The frame F is sucked at the position P1 shown in FIG.

  When the workpiece W is changed to a circular shape having an outer diameter of 8 inches, the outer diameter of the frame F is also changed to an outer diameter corresponding to the workpiece W of 8 inches. At that time, the arm 23A is moved from the position Q1B shown in FIG. 3 to the position Q2B manually or by a driving device (not shown), so that the arm 23A moves from Q1A to Q2A. As the arms 23A and 23B move, the respective suction portions 31 move from the position P1 to the position P2 in conjunction with the movement of the arms 23A and 23B.

  As a result, the suction unit 31 moves in the radial direction of the frame F and is adjusted to a suction position for sucking the frame F corresponding to the 8-inch workpiece W.

  On the other hand, when the workpiece W is changed from the 8-inch workpiece W to the 12-inch workpiece W, by moving the arm 23B from the position Q2B to the position Q1B shown in FIG. Move from position to position P1.

  In this way, the suction position of the suction portion 31 is moved to a position suitable for the outer diameter of the frame F to suck the frame F.

  The work transported onto the work table 16 and sucked and mounted is diced by the rotating blade 12, and after dicing, the frame F is sucked by the frame holding mechanism 2 of the other work transport device 1, and a spinner (not shown) is drawn. The spinner cleaning is carried out, and then returned to the cassette 17 again.

  As described above, according to the workpiece transfer device and the workpiece transfer method according to the present invention, even if the size or shape of the workpiece is changed and the outer diameter size of the frame is changed, a simple mechanism can be used. It is possible to adjust all the suction portions to new suction positions by operation. As a result, the apparatus stop time for changing the position of the suction unit is shortened, the throughput is improved, and a single frame holding mechanism can handle frames of any size, so many parts are not required and the cost can be reduced. It becomes possible.

  In this embodiment, the case where the workpiece transfer device is mounted on the dicing device is described. However, the present invention is not limited to this, and can be suitably used for a bonding device, a transfer device that moves between devices, and the like. It is.

1 is a perspective view of a dicing apparatus equipped with a work transfer device according to the present invention. The perspective view of a frame holding mechanism in the state where the cover was removed. The top view and side view of a frame holding mechanism. The perspective view of the workpiece | work mounted in the flame | frame. The perspective view which showed the conventional frame holding mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Conveying device, 2 ... Frame holding mechanism, 3 ... Cover, 31, 71 ... Adsorption part, 10 ... Dicing device, 11 ... Spindle, 12 ... Blade, 13 ... Microscope, 14 ... Elevator, 16 ... Worktable, 17 ... Cassette, 21 ... Base, 22 ... Guide, 23A, 23B ... Arm, 24 ... Block, 25 ... Pulley, 26 ... Timing belt, 28 ... Guide member, 29, 30 ... Slider, 32 ... Handle, 33, 73 ... Tube, 34, 72 ... Suction pad, F ... Frame, M ... Guide groove, W ... Workpiece

Claims (4)

A plurality of suction parts for sucking the frame on which the workpiece is mounted;
A workpiece transfer apparatus comprising: a linear movement mechanism that adjusts the position of the suction portion by moving the suction portion in conjunction with each other according to the size of the diameter of the frame.   The workpiece transfer apparatus according to claim 1, wherein a moving direction in which the suction unit is moved by the moving mechanism is a radial direction of the frame. The moving mechanism includes a base,
Four guide grooves formed in the base and directed toward the center of the base;
A pair of arms having suction portions guided by the guide grooves at both ends;
A guide member arranged in a direction orthogonal to the arm and guiding the arm;
2. A drive mechanism provided on the guide member and configured to drive a pair of the arms to move the suction portion so as to advance and retreat in the center direction of the base. 2. The workpiece transfer apparatus according to 2. In a workpiece transfer device that sucks and transports a frame on which a workpiece is mounted by a plurality of suction units,
By moving the suction portion in the radial direction of the frame in accordance with the size of the frame diameter by a linear movement mechanism, the suction position of the suction portion is adjusted to suck the frame. A work conveying method characterized by conveying.

Images